A method for adjusting focal plane of exposure lens

Abstract

The present invention relates to a method for debugging the focal plane of an exposure lens, which solves the problem that the existing debugging process of the focal plane of an exposure lens is cumbersome, inconvenient and inefficient. The method comprises the following steps: A: making a lens flange for fixing the exposure lens; B: preliminarily identifying the approximate focal plane of each lens; C: determining the focal plane of the lens as a reference; D: adjusting the focal plane of the lens with the largest focal plane to be consistent using a top screw; E: adjusting other lenses one by one using the same debugging method; F: ensuring that each top screw is evenly stressed. When adjusting the equipment, after selecting the target focal plane according to the difference in the focal planes of several lenses, the focal planes of each lens can be easily adjusted and the focal plane of a single lens can be made uniform by adjusting the depth of the top screws in various directions on the flange. In addition, this method will not cause the focal plane of each lens to be stepped like using a gasket, and can maximize the realization of focal plane uniformity, improve the overall equipment capability tolerance, and is simple to debug with high debugging efficiency.

Description

Technical Field

[0001] The invention relates to a method for debugging the focal plane of an exposure lens. Background Art

[0002] Existing technology: Due to the problem of lens assembly accuracy, the focal plane of each lens is inconsistent, which results in the need to use gaskets of different thicknesses to assist in compensation when applied to LDI equipment to achieve close consistency in the focal planes of each lens, so as to maximize the degree of image distortion in the area responsible for each lens on the entire board during exposure operations within an acceptable range.

[0003] Problem: Currently, it is very inconvenient to adjust the focal plane of the lens during equipment debugging. For LDI equipment, the focal planes of several lenses need to match each other, and the left and right focal planes of each lens must also be adjusted to be almost consistent. Therefore, during the entire adjustment process, each lens needs to be "loosen + add shims + lock + compare and confirm" repeatedly to achieve the best focal plane.

[0004] The biggest problem is that when a lens needs to be replaced during the use of the equipment by the client, since it is impossible to predict in advance the thickness of the shim required to match the focal plane of other lenses for the new lens, the shim can only be processed according to the required thickness after the shim thickness is known by comparison of the assembled lenses, which usually causes the customer to stop production for several days; or a set of shims of various thicknesses are prepared in advance for selection, which will increase the cost by more than ten times. In addition, because the pre-prepared shims are divided into thickness grades, various thinner small shims are also needed to match the focal plane of other lenses. The adjustment process requires "loosening + adding shims + locking + comparing and confirming" for each lens, which leads to low equipment debugging efficiency. Summary of the invention

[0005] The purpose of the present invention is to solve the problem that the existing exposure lens focal plane debugging process is complicated, inconvenient and inefficient.

[0006] The technical solution adopted to solve the technical problem proposed by the present invention is as follows: the exposure lens focal plane debugging method of the present invention comprises the following steps:

[0007] A: Make a lens flange for fixing the exposure lens, make the exposure lens fixing position, locking screw hole and top screw thread hole on the lens flange, and install the top screw in the top screw thread hole;

[0008] B: After each lens is initially locked and positioned on the gantry through the locking screw holes, the camera is now in an adjustable state, and the top screw is located on the gantry. Then use the lens camera to confirm one by one and preliminarily identify the approximate focal plane of each lens;

[0009] C: Based on the actual focal planes of several lenses, select the focal plane of the largest lens as the reference. Adjust the top screw to prop up the lens flange and adjust the focal planes of other lenses to near the target value.

[0010] D: Use the top screw to adjust the focal plane of the lens with the largest focal plane to be consistent, that is, adjust the focal planes of the five positions of the midpoints of the four sides of the rectangular projection spot and the intersection of the diagonals to be consistent. When adjusting a top screw, the two adjacent top screws should also be slightly adjusted in the corresponding direction, and then tighten the locking screws alternately to fix the lens;

[0011] E: Use the same debugging method to adjust other lenses one by one;

[0012] F: After adjusting the focal plane of each lens, check the top screws one by one to ensure that each top screw is evenly stressed.

[0013] The technical solutions for further limiting the present invention include:

[0014] In step B, when adjusting the focal plane of the lens, the symmetrical top screws are adjusted alternately and in turn with the center of the lens as the axis.

[0015] In step C, use a vernier caliper to adjust the top screw to bring the focal plane of other lenses to near the target value.

