Liquid supply apparatus and control method for liquid supply apparatus

Abstract

A liquid supply device includes a plug (10) having a plug-side liquid flow path (11), and a socket (20) having a socket-side liquid flow path (21a), the plug (10) includes a groove portion (12) having a fixing groove (12a), the socket (20) includes a main body portion (21) having the socket-side liquid flow path (21a), a holding portion (22) held by a robot, and a sleeve member (23) adjusting a position of the main body portion (21) with respect to the holding portion (22), a top end of the main body portion (21) extends in a circular ring shape around a socket axis (Zp1) and has a locking ball (21Aa), and the sleeve member (23) switches between a connected state in which the locking ball (21Aa) is fixed to the fixing groove (12a) and a released state in which the locking ball (21Aa) is not fixed to the fixing groove (12a).

Description

Technical Field

[0001] This invention relates to a liquid supply device and a control method for the liquid supply device. Background Technology

[0002] Conventional liquid supply devices are known for supplying liquid contained in a liquid storage container to multiple target devices (see, for example, Patent Document 1). In the liquid supply device disclosed in Patent Document 1, a liquid flow path formed in the plug and a liquid flow path formed in the socket are connected by fixing a plug to the opening of the liquid storage container and installing a socket on the plug. When installing the socket on the plug, an operator engages the external thread of the mounting nut formed in the socket with the internal thread formed in the plug.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2018-20793 Summary of the Invention

[0006] In the liquid supply device disclosed in Patent Document 1, when connecting the liquid flow path formed in the plug and the liquid flow path formed in the socket, an operator is required to hold the socket and install it into the plug. Therefore, there is an increased workload for the operator and a possibility that the operator may be exposed to danger when handling highly hazardous liquids.

[0007] Therefore, to prevent increased workload for workers or exposure to hazards, it is considered to automate the installation of the socket onto the plug by using a robotic arm that holds the socket. For example, it is considered to pre-store the position of the plug disclosed in Patent Document 1 and use a robotic arm to move the socket to the stored position.

[0008] However, in order to secure the socket to the plug using a robotic arm that holds the socket, an excessively large driving force is required for this purpose. Furthermore, to precisely position the socket relative to the plug using the robotic arm, an excessively large gripping force is needed to hold the socket in a manner that prevents the socket's orientation from changing.

[0009] The present invention was made in view of the above circumstances, and its object is to provide a liquid supply device and a control method for the liquid supply device, which can connect the socket side liquid flow path and the plug side liquid flow path by fixing the socket side fixing part of the socket to the plug side fixing part of the plug without using a gripping mechanism with excessive driving force and gripping force.

[0010] To solve the above problems, the present invention adopts the following approach.

[0011] One aspect of the present invention relates to a liquid supply device, comprising: a plug fixed to an opening provided on the upper surface of a liquid receiving container, and having a plug-side liquid flow path extending along a plug axis; and a socket detachably mounted to the plug, and having a socket-side liquid flow path extending along a socket axis. The liquid supply device is characterized in that: the plug has a groove extending annularly around the plug axis and having a plug-side fixing portion; the socket comprises: a body portion formed in a cylindrical shape along the socket axis and having the socket-side liquid flow path; and a grip portion. The main body is formed in a cylindrical shape along the axis of the socket and is held by a gripping mechanism for holding the socket; and an adjustment part is provided for adjusting the position of the main body relative to the gripping part on the axis of the socket. The top end of the main body extends in a circular shape around the axis of the socket and has a socket-side fixing part. The adjustment part switches between a connected state and a disconnected state. The connected state is when the socket-side fixing part is fixed to the plug-side fixing part, thus connecting the socket-side liquid flow path with the plug-side liquid flow path. The disconnected state is when the socket-side fixing part is not fixed to the plug-side fixing part.

[0012] According to one aspect of the liquid supply device of the present invention, in the socket, the gripping part is gripped by a gripping mechanism, and the top end of the main body having a socket-side liquid flow path is inserted into a groove extending in an annular shape around the plug axis. The socket can switch between a connected state and a disconnected state by an adjustment part. The connected state is a state in which the socket-side fixing part is fixed to the plug-side fixing part, thereby connecting the socket-side liquid flow path and the plug-side liquid flow path. The disconnected state is a state in which the socket-side fixing part is not fixed to the plug-side fixing part.

[0013] According to one aspect of the liquid supply device of the present invention, the position of the main body relative to the gripping part on the socket axis is adjusted by the adjustment part of the socket to switch from a disengaged state to a connected state. Therefore, it is not necessary for the gripping mechanism of the socket to apply a driving force to the socket for fixing the socket to the plug. Thus, without using a gripping mechanism with excessive driving force and gripping force, the socket-side fixing part of the socket can be fixed to the plug-side fixing part of the plug, thereby connecting the socket-side liquid flow path and the plug-side liquid flow path.

[0014] In one aspect of the liquid supply device according to the present invention, it may also be configured to have a force-applying member that applies force to the adjusting part toward the top end of the main body along the socket axis. The adjusting part is formed in a cylindrical shape along the socket axis and is arranged in a manner that allows it to move relative to the main body along the outer peripheral surface of the main body. The socket-side fixing part is fixed to the plug-side fixing part by the force of the force-applying member to achieve the connected state. The adjusting part moves relative to the main body in a direction opposite to the force to switch the connected state to the released state.

