Diaphragm pump for delivering a fluid
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- PROMINENT GMBH
- Filing Date
- 2022-03-14
- Publication Date
- 2026-06-30
Smart Images

Figure CN115111144B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a diaphragm pump for conveying fluids, a method for starting the diaphragm pump for conveying fluids, and the use of the diaphragm pump for conveying fluids. Background Technology
[0002] Hydraulically driven diaphragm pumps are known for their use in conveying fluids. Such pumps consist of a metering head and a hydraulic block connected to each other, forming a cavity between them. A diaphragm divides this cavity into a hydraulic chamber and a delivery chamber. During operation, the delivery chamber is connected to a suction line via a suction check valve and to a pressure line via a pressure check valve.
[0003] During the suction stroke, the diaphragm is moved to the position with the largest delivery chamber volume, allowing the fluid to be delivered to be drawn into the delivery chamber from the suction line through the suction check valve. In the subsequent pressure stroke, the diaphragm is moved to the position with the smallest delivery chamber volume. This closes the suction check valve, thereby pressurizing the delivery chamber until the pressure check valve opens, forcing fluid into the pressure line.
[0004] To drive the diaphragm, the diaphragm pump includes a displacement element. This displacement element is in fluid communication with a hydraulic chamber filled with working fluid. During pump operation, the amount of working fluid in the hydraulic chamber may decrease, particularly due to leakage. Therefore, the hydraulic chamber is connected to a reservoir filled with working fluid via a leakage compensation valve to compensate for the associated losses.
[0005] However, if the diaphragm pump malfunctions, for example due to a blockage in the suction line, excessive working fluid may be added from the reservoir into the hydraulic chamber. Due to the increased amount of working fluid in the hydraulic chamber, the diaphragm deflects more violently during pressure strokes than during normal operation, especially when it deflects into contact with the inlet of the suction or pressure line, potentially causing diaphragm perforation. In the worst case, this may necessitate diaphragm replacement, meaning the diaphragm pump must be taken out of service. This diaphragm replacement is laborious because the diaphragm pump must be removed from the integrated handling system. Summary of the Invention
[0006] Therefore, the object of the present invention is to provide a diaphragm pump for conveying fluids, which has a lower risk of diaphragm perforation.
[0007] This objective is achieved by a diaphragm pump according to the present invention.
[0008] The diaphragm pump according to the invention includes a metering head and a hydraulic block, which are connected to each other and form a cavity therebetween. This cavity is divided into a hydraulic chamber and a delivery chamber, the delivery chamber having a volume V. FR The hydraulic chamber is filled with a volume of V HR, AThe working fluid includes a movable, guided, and drivable displacement element.
[0009] The displacement element is in fluid communication with the hydraulic chamber, thus pulsating working fluid pressure can be generated by reciprocating its movement. During and between diaphragm pump operation intervals, the displacement element preferably reciprocates exclusively between two maximum deflection positions. Therefore, the volume V... VE The working fluid is discharged, and the diaphragm reciprocates between the pressurized and suction positions via the movement of the displacement element to deliver fluid from the suction port to the pressure port. Delivery chamber volume V FR The pressure application location is V. FR, min Smaller than the delivery chamber volume V at the suction position FR, max .
[0010] The diaphragm pump also includes a reservoir filled with a volume of V. RE, A The working fluid is connected to the hydraulic chamber via a leakage compensation valve. If the diaphragm is in the suction position, the pressure in the hydraulic chamber is less than a predetermined minimum value p. Min When the leakage compensation valve opens, working fluid is added from the reservoir to the hydraulic chamber. This ensures that working fluid losses in the hydraulic chamber are compensated during pump operation. The displacement element is preferably guided through the reservoir so that any working fluid leakage can be returned to the reservoir via the movement of the displacement element.
[0011] The diaphragm pump according to the present invention is characterized in that, compared with hydraulically driven diaphragm pumps known in the prior art, the volume (V) of the working fluid filled in its reservoir is [not specified]. RE,A The volume of the delivery chamber (V) is finite, meaning it is at most equivalent to the volume of the delivery chamber at the pressure application location. FR, min This can reduce the risk of diaphragm perforation.
[0012] In a preferred embodiment of the present invention, V RE,A < V FR, min More preferably V RE,A < V FR, min Even better V RE,A < V FR, min Optimal V RE,A < V FR, min .
