Method for setting process of device and device for processing substrate

Abstract

The present disclosure relates to a method for setting a process of an apparatus and an apparatus for processing a substrate, which can easily perform editing of the process when setting the process of the apparatus for processing the substrate. The method includes the following steps: while displaying a process setting table of the process on the screen of the display, accepting editing of setting values ​​of the process setting table; storing the process after the edited setting values ​​are accepted in the storage unit, and displaying it on the screen in a manner of switching between a full display state and a thumbnail display state in response to a display switching command, in the full display state, displaying setting values ​​corresponding to all setting items of the process setting table, and in the thumbnail display state, displaying only setting values ​​corresponding to setting items whose setting values ​​have been edited in the past.

Description

Technical Field

[0001] The present disclosure relates to a method for setting a process of an apparatus for processing a substrate and an apparatus for processing a substrate. Background Art

[0002] In the manufacturing process of FPD (Flat Panel Display) and semiconductor devices, there are processes such as film forming and etching on substrates (glass substrates, semiconductor wafers). In the device for performing these processes (device for processing substrates), the processing is performed according to the instructions of the control computer in accordance with the pre-set process recipe.

[0003] Patent document 1 proposes a technique in which, in a display program for causing a computer to execute a process, items corresponding to operating components that have not been selected are set to non-display. In addition, patent document 2 proposes a technique in which, in an employee information registration screen, item names can be designated to be displayed or non-displayed by displaying a mark. Furthermore, patent document 3 proposes a technique in which, in a print setting processing program, function setting items that are used less frequently are set to non-display.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2020-201854

[0007] Patent Document 2: Japanese Patent Application Publication No. 2019-117489

[0008] Patent Document 3: Japanese Patent Application Publication No. 2006-285968 Summary of the invention

[0009] Problem that the invention aims to solve

[0010] The present disclosure provides a technology capable of easily editing a process recipe when setting a process recipe of an apparatus for processing a substrate.

[0011] Solutions for solving problems

[0012] The present invention discloses a method for setting a process of a device for processing a substrate, wherein the method is characterized in that it comprises the following steps:

[0013] The control computer of the device reads out, from a storage unit, a plurality of setting values ​​set corresponding to each of a plurality of steps defined in a time-dependent manner for a plurality of setting items of the process recipe, and displays the plurality of setting values ​​on a display unit of a screen of a display connected to the control computer in the form of a process setting table configured to identify the setting values ​​corresponding to the setting items and the steps;

[0014] while displaying the recipe setting table according to the process displayed on the display unit, accepting editing of the setting value selected by specifying the step and the setting item through an input unit connected to the control computer; and

[0015] storing the process recipe after the edit of the set value is accepted in the storage unit,

[0016] During the process of accepting the editing of the setting values ​​by the control computer, the process setting table is displayed on the display unit in a manner that switches between a full display state and a thumbnail display state in response to a display switching command input by means of the input unit. In the full display state, the setting values ​​corresponding to all the setting items of the process setting table are displayed, and in the thumbnail display state, only the setting values ​​corresponding to the setting items for which the editing of the setting values ​​has been accepted in the past are displayed.

[0017] Effects of the Invention

[0018] According to the present disclosure, it is possible to easily edit a process recipe when setting a process recipe of an apparatus for processing a substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic plan view showing one embodiment of a substrate processing apparatus according to the present disclosure.

[0020] Figure 2 It is a longitudinal sectional view showing an example of a substrate processing section provided in the above-mentioned substrate processing apparatus.

[0021] Figure 3 : is a block diagram showing the electrical structure of the above-mentioned substrate processing apparatus.

[0022] Figure 4 It is a flowchart showing the operation of the substrate processing apparatus.

[0023] Figure 5 This is an explanatory diagram showing an example of a window displayed on a display screen.

[0024] Figure 6 This is a first explanatory diagram showing an example of a process setting table displayed on a display screen.

[0025] Figure 7 This is a second explanatory diagram showing an example of a process setting table displayed on the display screen.

[0026] Figure 8 This is a third explanatory diagram showing an example of a process setting table displayed on the display screen.

[0027] Fig. 9 The fourth explanatory diagram shows an example of a process setting table displayed on the display screen. DETAILED DESCRIPTION

[0028] <Substrate processing apparatus>

[0029] Below, refer to Figure 1 and Figure 2 , an embodiment of the apparatus for processing a substrate (hereinafter referred to as "substrate processing apparatus") disclosed in the present invention is described. The substrate processing apparatus of this example is configured as an apparatus for performing an etching process on a glass substrate G (hereinafter referred to as "substrate G") as a substrate. The substrate processing apparatus 1 includes: an atmospheric transfer chamber 11, which includes an atmospheric transfer mechanism 111; and a vacuum transfer chamber 12, which includes a vacuum transfer mechanism 121, and the atmospheric transfer chamber 11 and the vacuum transfer chamber 12 are connected to each other via a load lock chamber 13.

