A pulse voltage generating circuit and a plasma power supply

Abstract

This application discloses a pulse voltage generating circuit and a plasma power supply, relating to the field of pulse voltage technology. The circuit includes a preprocessing module, a resonant module, and a first switching device. The preprocessing module processes the first AC voltage signal from the AC power supply to output a DC voltage signal. The first switching device periodically turns the circuit on and off. A first capacitor in the resonant module receives the DC voltage signal and charges when the first switching device is on, and discharges when the first switching device is off. Since the first capacitor generates a first pulse voltage signal through periodic charging and discharging, a pulse voltage signal is generated. Furthermore, in related technologies, half-bridge or full-bridge conversion circuits include multiple switching devices. Compared to half-bridge or full-bridge conversion circuits, the first switching device, as a single switching device, occupies less space, reducing the circuit board size and facilitating miniaturized circuit board design.

Description

Technical Field

[0001] This application belongs to the field of pulse voltage technology, specifically relating to a pulse voltage generating circuit and a plasma power supply. Background Technology

[0002] Plasma has a wide range of applications, such as plasma thrusters, plasma diagnostics and measurement, and the formation of plasma requires a pulse voltage.

[0003] In related technologies, a pulse voltage signal is generated by combining a resonant circuit with a half-bridge or full-bridge conversion circuit. However, the half-bridge or full-bridge conversion circuit occupies a large space, which is not conducive to the miniaturization design of the printed circuit board (PCB). Utility Model Content

[0004] This application provides a pulse voltage generating circuit and a plasma power supply, which at least solves the problem in related technologies that pulse voltage signals are generated by cooperating with a resonant circuit and a half-bridge or full-bridge conversion circuit, but the half-bridge or full-bridge conversion circuit occupies a large space, which is not conducive to the miniaturization design of the circuit board.

[0005] To solve the above-mentioned technical problems, this application is implemented as follows:

[0006] In a first aspect, this application provides a pulse voltage generation circuit, including: a preprocessing module, a resonant module, and a first switching device;

[0007] The preprocessing module is electrically connected to the resonant module, the first switching device and the external AC power supply respectively. The preprocessing module is used to process the first AC voltage signal of the AC power supply to output a DC voltage signal.

[0008] The first switching device is used for periodically turning on and off;

[0009] The resonant module includes a first capacitor connected in series with the first switching device. The first capacitor is used to receive the DC voltage signal and charge when the first switching device is turned on, and to stop receiving the DC voltage signal and discharge when the first switching device is turned off. The first capacitor generates a first pulse voltage signal and outputs it through periodic charging and discharging.

[0010] Optionally, the resonant module further includes a first inductor; a first end of the first inductor is electrically connected to a first end of the preprocessing module, and a second end of the first inductor is electrically connected to a first end of the first capacitor; a second end of the first capacitor is electrically connected to a first end of the first switching device; and a second end of the first switching device is electrically connected to a second end of the preprocessing module; wherein the first pulse voltage signal is output through the first end and the second end of the first capacitor.

[0011] Optionally, the control terminal of the first switching device is electrically connected to the first terminal of an external control module; the control module is used to control the periodic switching of the first switching device.

[0012] Optionally, the preprocessing module includes a filtering transformer submodule and a rectifier filter submodule; the filtering transformer submodule is electrically connected to the rectifier filter submodule and the AC power supply respectively, and the filtering transformer submodule is used to filter and transform the first AC voltage signal to output a second AC voltage signal; the rectifier filter submodule is electrically connected to the resonant module and the first switching device respectively, and the rectifier filter submodule is used to rectify and filter the second AC voltage signal to output the DC voltage signal.

[0013] Optionally, the filtering transformer submodule includes a first filter and a first transformer; the first filter is electrically connected to the primary winding of the first transformer and the AC power supply respectively; the secondary winding of the first transformer is electrically connected to the rectifier filtering submodule.

[0014] Optionally, the rectifier-filter submodule includes a rectifier unit, a second capacitor, a second inductor, a second switching device, and a second filter; the first end of the rectifier unit is electrically connected to the first end of the filter transformer submodule, the second end of the rectifier unit is electrically connected to the second end of the filter transformer submodule, the third end of the rectifier unit is electrically connected to the first end of the second inductor and the first end of the second capacitor, and the fourth end of the rectifier unit is electrically connected to the second end of the second filter and the second end of the second capacitor, respectively; the second end of the second inductor is electrically connected to the first end of the second switching device; the second end of the second switching device is electrically connected to the first end of the second filter; the third end of the second filter is electrically connected to the first end of the resonant module, and the fourth end of the second filter is electrically connected to the second end of the first switching device 30.

[0015] Optionally, the rectifier unit includes a first diode, a second diode, a third diode, and a fourth diode; the anode of the first diode is electrically connected to the cathode of the second diode and a first terminal of the filter transformer module, and the cathode of the first diode is electrically connected to the cathode of the third diode, a first terminal of the second inductor, and a first terminal of the second capacitor; the cathode of the second diode is electrically connected to the first terminal of the filter transformer module, and the anode of the second diode is electrically connected to the anode of the fourth diode and a second terminal of the second capacitor; the anode of the third diode is electrically connected to the cathode of the fourth diode and a second terminal of the filter transformer module, and the cathode of the third diode is electrically connected to the first terminal of the second inductor and a first terminal of the second capacitor; the anode of the fourth diode is electrically connected to the second terminal of the second capacitor, and the cathode of the fourth diode is electrically connected to the second terminal of the filter transformer module.

[0016] Optionally, the rectifier-filter submodule further includes a third switching device and a first resistor; the first terminal of the third switching device is electrically connected to the second inductor, and the second terminal of the third switching device is electrically connected to the first terminal of the first resistor; the second terminal of the first resistor is electrically connected to the first terminal of the second filter.

[0017] Optionally, the control terminal of the second switching device K is electrically connected to the eighth terminal of an external control module; the control terminal of the third switching device K is electrically connected to the ninth terminal of the control module; the control module is used to control the third switching device K to be turned on and the second switching device K to be turned off when the pulse voltage generating circuit is powered on, and to control the third switching device K to be turned off and the second switching device K to be turned on after a preset time.

[0018] Optionally, the pulse voltage generating circuit further includes an output module; the output module is electrically connected to the resonant module, and the output module is used to convert the first pulse voltage signal into a voltage, output a second pulse voltage signal, and use the second pulse voltage signal to perform dielectric barrier discharge.