[0013] Because the working fluid volume in the reservoir is small, if the diaphragm pump malfunctions, such as due to a blockage in the suction line, only a relatively small volume of working fluid is added to the hydraulic chamber. Since the volume of working fluid that can be placed in the hydraulic chamber is limited, the maximum deflection of the diaphragm is also limited, which correspondingly reduces the risk of perforation.
[0014] In addition, reducing the working fluid volume in the reservoir contributes to a compact pump design, which is particularly advantageous for metering pumps.
[0015] Preferably, the working fluid in the reservoir is of a correspondingly small volume, such that the volume of the reservoir is less than V. FR, min .
[0016] The working fluid volume (V) filled in the reservoir RE,A Preferably, the volume extruded by the displacement element moving between its maximum positions (V) is smaller than that extruded by the displacement element. VE Especially preferred than V VE Many times smaller. In some embodiments, this can further reduce the risk of diaphragm perforation.
[0017] In a preferred embodiment of the present invention, V RE,A < V VE More preferably V RE,A < V VE Even better V RE,A < V VE Optimal V RE,A < V VE .
[0018] The diaphragm pump preferably includes an auxiliary chamber connected to or potentially connected to the hydraulic chamber, through which the volume of the hydraulic chamber can expand by a volume V. z .
[0019] In the working position, even in the spatial arrangement of a diaphragm pump where the pump can operate for a long time, the auxiliary chamber is preferably geometrically positioned completely below the hydraulic chamber.
[0020] Volume V of the auxiliary cavity z Preferably greater than or equal to V RE,A +V HR, A This allows the auxiliary chamber to fully receive the working fluid filling the reservoir and hydraulic chamber, for example, allowing the diaphragm to be replaced without draining the working fluid.
[0021] In this case, it is particularly advantageous that the auxiliary chamber can have a relatively small volume, because the diaphragm pump according to the invention contains only a small amount of working fluid in the reservoir. Even with the auxiliary chamber, a compact design of the diaphragm pump can be ensured.
[0022] In a preferred embodiment of the invention, the volume of the auxiliary cavity can be varied. Therefore, if the auxiliary cavity is connected to the hydraulic cavity, the volume of the hydraulic cavity can be expanded using a variable volume. The maximum expandable volume of the hydraulic cavity is V. z , max .
[0023] The volume of this auxiliary cavity can preferably be changed by a movable element disposed inside the auxiliary cavity. Therefore, the hydraulic cavity can be expanded in volume V by the connected or connectable auxiliary cavity. z The volume V z Capable of operating in minimum volume V z, min and maximum volume V z , max The variable volume varies between these values. With the aid of a movable element, the variable volume can be particularly preferably reduced to 0, i.e., V0. z, min =0.
[0024] The volume V of the auxiliary cavity with variable volume z , max Ideally greater than or equal to V RE,A +V HR, A This is to allow the auxiliary chamber to fully accept the working fluid filled in the reservoir and hydraulic chamber. Subsequently, the volume is reduced to V. Z, min This allows the working fluid to be returned to the hydraulic chamber. This enables diaphragm replacement without draining the fluid. The total volume V at the above working position... z , max It is particularly preferred that it be positioned below the hydraulic chamber.
[0025] The auxiliary cavity preferably includes a volume fraction V. z,T It is greater than or equal to V RE,A +V HR,A Furthermore, it is geometrically lower than the hydraulic chamber at the aforementioned working position. This allows all the working fluid filled in the reservoir and hydraulic chamber to enter the auxiliary chamber solely by gravity. Particularly preferably, V z,max =V z,T .
[0026] In a preferred embodiment of the invention, in the operating position of the diaphragm pump, the reservoir is preferably positioned geometrically completely above the hydraulic chamber. This allows the working fluid to enter the hydraulic chamber solely by gravity through the leakage compensation valve.
[0027] In a preferred embodiment of the invention, the metering head and hydraulic block of the diaphragm pump are releasably connected to each other, for example, by fastening devices such as screws.
