Haptic reproduction device, method, display apparatus and controller

Abstract

The present disclosure provides a haptic reproduction device, a method, a display device, and a controller. The haptic reproduction device includes a substrate, a first driver disposed on the substrate and configured to vibrate and induce the substrate to vibrate upon receiving a first driving signal, a vibration sensor disposed on the substrate and configured to generate a first detection voltage signal according to an amplitude or a frequency at which the first driver vibrates together with the substrate in a case where the substrate vibrates, and a controller configured to output the first driving signal to the first driver, and receive the first detection voltage signal and adjust the first driving signal according to the first detection voltage signal.

Description

Technical Field

[0001] This disclosure relates to the field of tactile reproduction technology, and in particular to a tactile reproduction device, method, display device, and controller. Background Technology

[0002] The main modes of human sensing systems include vision, hearing, and touch. Currently, the methods for sensing and presenting vision and hearing are relatively mature. For example, cameras and video cameras simulate human image acquisition, and displays and other display devices are used to present these images. Silicon microphones, electret microphones, and piezoelectric microphones are used to simulate human sound signal acquisition from the environment. Headphones and speakers based on various principles such as electrostatics, dynamic coils, and piezoelectricity are used to present a variety of beautiful sounds to humans.

[0003] Tactile systems are relatively complex in their mechanisms, involving the human body's perception of various physical signals from the environment, such as mechanical, temperature, chemical, and humidity signals. Research and industrialization in this field have been relatively recent. With the large-scale application of touchscreens, from early resistive touchscreens to current capacitive touchscreens, and the demands of applications such as virtual reality, there is an urgent need for tactile perception and reproduction. The primary tactile reproduction method in related technologies is vibration feedback, which stimulates the human body through the vibration of the contact surface. Surface tactile reproduction, by simulating the characteristics of objects on the contact surface, allows the human body to experience a more realistic tactile sensation, enabling efficient and natural interactive effects in multimedia terminals. Summary of the Invention

[0004] According to one aspect of the present disclosure, a tactile reproduction device is provided, comprising: a substrate; a first driver disposed on the substrate and configured to vibrate and drive the substrate to vibrate upon receiving a first drive signal; a vibration sensor disposed on the substrate and configured to generate a first detection voltage signal based on the amplitude or frequency of the vibration of the first driver together with the substrate when the substrate vibrates; and a controller configured to output the first drive signal to the first driver, receive the first detection voltage signal, and adjust the first drive signal based on the first detection voltage signal.

[0005] In some embodiments, the controller is configured to decrease the amplitude or duty cycle of the first drive signal when the first detected voltage signal is greater than a threshold, or to increase the amplitude or duty cycle of the first drive signal when the first detected voltage signal is less than the threshold.

[0006] In some embodiments, the vibration sensor includes an accelerometer, a velocity sensor, or a displacement sensor.

[0007] In some embodiments, the accelerometer includes at least one of a piezoelectric accelerometer, a capacitive comb accelerometer, a bulk silicon capacitive accelerometer, and a piezoresistive accelerometer.

[0008] In some embodiments, the piezoelectric accelerometer includes: a first bottom electrode on the substrate; a first portion of the substrate below the first bottom electrode, wherein the first portion includes a recess on a side away from the first bottom electrode and a mass block surrounded by the recess, wherein the thickness of the portion of the first portion at the bottom of the recess in a direction perpendicular to the substrate is less than the thickness of the mass block in a direction perpendicular to the substrate; a first piezoelectric thin film layer on the side of the first bottom electrode away from the substrate; and a first top electrode on the side of the first piezoelectric thin film layer away from the substrate; wherein the first bottom electrode and the first top electrode are electrically connected to the controller, and the orthographic projection of the recess on the substrate at least partially overlaps the orthographic projection of the first piezoelectric thin film layer on the substrate.

[0009] In some embodiments, the piezoelectric accelerometer further includes: a first lead electrode electrically connected to the first bottom electrode; and a second lead electrode electrically connected to the first top electrode; wherein the first bottom electrode is electrically connected to the controller via the first lead electrode, and the first top electrode is electrically connected to the controller via the second lead electrode.