[0019] Optionally, the output module includes a second transformer and a dielectric barrier discharge module; the primary winding of the second transformer is electrically connected to the resonant module, and the secondary winding of the second transformer is electrically connected to the dielectric barrier discharge module; the second transformer is used to convert the first pulse voltage signal into a voltage and output the second pulse voltage signal; the dielectric barrier discharge module is used to perform dielectric barrier discharge using the second pulse voltage signal.

[0020] Secondly, this application also provides a plasma power supply, including a pulse voltage generating circuit as described in the first aspect.

[0021] In this embodiment, the first AC voltage signal of the AC power supply is processed by the preprocessing module to output a DC voltage signal. Then, the first switching device is periodically turned on and off, and the first capacitor in the resonant module receives the DC voltage signal and is charged when the first switching device is turned on, and stops receiving the DC voltage signal and is discharged when the first switching device is turned off. Since the first capacitor generates a first pulse voltage signal and outputs it through periodic charging and discharging, the pulse voltage signal is generated. In addition, since the half-bridge or full-bridge conversion circuit in the related technology includes multiple switching devices, the first switching device occupies less space as a single switching device compared with the half-bridge or full-bridge conversion circuit, which can reduce the size of the circuit board and is conducive to the miniaturization design of the circuit board. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments of this application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of a pulse voltage generation circuit provided in an embodiment of this application;

[0024] Figure 2 This is a schematic diagram of another pulse voltage generating circuit provided in an embodiment of this application;

[0025] Figure 3 This is a schematic diagram of the specific structure of a pulse voltage generation circuit provided in an embodiment of this application;

[0026] Figure 4 A schematic diagram of another pulse voltage generating circuit provided in this application embodiment;

[0027] Figure 5 This is a schematic diagram of the current curve and voltage curve provided in the embodiments of this application.

[0028] Figure label:

[0029] 10-Preprocessing module; 101-First terminal of preprocessing module; 102-Second terminal of preprocessing module; 11-Filtering transformer sub-module; 111-First filter; 112-First transformer; 12-Rectifying and filtering sub-module; 121-Rectifying unit; 122-Second filter; 123-Current detection unit; 124-Capacitor filtering unit; 125-First resistor unit; 126-Second resistor unit; 127-Third resistor unit; 128-Fourth resistor unit; 20-Resonant module; 30-First switching device; 40-Control module; 50-AC power supply; 60-Output module; 61-Second transformer; 62-Dielectric barrier discharge module; 63-Root mean square value Converter; L1 - First inductor; L2 - Second inductor; C1 - First capacitor; C2 - Second capacitor; C3 - Third capacitor; C4 - Fourth capacitor; K1 - Second switching device; K2 - Third switching device; D1 - First diode; D2 - Second diode; D3 - Third diode; D4 - Fourth diode; R1 - First resistor; R2 - Second resistor; R3 - Third resistor; R4 - Fourth resistor; R5 - Fifth resistor; F1 - Fuse; F2 - Varistor; F3 - First thermistor; F4 - Second thermistor; A1 - Current acquisition device; A2 - Current amplification device; P1 - First operational amplifier; P2 - Second operational amplifier; P3 - Third operational amplifier. Detailed Implementation

[0030] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] Reference Figure 1 This application provides a pulse voltage generation circuit, including: a preprocessing module 10, a resonant module 20, and a first switching device 30; the preprocessing module 10 is electrically connected to the resonant module 20, the first switching device 30, and an external AC power supply 50, respectively. The preprocessing module 10 is used to process the first AC voltage signal from the AC power supply 50 to output a DC voltage signal; the first switching device 30 is used to periodically turn on and off; the resonant module 20 includes a first capacitor C1, which is connected in series with the first switching device 30. The first capacitor C1 is used to receive the DC voltage signal and charge when the first switching device 30 is on, and to stop receiving the DC voltage signal and discharge when the first switching device 30 is off. The first capacitor C1 generates and outputs a first pulse voltage signal through periodic charging and discharging.

[0032] In some embodiments, the first switching device 30 may be a silicon carbide switching transistor, such as a silicon carbide metal-oxide-semiconductor field-effect transistor (SiC MOSFET).

[0033] In some embodiments, the preprocessing module 10 performs multiple filtering, transformation and rectification processes on the first AC voltage signal of the AC power supply 50 to output a DC voltage signal.

[0034] In some embodiments, the preprocessing module 10 sequentially performs first filtering, transformation, rectification, second filtering, third filtering and fourth filtering on the first AC voltage signal to output a DC voltage signal.

[0035] In related technologies, a half-bridge conversion circuit includes two switching devices, a full-bridge conversion circuit includes four switching devices, and a resonant circuit includes a capacitor. The capacitor in the resonant circuit is connected in parallel with the switching devices in the full-bridge conversion circuit or the half-bridge conversion circuit. Through the cooperation of the capacitor and multiple switching devices, a pulse voltage signal is generated.

[0036] In this embodiment, the first capacitor C1 is connected in series with the first switching device 30. The first capacitor C1 and the first switching device 30 work together to generate a pulse voltage signal. Compared with the space occupied by multiple switching devices in related technologies, the first switching device 30 occupies less space as a single switching device, which can reduce the size of the circuit board and is beneficial to the miniaturization design of the circuit board.

[0037] In this embodiment, the first AC voltage signal of the AC power supply 50 is processed by the preprocessing module to output a DC voltage signal. Then, the first switching device 30 is periodically turned on and off, and the first capacitor C1 in the resonant module 20 receives the DC voltage signal and is charged when the first switching device 30 is turned on, and stops receiving the DC voltage signal and is discharged when the first switching device 30 is turned off. Since the first capacitor generates a first pulse voltage signal and outputs it through periodic charging and discharging, the pulse voltage signal is generated. In addition, since the half-bridge or full-bridge conversion circuit in the related technology includes multiple switching devices, the first switching device 30 occupies less space as a single switching device compared with the half-bridge or full-bridge conversion circuit, which can reduce the size of the circuit board and is conducive to the miniaturization design of the circuit board.

[0038] Optional, refer to Figure 4In some embodiments, the resonant module 20 includes a first inductor L1 and a first capacitor C1; a first end of the first inductor L1 is electrically connected to a first end 101 of the preprocessing module 10, and a second end of the first inductor L1 is electrically connected to a first end of the first capacitor C1; a second end of the first capacitor C1 is electrically connected to a first end of the first switching device 30; a second end of the first switching device 30 is electrically connected to a second end 102 of the preprocessing module 10, and a control end of the first switching device 30 is electrically connected to a first end of an external control module 40; wherein, the first pulse voltage signal is output through the first end and the second end of the first capacitor C1.

