Electromagnetic micro digital plane transfer device

Abstract

The application belongs to the technical field of micro-nano devices, and particularly relates to an electromagnetic micro digital plane transmission device, which comprises a stator, a mover and a limiting structure, the stator comprises a base and a driving unit, the driving unit comprises four metal coils; the mover is arranged above the driving unit, the mover comprises a substrate and two transverse permanent magnets and two longitudinal permanent magnets arranged on the substrate; the limiting structure is arranged on the stator and located at the circumferential side of the driving unit to limit the activity range of the mover. By arranging the two transverse permanent magnets in a transverse direction, arranging the two longitudinal permanent magnets in a longitudinal direction, and arranging the two transverse permanent magnets and the two longitudinal permanent magnets perpendicularly and alternately, and then applying driving force to the two transverse permanent magnets and the two longitudinal permanent magnets by the four metal coils, the symmetrical driving in two directions in the plane is realized, which is easy to control; meanwhile, the driving force density is improved, the steady-state driving current can be reduced to 0.5 A, the integration and heat dissipation are easy, and the application is convenient.

Description

Technical Field

[0001] This invention belongs to the field of micro-nano device technology, and particularly relates to an electromagnetic micro digital planar transmission device. Background Technology

[0002] Micro- and nano-devices have advantages such as small size, low power consumption, and integrability, and are widely used in consumer electronics, automotive electronics, and other fields. At the same time, with the continuous development of micro- and nano-device technology, micro-factories used for the transmission and control of micro- and nano-devices are also receiving increasing attention.

[0003] Air flotation devices are used as non-contact, high-speed transport platforms for micro- and nano-devices, but airflow control increases system complexity. In 2015, Hosobata et al. from the University of Tokyo reported an electrostatically driven transmission platform (Transparent Synchronous Electrostatic Actuator for Long-Stroke PlanarMotion, IEEE / ASME Transactions on Mechatronics, Vol. 20, No. 4, August 2015). This device is simple to control and can operate over long distances, but the drive voltage is as high as 500V. Furthermore, its continuous drive requires integrated position detection for precise positioning, which also increases the device's complexity. In 2020, Tisnes et al. from Paris-Saclay University reported a transmission platform based on distributed electromagnetic drive units (Long-range Planar Conveyance Device Based on a Digital Electromagnetic Actuator Array, 2020 Symposium on Design, Test, Integration & Package of MEMS and MOEMS). Each drive unit employs mechanical limiting with a motion range of only 2mm, forming a 7×7 digital matrix transmission device. This scheme avoids the positioning inaccuracies of open-loop control, but the driving forces in the two directions within the plane are asymmetrical due to the different Z-axis directions of the coils; simultaneously, the weight of its mover is also relatively heavy, resulting in a low response bandwidth.

[0004] Therefore, it is necessary to design a new solution to address the aforementioned problems. Summary of the Invention

[0005] The purpose of this invention is to provide an electromagnetic miniature digital planar transmission device, which aims to solve the technical problems of asymmetrical driving force and low response bandwidth in the existing transmission platform.

[0006] To achieve the above objectives, embodiments of the present invention provide an electromagnetic miniature digital planar transmission device, comprising:

[0007] The stator includes a base and a drive unit disposed on the base. The drive unit includes four metal coils, which are symmetrically spaced apart and do not intersect each other, with a gap between adjacent metal coils.

[0008] A mover is disposed above the driving unit. The mover includes a substrate and two transverse permanent magnets and two longitudinal permanent magnets disposed on the substrate. The substrate is made of resin. The two transverse permanent magnets are spaced apart in the transverse direction, and the two longitudinal permanent magnets are spaced apart in the longitudinal direction. The two transverse permanent magnets and the two longitudinal permanent magnets are perpendicular and staggered. The two transverse permanent magnets and the two longitudinal permanent magnets are respectively located above the corresponding gaps.

[0009] A limiting structure is provided on the stator and located on the periphery of the drive unit to limit the range of motion of the mover.

[0010] Preferably, the base is provided with a plurality of iron core groups, which are arranged on both sides of the corresponding gap, so that the position of the mover is fixed in a steady state.

[0011] Preferably, the stator includes a plurality of driving units, each driving unit is provided with a corresponding mover, and the limiting structure is provided on the periphery of each driving unit to limit the corresponding mover on each driving unit.

[0012] Preferably, the core assembly includes two spaced-apart cores, each core being elongated, and the transverse permanent magnet and the longitudinal permanent magnet being elongated. The short sides of the two cores in the same assembly are parallel to the long sides of the corresponding transverse permanent magnet / longitudinal permanent magnet.

[0013] Preferably, the core has dimensions of 1mm × 0.5mm × 0.5mm.

[0014] Preferably, the transverse permanent magnet is an out-of-plane magnetized NdFeB or SmCo rare earth permanent magnet.

[0015] Preferably, the longitudinal permanent magnet is an out-of-plane magnetized NdFeB or SmCo rare-earth permanent magnet.

[0016] Preferably, the dimensions of both the transverse permanent magnet and the longitudinal permanent magnet are 3mm × 1mm × 0.3mm.