[0010] In some embodiments, the shape of the recess, viewed from an angle perpendicular to the substrate, includes a circular ring, a square ring, or a hexagonal ring.

[0011] In some embodiments, the first bottom electrode includes a plurality of first sub-bottom electrodes, which are electrically connected to each other; the recess includes a plurality of sub-recesses, the mass block includes a plurality of sub-mass blocks, wherein the plurality of sub-mass blocks are surrounded by the plurality of sub-recesses in a one-to-one correspondence, and the plurality of sub-recesses are located below the plurality of first sub-bottom electrodes in a one-to-one correspondence; the first piezoelectric thin film layer includes a plurality of first sub-piezoelectric thin film layers, which are located on the side of the plurality of first sub-bottom electrodes away from the substrate in a one-to-one correspondence; the first top electrode includes a plurality of first sub-top electrodes, which are located on the side of the plurality of first sub-piezoelectric thin film layers away from the substrate in a one-to-one correspondence.

[0012] In some embodiments, the first driver includes: a second bottom electrode on the substrate; a second portion of the substrate below the second bottom electrode; a second piezoelectric thin film layer on the side of the second bottom electrode away from the substrate; and a second top electrode on the side of the second piezoelectric thin film layer away from the substrate; wherein the second bottom electrode and the second top electrode are electrically connected to the controller.

[0013] In some embodiments, the first driver further includes: a third lead electrode electrically connected to the second bottom electrode; and a fourth lead electrode electrically connected to the second top electrode; wherein the second bottom electrode is electrically connected to the controller through the third lead electrode, and the second top electrode is electrically connected to the controller through the fourth lead electrode.

[0014] In some embodiments, the material of the first bottom electrode is the same as the material of the second bottom electrode; the material of the first piezoelectric thin film layer is the same as the material of the second piezoelectric thin film layer; and the material of the first top electrode is the same as the material of the second top electrode.

[0015] In some embodiments, the second piezoelectric thin film layer includes a plurality of second sub-piezoelectric thin film layers, which are spaced apart from each other and arranged along the extension direction of the second bottom electrode.

[0016] In some embodiments, the first driver includes a plurality of first drivers arranged on the substrate along a first direction; the vibration sensor includes a plurality of vibration sensors arranged on the substrate along a second direction; wherein the first direction is perpendicular to the second direction.

[0017] In some embodiments, the tactile reproduction device further includes: a piezoelectric transformer disposed on the substrate and electrically connected between the controller and the first driver, configured to receive the first drive signal from the controller, amplify the first drive signal, and output the amplified first drive signal to the first driver to drive the first driver to vibrate.

[0018] In some embodiments, the tactile reproduction device further includes: a second driver disposed on the substrate and configured to vibrate and drive the substrate to vibrate upon receiving a second driving signal, wherein the vibration frequency of the second driver is lower than the vibration frequency of the first driver; wherein the vibration sensor is further configured to generate a second detection voltage signal based on the amplitude or frequency of the vibration of the second driver together with the substrate when the substrate vibrates; the controller is further configured to output the second driving signal to the second driver, and to receive the second detection voltage signal and adjust the second driving signal based on the second detection voltage signal.

[0019] According to another aspect of the present disclosure, a display device is provided, including: the tactile reproduction device as described above.

[0020] According to another aspect of the present disclosure, a tactile reproduction method is provided, comprising: outputting a first driving signal to a first driver disposed on a substrate to cause the first driver to vibrate and drive the substrate to vibrate; generating a first detection voltage signal based on the amplitude or frequency of the vibration of the first driver and the substrate using a vibration sensor disposed on the substrate when the substrate vibrates; and adjusting the first driving signal based on the first detection voltage signal.

[0021] In some embodiments, the step of adjusting the first driving signal according to the first detected voltage signal includes: reducing the amplitude or duty cycle of the first driving signal when the first detected voltage signal is greater than a threshold; or increasing the amplitude or duty cycle of the first driving signal when the first detected voltage signal is less than the threshold.

[0022] According to another aspect of the present disclosure, a controller is provided, including: a memory; and a processor coupled to the memory, the processor being configured to perform the method as described above based on instructions stored in the memory.