[0039] In some embodiments, the preprocessing module 10 is also electrically connected to an external control module 40, and the first switching device 30 is also electrically connected to the control module 40; wherein, the control module 40 is used to control the preprocessing module 10 to process the first AC voltage signal of the AC power supply 50 to output a DC voltage signal, and the control module 40 is used to control the first switching device 30 to periodically turn on and off.

[0040] It should be noted that the control module 40 is used to input a pulse width modulation (PWM) signal to the first switching device 30 to control the first switching device 30 to turn on and off.

[0041] In some embodiments, the control module 40 may be a microcontroller unit (MCU), a single-chip microcomputer, or other types of chips.

[0042] In some embodiments, the first switching device 30 is provided with a parasitic diode. The positive terminal of the parasitic diode is electrically connected to the second terminal of the first switching device 30 and the second terminal 102 of the preprocessing module 10, respectively, and the negative terminal of the parasitic diode is electrically connected to the first terminal of the first switching device 30 and the second terminal of the first capacitor C1, respectively.

[0043] In some embodiments, the first switching device 30 can be an NMOS transistor, i.e., a negative channel metal-oxide-semiconductor. The first terminal of the first switching device 30 is the drain of the NMOS transistor, the second terminal of the first switching device 30 is the source of the NMOS transistor, and the control terminal of the first switching device 30 is the gate of the NMOS transistor.

[0044] In this embodiment of the application, the DC voltage signal is converted into a first pulse voltage signal and output by the cooperation of the first inductor L1, the first capacitor C1 and the first switching device 30.

[0045] Optional, refer to Figure 3 In some embodiments, the preprocessing module 10 includes a filtering transformer submodule 11 and a rectifier filter submodule 12; the filtering transformer submodule 11 is electrically connected to the rectifier filter submodule 12 and the AC power supply 50, respectively, and is used to filter and transform the first AC voltage signal to output a second AC voltage signal; the rectifier filter submodule 12 is electrically connected to the resonant module 20 and the first switching device 30, respectively, and is used to rectify and filter the second AC voltage signal to output the DC voltage signal.

[0046] In some embodiments, the effective value of the first AC voltage signal is 220 volts; the effective value of the second AC voltage signal is 110 volts; and the voltage value of the DC voltage signal is 150 volts.

[0047] In this embodiment, the first AC voltage signal is filtered and voltage-converted by the filter transformer submodule 11 to output a second AC voltage signal. Then, the second AC voltage signal is rectified and filtered by the rectifier filter submodule 12 to output a DC voltage signal, which is then used by the resonant module 20 and the first switching device 30 to convert the DC voltage signal into a first pulse voltage signal and output it.

[0048] Optionally, in some embodiments, the filter transformer submodule 11 includes a first filter 111 and a first transformer 112; the first filter 111 is electrically connected to the primary winding of the first transformer 112 and the AC power supply 50 respectively; the secondary winding of the first transformer 112 is electrically connected to the rectifier filter submodule 12.

[0049] Specifically, in some embodiments, the third terminal of the first filter 111 is electrically connected to the first terminal of the primary winding of the transformer, the fourth terminal of the first filter 111 is electrically connected to the second terminal of the primary winding of the transformer, the first terminal of the first filter 111 is electrically connected to the live wire terminal of the AC power supply 50, and the second terminal of the first filter 111 is electrically connected to the neutral wire terminal of the AC power supply 50; the first terminal of the secondary winding of the first transformer 112 is electrically connected to the first terminal of the rectifier filter submodule 12, and the second terminal of the secondary winding of the first transformer 112 is electrically connected to the second terminal of the rectifier filter submodule 12.

[0050] In some embodiments, the filtered AC voltage signal is stepped down by the first transformer 112 to output a second AC voltage signal.

[0051] In this embodiment, the first AC voltage signal is filtered by the first filter 111 to obtain the filtered AC voltage signal, and then the filtered AC voltage signal is transformed by the first transformer 112 to output the second AC voltage signal.

[0052] Optionally, in some embodiments, the filter transformer module 11 further includes a fuse F1 and a varistor F2. The first end of the fuse F1 is electrically connected to the live wire of the AC power supply 50, the second end of the fuse F1 is electrically connected to the first end of the varistor F2 and the first end of the first filter 111, and the second end of the varistor F2 is electrically connected to the neutral wire of the AC power supply 50.

[0053] In this embodiment, fuse F1 is used to provide overcurrent protection for the pulse voltage generating circuit, that is, when an overcurrent occurs in the pulse voltage generating circuit, fuse F1 blows; varistor F2 is used to provide overvoltage protection for the pulse voltage generating circuit, that is, when an overvoltage occurs in the pulse voltage generating circuit, the resistance of varistor F2 decreases, the AC power supply 50 is short-circuited, and fuse F1 blows.

[0054] Optionally, in some embodiments, the rectifier-filter submodule 12 includes a rectifier unit 121, a second capacitor C2, a second inductor L2, a second switching device K1, and a second filter 122; the first terminal of the rectifier unit 121 is electrically connected to the first terminal of the filter transformer submodule 11, the second terminal of the rectifier unit 121 is electrically connected to the second terminal of the filter transformer submodule 11, the third terminal of the rectifier unit 121 is electrically connected to the first terminals of the second inductor L2 and the second capacitor C2, respectively, and the fourth terminal of the rectifier unit 121 is electrically connected to the second terminal of the second filter 122, respectively. The second terminal of the second capacitor C2 is electrically connected to the second terminal of the second inductor L2; the second terminal of the second switching device K1 is electrically connected to the first terminal of the second filter 122; the third terminal of the second filter 122 is electrically connected to the first terminal of the resonant module 20; the fourth terminal of the second filter 122 is electrically connected to the second terminal of the first switching device 30; the second terminal of the resonant module 20 is electrically connected to the first terminal of the first switching device 30; and the control terminal of the first switching device 30 is electrically connected to the first terminal of the control module 40.

[0055] It should be noted that the control module 40 is used to control the on and off of the second switching device K1. When the second switching device K1 is on, the pulse voltage generating circuit starts to work; when the second switching device K1 is off, the pulse voltage generating circuit stops working.

[0056] In some embodiments, the second switching device K1 can be a relay, the control terminal of the second switching device K1 is the positive terminal of the relay, and the ground terminal (i.e. the negative terminal of the relay) of the second switching device K1 is grounded; the first terminal of the second switching device K1 is the common terminal of the relay, and the second terminal of the second switching device K1 is the normally open terminal of the relay.