[0030] The atmospheric transfer chamber 11 is provided with a loading and unloading port 14, which is used to load and unload the transfer container 10 containing a plurality of substrates G. The substrates G in the transfer container 10 are taken out by the atmospheric transfer mechanism 111 and transferred to the load lock chamber 13, and the substrates G in the load lock chamber 13 are received by the vacuum transfer mechanism 121 and transferred to the vacuum transfer chamber 12. In addition, in the substrate processing apparatus involved in the present disclosure, the atmospheric transfer chamber 11, the atmospheric transfer mechanism 111, the transfer container 10, and the loading and unloading port 14 are not necessarily essential structural elements, and other mechanisms capable of loading and unloading the substrates G between the load lock chamber 13 and the atmospheric atmosphere may be connected to the load lock chamber 13.

[0031] The vacuum transfer chamber 12 is connected to two substrate processing units 2A and 2B and one vacuum processing unit 15, for example. In this example, the substrate processing units 2A and 2B are configured as etching processing units for etching the substrate, and the vacuum processing unit 15 is configured as a post-processing unit for performing a treatment after etching. Figure 1 In the figure, symbols GV1 to GV3 represent gate valves.

[0032] <Substrate Processing Section>

[0033] Reference Figure 2, an example of substrate processing units 2A and 2B constituting an etching processing unit is briefly described. The substrate processing units 2A and 2B of this example are configured to place a substrate G on a mounting table 3 in a vacuum container 21 to perform plasma processing on the substrate G. The substrate G is transported into the vacuum container 21 via a transport port 22 opened and closed by a gate valve 16, and the internal space of the vacuum container 21 is configured to be vacuum exhausted by a vacuum exhaust mechanism 23 via an exhaust path 231. A pressure adjustment unit 232 such as an APC (Automatic Pressure Control) valve is provided in the exhaust path 231.

[0034] The mounting table 3 also serves as an electrode for plasma generation, and is connected to a high-frequency power supply 31 for plasma generation and a high-frequency power supply 32 for providing bias power for ion introduction, for example, via matching devices 311 and 321, respectively. The mounting table 3 of this example has a temperature regulating medium flow path 33 constituting a temperature regulating unit built therein, so as to maintain the substrate G at a set temperature. The mounting table 3 is supported by an insulating member 34, and a lifting pin 35 for delivering the substrate G is inserted in the mounting table 3 so as to be able to be lifted and lowered by a lifting mechanism 351.

[0035] An upper electrode 4 is disposed on the top of the vacuum container 21 so as to face the mounting table 3. The upper electrode 4 also serves as a gas shower head and is formed in a hollow shape. A gas ejection hole 41 is disposed on the lower surface of the upper electrode 4. The upper electrode 4 is connected to a gas supply source 44 of a processing gas via a gas supply path 42 having a valve V1 and a flow rate adjustment unit 43.

[0036] Here, the processing of the substrate using the substrate processing apparatus 1 having the above-mentioned structure is briefly described. The atmospheric transport mechanism 111 takes out the substrate G from the transport container 10, and transfers the substrate G to the load lock chamber 13 of the atmospheric pressure atmosphere, and adjusts the load lock chamber 13 to a vacuum atmosphere. Then, the vacuum transport mechanism 121 transfers the substrate G in the load lock chamber 13 to the mounting table 3 of the substrate processing parts 2A and 2B via the vacuum transport chamber 12. In the substrate processing parts 2A and 2B, after the substrate G is placed on the mounting table 3 and the vacuum exhaust mechanism 23 exhausts the vacuum container 21 to maintain the vacuum container 21 at a predetermined vacuum level, an etching gas is supplied as a processing gas.