[0028] The hydraulic block and / or metering head are preferably arranged on or at the base element, wherein the hydraulic block and / or metering head and / or base element include a positive guide device to allow the hydraulic block and / or metering head to move relative to the substrate via the positive guide device, wherein, preferably, the hydraulic block is movable relative to the substrate. The configuration of the positive guide device ensures that the hydraulic block and metering head can only move relative to each other along a path specified by the positive guide device. When the hydraulic block is released from the metering head, the positive guide device allows the diaphragm to be approached without risk of damage (and vice versa). Both the hydraulic block and the metering head can be moved relative to the substrate via the positive guide device. Preferably, the hydraulic block is movable relative to the substrate because this avoids the need to remove the metering head from the suction and pressure lines.
[0029] The positive guiding device is preferably formed by a groove and a slider guided therein, wherein the base plate includes the groove or slider, and the hydraulic block or metering head or base element includes a corresponding other component, namely the slider or groove.
[0030] The hydraulic block and metering head particularly preferably comprise flat contact surfaces, stacked on top of each other during diaphragm pump operation. If the contact surfaces are flat, in a preferred embodiment, the grooves of any possible positive guide device are at least partially, and preferably completely, parallel to the flat contact surfaces.
[0031] Due to technical limitations, the supply of working fluid from the reservoir to the horizontal displacement device cannot be arbitrarily reduced. In a preferred embodiment of the present invention, the movement of the displacement element in the working position will not occur in the horizontal direction.
[0032] The displacement element is preferably a vertical displacement element, that is, in the working position, the movement of the displacement element between the two maximum deflection positions is carried out in the vertical direction.
[0033] The present invention also relates to a method for starting a diaphragm pump for conveying fluid, comprising:
[0034] a) A metering head and a hydraulic block are connected to each other, forming a cavity between them.
[0035] b) A diaphragm that divides the cavity into a hydraulic chamber and a delivery chamber, wherein the delivery chamber has a V FR Volume, hydraulic chamber
[0036] i) Filled with volume V HR, A The working fluid, and
[0037] ii) Includes a movable, guideable, drivable displacement element that is in fluid communication with a hydraulic chamber and is movable back and forth between two maximum deflection positions during diaphragm pump operation, wherein the volume V VE The working fluid is discharged between two maximum deflection positions, allowing the diaphragm to reciprocate between a pressurized position and a suction position via the movement of the displacement element. The delivery chamber volume V in the pressurized position is... FR, min Smaller than the volume V of the delivery cavity FR Volume V at the suction position FR, max This is to transfer fluid from the suction port to the pressure port.
[0038] c) Liquid storage section, the liquid storage section
[0039] i) It can be filled with working fluid, and
[0040] ii) Connect to the hydraulic chamber via a leakage compensation valve so that when the diaphragm is in the suction position, the pressure in the hydraulic chamber is less than a predetermined minimum value p. Min At that time, the leakage compensation valve opens, and working fluid from the reservoir is added to the hydraulic chamber, wherein the method includes the following steps:
[0041] Volume V RE, A The working fluid is filled into the reservoir, where V RE,A ≤ V FR, min .
[0042] In a preferred embodiment of the present invention, V RE,A < V FR, min More preferably V RE,A < V FR, min Even better V RE,A < V FR, min Optimal V RE,A < V FR, min .
[0043] The volume of the working fluid filled in the reservoir is preferably less than V. VE More preferably smaller V VE Even better than smaller V VE Especially preferred to be smaller than V VE The optimal choice is less than V VE .