[0015] According to the liquid supply device of this structure, by moving the adjusting part that applies force to the top of the main body in the direction opposite to the force, the state in which the socket-side fixing part is fixed to the plug-side fixing part can be released. Therefore, the socket can be detached from the plug by switching the connected state to the disconnected state without the need for an operator.

[0016] In the liquid supply device with the above structure, a recessed portion forming an annular shape around the socket axis may be formed on the inner circumferential side of the grip portion. The adjustment portion is configured to close the recessed portion and has a flange portion. The flange portion protrudes radially orthogonal to the socket axis in a manner that contacts the bottom surface of the recessed portion. A first space (S1) is formed at a position closer to the base end of the main body portion than the flange portion, and a second space (S2) is formed at a position closer to the top end of the main body portion than the flange portion. The adjustment portion switches the deactivated state to the connected state by supplying compressed gas to the first space, and switches the connected state to the deactivated state by supplying compressed gas to the second space.

[0017] According to the liquid supply device of this method, by supplying compressed gas to the first space of the flange portion of the ratio adjustment unit near the base end of the main body, the flange portion can be moved from the base end of the main body towards the top end, switching the disconnected state to the connected state. Furthermore, by supplying compressed gas to the second space of the flange portion of the ratio adjustment unit near the top end of the main body, the flange portion can be moved from the top end of the main body towards the base end, switching the connected state to the disconnected state.

[0018] In the liquid supply device of this method, the gripping part may also include: a first cylindrical component made of metal, which forms the bottom surface of the recess; and a second cylindrical component made of resin, which is arranged to contact the outer peripheral surface of the first cylindrical component.

[0019] Since the first cylindrical component forming the bottom of the recess is made of metal, it will not deform even when a high gripping force is applied by the gripping mechanism. Therefore, deformation of the first cylindrical component will not hinder the movement of the flange. In addition, since the second cylindrical component is made of resin, the socket can be made lighter.

[0020] In one aspect of the liquid supply device according to the present invention, it may also be configured to have a detection unit that detects the connection state and the release state.

[0021] According to the liquid supply device of this structure, the detection unit can appropriately detect the switch from the deactivated state to the connected state and the switch from the connected state to the deactivated state.

[0022] In the liquid supply device with the above structure, the detection unit may include: a magnet, which is mounted on the main body; and a magnetic sensor, which is fixed in position relative to the gripping part on the socket axis and outputs whether it is configured in a position close to the magnet. The detection unit detects the connection state and the release state based on the output of the magnetic sensor.

[0023] According to this liquid supply device, the connection and disconnection states can be appropriately detected based on whether the output is the output of a magnetic sensor that is positioned close to the magnet installed on the main body.

[0024] In a control method for a liquid supply device according to one aspect of the present invention, the liquid supply device includes: a plug fixed to an opening provided on the upper surface of a liquid receiving container and having a plug-side liquid flow path extending along the plug axis; and a socket having a socket-side liquid flow path extending along the socket axis. The plug has a groove extending annularly around the plug axis and having a plug-side fixing portion. The socket includes: a main body formed in a cylindrical shape along the socket axis and having the socket-side liquid flow path; and a gripping portion formed in a cylindrical shape along the socket axis and gripped by a gripping mechanism for gripping the socket. The top of the main body... The liquid supply device extends in a circular shape around the socket axis and has a socket-side fixing portion. The control method of the liquid supply device includes: a connection step, controlling the position of the main body relative to the grip portion on the socket axis, switching from a release state to a connection state, wherein the release state is a state in which the socket-side fixing portion is not fixed to the plug-side fixing portion, and the connection state is a state in which the socket-side fixing portion is fixed to the plug-side fixing portion and the socket-side liquid flow path is connected to the plug-side liquid flow path; and a release step, controlling the position of the main body relative to the grip portion on the socket axis, switching from the connection state to the release state.

[0025] According to a control method for a liquid supply device based on one aspect of the present invention, in the connection process, the position of the main body relative to the gripping part on the socket axis is controlled, and the connection state is switched to the connection state. In the release process, with the top end of the main body inserted into the groove, the position of the main body relative to the gripping part on the socket axis is controlled, and the connection state is switched to the release state.

[0026] According to a control method for a liquid supply device based on one aspect of the present invention, in the connection process, the disconnected state is switched to the connected state by controlling the position of the main body relative to the gripping part on the socket axis. Therefore, it is not necessary to apply a gripping mechanism to the socket to drive the socket to fix it to the plug. Furthermore, in the disconnection process, the connected state is switched to the disconnected state by controlling the position of the main body relative to the gripping part on the socket axis. Therefore, it is not necessary to apply a gripping mechanism to the socket to drive the socket to detach it from the plug. Thus, without using a gripping mechanism with excessive driving force and gripping force, it is possible to fix the socket-side fixing part of the socket to the plug-side fixing part of the plug, thereby connecting the socket-side liquid flow path and the plug-side liquid flow path.

[0027] Invention Effects

[0028] According to the present invention, a liquid supply device and a control method for the liquid supply device can be provided, which can connect the socket-side liquid flow path and the plug-side liquid flow path by fixing the socket-side fixing part of the socket to the plug-side fixing part of the plug without using a gripping mechanism with excessive driving force and gripping force. Attached Figure Description

[0029] Figure 1 This is a side view of a liquid supply device according to an embodiment of the present invention, showing the state in which a robot holds and delivers the socket.

[0030] Figure 2 This is a side view of a liquid supply device according to an embodiment of the present invention, showing a robot with the socket positioned near the plug.