[0037] On the other hand, a high frequency for plasma generation and a high frequency for ion introduction are applied to the mounting table 3, and the etching process of the substrate G is performed using the plasma formed in the space above the substrate G. As a result, the ions in the plasma are attracted to the mounting table 3 side by the high frequency for biasing, so that the etching process with high verticality proceeds. The substrate G that has been etched in the substrate processing parts 2A and 2B is transported to the vacuum processing part 15 via the vacuum transport chamber 12 by the vacuum transport mechanism 121 to perform post-etching disposal. Next, the substrate G is transported to the load lock chamber 13 of the vacuum atmosphere by the vacuum transport mechanism 121, and after the load lock chamber 13 is adjusted to the atmospheric pressure atmosphere, the substrate G is received by the atmospheric transport mechanism 111, and the substrate G is returned to the transport container 10 via the atmospheric transport chamber 11. In the above-mentioned embodiment, a capacitive coupling type plasma generating mechanism is described in which the mounting table 3 and the upper electrode 4 are parallel electrodes facing each other to generate plasma. However, the present invention is not limited to this. For example, an inductive coupling type plasma generating mechanism may be used to generate plasma.

[0038] <Control Computer>

[0039] The substrate processing apparatus 1 includes a control computer 5 configured to output commands to various parts of the substrate processing apparatus 1, such as the substrate processing units 2A and 2B, the vacuum processing unit 15, the atmospheric transfer mechanism 111, and the vacuum transfer mechanism 121. The control computer 5 includes, for example, a CPU (not shown), and is configured to execute the above-mentioned substrate processing based on the process recipe of the substrate processing apparatus 1. The process recipe is a processing program in which control parameters such as the process sequence of the substrate processing apparatus 1 or the substrate processing units 2A and 2B, and the pressure in the vacuum container 21, the flow rate of the processing gas, and the set temperature of the mounting table 3 are set.

[0040] In the process recipe, setting values ​​related to a plurality of setting items (control parameters) are set corresponding to each of a plurality of steps defined in a time-dependent manner. For example, a step time for executing the step, a processing temperature of the substrate G, a pressure setting value in a container containing the substrate G, etc. are set as setting items for one step, and their setting values ​​are stored. Furthermore, for example, in the process recipe of the substrate processing units 2A and 2B, setting values ​​of setting items (setting parameters) related to all actions performed in the substrate processing units 2A and 2B are stored corresponding to a plurality of steps.

[0041] And, if Figure 3As shown, the control computer 5 has the functions of a screen control unit 51 and a data extraction unit 52, and is connected to a storage unit 53 and a touch panel display 54 (an example of a "display"). The storage unit 53 has the function of a process storage unit 531 storing a process, and the touch panel display 54 serves as a display screen 55 (an example of a "screen") and an input unit 56. Therefore, by connecting the touch panel display 54 to the control computer 5, the input unit 56 is also connected to the control computer 5. However, instead of providing the touch panel display 54, the display screen 55 and the input unit 56 independent of the display screen 55 may be separately provided, and the input unit 56 may be composed of a keyboard.

[0042] The data extraction unit 52 is configured to execute an action of reading a setting value as data set in the process recipe from the recipe storage unit 531, or extracting a setting value as a thumbnail display object according to a display switching command described later. In addition, the screen control unit 51 has a function of displaying the setting value of the process recipe read and extracted by the data extraction unit 52 on the display screen 55 in the form of a recipe setting table 7 described later. In addition, the screen control unit 51 is configured to accept a display switching command issued by an operator via an input unit 56, and execute a process of switching the display of the recipe setting table 7. In addition, the control computer 5 is configured to be able to execute an action of accepting the editing of the setting value of the recipe setting table 7, and an action of storing the edited process recipe of the accepted setting value in the storage unit 53.

[0043] <Process Setting>

[0044] Next, refer to Figure 4 The method of setting a process recipe of the substrate processing apparatus 1 is described with reference to the flowchart shown. The process recipe setting is an action of setting a set value of a control parameter, and the process recipe setting is performed when performing process evaluation such as changing operating conditions or switching products.

[0045] Generally speaking, when an operator re-evaluates a setting item (control parameter) of a process, the setting item to be re-evaluated is often a setting item that has been edited in the past. The technology disclosed in the present invention focuses on this and has a function of displaying only setting items that have been edited in the past on the display screen 55. In this case, the following function is designed: the control computer 5 determines whether it is a setting item that has been edited in the past, and automatically sets the unedited setting item to non-display according to the input of the display switching command.

[0046] <First example>

[0047] As a first example of setting a process recipe, a case where an operator changes a setting value that has been edited in the past in a process recipe will be described.

[0048] First, the operator uses the touch panel display 54 to select a process recipe to be edited. Figure 5 As shown in FIG. 1 , the display screen 55 includes a table display unit 57 (an example of a “display unit”) and six buttons 61 to 66 constituting a part of the input unit 56. The buttons 61 to 66 may be Figure 5 As shown, it can be displayed in the form of an image on the display screen 55, and can also be set on the outside of the display screen 55 in the form of a physical button that can be pressed.