[0023] According to another aspect of the present disclosure, a non-transitory computer-readable storage medium is provided, having stored thereon computer program instructions that, when executed by a processor, implement the method described above.

[0024] Other features and advantages of this disclosure will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0025] The accompanying drawings, which form part of this specification, illustrate embodiments of this disclosure and, together with the specification, serve to explain the principles of this disclosure.

[0026] This disclosure will become clearer with reference to the accompanying drawings and the following detailed description, wherein:

[0027] Figure 1 This is a schematic diagram illustrating the structure of a tactile reproduction device according to an embodiment of the present disclosure;

[0028] Figure 2 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure;

[0029] Figure 3 This is a schematic cross-sectional view of a vibration sensor according to an embodiment of the present disclosure;

[0030] Figure 4 This is a schematic cross-sectional view showing a first driver according to an embodiment of the present disclosure;

[0031] Figure 5 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure;

[0032] Figure 6 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure;

[0033] Figure 7 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure;

[0034] Figure 8 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure;

[0035] Figure 9 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure;

[0036] Figure 10 This is a flowchart illustrating a tactile reproduction method according to an embodiment of the present disclosure;

[0037] Figure 11 This is a schematic diagram illustrating the structure of a controller according to an embodiment of the present disclosure;

[0038] Figure 12 This is a graph showing the relationship between acceleration and output voltage of a piezoelectric accelerometer according to an embodiment of the present disclosure under static loading acceleration load.

[0039] It should be understood that the dimensions of the various parts shown in the accompanying drawings are not necessarily drawn to actual scale. Furthermore, the same or similar reference numerals denote the same or similar components. Detailed Implementation

[0040] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. The descriptions of the exemplary embodiments are merely illustrative and are in no way intended to limit the present disclosure or its application or use. The present disclosure may be implemented in many different forms and is not limited to the embodiments described herein. These embodiments are provided so that the present disclosure will be thorough and complete, and will fully express the scope of the disclosure to those skilled in the art. It should be noted that, unless specifically stated otherwise, the relative arrangement of components and steps, the composition of materials, numerical expressions, and values ​​set forth in these embodiments should be interpreted as exemplary only and not as limiting.

[0041] The terms "first," "second," and similar words used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different parts. Words such as "including" or "contains" mean that the element preceding the word encompasses the element listed after it, and do not exclude the possibility of encompassing other elements as well. Terms such as "above," "below," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, this relative positional relationship may also change accordingly.

[0042] In this disclosure, when a specific device is described as being located between a first device and a second device, an intermediary device may or may not be present between the specific device and the first or second device. When a specific device is described as being connected to other devices, the specific device may be directly connected to the other devices without an intermediary device, or it may be not directly connected to the other devices but have an intermediary device.

[0043] All terms used in this disclosure (including technical or scientific terms) have the same meaning as understood by one of ordinary skill in the art to which this disclosure pertains, unless otherwise specifically defined. It should also be understood that terms defined in a general dictionary, such as a dictionary, should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and not as having an idealized or highly formalized meaning, unless expressly defined herein.

[0044] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0045] Figure 1 This is a schematic diagram illustrating the structure of a tactile reproduction device according to an embodiment of the present disclosure.

[0046] like Figure 1 As shown, the tactile reproduction device includes a substrate 11. For example, the substrate 11 is a glass substrate.

[0047] The tactile reproduction device also includes a first driver 20. The first driver 20 is disposed on the substrate 11. The first driver 20 is configured to vibrate and drive the substrate 11 to vibrate upon receiving a first drive signal.

[0048] The tactile reproduction device also includes a vibration sensor 30. The vibration sensor 30 is disposed on the substrate 11. The vibration sensor 30 is configured to generate a first detection voltage signal based on the amplitude or frequency of the vibration of the first driver 20 together with the substrate 11 when the substrate 11 vibrates.

[0049] In some embodiments, the vibration sensor includes an accelerometer, a velocity sensor, or a displacement sensor.

[0050] For example, the accelerometer includes at least one of a piezoelectric accelerometer, a capacitive comb accelerometer, a bulk silicon capacitive accelerometer, and a piezoresistive accelerometer. For example, the velocity sensor includes at least one of a laser velocity sensor and a linear velocity sensor. For example, the displacement sensor includes at least one of a capacitive displacement sensor and an eddy current displacement sensor.

