Method and apparatus for determining production capacity boundaries and device

Abstract

The application provides a method and device for determining the production capacity boundary, and equipment, and the method comprises the following steps: obtaining relevant data of a production equipment producing a fixed number of elements in batches, determining the time interval between the production end time of adjacent batches according to the relevant data; sorting the determined time interval to obtain a time interval sequence; respectively analyzing the distribution characteristics of the time interval on both sides of the current time interval sequence boundary, and determining whether the data elimination condition is met; when the condition is met, determining the outlier value according to the average value of the current time interval sequence, eliminating the time interval of the extraction step where the outlier value is located, and re-determining whether the data elimination condition is met; when the condition is not met, determining the production capacity boundary of the production equipment according to the minimum and maximum time interval of the current time interval sequence and the fixed number. According to the method provided by the application, the production capacity boundary can be determined according to the screened time interval, and the accuracy of the production capacity planning and the decision-making efficiency are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a method and device for determining the production capacity boundary and equipment. BACKGROUND

[0002] In the field of semiconductor manufacturing, the production capacity of a device is usually measured by the number of wafers produced per hour (WPH) under the condition that the device is fully loaded and stably running, where WPH = Run Size / Takt Time, Run Size represents the number of wafers produced in each batch, which is determined under the condition that the device is fully loaded and stably running, and Takt Time represents the time interval between the end times of two adjacent batches. Therefore, the production capacity of the device is determined by Takt Time under the condition that the device is fully loaded and stably running.

[0003] Under the condition that the device is fully loaded and stably running, the Takt Time has an upper and lower boundary, and therefore the production capacity of the device has an upper and lower boundary. Since one of the tasks of capacity planning in the field of semiconductor manufacturing is to plan the number of production devices according to the capacity expansion demand, and to estimate the required production resources and prepare for production according to the planned number of production devices, the number of production devices mainly depends on the production capacity of the device, therefore, the production capacity of the device can indirectly affect the capacity planning. The semiconductor manufacturing process is complex and the line status is dynamic and variable, accurately determining the boundary of the production capacity of the device can provide a solid basis for decision-making for capacity planning and improve the efficiency of decision-making.

[0004] In order to accurately determine the boundary of the production capacity of the device, it is necessary to correctly process the Takt Time data. Currently, the normal distribution algorithm is mainly used to process the Takt Time data, and the normal distribution algorithm estimates the average value to determine the final Takt Time based on multiple Takt Times corresponding to multiple batches, which can only roughly describe the average level and has low accuracy, and cannot evaluate the boundary of the production capacity of the device, which will cause deviation in capacity planning and greatly affect the progress of production preparation. Therefore, it is necessary to provide a solution that can accurately evaluate the boundary of the production capacity of the device. SUMMARY

[0005] The present application provides a method and device for determining the boundary of the production capacity of the device, which solves the problem that the existing Takt Time data processing scheme cannot correctly process the Takt Time data and cannot evaluate the boundary of the production capacity of the device.

[0006] In a first aspect, the present application provides a method for determining the production capacity boundary, comprising:

[0007] obtaining relevant data of the production equipment producing a fixed number of components in batches, and determining the time interval between the production end time of adjacent batches according to the relevant data;

[0008] sorting the determined time interval according to the length, and obtaining a time interval sequence;

[0009] analyzing the distribution characteristics of the time interval of each boundary of the current time interval sequence respectively, and determining whether the data elimination condition is met, wherein the time interval of each boundary is the time interval of two extraction steps;

[0010] when the data elimination condition is met, determining the outlier in the analyzed time interval according to the average value of the current time interval sequence, eliminating the time interval of the extraction step where the outlier is located, and reanalyzing the distribution characteristics of the time interval of each boundary of the current time interval sequence respectively, and determining whether the data elimination condition is met;

[0011] when the data elimination condition is not met, determining the production capacity boundary of the production equipment according to the minimum time interval, the maximum time interval and the fixed number of the current time interval sequence.

[0012] Optionally, analyzing the distribution characteristics of the time interval of each boundary of the current time interval sequence respectively, and determining whether the data elimination condition is met, comprises:

[0013] determining whether the distribution characteristics of the time interval of two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0014] when the distribution characteristics of the time interval of two extraction steps corresponding to any boundary do not conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data elimination condition is met;

[0015] when the distribution characteristics of the time interval of two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data elimination condition is not met.

[0016] The method for determining the production capacity boundary provided by the application determines whether the data elimination condition is met by comparing the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary with the linear function distribution characteristics of the current time interval sequence, and specifically limits that when the distribution characteristics of the time intervals of the two extraction steps corresponding to any boundary do not conform to the linear function distribution characteristics of the current time interval sequence, the data elimination condition is met, thereby providing a specific data elimination condition determination method and determination standard to accurately determine whether the current time interval sequence meets the data elimination condition, improving the accuracy of the production capacity boundary, and improving the reliability and rationality of the above-mentioned method for determining the production capacity boundary.

[0017] Optionally, the method for determining whether the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence comprises:

[0018] For a first boundary with a smaller time interval, the minimum time intervals Min1 and Min2 of the two extraction steps corresponding to the first boundary are determined respectively, and the Min1 is not greater than the Min2.

[0019] For a second boundary with a larger time interval, the maximum time intervals MaxN-1 and MaxN of the two extraction steps corresponding to the second boundary are determined respectively, and the MaxN-1 is not greater than the MaxN.

[0020] When Min2-Min1 < C0*σ, it is determined that the distribution characteristics of the time intervals of the two extraction steps corresponding to the first boundary conform to the linear function distribution characteristics of the current time interval sequence.

[0021] When MaxN-MaxN-1 < C0*σ, it is determined that the distribution characteristics of the time intervals of the two extraction steps corresponding to the second boundary conform to the linear function distribution characteristics of the current time interval sequence.

[0022] The C0 is a preset tolerance coefficient, and the σ is the standard deviation of the current time interval sequence.

[0023] The production capacity boundary determination method provided by the application uses the difference between the minimum time interval Min1 and Min2 in the two extraction steps corresponding to the first boundary with a small time interval to reflect the distribution characteristics of the time interval of the two extraction steps corresponding to the first boundary, and uses the difference between the maximum time interval MaxN-1 and MaxN in the two extraction steps corresponding to the second boundary with a large time interval to reflect the distribution characteristics of the time interval of the two extraction steps corresponding to the second boundary, and specifically limits that when Min2-Min1 < C0*sigma and MaxN-MaxN-1 < C0*sigma, the linear function distribution characteristics of the current time interval sequence are met, a specific data rejection condition determination method and determination standard are provided to accurately identify whether there is an outlier in the current time interval sequence that does not meet the linear function characteristics, the accuracy of the determined production capacity boundary is improved, and the reliability, rationality and implementability of the production capacity boundary determination method are improved.

[0024] Optionally, the outlier in the analyzed time interval is determined according to the average value of the current time interval sequence, including:

[0025] The max{|MaxN-μ|, |Min1-μ|} is determined as the outlier in the analyzed time interval.

[0026] The μ is the average value of the current time interval sequence.