[0031] Figure 3 Viewed from above Figure 1 The top view of the liquid supply device shown illustrates the robot holding and delivering the socket.

[0032] Figure 4 This is a flowchart illustrating the control method of the liquid supply device in this embodiment.

[0033] Figure 5 It is a partial cross-sectional view showing the state of the socket being moved near the plug.

[0034] Figure 6 It is a partial cross-sectional view showing the state of the socket being inserted into the plug.

[0035] Figure 7 It is a partial cross-sectional view showing the state in which the socket is fixed to the plug.

[0036] Figure 8 This is a top view of the socket.

[0037] Figure 9 yes Figure 8 The AA-direction view of the socket shown indicates that the socket is not secured to the plug in the released state.

[0038] Figure 10 yes Figure 8 The BB-direction view of the socket shown indicates that the socket is not secured to the plug in the released state.

[0039] Figure 11 yes Figure 8 The AA-direction view of the socket shows the socket being fixed to the plug in the connected state.

[0040] Figure 12 yes Figure 8The BB-direction cross-sectional view of the socket shown illustrates the connection state of the socket being fixed to the plug.

[0041] Figure 13 This is a partial longitudinal section view of the socket and plug when switching from the deactivated state to the connected state.

[0042] Figure 14 This is a partial longitudinal section view of the socket and plug when the connected state is switched to the disconnected state.

[0043] Explanation of reference numerals in the attached figures

[0044] 10 plugs

[0045] 11. Liquid flow path on the plug side

[0046] 12. Groove

[0047] 12a Fixing slot (plug-side fixing part)

[0048] 12b protrusion

[0049] 13 Gas flow path on the plug side

[0050] 20 sockets

[0051] 21 Main Body

[0052] 21A socket body

[0053] 21A1 Ring-shaped component

[0054] 21Aa Locking ball (receptacle side fixing part)

[0055] 21B Sealing Core

[0056] 21C Adapter

[0057] 21a Socket-side liquid flow path

[0058] 21b outer periphery

[0059] 22. Grip section

[0060] 22A cylinder guide

[0061] 22B cylinder block

[0062] 22B1 flow path

[0063] 22C Upper Cylinder Head

[0064] 22C1 1st flow path

[0065] 22C2 2nd flow path

[0066] 22D lower cylinder head

[0067] 22a recess

[0068] 22a1 Bottom surface

[0069] 22b recess

[0070] 23. Sleeve assembly (adjusting part)

[0071] 23A Flange

[0072] 24 Springs

[0073] 24A Ring-shaped component

[0074] 25 valve

[0075] 26 Corrugated Pipe

[0076] 27 Springs

[0077] 30 robots

[0078] 31 Hands

[0079] 40 Filming Department

[0080] 50 Control Department

[0081] 100 Liquid supply device

[0082] 200 Liquid Storage Container

[0083] 210 First opening

[0084] 220 Second opening

[0085] 230 Bottom

[0086] CL1 and CL2 gap

[0087] GL1 Gas Piping

[0088] LL1 liquid piping

[0089] P1 Port 1

[0090] P2 Port 2

[0091] S1 First Space

[0092] S2 Second Space

[0093] TB Setup Platform

[0094] WC Cleaning Container

[0095] X, Y, Z axes

[0096] Zp1 plug axis

[0097] Zs1 socket axis Detailed Implementation

[0098] Hereinafter, a liquid supply device 100 according to an embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 and Figure 2 This is a side view showing the liquid supply device 100 of this embodiment. Figure 1 This shows the state in which the robot 30 holds and delivers the socket 20. Figure 2 This shows the state in which the robot 30 has positioned the socket 20 near the plug 10. Figure 3 Viewed from above Figure 1 The top view of the liquid supply device 100 shown illustrates the state in which the robot 30 holds and delivers the socket 20.

[0099] Figure 1 The liquid supply device 100 shown in this embodiment is a device that supplies liquid contained in a liquid storage container 200 to a plurality of supply target devices (not shown). Here, the liquid in this embodiment is, for example, pure water or various chemical solutions used in the semiconductor manufacturing process of a semiconductor manufacturing apparatus.

[0100] like Figures 1 to 3 As shown, the liquid supply device 100 includes a plug (first plug) 10, a sealing plug 15, a socket 20, a robot (gripping mechanism) 30, a camera (recognition unit) 40, and a control unit 50.

[0101] like Figure 1 As shown, the liquid storage container 200 is a cylindrical container formed around an axis Z1 extending in the vertical direction, and a first opening 210 and a second opening 220 are provided on the upper surface (top plate). Internal threads are formed on the inner circumferential surfaces of the first opening 210 and the second opening 220.

[0102] The plug 10 is fixed to the first opening 210 and has a plug-side liquid flow path 11 extending along the plug axis (first plug axis) Zp1. The plug-side liquid flow path 11 extends to near the bottom 230 of the liquid receiving container 200. An external thread is formed on the outer peripheral surface of the upper end of the plug 10. The plug 10 is fixed to the first opening 210 by engaging the external thread of the plug 10 with the internal thread of the first opening 210.

[0103] Figure 5 This is a partial cross-sectional view showing the state where the socket 20 is moved to the vicinity of the plug 10. For example... Figure 5As shown, a groove 12 extending in an annular shape around the plug axis Zp1 is formed at the top (upper) of the plug 10. The groove 12 has a fixing groove (plug-side fixing part) 12a for fixing the locking ball (socket-side fixing part) 21Aa of the socket 20. The fixing groove 12a is formed in an annular shape around the plug axis Zp1.

