Integrated circuit multi-site test calibration method, device, tester and test system

Abstract

The application relates to the technical field of integrated circuit testing, and particularly discloses an integrated circuit multi-station testing calibration method, which comprises the following steps: when a first station is determined as a credible station according to a calibration ball, a credible testing value of the first station is determined according to a testing result of an integrated circuit to be tested on the first station, wherein the calibration ball is a finished product circuit corresponding to the integrated circuit to be tested, the first station is any one of N stations, and N is a natural number greater than 1; testing data of the integrated circuit to be tested after the same testing item is tested on N-1 stations except the first station is obtained; and the testing data of the integrated circuit to be tested on each station of the N-1 stations is compared with the credible testing value to obtain a compensation value corresponding to each station. The application further discloses an integrated circuit multi-station testing calibration device, a testing machine and an integrated circuit testing system. The integrated circuit multi-station testing calibration method provided by the application effectively improves the calibration efficiency.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit testing technology, and in particular to an integrated circuit multi-station testing and calibration method, an integrated circuit multi-station testing and calibration device, a testing machine, and an integrated circuit testing system. Background Technology

[0002] For integrated circuit testing, critical parameters must be tested accurately; otherwise, the test is meaningless. However, differences in testing equipment and peripheral hardware inevitably introduce systematic errors into the entire testing system. These systematic errors can lead to inaccurate test values, causing serious production quality incidents. Therefore, system calibration is necessary before mass production. Currently, in integrated circuit mass production testing, pre-test calibration is performed manually by engineers. Data comparisons between different workstations are manually collected, calculated, and then manually compensated in the testing program to avoid inaccurate measurements and mismeasurements. However, manual calibration has the following problems:

[0003] (1) The calibration time is long. Manual calibration takes 20 minutes each time, while multiple products need to be tested every day, which seriously affects the efficiency of production racking.

[0004] (2) Manual calibration is uncertain and limited by the experience and judgment of relevant personnel. Calibration may be erroneous and affect production quality.

[0005] (3) It is not conducive to standardized production management. Manual calibration work cannot be audited, which is not conducive to standardized production processes.

[0006] To address the problems associated with manual calibration, there is an urgent need to design a highly efficient calibration method to ensure production capacity and quality. Summary of the Invention

[0007] This invention provides a multi-station test and calibration method, a multi-station test and calibration device, a test machine, and an integrated circuit test system for integrated circuits, solving the problem of low efficiency of manual calibration in related technologies.

[0008] As a first aspect of the present invention, a multi-station test and calibration method for integrated circuits is provided, comprising:

[0009] When the first station is determined to be a reliable station based on the calibration ball, the reliable test value of the first station is determined based on the test result of the integrated circuit under test at the first station. The first station is any one of N stations, where N is a natural number greater than 1.

[0010] Obtain test data of the integrated circuit under test after performing the same test item test on N-1 stations excluding the first station;

[0011] The test data of the integrated circuit under test at each of the N-1 workstations are compared with the reliable test value to obtain the compensation value corresponding to each workstation. The compensation value corresponding to each workstation is used to compensate the test data of the integrated circuit under test at that workstation.

[0012] Furthermore, including:

[0013] The test results of the calibration ball at the first station are used to determine whether the first station is a reliable station.

[0014] Furthermore, based on the test results of the calibration ball at the first station, it is determined whether the first station is a reliable station, including:

[0015] Obtain the test results of the calibration ball at the first station;

[0016] When the test result of the calibration ball at the first station meets the preset requirements, the first station is determined to be a reliable station.

[0017] Furthermore,

[0018] Determining whether the first station is a reliable station based on the test results of the calibration ball at the first station also includes:

[0019] The test results of the calibration ball at the first station are compared with the standard data of the calibration ball.

[0020] If the difference between the test result of the calibration ball at the first station and the standard data of the calibration ball is within the allowable error range, then the test result of the calibration ball at the first station is determined to meet the preset requirements.

