Magnetron driven cavity

Abstract

The application provides a magnetron excited cavity, and relates to a microwave device, the magnetron excited cavity comprises a waveguide and a metal ring, the waveguide is provided with an antenna hole; the metal ring comprises a fixed part and a connecting part; the fixed part is annularly arranged, the top edge of the fixed part is outwardly bent to form a flange, the bottom of the fixed part is inserted into the antenna hole, and the flange abuts against the edge of the antenna hole; the connecting part is arranged on the top of the flange and protrudes towards the top side, so that an included angle is formed between the connecting part and the flange. The technical scheme of the application installs the metal ring on the antenna hole of the waveguide, adjusts the structure of the metal ring, protrudes the top of the metal ring upwards, and thus, after the antenna is installed, the effective connection between the metal ring and the copper mesh of the antenna edge is ensured, and the high-frequency sparking is avoided.

Description

Technical Field

[0001] This invention relates to the field of microwave equipment technology, and in particular to a magnetron excitation cavity. Background Technology

[0002] In microwave equipment, the excitation cavity, as a key component directly connected to the magnetron, plays a crucial role in effectively transmitting the microwave energy generated within the magnetron to the load. The rationality of the excitation cavity's structural design determines the microwave transmission loss and also affects the magnetron's operational stability and lifespan.

[0003] In current technology, a metal ring is usually set at the magnetron antenna insertion port of the excitation cavity. The metal ring contacts the copper mesh around the magnetron antenna. After long-term use or if the assembly is not in place, the metal ring and the copper mesh are prone to loose contact, which can lead to high-frequency arcing and affect the normal operation of the magnetron. Summary of the Invention

[0004] The main objective of this invention is to provide a magnetron excitation cavity, which aims to solve the technical problem in the prior art where the magnetron and antenna are not tightly connected, resulting in high-frequency arcing and affecting the normal operation of the magnetron.

[0005] To achieve the above objectives, the present invention proposes a magnetron excitation cavity, the magnetron excitation cavity comprising:

[0006] A waveguide having an antenna aperture;

[0007] A metal ring, the metal ring comprising a fixing part and a connecting part;

[0008] The fixing part is arranged in a ring shape, the top edge of the fixing part is bent outward to form a flange, the bottom of the fixing part is inserted into the antenna hole, and the flange abuts against the edge of the antenna hole;

[0009] The connecting part is located at the top of the flange and protrudes towards the top side, so that the connecting part and the flange form an angle.

[0010] Optionally, the angle between the connecting part and the flange is specifically 15° to 20°.

[0011] Optionally, the metal ring is made of copper.

[0012] Optionally, the waveguide includes:

[0013] A top plate and a bottom plate, wherein the top plate and the bottom plate are disposed opposite to each other;

[0014] Side plates, multiple side plates are provided between the top plate and the bottom plate, and the top plate, the bottom plate and the multiple side plates together form a cuboid structure with one side open;

[0015] A flange plate having a through hole, the flange plate being disposed at the opening position, and the through hole corresponding to the opening.

[0016] Optionally, the magnetron excitation chamber further includes a detection element, one end of which is connected to the edge of the flange plate, and the other end is used to connect to an external load to detect the gap value between the flange plate and the external load.

[0017] Optionally, the detection element is a displacement sensor to detect the gap value between the flange plate and the external load;

[0018] The magnetron excitation cavity also includes a control circuit, which is electrically connected to the displacement sensor. The displacement sensor is used to turn the control circuit on or off according to the gap value.

[0019] Optionally, the magnetron excitation cavity further includes a ventilation hole, the antenna hole is disposed on the top plate, the ventilation hole is disposed on the bottom plate, and the antenna hole and the ventilation hole are positioned correspondingly.

[0020] Optionally, the side plate is also provided with a plurality of exhaust holes, which are spaced apart on the side plate.

[0021] Optionally, the magnetron excitation cavity further includes:

[0022] A flow guide channel is provided on the side of the bottom plate away from the top plate. The flow guide channel has an air inlet and an air outlet that are interconnected. The air outlet is connected to the ventilation hole.