[0049] The "open" button 61 among the buttons 61 to 66 is a button for opening a window 67 for selecting a process. Figure 5 The state in which the "open" button 61 is pressed and the window 67 is opened is shown. The window 67 is activated in the form of a pop-up window, for example.

[0050] exist Figures 5 to 9 In the example, on the display screen 55, a button whose name is displayed in gray indicates a button in operation. In addition, here, "pressing" also includes the operator touching the "open" button 61 displayed in the display screen 55 with a finger or the like to start the corresponding function.

[0051] Here, the case where the process recipe to be edited is set to "recipe 1" and this "recipe 1" is selected is described. When the control computer 5 receives the selection of the process recipe ( Figure 4 In step 101), the following steps are implemented: the setting value of the selected process is read from the process storage unit 531 of the storage unit 53, and the process setting table 7 corresponding to the process is displayed on the table display unit 57 in the display screen 55 of the touch panel display 54.

[0052] The process setting table 7 of this example is as follows Figure 6 to Figure 9 7 is a table showing various setting values ​​corresponding to a plurality of setting items 71 of a process recipe and a plurality of steps 72 defined in a time-dependent manner. With respect to the substrate processing units 2A and 2B, the setting items 71 are control parameters such as the pressure of the vacuum container 21, the flow rate of the processing gas, the plasma power, the bias power, and the set temperature of the mounting table 3 to be controlled during the processing of the substrate processing units 2A and 2B. In the process setting table 7 of this example, these setting items 71 are listed and displayed in the first column.

[0053] In addition, step 72 is displayed in the first row of the process setting table 7, and the step 72 progressing from step 1 to step n (n is an integer greater than 1) over time is recorded in accordance with the number of steps preset in the process. The process setting table 7 is configured so that the setting value of the setting item 71 can be determined corresponding to each step 72.

[0054] Furthermore, scroll bars 73 and 74 are displayed on the display screen 55 of the touch panel display 54 as needed. The control computer 5 can display the area of ​​the recipe setting table 7 beyond the table display section 57 on the table display section 57 by scrolling according to the movement instruction of the display range using the scroll bars 73 and 74. The scroll bar 73 is used to display the display area related to the setting item 71 beyond the table display section 57 on the table display section 57 by scrolling in the up-down direction in the process of displaying the recipe setting table 7 on the table display section 57. Similarly, the scroll bar 74 is used to display the display area related to the step 72 beyond the table display section 57 on the table display section 57 by scrolling in the left-right direction.

[0055] Return to Figure 4 To continue the description, the operator determines whether to select the "thumbnail display" button 63 (process 102). The "thumbnail display" button 63 is a button for setting the process setting table 7 to the "thumbnail display state". The thumbnail display state means that only the setting values ​​corresponding to the setting items whose setting values ​​have been edited in the past are displayed in the process setting table 7. That is, the setting items whose setting values ​​have not been edited in the past in any step 72 are not displayed.

[0056] Here, the "full display" button 64 is also described. The "full display" button 64 is a button for setting the process setting table 7 to the "full display state". The full display state means a state in which the setting values ​​corresponding to all the setting items of the process setting table 7 are displayed. That is, regardless of whether the setting value has been edited in the past in any step 72, all the setting items are displayed.

[0057] The "thumbnail display" button 63 and the "full display" button 64 are used to output a display switching command for switching the display state of the set value between the full display state and the thumbnail display state on the table display unit 57. Therefore, when the "thumbnail display" button 63 is pressed (selected), the display switching command for the thumbnail display state is input, and when the "full display" button 64 is pressed, the display switching command for the full display state is input.

[0058] When Figure 4 When the "thumbnail display" button 63 is selected in step 102, the control computer 5 determines whether all the setting values ​​of the process recipe read from the recipe storage unit 531 are initial values ​​(step 103). This step 103 is a step for the control computer 5 to determine whether the setting items of the process recipe are setting items for which editing of setting values ​​has been accepted in the past. If it is determined that all the setting values ​​are initial values, the process proceeds to step 105, and if it is determined that at least some of the setting values ​​are not initial values, the process proceeds to step 104.

[0059] Here, in the substrate processing apparatus 1 of this example, initial values ​​are preset for all setting values ​​of the process recipe. Figure 6 The process setting table 7 in which all setting values ​​of the process are initial values ​​is shown. In this example, in the process setting table 7 displayed on the table display section 57 of the display screen 55, for example, the initial values ​​of the setting items with digital input setting values ​​are set to "0", and the initial values ​​of the setting items with ON / OFF input to control the execution or not are set to "OFF".

