A coated carrier transport system

Abstract

This invention discloses a coating carrier transport system, which includes a traveling track and a turnover traveling device. The turnover traveling device is movably mounted on the traveling track and is used to load the coating carrier. The turnover traveling device includes a turnover trolley and a turnover drive module. The turnover trolley is movably mounted on the traveling track and is used to load the coating carrier. The turnover drive module cooperates with the turnover trolley to drive the turnover trolley to move along the length of the traveling track. This coating carrier transport system has a relatively simple structure, low operating cost, and can effectively avoid wear and tear on the coating carrier during transportation, extending the service life of the coating carrier while reducing contamination to the coating process.

Description

Technical Field

[0001] This invention relates to the field of solar cell manufacturing technology, and in particular to a coating carrier transport system. Background Technology

[0002] Solar cell manufacturing equipment involves loading silicon wafers onto carrier plates and depositing them within a vacuum chamber. This equipment includes an upper vacuum chamber deposition system, an automated loading and unloading system, and a lower return transport system. The main function of the lower return transport system is to remove the silicon wafers from the carrier plate, transport the carrier plate from a height to the lower return transport mechanism via a lifting frame, and then return it to the loading area. At the loading area, a lifting mechanism retrieves the carrier plate and lifts it to the upper loading mechanism for wafer placement, repeating this reciprocating motion. However, existing lower return transport mechanisms are multi-cavity channel dynamic conveying structures, where the carrier plate is conveyed via rotating rollers within the return transport channels. This conveying structure uses numerous motors and bearings, resulting in high maintenance costs and long processing times. Furthermore, the carrier plate experiences significant vibration during transmission, causing wear and tear. The friction between the carrier plate and the rollers generates dust, which adheres to the carrier plate and contaminates the product deposition process. Summary of the Invention

[0003] The purpose of this invention is to provide a coating carrier transport system. This coating carrier transport system has a simple structure, low operating cost, and can effectively prevent wear and tear on the coating carrier during transportation, thereby extending the service life of the coating carrier and reducing pollution to the coating process.

[0004] To achieve the above-mentioned technical effects, the technical solution of the present invention is as follows:

[0005] This invention discloses a coating carrier transport system, comprising: a traveling track; a turnover traveling device movably disposed on the traveling track, wherein multiple turnover traveling devices are spaced apart along the length direction of the traveling track, and each turnover traveling device is used to load a coating carrier; and a connecting device, wherein multiple connecting devices are located between two adjacent turnover traveling devices, and each connecting device is capable of transporting the coating carrier on one turnover traveling device to another turnover traveling device.

[0006] In some embodiments, the turnover walking device includes: a turnover trolley movably disposed on the walking track, the turnover trolley being used to load the coating carrier plate; and a turnover drive module, the turnover drive module cooperating with the turnover trolley to drive the turnover trolley to move along the length direction of the walking track.

[0007] In some specific embodiments, the turnover drive module includes: a first turnover drive source, which is fixedly connected to the transmission frame; and a transmission belt assembly, which includes a first turnover drive wheel, a second turnover drive wheel, and a turnover drive belt. The first turnover drive wheel is in transmission cooperation with the first turnover drive source, and the two ends of the turnover drive belt pass over the first turnover drive wheel and the second turnover drive wheel, respectively, and are fixedly connected to the turnover trolley.

[0008] In some more specific embodiments, there are multiple drive belt assemblies, which are spaced apart along a direction perpendicular to the travel track; the rotation drive module further includes a first rotation support block, a second rotation support block, a first rotation drive shaft, and a second rotation drive shaft. The multiple first rotation support blocks are connected to the transmission frame, the first rotation drive shaft passes through the multiple first rotation support blocks and cooperates with the multiple first rotation drive wheels, the first rotation drive shaft cooperates with the first rotation drive source through a transmission unit, and the multiple second rotation support blocks are connected to the connecting device, the second rotation drive shaft passes through the multiple second support blocks and cooperates with the multiple second rotation drive wheels.

[0009] In some alternative embodiments, the transmission unit includes a reducer and a transmission belt structure, the reducer cooperating with the first rotary drive source, and the transmission belt structure cooperating with the reducer and the first rotary transmission shaft.

[0010] In some specific embodiments, the turnover drive module includes: a second turnover drive source, which is disposed on the turnover trolley; a turnover gear, which is disposed on the output shaft of the second turnover drive source; and a turnover rack, which is arranged parallel to the travel track and cooperates with the turnover gear.