[0021] Furthermore, if the difference between the test result of the calibration ball at the first station and the standard data of the calibration ball is not within the allowable error range, a warning message will be issued.

[0022] Furthermore, the test data of the integrated circuit under test at each of the N-1 workstations are compared with the reliable test value to obtain the compensation value corresponding to each workstation, including:

[0023] The integrated circuit under test is tested at each of the N-1 workstations, and the test data of the integrated circuit under test at each workstation is obtained.

[0024] The test data of the integrated circuit under test at each station is compared with the reliable test value to obtain the difference between the test data of the integrated circuit under test at each station and the reliable test value, and the difference is used as the compensation value corresponding to each station.

[0025] As another aspect of the present invention, an integrated circuit multi-station test and calibration apparatus is provided for implementing the integrated circuit multi-station test and calibration method described above, wherein the apparatus includes:

[0026] The reliable test value determination module is used to determine the reliable test value of the first station based on the test result of the integrated circuit under test at the first station when the first station is determined to be a reliable station based on the calibration ball. The calibration ball is the finished circuit corresponding to the integrated circuit under test, and the first station is any one of N stations, where N is a natural number greater than 1.

[0027] The acquisition module is used to acquire test data of the integrated circuit under test after performing the same test item on the same integrated circuit under test at N-1 stations excluding the first station;

[0028] The compensation value acquisition module is used to compare the test data of the integrated circuit under test at each of the N-1 workstations with the reliable test value to obtain the compensation value corresponding to each workstation, wherein the compensation value corresponding to each workstation is used to compensate the test data of the integrated circuit under test at that workstation.

[0029] As another aspect of the present invention, a testing machine is provided, wherein the multi-station integrated circuit testing and calibration device described above is included.

[0030] In another aspect, an integrated circuit testing system is provided, comprising: a circuit board, a probe station, and the aforementioned testing machine, wherein both the testing machine and the probe station are connected to the circuit board.

[0031] The board is used to provide the peripheral circuitry required for testing the integrated circuit under test.

[0032] The probe station is used to support the integrated circuit under test;

[0033] The testing machine is used to perform testing on the integrated circuit under test at each station and to compensate for the test data obtained by the integrated circuit under test at each station.

[0034] The integrated circuit multi-station test and calibration method provided by this invention determines the reliability of a station by testing a calibration ball, and determines the reliable test value by testing the integrated circuit under test at the reliable station. Then, by comparing the test data of the same integrated circuit under test at each station with the reliable test value, the compensation value of each station is obtained. This enables fully automated mass production test and calibration of circuits at multiple stations, greatly improving production efficiency and quality, promoting the standardization of integrated circuit production, and providing a good software foundation for the research and development of integrated circuit testing technology. Attached Figure Description

[0035] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the following detailed description to explain the invention, but do not constitute a limitation thereof. In the drawings:

[0036] Figure 1 The flowchart illustrates the multi-station testing and calibration method for integrated circuits provided by this invention.

[0037] Figure 2 This is a schematic diagram of the packaged pins of the calibration ball corresponding to the synchronous rectification circuit provided by the present invention. Detailed Implementation

[0038] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0039] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0040] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of the invention described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0041] This embodiment provides a multi-station test and calibration method for integrated circuits. Figure 1 This is a flowchart of a multi-station test and calibration method for integrated circuits provided according to an embodiment of the present invention, such as... Figure 1 As shown, it includes:

[0042] S110. When the first station is determined to be a reliable station based on the calibration ball, the reliable test value of the first station is determined based on the test result of the integrated circuit under test at the first station, wherein the calibration ball is the finished circuit corresponding to the integrated circuit under test, and the first station is any one of N stations, where N is a natural number greater than 1.

[0043] In this embodiment of the invention, multi-station batch testing can be used when testing integrated circuits, which can effectively improve testing efficiency. Before testing, each station needs to be calibrated to obtain the compensation value corresponding to each station. In subsequent batch testing of integrated circuits, the compensation value corresponding to each station can be compensated into the test data of the integrated circuits.