[0104] like Figure 1 As shown, the sealing plug 15 is a component that is fixed to and seals the second opening 220. An external thread is formed on the outer peripheral surface of the sealing plug 15. The sealing plug 15 is fixed to the second opening 220 by engaging the external thread of the sealing plug 15 with the internal thread of the second opening 220.

[0105] The socket 20 is detachably mounted to the plug 10 and has a main body 21. The main body 21 has a socket-side liquid flow path 21a extending along the socket axis Zs1. The socket 20 is connected to a liquid piping LL1 for supplying liquid to a target device and a gas piping GL1 for supplying gas to a liquid storage container 200. The socket 20 is held by the hand 31 of the robot 30.

[0106] like Figure 5 As shown, the top (bottom) end of the main body 21 of the socket 20 extends in a circular shape around the socket axis Zs1 and has a plurality of locking balls 21Aa that are fixed in the fixing groove 12a of the plug 10. The locking balls 21Aa are arranged at multiple locations around the socket axis Zs1 at intervals. The detailed structure of the socket 20 will be described later.

[0107] like Figures 1 to 3 As shown, robot 30 is a mechanism that holds socket 20 and positions socket 20 in a predetermined posture within its range of motion, defined by three-dimensional positions defined by axes X, Y, and Z. Robot 30 is, for example, a 6-axis articulated robot. Robot 30 includes a hand 31, a wrist 32, a first arm 33, a second arm 34, a base 35, and a rotating body 36.

[0108] The rotating body 36 is supported in a manner that allows it to rotate relative to the base 35 about a vertical axis Zr1. The first arm 33 is supported in a manner that allows it to rotate relative to the rotating body 36 about a horizontal axis Zr2. The second arm 34 is supported in a manner that allows it to rotate relative to the first arm 33 about a horizontal axis Zr3. One end of the wrist 32 is mounted to the second arm 34, and the other end is mounted to the hand 31.

[0109] By combining the rotation of the rotating body 36 relative to the base 35, the rotation of the first arm 33 relative to the rotating body 36, and the rotation of the second arm 34 relative to the first arm 33, the wrist 32 can be positioned at any three-dimensional position within its range of motion. Furthermore, the wrist 32 can rotate along three axes, allowing the hand 31 to be displaced along these three axes and assume any desired posture.

[0110] The imaging unit 40 is a device that captures images of the upper surface of the plug 10 and identifies the three-dimensional position of the plug 10 and the orientation of the plug axis Zp1 of the plug 10. The imaging unit 40 transmits the identification results of the three-dimensional position of the plug 10 and the orientation of the plug axis Zp1 of the plug 10 to the control unit 50.

[0111] The control unit 50 controls the robot 30 based on the recognition results of the three-dimensional position of the plug 10 and the orientation of the plug axis Zp1 of the plug 10 transmitted from the imaging unit 40, so as to configure the socket 20 held by the hand 31 in the desired position with the desired posture.

[0112] Next, refer to Figure 4 The control method of the liquid supply device 100 of this embodiment will be described. Figure 4 This is a flowchart illustrating the control method of the liquid supply device 100 of this embodiment, showing the process of installing the socket 20 onto the plug 10. Figure 4 Each of the processes shown is performed by executing a control program through the control unit 50.

[0113] In step S101, the control unit 50 controls the robot 30 to hold... Figure 3 The socket 20 shown is located on the setting table TB. The control unit 50 has the position of the socket 20 on the setting table TB pre-stored, so that the hand 31 moves to a position near the socket 20 and holds the socket 20.

[0114] In step S102 (gripping process), the control unit 50 controls the robot 30 while the hand 31 grips the socket 20, causing the socket 20 to move near the plug 10. The control unit 50 controls the robot 30 to position the top of the main body 21 at a distance along the plug axis Zp1 from the position of the plug 10 in three-dimensional space as identified by the imaging unit 40. When the robot 30 positions the socket 20 near the plug 10, it adjusts the hand 31 so that the orientation of the plug axis Zp1 identified by the imaging unit 40 is aligned with the orientation of the socket axis Zs1, thus gripping the socket 20.

[0115] In step S103 (insertion process), the control unit 50 controls the robot 30 to insert the tip of the main body 21 of the socket 20 into the slot 12 of the plug 10. The robot 30 moves its hand 31 along the plug axis Zp1 in such a way that the tip of the main body 21 is inserted into the slot 12 of the plug 10.

[0116] Figure 6 This is a partial cross-sectional view showing the state where the socket 20 is inserted into the plug 10. For example... Figure 6 As shown, the robot 30 inserts the tip of the main body 21 into the slot 12 such that the locking ball 21Aa is positioned on the plug axis Zp1 at a predetermined distance (first predetermined distance) L1 from the fixing slot 12a. When the tip of the main body 21 is inserted into the slot 12 of the plug 10, it becomes... Figure 6 The state shown.

[0117] In step S104 (connection process), the control unit 50 controls the socket 20 to fix the socket 20 to the plug 10. The socket 20 has a sleeve member (adjustment part) 23 that moves the top end of the main body 21 toward the bottom of the groove 12 of the plug 10. The sleeve member 23 is a member that switches between a connected state in which the locking ball 21Aa is fixed to the fixing groove 12a and a released state in which the locking ball 21Aa is not fixed to the fixing groove 12a, with the top end of the main body 21 inserted into the groove 12.