[0027] The production capacity boundary determination method provided by the application limits the determination of outliers in the minimum time interval Min1 in the two extraction steps corresponding to the first boundary and the maximum time interval MaxN in the two extraction steps corresponding to the second boundary, and limits that the time interval with the maximum absolute value of the difference between the Min1 and MaxN and the average value μ of the current time interval sequence is taken as the outlier, a specific outlier determination method and determination standard are provided, which provides an implementation basis for rejecting the time interval of the extraction step in which the outlier is located in the TaktTime data, improves the accuracy of the determined production capacity boundary, and improves the reliability, rationality and implementability of the production capacity boundary determination method.

[0028] Optionally, the extraction step is the ratio of the total number of time intervals of the current time interval sequence to the preset grouping number N.

[0029] The method for determining the production capacity boundary provided by the application takes the ratio of the total number of time intervals in the current time interval sequence to the preset grouping number N as the extraction step, limits the determination mode of the extraction step, takes the time interval of each extraction step as the unit of data rejection condition judgment and data rejection, improves the efficiency of data processing of the Takt Time, and improves the rationality and implementability of the method for determining the production capacity boundary.

[0030] Optionally, the production capacity boundary of the production equipment is determined according to the minimum time interval, the maximum time interval and the fixed number of the current time interval sequence, and the method comprises the following steps of:

[0031] determining the production capacity boundary WPH of the production equipment, wherein WPH∈[Run Size / (M2*MaxN), Run Size / (M1*Min1)].

[0032] wherein the Run Size is the fixed number, the Min1 is the minimum time interval of the current time interval sequence, the MaxN is the maximum time interval of the current time interval sequence, the M1 is a preset first inclusive coefficient, and the M2 is a preset second inclusive coefficient.

[0033] The method for determining the production capacity boundary provided by the application multiplies the minimum time interval Min1 of the current time interval sequence by the preset first inclusive coefficient M1 and multiplies the maximum time interval MaxN of the current time interval sequence by the preset second inclusive coefficient M2, so that the endpoint data of the time interval meeting the determination requirement of the production capacity boundary can be included in the analysis range, and a specific calculation method of the production capacity boundary WPH is provided, and the rationality and implementability of the method for determining the production capacity boundary are improved.

[0034] Optionally, after the relevant data of the production equipment producing the fixed number of elements in batches is obtained, the method further comprises the following steps of:

[0035] determining whether the relevant data includes valid data, wherein the valid data is data obtained when the production equipment is fully loaded and the running state meets the requirement;

[0036] if the valid data is not included, the relevant data of the production equipment producing the fixed number of elements in batches is reacquired.

[0037] The method for determining the production capacity boundary provided by the application can detect the effectiveness of the obtained relevant data, determine relevant data obtained when the production equipment is full and the running state meets the requirements, otherwise, reacquire relevant data of the production equipment producing a fixed number of elements in batches, can ensure that effective relevant data is obtained to determine effective Takt Time data, provides necessary basic conditions for subsequent processing of Takt Time data and determination of the production capacity boundary by using the processed Takt Time data, and improves the reliability, rationality and implementability of the method for determining the production capacity boundary.

[0038] Optionally, the element is a semiconductor element.

[0039] The method for determining the production capacity boundary provided by the application limits the element to be a semiconductor element, provides a method for determining the production capacity boundary in the field of semiconductor manufacturing, and fills the gap of the method for determining the production capacity boundary of the semiconductor production equipment in the field of semiconductor manufacturing.

[0040] In a second aspect, the application provides a device for determining the production capacity boundary, comprising:

[0041] The interval determination unit is configured to acquire relevant data of the production equipment producing a fixed number of elements in batches, and determine time intervals between production end times of adjacent batches according to the relevant data.

[0042] The sequence determination unit is configured to sort the determined time intervals according to the length, and obtain a time interval sequence.

[0043] The condition judgment unit is configured to analyze the distribution characteristics of the time intervals at both boundaries of the current time interval sequence respectively, and determine whether the data elimination condition is met, wherein the time intervals at both boundaries are time intervals of two extraction steps.

[0044] The interval elimination unit is configured to, when the data elimination condition is met, determine an outlier in the analyzed time intervals according to the average value of the current time interval sequence, eliminate the time interval of the extraction step where the outlier is located, and reanalyze the distribution characteristics of the time intervals at both boundaries of the current time interval sequence respectively, and determine whether the data elimination condition is met.

[0045] The boundary calculation unit is configured to, when the data elimination condition is not met, determine the production capacity boundary of the production equipment according to the minimum time interval, the maximum time interval and the fixed number of the current time interval sequence.

[0046] Optionally, the condition judgment unit analyzes the distribution characteristics of the time intervals at both boundaries of the current time interval sequence respectively, and determines whether the data elimination condition is met, comprising:

[0047] determine whether the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0048] when the distribution characteristics of the time intervals of the two extraction steps corresponding to any boundary do not conform to the linear function distribution characteristics of the current time interval sequence, determine that the data elimination condition is met;

[0049] when the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, determine that the data elimination condition is not met.

[0050] Optionally, the condition determining unit determines whether the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, comprising:

[0051] for a first boundary with a smaller time interval, respectively determine the minimum time intervals Min1 and Min2 of the two extraction steps corresponding to the first boundary, wherein the Min1 is not greater than the Min2;

[0052] for a second boundary with a larger time interval, respectively determine the maximum time intervals MaxN-1 and MaxN of the two extraction steps corresponding to the second boundary, wherein the MaxN-1 is not greater than the MaxN;

[0053] when Min2-Min1 < C0*σ, determine that the distribution characteristics of the time intervals of the two extraction steps corresponding to the first boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0054] when MaxN-MaxN-1 < C0*σ, determine that the distribution characteristics of the time intervals of the two extraction steps corresponding to the second boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0055] the C0 is a preset tolerance coefficient, and the σ is a standard deviation of the current time interval sequence.

[0056] Optionally, the interval elimination unit determines the outlier in the analyzed time interval according to the average value of the current time interval sequence, comprising:

[0057] determine max{|MaxN-μ|, |Min1-μ|} as the outlier in the analyzed time interval;

[0058] wherein, the μ is the average value of the current time interval sequence.

[0059] Optionally, the extraction step is a ratio of the total number of time intervals of the current time interval sequence and a preset grouping number N.

[0060] Optionally, the boundary calculation unit determines the production capacity boundary of the production equipment according to the minimum time interval, the maximum time interval of the current time interval sequence and the fixed quantity, and the determination comprises:

[0061] determining the production capacity boundary WPH of the production equipment, wherein WPH ∈ [Run Size / (M2*MaxN), Run Size / (M1*Min1)].

[0062] wherein the Run Size is the fixed quantity, the Min1 is the minimum time interval of the current time interval sequence, the MaxN is the maximum time interval of the current time interval sequence, the M1 is a preset first inclusive coefficient, and the M2 is a preset second inclusive coefficient.

[0063] Optionally, after obtaining the related data of the production equipment producing the fixed quantity of elements in batches, the interval determination unit is further configured to:

[0064] determine whether the related data comprises valid data, wherein the valid data is data obtained when the production equipment is full and the running state meets the requirements;

[0065] if the valid data is not included, re-obtain the related data of the production equipment producing the fixed quantity of elements in batches.

[0066] Optionally, the elements are semiconductor elements.