[0011] In some more specific embodiments, the turnover trolley defines a turnover receiving cavity, the turnover receiving cavity has turnover inlets and outlets at both ends along the length direction of the travel track, and the turnover receiving cavity has turnover support drive modules on two opposite side walls in a direction perpendicular to the length direction of the travel track, the turnover support drive modules being used to support and drive the coating carrier plate.

[0012] In some optional embodiments, the turnover support drive module includes a turnover support drive source, a turnover transmission structure, and a turnover transport structure. The turnover support drive source cooperates with the turnover transmission structure. The turnover transmission structure is located outside the turnover receiving cavity, and the turnover transport structure is located inside the turnover receiving cavity and cooperates with the turnover transmission structure. The turnover transport structure is used to support and drive the coating carrier plate.

[0013] In some embodiments, the docking device includes a docking platform defining a docking receiving cavity. The docking receiving cavity has docking inlets and outlets at both ends along the length direction of the travel track. The docking receiving cavity has docking support and drive modules on two opposite side walls in a direction perpendicular to the length direction of the travel track. The docking support and drive modules are used to support and drive the coating carrier plate.

[0014] In some specific embodiments, the docking support drive module includes a docking support drive source, a docking transmission structure, and a docking transport structure. The docking support drive source cooperates with the docking transmission structure. The docking transmission structure is located outside the docking receiving cavity, and the docking transport structure is located inside the docking receiving cavity and cooperates with the docking transmission structure. The docking transport structure is used to support and drive the coating carrier plate.

[0015] In some embodiments, the traveling track is a magnetic levitation track, and the magnetic levitation track is equipped with a magnetic levitation module; the turnover trolley has a magnetic component installed at its bottom, and the turnover trolley is suspended on the magnetic levitation track by interacting with the magnetic component and the magnetic levitation module; the turnover drive module drives the turnover trolley to move along the length direction of the magnetic levitation track.

[0016] The beneficial effects of the coating carrier transport system of the present invention are as follows: During the transportation of the coating carrier, the coating carrier and the turnover and walking device are relatively stationary for a portion of the time, thereby greatly reducing the probability of vibration or wear of the coating carrier, extending the service life of the coating carrier, and reducing the pollution caused to the coating process. At the same time, the coating carrier transport system in this embodiment uses a turnover trolley to transport the coating carrier, which, compared with the prior art using multiple rollers, reduces the number of driving components, reduces the complexity of the structure, and facilitates inspection and maintenance.

[0017] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the coated carrier plate transportation system according to Embodiment 1 of the present invention;

[0019] Figure 2 yes Figure 1 A magnified diagram showing point A (circled).

[0020] Figure 3 yes Figure 1 A magnified diagram showing point B (circled).

[0021] Figure 4 yes Figure 1 A magnified view showing point C (circled);

[0022] Figure 5 yes Figure 1 A magnified diagram showing point D (circled);

[0023] Figure 6 yes Figure 1 An enlarged schematic diagram showing point E (circled);

[0024] Figure 7 This is a schematic diagram of the coating carrier plate transportation system of Embodiment 1 of the present invention installed on the transmission frame;

[0025] Figure 8 This is a schematic diagram of the structure of the coated carrier plate transportation system according to Embodiment 2 of the present invention;

[0026] Figure 9 This is a schematic diagram of the coating carrier transport system according to Embodiment 3 of the present invention;

[0027] Figure 10 This is a schematic diagram of the coating carrier transport system according to Embodiment 4 of the present invention; Figure 11 yes Figure 10 Enlarged schematic diagram showing point F (circled);

[0028] Figure 12 This is a schematic diagram of the coating carrier plate transportation system of Embodiment 4 of the present invention installed on the transmission frame;

[0029] Figure 13 This is a schematic diagram of the coating carrier transport system according to Embodiment 5 of the present invention;

[0030] Figure 14 This is a schematic diagram of the coating carrier transport system according to Embodiment Six of the present invention.