[0044] Specifically, including:

[0045] The test results of the calibration ball at the first station are used to determine whether the first station is a reliable station.

[0046] More specifically, determining whether the first station is a reliable station based on the test results of the calibration ball at the first station includes:

[0047] Obtain the test results of the calibration ball at the first station;

[0048] When the test result of the calibration ball at the first station meets the preset requirements, the first station is determined to be a reliable station.

[0049] Furthermore, determining whether the first station is a reliable station based on the test results of the calibration ball at the first station also includes:

[0050] The test results of the calibration ball at the first station are compared with the standard data of the calibration ball.

[0051] If the difference between the test result of the calibration ball at the first station and the standard data of the calibration ball is within the allowable error range, then the test result of the calibration ball at the first station is determined to meet the preset requirements.

[0052] If the difference between the test result of the calibration ball at the first station and the standard data of the calibration ball is not within the allowable error range, a warning will be issued.

[0053] For example, if N is 10 and the calibration balls are arranged in a certain order (e.g., from left to right, or from top to bottom), the ball at one end is usually designated as the first station. The calibration ball is tested at this first station to obtain the test results. These results are then compared to the standard data for the calibration ball. The difference between the two is determined to be within the allowable error range. If it is within the allowable error range, the test results at the first station are considered to meet the preset requirements, and the first station is thus identified as a reliable station. Conversely, if the preset requirements are not met, the station is not considered reliable, and a warning is issued.

[0054] The integrated circuit under test is then tested at the first station, which is determined to be a reliable station. The test results are obtained, and the test results of the integrated circuit under test at the first station are determined as reliable test values. The test results of the calibration ball at the first station are also determined as reliable test values.

[0055] In this embodiment of the invention, the warning message may specifically take the form of a pop-up warning.

[0056] It should be noted that the calibration ball is specifically the packaged product form of the integrated circuit under test, that is, a qualified integrated circuit product.

[0057] like Figure 2 The diagram shown is a pinout of a synchronous rectification circuit. This packaged product is used as a calibration ball for testing. The integrated circuits under test in these embodiments of the invention are all unpackaged circuits located on a silicon wafer.

[0058] In addition, the calibration ball standard data are standard values ​​set according to the product requirements of the integrated circuit under test. Different integrated circuit products under test can be set according to their needs, and there is no limitation here.

[0059] S120. Obtain test data of the integrated circuit under test after performing the same test item test on N-1 stations excluding the first station;

[0060] In this embodiment of the invention, for example, if N is 10, the same integrated circuit under test will be tested with the same test items on the remaining 9 workstations, and the corresponding test data will be obtained.

[0061] S130. The test data of the integrated circuit under test at each of the N-1 workstations are compared with the reliable test value to obtain the compensation value corresponding to each workstation, wherein the compensation value corresponding to each workstation is used to compensate the test data of the integrated circuit under test at that workstation.

[0062] In specific embodiments of the present invention, it may include:

[0063] The integrated circuit under test is tested at each of the N-1 workstations, and the test data of the integrated circuit under test at each workstation is obtained.

[0064] The test data of the integrated circuit under test at each station is compared with the reliable test value to obtain the difference between the test data of the integrated circuit under test at each station and the reliable test value, and the difference is used as the compensation value corresponding to each station.

[0065] It should be understood that the test data of the same integrated circuit under test at each station is compared with the reliable test value obtained above to obtain the difference between the test data at each station and the reliable test value, and this difference is used as the compensation value corresponding to each station.

[0066] After saving the compensation value obtained from each workstation, the test results can be compensated by calling the compensation value during subsequent batch testing of integrated circuits, thus obtaining accurate test data.

[0067] In summary, the multi-station test and calibration method for integrated circuits provided in this invention determines the reliability of a station by testing a calibration ball, and determines a reliable test value by testing the integrated circuit under test at a reliable station. Then, by comparing the test data of the same integrated circuit under test at each station with the reliable test value, the compensation value of each station is obtained. This enables fully automated mass production test and calibration of multi-station circuits, greatly improving production efficiency and quality, promoting the standardization of integrated circuit production, and providing a good software foundation for the research and development of integrated circuit testing technology.