[0060] As described above, the data extraction unit 52 of the control computer 5 is configured to judge that the setting items including the setting values ​​that are inconsistent with the initial values ​​have been edited in the past. Therefore, the setting items in which the setting values ​​are input with values ​​other than "0" and the setting items in which "ON" is input are judged as the setting items in which the setting values ​​have been edited in the past.

[0061] Figure 7 5 shows that the process setting table 7 of process 1 is displayed in full display on the display screen 55 of the table display unit 57. The process setting table 7 includes setting values ​​that have been edited in the past, and the cells displaying the setting values ​​that have been edited in the past are displayed so that the fact can be identified (in Figure 7 , Figure 8 , fill the cells with gray).

[0062] Regarding this display, for example, the data extraction unit 52 compares the setting value of each step of each setting item in the selected process recipe with the initial value of the same step, and when these values ​​do not match, outputs the setting value with an identification code indicating this fact attached. When the screen control unit 51 displays the process setting table 7, if the identification code is attached to the acquired setting value, the cell displaying the setting value is displayed in an identifiable manner.

[0063] In the following, a setting item whose setting value of any step has been edited in the past may be described as an "edited setting item", and a setting item whose setting value of any step has not been edited in the past may be described as an "unedited setting item".

[0064] When the process setting table 7 is displayed on the display screen 55, when the full display state is selected, both the "edited setting items" and the "unedited setting items" are displayed ( Figure 7 ). In addition, when the thumbnail display state is selected, only the "edited setting items" are displayed in the process setting table 7, and the "unedited setting items" are not displayed. Figure 4When recipe 1 is selected in step 101 and the "thumbnail display" button 63 is pressed in step 102, the recipe setting table 7 is displayed in thumbnail display state on the display screen 55 in principle in step 104 based on the display switching command. That is, the screen control unit 51 determines that the setting items including the setting values ​​to which the identification code indicating that the setting values ​​are not consistent with the initial values ​​are added are "edited setting items" for the setting values ​​acquired from the extraction unit 52, and displays them in the recipe setting table 7.

[0065] Figure 8 7 is shown in the thumbnail display state. In this way, in the thumbnail display state, the setting items in which the setting values ​​different from the initial values ​​are input are displayed, and the setting items that have not been edited are not displayed. Figure 7 In the process setting table 7 shown, when focusing on the "pressure" setting item, the "pressure" setting value of step 4 is the initial value "0", and setting values ​​different from the initial value are input in other steps 1, 2, and 5. In this way, for setting items in which a setting value different from the initial value is input in any step, the setting values ​​for all steps are displayed. Figure 8 In the process setting table 7 in the thumbnail display state shown, thumbnails are displayed according to the number of setting items that are not displayed. Therefore, it is not necessary to display all setting items in the table display part 57 which is the display area set in the display screen 55 and perform the scrolling action in the up and down direction using the scroll bar 73.

[0066] In this way, when the "thumbnail display" button 63 is selected, the display screen 55 of the touch panel display 54 displays Figure 8 The process setting table 7 shown in FIG. 1 is edited by the operator by inputting the setting value for the setting item to be edited, and the control computer 5 accepts the editing of the setting value ( Figure 4 In the process setting table 7 displayed on the display screen 55 of the touch panel display 54, after selecting the cell obtained by determining the step 72 and the setting item 71 using the input unit 56, the setting value is inputted by means of a keyboard (not shown) and the like, thereby editing the setting value.

[0067] The keyboard may be displayed on the display screen 55 or may be independently provided separately from the display screen 55. In addition, regarding the selection of cells by the input unit 56, it may be set that the operator directly touches the cells displayed on the table display unit 57 with a finger or the like to select, or it may be set that a window or the like is displayed for inputting numerical values ​​indicating steps and numerical values ​​indicating setting items for determining the cells. In this way, the process of accepting the editing of the setting values ​​is implemented. Under the condition that the "thumbnail display" button 63 is selected, during the period of implementing the process of accepting the editing of the setting values, the process setting table 7 is displayed in a thumbnail display state on the touch panel display 54.

[0068] Next, the operator determines whether the editing of the setting value is completed (process 107). If the editing is not completed, the operator returns to process 102 and performs the editing operation again. On the other hand, if the editing is completed, the "register" button 62 is pressed to register the process recipe in which the setting value is edited (process 108). In this way, the process recipe after the edit is stored in the recipe storage unit 531 of the storage unit 53 is performed, and the editing of the setting of the process recipe is completed.