[0044] The present invention also relates to the use of a diaphragm pump according to the present invention for conveying fluids. Attached Figure Description
[0045] Other advantages, options, and possible applications will become clear from the following description of preferred embodiments and related drawings. The drawings illustrate:
[0046] Figure 1 This is an embodiment of the diaphragm pump according to the present invention;
[0047] Figure 2 shows the diaphragm pump according to the present invention under normal operating conditions, i.e., the suction and pressure lines are not blocked. Figure 2a ), and the suction line was blocked ( Figure 2b A diagram showing the result at the end of the pressure stroke under the following conditions;
[0048] Figure 3 shows a diaphragm pump with an auxiliary chamber according to the present invention. The auxiliary chamber has a variable volume, which can be adjusted to V. z =0 ( Figure 3a ) and V z >V RE,A +V HR,A ( Figure 3b The changes between ) and
[0049] Figure 4a and Figure 4b The diaphragm pump according to the invention is disposed on a base element and includes a positive guiding device. Detailed Implementation
[0050] Figure 1 The embodiment of the diaphragm pump 1 according to the present invention shown includes a metering head 3 and a hydraulic block 2 connected to each other, thereby forming a cavity therebetween. A diaphragm 9 divides this cavity into a hydraulic chamber 11 and a chamber with a volume V. FR The delivery chamber 10. The hydraulic chamber 11 is filled with working fluid and includes a displacement element 14, which can reciprocate vertically between a minimum deflection position 16 and a maximum deflection position 17, so that the volume V Ve The working fluid is discharged. Hydraulic block 2 also includes a leakage compensation valve 4, which discharges when the pressure in hydraulic chamber 11 at the diaphragm 9 suction position is less than a predetermined minimum value p. MinAt this time, the working fluid in the reservoir 15 can be added to the hydraulic chamber 11 through the valve. The hydraulic block 2 also includes an auxiliary chamber 6, the volume of which can be changed by moving the element 5 within the auxiliary chamber 6. By reciprocating the displacement element 14 during the operation of the diaphragm pump 1, the diaphragm 9 reciprocates between the pressurized position and the suction position, thereby changing the volume of the delivery chamber 10 and delivering fluid from the suction line 7 to the pressure line 13.
[0051] Figure 2 shows the diaphragm pump 1 according to the invention under normal operating conditions, i.e., the suction and pressure lines 7 and 13 are not blocked. Figure 2a ), and the suction line 7 was blocked ( Figure 2b The state at the end of the pressure stroke under the following conditions. At the end of the pressure stroke, the displacement element 14 is at the position of maximum deflection 17, so the diaphragm 9 is deflected to the maximum extent due to the working fluid arranged in the hydraulic chamber 11. If, due to a malfunction of the diaphragm pump 1, for example, due to a blockage of the suction line 7, all the working fluid in the reservoir 15 has been added to the hydraulic chamber 11, the amount of working fluid in the hydraulic chamber 11 increases, such as... Figure 2b As shown. Therefore, the deflection of the diaphragm 9 in the direction of the metering head 3 is more drastic than during normal operation, i.e., if no working fluid or only a small amount is added (see...). Figure 2a Since in the diaphragm pump 1 according to the invention, the volume of the working fluid filled in the reservoir 15 is limited to the volume V of the delivery chamber 10 in the pressurized position. FR, min Therefore, the maximum deflection of the diaphragm is also limited. This in particular avoids perforation that could occur due to contact between the diaphragm 9 and the inlet and outlet edges of the pressure or suction line 7.
[0052] Figure 3a and Figure 3b The accompanying illustration shows a diaphragm pump 1 with a variable-volume auxiliary chamber 6 according to the present invention in different volume states of the auxiliary chamber 6. The volume of the auxiliary chamber 6 can be changed by the movable element 5. Figure 3a The volume V is shown z When the volume of auxiliary cavity 6 is 0, the movable element 5 completely fills the volume of auxiliary cavity 6. On the other hand, Figure 3b The volume V is shown. z >V RE,A +V HR,A The auxiliary chamber 6 is used for this purpose. This means that the auxiliary chamber 6 here can hold all the working fluid from the reservoir 15 and the hydraulic chamber 11. Since at least one auxiliary chamber 6 has a volume V... z,T >V RE,A +V HR,AGeometrically lower than the hydraulic chamber 11, all working fluid can flow into the auxiliary chamber 6 by gravity. Then, the metering head 3 and the hydraulic block 2 can be separated, for example, to replace the diaphragm 9. The auxiliary chamber 6 can then be refilled via the moving element 5, reducing its volume and thus returning the working fluid to the hydraulic chamber 11. Therefore, diaphragm replacement can be achieved without draining the working fluid.
[0053] Figure 4a and Figure 4b A diaphragm pump 1 according to the invention is shown, which is mounted on a base element 18 including a positive guide device. In the arrangement shown, the base element 18 is in the form of a plate, laterally mounted on a hydraulic block 2. The figure shows guide grooves comprising parallel sections 19 and orthogonal sections 20, extending to the contact surfaces of the hydraulic block 2 and the metering head 3. A slider 21 mounted on a base plate 22 engages in these guide grooves. Therefore, during operation of the diaphragm pump 1, after removing the fastening device connecting the metering head 3 and the hydraulic block 2, the hydraulic block 2 can move laterally relative to the metering head 3 held by a conduit, thereby making the diaphragm 9 easily accessible. The positive guide device prevents damage to the diaphragm 9 during release, thus allowing safe and convenient replacement of the diaphragm 9 without removing the conduit from the metering head 3.