[0067] In a third aspect, the present application provides a production capacity boundary determination device, comprising a memory and a processor, wherein:

[0068] the memory is configured to store a computer program;

[0069] the processor is configured to read the program in the memory and perform the following steps:

[0070] obtain related data of a production equipment producing a fixed quantity of elements in batches, and determine time intervals between production end times of adjacent batches according to the related data;

[0071] sort the determined time intervals according to the length, and obtain a time interval sequence;

[0072] analyze the distribution characteristics of the time intervals of the two boundaries of the current time interval sequence respectively, and determine whether the data elimination condition is met, wherein the time intervals of each boundary are two extracted time intervals;

[0073] When the data elimination condition is met, according to the average value of the current time interval sequence, the outlier in the parsed time interval is determined, the time interval of the extraction step where the outlier is located is eliminated, and the distribution characteristics of the time intervals at the boundaries of the current time interval sequence are respectively parsed again to determine whether the data elimination condition is met;

[0074] When the data elimination condition is not met, according to the minimum time interval, the maximum time interval and the fixed number of the current time interval sequence, the production capacity boundary of the production equipment is determined.

[0075] Optionally, the processor respectively parses the distribution characteristics of the time intervals at the boundaries of the current time interval sequence to determine whether the data elimination condition is met, including:

[0076] determining whether the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0077] When the distribution characteristics of the time intervals of the two extraction steps corresponding to any boundary do not conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data elimination condition is met;

[0078] When the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data elimination condition is not met.

[0079] Optionally, the processor determines whether the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, including:

[0080] For a first boundary with a smaller time interval, the minimum time intervals Min1 and Min2 of the two extraction steps corresponding to the first boundary are respectively determined, and the Min1 is not greater than the Min2;

[0081] For a second boundary with a larger time interval, the maximum time intervals MaxN-1 and MaxN of the two extraction steps corresponding to the second boundary are respectively determined, and the MaxN-1 is not greater than the MaxN;

[0082] When Min2-Min1

[0083] When MaxN-MaxN-1

[0084] The C0 is a preset tolerance coefficient, and the σ is a standard deviation of the current time interval sequence.

[0085] Optionally, the processor determines an outlier in the parsed time interval according to a mean value of the current time interval sequence, including:

[0086] Determining max{|MaxN-μ|, |Min1-μ|} as the outlier in the parsed time interval.

[0087] The μ is a mean value of the current time interval sequence.

[0088] Optionally, the extraction step is a ratio of a total number of time intervals of the current time interval sequence to a preset grouping number N.

[0089] Optionally, the processor determines the production capacity boundary of the production equipment according to the minimum time interval, the maximum time interval of the current time interval sequence, and the fixed number, including:

[0090] Determining the production capacity boundary WPH∈[Run Size / (M2*MaxN), Run Size / (M1*Min1)] of the production equipment.

[0091] The Run Size is the fixed number, the Min1 is the minimum time interval of the current time interval sequence, the MaxN is the maximum time interval of the current time interval sequence, the M1 is a preset first inclusive coefficient, and the M2 is a preset second inclusive coefficient.

[0092] Optionally, after obtaining the related data of the production equipment producing the fixed number of elements in batches, the processor further:

[0093] Determining whether the related data includes valid data, the valid data being data obtained when the production equipment is full and the running state meets the requirements.

[0094] If the valid data is not included, re-obtaining the related data of the production equipment producing the fixed number of elements in batches.

[0095] Optionally, the element is a semiconductor element.

[0096] In a fourth aspect, the present application provides a computer readable storage medium having computer program instructions stored thereon, the computer program instructions being executed by a processor to implement the steps of the production capacity boundary determination method provided in the first aspect.

[0097] In a fifth aspect, the present application provides a chip, which is coupled with a memory in a device, so that the chip invokes program instructions stored in the memory when running, to implement any possible method involved in the above aspects and aspects related thereto.

[0098] In a sixth aspect, the present application provides a computer program product, which, when running on an electronic device, causes the electronic device to implement any possible method involved in the above aspects and aspects related thereto.

[0099] The production capacity boundary determination method and device and equipment provided by the present application have the following beneficial effects:

[0100] The concept of production capacity boundary of a production device is first proposed; the time interval between the production end times of adjacent batches is subjected to data rejection condition judgment, and when the data rejection condition is met, the time interval of the extraction step in which the outlier is located is rejected, the time interval is subjected to accurate data processing, and the time interval reflecting the production capacity of the production device is obtained; and a specific method for determining the production capacity boundary of the production device according to the determined time interval is provided, which can improve the accuracy and decision efficiency of production capacity planning, improve the implementation effect of production preparation work, and reduce the waste of production resources. BRIEF DESCRIPTION OF DRAWINGS

[0101] Figure 1 A flowchart of a production capacity boundary determination method provided by an embodiment of the present application;

[0102] Figure 2 A schematic diagram of a linear function relationship between a batch sequence number and a determined time interval provided by an embodiment of the present application;

[0103] Figure 3 A flowchart of an implementation of a production capacity boundary determination method provided by an embodiment of the present application;

[0104] Figure 4 A schematic diagram of a production capacity boundary determination device provided by an embodiment of the present application;

[0105] Figure 5 A schematic diagram of a production capacity boundary determination device provided by an embodiment of the present application; DETAILED DESCRIPTION

[0106] In order to make ordinary people in the art better understand the technical solutions of the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application.

[0107] It should be noted that the terms "first", "second", etc. in the specification and claims of the present disclosure and the above-described drawings are used to distinguish similar objects, and do not necessarily have to describe a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present disclosure described herein can be implemented in an order other than that illustrated or described herein. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Rather, they are merely examples of devices and methods consistent with some aspects of the present disclosure as detailed in the appended claims. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0108] In the description of the embodiments of the present application, unless otherwise specified, " / " represents the meaning of or, for example, A / B can represent A or B; "and / or" in the text only describes the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent three cases of A alone, A and B together, and B alone. In addition, in the description of the embodiments of the present application, "multiple" means two or more than two, and other quantifiers similar thereto should be understood. The preferred embodiments described herein are only used to illustrate and explain the present application, and do not limit the present application, and the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0109] In view of the above problems existing in the existing Takt Time data processing scheme, the present application proposes a method and device for determining the production capacity boundary.

[0110] In the following, a method and device for determining the production capacity boundary and equipment in the embodiments of the present application are described in detail in conjunction with the drawings.

[0111] Embodiment 1

[0112] The present application provides a flowchart of a method for determining the production capacity boundary, as shown in Figure 1 , comprising:

[0113] Step S101, acquiring related data of the production equipment producing a fixed number of elements in batches, and determining the time interval between the production end times of adjacent batches according to the related data;

[0114] As an optional implementation, the element is a semiconductor element. In the field of semiconductor production, the production capacity boundary of the semiconductor production equipment is determined.

[0115] For a preset production equipment at a preset processing step, the related data of the above production equipment producing a fixed number of elements in batches is collected.

[0116] Embodiment 1: The relevant data includes a time interval between production end times of adjacent batches.

[0117] After the relevant data is obtained, the time interval between production end times of adjacent batches can be directly obtained from the relevant data, without additional calculation processes.

[0118] Embodiment 2: The relevant data does not include a time interval between production end times of adjacent batches, but includes time data for calculating the time interval between production end times of adjacent batches.

[0119] For example, the relevant data includes the production end time of each batch, and the time interval between production end times of adjacent batches is determined by calculating the difference between the production end times of adjacent batches.

[0120] In addition to the time interval and the time data for calculating the time interval between production end times of adjacent batches, the relevant data can also include other data related to the production equipment or production characteristics, such as the number of the production equipment, the serial number of the production batch, the number of elements produced in each batch, the production date, the processing step, the batch identifier, etc.