[0069] In addition, when the "thumbnail display" button 63 is not selected in step 102, step 105 is entered, and the process setting table 7 is displayed as Figure 7 The full display state shown is displayed on the display screen 55. For example, when changing the setting value of the "processing gas A" setting item, the process setting table 7 is displayed in the full display state to implement the editing of the setting value. Figure 7 In the example shown, the setting value of "processing gas A" is still the initial value "0" in all steps, so if the display is switched to the thumbnail display state, the setting item is not displayed. In this case, steps 106, 107, and 108 are also implemented in the same manner as in the first example described above.

[0070] <Second example>

[0071] As a second example of setting a process recipe, a case where an operator creates a new process recipe will be described.

[0072] First, the operator uses the touch panel display 54 to Figure 5 Select "New Process" in the window 67 shown. When the process selection is accepted (step 101), the process setting table 7 of the selected process is displayed on the display screen 55 of the touch panel display 54. The process setting table 7 of "New Process" is as shown in FIG. Figure 6 As shown, it is the process setting table 7 in which all setting values ​​of the process are initial values.

[0073] Next, the operator determines whether the "thumbnail display" button 63 ( Figure 4 Process 102). When creating a new process, the process setting table 7 is displayed in full display, and the setting items 71 are matched with step 72 to input the setting values. However, assuming that the "thumbnail display" button 63 is selected, the control computer 5 determines whether all the setting values ​​are initial values ​​(process 103). Here, the screen control unit 51 is configured so that when the process does not include setting values ​​that have been edited in the past (when no identification code is attached to all setting values), the setting values ​​are displayed in full display even if the "thumbnail display" button 63 is pressed. Therefore, even if the "thumbnail display" button 63 is pressed by mistake, since all the setting values ​​are initial values, the process setting table 7 is displayed in full display (process 105), and there is no situation where all the setting items are not displayed.

[0074] Then, the operator edits the setting values ​​while the recipe setting table 7 is fully displayed on the display screen 55, and the control computer 5 implements the process of accepting the editing of the setting values ​​(process 106). Processes 107 and 108 are the same as those in the first example described above.

[0075] Here, other buttons are described. The "Select Setting" button 65 is a button for opening a window for accepting arbitrary selection of setting items displayed in the process setting table 7. When this button 65 is pressed, a pop-up window is opened, for example. Fig. 9 The window 68 for selecting setting items is shown. In the window 68, for example, setting items of the recipe setting table 7 displayed in the full display state can be added or deleted. The "close button" 66 is a button for closing the opened windows 67 and 68.

[0076] According to this embodiment, when setting the process recipe of the device for processing the substrate, the process recipe can be edited easily. That is, the process setting table 7 can be displayed on the display screen 55 in a manner of switching between a full display state and a thumbnail display state by a simple operation such as inputting a display switching command according to the edited content of the process recipe. Therefore, since the required setting items can be automatically selected using the process recipe whose setting values ​​have been edited, the process recipe can be edited easily.

[0077] For example, when changing the setting value of a setting item that has been edited in the past, a display switching command to set the display to a thumbnail state is input, such as Figure 8As shown in FIG. 1 , only the setting items to be edited are displayed. In the thumbnail display state, the setting items that have not been edited are not displayed, so the setting items displayed on the display screen 55 are reduced and displayed in thumbnails. Therefore, it is easy to search for the input position of the setting value obtained by matching the setting items to be edited with the steps. On the other hand, in the case of changing the setting value of the setting items that have not been edited, as shown in FIG. Figure 7 As shown, by inputting a display switching command to set the display state to a full display state, all setting items can be displayed and setting values ​​can be edited.

[0078] According to the process, when the thumbnail display state is selected, all the setting items that have been edited in the past can be displayed on one screen, so there is no need for scrolling, and it becomes easier to search for the input position of the setting value obtained by matching the setting items to be edited with the steps. In addition, when all the setting items to be edited can be collected on one screen, it is also convenient when the image is acquired and saved by screenshot. Moreover, even if it is assumed that all the setting items cannot be displayed on the display screen 55 in the thumbnail display state, the area of ​​the table display part 57 that exceeds the display screen 55 can be reduced compared to the full display state. As a result, the burden of scrolling for displaying the setting items in the table display part 57 of the display screen 55 is reduced, and the editing operation of the setting value becomes simple.

[0079] In this way, since the input position of the setting value is easily searched, the time and labor required for editing the setting value can be reduced, the setting value can be edited efficiently, and the occurrence of editing errors can be reduced.