[0054] List of reference numerals
[0055] 1. Diaphragm pump
[0056] 2. Hydraulic block
[0057] 3. Measuring head
[0058] 4. Leakage compensation valve
[0059] 5. Movable elements of the auxiliary cavity
[0060] 6. Auxiliary cavity
[0061] 7. Suction tubing
[0062] 8. Suction check valve
[0063] 9. Diaphragm
[0064] 10. Conveying chamber
[0065] 11. Hydraulic chamber
[0066] 12. Pressure check valve
[0067] 13. Pressure lines
[0068] 14. Displacement element
[0069] 15. A reservoir containing working fluid.
[0070] 16. Minimum deflection position of the displacement element
[0071] 17. Maximum deflection position of the displacement element
[0072] 18. Base components
[0073] 19. First guide groove section
[0074] 20. Second guide groove section
[0075] 21. Slider
[0076] 22. Substrate
Claims
1. A diaphragm pump for conveying fluid, comprising: a) A metering head (3) and a hydraulic block (2), wherein the metering head (3) and the hydraulic block (2) are connected to each other, forming a cavity between them. b) A diaphragm (9) divides the cavity into a hydraulic chamber (11) and a delivery chamber (10), the delivery chamber (10) having a volume V FR The hydraulic chamber (11) i) filled with a volume V of working liquid, and HR, A and ii) Includes a movable, guideable, drivable displacement element (14) fluidly communicated with a hydraulic chamber (11) and reciprocating between two maximum deflection positions (16, 17) during operation of the diaphragm pump (1), wherein the volume V VE The working fluid is discharged between two maximum deflection positions so that the diaphragm (9) can reciprocate between the pressurized position and the suction position by the movement of the displacement element (14), wherein the volume V of the delivery chamber (10) in the pressurized position is V. FR, min The volume V of the delivery chamber (10) at the suction position is smaller than that of the delivery chamber. FR, max This is to transfer fluid from the suction port to the pressure port. c) Liquid storage section, the liquid storage section i) filled with a volume V of working liquid, and RE,A and ii) Connect to the hydraulic chamber (11) via a leakage compensation valve (4) such that the pressure in the hydraulic chamber (11) at the diaphragm (9) suction position is less than a predetermined minimum value p. Min At this time, the leakage compensation valve (4) opens, and the working fluid from the reservoir (15) is added to the hydraulic chamber (11). Its features are, 0 < V RE,A ≤ V FR, min .
2. The diaphragm pump according to claim 1, characterized in that, V RE,A < V FR, min 。 3. The diaphragm pump according to claim 1, characterized in that, V RE,A < V FR, min 。 4. The diaphragm pump according to claim 1, characterized in that, V RE,A ≤V VE .
5. The diaphragm pump according to claim 1, characterized in that, V RE,A ≤ V VE 。 6. The diaphragm pump according to any one of the preceding claims, characterized in that, Said diaphragm pump comprises an auxiliary chamber (6) connected or connectable to the hydraulic chamber and able to expand the volume V of the hydraulic chamber (11) through said auxiliary chamber (6) z wherein in the working position of the diaphragm pump (1), said auxiliary chamber (6) is geometrically positioned lower than the hydraulic chamber (11).
7. The diaphragm pump according to claim 6, characterized in that, The volume of the auxiliary cavity (6) is variable, wherein, a) the maximum volume of the hydraulic chamber (11) that can expand is V z , max and b) V z , max ≥ V RE,A + V HR,A .
8. The diaphragm pump according to claim 7, characterized in that, The auxiliary chamber (6) is provided with a movable element (5) by which the volume V of the auxiliary chamber (6) can be changed z In this way, the hydraulic chamber (11) can expand by the volume V of the connected auxiliary chamber (6) z It is possible to change the volume V between a minimum volume V Z, min and a maximum volume V z , max where V Z,min = 0.
9. The diaphragm pump according to any one of claims 1 to 5, characterized in that, In the working position of the diaphragm pump, the liquid storage section (15) is geometrically positioned above the hydraulic chamber (11).
10. The diaphragm pump according to any one of claims 1 to 5, characterized in that, The movable, guideable, drivable displacement element can be guided through the liquid reservoir.