[0068] In addition, it should be noted that this integrated circuit multi-station testing and calibration method shortens the single calibration time. By replacing manual operation with computer software calibration, the calibration time is reduced from 20 minutes to less than 5 minutes, which greatly improves the efficiency of the production calibration steps and frees personnel from repetitive and tedious calibration work. It can avoid the risk of misoperation in manual calibration and improve production quality. Furthermore, the standardization of production calibration work can be achieved through the solidification of procedures and procedure review.

[0069] As another embodiment of the present invention, an integrated circuit multi-station test and calibration apparatus is provided for implementing the integrated circuit multi-station test and calibration method described above, wherein:

[0070] The reliable test value determination module is used to determine the reliable test value of the first station based on the test result of the integrated circuit under test at the first station when the first station is determined to be a reliable station based on the calibration ball. The calibration ball is the finished circuit corresponding to the integrated circuit under test, and the first station is any one of N stations, where N is a natural number greater than 1.

[0071] The acquisition module is used to acquire test data of the integrated circuit under test after performing the same test item test on N-1 stations excluding the first station;

[0072] The compensation value acquisition module is used to compare the test data of the integrated circuit under test at each of the N-1 workstations with the reliable test value to obtain the compensation value corresponding to each workstation, wherein the compensation value corresponding to each workstation is used to compensate the test data of the integrated circuit under test at that workstation.

[0073] The specific working principle of the integrated circuit multi-station test and calibration device provided in this embodiment of the invention can be referred to the description of the integrated circuit multi-station test and calibration method above, and will not be repeated here.

[0074] As another embodiment of the present invention, a testing machine is provided, which includes the integrated circuit multi-station testing and calibration device described above.

[0075] It should be understood that the test machine is used to test integrated circuits. During testing, accurate test data of the integrated circuit can be obtained by calling the compensation value obtained above.

[0076] As another embodiment of the present invention, an integrated circuit testing system is provided, comprising: a circuit board, a probe station, and the aforementioned testing machine, wherein both the testing machine and the probe station are connected to the circuit board.

[0077] The board is used to provide the peripheral circuitry required for testing the integrated circuit under test.

[0078] The probe station is used to support the integrated circuit under test;

[0079] The testing machine is used to perform testing on the integrated circuit under test at each station and to compensate for the test data obtained by the integrated circuit under test at each station.

[0080] In this embodiment of the invention, the specific workflow of the aforementioned integrated circuit multi-station test and calibration device running on the test machine is as follows:

[0081] The first step, after the test system is installed, is to use a calibration ball to perform tests at one of the workstations, obtain the relevant test data for the calibration ball, and output it to a specified path on the computer in TXT format. The data includes the test item name, test value, and number of tests. Users can specify multiple parameters that need to be calibrated in the software as needed.

[0082] The second step is to automatically verify whether the calibration ball test data is within the allowable error range. If any abnormality is found, a pop-up warning will be issued, indicating that the current system calibration ball test value is unreasonable and requires confirmation from the production line engineer. If the test is normal, no pop-up will appear. The standard calibration ball data and allowable error range are pre-set in the software according to the production management process.

[0083] The third step is to test the same integrated circuit under test at all stations if the calibration ball test data is normal, indicating that the test value at the current station is reliable. Then, test the same integrated circuit under test at all stations to generate test data for each station's calibration test items.

[0084] The fourth step is to calculate the compensation value required for each workstation. Specifically, the first workstation is designated as the reliable workstation. Then, the test data of the integrated circuit under test from the first workstation is determined as the reliable test value. The test data of the remaining N-1 workstations are compared with the reliable test value. The difference between the N-1 workstations is used as the compensation value required for each workstation, and a compensation value data file is generated in TXT format. If the difference between workstations is too large, the software will pop up a warning indicating that the maximum allowable deviation has been exceeded. The allowable deviation range is set according to the production management process.