[0080] Conventionally, the process setting table 7 is displayed in a full display state to edit the setting values. Therefore, when there are many control parameters (setting items) and many setting items that have not been edited, a large amount of scrolling is required to display the setting items to be edited on the display screen 55. In addition, since there are many setting items displayed on the display screen 55, it takes a lot of effort to search for the input position of the setting value to be edited. The technology disclosed in the present invention can solve these problems.

[0081] In addition, in the above-mentioned embodiment, the control computer 5 (extraction unit 52) ​​is configured to judge that the setting items including the setting values ​​that are inconsistent with the initial values ​​are the setting items that have been edited in the past. In this way, the control computer 5 compares the initial values ​​of the setting items with the current setting values ​​to automatically judge the setting items that have not been edited, so it is not necessary for the operator to select the setting items displayed in the thumbnail display state in advance. This also reduces the labor of editing the setting values, and suppresses the occurrence of operation errors, and can further efficiently perform the setting of the process.

[0082] Furthermore, the control computer 5 (screen control unit 51) is configured to always display the process setting table 7 in a full display state when all the setting values ​​of the setting items are initial values. Therefore, as described above, when a new process recipe is produced, even if the "thumbnail display" button 63 is pressed by mistake, the process setting table 7 is displayed in a full display state. Therefore, it is prevented from causing a malfunction such as the process setting table 7 not being displayed at all due to the "thumbnail display" button 63 being pressed by mistake, so that the editing operation can be started quickly. In this regard, the technology disclosed in the present invention can also make it easy to edit the setting values.

[0083] As described above, in the above-mentioned embodiment, the control computer 5 (extraction unit 52) ​​determines whether it is an unedited setting item based on whether the setting value is consistent with the initial value. However, the method by which the control computer 5 determines whether there are unedited setting items is not limited to this example. For example, when the editing of the setting value is accepted, the edited setting value is stored in the storage unit 53 in association with the edited flag. In this example, for the setting item containing the setting value stored in association with the edited flag, it is judged that the editing of the setting value has been accepted in the past. In this structure, the control computer 5 (screen control unit 51) can also determine whether the setting value read from the storage unit 53 has been edited. Therefore, it is possible to accept a display switching command from the operator to automatically switch the display of the process setting table 7 to a thumbnail display state. In this regard, the technology disclosed in the present invention can also simplify the editing of the setting values ​​of the process.

[0084] In addition, since the display switching command is implemented by pressing a button, the command can be easily input. In addition, the button for executing the display switching command is not limited to a structure having a "thumbnail display" button 63 and a "full display" button 64, and it is also possible to have a structure in which the "full display" button 64 is not provided and only the "thumbnail display" button 63 is provided. In this case, the process setting table 7 is usually displayed in a full display state on the display screen 55, and the process setting table 7 is displayed in a thumbnail display state only when the "thumbnail display" button 63 is pressed. In addition, it is also possible to set that, when the process setting table 7 is displayed in a thumbnail display state, the "thumbnail display" button 63 is not displayed, and only the "full display" button 64 is displayed. In addition, the initial value of the setting value of the process process is a value that can be appropriately set. Therefore, it is also possible to set the above-mentioned Figure 6 The example in the process setting table 7 shown ("0" in the setting item for inputting a numerical value, and "OFF" in the setting item for inputting the presence or absence of control) has different initial values.

[0085] The substrate processing device to which the present disclosure can be applied is not limited to the above-mentioned structure. The technology disclosed in the present disclosure can be applied to various substrate processing devices that are controlled by a process, such as a coating device, a developing device, a heating device, and a film forming device, which are arranged in a coating and developing device, wherein the coating and developing device is used to coat a resist liquid on a glass substrate or a semiconductor wafer and perform development after exposure, and the film forming device performs film forming processing on these substrates.

[0086] The embodiments disclosed herein are to be considered in all respects as illustrative and non-restrictive, and the embodiments described above may be omitted, replaced, or modified in various ways without departing from the appended claims and the gist thereof.

[0087] Description of Reference Numerals

[0088] 1: substrate processing device; 5: control computer; 53: storage unit; 55: display screen; 56: input unit.