[0031] Figure label:

[0032] 1. Walking track;

[0033] 2. Turnover travel device; 21. Turnover trolley; 211. Turnover entrance / exit; 212. Turnover support drive source; 213. Turnover transmission structure

[0034] 22. Rotation drive module; 221. First rotation drive source; 2221. First rotation transmission wheel; 2222. Second rotation transmission wheel; 2223. Rotation transmission belt; 224. Tensioner module; 225. First rotation support block; 226. Second rotation support block; 227. First rotation transmission shaft; 228. Second rotation transmission shaft; 229. Transmission unit; 2291. Reducer; 2292. Transmission belt structure; 210. Second rotation drive source; 220. Rotation gear; 230. Rotation rack; 240. Rack fixing component;

[0035] 3. Connecting device; 31. Connecting entrance / exit; 32. Connecting support drive source; 33. Connecting transmission structure;

[0036] 4. Transmission frame. Detailed Implementation

[0037] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0038] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0039] Furthermore, features specified as "first" or "second" may explicitly or implicitly include one or more of those features, used to distinguish and describe features, without any order or emphasis. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0040] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0041] The following is for reference. Figures 1-14The specific structure of the coated carrier plate transportation system according to an embodiment of the present invention is described.

[0042] This invention discloses a coated carrier plate transport system, such as... Figures 9-10 As shown, the coating carrier transport system includes a travel track 1 and a turnover travel device 2. The turnover travel device 2 is movably mounted on the travel track 1. Multiple turnover travel devices 2 are spaced apart along the length of the travel track 1. Each turnover travel device 2 is used to load the coating carrier. Each turnover travel device 2 includes a turnover trolley 21 and a turnover drive module 22. The turnover trolley 21 is movably mounted on the travel track 1 and is used to load the coating carrier. The turnover drive module 22 cooperates with the turnover trolley 21 to drive the turnover trolley 21 to move along the length of the travel track 1.

[0043] First, it should be noted that in practical applications, as shown in the attached document... Figure 7 As shown, the coating carrier transport system generally shares a transmission frame 4 with other systems of the solar cell production equipment, and the travel track 1 is fixed on the transmission frame 4.

[0044] Understandably, in actual operation, when the automatic unloading equipment aligns with the turnover traveling device 2, the coating carrier plate is transferred to one of the turnover traveling devices 2. This device then transports the coating carrier plate along the traveling track 1 and transfers it to another turnover traveling device 2. After one or more transfers, the coating carrier plate can be transported to the automatic loading equipment. In the coating carrier plate transport system of this embodiment, the coating carrier plate only moves relative to the turnover trolley 21 during the turnover process. That is, during the transport of the coating carrier plate, the coating carrier plate and the turnover traveling device 2 are relatively stationary, thus greatly reducing the probability of vibration or wear on the coating carrier plate. This extends the service life of the carrier plate while reducing contamination to the coating process. Meanwhile, in this embodiment, the use of a turnover trolley 21 to load the coating carrier plate can greatly reduce the vibration of the coating carrier plate, thereby avoiding wear on the coating carrier plate. The turnover drive module 22 can stably drive the turnover trolley 21 to move. Compared with the existing technology that uses multiple motors to drive multiple rollers, this embodiment only uses one turnover drive module 22 to drive the turnover trolley 21 to move, which greatly simplifies the structure of the entire coating carrier plate transportation system, facilitates the maintenance of the coating carrier plate transportation system, and reduces the use and maintenance costs of the coating carrier plate transportation system.

[0045] In some embodiments, such as Figure 1 and Figure 10As shown, the coating carrier transport system also includes at least one connecting device 3, which is located between two adjacent turnover traveling devices 2. The connecting device 3 can transport the coating carrier from one turnover traveling device 2 to another. The connecting device 3 can serve as a connecting transfer device for the coating carrier, enabling the coating carrier to stably rotate between the two traveling trolleys.

[0046] In some specific embodiments, such as Figure 2 and Figure 6 As shown, the turnover drive module 22 includes a first turnover drive source 221 and a transmission belt assembly. The first turnover drive source 221 is mounted on the turnover trolley 21. The transmission belt assembly includes a first turnover drive wheel 2221, a second turnover drive wheel 2222, and a turnover drive belt 2223. The first turnover drive wheel 2221 is in transmission cooperation with the first turnover drive source 221. The two ends of the turnover drive belt 2223 pass over the first turnover drive wheel 2221 and the second turnover drive wheel 2222 respectively and are connected to the turnover trolley 21. Through the turnover drive belt 2223 fixed on the turnover trolley 21, the turnover trolley 21 is driven to move on the travel track 1. Understandably, in actual operation, the first rotation drive source 221 drives the first rotation transmission wheel 2221 to rotate, thereby driving the second rotation transmission wheel 2222 to rotate, and the rotation transmission belt 2223 to move. Since the two ends of the rotation transmission belt 2223 pass over the first and second rotation transmission wheels 2221 respectively and are connected to the turnover trolley 21, the turnover trolley 21 can move along the length of the travel track 1 when the first rotation transmission wheel 2221 rotates. This technical solution, which uses a transmission belt assembly and sets the first rotation drive source 221 on the turnover trolley 21, eliminates the need for an external bracket to support the first rotation drive source 221, simplifies the structure of the rotation drive module 22, and provides more stable transmission for the transmission belt assembly, minimizing vibration during the movement of the turnover trolley 21, thus effectively preventing vibration of the coating carrier plate.

