Pulse direct current power generator and arc extinguishing parameter automatic adjusting method thereof

Abstract

This invention provides a pulsed DC power generator for sputtering a substrate in a cavity. The power generator includes a first voltage source, a second voltage source, a switching unit, a control unit, and a detection unit. The control unit provides a first control signal to control the switching of the switching unit, thereby integrating a first voltage from the first voltage source and a second voltage from the second voltage source into a pulsed voltage. The control unit adjusts parameters for a first predetermined arc-extinguishing period based on the fact that, during the operation of the pulsed voltage at the first voltage, the number of times the voltage value fluctuation exceeds a certain range is higher than the number of occurrences.

Description

Technical Field

[0001] This invention relates to a power generator and its arc extinguishing method, and more particularly to a pulsed DC power generator and its automatic adjustment method for arc extinguishing parameters. Background Technology

[0002] Currently, in plasma systems used in semiconductor manufacturing processes (such as sputtering and etching), existing technologies employ a negative voltage power supply paired with a proportionally dependent positive voltage power supply to output pulsed power, periodically suppressing electric arcs generated on the target surface. However, for applications requiring adjustment of the positive voltage level to suit different processes and sputtering materials, the existing fixed voltage ratio and pulse frequency output of the positive voltage cannot effectively suppress arc generation, resulting in slow sputtering rates and poor film quality.

[0003] Please see Figure 1 This is a waveform diagram illustrating the arcing phenomenon in an existing power generator. When an arc occurs (i.e., at time t1, the pulse voltage Vp changes rapidly), it indicates that energy transferred to the cavity is rapidly leaking, signifying an arc in the cavity. Therefore, after a short delay (time t2), the pulse width modulation (PWM) signal controlling the positive voltage power supply output goes high for a period of time (t2-t3) to extinguish the arc. However, after this time (time t3), the pulse power supply returns to its original frequency and duty cycle output, causing a drastic change in current at the moment of recovery. This results in an excessive voltage (which can be called a surge or recovery voltage) being transferred to the cavity side. Excessive voltage can easily cause a second arc on the cavity side; the more arcs, the worse the film quality of the deposited material inside the cavity. Furthermore, under fixed arc extinguishing parameters, when arc extinguishing is ineffective, there is a high probability that the arc will continue to occur, leading to unstable film quality of the deposited material.

[0004] Therefore, how to design a pulsed DC power generator and its automatic arc-extinguishing parameter adjustment method to prevent the pulsed voltage from generating excessively high recovery voltage and causing a secondary arc is a major research topic that the creators of this project intend to study. Summary of the Invention

[0005] To address the aforementioned problems, this invention provides a pulsed DC power generator to overcome the limitations of existing technologies. Therefore, the power generator of this invention is used for sputtering a substrate in a cavity, and includes a first voltage source, a second voltage source, a switching unit, a control unit, and a detection unit. The first voltage source generates a first voltage, and the second voltage source generates a second voltage with the opposite polarity to the first voltage. The switching unit is coupled between the first and second voltage sources. The control unit is coupled to the switching unit and provides a first control signal to control the switching unit to switch, causing the first and second voltages to generate a pulsed voltage at the output terminal. The detection unit is coupled to the output terminal and the control unit and detects the pulsed voltage at the output terminal. During the operation of the first voltage, if the fluctuation range of the first voltage exceeds a certain range, the control unit switches the pulsed voltage to the second voltage for a first predetermined period to extinguish the arc.

[0006] To address the aforementioned problems, this invention provides an automatic adjustment method for arc extinguishing parameters of a power generator, overcoming the limitations of existing technologies. Therefore, this automatic arc extinguishing parameter adjustment method is applicable to power generators used for sputtering substrates in cavities, and includes the following steps: providing a control signal to control the switching of the power generator's switching unit, thereby controlling the power generator to integrate a first voltage and a second voltage of opposite polarity into a pulse voltage; detecting the pulse voltage and determining that the voltage fluctuation of the first voltage exceeds a certain range during the operating period of the first voltage; and switching the pulse voltage to the second voltage for a first predetermined period to extinguish the arc.