[0057] In this embodiment, the rectifier unit 121 is used to rectify the second AC voltage signal and output the DC voltage signal before filtering; the second capacitor C2 and the second inductor L2 cooperate to form an inductor-capacitor (LC) filter; the inductor-capacitor (LC) filter and the second filter 122 are both used to filter the DC voltage signal before filtering and output the DC voltage signal; the second switching device K1 is used to control the pulse voltage generation circuit to start or stop working.

[0058] Optionally, in some embodiments, the rectifier-filter submodule 12 includes a rectifier unit 121, a second capacitor C2, a second inductor L2, a second switching device K1, a second filter 122, a current detection unit 123, and a capacitor filter unit 124; the first terminal of the rectifier unit 121 is electrically connected to the first terminal of the filter transformer submodule 11, the second terminal of the rectifier unit 121 is electrically connected to the second terminal of the filter transformer submodule 11, the third terminal of the rectifier unit 121 is electrically connected to the first terminal of the second inductor L2 and the first terminal of the second capacitor C2, and the fourth terminal of the rectifier unit 121 is electrically connected to the first terminal of the current detection unit 123 and the second terminal of the second capacitor C2; the second terminal of the second inductor L2 is connected to the second switching device K1. The first terminal is electrically connected; the second terminal of the second switching device K1 is electrically connected to the first terminal of the second filter 122; the second terminal of the second filter 122 is electrically connected to the second terminal of the current detection unit 123; the third terminal of the second filter 122 is electrically connected to the first terminal of the capacitor filter unit 124 and the first terminal of the resonant module 20, respectively; the fourth terminal of the second filter 122 is electrically connected to the second terminal of the capacitor filter unit 124 and the second terminal of the first switching device 30, respectively; the output terminal of the current detection unit 123 is electrically connected to the second terminal of the control module 40; the second terminal of the resonant module 20 is electrically connected to the first terminal of the first switching device 30; the control terminal of the first switching device 30 is electrically connected to the first terminal of the control module 40.

[0059] In some embodiments, the current detection unit 123 includes a current acquisition device A1 and a current amplification device A2; the first end of the current acquisition device A1 is electrically connected to the fourth end of the rectifier unit 121, the second end of the current acquisition device A1 is electrically connected to the second end of the second filter 122, the output end of the current acquisition device A1 is electrically connected to the input end of the current amplification device A2, and the output end of the current amplification device A2 is electrically connected to the second end of the control module 40.

[0060] In some embodiments, the current acquisition device A1 can be a Hall effect current sensor, and the current amplification device A2 can be an operational amplifier.

[0061] In some embodiments, the capacitor filter unit 124 includes a third capacitor C3 and a fourth capacitor C4, wherein the third capacitor C3 is a high-frequency filter capacitor and the fourth capacitor C4 is a low-frequency filter capacitor; the first terminal of the third capacitor C3 is electrically connected to the third terminal of the second filter 122, and the second terminal of the third capacitor C3 is electrically connected to the fourth terminal of the second filter 122; the first terminal of the fourth capacitor C4 is electrically connected to the third terminal of the second filter 122, and the second terminal of the fourth capacitor C4 is electrically connected to the fourth terminal of the second filter 122.

[0062] In this embodiment, the rectifier unit 121 is used to rectify the second AC voltage signal and output the DC voltage signal before filtering; the second capacitor C2 and the second inductor L2 cooperate to form an inductor-capacitor (LC) filter; the inductor-capacitor (LC) filter, the second filter 122 and the capacitor filter unit 124 are all used to filter the DC voltage signal before filtering and output the DC voltage signal; the second switching device K1 is used to control the pulse voltage generation circuit to start or stop working; the current detection unit 123 is used to collect the current of the pulse voltage generation circuit, and the control module 40 is also used to acquire the current of the pulse voltage generation circuit and, in the event of an abnormal current, control the second switching device K1 to disconnect.

[0063] Optionally, in some embodiments, the rectifier-filter submodule 12 further includes a first resistor R1 unit 125, a second resistor R2 unit 126, a third resistor R3 unit 127, a fourth resistor R4 unit 128, a first operational amplifier P1, and a second operational amplifier P2; the first terminal of the first resistor R1 unit 125 is electrically connected to the fourth terminal of the rectifier unit 121, and the second terminal of the first resistor R1 unit 125 is electrically connected to the non-inverting input terminal of the first operational amplifier P1; the first terminal of the second resistor R2 unit 126 is electrically connected to the second terminal of the second inductor L2, and the second terminal of the second resistor R2 unit 126 is electrically connected to the first... The inverting input terminal of operational amplifier P1 is electrically connected; the output terminal of the first operational amplifier P1 is electrically connected to the third terminal of control module 40; the first terminal of the third resistor R3 unit 127 is electrically connected to the second terminal of the second filter 122, and the second terminal of the third resistor R3 unit 127 is electrically connected to the non-inverting input terminal of the second operational amplifier P2; the first terminal of the fourth resistor R4 unit 128 is electrically connected to the first terminal of the second filter 122, and the second terminal of the fourth resistor R4 unit 128 is electrically connected to the inverting input terminal of the second operational amplifier P2; the output terminal of the second operational amplifier P2 is electrically connected to the fourth terminal of control module 40.

[0064] In some embodiments, the first resistor R1 unit 125 includes a plurality of second resistors R2 connected in series, the second resistor R2 unit 126 includes a plurality of third resistors R3 connected in series, the third resistor R3 unit 127 includes a plurality of fourth resistors R4 connected in series, and the fourth resistor R4 unit 128 includes a plurality of fifth resistors R5 connected in series. For example, the first resistor R1 unit 125 includes four second resistors R2 connected in series, the second resistor R2 unit 126 includes four third resistors R3 connected in series, the third resistor R3 unit 127 includes four fourth resistors R4 connected in series, and the fourth resistor R4 unit 128 includes four fifth resistors R5 connected in series.

[0065] In this embodiment, the first resistor R1 unit 125 and the second resistor R2 unit 126 are the input resistors of the first operational amplifier P1, and the third resistor R3 unit 127 and the fourth resistor R4 unit 128 are the input resistors of the second operational amplifier P2. The voltage at different locations of the rectifier and filter submodule 12 is collected by the first operational amplifier P1 and the second operational amplifier P2 so that the control module 40 can control the second switching device K1 to disconnect when the voltage of the rectifier and filter submodule 12 is abnormal.