[0121] As shown in Table 1, the present application provides a schematic table of relevant data.

[0122] Table 1: Schematic table of relevant data

[0123]

[0124]

[0125] Table 1 provides relevant data for Batch 1 to Batch 1709 when a certain production equipment produces a fixed number of elements in batches in processing step stepA.

[0126] In step S102, the determined time intervals are sorted by length to obtain a time interval sequence.

[0127] When performing time interval elimination, the time interval corresponding to each batch is taken as an analysis object, and the determined time intervals are sorted.

[0128] When sorting the determined time intervals by length, the sorting can be ascending order from small to large, or descending order from large to small.

[0129] The embodiment of the present application does not limit the specific implementation of the sorting, and any implementation of sorting the determined time intervals according to the time length can be applied to the embodiment of the present application, which will not be repeated here.

[0130] In step S103, the distribution characteristics of the time intervals at the two boundaries of the current time interval sequence are analyzed respectively to determine whether the data elimination condition is met. When the data elimination condition is met, step S104 is executed, otherwise, step S105 is executed.

[0131] The time interval at each boundary is the time interval of two extraction steps.

[0132] The distribution characteristics refer to the deviation between different time intervals, which can be measured by the difference between different time intervals.

[0133] In order to improve the efficiency of data processing and reduce the amount of calculation, the time interval of two extraction steps is taken at each of the two boundaries to analyze the distribution characteristics.

[0134] The extraction step is a numerical value. For example, when the extraction step is 1, the time interval of two extraction steps is taken at each of the two boundaries of the current time interval sequence, and each extraction step includes 1 time interval, so that the distribution characteristics of 4 time intervals are analyzed. When the extraction step is 2, the time interval of two extraction steps is taken at each of the two boundaries of the current time interval sequence, and each extraction step includes 2 time intervals, so that the distribution characteristics of 8 time intervals are analyzed. When the extraction step is 3, the time interval of two extraction steps is taken at each of the two boundaries of the current time interval sequence, and each extraction step includes 3 time intervals, so that the distribution characteristics of 12 time intervals are analyzed. Similarly, the extraction step can be adjusted according to the change of the time interval sequence.

[0135] When analyzing the distribution characteristics, each extraction step is taken as a whole, which can avoid the misjudgment of the production capacity boundary value caused by the large deviation of a certain data, and reduce the sensitivity of the determination method of the production capacity boundary value.

[0136] It should be noted that when the data elimination condition is met, the time interval elimination needs to be performed. After the time interval elimination, the total number of time intervals included in the current time interval sequence changes, and the extraction step can be adjusted according to the change of the time interval sequence.

[0137] In step S104, the outlier in the analyzed time interval is determined according to the average value of the current time interval sequence, the time interval of the extraction step in which the outlier is located is eliminated, and step S103 is executed.

[0138] The time interval with the largest difference is determined as the outlier by calculating the difference between the time interval of the two boundaries of the current time interval sequence and the average value of the current time interval sequence.

[0139] After determining the outlier, the time interval of the extraction step in which the outlier is located is removed from the current time interval sequence. The removal of the time interval according to the extraction step can reduce the calculation amount and improve the algorithm efficiency.

[0140] During the actual operation of the equipment, due to the existence of some factors such as equipment downtime, the time interval will fluctuate greatly with the change of production batches. Such abnormally fluctuating data cannot reflect the normal level of the production equipment. Through the above steps, when the data removal condition is met, the time interval of the extraction step in which the outlier is located is removed, which can remove the abnormally fluctuating data, improve the accuracy of data processing of the time interval, and ensure the effectiveness of the time interval.

[0141] After the time interval is removed, step S103 is performed to re-judge the data removal condition. If the data removal condition is still met, the time interval is removed according to the above method, until the data removal condition is not met. The method of judging whether the data removal condition is met and removing the time interval in a loop can reduce the calculation amount while ensuring that as many time intervals as possible are used for judgment.

[0142] In step S105, the production capacity boundary of the production equipment is determined according to the minimum time interval, the maximum time interval of the current time interval sequence and the fixed number.

[0143] The ratio of the fixed number to the minimum time interval of the current time interval sequence and the ratio of the fixed number to the maximum time interval of the current time interval sequence are used as the two boundary values of the production capacity boundary of the production equipment.

[0144] In order to determine the production capacity boundary of the production equipment, the related data obtained under the condition that the production equipment is full and stable is required, and the use of the related data can determine the time interval that meets the preset data characteristics. Therefore, the effectiveness of the obtained related data needs to be detected:

[0145] After obtaining the related data of the production equipment producing a fixed number of elements in batches, it is determined whether the related data includes valid data. If the related data does not include the valid data, the related data of the production equipment producing a fixed number of elements in batches is re-obtained.

[0146] The valid data is the data obtained when the production equipment is full and the running state meets the requirements.

[0147] The requirements to be met by the running state can be specifically limited according to specific implementation, for example, the running state is set as a stable running state, specifically, when the production equipment is producing components, no unexpected situation caused by equipment factors such as equipment downtime and unexpected situation caused by environmental factors such as power failure.

[0148] Through the above effectiveness detection, it is determined that the obtained related data contains valid data obtained when the production equipment is full and the running state meets the requirements, and when the related data does not include the valid data, the related data of the production equipment producing a fixed number of components in batches is reacquired.

[0149] It should be noted that when the related data of the production equipment producing a fixed number of components in batches is reacquired, the data acquisition range of the related data can be expanded or changed to obtain the valid data.

[0150] When the data acquisition of the related data is performed, different production equipment, different processing steps, and different fixed number of related data produced in each batch can be acquired, so data effectiveness detection needs to be performed when data acquisition is performed, and invalid data needs to be removed:

[0151] Whether the time interval that does not meet the pre-defined data characteristics can be determined according to the related data;

[0152] If yes, the related data of the time interval that can be determined not to meet the pre-defined data characteristics is removed.

[0153] The pre-defined data characteristics can be specifically set according to specific implementation, for example, the equipment number of the production equipment is a pre-set equipment number, and the number of components produced in the time interval is a pre-set fixed number, and the embodiments of the present application do not make any limitation thereto.

[0154] Because the process of semiconductor is extremely precise, theoretically, the time interval between the end time of adjacent batches, i.e. Takt Time, has only two forms of expression: (1) Takt Time is controlled by clock inside the equipment, for a certain recipe, Takt Time is constant, at this time, the relationship between Takt Time and processing batch can be described by horizontal straight line function; (2) Takt Time is controlled by advanced process control inside the equipment, in the process of collecting data, Takt Time related data is constantly corrected by feeding back the key parameters of the process, at this time, the relationship between Takt Time and processing batch can be described by linear function.

[0155] As shown in Figure 2 , the embodiment of the present application provides a schematic diagram of the linear function relationship between the sequence number of each batch and the determined time interval.

[0156] The above Figure 2 is a schematic diagram made according to the data in the above table 1, the horizontal coordinate is the sequence number of each batch, and the vertical coordinate is the time interval.

[0157] From the above Figure 2 , it can be seen that in the vertical coordinate range of [0.478, 0.6178], the time interval changes, but the change is relatively gentle, the difference between the data is small, and the time interval presents linear function distribution characteristics; in the vertical coordinate range less than 0.478 or greater than 0.6178, the time interval changes greatly, and the difference with the time interval in the above [0.478, 0.6178] range is large, which does not conform to the linear function distribution characteristics, is a discrete value, and will affect the determination of the production capacity boundary, and needs to be removed.