[0007] The main objective and effect of this invention is that the power generator of this invention automatically adjusts its appropriate arc extinguishing parameters according to the cavity environment, and after the arc extinguishing period ends, the control unit provides a start-up period for the power generation circuit to start slowly, so that the current at the moment of recovery will not change drastically and cause excessive voltage to the output terminal, thereby resulting in excessively high surge voltage of the pulse voltage.

[0008] To gain a deeper understanding of the techniques, means, and effects employed by this invention to achieve its intended purpose, please refer to the following detailed description and accompanying drawings. It is believed that the purpose, features, and characteristics of this invention can be understood in a thorough and specific manner from these drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit this invention. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the waveform when an electric arc occurs in an existing power generator.

[0010] Figure 2 This is a circuit block diagram of the pulse DC power generator of the present invention;

[0011] Figure 3 This is a circuit block diagram of the power generation circuit of the present invention;

[0012] Figure 4A A waveform diagram of the first embodiment of the power generator soft-start control of the present invention;

[0013] Figure 4B A waveform diagram of a second embodiment of the power generator soft-start control of the present invention;

[0014] Figure 5A A waveform diagram illustrating the adjustment of arc extinguishing parameters during arc extinguishing in the power generator of the present invention in a first embodiment.

[0015] Figure 5B A waveform diagram illustrating the second embodiment of arc extinguishing parameter adjustment during arc extinguishing in the power generator of the present invention; and

[0016] Figure 6 This is a flowchart of the automatic adjustment method for arc extinguishing parameters of the power generator of the present invention.

[0017] Explanation of reference numerals in the attached figures

[0018] 100… power generator

[0019] 1…Power generation circuit

[0020] 1-1… Input terminal

[0021] 1-1A…First End

[0022] 1-1B…Second end

[0023] 1-2… Output terminals

[0024] 1-2A…Third end

[0025] 1-2B…Fourth end

[0026] L…Power Inductor

[0027] SW… Switching Unit

[0028] Vs1…First voltage source

[0029] Vs2…Second voltage source

[0030] 12… Buffer circuit

[0031] 14…Surge suppression circuit

[0032] 2…Control Unit

[0033] 3…Detection Unit

[0034] 200…cavity

[0035] 300… target material

[0036] 400…substrate

[0037] V1…First voltage

[0038] V2…Second voltage

[0039] Vp…pulse voltage

[0040] Vr…reverse voltage

[0041] PWM...Pulse Width Modulation Signal

[0042] Sc… control signal

[0043] Sc 1…First control signal

[0044] Sc 2…Second control signal

[0045] Ss…detection signal

[0046] t1~tz'…time

[0047] T… during work

[0048] T1, T1'... First Booking Period

[0049] T2…Second Booking Period

[0050] R…range

[0051] Np...Number of occurrences

[0052] N…times

[0053] (S100)~(S140)…Steps Detailed Implementation

[0054] The technical content and detailed description of the present invention are explained below with reference to the accompanying drawings:

[0055] Please see Figure 2 This is a circuit block diagram of the pulsed DC power generator of the present invention, which can be further referenced. Figure 1A power generator 100 provides a pulse voltage Vp to the cavity 200 to sputter atoms from the target material 300 in the cavity 200 onto the substrate 400. The power generator 100 includes a power generation circuit 1, a control unit 2, and a detection unit 3. The power generation circuit 1 provides the pulse voltage Vp to the cavity 200. The control unit 2 is coupled to the power generation circuit 1, and the detection unit 3 is coupled to the output of the power generation circuit 1 and the control unit 2. The detection unit 3 detects the pulse voltage Vp (i.e., the actual voltage of the cavity 200) at the output of the power generation circuit 1 and provides a detection signal Ss corresponding to the pulse voltage Vp to the control unit 2. The control unit 2 learns the status of the pulse voltage Vp through the detection signal Ss and controls the power generation circuit 1 accordingly to sputter the substrate 400 in the cavity 200. The control unit 2 also detects whether there is an electric arc on the surface of the target material 300 at the output end of the coupled power generation circuit 1 through the detection signal Ss, and automatically adjusts the parameters of the control power generation circuit 1 in response to this situation.