[0118] In step S104 (connection process), the control unit 50 controls the position of the top of the main body 21 relative to the hand 31 of the robot 30 on the socket axis Zs1 while the top of the main body 21 is inserted into the slot 12, switching the deactivated state to the connected state. If the detection unit 29 (described later) detects the connected state, the control unit 50 recognizes that the deactivated state has been switched to the connected state, and the process proceeds to step S105.

[0119] Figure 7 This is a partial cross-sectional view showing the state in which the socket 20 is fixed to the plug 10. For example... Figure 7 As shown, when the locking ball 21Aa is positioned in the fixing groove 12a, the locking ball 21Aa is fixed in the fixing groove 12a by the force of the spring 24. Therefore, as long as no upward force that can overcome the force of the spring 24 is applied, the socket 20 can be kept fixed to the plug 10.

[0120] like Figure 6 As shown, with the locking ball 21Aa not positioned in the fixing groove 12a, the valve 25 contacts the bellows 26, sealing the lower end of the liquid flow path 21a on the socket side. On the other hand, as... Figure 7As shown, with the locking ball 21Aa positioned in the fixing groove 12a, the bellows 26 contacts the top of the plug 10, and correspondingly, the valve 25 moves away from the bellows 26. Thus, the seal of the liquid flow path 21a on the socket side is released, becoming... Figure 7 In the state shown, the liquid flow path 21a on the socket side and the liquid flow path 11 on the plug side are connected.

[0121] In step S105, the control unit 50 controls the robot 30 to release the hand 31 from the state of holding the socket 20 and move the hand 31 to the specified standby position.

[0122] In step S106, the control unit 50 operates the pump (not shown) connected to the liquid piping LL1 to begin supplying the liquid contained in the liquid storage container 200 to the supply target device. The control unit 50 controls the gas supply source (not shown) connected to the gas piping GL1 to supply the liquid storage container 200 with a gas (e.g., air or nitrogen) equivalent to the volume of liquid taken from the liquid storage container 200.

[0123] Gas supplied from gas pipe GL1 to socket 20 flows inside socket 20 and is supplied to the space above liquid collection container 200 via plug-side gas flow path 13. Liquid reaching the upper end of plug-side liquid flow path 11 is guided to liquid pipe LL1 via socket-side liquid flow path 21a. Liquid guided to liquid pipe LL1 is supplied to supply target device. As described above, liquid supply from liquid supply device 100 to supply target device begins.

[0124] As long as there is liquid remaining in the liquid storage container 200, the liquid supply device 100 continues to supply liquid to the target device. However, if the liquid in the liquid storage container 200 is used up or falls below a specified amount, it needs to be replaced with a new liquid storage container 200. Steps S107 to S111 are processes for disconnecting the socket 20 from the plug 10 in order to replace the liquid storage container 200.

[0125] In step S107, the control unit 50 controls the pump connected to the liquid piping LL1 to stop operating and stops supplying gas from the gas supply source connected to the gas piping GL1 to the socket 20. When the pump stops operating, the supply of liquid from the liquid collection container 200 to the liquid piping LL1 is also stopped.

[0126] In step S108, the control unit 50 controls the robot 30 so that the hand 31 moves from a predetermined standby position to a position where it can grasp the socket 20, and the hand 31 grasps the socket 20. When the hand 31 grasps the socket 20, it becomes... Figure 7 The state shown.

[0127] In step S109 (release process), with the top end of the main body 21 inserted into the slot 12, the control unit 50 controls the position of the main body 21 relative to the gripping part 22 on the socket axis Zs1, switching the connection state to the release state. The control unit 50 adjusts the position of the locking ball 21Aa relative to the gripping position held by the hand 31 of the robot 30 on the socket axis Zs1, so that the locking ball 21Aa is not positioned in the fixing slot 12a. If the detection unit 29 (described later) detects the release state, the control unit 50 recognizes that the connection state has been switched to the release state and proceeds to step S110.

[0128] The sleeve component 23 applies an upward force that overcomes the force of the spring 24, causing the spring 24 to contract. When the spring 24 contracts, the locking ball 21Aa, which was fixed in the fixing groove 12a, is released, and the locking ball 21Aa moves to a position away from the fixing groove 12a, becoming... Figure 6 The state shown is as follows. Then, the control unit 50 controls the robot 30 to unplug the socket 20 from the plug 10. The robot 30 moves its hand 31 along the plug axis Zp1 to pull the tip of the main body 21 out of the slot 12 of the plug 10.

[0129] In step S110, the control unit 50 controls the robot 30 while the hand 31 is holding the socket 20, so that the hand 31 moves to the cleaning container WC provided on the setting table TB. The cleaning container WC contains a cleaning solution (e.g., pure water) for cleaning liquid adhering to the socket 20.

[0130] By immersing the socket 20 in the cleaning solution, even if the liquid adhering to the socket 20 is a chemical solution such as a slurry that condenses upon contact with the atmosphere, it is possible to prevent the chemical solution from drying and condensing while remaining attached to the socket 20. Furthermore, it is preferable to continuously supply fresh cleaning solution to the cleaning container WC to maintain the socket 20 in an uncontaminated state.

[0131] In step S111, the control unit 50 controls the robot 30 to release the hand 31 from the socket 20. Then, the control unit 50 controls the robot 30 to move the hand 31 to a predetermined standby position. As described above, the action of removing the socket 20 from the plug 10 is completed.

[0132] Next, refer to Figures 8 to 14 The construction of socket 20 will be described in detail. For example... Figures 8 to 14As shown, the socket 20 includes a main body 21, a gripping part 22, a sleeve part 23, a spring (force-applying part) 24, a valve 25, a bellows 26, a spring 27, a support part 28, and a detection part 29.

