Dual photodiode electromagnetic radiation sensor device

By using a back-to-back dual photodiode sensor, the bandgap difference between materials such as silicon and germanium is utilized to solve the problems of sensor manufacturing complexity and compatibility, realize the integration of the sensor with CMOS electronic devices, and provide flexible spectral response adjustment and multi-band imaging capabilities.

CN116097455BActive Publication Date: 2026-07-07POLITECNICO DI MILANO (100 00) +1

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
POLITECNICO DI MILANO (100 00)
Filing Date
2021-07-29
Publication Date
2026-07-07

AI Technical Summary

Technical Problem

Existing dual photodiode electromagnetic radiation sensors are complex to manufacture and incompatible with the integration of CMOS electronic devices, making it difficult to integrate the sensor with electronic control and readout modules.

Method used

The sensor employs a back-to-back dual photodiode configuration, utilizes semiconductor materials with different band gaps (such as silicon and germanium) to manufacture the sensor, and integrates the sensor and electronic conditioning system on the same substrate through CMOS-compatible integration technology, simplifying the manufacturing process and achieving a planar structure.

Benefits of technology

It achieves compatible integration of sensors and CMOS electronics, simplifies the manufacturing process, and can operate in the visible, near-infrared to short-wave infrared bands, providing flexible spectral response adjustment capabilities, and is suitable for a variety of spectral analysis and imaging applications.

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Abstract

A dual photodiode electromagnetic radiation sensor device (10) is described, comprising: a substrate (25) made of a first semiconductor material defining a first surface (30) exposed to electromagnetic radiation (EMR) and a second surface (32) opposite to the first surface; a first integrated photodiode (PD1) comprising: a first doped region (31) included in the substrate (25) extending to the second surface (32) and having a first type of doping; a second doped region (33) included in the substrate (25) extending to the second surface (32), separated from the first region (31) by a portion of the substrate (25) and having a second type (p+) doping. The device also includes a second integrated photodiode (PD2) comprising the first doped region (31) and: a layer (34) in a second semiconductor material disposed on the second surface (32) in contact with the first doped region (31) to define a third surface (35) opposite to the second surface (32); and a layer (36) doped in the second semiconductor material having a second type of doping (p+) and superimposed on the third surface (35). Metal contacts (BC, TC) are provided to contact the second doped region (33) and the doped layer (36) at the second surface (32).
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