[0047] It should be noted that in this embodiment, the first rotation drive source 221 can be selected from rotation drive structures such as motors and rotary cylinders according to actual needs, and no specific type of the first rotation drive source 221 is limited here.

[0048] In some more specific embodiments, such as Figure 2 and Figure 6As shown, there are multiple transmission belt assemblies, which are spaced apart along a direction perpendicular to the travel track 1. The rotation drive module 22 also includes a first rotation support block 225, a second rotation support block 226, a first rotation drive shaft 227, and a second rotation drive shaft 228. The multiple first rotation support blocks 225 are connected to the transmission frame 4. The first rotation drive shaft 227 passes through the multiple first rotation support blocks 225 and cooperates with the multiple first rotation drive wheels 2221. The first rotation drive shaft 227 cooperates with the first rotation drive source 221 through the transmission unit 229. The multiple second rotation support blocks 226 are connected to the connecting device 3. The second rotation drive shaft 228 passes through the multiple second rotation support blocks 226 and cooperates with the multiple second rotation drive wheels 2222. Understandably, in practice, the size of the coating carrier plate is generally quite large, and the corresponding size of the turnover trolley 21 is also relatively large. In this embodiment, multiple drive belt assemblies work together to transport the turnover trolley 21, ensuring that the turnover trolley 21 can move stably along the travel track 1, thereby minimizing vibration during the movement of the turnover trolley 21 and effectively preventing vibration of the coating carrier plate. Furthermore, the added first turnover support block 225, second turnover support block 226, first turnover drive shaft 227, and second turnover drive shaft 228 enable multiple drive belt assemblies to share a single first turnover drive source 221, simplifying the structure of the turnover drive module 22 and reducing the manufacturing cost of the entire coating carrier plate transportation system.

[0049] In some alternative embodiments, such as Figure 3 As shown, the turnover drive module 22 also includes multiple tension wheel modules 224 spaced apart along the length of the turnover transmission belt 2223. The tension wheel modules 224 ensure that the turnover transmission belt 2223 remains taut during operation, preventing slippage and thus ensuring that the turnover drive module 22 can stably drive the turnover trolley 21. It should be noted that in this embodiment, the structure supporting the tension wheel modules 224 is located on the turnover trolley 21, and is not shown in the figure.

[0050] In some alternative embodiments, such as Figure 2 As shown, the transmission unit 229 includes a reducer 2291 and a transmission belt structure 2292. The reducer 2291 cooperates with the first rotary drive source 221, and the transmission belt structure 2292 cooperates with the reducer 2291 and the first rotary drive shaft 227. Thus, the reducer 2291 and the transmission belt structure 2292 ensure that the first rotary drive source 221 stably drives the first rotary drive shaft 227 to rotate, thereby driving the movement of multiple transmission belt assemblies. It should be noted that in other embodiments of the present invention, the specific type of the transmission unit 229 can be selected according to actual needs.

[0051] In other embodiments, the turnover trolley 2 can be driven by the turnover gear 220 and the turnover rack 230, specifically as follows: Figure 10 and Figure 11 As shown, the turnover drive module 22 includes a second turnover drive source 210, a turnover gear 220, and a turnover rack 230. The second turnover drive source 210 is mounted on the turnover trolley 21, the turnover gear 220 is mounted on the output shaft of the second turnover drive source 210, and the turnover rack 230 is arranged parallel to the travel track 1 and cooperates with the turnover gear 220. Compared with the technical solution described above that uses multiple transmission belt assemblies to drive the turnover trolley 21, this embodiment uses the cooperation of the turnover gear 220 and the turnover rack 230 to drive the turnover trolley 21. This solution has a simpler structure and is more convenient for maintenance.