[0056] Please see Figure 3 This is a circuit block diagram of the power generation circuit of the present invention, which can be further referenced. Figure 2 The power generation circuit 1 includes a first voltage source Vs1, a second voltage source Vs2, an inductor L, and a switching unit SW. The power generation circuit 1 also includes an input terminal 1-1 coupled to the first voltage source Vs1 and an output terminal 1-2 providing a pulse voltage Vp. Input terminal 1-1 includes a first terminal 1-1A and a second terminal 1-1B, and output terminal 1-2 includes a third terminal 1-2A and a fourth terminal 1-2B. One end of the inductor L is coupled to the first terminal 1-1A, and the other end of the inductor L is coupled to one end of the switching unit SW and the third terminal 1-2A. One end of the second voltage source Vs2 is coupled to the other end of the switching unit SW, and the other end of the second voltage source Vs2 is coupled to the second terminal 1-1B and the fourth terminal 1-2B. Control unit 2 is coupled to the control terminal of the switching unit SW, and detection unit 3 is coupled to either the third terminal 1-2A or the fourth terminal 1-2B to detect the pulse voltage Vp.

[0057] Specifically, a first voltage source Vs1 generates a first voltage, and a second voltage source Vs2 generates a second voltage with the opposite polarity to the first voltage. The polarities of the first and second voltage sources Vs1 and Vs2 are merely illustrative and can be interchanged according to actual needs. The control unit 2 controls the switching of the switching unit SW by providing a control signal Sc (which can be a pulse width modulation signal PWM), thereby controlling the power generation circuit 1 to integrate the first and second voltages into a pulse voltage Vp. When the control unit 2 controls the switching unit SW to turn off (in this embodiment, a single switch is used as an example), the first voltage generated by the first voltage source Vs1 is transmitted to the output terminals 1-2, making the pulse voltage Vp the first voltage. When the control unit 2 controls the switching unit SW to turn on, the second voltage generated by the second voltage source Vs2 is transmitted to the output terminals 1-2 through the switching unit SW, making the pulse voltage Vp the second voltage. Therefore, the control unit 2 is mainly used to control the switching of the switching unit SW and integrate the first voltage and the second voltage into a pulse voltage Vp with positive and negative polarities, so as to provide the pulse voltage Vp to the cavity 200 through the third terminal 1-2A and the fourth terminal 1-2B.

[0058] In this embodiment, taking the polarity of the first voltage source Vs1 and the second voltage source Vs2 as an example, typically the first end 1-2A is coupled to the target material 300, and the second end 1-2B is coupled to the cavity shell (not shown). However, the actual coupling position depends on the actual target material 300 material and the sputtering method, and is not limited here. It is worth mentioning that in one embodiment of the present invention, the switching unit SW is not limited to... Figure 3 The diagram shows a single switch, which can be a switching circuit comprising multiple switches. The control unit 2 uses multiple control signals Sc to control the switching circuit to generate a pulse voltage Vp. Therefore, any power generation circuit 1 that can integrate a pulse voltage Vp with positive and negative polarities through power switching should be included within the scope of this embodiment. Furthermore, in another embodiment of the present invention, the control unit 2 can be implemented using, for example, but not limited to, a control circuit composed of analog circuits, or a controller containing a specific control program.

[0059] The power generation circuit 1 may further include a buffer circuit 12 and a surge suppression circuit 14. Specifically, one end of the surge suppression circuit 14 is coupled to the other end of the second voltage source Vs2, and the other end of the surge suppression circuit 14 is coupled to the fourth terminal 1-2B. One end of the buffer circuit 12 is coupled to the other end of the inductor L, and the other end of the buffer circuit 12 is coupled to the other end of the surge suppression circuit 14 and the fourth terminal 1-2B. The buffer circuit 12 is used to suppress positive surges from the power inductor L to the buffer circuit 12, and the surge suppression circuit 14 is used to suppress bidirectional surges from the buffer circuit 12 to the surge suppression circuit 14 and from the other end of the second voltage source Vs2 to the surge suppression circuit 14. The buffer circuit 12 and the surge suppression circuit 14 are mainly used in situations where higher surges may occur during the switching of the switching unit SW. When the surges generated by the power generation circuit 1 are low or there are no surges, the user may choose not to install the buffer circuit 12 and the surge suppression circuit 14, or may choose to install one of them according to actual needs.

