A communication fault handling method and its connector assembly

Abstract

This invention discloses a communication fault handling method and its connector assembly, belonging to the field of semiconductor manufacturing. The assembly includes a power pin, a resistor pin, a voltage input pin, and a ground pin; the power pin receives a target voltage; the resistor pin is connected to a target resistor; and the voltage input pin receives a zero-volt voltage. By adjusting the voltage and resistance of the torque sensor to the target voltage and resistance respectively, inputting the target voltage at the power pin, connecting the resistor pin to the target resistor, and inputting a zero-volt voltage at the voltage input pin, the communication fault status of the photomask transmission unit is determined based on the return value of the torque sensor. This enables monitoring of the torque sensor's communication status and feedback of the internal circuitry through the torque sensor's return value, thereby solving the problem of interference with the internal circuitry signal transmission of the torque sensor caused by the long-term rotation of the gripper device in related technologies.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and in particular to a communication fault handling method and its connector assembly. Background Technology

[0002] Exposure machines require wafers and photomasks when exposing wafers, and the transfer of photomasks is mainly accomplished by robotic arms.

[0003] The robotic arm mainly consists of a photomask stage and a gripper device. The photomask stage is used to raise and lower the photomask compartment so that the gripper device can enter the photomask compartment to retrieve the photomask and transfer the photomask from the photomask stage to the location where the photomask is during exposure.

[0004] When the machine is calibrated to each unit position, it needs to collide with the frame through the gripper device. The torque sensor detects the magnitude of the force to record the machine's coordinate position. Because the gripper device rotates frequently, the part of the wire passing through the gripper device is subjected to back-and-forth twisting force, which damages the internal shielding layer of the torque sensor connection wire. The shielding layer fails to protect the communication line from the influence of external electromagnetic fields, which causes interference to the signal transmission of the internal circuit of the torque sensor, resulting in a communication failure. The machine controller then shuts down and stops all machine movements. Summary of the Invention

[0005] This invention provides a communication fault handling method and its connector assembly, which can solve the problem of interference with the transmission signal of the internal circuit of the torque sensor caused by long-term rotation of the gripper device in related technologies. The technical solution is as follows:

[0006] On one hand, embodiments of the present invention provide a connector assembly for handling communication faults, the assembly comprising: a power pin, a resistor pin, a voltage input pin, and a ground pin;

[0007] The power pin is input with a target voltage, which is determined based on the voltage at the torque sensor.

[0008] The resistor pin is connected to a target resistor, which is determined based on the resistance at the torque sensor.

[0009] The voltage input pin receives a zero-volt voltage.

[0010] On the other hand, embodiments of the present invention provide a communication fault handling method, the method being used in the aforementioned communication fault handling connector assembly, the method comprising:

[0011] The voltage and resistance of the torque sensor are adjusted to the target voltage and the target resistance, respectively.

[0012] The target voltage is input at the power pin; the target resistor is connected to the resistance pin; the zero-volt voltage is input at the voltage input pin; and the ground pin is grounded.

[0013] When receiving normal operating voltage, the communication failure status of the photomask transmission unit is determined based on the return value of the torque sensor.

[0014] The technical effects of this invention are as follows:

[0015] This invention provides a communication fault handling method and its connector assembly, which includes a power pin, a resistance pin, a voltage input pin, and a ground pin. The power pin receives a target voltage, determined based on the voltage at the torque sensor. The resistance pin is connected to a target resistor, determined based on the resistance at the torque sensor. The voltage input pin receives a zero-volt voltage. By adjusting the voltage and resistance of the torque sensor to the target voltage and resistance, inputting the target voltage at the power pin, connecting the resistance pin to the target resistor, and inputting a zero-volt voltage at the voltage input pin, the communication fault status of the photomask transmission unit is determined based on the return value of the torque sensor. This enables monitoring of the torque sensor's communication status and directly feedback of the internal circuitry through the torque sensor's return value, thereby solving the problem of signal interference in the internal circuitry of the torque sensor caused by the long-term rotation of the gripper device in related technologies. Attached Figure Description

[0016] Figure 1 A schematic diagram of a connector assembly for handling communication faults, as illustrated in an exemplary embodiment of the present invention, is shown.