Claims

1. A method for setting a process of a device for processing a substrate, the method comprising the following steps: The control computer of the device reads out a plurality of setting values ​​set corresponding to each of a plurality of steps defined in a time-dependent manner for a plurality of setting items of the process recipe from a storage unit, and displays the plurality of setting values ​​on a display unit of a screen of a display connected to the control computer in the form of a process setting table configured to identify the setting values ​​corresponding to the setting items and the steps, wherein: The process setting table is a table that displays each setting value corresponding to a plurality of setting items of the process and the plurality of steps defined in a time-dependent manner; while displaying the recipe setting table according to the process displayed on the display unit, accepting editing of the setting value selected by specifying the step and the setting item through an input unit connected to the control computer; and storing the process recipe after the edit of the set value is accepted in the storage unit, During the process of accepting the editing of the setting values ​​by the control computer, the process setting table is displayed on the display unit in a manner that switches between a full display state and a thumbnail display state in response to a display switching command input by means of the input unit. In the full display state, the setting values ​​corresponding to all the setting items of the process setting table are displayed, and in the thumbnail display state, only the setting values ​​corresponding to the setting items for which the editing of the setting values ​​has been accepted in the past are displayed.

2. The method for setting a process of a device according to claim 1, wherein: In the step of displaying on the display unit, the region of the recipe setting table that is beyond the display unit may be displayed on the display unit by scrolling.

3. The method for setting a process of a device according to claim 1 or 2, wherein: Initial values ​​are preset for all setting values ​​of the process recipe, and for the setting item including the setting value inconsistent with the initial value, the control computer determines that the setting value has been edited in the past.

4. The method for setting a process of a device according to claim 1 or 2, wherein: In the process of accepting the editing of the setting value, the control computer stores the edited setting value in the storage unit in association with an edited flag, and for the setting item including the setting value stored with the edited flag in association, the control computer determines that the editing of the setting value has been accepted in the past.

5. The method for setting a process of a device according to claim 1 or 2, wherein: In a case where the process recipe that is the source of the process setting table displayed in the process displayed on the display unit does not contain any of the setting values ​​that have been edited in the past, the process setting table is displayed in the full display state even if a display switching command for displaying the process in the thumbnail display state is input.

6. An apparatus for processing a substrate, comprising: A substrate processing unit, used for processing the substrate; a control computer for controlling the operation of the substrate processing unit based on the process recipe stored in the storage unit; and A display and an input unit, wherein the display and the input unit are connected to the control computer, The control computer is configured to perform the following actions: for a plurality of setting items of the process recipe, a plurality of setting values ​​set corresponding to each of a plurality of steps defined in a time-dependent manner are read from a storage unit storing the process recipe, and the plurality of setting values ​​are displayed on a display unit of a screen of the display in the form of a process setting table configured to identify the setting values ​​corresponding to the setting items and the steps, wherein: The process setting table is a table that displays each setting value corresponding to a plurality of setting items of the process and the plurality of steps defined in a time-dependent manner; while displaying the process setting table on the display unit, the input unit accepts the editing of the setting value selected by determining the step and the setting item; and the process after the editing of the setting value is accepted is stored in the storage unit, The control computer is also configured to perform the following actions: during the implementation of the action of accepting the editing of the setting values, the process setting table is displayed on the display unit in a manner that switches between a full display state and a thumbnail display state in response to a display switching command input via the input unit, wherein in the full display state, the setting values ​​corresponding to all the setting items of the process setting table are displayed, and in the thumbnail display state, only the setting values ​​corresponding to the setting items for which the editing of the setting values ​​has been accepted in the past are displayed.

7. The apparatus for processing a substrate according to claim 6, wherein: The control computer is configured to be able to execute the following operation: displaying the area of ​​the recipe setting table beyond the display unit on the display unit by scrolling.

8. The apparatus for processing a substrate according to claim 6 or 7, wherein: Initial values ​​are pre-set for all setting values ​​of the process recipe. For the setting items containing setting values ​​inconsistent with the initial values, the control computer determines that the setting values ​​have been edited in the past and executes a switching action for the display status of the process setting table.

9. The apparatus for processing a substrate according to claim 6 or 7, wherein: In the action of accepting the editing of the setting value, the control computer stores the edited setting value in the storage unit in association with an edited flag, and for the setting item including the setting value stored with the edited flag in association, the control computer determines that the editing of the setting value has been accepted in the past, and executes the switching action of the display status of the process setting table.

10. The apparatus for processing a substrate according to claim 6 or 7, wherein: In a case where the process recipe that is the source of the process setting table displayed on the display unit does not contain any of the setting values ​​that have been edited in the past, the control computer executes the action of displaying the process setting table in the full display state even when a display switching command for displaying the process setting table in the thumbnail display state is input.

11. A computer-readable storage medium storing a computer program, wherein the computer program, when executed by a processor, executes the method for setting a process of a device according to any one of claims 1 to 5.

12. A computer program product, comprising a computer program, wherein when the computer program is run by a processor, the computer program executes the method for setting a process recipe of a device according to any one of claims 1 to 5.

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