[0066] Optionally, in some embodiments, the rectifier filter submodule 12 further includes a first thermistor F3; the first end of the first thermistor F3 is electrically connected to the second end of the external first voltage divider resistor and the fifth end of the control module 40, respectively, and the second end of the first thermistor F3 is grounded; wherein, the first end of the first voltage divider resistor is electrically connected to the external DC power supply.

[0067] In some embodiments, the first thermistor F3 is a thermistor with a negative temperature coefficient; the first thermistor F3 may be specifically disposed in the region where the rectifier unit 121 is located, so as to detect the temperature of the rectifier unit 121.

[0068] In this embodiment, the temperature inside the rectifier and filter submodule 12 is detected by the first thermistor F3 to achieve over-temperature protection for the pulse voltage generation circuit. Specifically, when the temperature inside the rectifier and filter submodule 12 is too high, the control module 40 controls the second switching device K1 to open, so that the pulse voltage generation circuit stops working.

[0069] Optionally, in some embodiments, the rectifier unit 121 includes a first diode D1, a second diode D2, a third diode D3, and a fourth diode D4; the anode of the first diode D1 is electrically connected to the cathode of the second diode D2 and the first terminal of the filter transformer submodule 11, respectively; the cathode of the first diode D1 is electrically connected to the cathode of the third diode D3, the first terminal of the second inductor L2, and the first terminal of the second capacitor C2, respectively; the cathode of the second diode D2 is electrically connected to the first terminal of the filter transformer submodule 11, and the anode of the second diode D2 is electrically connected to the fourth diode D4. The anode of diode D4, the first terminal of the current detection unit 123, and the second terminal of the second capacitor C2 are electrically connected; the anode of the third diode D3 is electrically connected to the cathode of the fourth diode D4 and the second terminal of the filter transformer module 11, and the cathode of the third diode D3 is electrically connected to the first terminal of the second inductor L2 and the first terminal of the second capacitor C2, respectively; the anode of the fourth diode D4 is electrically connected to the first terminal of the current detection unit 123 and the second terminal of the second capacitor C2, respectively, and the cathode of the fourth diode D4 is electrically connected to the second terminal of the filter transformer module 11.

[0070] In this embodiment, a full-bridge rectifier bridge is formed by a first diode D1, a second diode D2, a third diode D3, and a fourth diode D4 to rectify the second AC voltage signal and output a DC voltage signal before filtering.

[0071] Optionally, in some embodiments, the rectifier-filter submodule 12 further includes a third switching device K2 and a first resistor R1; the first terminal of the third switching device K2 is electrically connected to the second inductor L2, and the second terminal of the third switching device K2 is electrically connected to the first terminal of the first resistor R1; the second terminal of the first resistor R1 is electrically connected to the first terminal of the second filter 122.

[0072] In some embodiments, the control terminal of the second switching device K1 is electrically connected to the eighth terminal of the external control module 40; the control terminal of the third switching device K2 is electrically connected to the ninth terminal of the control module 40; the control module 40 is used to control the third switching device K2 to conduct and control the second switching device K1 to disconnect when the pulse voltage generating circuit is powered on, and to control the third switching device K2 to disconnect and control the second switching device K1 to conduct after a preset time.

[0073] It should be noted that the control module 40 is used to control the conduction and disconnection of the third switching device K2. When the pulse voltage generating circuit is powered on, the control module 40 first controls the third switching device K2 to conduct while keeping the second switching device K1 disconnected. The third capacitor C3 and the fourth capacitor C4 are pre-charged. Due to the current limiting effect of the first resistor R1, overvoltage damage to the devices in the pulse voltage generating circuit can be avoided at the moment of power-on. After a preset time, the control module 40 determines that the voltage of the first AC voltage signal is stable. Then, the control module 40 controls the third switching device K2 to disconnect and controls the second switching device K1 to conduct. The pulse voltage generating circuit starts to work to ensure the stability of the pulse voltage generating circuit.

[0074] In some embodiments, the third switching device K2 can be a relay, the control terminal of the third switching device K2 is the positive terminal of the relay, and the ground terminal (i.e. the negative terminal of the relay) of the third switching device K2 is grounded; the first terminal of the third switching device K2 is the common terminal of the relay, and the second terminal of the third switching device K2 is the normally open terminal of the relay.

[0075] In this embodiment, when the pulse voltage generating circuit is powered on, the control module 40 first controls the third switching device K2 to be turned on while keeping the second switching device K1 off. The third capacitor C3 and the fourth capacitor C4 are pre-charged. Due to the current limiting effect of the first resistor R1, the devices in the pulse voltage generating circuit can be prevented from being damaged by overvoltage at the moment of power-on.

[0076] Optional, refer to Figure 2 In some embodiments, the pulse voltage generating circuit further includes an output module 60; the output module 60 is electrically connected to the resonant module 20, and the output module 60 is used to convert the first pulse voltage signal into a voltage, output a second pulse voltage signal, and use the second pulse voltage signal to perform dielectric barrier discharge.

[0077] It should be noted that dielectric barrier discharge (DBD) is a form of gas discharge in which an insulating medium is inserted into the discharge space, which can generate stable low-temperature plasma at atmospheric pressure.

[0078] In some embodiments, the second pulse voltage signal is a pulse voltage signal with a frequency of 10 kHz to 80 kHz and a peak-to-peak value of 10 kV to 50 kV, which can provide greater plasma energy for plasma-assisted ball milling.

[0079] In this embodiment of the application, the first pulse voltage signal is converted by the output module 60 to output a second pulse voltage signal, and the second pulse voltage signal is used to perform dielectric barrier discharge to achieve gas discharge and form plasma.

[0080] Optional, refer to Figure 4 In some embodiments, the output module 60 includes a second transformer 61 and a dielectric barrier discharge module 62; the primary winding of the second transformer 61 is electrically connected to the resonant module 20, and the secondary winding of the second transformer 61 is electrically connected to the dielectric barrier discharge module 62; the second transformer 61 is used to convert the first pulse voltage signal into a voltage and output the second pulse voltage signal; the dielectric barrier discharge module 62 is used to perform dielectric barrier discharge using the second pulse voltage signal.

[0081] In some embodiments, the dielectric barrier discharge module 62 includes a first electrode and a second electrode arranged in parallel. An insulating dielectric layer is disposed on the surface of the first electrode and the second electrode, or an insulating dielectric layer is disposed in the space between the first electrode and the second electrode. The first electrode is electrically connected to the first end of the secondary winding of the second transformer 61, and the second electrode is electrically connected to the second end of the secondary winding of the second transformer 61. When the pulse voltage generating circuit is working normally, the gas in the space between the first electrode and the second electrode is ionized through the first electrode and the second electrode to achieve gas discharge and form plasma.