[0060] Please see Figure 4A This is a waveform diagram of the first embodiment of the power generator soft-start control of the present invention, and can be further referenced. Figures 1-3 After the power generation circuit 1 is started (i.e., before time t1), the control unit 2 provides a first control signal Sc1 to control the switching unit SW to switch, so that the output terminal 1-2 generates a pulse voltage Vp with alternating first voltage V1 (provided by the first voltage source Vs1) and second voltage V2 (provided by the second voltage source Vs2). The arrow direction on the vertical axis of the pulse voltage Vp only indicates sputtering performed by the first voltage V1. The control unit 2 continuously monitors the status of the pulse voltage Vp at the output terminal 1-2 through the detection unit 3 to determine whether an electric arc is generated on the surface of the target material 300 coupled to the output terminal 1-2. The control unit 2 sets the pulse voltage Vp to be within a predetermined operating period T of the first voltage V1. When the control unit 2 detects through the detection signal Ss that the pulse voltage Vp is within the predetermined operating period T of the first voltage V1, and the voltage fluctuation of the first voltage V1 is higher than a predetermined range R (the range of voltage difference) (i.e., time t1), it indicates that an electric arc has been generated on the surface of the target material 300.

[0061] Then, after a short delay (time t2), control unit 2 turns on switching unit SW for a first predetermined period T1 (i.e., time t2 to t3) to provide a second voltage V2 for arc extinguishing. Therefore, the first predetermined period T1 can represent the arc extinguishing period of the arc extinguishing procedure for cavity 200. After the first predetermined period T1 ends (i.e., time t3), control unit 2 provides a second predetermined period T2 (i.e., time t3 to t4) for the power generation circuit 1 to start slowly, so that the current in inductor L does not change drastically at the moment of recovery, thus preventing excessive voltage to output terminal 1-2 and causing excessively high surges in pulse voltage Vp. Therefore, the second predetermined period T2 can represent the start-up period of the start-up procedure for cavity 200. To avoid excessively high spikes causing secondary arcing, control unit 2 provides a second control signal Sc2 during the second predetermined period T2 to control the switching of switching unit SW to perform the start-up procedure.

[0062] Specifically, the first control signal Sc1 includes a first switching frequency and a first duty cycle, and the second control signal Sc2 includes a second switching frequency and a second duty cycle. The control unit 2 controls the switching frequency or duty cycle of the second control signal Sc2 to be different from that of the first control signal Sc1 to achieve a soft start effect. In this embodiment, during the second predetermined period T2, the control unit 2 controls the second switching frequency to be higher than the first switching frequency, and the second duty cycle to be equal to the first duty cycle, so that the pulse voltage Vp increases in stages, avoiding the situation where the pulse voltage Vp surges too high due to the re-generation of an electric arc. Finally, after the start-up is completed (time t4), the control unit 2 switches the pulse width modulation signal PWM from the second control signal Sc2 back to the first control signal Sc1, so that the power generation circuit 1 can continue the sputtering operation.

[0063] Please see Figure 4B This is a waveform diagram of the second embodiment of the power generator soft-start control of the present invention, which can be further referenced. Figures 1 to 4A . Figure 4B Implementation examples and Figure 4A The difference lies in the slightly different control method of control unit 2 during the second predetermined period T2. During the second predetermined period T2, control unit 2 controls the second switching frequency to be the same as the first switching frequency, and the second duty cycle gradually increases from less than the first duty cycle to equal to the first duty cycle. It is worth mentioning that, in one embodiment of the present invention, the reason why control unit 2 controls the power generation circuit 1 to start slowly is to avoid the situation where the power generation circuit 1 generates an excessively high surge due to the pulse voltage Vp, which could lead to a secondary arc. Therefore, the number of pulses, frequency, and duty cycle generated by the second control signal Sc2 are not limited. Any control method that can suppress surges should be included in the scope of this embodiment. Furthermore, Figure 4B The second scheduled period T2 and Figure 4AThe second predetermined period T2 is not limited in length; it can be adjusted automatically according to the requirements of the slow-start control method. Furthermore, although... Figure 4A and Figure 4B One embodiment changes only the "frequency" and the other changes only the "duty cycle." However, the present invention is not limited to changing only one of the parameters or only these two parameters. That is, those skilled in the art can change at least one parameter in accordance with the essence of the present invention, and the types of parameters are not limited to "frequency" and "duty cycle."