[0158] From the above Figure 2 , it can be seen that the discrete value to be removed is at the two boundaries of the above time interval sequence, therefore, by analyzing the distribution characteristics of the time interval of the two boundaries of the current time interval sequence, it can be determined whether the data removal condition is met, i.e. whether there is a time interval that needs to be removed.

[0159] After analyzing the distribution characteristics of the time interval of the two boundaries of the current time interval sequence, by comparing the distribution characteristics of the time interval of the two extraction steps corresponding to each boundary with the linear function distribution characteristics of the current time interval sequence, it can be determined whether the data removal condition is met:

[0160] determine whether the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, specifically:

[0161] For a first boundary with a smaller time interval, determine the minimum time intervals Min1 and Min2 of the two extraction steps corresponding to the first boundary, respectively, wherein the Min1 is not greater than the Min2;

[0162] For a second boundary with a larger time interval, determine the maximum time intervals MaxN-1 and MaxN of the two extraction steps corresponding to the second boundary, respectively, wherein the MaxN-1 is not greater than the MaxN;

[0163] When Min2-Min1 < C0*σ, it is determined that the distribution characteristics of the time intervals of the two extraction steps corresponding to the first boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0164] When MaxN-MaxN-1 < C0*σ, it is determined that the distribution characteristics of the time intervals of the two extraction steps corresponding to the second boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0165] The C0 is a preset tolerance coefficient, representing the acceptable degree of change of the time interval under the condition that the production equipment is full and stable, and the specific value of the C0 can be set according to the actual situation, for example, the actual situation of long-term operation of the production equipment, and as an optional implementation manner, the C0 ∈ [0.001, 0.05].

[0166] The σ is the standard deviation of the current time interval sequence, wherein n is the total number of time intervals of the current time interval sequence, μ is the average value of the current time interval sequence, and t i is the i-th time interval in the current time interval sequence.

[0167] After determining whether the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, the following determination criteria are used to determine whether the data rejection condition is met:

[0168] When the distribution characteristics of the time intervals of the two extraction steps corresponding to any boundary do not conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data rejection condition is met;

[0169] When the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data rejection condition is not met.

[0170] There is a distribution feature between the time intervals of the corresponding two extraction steps of each boundary, and when the distribution feature of any boundary does not match the linear function distribution feature of the current time interval sequence, it is determined that the data rejection condition is met.

[0171] According to the linear function feature of the time interval sequence, the embodiment of the application provides a method for determining a data rejection condition: when Min2-Min1≥C0*σ, or MaxN-MaxN-1≥C0*σ, it is determined that the data rejection condition is met, and the time interval of the extraction step corresponding to the outlier needs to be rejected; when Min2-Min1

[0172] It should be noted that, because the current time interval sequence is determined by sorting, and Min1 and Min2 are located at the first boundary with smaller time intervals, and MaxN-1 and MaxN are located at the second boundary with larger time intervals, the size relationship between the above data is: Min1≤Min2≤MaxN-1≤MaxN.

[0173] The above extraction step is the ratio of the total number of time intervals of the current time interval sequence to the preset grouping number N.

[0174] The determination method of the above preset grouping number N can be specifically set according to specific implementation conditions, for example, the data sensitivity of the preset grouping number N is determined by testing to determine the specific value of the above preset grouping number N; the specific value of the above preset grouping number N can be specifically set according to specific implementation conditions, for example, N≥100.

[0175] The determination method of the time interval of the above extraction step can only determine two extraction step time intervals at the two boundaries of the current time interval sequence, for example, extracting two extraction step time intervals at the two boundaries of the current time interval sequence; or the current time interval sequence can be pooled into N groups, and the first group, the second group, the N-1 group and the N group of the two boundaries are used as the above extraction step time intervals, wherein the number of time intervals in the above N groups can be the same or different.

[0176] The following method is used to determine the outlier in the analyzed time interval according to the average value of the current time interval sequence, comprising:

[0177] Outliers are determined in the following context: (1) the minimum time interval Min1 in the two extraction steps corresponding to the first boundary, which is the minimum time interval of the current time interval sequence; (2) the maximum time interval MaxN in the two extraction steps corresponding to the second boundary, which is the maximum time interval of the current time interval sequence; and (3) the outliers max{|MaxN-μ|,|Min1-μ|} in the parsed time interval, where μ is the average value of the current time interval sequence.

[0178] The absolute values ​​of the differences between Min1 and MaxN and the average value μ of the current time interval sequence are taken to obtain |Min1-μ| and |MaxN-μ|. When |Min1-μ| is greater than |MaxN-μ|, Min1 is considered an outlier. When |Min1-μ| is less than |MaxN-μ|, MaxN is considered an outlier. When |Min1-μ| is equal to |MaxN-μ|, at least one of Min1 and MaxN is considered an outlier.

[0179] After identifying outliers, remove the time intervals containing the extraction step size of the outlier from the current time interval sequence: if Min1 is identified as an outlier, remove the time intervals containing the extraction step size of Min1; if MaxN is identified as an outlier, remove the time intervals containing the extraction step size of MaxN.

[0180] The production capacity boundary of the production equipment is determined using the following method based on the minimum time interval, the maximum time interval, and the fixed quantity of the current time interval sequence:

[0181] Implementation method 1: Determine the production capacity boundary WPH∈[Run Size / MaxN, Run Size / Min1] of the production equipment.

[0182] Wherein, Run Size is the fixed quantity, Min1 is the minimum time interval of the current time interval sequence, and MaxN is the maximum time interval of the current time interval sequence.

[0183] By comparing the aforementioned fixed quantity with the aforementioned Min1, the maximum production capacity boundary of the production equipment is obtained; by comparing the aforementioned fixed quantity with the aforementioned MaxN, the minimum production capacity boundary of the production equipment is obtained.

[0184] In order to include the critical value within the analysis range, the calculation method of the above-described embodiment 1 has been further improved.

[0185] Implementation Method 2: Determine the production capacity boundary WPH∈[Run Size / (M2*MaxN), RunSize / (M1*Min1)].

[0186] Wherein, Run Size is the fixed quantity, Min1 is the minimum time interval of the current time interval sequence, MaxN is the maximum time interval of the current time interval sequence, M1 is the preset first tolerance coefficient, and M2 is the preset second tolerance coefficient.

[0187] By comparing the aforementioned fixed quantity with M1*Min1, the maximum production capacity boundary of the production equipment is obtained; by comparing the aforementioned fixed quantity with M2*MaxN, the minimum production capacity boundary of the production equipment is obtained.

[0188] M1 is a decimal number close to 1 and less than 1, and M2 is a decimal number close to 1 but greater than 1. The specific values ​​of M1 and M2 can be set according to the specific implementation situation. As an optional implementation method, M1∈(0.999, 1.0) and M2∈(1.0, 1.001).

[0189] Multiplying Min1 and M1, and multiplying MaxN and M2, allows us to include the effective endpoint data within the analysis scope and obtain the effective production capacity boundary.

[0190] like Figure 3 As shown, this embodiment of the invention provides a flowchart of an implementation method for determining a production capacity boundary, including:

[0191] Step S301: Obtain relevant data on the production of a fixed number of components in batches by the production equipment;

[0192] Step S302: Determine whether the above-mentioned relevant data includes valid data. If yes, proceed to step S303; otherwise, proceed to step S301.