[0082] In some embodiments, the first pulse voltage signal is boosted by the second transformer 61 to output the second pulse voltage signal.

[0083] In this embodiment, the first pulse voltage signal is converted by the second transformer 61 to output a second pulse voltage signal. The second pulse voltage signal is then used by the dielectric barrier discharge module 62 to perform dielectric barrier discharge, thereby achieving gas discharge and forming plasma.

[0084] Optionally, in some embodiments, the pulse voltage generating circuit includes a second thermistor F4, the first end of which is electrically connected to the second end of an external second voltage divider resistor and the sixth end of the control module 40, and the second end of the second thermistor F4 is grounded; wherein, the first end of the second voltage divider resistor is electrically connected to an external DC power supply.

[0085] In some embodiments, the second thermistor F4 is a thermistor with a negative temperature coefficient; the second thermistor F4 may be specifically disposed in the region where the first switching device 30 is located, so as to detect the temperature of the first switching device 30.

[0086] In this embodiment, the temperature of the first switching device 30 is detected by the second thermistor F4 to achieve over-temperature protection of the first switching device 30. That is, when the temperature of the first switching device 30 is too high, the control module 40 controls the second switching device K1 to open, thereby reducing the current of the first switching device 30.

[0087] Optionally, in some embodiments, the output module 60 further includes a third operational amplifier P3 and a root mean square (RMS) converter. The non-inverting input of the third operational amplifier P3 is electrically connected to the second terminal of the first capacitor C1, the inverting input of the third operational amplifier P3 is electrically connected to the first terminal of the first capacitor C1, the output of the third operational amplifier P3 is electrically connected to the input of the RMS converter 63, and the output of the RMS converter 63 is electrically connected to the seventh terminal of the control module 40.

[0088] In this embodiment, the AC voltage of the first capacitor C1 is acquired and amplified by the third operational amplifier P3, and then the root mean square value of the amplified AC voltage of the first capacitor C1 is converted into a DC voltage value by the root mean square value converter 63. This allows the control module 40 to control the second switching device K1 to disconnect when the DC voltage value is too high, so as to avoid damage to the first capacitor C1 due to overvoltage.

[0089] In some embodiments, the pulse voltage generating circuit includes: a preprocessing module 10, a resonant module 20, and a first switching device 30. The resonant module 20 includes a first inductor L1 and a first capacitor C1. The preprocessing module 10 includes a filter transformer submodule 11 and a rectifier filter submodule 12. The filter transformer submodule 11 includes a first filter 111 and a first transformer 112. The rectifier filter submodule 12 includes a rectifier unit 121, a second capacitor C2, a second inductor L2, a second switching device K1, a second filter 122, a current detection unit 123, and a capacitor filter unit 124. The rectifier unit 121 includes a first diode D1, a second diode D2, a third diode D3, and a fourth diode D4. The rectifier filter submodule 12 also includes a third switching device K2 and a first resistor R1. The pulse voltage generating circuit also includes an output module 60. The output module 60 includes a second transformer 61 and a dielectric barrier discharge module 62.

[0090] The first terminal of the first inductor L1 is electrically connected to the third terminal of the second filter 122, and the second terminal of the first inductor L1 is electrically connected to the first terminal of the first capacitor C1; the second terminal of the first capacitor C1 is electrically connected to the first terminal of the first switching device 30; the second terminal of the first switching device 30 is electrically connected to the fourth terminal of the second filter 122, and the control terminal of the first switching device 30 is electrically connected to the first terminal of the control module 40.

[0091] The third terminal of the first filter 111 is electrically connected to the first terminal of the primary winding of the transformer, the fourth terminal of the first filter 111 is electrically connected to the second terminal of the primary winding of the transformer, the first terminal of the first filter 111 is electrically connected to the live wire terminal of the AC power supply 50, and the second terminal of the first filter 111 is electrically connected to the neutral wire terminal of the AC power supply 50; the first terminal of the secondary winding of the first transformer 112 is electrically connected to the positive terminal of the first diode D1 and the negative terminal of the second diode D2, respectively, and the second terminal of the secondary winding of the first transformer 112 is electrically connected to the positive terminal of the third diode D3 and the negative terminal of the fourth diode D4, respectively.

[0092] The anode of the first diode D1 is electrically connected to the cathode of the second diode D2. The cathode of the first diode D1 is electrically connected to the cathode of the third diode D3, the first terminal of the second inductor L2, and the first terminal of the second capacitor C2. The anode of the second diode D2 is electrically connected to the anode of the fourth diode D4, the first terminal of the current detection unit 123, and the second terminal of the second capacitor C2. The anode of the third diode D3 is electrically connected to the cathode of the fourth diode D4. The cathode of the third diode D3 is electrically connected to the first terminal of the second inductor L2 and the first terminal of the second capacitor C2. The anode of the fourth diode D4 is electrically connected to the first terminal of the current detection unit 123 and the second terminal of the second capacitor C2.

[0093] The second terminal of the second inductor L2 is electrically connected to the first terminal of the second switching device K1; the second terminal of the second switching device K1 is electrically connected to the first terminal of the second filter 122; the second terminal of the second filter 122 is electrically connected to the second terminal of the current detection unit 123; the third terminal of the second filter 122 is electrically connected to the first terminal of the capacitor filter unit 124; the fourth terminal of the second filter 122 is electrically connected to the second terminal of the capacitor filter unit 124; the output terminal of the current detection unit 123 is electrically connected to the second terminal of the control module 40.

[0094] The first terminal of the third switching device K2 is electrically connected to the second inductor L2, and the second terminal of the third switching device K2 is electrically connected to the first terminal of the first resistor R1; the second terminal of the first resistor R1 is electrically connected to the first terminal of the second filter 122; the first terminal of the primary winding of the second transformer 61 is electrically connected to the first terminal of the first capacitor C1, and the second terminal of the primary winding of the second transformer 61 is electrically connected to the second terminal of the first capacitor C1.