[0051] The tactile reproduction device also includes a controller 40. The controller 40 is configured to output a first drive signal to the first driver 20, and to receive a first detection voltage signal, and adjust the first drive signal according to the first detection voltage signal.

[0052] Thus, a tactile reproduction device according to some embodiments of the present disclosure is provided. The tactile reproduction device includes: a substrate; a first driver disposed on the substrate and configured to vibrate and drive the substrate to vibrate upon receiving a first drive signal; a vibration sensor disposed on the substrate and configured to generate a first detection voltage signal based on the amplitude or frequency of the vibration of the first driver and the substrate together when the substrate vibrates; and a controller configured to output the first drive signal to the first driver, receive the first detection voltage signal, and adjust the first drive signal based on the first detection voltage signal. This optimizes the first drive signal so that when the first drive signal causes the first driver to vibrate the substrate, the first driver-substrate resonator operates in a stable state, thereby providing the user with a stable tactile experience.

[0053] For example, the controller 20 is configured to decrease the amplitude or duty cycle of the first drive signal when the first detected voltage signal is greater than a threshold (which may be referred to as the first threshold), or to increase the amplitude or duty cycle of the first drive signal when the first detected voltage signal is less than the threshold. This optimizes the first drive signal so that when the first drive signal causes the first driver to vibrate the substrate, the first driver-substrate resonator operates in a stable state, thereby providing the user with a stable tactile experience.

[0054] It should be noted that the above threshold can be preset according to actual needs or circumstances. For example, it can be preset based on different device structures, different screens (the screen on which the substrate is located), or the surface conditions of different objects displayed on the screen, or it can be set using training methods.

[0055] Figure 2 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure.

[0056] like Figure 2 As shown, the tactile reproduction device includes a base station 11, a first driver 20, a vibration sensor 30, and a controller 40. Figure 2 (Not shown in the image).

[0057] In some embodiments, such as Figure 2 As shown, the first driver 20 includes a plurality of first drivers 21 and 22. These plurality of first drivers 21 and 22 are arranged on the substrate 11 along a first direction. In some embodiments, as... Figure 2 As shown, the vibration sensor 30 includes a plurality of vibration sensors 31 and 32. These plurality of vibration sensors 31 and 32 are arranged on the substrate 11 along a second direction. The first direction is perpendicular to the second direction. For example, the first direction is the transverse direction of the substrate, and the second direction is the longitudinal direction of the substrate.

[0058] The first driver 20 and the vibration sensor 30 are located near different edges of the substrate. For example, Figure 2 As shown, a first driver 21 is located near the left edge of the substrate, another first driver 22 is located near the right edge of the substrate, a vibration sensor 31 is located near the lower edge of the substrate, and another vibration sensor 32 is located near the upper edge of the substrate. By placing the first drivers 20 and vibration sensors 30 near the edges of the substrate, the placement of other functional devices (such as devices with display functions) in the middle part of the substrate can be avoided.

[0059] It should be noted that, although Figure 2 The illustration shows two rows of first actuators; however, the scope of this disclosure is not limited thereto. For example, one or more rows of first actuators may be provided on the substrate. Furthermore, multiple rows of first actuators may be arranged in a two-dimensional distribution. Moreover, one or more vibration sensors may also be provided on the substrate.

[0060] Figure 3 This is a schematic cross-sectional view showing a vibration sensor according to an embodiment of the present disclosure. The vibration sensor is a piezoelectric accelerometer. The following is in conjunction with... Figure 2 and Figure 3 The structure of a piezoelectric accelerometer according to some embodiments of the present disclosure is described in detail.

[0061] like Figure 2 and 3 As shown, the piezoelectric accelerometer includes a first bottom electrode 301 on a substrate 11.