[0052] In some more specific embodiments, such as Figure 4 As shown, the turnover trolley 21 defines a turnover receiving cavity. The turnover receiving cavity has turnover inlets and outlets 211 at both ends along the length of the travel track 1. Turnover support and drive modules are provided on two opposite side walls of the turnover receiving cavity in a direction perpendicular to the length of the travel track 1. These turnover support and drive modules are used to support and drive the coating carrier plate. It is understood that, as described above, the turnover trolley 21 needs to receive the coating carrier plate from the automatic unloading equipment, transport the coating carrier plate to the automatic loading equipment, receive the coating carrier plate from the connecting device 3, or transport the coating carrier plate to the connecting device 3. If the turnover trolley 21 is not equipped with the relevant mechanisms, then only a robotic arm can be added for handling, which would greatly increase the complexity of the coating carrier plate transportation system structure in this embodiment. In this embodiment, the turnover trolley 21 defines a turnover receiving cavity, and the turnover receiving cavity is provided with turnover support drive modules on two opposite side walls in a direction perpendicular to the length direction of the traveling track 1. In actual operation, when the turnover trolley 21 docks with the automatic unloading equipment, automatic loading equipment, or connecting device 3, the three devices drive the coating carrier plate from the turnover inlet / outlet 211 into the turnover receiving cavity. The turnover support drive module can then drive the coating carrier plate completely into the turnover receiving cavity, or drive the coating carrier plate out of the turnover receiving cavity and into the automatic unloading equipment, automatic loading equipment, or connecting device 3. In other words, setting the turnover drive module 22 within the turnover receiving cavity simplifies the structure of the coating carrier plate transportation system and facilitates the turnover of the coating carrier plate between various devices. Simultaneously, during the movement of the turnover trolley 21, the coating carrier plate is in a relatively sealed space, which better ensures the cleanliness of the coating carrier plate and reduces the possibility of contamination to the coating process.

[0053] In some alternative embodiments, such as Figure 4As shown, the turnover support drive module includes a turnover support drive source 212, a turnover transmission structure 213, and a turnover transport structure. The turnover support drive source 212 cooperates with the turnover transmission structure 213. The turnover transmission structure 213 is located outside the turnover receiving cavity, and the turnover transport structure is located inside the turnover receiving cavity and cooperates with the turnover transmission structure 213. The turnover transport structure is used to support and drive the coating carrier plate. It is understood that the volume of the turnover receiving cavity is relatively small. If all parts of the turnover support drive module were directly placed inside the turnover receiving cavity, assembly and maintenance would be difficult. In this embodiment, the turnover support drive source 212 cooperates with the turnover transmission structure 213, which is located outside the turnover receiving cavity. Only the turnover transport structure is located inside the turnover receiving cavity; all other structures are located outside the turnover receiving cavity, thus facilitating assembly and maintenance.

[0054] It should be noted that, in this embodiment, the turnover transmission structure 213 and the turnover transportation structure can be a belt drive structure, a chain drive structure, or a gear and rack drive structure. No specific structure is limited for the turnover transmission structure 213 and the turnover transportation structure.

[0055] In some embodiments, such as Figure 5 As shown, the connecting device 3 includes a connecting platform that defines a connecting receiving cavity. The connecting receiving cavity has connecting inlets and outlets 31 at both ends along the length of the traveling track 1. Connecting support and drive modules are provided on two opposite side walls of the connecting receiving cavity in a direction perpendicular to the length of the traveling track 1. These connecting support and drive modules are used to support and drive the coating carrier plate. It is understood that the connecting device 3 needs to take the coating carrier plate from the turnover traveling device 2 or transport the coating carrier plate to the turnover traveling device 2. If the connecting platform does not have a relevant mechanism, then only a robotic arm can be added for handling, which would greatly increase the complexity of the coating carrier plate transportation system structure in this embodiment. In this embodiment, the docking platform defines a docking receiving cavity, and docking support drive modules are provided on two opposite side walls of the docking receiving cavity in a direction perpendicular to the length direction of the traveling track 1. In actual operation, when the docking platform docks with the turnover traveling device 2, the turnover traveling device 2 drives the coating carrier plate from the docking inlet / outlet 31 into the docking receiving cavity. The docking support drive modules can then drive the coating carrier plate completely into the docking receiving cavity, or drive it out of the docking receiving cavity and into the turnover traveling device 2. In other words, setting up docking drive modules within the docking receiving cavity simplifies the structure of the coating carrier plate transportation system and facilitates the transfer of the coating carrier plate between the various docking devices 3 and the turnover traveling device 2. Simultaneously, during the movement of the docking device 3, the coating carrier plate is in a relatively sealed space, which better ensures the cleanliness of the coating carrier plate and reduces the possibility of contamination to the coating process.