[0193] The above valid data is obtained when the above production equipment is fully loaded and its operating status meets the requirements.

[0194] Step S303: Determine whether the time interval that does not conform to the predefined data characteristics can be determined based on the above relevant data. If yes, proceed to step S304; otherwise, proceed to step S305.

[0195] Step S304: Remove relevant data that can be determined to be time intervals that do not conform to the predefined data characteristics, and proceed to step S303;

[0196] Step S305: Determine the time interval between the production end times of adjacent batches based on the aforementioned relevant data;

[0197] Step S306: Sort the determined time intervals according to their duration to obtain a time interval sequence;

[0198] In step S307, an extraction step is obtained by calculating the ratio of the total number of time intervals of the current time interval sequence to the preset grouping number N.

[0199] According to the change of the total number of time intervals of the current time interval sequence, the specific value of the extraction step is adjusted.

[0200] In step S308, the minimum time intervals Min1 and Min2 of the two extraction steps corresponding to the first boundary with smaller time intervals and the maximum time intervals MaxN-1 and MaxN of the two extraction steps corresponding to the second boundary with larger time intervals are determined respectively.

[0201] In step S309, it is judged whether the Min1, Min2, MaxN-1 and MaxN satisfy the condition: Min2-Min1<C0*σ and MaxN-MaxN-1<C0*σ. If yes, step S311 is executed, otherwise, step S310 is executed.

[0202] The C0 is a preset tolerance coefficient, and the σ is the standard deviation of the current time interval sequence.

[0203] In step S310, the time interval of the extraction step where max{|MaxN-μ|, |Min1-μ|} is located is removed from the current time interval sequence, and step S307 is executed.

[0204] The μ is the average value of the current time interval sequence.

[0205] In step S311, the production capacity boundary WPH of the production equipment is determined to be in the range of [Run Size / (M2*MaxN), RunSize / (M1*Min1)].

[0206] The M1 is a preset first inclusive coefficient, and the M2 is a preset second inclusive coefficient.

[0207] Embodiment 2

[0208] The embodiment of the present application provides a schematic diagram of a device for determining a production capacity boundary, as shown in the figure, comprising: Figure 4

[0209] The interval determination unit 401 is configured to acquire relevant data of the production equipment producing a fixed number of elements in batches, and determine the time interval between the production end times of adjacent batches according to the relevant data.

[0210] The sequence determination unit 402 is configured to sort the determined time intervals according to the time length, and obtain a time interval sequence.

[0211] ​The condition judging unit 403 is configured to analyze the distribution characteristics of the time intervals at the two boundaries of the current time interval sequence respectively, and determine whether the data elimination condition is met, wherein the time interval at each boundary is the time interval of two extraction steps;

[0212] The interval eliminating unit 404 is configured to, when the data elimination condition is met, determine the outlier in the analyzed time interval according to the average value of the current time interval sequence, eliminate the time interval of the extraction step where the outlier is located, and re-analyze the distribution characteristics of the time intervals at the two boundaries of the current time interval sequence respectively, and determine whether the data elimination condition is met;

[0213] The boundary calculating unit 405 is configured to, when the data elimination condition is not met, determine the production capacity boundary of the production equipment according to the minimum time interval, the maximum time interval of the current time interval sequence and the fixed number.

[0214] Optionally, the condition judging unit 403 analyzes the distribution characteristics of the time intervals at the two boundaries of the current time interval sequence respectively, and determines whether the data elimination condition is met, including:

[0215] determining whether the distribution characteristics of the two extraction step time intervals corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0216] when the distribution characteristics of the two extraction step time intervals corresponding to any boundary do not conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data elimination condition is met;

[0217] when the distribution characteristics of the two extraction step time intervals corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data elimination condition is not met.

[0218] Optionally, the condition judging unit 403 determines whether the distribution characteristics of the two extraction step time intervals corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, including:

[0219] for a first boundary with a smaller time interval, the minimum time intervals Min1 and Min2 of the two extraction steps corresponding to the first boundary are determined respectively, and the Min1 is not greater than the Min2;

[0220] for a second boundary with a larger time interval, the maximum time intervals MaxN-1 and MaxN of the two extraction steps corresponding to the second boundary are determined respectively, and the MaxN-1 is not greater than the MaxN;

[0221] When Min2-Min1<C0*σ, it is determined that the distribution characteristics of the time intervals of the two extraction steps corresponding to the first boundary meet the linear function distribution characteristics of the current time interval sequence.

[0222] When MaxN-MaxN-1<C0*σ, it is determined that the distribution characteristics of the time intervals of the two extraction steps corresponding to the second boundary meet the linear function distribution characteristics of the current time interval sequence.

[0223] The C0 is a preset tolerance coefficient, and the σ is a standard deviation of the current time interval sequence.

[0224] Optionally, the interval elimination unit 404 determines the outlier in the analyzed time intervals according to a mean value of the current time interval sequence, including:

[0225] It is determined that max{|MaxN-μ|, |Min1-μ|} is the outlier in the analyzed time intervals.

[0226] The μ is a mean value of the current time interval sequence.

[0227] Optionally, the extraction step is a ratio of a total number of time intervals of the current time interval sequence to a preset grouping number N.

[0228] Optionally, the boundary calculation unit 405 determines the production capacity boundary of the production equipment according to the minimum time interval, the maximum time interval of the current time interval sequence and the fixed number, including:

[0229] It is determined that the production capacity boundary WPH of the production equipment is in [Run Size / (M2*MaxN), Run Size / (M1*Min1)].

[0230] The Run Size is the fixed number, the Min1 is the minimum time interval of the current time interval sequence, the MaxN is the maximum time interval of the current time interval sequence, the M1 is a preset first inclusive coefficient, and the M2 is a preset second inclusive coefficient.

[0231] Optionally, after obtaining the related data of the production equipment producing the fixed number of elements in batches, the interval determination unit 401 is further used to:

[0232] It is determined whether the related data includes valid data, and the valid data is data obtained when the production equipment is full and the running state meets the requirements.

[0233] If the valid data is not included, the related data of the production equipment producing the fixed number of elements in batches is reacquired.

[0234] Optionally, the element is a semiconductor element.

[0235] An embodiment of the application provides a schematic diagram of a production capacity boundary determination device 500, which comprises a memory 501 and a processor 502, as shown in the figure. Figure 5 The memory 501 is used for storing a computer program.

[0236] The processor 502 is used for reading the program in the memory and performing the following steps.

[0237] The processor 502 is used for reading the program in the memory and performing the following steps.

[0238] Obtaining relevant data of the production equipment producing a fixed number of elements in batches, and determining a time interval between production end times of adjacent batches according to the relevant data;

[0239] Sorting the determined time interval according to time length, to obtain a time interval sequence;

[0240] Respectively analyzing distribution characteristics of time intervals of two boundaries of the current time interval sequence, to determine whether a data elimination condition is met, wherein the time intervals of the two boundaries are time intervals of two extraction steps;

[0241] When the data elimination condition is met, determining an outlier in the analyzed time intervals according to an average value of the current time interval sequence, eliminating a time interval of an extraction step in which the outlier is located, and respectively analyzing again the distribution characteristics of time intervals of two boundaries of the current time interval sequence, to determine whether the data elimination condition is met;

[0242] When the data elimination condition is not met, determining a production capacity boundary of the production equipment according to a minimum time interval, a maximum time interval and the fixed number of the current time interval sequence.