[0023] A fan is installed on the air inlet.

[0024] Optionally, the flow channel includes:

[0025] Multiple guide plates are arranged to form a pyramidal structure, and the top surface of the pyramidal structure is open to form the air inlet;

[0026] The air duct has one end connected to the top of the pyramidal structure and the other end is an opening to form the air outlet.

[0027] The technical solution of the present invention is to install the metal ring on the antenna hole of the waveguide. By adjusting the structure of the metal ring, the top of the metal ring is made to bulge upward, thereby ensuring that the metal ring is effectively connected to the copper mesh at the edge of the antenna after the antenna is installed, and avoiding high-frequency arcing. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0029] Figure 1 This is an exploded view of the magnetron excitation cavity of the present invention;

[0030] Figure 2 This is a top-view structural diagram of the magnetron excitation cavity of the present invention;

[0031] Figure 3 This is a schematic diagram of the bottom view structure of the magnetron excitation cavity of the present invention;

[0032] Figure 4 This is a schematic diagram of the structure of the metal ring in the magnetron excitation cavity of the present invention;

[0033] Figure 5 This is a cross-sectional view of the metal ring in the magnetron excitation cavity of the present invention;

[0034] Figure 6 This is a schematic diagram of the flow guide groove in the magnetron excitation cavity of the present invention;

[0035] Figure 7 This is a schematic diagram of the detection element in the magnetron excitation cavity of the present invention.

[0036] Explanation of icon numbers:

[0037] label name label name 10 waveguide 11 roof 111 Antenna hole 12 base plate 121 Ventilation holes 13 Side panel 131 Vent 20 metal ring 21 Fixing part 22 Flip-edge 23 Connection part 30 flange plate 31 Through hole 32 Mounting holes 40 Test pieces 41 telescopic pole 50 Guide channel 51 Guide plate 52 air inlet 53 air vent 54 Air duct

[0038] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0039] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0040] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0041] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0042] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0043] Furthermore, the technical solutions of the various embodiments of the present invention can be combined with each other, but only if they are feasible for those skilled in the art. If the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by the present invention.

[0044] This invention proposes a magnetron excitation cavity; please refer to [reference needed]. Figures 1-3 The magnetron excitation cavity includes a waveguide 10 and a metal ring 20. The waveguide 10 has an antenna hole 111. The metal ring 20 includes a fixing part 21 and a connecting part 23. The fixing part 21 is arranged in a ring shape. The top edge of the fixing part 21 is bent outward to form a flange 22. The bottom of the fixing part 21 is inserted into the antenna hole 111. The flange 22 abuts against the edge of the antenna hole 111. The connecting part 23 is disposed on the top of the flange 22 and protrudes towards the top side so that an angle is formed between the connecting part 23 and the flange 22.

[0045] The waveguide 10 has an antenna hole 111 for mounting an antenna. The antenna is columnar and has a copper mesh structure at its edge. When the antenna is inserted into the antenna hole 111, the copper mesh is close to the edge of the antenna hole 111.

[0046] In this embodiment, the metal ring 20 is installed inside the antenna hole 111. The size of the metal ring 20 is adapted to the size of the antenna hole 111.

[0047] The fixing part 21 has a certain thickness, and the thickness is adapted to the thickness of the antenna hole 111, for example, it can be set to 2mm.

[0048] When the fixing part 21 is inserted into the antenna hole 111, the flange 22 abuts against the surface of the edge of the antenna hole 111. The connecting part 23 is located at the top of the flange 22. During normal antenna installation, the antenna is inserted into the waveguide 10 from the top of the antenna hole 111. When inserted into the antenna hole 111, the copper wires at the edge of the antenna abut against the connecting part 23.

[0049] The connecting portion 23 protrudes upward from the flange 22 to form a conical structure. The cross-section of the connecting portion 23 and the flange 22 is triangular, with a pointed apex. Therefore, after the antenna is installed, the copper mesh at the antenna edge will abut against the pointed apex of the connecting portion 23. Because the contact area between the pointed apex and the copper mesh is small, the pressure on the copper mesh increases, resulting in greater deformation. This helps to enhance the tightness between the metal ring 20 and the copper mesh, thus better preventing high-frequency arcing during magnetron operation.