[0017] Preferably, the substrate has dimensions of 7mm × 7mm × 1mm.

[0018] Preferably, the surfaces of both the transverse permanent magnet and the longitudinal permanent magnet are covered with a layer of resin.

[0019] Preferably, the metal coil has a line width of 0.15 mm, a depth of 0.035 mm, and a coil gap of 0.15 mm.

[0020] The electromagnetic miniature digital planar transmission device provided in this invention has at least one of the following technical effects:

[0021] By arranging two transverse permanent magnets spaced apart in the transverse direction and two longitudinal permanent magnets spaced apart in the longitudinal direction, with the two transverse and two longitudinal permanent magnets arranged perpendicularly and alternately, and then applying driving force to the two transverse and two longitudinal permanent magnets through four metal coils, symmetrical driving in two directions in the plane is achieved, which is easy to control. At the same time, the driving force density is increased, reducing the steady-state driving current to 0.5A, facilitating integration and heat dissipation, and making it convenient for application. Furthermore, by using a resin substrate, the total mass of the mover is reduced, thereby improving the response bandwidth.

[0022] Furthermore, by using NdFeB or SmCo rare-earth materials with high magnetic energy product to fabricate transverse and longitudinal permanent magnets, the total mass of the mover can be further reduced, effectively improving the response bandwidth. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the overall structure of an electromagnetic miniature digital planar transmission device provided in an embodiment of the present invention;

[0025] Figure 2 for Figure 1 Cross-sectional view at point A-A';

[0026] Figure 3 A schematic diagram of the moving part structure of an electromagnetic miniature digital planar transmission device provided in an embodiment of the present invention;

[0027] Figure 4 A schematic diagram of the stator structure of an electromagnetic miniature digital planar transmission device provided in an embodiment of the present invention;

[0028] The following are the labeling elements in the figure:

[0029] 100-Stator; 110-Base; 120-Drive unit; 121-Metal coil; 122-Gap; 123-Pad; 130-Core assembly; 131-Core;

[0030] 200 - Mover; 210 - Substrate; 220 - Lateral permanent magnet; 230 - Longitudinal permanent magnet;

[0031] 300-Limiting structure. Detailed Implementation

[0032] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain embodiments of the present invention, and should not be construed as limiting the present invention.

[0033] In the description of the embodiments of the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of the present invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0035] In the embodiments of the present invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention according to the specific circumstances.

[0036] In one embodiment of the present invention, such as Figures 1-2 As shown, an electromagnetic miniature digital planar transmission device is provided, including: a stator 100, a mover 200 and a limiting structure 300.

[0037] like Figure 3 As shown, the stator 100 includes a base 110 and a drive unit 120 disposed on the base 110. The base 110 is manufactured from a 0.6mm printed circuit board. The drive unit 120 includes four metal coils 121, which are symmetrically spaced and do not intersect each other, with a gap 122 formed between adjacent metal coils 121.

[0038] In this embodiment, the metal coil 121 has a linewidth of 0.15 mm, a depth of 0.035 mm, and a coil gap of 0.15 mm. Both ends of the metal coil 121 are provided with pads 123. Since the metal coil 121 is a planar coil, the outer end of the metal coil 121 is connected to one of the pads 123, and the inner end of the metal coil 121 is connected to the other pad 123. The coils are led out through PCB vias to avoid coil crossing. Figure 4 As shown at point B-B'.

[0039] like Figure 4 As shown, the mover 200 is disposed above the drive unit 120. The mover 200 includes a substrate 210 and two transverse permanent magnets 220 and two longitudinal permanent magnets 230 disposed on the substrate 210. The substrate 210 is made of resin to reduce the overall weight of the mover 200 and improve the response bandwidth to 1kHz. Furthermore, the surfaces of the transverse permanent magnets 220 and the longitudinal permanent magnets 230 are covered with a 0.2mm thick layer of resin to serve as an air gap between the mover 200 and the stator 100. The two transverse permanent magnets 220 are spaced apart in the transverse direction, and the two longitudinal permanent magnets 230 are spaced apart in the longitudinal direction. The two transverse permanent magnets 220 and the two longitudinal permanent magnets 230 are arranged perpendicularly and alternately, so that the four are combined to form a cross shape with a hollow center and located in the middle of the substrate 210. The two horizontal permanent magnets 220 and the two vertical permanent magnets 230 are respectively located above the corresponding gaps 122. The metal coils 121 on both sides of each gap 122 are concentrated below the corresponding horizontal permanent magnets 220 or vertical permanent magnets 230 to make full use of the magnetic field.

[0040] In this embodiment, the substrate 210 is square, with dimensions of 7mm × 7mm × 1mm. The lateral permanent magnet 220 and the longitudinal permanent magnet 230 are cuboids, arranged along the lateral and vertical axes of symmetry of the substrate 210. Both the lateral permanent magnet 220 and the longitudinal permanent magnet 230 are out-of-plane magnetized NdFeB or SmCo rare-earth permanent magnets. By using NdFeB or SmCo rare-earth materials with high energy product to fabricate the lateral permanent magnet 220 and the longitudinal permanent magnet 230, the total mass of the mover 200 can be further reduced, effectively improving the response bandwidth. The dimensions of both the lateral permanent magnet 220 and the longitudinal permanent magnet 230 are 3mm × 1mm × 0.3mm.