[0243] Optionally, the processor 502 respectively analyzes the distribution characteristics of time intervals of two boundaries of the current time interval sequence, to determine whether the data elimination condition is met, which comprises:

[0244] Determining whether distribution characteristics of time intervals of two extraction steps corresponding to each boundary conform to linear function distribution characteristics of the current time interval sequence;

[0245] When the distribution characteristics of time intervals of two extraction steps corresponding to any boundary do not conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data elimination condition is met;

[0246] When the distribution characteristics of time intervals of two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data elimination condition is not met.

[0247] Optionally, the processor 502 determines whether the distribution characteristics of the time intervals of the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, including:

[0248] For a first boundary with a smaller time interval, the minimum time intervals Min1 and Min2 of the two extraction steps corresponding to the first boundary are determined respectively, and the Min1 is not greater than the Min2;

[0249] For a second boundary with a larger time interval, the maximum time intervals MaxN-1 and MaxN of the two extraction steps corresponding to the second boundary are determined respectively, and the MaxN-1 is not greater than the MaxN;

[0250] When Min2-Min1 < C0*σ, it is determined that the distribution characteristics of the time intervals of the two extraction steps corresponding to the first boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0251] When MaxN-MaxN-1 < C0*σ, it is determined that the distribution characteristics of the time intervals of the two extraction steps corresponding to the second boundary conform to the linear function distribution characteristics of the current time interval sequence;

[0252] The C0 is a preset tolerance coefficient, and the σ is a standard deviation of the current time interval sequence.

[0253] Optionally, the processor 502 determines the outlier in the analyzed time interval according to the average value of the current time interval sequence, including:

[0254] The max{|MaxN-μ|, |Min1-μ|} is determined as the outlier in the analyzed time interval;

[0255] The μ is an average value of the current time interval sequence.

[0256] Optionally, the extraction step is a ratio of a total number of time intervals of the current time interval sequence to a preset grouping number N.

[0257] Optionally, the processor 502 determines the production capacity boundary of the production equipment according to the minimum time interval, the maximum time interval of the current time interval sequence, and the fixed number, including:

[0258] The production capacity boundary WPH of the production equipment is determined to be in [Run Size / (M2*MaxN), Run Size / (M1*Min1)];

[0259] Wherein, the Run Size is the fixed number, the Min1 is the minimum time interval of the current time interval sequence, the MaxN is the maximum time interval of the current time interval sequence, the M1 is a preset first inclusive coefficient, and the M2 is a preset second inclusive coefficient.

[0260] Optionally, after obtaining the relevant data of the production equipment producing the fixed number of elements in batches, the processor 502 is further configured to:

[0261] determine whether the relevant data includes valid data, the valid data being data obtained when the production equipment is full and the running state meets the requirements;

[0262] if the valid data is not included, re-obtain the relevant data of the production equipment producing the fixed number of elements in batches.

[0263] Optionally, the element is a semiconductor element.

[0264] The application further provides a computer readable storage medium, which stores computer program instructions, and the computer program instructions are executed by a processor to implement the steps of the method for determining the production capacity boundary provided in the above embodiment 1.

[0265] In several embodiments provided in the present application, it should be understood that the disclosed system, device and method can be implemented in other manners. For example, the above described device embodiments are merely schematic, and the division of the modules is merely a logical function division, and there can be another division manner in actual implementation. For example, a plurality of modules or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed mutual couplings or direct couplings or communication connections can be indirect couplings or communication connections through some interfaces, devices or modules, and can be electrical, mechanical or in other forms.

[0266] The modules illustrated as separated components can or can not be physically separated, and the components illustrated as modules can or can not be physical modules, i.e., can be located in one place, or can be distributed on a plurality of network modules. According to actual needs, some or all of the modules can be selected to achieve the purpose of the embodiment scheme.

[0267] In addition, each of the functional modules in the embodiments of the present application can be integrated in one processing module, or each of the modules can exist physically, or two or more of the modules can be integrated in one module. The integrated module can be realized in the form of hardware or in the form of a software functional module. When the integrated module is realized in the form of a software functional module and sold or used as an independent product, the software functional module can be stored in a computer readable storage medium.

[0268] In the above embodiments, all or some of the embodiments can be realized by software, hardware, firmware, or any combination thereof. When realized by software, all or some of the embodiments can be realized in the form of a computer program product.

[0269] The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, all or some of the processes or functions described in the embodiments of the present application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions can be stored in a computer readable storage medium or transferred from one computer readable storage medium to another computer readable storage medium, for example, the computer instructions can be transferred from one website, computer, server, or data center to another website, computer, server, or data center through a wired (such as coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (such as infrared, wireless, microwave, etc.) manner. The computer readable storage medium can be any available medium that can be stored by a computer or a data storage device such as a server, data center, etc. integrated with one or more available media. The available media can be a magnetic medium (for example, a floppy disk, a hard disk, a magnetic tape), an optical medium (for example, a DVD), or a semiconductor medium (for example, a solid state disk (SSD)), etc.

[0270] The above describes the technical solutions provided by the present application in detail, and the principles and implementation manners of the present application are described by using specific examples. The above description of the embodiments is only to help understand the method and its core idea of the present application; at the same time, for those skilled in the art, according to the idea of the present application, the specific implementation manner and application range will be changed, and the above description of the present application should not be understood as a limitation.

[0271] Those skilled in the art will appreciate that embodiments of the present application can be devised for a variety of other systems which are currently developed or later developed. Therefore, the present application is intended to cover all such modifications and variations of this application that are within the scope of the appended claims and their equivalents. It is intended that each element of claim 1 and 2 is independent of one another. No element of claim 1 and 2, or any other claim, is implied to depend on any other element or limitation of claim 1 and 2 or any other claim except where expressly recited in that claim.

[0272] The present application is described in reference to the flowchart and / or block diagrams of the method, apparatus (system) and computer program product according to this application. It will be understood that each block of the flowchart and / or block diagrams, and combinations of blocks in the flowchart and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart and / or block diagram block or blocks. Figure 1 one or more functions specified by one or more blocks Figure 1 means for carrying out each of the one or more functions specified by the one or more blocks in the flowchart and / or block diagram.

[0273] These computer program instructions can also be stored in a computer- readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instructions which implement the function specified in the flowchart and / or block diagram block or blocks. Figure 1 one or more functions specified by one or more blocks Figure 1 means for carrying out each of the one or more functions specified by the one or more blocks in the flowchart and / or block diagram.

[0274] The computer program instructions can also be loaded into a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the function specified in the flowchart and / or block diagram block or blocks. Figure 1 one or more functions specified by one or more blocks Figure 1 means for carrying out each of the one or more functions specified by the one or more blocks in the flowchart and / or block diagram.

[0275] Obviously, numerous modifications and variations of the present application are possible in light of the above teachings. It is therefore to be understood that within the scope of the appended claims and their equivalents, the application can be practiced otherwise than as specifically described.