[0050] Please refer to Figures 4-5 The connecting part 23 and the flange 22 have an included angle, which can be set in the range of 15° to 20°.

[0051] The metal ring 20 can be made of copper, the same material as the copper mesh, thereby further avoiding high-frequency arcing during magnetron operation.

[0052] The technical solution of the present invention is to install the metal ring 20 on the antenna hole 111 of the waveguide 10. By adjusting the structure of the metal ring 20, the top of the metal ring 20 is made to bulge upward, thereby ensuring that the metal ring 20 is effectively connected to the copper mesh at the edge of the antenna after the antenna is installed, and avoiding high-frequency arcing.

[0053] Specifically, the waveguide 10 includes a top plate 11, a bottom plate 12, side plates 13, and a flange plate 30. The top plate 11 and the bottom plate 12 are arranged opposite to each other. A plurality of side plates 13 are provided between the top plate 11 and the bottom plate 12. The top plate 11, the bottom plate 12, and the plurality of side plates 13 together form a cuboid structure with one side open. The flange plate 30 has a through hole 31, and the flange plate 30 is located at the opening position, and the through hole 31 corresponds to the opening.

[0054] In this embodiment, the thickness of the top plate 11 can be set to 2mm, which is compatible with the thickness of the fixing part 21 to ensure the stability of the fixing part 21 when installed in the antenna hole 111.

[0055] Taking the excitation cavity for a 2.45GHz, 6kW magnetron as an example, the waveguide 10 has a cross-section of a standard BJ26 rectangular waveguide, which is enclosed by the top plate 11, the bottom plate 12 and three side plates 13, one of which is an open structure, thereby effectively transmitting microwave energy to the load.

[0056] The flange plate 30 is disposed at the opening position, and a through hole 31 is provided at the corresponding position of the opening to transmit microwave energy. The flange plate 30 is used to connect with an external load to fix the waveguide 10 and prevent displacement during operation.

[0057] Further, please refer to Figure 7 The magnetron excitation chamber further includes a detection element 40, one end of which is connected to the edge of the flange plate 30, and the other end is used to connect to an external load to detect the gap value between the flange plate 30 and the external load.

[0058] When the magnetron is working, the microwave power coming out of the excitation cavity is as high as 6KW or more. If the waveguide 10 is not connected or is not properly connected to the downstream load, it will cause microwave leakage and cause serious damage to the human body.

[0059] Therefore, in this embodiment, the detection element 40 is used to detect the gap value between the flange plate 30 and the external load, that is, the size of the gap. This ensures that the flange plate 30 and the external load are properly connected, avoiding incomplete or loose connections.

[0060] Specifically, the magnetron excitation chamber also includes a detection element 40, one end of which is connected to the edge of the flange plate 30, and the other end is used to connect to an external load to detect the gap value between the flange plate 30 and the external load.

[0061] In this embodiment, the control circuit can be a magnetron power supply INTERLOCK circuit. The detection element 40 is connected in series with the power supply INTERLOCK circuit.

[0062] When the gap value is less than the preset value, it indicates that the magnetron excitation cavity is properly connected to the external load, the power INTERLOCK circuit does not alarm, and the magnetron and magnetron excitation cavity are working normally. The preset value can be customized by the operator and adjusted according to the structure of the equipment and the microwave wavelength.

[0063] When the gap value is greater than or equal to the preset value, it indicates that there is a missing or loose connection between the magnetron excitation cavity and the external load. In this case, the power supply INTERLOCK circuit will sound an alarm, and the magnetron and the magnetron excitation cavity will stop working, thereby effectively preventing microwave leakage.

[0064] The detection element 40 can be a displacement sensor. A mounting hole 32 is provided on the edge of the flange plate 30, for example, on the short side of the flange plate 30, for mounting the displacement sensor. The displacement sensor is detected by a telescopic rod 41, which is made of metal. When the displacement sensor is connected to the control circuit, the control circuit is disconnected when the telescopic rod 41 is in its original position, and connected when it is compressed into its original position by an external force.