[0095] Reference Figure 5 In some embodiments, in Figure 5 In a coordinate system where current I is the vertical axis and time t is the horizontal axis (a), curve X1 represents the change of current in the first inductor L1 over time; Figure 5 In a coordinate system where current I is the vertical axis and time t is the horizontal axis (b), curve X2 represents the curve of current change in the first switching device 30 over time; Figure 5 (c) In a coordinate system with current I as the vertical axis and time t as the horizontal axis, curve X3 is the curve of the current in the primary winding of the second transformer 61 changing with time; Figure 5 (d) In a coordinate system with voltage U as the vertical axis and time t as the horizontal axis, curve X4 is the curve of voltage change with time in the pulse width modulation signal input by control module 40 to the control terminal of first switching device 30, curve X5 is the curve of voltage change with time in the first capacitor C1, and curve X6 is the curve of voltage change with time between the first terminal and the second terminal of the first switching device 30.

[0096] At time t0, the pulse width modulation signal input from the control module 40 to the control terminal of the first switching device 30 is high, turning on the first switching device 30. Current is input to the first inductor L1 and the first capacitor C1, simultaneously charging the first capacitor C1. The voltage across the first capacitor C1 gradually increases, and then the current flows to the first switching device 30, finally returning to the second terminal 102 of the preprocessing module 10, completing the loop current cycle. During the period from time t0 to time t1, the preprocessing module 10 outputs voltage to the resonant inverter circuit composed of the resonant module 20 and the first switching device 30. During this process, the first capacitor C1 continuously charges to saturation, and the current flowing through the first inductor L1 is also in a resonant state. When the first switching device 30 is turned on at time t0, the current in the first inductor L1 exhibits a resonant sine wave shape over time.

[0097] At time t1, since the voltage of the first capacitor C1 is charged to its maximum value, the current flowing through the branch where the first capacitor C1 is located is close to zero. The current in the first inductor L1 crosses zero for the first time and the current in the first inductor L1 is about to reverse. Since the current in the first inductor L1 reverses, the current flowing through the first switching device 30 is reduced to zero, so the first switching device 30 is turned off, that is, zero current turn-off, realizing the soft switching function. At this time, the current of the first switching device 30 is freewheeled by the parasitic diode of the first switching device 30.

[0098] After zero-current turn-off, the voltage of the first switching device 30 does not rise immediately because the forward voltage drop is 0.7V when the parasitic diode is conducting. Therefore, the reverse voltage that the first switching device 30 withstands during this period is lower than its withstand voltage, and it is in a safe state. In addition, due to the existence of the equivalent inductance, the current direction of the primary winding of the second transformer 61 remains unchanged, and the current of the primary winding of the second transformer 61 gradually decreases. The voltage of the first capacitor C1 is negative, the current flowing through the first capacitor C1 is reversed, and the current in the first inductor L1 is also reversed. This process consumes the energy stored in the equivalent inductance of the primary winding of the second transformer 61, and this stage cannot be sustained for a long time.

[0099] At time t2, since the current in the first inductor L1 crosses zero for the second time, the parasitic diode of the first switching device 30 is reverse-biased and turned off. At this time, the first switching device 30 is already in the off state, so the first inductor L1 is in the zero-current state, and the voltage across the first switching device 30 is pulled up.

[0100] From time t2 to time t3, the current in the first inductor L1 remains 0, i.e., the current is discontinuous. Therefore, the current in the first inductor L1 is not continuous.

[0101] Analysis of the above process shows that after the first switching device 30 is turned on, the resonant period of the current is fixed. By adjusting the switching frequency of the pulse width modulation signal input by the control module 40 to the control terminal of the first switching device 30, the frequency of the pulse width modulation signal can be adjusted from 10 kHz to 80 kHz. The higher the frequency, the longer the conduction time of the first switching device 30 per unit time, and the longer the energy transmission phase time, thereby achieving the goal of adjustable voltage output by the output module 60. By adjusting the frequency of the pulse width modulation signal, the discontinuous current operation of the pulse voltage generation circuit can be improved, reducing the proportion of current interruption in the entire cycle, thereby alleviating the problem of excessive current stress on the first switching device 30.

[0102] This application also provides a plasma power supply, including a pulse voltage generating circuit as described in the first aspect.

[0103] The specific implementation of the pulse voltage generation circuit in the plasma power supply provided in this application is similar to the aforementioned specific implementation of the pulse voltage generation circuit, and will not be repeated here.

[0104] In related technologies, plasma power supplies use thyristors (SCR, Silicon Controlled Rectifier) ​​or insulated gate bipolar transistors (IGBT, Insulated Gate Bipolar Transistor) as power switching devices. These technologies suffer from problems such as high on-resistance or large switching losses caused by turn-off wake current, low operating frequency (1 kHz to 20 kHz), and large size of required heat dissipation components.

[0105] In this embodiment, the use of the first switching device 30 can reduce switching losses, reduce the size of heat dissipation components, and enable the power supply to operate at a frequency of 10 kHz to 80 kHz and a peak-to-peak voltage of 10 kV to 50 kV, providing greater plasma energy for plasma-assisted ball milling. Due to the reduction in switching losses, the plasma power supply is more efficient, energy-saving and environmentally friendly.

[0106] In this embodiment, a high-voltage, high-frequency pulse signal is obtained by cooperating with the resonant module 20 and the first switching device 30, and zero-current turn-off can be achieved. The first switching device 30 is a silicon carbide switching transistor, which belongs to the third generation of semiconductors. Silicon carbide switching transistors have high voltage withstand capability and low loss, and their advantages in power devices are very obvious. Through this embodiment, a pulse voltage signal with a frequency of 10 kHz to 80 kHz and a peak-to-peak value of 10 kV to 50 kV is realized on a dielectric barrier discharge load. The pulse voltage generation circuit has a simple structure, low cost, high efficiency, and is safe and reliable.

[0107] In summary, the first AC voltage signal from the AC power supply 50 is processed by the preprocessing module to output a DC voltage signal. Then, the first switching device 30 is periodically turned on and off, and the first capacitor C1 in the resonant module 20 receives the DC voltage signal and charges when the first switching device 30 is on, and stops receiving the DC voltage signal and discharges when the first switching device 30 is off. Since the first capacitor generates and outputs a first pulse voltage signal through periodic charging and discharging, a pulse voltage signal is generated. Furthermore, since the half-bridge or full-bridge conversion circuit in the related technology includes multiple switching devices, compared with the half-bridge or full-bridge conversion circuit, the first switching device 30, as a single switching device, occupies less space, which can reduce the size of the circuit board and is beneficial to the miniaturization design of the circuit board.

[0108] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device.