Claims

1. A method for determining the production capacity boundary, characterized in that, include: Acquire relevant data on the production of a fixed number of components in batches by the production equipment, and determine the time interval between the production end times of adjacent batches based on the relevant data; The time intervals are sorted according to their length to obtain a time interval sequence; The distribution characteristics of the time intervals at the two boundaries of the current time interval sequence are analyzed to determine whether the data removal conditions are met. This includes: determining the distribution characteristics of the time intervals of the two extraction step sizes corresponding to each boundary, and whether they conform to the linear function distribution characteristics of the current time interval sequence. For the first boundary with a smaller time interval, the minimum time intervals Min1 and Min2 of the two extraction step sizes corresponding to the first boundary are determined, where Min1 is not greater than Min2. For the second boundary with a larger time interval, the maximum time intervals MaxN-1 and MaxN of the two extraction step sizes corresponding to the second boundary are determined, where MaxN-1 is not greater than MaxN. When Min2−Min1< When *σ, the distribution characteristics of the time interval between the two extraction step lengths corresponding to the first boundary are determined, which conform to the linear function distribution characteristics of the current time interval sequence; When MaxN−MaxN-1< When *σ, the distribution characteristics of the time intervals between the two extraction step sizes corresponding to the second boundary are determined, conforming to the linear function distribution characteristics of the current time interval sequence. The preset tolerance coefficient is σ, where σ is the standard deviation of the current time interval sequence. When the data removal condition is met, the outliers in the parsed time intervals are determined based on the average value of the current time interval sequence. The time intervals of the extraction step size where the outliers are located are removed. The distribution characteristics of the time intervals at the two boundaries of the current time interval sequence are re-analyzed to determine whether the data removal condition is met. When the data removal criteria are not met, the production capacity boundary of the production equipment is determined based on the minimum time interval, the maximum time interval, and the fixed quantity of the current time interval sequence, including: Determine the production capacity boundary WPH of the production equipment. [Run Size / (M2*MaxN), Run Size / (M1*Min1)]; Wherein, Run Size is the fixed quantity, Min1 is the minimum time interval of the current time interval sequence, MaxN is the maximum time interval of the current time interval sequence, M1 is the preset first tolerance coefficient, and M2 is the preset second tolerance coefficient.

2. The method according to claim 1, characterized in that, The distribution characteristics of the time intervals at the two boundaries of the current time interval sequence are analyzed to determine whether the data removal conditions are met. This also includes: When the distribution characteristics of the time intervals between the two extraction step sizes corresponding to any boundary do not conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data removal condition is met. When the distribution characteristics of the time intervals between the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data removal condition is not met.

3. The method according to claim 1, characterized in that, Based on the average value of the current time interval sequence, identify outliers in the analyzed time intervals, including: Determine max{|MaxN-μ|, |Min1-μ|} as the outliers in the analytical time interval; Wherein, μ is the average value of the current time interval sequence.

4. The method according to claim 1, characterized in that, The extraction step size is the ratio of the total number of time intervals in the current time interval sequence to the preset number of groups N.

5. The method according to claim 1, characterized in that, After obtaining the relevant data on the production equipment's batch production of a fixed number of components, the following is also included: Determine whether the relevant data includes valid data, wherein the valid data is the data obtained when the production equipment is fully loaded and its operating status meets the requirements; If the valid data is not included, re-acquire the relevant data for the production of a fixed number of components in batches by the production equipment.

6. The method according to claim 1, characterized in that, The element is a semiconductor element.

7. A device for determining a production capacity boundary, characterized in that, include: An interval determination unit is used to acquire relevant data on the production equipment's batch production of a fixed number of components, and to determine the time interval between the production end times of adjacent batches based on the relevant data. The sequence determination unit is used to sort the determined time intervals according to their duration to obtain a time interval sequence; The condition judgment unit is used to analyze the distribution characteristics of the time intervals at the two boundaries of the current time interval sequence to determine whether the data removal conditions are met. This includes: determining the distribution characteristics of the time intervals of the two extraction step sizes corresponding to each boundary, and whether they conform to the linear function distribution characteristics of the current time interval sequence. For the first boundary with a smaller time interval, the unit determines the minimum time intervals Min1 and Min2 of the two extraction step sizes corresponding to the first boundary, where Min1 is not greater than Min2. For the second boundary with a larger time interval, the unit determines the maximum time intervals MaxN-1 and MaxN of the two extraction step sizes corresponding to the second boundary, where MaxN-1 is not greater than MaxN. When Min2−Min1< When *σ, the distribution characteristics of the time interval between the two extraction step lengths corresponding to the first boundary are determined, which conform to the linear function distribution characteristics of the current time interval sequence; When MaxN−MaxN-1< When *σ, the distribution characteristics of the time intervals between the two extraction step sizes corresponding to the second boundary are determined, conforming to the linear function distribution characteristics of the current time interval sequence. The preset tolerance coefficient is σ, where σ is the standard deviation of the current time interval sequence. The interval elimination unit is used to determine the outliers in the parsed time intervals based on the average value of the current time interval sequence when the data elimination conditions are met, eliminate the time intervals of the extraction step size where the outliers are located, and re-analyze the distribution characteristics of the time intervals at the two boundaries of the current time interval sequence to determine whether the data elimination conditions are met. A boundary calculation unit is used to determine the production capacity boundary of the production equipment based on the minimum time interval, the maximum time interval, and the fixed quantity of the current time interval sequence when the data removal conditions are not met. This includes determining the production capacity boundary WPH of the production equipment. [Run Size / (M2*MaxN), Run Size / (M1*Min1)]; Wherein, Run Size is the fixed quantity, Min1 is the minimum time interval of the current time interval sequence, MaxN is the maximum time interval of the current time interval sequence, M1 is the preset first tolerance coefficient, and M2 is the preset second tolerance coefficient.

8. The apparatus according to claim 7, characterized in that, The condition judgment unit analyzes the distribution characteristics of the time intervals at the two boundaries of the current time interval sequence to determine whether the data removal conditions are met, and also includes: When the distribution characteristics of the time intervals between the two extraction step sizes corresponding to any boundary do not conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data removal condition is met. When the distribution characteristics of the time intervals between the two extraction steps corresponding to each boundary conform to the linear function distribution characteristics of the current time interval sequence, it is determined that the data removal condition is not met.

9. The apparatus according to claim 7, characterized in that, The interval removal unit determines outliers in the parsed time intervals based on the average value of the current time interval sequence, including: Determine max{|MaxN-μ|, |Min1-μ|} as the outliers in the analytical time interval; Wherein, μ is the average value of the current time interval sequence.

10. The apparatus according to claim 7, characterized in that, The extraction step size is the ratio of the total number of time intervals in the current time interval sequence to the preset number of groups N.

11. The apparatus according to claim 7, characterized in that, After acquiring relevant data on the production of a fixed number of components in batches by the production equipment, the interval determination unit is further used for: Determine whether the relevant data includes valid data, wherein the valid data is the data obtained when the production equipment is fully loaded and its operating status meets the requirements; If the valid data is not included, re-acquire the relevant data for the production of a fixed number of components in batches by the production equipment.

12. The apparatus according to claim 7, characterized in that, The element is a semiconductor element.

13. A device for determining a production capacity boundary, characterized in that, Includes memory and processor, wherein: The memory is used to store computer programs; The processor is used to read the program in the memory and execute the steps of the method for determining the production capacity boundary as described in any one of claims 1 to 6.

14. A computer-readable storage medium having computer program instructions stored thereon, characterized in that, When executed by a processor, the computer program instructions implement the steps of the method for determining the production capacity boundary as described in any one of claims 1 to 6.

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