[0133] like Figure 9 As shown, the main body 21 includes a socket body 21A, a sealing core 21B, and a fitting 21C. The socket body 21A is disposed at the top end of the main body 21, and the fitting 21C is disposed at the base end of the socket body 21A. The sealing core 21B is disposed between the socket body 21A and the fitting 21C, connecting the socket body 21A and the fitting 21C. The main body 21 is formed of a resin material (e.g., fluoropolymer).

[0134] A valve 25 and a bellows 26 are fixed to the top of the sealing core 21B. The bellows 26 can extend and retract along the socket axis Zs1, and is forced from the sealing core 21B toward the top of the main body 21 by a spring 27.

[0135] The gripping portion 22 is formed in a generally cylindrical shape along the socket axis Zs1 and is gripped by the hand 31 of the robot 30 that grips the socket 20. A recess 22a, forming an annular shape around the socket axis Zs1, is formed on the inner periphery of the gripping portion 22. A recess 22b, also forming an annular shape around the socket axis Zs1, is formed on the outer periphery of the gripping portion 22. The recess 22b is the portion gripped by the hand 31.

[0136] The gripping part 22 includes a cylinder guide (first cylindrical component) 22A, a cylinder body (second cylindrical component) 22B, an upper cylinder head 22C, and a lower cylinder head 22D.

[0137] The cylinder guide 22A is a cylindrical component extending around the socket axis Zs1, and is made of a metal material (e.g., stainless steel). The inner circumferential surface of the cylinder guide 22A forms the bottom surface 22a1 of the recess 22a.

[0138] The cylinder body 22B is a cylindrical component extending around the socket axis Zs1, and is formed of a resin material (e.g., fluoropolymer). The cylinder body 22B is configured to contact the outer peripheral surface of the cylinder guide 22A.

[0139] The upper cylinder head 22C is a circular plate-shaped component formed around the socket axis Zs1, and is made of resin material (e.g., fluoropolymer). The upper cylinder head 22C is fixed above the cylinder body 22B and is configured to contact the outer peripheral surface of the sleeve component 23 in a sealing recess 22a.

[0140] The lower cylinder head 22D is a circular plate-shaped component formed around the socket axis Zs1, and is made of resin material (e.g., fluoropolymer). The lower cylinder head 22D is fixed below the cylinder body 22B and is configured to contact the outer peripheral surface of the sleeve component 23 in a sealing recess 22a.

[0141] The sleeve component 23 is formed into a cylindrical shape along the socket axis Zs1 and is configured to move relative to the main body 21 along the outer peripheral surface 21b of the main body 21. The sleeve component 23 is configured to close the recess 22a. The sleeve component 23 has a flange 23A that protrudes radially orthogonally to the socket axis Zs1 in a manner that contacts the bottom surface 22a1 of the recess 22a.

[0142] In the recess 22a, a first space S1 is formed at a position closer to the base end (upper side) of the main body 21 than the flange 23A, and a second space S2 is formed at a position closer to the top end (lower side) of the main body 21 than the flange 23A.

[0143] like Figure 10 As shown, a first port P1 and a second port P2 are installed on the upper cylinder head 22C. Compressed air is supplied to the first port P1 from a compressed air source (not shown) via a first valve (not shown). Compressed air is supplied to the second port P2 from a compressed air source via a second valve (not shown). The on / off states of the first and second valves are controlled by the control unit 50.

[0144] When the control unit 50 controls the first valve to be open and the second valve to be closed, compressed air is supplied to the first port P1. The compressed air supplied to the first port P1 is guided to the first space S1 through the first flow path 22C1 formed in the upper cylinder head 22C. The sleeve member 23 moves toward the plug 10 along the socket axis Zs1 due to the pressure of the compressed air supplied to the first space S1.

[0145] The sleeve component 23 moves until the locking ball 21Aa is positioned in the fixing groove 12a, thereby switching the unlocked state where the locking ball 21Aa is not fixed in the fixing groove 12a to the connected state where the locking ball 21Aa is fixed in the fixing groove 12a.

[0146] In the connected state, the sleeve component 23, through the force generated by the spring 24, fixes the locking ball 21Aa in the fixing groove 12a. The spring 24 is an elastic component that applies force to the sleeve component 23 along the socket axis Zs1 toward the top of the main body 21. In the connected state, it is... Figure 11 and Figure 12 The state shown.

[0147] like Figure 13As shown, when the disengaged state is switched to the engaged state, if the sleeve component 23 moves toward the plug 10, the locking ball 21Aa (shown in dashed lines) contacts the protrusion 12b above the retaining groove 12a. Then, when the sleeve component 23 moves downward, the spring 24 contracts, and a gap CL1 is formed between the annular component 24A located at the lower end of the spring 24 and the sleeve component 23 along the socket axis Zs1.

[0148] The locking ball 21Aa enters the gap CL1 and passes over the protrusion 12b, and is guided to the fixing groove 12a. When the locking ball 21Aa is guided to the fixing groove 12a, the spring 24 extends and the gap CL1 disappears, resulting in the locking ball 21Aa being fixed in the fixing groove 12a.

[0149] When the control unit 50 controls the valve to be closed and the valve to be open, compressed air is supplied to the second port P2. The compressed air supplied to the second port P2 is guided to the second space S2 via the second flow path 22C2 formed in the upper cylinder head 22C and the flow path 22B1 formed in the cylinder block 22B. The sleeve member 23 moves away from the plug 10 along the socket axis Zs1 due to the pressure of the compressed air supplied to the second space S2.