[0065] In this embodiment, by adjusting the installation position of the displacement sensor, the telescopic rod 41 is in a conductive state when it retracts to a position flush with the surface of the flange plate 30.

[0066] Therefore, when the connection surface of the external load is properly connected to the flange plate 30, the two surfaces fit together, compressing the telescopic rod 41 until it is flush with the surface of the flange plate 30. The displacement sensor then activates the control circuit, preventing the power INTERLOCK circuit from triggering an alarm. Conversely, when the connection surface of the external load is not properly connected to the flange plate 30, a large gap exists between the two surfaces, and the telescopic rod 41 is not compressed. The displacement sensor then disconnects the control circuit, triggering an alarm in the power INTERLOCK circuit.

[0067] Furthermore, the magnetron excitation cavity also includes a ventilation hole 121, the antenna hole 111 is disposed on the top plate 11, the ventilation hole 121 is disposed on the bottom plate 12, and the antenna hole 111 and the ventilation hole 121 are positioned correspondingly; the side plate 13 is also provided with a plurality of exhaust holes 131, and the plurality of exhaust holes 131 are spaced apart on the side plate 13.

[0068] For magnetron excitation cavities with high power, the power is generally above 6KW, and they need to operate continuously for long periods of time, such as an 800-hour process cycle for MPCVD. To ensure that the magnetron excitation cavity can operate stably at high power for a long time, a heat dissipation function is also added in this embodiment.

[0069] The ventilation hole 121 is provided on the base plate 12. Under normal assembly conditions, the ventilation hole 121 is located directly below the antenna hole 111. Multiple exhaust holes 131 are provided on the side plates 13 on both sides adjacent to the opening of the waveguide 10. The exhaust holes 131 are located on the side closer to the antenna hole 111.

[0070] An airflow loop is formed between the ventilation hole 121 and the exhaust hole 131, which helps to discharge the heat generated during operation from the exhaust holes 131 on both sides, while external cold air can enter the waveguide 10 from the ventilation hole 121.

[0071] Specifically, the diameter of the ventilation hole 121 is smaller than the diameter of the antenna hole 111. Taking a YJ1600 or E3327 magnetron as an example, the diameter of the ventilation hole 121 is 10mm, and the diameter of the antenna hole 111 is 20mm. The diameter of each exhaust hole 131 is set to 4.6mm, and the spacing between two adjacent exhaust holes 131 is set to 6.4mm, thereby ensuring that it is less than the microwave wavelength generated during operation and avoiding microwave leakage.

[0072] To improve the stability of the waveguide 10, in this embodiment, the side plate 13 can be integrally formed, and the side plate 13 is bent to form the three sides of the waveguide 10. The side plate 13 is welded to the top plate 11 and the bottom plate 12, thereby improving the sealing performance of the waveguide 10.

[0073] Further, please refer to Figure 6 The magnetron excitation chamber further includes a guide channel 50 and a fan. The guide channel 50 is located on the side of the bottom plate 12 away from the top plate 11. The guide channel 50 has an air inlet 52 and an air outlet 53 that are interconnected. The air outlet 53 is connected to the ventilation hole 121. The fan is located on the air inlet 52.

[0074] To further improve the heat dissipation effect, the fan is added to increase the airflow velocity between the exhaust port 131 and the ventilation port 121, which can quickly remove the heat from the waveguide 10 and improve the heat dissipation efficiency.

[0075] Specifically, the bottom of the base plate 12 has two welding joints for welding the guide groove 50. During assembly, by adjusting the position of the guide groove 50, the air outlet 53 covers the ventilation hole 121. When the fan blows air into the guide groove 50, the airflow flows through the air inlet 52 to the air outlet 53, and finally enters the waveguide 10 through the ventilation hole 121.