[0017] Figure 2 It shows Figure 1 Schematic diagram of the distribution of medium voltage input pins;

[0018] Figure 3 An exemplary embodiment of the present invention illustrates a communication fault handling method. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the present invention clearer, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0020] In this article, "multiple" refers to two or more. "And / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. The character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0021] It should be noted that in this application, "force peak" is defined as the peak value of force, and "torque peak" is defined as the peak value of torque.

[0022] Please refer to Figure 1 The diagram illustrates a structural schematic of a connector assembly for handling communication faults, as shown in an exemplary embodiment of the present invention.

[0023] like Figure 1 As shown, the component includes power pins (1 and 2), resistor pins (1, 2, 8 and 15), voltage input pins (3, 4, 5, 6, 7, 8, 10, 11, 12, 13, 14 and 15) and ground pin (9).

[0024] The power supply pin is input with a target voltage, which is determined based on the voltage at the torque sensor. In one possible implementation, the target voltage is 15V.

[0025] The resistor pin is connected to a target resistor, which is determined based on the resistance at the torque sensor. In one possible implementation, the target resistor is an 1100-ohm resistor.

[0026] In addition, the voltage input pin is connected to a zero-volt voltage.

[0027] like Figure 1 As shown, the resistor pins consist of two sets: one set of resistor pins is parallel to the ground pin, and the other set of resistor pins is parallel to the power pin.

[0028] Furthermore, such as Figure 2 As shown, the voltage input pins include six sets of differential signals for input to the connector assembly. Specifically, the voltage input pins are divided into a force peak pin group and a torque peak pin group. (Reference) Figure 1 The force peak pin group is placed alongside the power pin group, and the Torque peak pin group is placed alongside the ground pin group.

[0029] The force peak pin group consists of the X force peak pin, the Y force peak pin, and the Z force peak pin; the Torque peak pin group consists of the X Torque peak pin, the Y Torque peak pin, and the Z Torque peak pin.

[0030] Specifically, the voltage input pins include six sets of differential signals. For example... Figure 2As shown, pin 3 is X forcepeak+, pin 4 is X forcepeak-, pin 5 is Y forcepeak+, pin 6 is Y forcepeak-, pin 7 is Z forcepeak+, pin 8 is Z forcepeak-; pin 10 is X Torque peak+, pin 11 is X Torquepeak-, pin 12 is Y Torque peak+, pin 13 is Y Torque peak-, pin 14 is Z Torque peak+, and pin 15 is Z Torque peak-.

[0031] For the corresponding information, please refer to [link / reference]. Figure 3 This illustration shows a communication fault handling method according to an exemplary embodiment of the present invention, used for the aforementioned communication fault handling connector assembly, the method comprising:

[0032] Step 301: Adjust the voltage and resistance of the torque sensor to the target voltage and target resistance, respectively.

[0033] In one possible implementation, if the target voltage is 15V and the target resistance is 1100 ohms, then the voltage and resistance of the torque sensor are adjusted to 15V and 1100 ohms, respectively.

[0034] Step 302: Input the target voltage at the power supply pin.

[0035] Correspondingly, a 15-volt voltage is input at the power pin.

[0036] Step 303: Connect the resistor pins to the target resistor.

[0037] Correspondingly, the resistor pin is connected to an 1100-ohm resistor.

[0038] Step 304: Input zero volts to the voltage input pin.

[0039] Optionally, the voltage input pins are divided into a force peak pin group and a torque peak pin group. The force peak pin group consists of X force peak pins, Y force peak pins and Z force peak pins, and the torque peak pin group consists of X torque peak pins, Y torque peak pins and Z torque peak pins.

[0040] In one possible implementation, the force peak pin group and the Torque peak pin group are input with a zero-volt voltage.

[0041] Step 305: Ground the grounding pin.

[0042] Step 306: Under normal operating voltage conditions, determine the communication failure status of the photomask transmission unit based on the return value of the torque sensor.