[0064] Please see Figure 5A This is a waveform diagram of the first embodiment of the arc extinguishing parameter adjustment during the arc extinguishing period of the power generator of the present invention, with reference to the following: Figures 2 to 4B Because under certain conditions, the energy of an electric arc cannot be completely dissipated, resulting in the recurrence of arcs after extinguishing. This phenomenon may indicate that the current arc extinguishing parameters are insufficient for effective and rapid arc extinguishing. Therefore, this invention additionally provides an arc extinguishing parameter adjustment mechanism for a first predetermined period T1. Specifically, the control unit 2 is used to set a predetermined density, which is the number of arc occurrences Np per unit time. When the control unit 2 determines, based on the detection signal Ss and counts within a unit time, that the pulse voltage Vp is within the operating period T of the first voltage V1, and the number N of times the voltage value of the first voltage V1 fluctuates above the range R is higher than the number of occurrences Np, the control unit 2 adjusts the parameters of the first predetermined period T1 to provide an effective and rapid arc extinguishing effect.

[0065] For example, the predetermined density can be a variable or fixed parameter. For instance, but not limited to, it can be calculated a fixed number of times within a fixed time period. If the actual number of arc occurrences within this fixed time period exceeds the predetermined number, then the number of occurrences N is determined to be higher than the number of occurrences Np. Alternatively, a specific number of times can be calculated within a fixed time period. For example, multiple conditions such as 2 occurrences within 3 milliseconds or 3 occurrences within 5 milliseconds can be combined into a single predetermined density. If this condition is met, then the number of occurrences N is determined to be higher than the number of occurrences Np.

[0066] In this embodiment, the time length is taken as an example of the arc extinguishing parameter. The control unit 2 increases the time length of the first predetermined period T1 according to the number of occurrences N being higher than the number of occurrences Np. Figure 5AAs shown, an electric arc occurs several times within time intervals tx to ty. The control unit 2 determines, based on the detection signal Ss, that the pulse voltage Vp is within the operating period T of the first voltage V1. The number of times the voltage value of the first voltage V1 fluctuates above the range R, N, is higher than the number of occurrences, Np. Therefore, the control unit 2 adjusts the length of the first predetermined period T1 to provide an effective and rapid arc extinguishing effect. That is, the original first predetermined period T1 is ty to tz, but because the control unit 2 determines that the number of times the voltage value of the first voltage V1 fluctuates above the range R, N, is higher than the number of occurrences, the control unit 2 adjusts the arc extinguishing parameters, extending the end time of the first predetermined period T1 to tz', i.e., extending the length of the first predetermined period T1 to T1'. This provides an effective and rapid arc extinguishing effect.

[0067] Please see Figure 5B This is a waveform diagram of the second embodiment of the arc extinguishing parameter adjustment during the arc extinguishing period of the power generator of the present invention, which can be further referred to in conjunction with the diagram. Figures 2 to 5A This embodiment is similar to... Figure 5A The difference in this embodiment lies in the fact that the arc-extinguishing parameter is voltage Vr. Control unit 2 adds an extra voltage Vr based on the fact that the number of times N exceeds the number of occurrences Np. For arc phenomena occurring several times during time periods tx to ty, control unit 2 determines that the number of times N the voltage value fluctuation of the first voltage V1 exceeds the range Rt is higher than the number of occurrences Nh. Therefore, control unit 2 adds an extra voltage Vr to the second voltage V2 to provide an effective and rapid arc-extinguishing effect. That is, the original pulse voltage Vp during the first predetermined period T1 is the second voltage V2, but because control unit 2 determines that the number of times N the voltage value fluctuation of the first voltage V1 exceeds the range Rt is higher than the number of occurrences Np, control unit 2 adds an extra voltage Vr to the second voltage V2, making the second voltage V2 V2 plus voltage Vr become V2'. This provides an effective and rapid arc-extinguishing effect.