[0076] Furthermore, the guide channel 50 includes a plurality of guide plates 51 and an air duct 54. The plurality of guide plates 51 form a pyramidal structure, and the top surface of the pyramidal structure is open to form the air inlet 52. One end of the air duct 54 is connected to the top of the pyramidal structure, and the other end is open to form the air outlet 53.

[0077] The guide channel 50 can be formed by welding multiple guide plates 51, or it can be integrally formed by bending to obtain a pyramidal structure. The bottom surface serves as the air inlet 52, and the edge of the air inlet 52 is turned outward to form a flange 22, thereby facilitating the installation of the fan.

[0078] A pyramidal structure is adopted to ensure that the air inlet 52 has a sufficiently large air intake area, while the end connected to the air duct 54 has a smaller area, thereby increasing the airflow velocity and improving heat dissipation efficiency. The air duct 54 can be formed by connecting pipes, and the flow direction of the air duct 54 is set perpendicular to the air intake direction of the air inlet 52, thereby guiding the airflow to make a 90° turn. After being blown out by the air duct 54 and the air outlet 53, it is directly directed at the front end of the antenna for air cooling.

[0079] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made under the inventive concept of the present invention using the contents of the present invention specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A magnetron excitation cavity, characterized in that, The magnetron excitation cavity includes: A waveguide having an antenna aperture; A metal ring, the metal ring comprising a fixing part and a connecting part; The fixing part is arranged in a ring shape, the top edge of the fixing part is bent outward to form a flange, the bottom of the fixing part is inserted into the antenna hole, and the flange is low to the edge of the antenna hole; The connecting part is disposed at the top of the flange and protrudes towards the top side, so that the connecting part and the flange form an angle; The connecting part is formed by the upward protrusion of the flange into a conical structure. The cross-section of the connecting part and the flange is triangular. The top of the connecting part is a pointed protrusion, which is used to abut against the copper mesh to increase the pressure on the copper mesh.

2. The magnetron excitation cavity according to claim 1, characterized in that, The angle between the connecting part and the flange is 15°~20°.

3. The magnetron excitation cavity according to claim 1, characterized in that, The metal ring is made of copper.

4. The magnetron excitation cavity according to claim 1, characterized in that, The waveguide includes: A top plate and a bottom plate, wherein the top plate and the bottom plate are disposed opposite to each other; Side plates, multiple side plates are provided between the top plate and the bottom plate, and the top plate, the bottom plate and the multiple side plates together form a cuboid structure with one side open; A flange plate having a through hole, the flange plate being disposed at the opening position, and the through hole corresponding to the opening.

5. The magnetron excitation cavity according to claim 4, characterized in that, The magnetron excitation chamber also includes a detection element, one end of which is connected to the edge of the flange plate, and the other end is used to connect to an external load to detect the gap value between the flange plate and the external load.

6. The magnetron excitation cavity according to claim 5, characterized in that, The magnetron excitation cavity also includes a control circuit, which is electrically connected to the detection element. The detection element is used to turn the control circuit on or off according to the gap value.

7. The magnetron excitation cavity according to claim 4, characterized in that, The magnetron excitation cavity also includes a ventilation hole, the antenna hole is disposed on the top plate, the ventilation hole is disposed on the bottom plate, and the antenna hole and the ventilation hole are positioned correspondingly; The side panel is also provided with a plurality of exhaust holes, which are spaced apart on the side panel.

8. The magnetron excitation cavity according to claim 7, characterized in that, The diameter of the exhaust hole is 4.6 mm, and the distance between two adjacent exhaust holes is 6.4 mm.

9. The magnetron excitation cavity according to claim 7, characterized in that, The magnetron excitation cavity further includes: A flow guide channel is provided on the side of the bottom plate away from the top plate. The flow guide channel has an air inlet and an air outlet that are interconnected. The air outlet is connected to the ventilation hole. A fan is installed on the air inlet.

10. The magnetron excitation cavity according to claim 9, characterized in that, The flow guide groove includes: Multiple guide plates are arranged to form a pyramidal structure, and the top surface of the pyramidal structure is open to form the air inlet; The air duct has one end connected to the top of the pyramidal structure and the other end is an opening to form the air outlet.

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