[0043] In one possible implementation, when receiving a normal operating voltage, if the torque sensor returns a value of zero, it is determined that the photomask transmission unit is communicating well. The basis for this determination is that, under operating voltage and when the torque sensor is not under force, its output voltage is zero volts. If the torque sensor returns a value of zero, it indicates that the internal circuitry's signal transmission is not interfered with, thus confirming that the photomask transmission unit is communicating well.

[0044] In summary, this invention provides a communication fault handling method and its connector assembly. The assembly includes a power pin, a resistance pin, a voltage input pin, and a ground pin. The power pin receives a target voltage, determined based on the voltage at the torque sensor. The resistance pin is connected to a target resistor, determined based on the resistance at the torque sensor. The voltage input pin receives a zero-volt voltage. By adjusting the voltage and resistance of the torque sensor to the target voltage and resistance respectively, inputting the target voltage at the power pin, connecting the resistance pin to the target resistor, and inputting a zero-volt voltage at the voltage input pin, the communication fault status of the photomask transmission unit is determined based on the return value of the torque sensor. This enables monitoring of the torque sensor's communication status and directly feedback of the internal circuitry through the torque sensor's return value, thereby solving the problem of signal interference in the internal circuitry of the torque sensor caused by the long-term rotation of the gripper device in related technologies.

[0045] The above description is merely an optional embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A connector assembly for handling communication faults, characterized in that, The component includes: a power pin, a resistor pin, a voltage input pin, and a ground pin; The power pin is input with a target voltage, which is determined based on the voltage at the torque sensor. The resistor pin is connected to a target resistor, which is determined based on the resistance at the torque sensor. The resistor pins include two sets; One set of resistor pins is arranged side by side with the ground pins, and another set of resistor pins is arranged side by side with the power pins; The voltage input pins are divided into a force peak pin group and a Torque peak pin group; The force peak pin group is arranged side by side with the power supply pin group, and the Torque peak pin group is arranged side by side with the ground pin group; The voltage input pin receives a zero-volt voltage.

2. The connector assembly for handling communication faults according to claim 1, characterized in that, The force peak pin group consists of X force peak pins, Y force peak pins and Z force peak pins; The Torque peak pin group consists of the X Torque peak pin, the Y Torque peak pin, and the Z Torque peak pin.

3. The connector assembly for handling communication faults according to claim 1, characterized in that, The target voltage is 15V.

4. The connector assembly for handling communication faults according to claim 1, characterized in that, The target resistance is 1100 ohms.

5. A communication fault handling method, characterized in that, The method is used in the connector assembly for handling communication faults according to any one of claims 1 to 4, the method comprising: The voltage and resistance of the torque sensor are adjusted to the target voltage and the target resistance, respectively. The target voltage is input at the power pin; the target resistor is connected to the resistance pin; the zero-volt voltage is input at the voltage input pin; and the ground pin is grounded. When receiving normal operating voltage, the communication failure status of the photomask transmission unit is determined based on the return value of the torque sensor.

6. The method according to claim 5, characterized in that, The voltage and resistance of the adjustable torque sensor are the target voltage and the target resistance, respectively, including: Adjust the voltage and resistance of the torque sensor to 15 volts and 1100 ohms, respectively; The target voltage is input at the power pin, including: The 15-volt voltage is input at the power pin; The resistor pin is connected to the target resistor, including: The resistor pin is connected to the 1100-ohm resistor.

7. The method according to claim 5, characterized in that, Under the condition of receiving normal operating voltage, the communication failure status of the photomask transmission unit is determined based on the return value of the torque sensor, including: If the torque sensor returns a value of zero when the normal operating voltage is received, it is determined that the photomask transmission unit is communicating well.

8. The method according to claim 5, characterized in that, The voltage input pin receives the zero-volt voltage, including: The zero-volt voltage is input to the force peak pin group and the Torque peak pin group, wherein the force peak pin group consists of X force peak pin, Y force peak pin and Z force peak pin, and the Torque peak pin group consists of X Torque peak pin, Y Torque peak pin and Z Torque peak pin.

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