[0068] Please see Figure 6 This is a flowchart of the automatic adjustment method for arc extinguishing parameters of the power generator of the present invention, which can be referred to in conjunction with the above. Figures 2 to 5B The automatic arc extinguishing parameter adjustment method is applicable to the power generator 100 that sputters the substrate 400 of the cavity 200. The method includes providing a first control signal to control the switching of the power generator's switching unit, thereby controlling the power generator to integrate a first voltage and a second voltage of opposite polarity into a pulse voltage (S100). The control unit 2 is mainly used to provide a control signal Sc to control the switching of the switching unit SW, integrating the first voltage V1 generated by the first voltage source Vs1 and the second voltage V2 generated by the second voltage source Vs2 of opposite polarity into a pulse voltage Vp with opposite polarity. When no arc occurs in the cavity 200, the control signal Sc of the control unit 2 is the first control signal Sc1.

[0069] Then, the pulse voltage is detected, and it is determined that the pulse voltage is controlled to the second voltage for arc extinguishing (S120). The arc generation status, judgment criteria, and control method have been described in detail above and will not be repeated here. The control unit 2 learns the status of the pulse voltage Vp through the detection signal Ss provided by the detection unit 3, and determines that when an arc is generated, the control unit 2 turns on the switching unit SW for a first predetermined period T1 (i.e., Figures 4A-4B During the time interval t2 to t3, a second voltage V2 is provided to extinguish the arc.

[0070] Finally, during the second predetermined period after the arc extinguishing ends, a second control signal is provided to control the switching unit switching (S140). After the first predetermined period T1 ends, the control unit 2 provides a second predetermined period T2 for the power generation circuit 1 to start slowly, so that the current in the inductor L does not change drastically during the recovery instant, thus preventing excessive voltage from reaching the output terminal 1-2 and causing an excessively high surge in the pulse voltage Vp. Therefore, the control signal Sc provided by the control unit 2 during the second predetermined period T2 is the second control signal Sc2, which controls the switching of the switching unit SW. The switching frequency or duty cycle of the second control signal Sc2 is different from that of the first control signal Sc1; for details, please refer to [link to relevant documentation]. Figure 4A and Figure 4B This will not be elaborated further here. It is worth mentioning that, in one embodiment of the present invention, Figure 6 The illustrated process may include more detailed control methods, the details of which can be found in the accompanying documentation. Figures 3 to 5B This will not be described further here. Furthermore, in another embodiment of the invention, Figure 6 The described components are not limited to those that can only be made by Figures 2-3 The circuit implementation, including any circuit with the same function, controllers containing programs, etc., should be included in the scope of this embodiment.

[0071] In summary, the main or secondary effects achieved by the various embodiments of the present invention are as follows:

[0072] 1. It can automatically adjust its appropriate arc extinguishing parameters according to the cavity environment, so as to effectively and quickly reduce the arc, especially suitable for sputtering operations of targets or oxides that are prone to arcing.

[0073] 2. A slow start is adopted after the arc extinguishing period to avoid the risk of an increased probability of secondary arcing due to excessively high recovery voltage.

[0074] However, the above description is only a detailed description and accompanying drawings of preferred embodiments of the present invention. The features of the present invention are not limited thereto and are not intended to limit the present invention. The full scope of the present invention should be determined by the following claims. All embodiments that conform to the spirit of the claims of the present invention and similar variations thereof should be included in the scope of the present invention. Any variations or modifications that can be easily conceived by those skilled in the art within the field of the present invention can be covered by the following claims.

Claims

1. A pulsed DC power generator for sputtering a substrate of a cavity, the power generator comprising: The first voltage source is used to generate the first voltage; A second voltage source is used to generate a second voltage with the opposite polarity to the first voltage; A switching unit is coupled between the first voltage source and the second voltage source; A control unit, coupled to the switching unit, is used to provide a first control signal to control the switching unit to switch, so that the first voltage and the second voltage generate a pulse voltage at the output terminal; and A detection unit is coupled to the output terminal and the control unit, and is used to detect the pulse voltage of the output terminal; Wherein, during the operation period of the first voltage, when the voltage value of the first voltage fluctuates above a certain range, the control unit switches the pulse voltage to the second voltage for a first predetermined period.