[0016] Through the above technical scheme, the beneficial effects of the present invention are as follows: when adjusting the equipment, the exposure lens focal plane debugging method of the present invention selects the target focal plane according to the difference in the focal planes of several lenses, and then uses a commonly used hexagonal wrench to adjust the depth of the top screws in various directions on the flange to easily adjust the overall focal plane of each lens and the focal plane of a single lens to be uniform. In addition, this method will not cause the focal plane of each lens to have a step-like difference like using a gasket, and can maximize the realization of focal plane uniformity, improve the overall equipment capability tolerance, and is simple to debug with high debugging efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The present invention is a structural schematic diagram of a method for adjusting the focal plane of an exposure lens. DETAILED DESCRIPTION

[0018] The structure of the present invention is further described below in conjunction with the accompanying drawings.

[0019] Reference Figure 1 A method for debugging the focal plane of an exposure lens of the present invention comprises the following steps:

[0020] A: Make a lens flange 2 for fixing the exposure lens 1, make an exposure lens fixing position, a locking screw hole 21 and a top screw thread hole 22 on the lens flange, and install a top screw in the top screw thread hole;

[0021] B: After each lens is initially locked and positioned on the gantry 3 through the locking screw holes, the camera is now in an adjustable state, and the top screw is located on the gantry. Then use the lens camera to confirm one by one and preliminarily identify the approximate focal plane of each lens. When adjusting the focal plane of the lens, use the center of the lens as the axis and adjust the symmetrical top screws alternately and in turn.

[0022] C: Based on the actual focal planes of several lenses, select the focal plane of the largest lens as the reference. With the help of a vernier caliper, adjust the top screw to prop up the lens flange and adjust the focal planes of other lenses to near the target value.

[0023] D: Use the top screw to adjust the focal plane of the lens with the largest focal plane to be consistent, that is, adjust the focal planes of the five positions of the midpoints of the four sides of the rectangular projection spot and the intersection of the diagonals to be consistent. When adjusting a top screw, the two adjacent top screws should also be slightly adjusted in the corresponding direction, and then tighten the locking screws alternately to fix the lens;

[0024] E: Use the same debugging method to adjust other lenses one by one;

[0025] F: After adjusting the focal plane of each lens, check the top screws one by one to ensure that each top screw is evenly stressed.

[0026] The exposure lens focal plane debugging method of the present invention can achieve the purpose of easily adjusting the overall focal plane of each lens and making the focal plane of a single lens uniform by adjusting the depth of the top screws in various directions on the flange when adjusting the equipment. In addition, this method will not cause the focal plane of each lens to have a step-like difference like using a gasket, and can maximize the uniformity of the focal plane, improve the overall equipment capability tolerance, and is simple to debug with high debugging efficiency.

[0027] Although the specific embodiments of the present invention are described in detail in conjunction with the accompanying drawings, it should not be understood as limiting the scope of protection of the present invention. Within the scope described in the claims, various modifications and variations that can be made by those skilled in the art without creative work still belong to the scope of protection of the present invention.

Claims

1. A method for adjusting the focal plane of an exposure lens, characterized in that: The debugging method comprises the following steps: A: Make a lens flange for fixing the exposure lens, make the exposure lens fixing position, locking screw hole and top screw thread hole on the lens flange, and install the top screw in the top screw thread hole; B: After each lens is initially locked and positioned on the gantry through the locking screw holes, the camera is now in an adjustable state, and the top screw is located on the gantry. Then use the lens camera to confirm one by one and preliminarily identify the approximate focal plane of each lens; C: Based on the actual focal planes of several lenses, select the focal plane of the largest lens as the reference. Adjust the top screw to prop up the lens flange and adjust the focal planes of other lenses to near the target value. D: Use the top screw to adjust the focal plane of the lens with the largest focal plane to be consistent, that is, adjust the focal planes of the five positions of the midpoints of the four sides of the rectangular projection spot and the intersection of the diagonals to be consistent. When adjusting a top screw, the two adjacent top screws should also be slightly adjusted in the corresponding direction, and then tighten the locking screws alternately to fix the lens; E: Use the same debugging method to adjust other lenses one by one; F: After adjusting the focal plane of each lens, check the top screws one by one to ensure that each top screw is evenly stressed.

2. The exposure lens focal plane adjustment method according to claim 1, characterized in that: In step B, when adjusting the focal plane of the lens, the symmetrical top screws are adjusted alternately and in turn with the center of the lens as the axis.

3. The exposure lens focal plane adjustment method according to claim 1, characterized in that: In step C, use a vernier caliper to adjust the top screw to bring the focal plane of other lenses to near the target value.

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