[0041] The limiting structure 300 is disposed on the stator 100 and located on the periphery of the drive unit 120 to limit the range of motion of the mover 200, such that the maximum horizontal stroke of the mover 200 is 0.2 mm. The height of the mover 200 is higher than the height of the limiting structure 300.

[0042] By combining the two lateral permanent magnets 220 and the two longitudinal permanent magnets 230 into a centrally hollowed-out "+" shape and placing it in the middle of the substrate 210, and applying driving force to the two lateral permanent magnets 220 and the two longitudinal permanent magnets 230 through the four metal coils 121, symmetrical driving in two directions in the plane is achieved, which is easy to control. At the same time, the driving force density is improved, and the steady-state driving current can be reduced to 0.5A, which is easy to integrate and dissipate heat, making it convenient for application. Furthermore, by using resin material to make the substrate 210, the overall mass of the mover 200 can be effectively reduced, and the response bandwidth can be increased to 1kHz.

[0043] In another embodiment of the invention, such as Figure 4 As shown, the base 110 is provided with multiple iron core groups 130, which are disposed on both sides of the corresponding gaps 122 to fix the position of the mover 200 in a steady state. Each iron core group 130 includes two spaced-apart iron cores 131, which are elongated strips. The transverse permanent magnet 220 and the longitudinal permanent magnet 230 are also elongated strips. The short sides of the two iron cores 131 in the same group are parallel to the long sides of the corresponding transverse permanent magnet 220 / longitudinal permanent magnet 230. In this embodiment, the dimensions of the iron core 131 are 1mm × 0.5mm × 0.5mm.

[0044] In another embodiment of the invention, such as Figure 1As shown, the stator 100 includes a plurality of driving units 120, each driving unit 120 having a corresponding mover 200; the limiting structure 300 is disposed on the periphery of each driving unit 120 to limit the corresponding mover 200 on each driving unit 120. The base 110 is square, and the driving units 120 are also square. There are sixteen driving units 120, which are evenly spaced in a 4×4 matrix on the base 110. Correspondingly, the metal coils 121 are also wound into squares, with the four metal coils 121 on each driving unit 120 arranged in a 2×2 matrix with even spacing.

[0045] A simulation model was built and analyzed using Ansys Electronics Desktop. The counter-clockwise energizing direction of the metal coil 121 was defined as positive, and the magnetization direction of the magnet was perpendicular to the paper and inwards. The four metal coils 121 were further divided into coil I, coil II, coil III, and coil IV, as follows: Figure 4 As shown.

[0046] If a driving current of 0.5A is applied, the Lorentz force generated by each of the metal coils 121 on the mover 200 is as follows:

[0047]

[0048] To generate a +X direction drive, coil I is supplied with -0.5A, coil II with +0.5A, coil III with +0.5A, and coil IV with -0.5A. The forces in the Y direction will cancel each other out, and a total driving force of 1.6mN will be generated in the X direction.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An electromagnetic miniature digital planar transmission device, characterized in that, include: The stator includes a base and a drive unit disposed on the base. The drive unit includes four metal coils, which are symmetrically spaced and do not intersect each other, with gaps between adjacent metal coils. The mover is disposed above the drive unit and includes a substrate and two transverse permanent magnets and two longitudinal permanent magnets disposed on the substrate. The substrate is made of resin. The two transverse permanent magnets are spaced apart in the transverse direction, and the two longitudinal permanent magnets are spaced apart in the longitudinal direction. The two transverse and two longitudinal permanent magnets are perpendicular and staggered, and are respectively located above the corresponding gaps. A limiting structure is disposed on the stator and located around the drive unit to limit the range of motion of the mover. Each drive unit has a corresponding mover, and the limiting structure is disposed around each drive unit to limit the corresponding mover on each drive unit. The base is made of a printed circuit board, and solder pads are provided at both ends of the metal coils.

2. The electromagnetic miniature digital planar transmission device according to claim 1, characterized in that, The base is provided with multiple iron core assemblies, which are arranged on both sides of the corresponding gaps to fix the position of the mover in a steady state.

3. The electromagnetic miniature digital planar transmission device according to claim 2, characterized in that, The core assembly includes two spaced-apart cores, each core being elongated. The transverse permanent magnet and the longitudinal permanent magnet are also elongated. The short sides of the two cores in the same assembly are parallel to the long sides of the corresponding transverse or longitudinal permanent magnet.

4. The electromagnetic miniature digital planar transmission device according to claim 1, characterized in that, The lateral permanent magnet is an out-of-plane magnetized NdFeB or SmCo rare earth permanent magnet.

5. The electromagnetic miniature digital planar transmission device according to claim 1, characterized in that, The longitudinal permanent magnet is an out-of-plane magnetized NdFeB or SmCo rare earth permanent magnet.

6. The electromagnetic miniature digital planar transmission device according to claim 1, characterized in that, The surfaces of both the transverse permanent magnet and the longitudinal permanent magnet are covered with a layer of resin.

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