[0109] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

[0110] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A pulse voltage generating circuit, characterized in that, include: The preprocessing module (10), the resonant module (20), and the first switching device (30) are included. The preprocessing module (10) is electrically connected to the resonant module (20), the first switching device (30) and the external AC power supply (50) respectively. The preprocessing module (10) is used to process the first AC voltage signal of the AC power supply (50) to output a DC voltage signal. The first switching device (30) is used for periodic switching on and off; The resonant module (20) includes a first capacitor (C1), which is connected in series with the first switching device (30). The first capacitor (C1) is used to receive the DC voltage signal and charge when the first switching device (30) is turned on, and to stop receiving the DC voltage signal and discharge when the first switching device (30) is turned off. The first capacitor (C1) generates a first pulse voltage signal and outputs it through periodic charging and discharging.

2. The pulse voltage generating circuit according to claim 1, characterized in that, The resonant module (20) also includes a first inductor (L1); The first end of the first inductor (L1) is electrically connected to the first end (101) of the preprocessing module (10), and the second end of the first inductor (L1) is electrically connected to the first end of the first capacitor (C1). The second terminal of the first capacitor (C1) is electrically connected to the first terminal of the first switching device (30); The second end of the first switching device (30) is electrically connected to the second end (102) of the preprocessing module (10); The first pulse voltage signal is output through the first terminal of the first capacitor (C1) and the second terminal of the first capacitor (C1).

3. The pulse voltage generating circuit according to claim 2, characterized in that, The control terminal of the first switching device (30) is electrically connected to the first terminal of the external control module (40); The control module (40) is used to control the first switching device (30) to periodically turn on and off.

4. The pulse voltage generating circuit according to claim 1, characterized in that, The preprocessing module (10) includes a filter transformer submodule (11) and a rectifier filter submodule (12). The filter transformer submodule (11) is electrically connected to the rectifier filter submodule (12) and the AC power supply (50) respectively. The filter transformer submodule (11) is used to filter and transform the first AC voltage signal and output the second AC voltage signal. The rectifier and filter submodule (12) is electrically connected to the resonant module (20) and the first switching device (30) respectively. The rectifier and filter submodule (12) is used to rectify and filter the second AC voltage signal and output the DC voltage signal.

5. The pulse voltage generating circuit according to claim 4, characterized in that, The filter transformer submodule (11) includes a first filter (111) and a first transformer (112). The first filter (111) is electrically connected to the primary winding of the first transformer (112) and the AC power supply (50) respectively; The secondary winding of the first transformer (112) is electrically connected to the rectifier and filter submodule (12).

6. The pulse voltage generating circuit according to claim 4, characterized in that, The rectifier and filter submodule (12) includes a rectifier unit (121), a second capacitor (C2), a second inductor (L2), a second switching device (K1), and a second filter (122). The first end of the rectifier unit (121) is electrically connected to the first end of the filter transformer submodule (11), the second end of the rectifier unit (121) is electrically connected to the second end of the filter transformer submodule (11), the third end of the rectifier unit (121) is electrically connected to the first end of the second inductor (L2) and the first end of the second capacitor (C2) respectively, and the fourth end of the rectifier unit (121) is electrically connected to the second end of the second filter (122) and the second end of the second capacitor (C2) respectively. The second terminal of the second inductor (L2) is electrically connected to the first terminal of the second switching device (K1); The second terminal of the second switching device (K1) is electrically connected to the first terminal of the second filter (122); The third terminal of the second filter (122) is electrically connected to the first terminal of the resonant module (20), and the fourth terminal of the second filter (122) is electrically connected to the second terminal of the first switching device (30).

7. The pulse voltage generating circuit according to claim 6, characterized in that, The rectifier unit (121) includes a first diode (D1), a second diode (D2), a third diode (D3), and a fourth diode (D4). The positive terminal of the first diode (D1) is electrically connected to the negative terminal of the second diode (D2) and the first terminal of the filter transformer submodule (11), respectively. The negative terminal of the first diode (D1) is electrically connected to the negative terminal of the third diode (D3), the first terminal of the second inductor (L2), and the first terminal of the second capacitor (C2), respectively. The negative terminal of the second diode (D2) is electrically connected to the first terminal of the filter transformer submodule (11), and the positive terminal of the second diode (D2) is electrically connected to the positive terminal of the fourth diode (D4) and the second terminal of the second capacitor (C2). The positive terminal of the third diode (D3) is electrically connected to the negative terminal of the fourth diode (D4) and the second terminal of the filter transformer submodule (11), respectively. The negative terminal of the third diode (D3) is electrically connected to the first terminal of the second inductor (L2) and the first terminal of the second capacitor (C2), respectively. The positive terminal of the fourth diode (D4) is electrically connected to the second terminal of the second capacitor (C2), and the negative terminal of the fourth diode (D4) is electrically connected to the second terminal of the filter transformer submodule (11).

8. The pulse voltage generating circuit according to claim 6, characterized in that, The rectifier and filter submodule (12) also includes a third switching device (K2) and a first resistor (R1). The first terminal of the third switching device (K2) is electrically connected to the second inductor (L2), and the second terminal of the third switching device (K2) is electrically connected to the first terminal of the first resistor (R1). The second end of the first resistor (R1) is electrically connected to the first end of the second filter (122).

9. The pulse voltage generating circuit according to claim 8, characterized in that, The control terminal of the second switching device (K1) is electrically connected to the eighth terminal of the external control module (40); The control terminal of the third switching device (K2) is electrically connected to the ninth terminal of the control module (40); The control module (40) is used to control the third switching device (K2) to turn on and the second switching device (K1) to turn off when the pulse voltage generating circuit is powered on, and to control the third switching device (K2) to turn off and the second switching device (K1) to turn on after a preset time.

10. The pulse voltage generating circuit according to claim 1, characterized in that, The pulse voltage generating circuit also includes an output module (60). The output module (60) is electrically connected to the resonant module (20). The output module (60) is used to convert the first pulse voltage signal into a voltage and output a second pulse voltage signal, and use the second pulse voltage signal to perform dielectric barrier discharge.

11. The pulse voltage generating circuit according to claim 10, characterized in that, The output module (60) includes a second transformer (61) and a dielectric barrier discharge module (62). The primary winding of the second transformer (61) is electrically connected to the resonant module (20), and the secondary winding of the second transformer (61) is electrically connected to the dielectric barrier discharge module (62). The second transformer (61) is used to convert the first pulse voltage signal into a voltage and output the second pulse voltage signal. The dielectric barrier discharge module (62) is used to perform dielectric barrier discharge using the second pulse voltage signal.

12. A plasma power supply, characterized in that, Includes a pulse voltage generating circuit as described in any one of claims 1 to 11.

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