11. The diaphragm pump according to any one of claims 1 to 5, characterized in that, The metering head (3) and the hydraulic block (2) are releasably connected to each other, wherein the hydraulic block and / or the metering head is disposed on or at the base element (18), wherein the hydraulic block and / or the metering head and / or the base element (18) includes positive guides (19, 20) to allow the hydraulic block and / or the metering head to move relative to the base plate (22) via the positive guides, wherein the hydraulic block is movable relative to the base plate (22).
12. The diaphragm pump according to claim 11, characterized in that, The positive guiding device is formed by a groove (19, 20) and a slider (21) guided therein, wherein the base plate (22) includes a groove or slider, and the hydraulic block or metering head or base element includes a slider or groove.
13. The diaphragm pump according to claim 12, characterized in that, The hydraulic block and the metering head each include contact surfaces that overlap each other during diaphragm pump operation, wherein the contact surfaces are flat and the groove is at least partially parallel to the flat contact surfaces.
14. The diaphragm pump according to any one of claims 1 to 5, characterized in that, The movement of the displacement element (14) in the working position is not in the horizontal direction.
15. The diaphragm pump according to any one of claims 1 to 5, characterized in that, The movement of the displacement element (14) in the working position is carried out in the vertical direction.
16. A method for starting a diaphragm pump (1) for conveying fluid, the diaphragm pump (1) comprising: a) A metering head (3) and a hydraulic block (2), wherein the metering head (3) and the hydraulic block (2) are connected to each other, forming a cavity between them. b) A diaphragm (9) divides the cavity into a hydraulic chamber (11) and a delivery chamber (10), the delivery chamber (10) having a volume V FR The hydraulic chamber (11) i) filled with a volume V of working liquid, and HR, A and ii) Includes a movable, guideable, drivable displacement element (14), which is in fluid communication with a hydraulic chamber and is capable of reciprocating between two maximum deflection positions (16, 17) during diaphragm pump operation, wherein the volume V VE The working fluid is discharged between two maximum deflection positions so that the diaphragm (9) can reciprocate between the pressurized position and the suction position by the movement of the displacement element (14), wherein the delivery chamber volume V in the pressurized position is... FR, min Smaller than the delivery chamber volume V at the suction position FR, max This is to transfer fluid from the suction port to the pressure port. c) Liquid storage section, the liquid storage section i) It can be filled with working fluid, and ii) connected to the hydraulic chamber (11) through a leakage compensation valve (4) such that when the hydraulic chamber pressure in the diaphragm suction position is less than a predetermined minimum value p Min the leakage compensation valve opens and working liquid from the reservoir is added to the hydraulic chamber, Its features are, The startup method includes the following steps: The working liquid of volume V RE, A is filled into the liquid storage portion, where V RE,A ≤ V FR, min .
17. A diaphragm pump (1) for conveying fluids, comprising: a) A metering head (3) and a hydraulic block (2), wherein the metering head (3) and the hydraulic block (2) are connected to each other, forming a cavity between them. b) a diaphragm (9) which divides the cavity into a hydraulic chamber (11) and a delivery chamber (10), the delivery chamber (10) having a volume V FR , the hydraulic chamber (11) i) filled with a volume V of working liquid, and HR, A and ii) Includes a movable, guideable, drivable displacement element (14) that is in fluid communication with a hydraulic chamber and is capable of reciprocating between two maximum deflection positions (16, 17) during diaphragm pump operation, wherein V VE The working fluid volume is discharged between two maximum deflection positions so that the diaphragm (9) can reciprocate between the pressurized position and the suction position by the movement of the displacement element (14), wherein the delivery chamber volume V in the pressurized position is... FR, min Smaller than the delivery chamber volume V at the suction position FR, max This is to transfer fluid from the suction port to the pressure port. c) Liquid storage section (15), the liquid storage section i) Filled with volume V RE,A The working fluid, and ii) Connect to the hydraulic chamber via a leakage compensation valve (4) so that the hydraulic chamber pressure at the diaphragm suction position is less than a predetermined minimum value p. Min At this time, the leakage compensation valve (4) opens, and working fluid from the reservoir (15) is added to the hydraulic chamber. Its features are, Volume V RE, A The choice is 0 < V RE,A ≤V FR, min .