[0150] The sleeve component 23 moves relative to the main body 21 in the direction opposite to the force of the spring 24, thereby switching the connection state where the locking ball 21Aa is fixed in the fixing groove 12a to the release state where the locking ball 21Aa is not fixed in the fixing groove 12a. In the release state, it is... Figure 9 and Figure 10 The state shown.

[0151] like Figure 14 As shown, when switching from the connected state to the disconnected state, if the sleeve component 23 moves away from the plug 10, the locking ball 21Aa (shown in dashed lines) contacts the protrusion 12b above the fixing groove 12a. Then, as the sleeve component 23 moves upward, the spring 24 contracts, and a gap CL2 is formed between the sleeve component 23 and the annular component 21A1 fixed to the lower end of the socket body 21A along the socket axis Zs1.

[0152] Locking ball 21Aa enters gap CL2 and passes over protrusion 12b, being guided... Figure 14 The position is shown by the solid line. Then, the locking ball 21Aa is guided above the protrusion 12b as the sleeve component 23 moves upward. Then, the locking ball 21Aa is released from the fixing groove 12a.

[0153] like Figures 8 to 12As shown, the support member 28 is a generally annular component that supports the mating member 21C of the main body 21 in a manner that allows it to move along the socket axis Zs1. Figure 9 and Figure 11 As shown, the support member 28 is connected to the upper cylinder head 22C via a rod-shaped connecting member 28a extending along the socket axis Zs1. When the main body 21 moves relative to the gripping part 22 along the socket axis Zs1, the outer peripheral surface of the mating member 21C is supported by the support member 28.

[0154] The detection unit 29 is a device that detects the connection status of the liquid flow path 21a on the socket side and the liquid flow path 11 on the plug side, as well as the release status of the locking ball 21Aa not being fixed in the fixing groove 12a. The detection results of the detection unit 29 are transmitted to the control unit 50.

[0155] like Figure 8 , Figure 9 , Figure 11 As shown, the detection unit 29 includes: a first magnet 29a and a second magnet 29b, which are mounted on the coupling member 21C of the main body 21; and a first magnetic sensor 29c and a second magnetic sensor 29d, which are mounted on the support member 28.

[0156] like Figure 8 As shown, the first magnet 29a and the second magnet 29b are arranged at different positions in the circumferential direction around the socket axis Zs1. Figure 9 and Figure 11 As shown, the first magnet 29a and the second magnet 29b are arranged at different positions along the socket axis Zs1. The first magnet 29a is arranged closer to the grip portion 22 than the second magnet 29b along the socket axis Zs1.

[0157] The first magnetic sensor 29c is a sensor whose position relative to the grip 22 on the socket axis Zs1 is fixed and outputs whether it is positioned close to the first magnet 29a. For example... Figure 9 As shown, with the first magnet 29a positioned close to the support member 28 along the direction of the socket axis Zs1, the first magnetic sensor 29c outputs an on state.

[0158] The second magnetic sensor 29d is a sensor whose position relative to the grip 22 on the socket axis Zs1 is fixed and outputs whether it is positioned close to the second magnet 29b. For example... Figure 11 As shown, with the second magnet 29b positioned close to the support member 28 along the direction of the socket axis Zs1, the second magnetic sensor 29d outputs an on state.

[0159] When the first magnetic sensor 29c outputs an "on" state and the second magnetic sensor 29d outputs an "off" state, the detection unit 29 detects that the locking ball 21Aa is not fixed to the fixing groove 12a in a released state. Conversely, when the first magnetic sensor 29c outputs an "off" state and the second magnetic sensor 29d outputs an "on" state, the detection unit 29 detects that the liquid flow path 21a on the socket side and the liquid flow path 11 on the plug side are connected in a connected state. The detection unit 29 can reliably detect both the released and connected states based on the combination of the outputs from the first magnetic sensor 29c and the second magnetic sensor 29d.

[0160] The function and effects of the liquid supply device 100 of this embodiment described above will be explained.

[0161] According to the liquid supply device 100 of this embodiment, the socket 20 is held by the gripping part 22 by the robot 30, and the top end of the main body 21 having the socket-side liquid flow path 21a is inserted into the groove 12 extending in an annular shape around the plug axis Zp1. With the top end of the main body 21 inserted into the groove 12, the socket 20 switches between a connected state and a disengaged state via the sleeve member 23. The connected state is when the locking ball 21Aa is fixed in the fixing groove 12a, connecting the socket-side liquid flow path 21a and the plug-side liquid flow path 11; the disengaged state is when the locking ball 21Aa is not fixed in the fixing groove 12a.

[0162] According to the liquid supply device 100 of this embodiment, the position of the main body 21 relative to the gripping part 22 on the socket axis Zs1 is adjusted by the sleeve member 23 of the socket 20 to switch from the disengaged state to the connected state. Therefore, the robot 30 holding the socket 20 does not need to apply a driving force to the socket 20 to fix the socket 20 to the plug 10. Therefore, without using the robot 30 with excessive driving force and gripping force, the locking ball 21Aa of the socket 20 can be fixed to the fixing groove 12a of the plug 10 to connect the socket-side liquid flow path 21a and the plug-side liquid flow path 11.