[0062] like Figure 2 and 3As shown, the piezoelectric accelerometer also includes a first portion 111 of a substrate 11 below the first bottom electrode. Here, the first portion 111 of the substrate is also part of the piezoelectric accelerometer. The first portion 111 includes a recess 101 on the side away from the first bottom electrode 301 and a mass block 102 surrounded by the recess 101. The thickness H1 of the portion of the first portion 111 at the bottom of the recess 101 in the direction perpendicular to the substrate is less than the thickness H2 of the mass block 102 in the direction perpendicular to the substrate. This recess makes the portion of the substrate at the bottom of the recess thin-film. This recess can be formed by a process of local etching on the back side of the substrate.

[0063] Viewed from a angle perpendicular to the substrate, the recess 101 is circular or annular in shape. However, the scope of this disclosure is not limited to this; viewed from a angle perpendicular to the substrate, the recess can also be other shapes, such as a square or hexagonal annular shape, etc., which will be discussed later in conjunction with other appendices. Figure 6 and 7 Detailed description.

[0064] like Figure 2 and 3 As shown, the piezoelectric accelerometer also includes a first piezoelectric thin film layer 302 on the side of the first bottom electrode 301 away from the substrate. For example, the material of the first piezoelectric thin film layer includes PZT (lead zirconate titanate piezoelectric ceramics).

[0065] like Figure 2 and 3 As shown, the piezoelectric accelerometer also includes a first top electrode 303 on the side of the first piezoelectric thin film layer 302 away from the substrate 11.

[0066] The first bottom electrode 301 and the first top electrode 303 are electrically connected to the controller. The orthographic projection of the recess 101 on the substrate 11 at least partially overlaps with the orthographic projection of the first piezoelectric thin film layer 302 on the substrate 11.

[0067] This piezoelectric accelerometer utilizes the positive piezoelectric effect of piezoelectric materials, whereby the piezoelectric material generates an electrical signal (as a first detection voltage signal) under mechanical action and outputs this electrical signal to the controller. This piezoelectric accelerometer is used to detect the vibration acceleration value when a glass substrate vibrates.

[0068] It should be noted that although a piezoelectric accelerometer is used here, those skilled in the art will understand that accelerometers based on other principles can also be used.

[0069] In some embodiments, the resonant frequency of the piezoelectric accelerometer is from 20 Hz to 100 kHz. For example, from Figure 12It can be seen that at a resonant frequency of 10000Hz, under a static loading acceleration of 0–100g (where g represents gravitational acceleration), the output voltage value is linearly correlated with the loading acceleration. Therefore, a piezoelectric accelerometer can be used to obtain the detection voltage signal.

[0070] In some embodiments, such as Figure 2 As shown, the piezoelectric accelerometer (i.e., vibration sensor 30) also includes a first lead-out electrode 304 electrically connected to the first bottom electrode 301 and a second lead-out electrode 305 electrically connected to the first top electrode 303. The first bottom electrode 301 is electrically connected to the controller via the first lead-out electrode 304. Figure 2 (Not shown in the image), the first top electrode 303 is electrically connected to the controller via the second lead electrode 305. This achieves the electrical connection between the piezoelectric accelerometer and the controller.

[0071] Figure 4 This is a schematic cross-sectional view showing a first actuator according to an embodiment of the present disclosure. For example, the first actuator is a piezoelectric thin film actuator.

[0072] like Figure 2 and Figure 4 As shown, the first actuator includes a second bottom electrode 201 on a substrate 11. The first actuator also includes a second portion 112 of the substrate 11 below the second bottom electrode 201. Here, the second portion 112 of the substrate also serves as part of a piezoelectric accelerometer. The first actuator also includes a second piezoelectric thin film layer 202 on the substrate-remote side of the second bottom electrode 201. For example, the material of this second piezoelectric thin film layer includes PZT, etc. The first actuator also includes a second top electrode 203 on the substrate-remote side of the second piezoelectric thin film layer 202. The second bottom electrode 201 and the second top electrode 203 are electrically connected to a controller (…). Figure 2 and Figure 4 (Not shown in the image).

[0073] The first actuator utilizes the inverse piezoelectric effect of piezoelectric materials, that is, the piezoelectric material generates mechanical action under the action of an electrical signal. This first actuator is used to drive the substrate to vibrate under the influence of an electrical signal, thereby producing a tactile feedback effect.