2. The power generator according to claim 1, wherein during a second predetermined period following the first predetermined period, a second control signal is provided to control the switching of the switching unit, and the switching frequency or duty cycle of the second control signal is different from that of the first control signal.

3. The power generator according to claim 2, wherein the first control signal includes a first switching frequency and a first duty cycle, and the second control signal includes a second switching frequency and a second duty cycle; during the second predetermined period, the control unit controls the second switching frequency to be the same as the first switching frequency, and controls the second duty cycle to be from less than the first duty cycle to equal to the first duty cycle.

4. The power generator according to claim 2, wherein the first control signal includes a first switching frequency and a first duty cycle, and the second control signal includes a second switching frequency and a second duty cycle; during the second predetermined period, the control unit controls the second switching frequency to be higher than the first switching frequency, and controls the second duty cycle to be equal to the first duty cycle.

5. The power generator according to claim 1, wherein the control unit is configured to set the number of occurrences per unit time; the control unit determines that the number of times the pulse voltage changes above the range within the unit time is higher than the number of occurrences, and adjusts the parameters of the first predetermined period accordingly.

6. The power generator according to claim 5, wherein the parameter is a time length, and the control unit increases the time length of the first predetermined period according to the number of occurrences being higher than the number of occurrences.

7. The power generator according to claim 5, wherein the parameter is voltage, and the control unit additionally adds the voltage to the second voltage based on the number of occurrences being higher than the number of occurrences.

8. The power generator according to claim 2, wherein the control unit recalls the second control signal back to the first control signal upon the end of the second predetermined period.

9. An automatic adjustment method for arc extinguishing parameters of a power generator, applicable to a power generator for sputtering a substrate of a cavity, wherein the automatic adjustment method for arc extinguishing parameters includes the following steps: A first control signal is provided to control the switching of the switching unit of the power generator, so as to control the power generator to integrate the first voltage and the second voltage with opposite polarities into a pulse voltage; The pulse voltage is detected, and it is determined that the pulse voltage is within the operating period of the first voltage, and the voltage value of the first voltage fluctuates above the range. and The pulse voltage is switched to the second voltage for a first predetermined period to extinguish the arc.

10. The automatic parameter adjustment method according to claim 9 further includes the following steps: During a second predetermined period after the first predetermined period ends, a second control signal is provided to control the switching unit to switch. wherein, The switching frequency or duty cycle of the second control signal is different from that of the first control signal.

11. The automatic parameter adjustment method according to claim 10 further includes the following steps: The second switching frequency of the second control signal is the same as the first switching frequency of the first control signal; and The second duty cycle of the second control signal is increased from being less than the first duty cycle of the first control signal to being equal to the first duty cycle.

12. The automatic parameter adjustment method according to claim 10 further includes the following steps: The second switching frequency of the second control signal is higher than the first switching frequency of the first control signal; and The second duty cycle of the second control signal is equal to the first duty cycle of the first control signal.

13. The automatic parameter adjustment method according to claim 9 further includes the following steps: A predetermined density is set, whereby the predetermined density is the number of occurrences per unit time. It is determined that, within the unit time period, the number of times the pulse voltage fluctuation amplitude exceeds the range is higher than the predetermined density; and Adjust the parameters for the first predetermined period.

14. The automatic parameter adjustment method according to claim 13, wherein the parameter is a time length, and further comprises the following steps: Determine that the number of occurrences is higher than the number of occurrences; and Increase the length of the first predetermined period.

15. The automatic parameter adjustment method according to claim 13, wherein the parameter is voltage, and further comprises the following steps: Determine that the number of occurrences is higher than the number of occurrences; and The voltage is additionally superimposed on the second voltage.

16. The automatic parameter adjustment method according to claim 10 further includes the following steps: Determine the end of the second predetermined period; and The second control signal is switched back to the first control signal.

Images