[0163] According to the liquid supply device 100 of this embodiment, by moving the sleeve member 23, which is subjected to force by the spring 24 toward the top end of the main body 21, in the direction opposite to the force applied, the state in which the locking ball 21Aa is fixed in the fixing groove 12a can be released. Therefore, the socket 20 can be disconnected from the plug 10 without the need for an operator to switch the connection state to the release state.

[0164] According to the liquid supply device 100 of this embodiment, by supplying compressed air to the first space S1 on the base end side of the main body 21 of the flange portion 23A of the sleeve member 23, the flange portion 23A can be moved from the base end side of the main body 21 toward the top end side, switching the disconnected state to the connected state. Furthermore, by supplying compressed gas to the second space S2 on the top end side of the main body 21 of the flange portion 23A of the sleeve member 23, the flange portion 23A can be moved from the top end side of the main body 21 toward the base end side, switching the connected state to the disconnected state.

[0165] According to the liquid supply device 100 of this embodiment, since the cylinder guide 22A forming the bottom surface 22a1 of the recess 22a is made of metal, the cylinder guide 22A will not deform even when a high gripping force is applied by the robot 30. Therefore, the movement of the flange portion 23A will not be hindered due to deformation of the cylinder guide 22A. In addition, since the cylinder body 22B is made of resin, the socket 20 can be made lighter.

Claims

1. A liquid supply device, characterized in that, include: A plug is fixed to an opening provided on the upper surface of a liquid receiving container and has a plug-side liquid flow path extending along the plug axis. as well as A socket, which is detachably mounted to the plug, and has a socket-side fluid flow path extending along the socket axis. The plug has a groove that extends in a circular shape around the plug axis and has a plug-side fixing portion. The socket includes: The main body is formed in a cylindrical shape along the axis of the socket and has a liquid flow path on the socket side; The grip portion, which is cylindrical along the axis of the socket and is gripped by a gripping mechanism for gripping the socket, has an annular recess formed around the axis of the socket on its inner circumference; and The adjustment section adjusts the position of the main body relative to the gripping section on the socket axis. The top of the main body extends in a circular shape around the axis of the socket and has a socket-side fixing part. The adjustment portion is configured to close the recess and has a flange portion that protrudes radially orthogonal to the socket axis, contacting the bottom surface of the recess. A first space is formed at a position closer to the base end of the main body than the flange portion, and a second space is formed at a position closer to the top end of the main body than the flange portion. The adjustment unit switches the connection state to the release state by the pressure of the compressed gas supplied to the second space, and switches the release state to the connection state by the pressure of the compressed gas supplied to the first space. The connection state is when the socket-side fixing part is fixed to the plug-side fixing part, thus connecting the socket-side liquid flow path and the plug-side liquid flow path. The release state is when the socket-side fixing part is not fixed to the plug-side fixing part.

2. The liquid supply device according to claim 1, characterized in that: It has a force-applying component that applies force along the socket axis to the adjusting part toward the top of the main body. The adjustment part is formed in a cylindrical shape along the axis of the socket and is configured to move relative to the main body along the outer peripheral surface of the main body. The socket-side fixing part is fixed to the plug-side fixing part by the force of the force-applying member to form the connection state. The adjustment part moves relative to the main body in the direction opposite to the force to switch the connection state to the release state.

3. The liquid supply device according to claim 2, characterized in that: The gripping part includes: A first cylindrical component made of metal, having a bottom surface forming the recess; and A second cylindrical component made of resin is configured to contact the outer peripheral surface of the first cylindrical component.

4. The liquid supply device according to any one of claims 1 to 3, characterized in that: It has a detection unit that detects the connection state and the release state.

5. The liquid supply device according to claim 4, characterized in that: The detection unit includes: a magnet mounted on the main body; and a magnetic sensor whose position relative to the gripping part on the socket axis is fixed, and outputs whether it is configured in a position close to the magnet. The detection unit detects the connection state and the release state based on the output of the magnetic sensor.

6. A control method for a liquid supply device, characterized in that: The liquid supply device includes: a plug fixed to an opening provided on the upper surface of a liquid receiving container, and having a plug-side liquid flow path extending along the plug axis; and a socket having a socket-side liquid flow path extending along the socket axis. The plug has a groove that extends in a circular shape around the plug axis and has a plug-side fixing portion. The socket includes: The main body is formed in a cylindrical shape along the axis of the socket and has a liquid flow path on the socket side; The grip portion, which is cylindrical along the axis of the socket and is gripped by a gripping mechanism for gripping the socket, has an annular recess formed around the axis of the socket on its inner circumference; and The adjustment section adjusts the position of the main body relative to the gripping section on the socket axis. The top of the main body extends in a circular shape around the axis of the socket and has a socket-side fixing part. The adjustment portion is configured to close the recess and has a flange portion that protrudes radially orthogonal to the socket axis, contacting the bottom surface of the recess. A first space is formed at a position closer to the base end of the main body than the flange portion, and a second space is formed at a position closer to the top end of the main body than the flange portion. The control method for the liquid supply device includes: In the connection process, the position of the main body relative to the gripping part on the socket axis is controlled by the pressure of the compressed gas supplied to the first space, switching from a release state to a connection state. The release state is when the socket-side fixing part is not fixed to the plug-side fixing part, and the connection state is when the socket-side fixing part is fixed to the plug-side fixing part, connecting the socket-side liquid flow path to the plug-side liquid flow path; and In the release process, the position of the main body relative to the gripping part on the socket axis is controlled by the pressure of the compressed gas supplied to the second space, thereby switching the connection state to the release state.

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