[0056] In some specific embodiments, such as Figure 5 As shown, the docking support drive module includes a docking support drive source 32, a docking transmission structure 33, and a docking transport structure. The docking support drive source 32 cooperates with the docking transmission structure 33. The docking transmission structure 33 is located outside the docking receiving cavity, and the docking transport structure is located inside the docking receiving cavity and cooperates with the docking transmission structure 33. The docking transport structure is used to support and drive the coating carrier plate. It is understood that the docking receiving cavity is relatively small. If all parts of the docking support drive module were placed inside the docking receiving cavity, assembly and maintenance would be difficult. In this embodiment, the docking support drive source 32 cooperates with the docking transmission structure 33, which is located outside the docking receiving cavity. Only the docking transport structure is located inside the docking receiving cavity; all other structures are located outside the docking receiving cavity, thus facilitating assembly and maintenance. It should be noted that in this embodiment, the connecting transmission structure 33 and the connecting transport structure can be a belt drive structure, a chain drive structure, or a gear and rack drive structure. No specific limitations are made on the specific structure of the connecting transmission structure 33 and the connecting transport structure.

[0057] In other embodiments, the walking track 1 can be a magnetic levitation track, which is equipped with a magnetic levitation module; the bottom of the turnover trolley 21 is equipped with a magnetic component, and the turnover trolley 21 is suspended on the magnetic levitation track by interacting with the magnetic levitation module through the magnetic component; the turnover drive module 22 drives the turnover trolley 21 to move along the length direction of the magnetic levitation track.

[0058] The following is for reference. Figures 1-14 The specific structures of the coated carrier plate transport system according to six specific embodiments of the present invention are described. Embodiment 1:

[0059] like Figure 1 , Figure 4 and Figure 7 As shown, the coating carrier transport system of this embodiment includes eight spaced transmission frames 4, two traveling tracks 1, two turnover traveling devices 2, and a connecting device 3. Each turnover traveling device 2 includes a turnover trolley 21 and a turnover drive module 22. The turnover trolley 21 defines a turnover receiving cavity. The turnover receiving cavity has turnover inlets and outlets 211 at both ends along the length direction of the traveling track 1. The turnover receiving cavity has turnover support drive modules on two opposite side walls in a direction perpendicular to the length direction of the traveling track 1. The turnover support drive module includes a turnover support drive source 212, a turnover transmission structure 213, and a turnover transport structure. The turnover support drive source 212 cooperates with the turnover transmission structure 213. The turnover transmission structure 213 is located outside the turnover receiving cavity, and the turnover transport structure is located inside the turnover receiving cavity and cooperates with the turnover transmission structure 213. The turnover transport structure is used to support and drive the coating carrier.

[0060] Each rotation drive module 22 includes a first rotation drive source 221, two transmission belt assemblies, two first rotation support blocks 225, two second rotation support blocks 226, a first rotation drive shaft 227, and a second rotation drive shaft 228. The first rotation drive source 221 is mounted on the rotation trolley 21. Each transmission belt assembly includes a first rotation drive wheel 2221, a second rotation drive wheel 2222, and a rotation drive belt 2223. The first rotation drive wheel 2221 is in transmission cooperation with the first rotation drive source 221. The two ends of the rotation drive belt 2223 pass over the first rotation drive wheel 2221 and the second rotation drive wheel 2222 respectively and are connected to the rotation trolley 21. Two first rotating support blocks 225 are connected to the transmission frame 4. A first rotating drive shaft 227 passes through the two first rotating support blocks 225 and cooperates with two first rotating drive wheels 2221. The first rotating drive shaft 227 cooperates with the first rotating drive source 221 through the transmission unit 229. Two second rotating support blocks 226 are connected to the connecting device 3. A second rotating drive shaft 228 passes through the two second rotating support blocks 226 and cooperates with two second rotating drive wheels 2222. The transmission unit 229 includes a reducer 2291 and a transmission belt structure 2292. The reducer 2291 cooperates with the first rotating drive source 221, and the transmission belt structure 2292 cooperates with the reducer 2291 and the first rotating drive shaft 227. The connecting device 3 includes a connecting platform that defines a connecting cavity. The connecting cavity has connecting inlets and outlets 31 at both ends along the length of the travel track 1. The connecting cavity has connecting support and drive modules on two opposite side walls in a direction perpendicular to the length of the travel track 1. The connecting support and drive modules include a connecting support and drive source 32, a connecting transmission structure 33, and a connecting transport structure. The connecting support and drive source 32 cooperates with the connecting transmission structure 33. The connecting transmission structure 33 is located outside the connecting cavity, and the connecting transport structure is located inside the connecting cavity and cooperates with the connecting transmission structure 33. The connecting transport structure is used to support and drive the coating carrier plate.