[0085] The fifth step involves the mass production test program calling the compensation value data file to compensate the test values ​​for each calibration test item at each workstation, thus forming a mass production test program that meets the test standards.

[0086] The above methods enable fully automated mass production testing and calibration of integrated circuits at multiple workstations, greatly improving production efficiency and quality, and promoting the standardization of integrated circuit production.

[0087] The working principle of the integrated circuit testing system provided in this embodiment of the invention can be further described in the preceding description of the integrated circuit multi-station testing and calibration method, and will not be repeated here.

[0088] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A multi-station testing and calibration method for integrated circuits, characterized in that, include: When the first station is determined to be a reliable station based on the calibration ball, the reliable test value of the first station is determined based on the test result of the integrated circuit under test at the first station. The calibration ball is the finished circuit corresponding to the integrated circuit under test, and the first station is any one of N stations, where N is a natural number greater than 1. Obtain test data of the integrated circuit under test after performing the same test item test on N-1 stations excluding the first station; The test data of the integrated circuit under test at each of the N-1 workstations are compared with the reliable test value to obtain the compensation value corresponding to each workstation. The compensation value corresponding to each workstation is used to compensate the test data of the integrated circuit under test at that workstation. This includes: Determine whether the first station is a reliable station based on the test results of the calibration ball at the first station; The determination of whether the first station is a reliable station based on the test results of the calibration ball at the first station includes: Obtain the test results of the calibration ball at the first station; When the test result of the calibration ball at the first station meets the preset requirements, the first station is determined to be a reliable station. The process of determining whether the first station is a reliable station based on the test results of the calibration ball at the first station also includes: The test results of the calibration ball at the first station are compared with the standard data of the calibration ball. If the difference between the test result of the calibration ball at the first station and the standard data of the calibration ball is within the allowable error range, then the test result of the calibration ball at the first station is determined to meet the preset requirements. If the difference between the test result of the calibration ball at the first station and the standard data of the calibration ball is not within the allowable error range, a warning will be issued.

2. The integrated circuit multi-station test and calibration method according to claim 1, characterized in that, The test data of the integrated circuit under test at each of the N-1 workstations are compared with the reliable test value to obtain the compensation value corresponding to each workstation, including: The integrated circuit under test is tested at each of the N-1 workstations, and the test data of the integrated circuit under test at each workstation is obtained. The test data of the integrated circuit under test at each station is compared with the reliable test value to obtain the difference between the test data of the integrated circuit under test at each station and the reliable test value, and the difference is used as the compensation value corresponding to each station.

3. An integrated circuit multi-station test and calibration apparatus, used to implement the integrated circuit multi-station test and calibration method according to any one of claims 1 to 2, characterized in that, include: The reliable test value determination module is used to determine the reliable test value of the first station based on the test result of the integrated circuit under test at the first station when the first station is determined to be a reliable station based on the calibration ball. The calibration ball is the finished circuit corresponding to the integrated circuit under test, and the first station is any one of N stations, where N is a natural number greater than 1. The acquisition module is used to acquire test data of the integrated circuit under test after performing the same test item on the same integrated circuit under test at N-1 stations excluding the first station; The compensation value acquisition module is used to compare the test data of the integrated circuit under test at each of the N-1 workstations with the reliable test value to obtain the compensation value corresponding to each workstation, wherein the compensation value corresponding to each workstation is used to compensate the test data of the integrated circuit under test at that workstation.

4. A testing machine, characterized in that, Includes the integrated circuit multi-station test and calibration device as described in claim 3.

5. An integrated circuit testing system, characterized in that, include: The circuit board, the probe station, and the testing machine as described in claim 4, wherein both the testing machine and the probe station are connected to the circuit board. The board is used to provide the peripheral circuitry required for testing the integrated circuit under test. The probe station is used to support the integrated circuit under test; The testing machine is used to perform testing on the integrated circuit under test at each station and to compensate for the test data obtained by the integrated circuit under test at each station.

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