[0061] The working process of the coated carrier plate transportation system in this embodiment is as follows:

[0062] The first step is that when the turnover trolley 21 receives the docking signal from the automated unloading equipment, it docks with the automated unloading equipment and receives the coating carrier plate. The coating carrier plate moves into the turnover receiving cavity under the drive of the turnover support drive module.

[0063] Step 2: The turnover trolley 21 moves to the position where it docks with the connecting device 3 under the drive of the turnover drive module 22;

[0064] Step 3: The coating carrier plate moves from the turnover receiving cavity to the docking receiving cavity under the drive of the turnover support drive module;

[0065] Step 4: The connecting support drive module takes over the coating carrier and drives the coating carrier toward the turnover receiving cavity of another turnover trolley 21.

[0066] Step 5: Another turnover trolley 21 moves into the turnover receiving cavity under the drive of the turnover support drive module;

[0067] Step 6: The turnover trolley 21 moves to the position corresponding to the automated feeding equipment under the drive of the turnover drive module 22 to realize the feeding.

[0068] Example 2:

[0069] like Figure 8 As shown, the coating carrier transport system of this embodiment is largely the same as the coating carrier transport system of Embodiment 1. The difference is that the coating carrier transport system of this embodiment does not have a connecting device 3, and the turnover drive module 22 does not have a second turnover support block 226. The two ends of the second turnover drive shaft 228 are fixedly connected to the transmission frame 4.

[0070] Example 3:

[0071] like Figure 9 As shown, the coating carrier transport system in this embodiment is largely the same as that in Embodiment 2. The difference is that in this embodiment, there is only one turnover walking device 2, and the turnover drive module 22 does not have a second turnover support block 226. The two ends of the second turnover transmission shaft 228 are fixedly connected to the transmission frame 4.

[0072] Example 4:

[0073] like Figures 10-12 As shown, the coating carrier transport system of this embodiment is largely the same as the coating carrier transport system of Embodiment 1. The difference is that the turnover drive module 22 of this embodiment includes a second turnover drive source 210 (a motor in this embodiment), a turnover gear 220 and a turnover rack 230. The second turnover drive source 210 is mounted on the turnover trolley 21, the turnover gear 220 is mounted on the output shaft of the second turnover drive source 210, and the turnover rack 230 is fixed to the transmission frame 4 by a rack fixing member 240. The turnover gear 220 is arranged parallel to the traveling track 1 and cooperates with the turnover gear 220.

[0074] Example 5:

[0075] Figure 13 As shown, the coating carrier transport system of this embodiment is largely the same as the coating carrier transport system of Embodiment 1. The difference is that the coating carrier transport system of this embodiment does not have a connecting device 3, but only includes two turnover walking devices 2. The driving method of the turnover drive module 22 in this embodiment is the same as that in Embodiment 4.

[0076] Example 6:

[0077] Figure 14 As shown, the coating carrier transport system of this embodiment is largely the same as the coating carrier transport system of Embodiment 5, except that the turnover walking device 2 in this embodiment is only one.

[0078] Example 7:

[0079] In this embodiment, the turnover trolley 21 can be transported by magnetic levitation, and only one turnover trolley 21 is set on the walking track 1. The main difference between this embodiment and embodiments three and six is ​​the different transmission method. The specific settings are as follows: the walking track 1 is a magnetic levitation track, and a magnetic levitation module is set on the magnetic levitation track; a float is installed at the bottom of the turnover trolley 21, and multiple magnetic components are set on the float at intervals. The turnover trolley 21 is suspended on the magnetic levitation track by the interaction between the magnetic components and the magnetic levitation module. The turnover drive module 22 drives the turnover trolley 21 to move along the length direction of the magnetic levitation track.

[0080] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0081] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A coated carrier transport system, characterized by, include: Walking track (1); A turnover walking device (2) is movably mounted on the walking track (1). The turnover walking device (2) is arranged along the length direction of the walking track (1). The turnover walking device (2) is used to load the coating carrier plate. The turnover walking device (2) includes: A turnover trolley (21) is movably mounted on the travel track (1) and is used to load the coating carrier plate; A turnover drive module (22) is used in conjunction with the turnover trolley (21) to drive the turnover trolley (21) to move along the length direction of the travel track (1); The turnover trolley (21) defines a turnover receiving cavity. The turnover receiving cavity has turnover inlets and outlets (211) at both ends along the length direction of the walking track (1). The turnover receiving cavity has turnover support drive modules on two opposite side walls in a direction perpendicular to the length direction of the walking track (1). The turnover support drive modules are used to support and drive the coating carrier plate. The turnover support drive module includes a turnover support drive source (212), a turnover transmission structure (213), and a turnover transport structure. The turnover support drive source (212) cooperates with the turnover transmission structure (213). The turnover transmission structure (213) is located outside the turnover receiving cavity, and the turnover transport structure is located inside the turnover receiving cavity and cooperates with the turnover transmission structure (213). The turnover transport structure is used to support and drive the coating carrier plate. The turnover drive module (22) includes: The first rotation drive source (221) is fixedly connected to the transmission frame (4); A transmission belt assembly, comprising a first rotary drive pulley (2221), a second rotary drive pulley (2222), and a rotary transmission belt (2223), wherein the first rotary drive pulley (2221) is in transmission cooperation with the first rotary drive source (221), and both ends of the rotary transmission belt (2223) pass over the first rotary drive pulley (2221) and the second rotary drive pulley (2222) respectively and are fixedly connected to the rotary trolley (21); or, The turnover drive module (22) includes: The second rotation drive source (210) is mounted on the turnover trolley (21); A rotary gear (220) is disposed on the output shaft of the second rotary drive source (210); A rotating rack (230) is arranged parallel to the traveling track (1) and cooperates with the rotating gear (220).

2. The coated wafer transport system of claim 1, wherein, The transmission belt assembly is a plurality of such assemblies, which are spaced apart along a direction perpendicular to the walking track (1); the rotation drive module (22) further includes a first rotation support block (225), a second rotation support block (226), a first rotation drive shaft (227), and a second rotation drive shaft (228). The plurality of first rotation support blocks (225) are connected to the transmission frame (4), the first rotation drive shaft (227) passes through the plurality of first rotation support blocks (225) and cooperates with the plurality of first rotation drive wheels (2221), the first rotation drive shaft (227) cooperates with the first rotation drive source (221) through the transmission unit (229), the plurality of second rotation support blocks (226) are connected to the connecting device (3) or the transmission frame (4), and the second rotation drive shaft (228) passes through the plurality of second rotation support blocks (226) and cooperates with the plurality of second rotation drive wheels (2222).

3. The coated carrier plate transport system according to claim 2, characterized in that, The transmission unit (229) includes a reducer (2291) and a transmission belt structure (2292). The reducer (2291) cooperates with the first rotary drive source (221), and the transmission belt structure (2292) cooperates with the reducer (2291) and the first rotary transmission shaft (227).

4. The coated carrier transport system according to any one of claims 1-3, characterized in that, The coating carrier transport system also includes a connecting device (3), which is located between two adjacent turnover walking devices (2). The connecting device (3) is capable of transporting the coating carrier on one turnover walking device (2) to another turnover walking device (2).

5. The coated carrier transport system according to claim 4, characterized in that, The connecting device (3) includes a connecting platform that defines a connecting cavity. The connecting cavity has connecting inlets and outlets (31) at both ends along the length of the travel track (1). The connecting cavity has connecting support and drive modules on two opposite side walls in a direction perpendicular to the length of the travel track (1). The connecting support and drive modules are used to support and drive the coating carrier plate.

6. The coated carrier transport system according to claim 5, characterized in that, The connection support drive module includes a connection support drive source (32), a connection transmission structure (33), and a connection transport structure. The connection support drive source (32) cooperates with the connection transmission structure (33). The connection transmission structure (33) is located outside the connection receiving cavity. The connection transport structure is located inside the connection receiving cavity and cooperates with the connection transmission structure (33). The connection transport structure is used to support and drive the coating carrier plate.

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