[0074] In some embodiments, the material of the first bottom electrode 301 is the same as that of the second bottom electrode 201, the material of the first piezoelectric thin film layer 302 is the same as that of the second piezoelectric thin film layer 202, and the material of the first top electrode 303 is the same as that of the second top electrode 203. This facilitates the manufacture of tactile reproduction devices.

[0075] For example, a bottom electrode material layer (as a seed layer) can be formed on a substrate, and then a patterning process can be performed on the bottom electrode material layer to form a first bottom electrode 301 and a second bottom electrode 201. Next, a piezoelectric thin film layer is formed on the first bottom electrode 301, the second bottom electrode 201, and the substrate, and then a patterning process is performed on the piezoelectric thin film layer to form a first piezoelectric thin film layer 302 and a second piezoelectric thin film layer 202. Next, a top electrode material layer is formed on the first piezoelectric thin film layer 302, the second piezoelectric thin film layer 202, and the substrate, and then a patterning process is performed on the top electrode material layer to form a first top electrode 303 and a second top electrode 203. Next, the back side of the substrate below the first bottom electrode 301 is etched to form a recess, which isolates the mass block from the surrounding substrate area. This forms a first actuator and a piezoelectric accelerometer. This manufacturing process enables process compatibility between the piezoelectric accelerometer and the piezoelectric thin film actuator.

[0076] In the above description, the first actuator uses a piezoelectric thin film layer; however, those skilled in the art will understand that the first actuator can also use other structural layers, such as piezoelectric ceramic sheets.

[0077] In some embodiments, such as Figure 2 As shown, the second piezoelectric thin film layer 202 includes a plurality of second sub-piezoelectric thin film layers 2021, 2022, and 2023. These plurality of second sub-piezoelectric thin film layers 2021, 2022, and 2023 are spaced apart from each other and arranged along the extending direction of the second bottom electrode 201. For example, as... Figure 2 As shown, multiple second sub-piezoelectric thin film layers 2021, 2022, and 2023 are arranged along a second direction (e.g., the longitudinal direction of the substrate). By configuring the second piezoelectric thin film layers as multiple second sub-piezoelectric thin film layers, a finer vibration mode can be provided when the first actuator vibrates, thereby facilitating the realization of tactile reproduction function.

[0078] In some embodiments, such as Figure 2 As shown, the first driver 20 further includes a third lead-out electrode 204 electrically connected to the second bottom electrode 201, and a fourth lead-out electrode 205 electrically connected to the second top electrode 203. The second bottom electrode 201 is electrically connected to the controller via the third lead-out electrode 204, and the second top electrode 203 is electrically connected to the controller via the fourth lead-out electrode 205. This achieves the electrical connection between the first driver and the controller.

[0079] In the tactile reproduction device described in the preceding embodiments, the vibration sensor includes multiple vibration sensors; however, the scope of this disclosure is not limited thereto. For example, as Figure 5 As shown, the vibration sensor includes a vibration sensor, that is, a vibration sensor is disposed on the substrate.

[0080] Figure 6 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure. Figure 6 As shown, viewed from a angle perpendicular to the substrate 11, the recess 121 of the piezoelectric accelerometer (as a vibration sensor) 33 is a square ring, and the mass block 122 is also square.

[0081] Figure 7 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure. Figure 7 As shown, viewed from a angle perpendicular to the substrate 11, the recess 131 of the piezoelectric accelerometer (as a vibration sensor) 34 is hexagonal and the mass block 132 is also hexagonal.

[0082] Of course, the shapes of the above-described recesses and mass blocks are merely exemplary, and the scope of this disclosure is not limited thereto.

[0083] Figure 8 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure.

[0084] like Figure 8 As shown, multiple (e.g., two) piezoelectric accelerometers are disposed on the edge of the substrate 11, and these multiple piezoelectric accelerometers are designed together to improve detection sensitivity.

[0085] like Figure 8 As shown, the first bottom electrode 301 includes a plurality of first sub-bottom electrodes 3011 and 3012. The plurality of first sub-bottom electrodes 3011 and 3012 are electrically connected to each other.

[0086] like Figure 8 As shown, in this piezoelectric accelerometer, the recess 141 includes a plurality of sub-recesses 1411 and 1412. The mass block 142 includes a plurality of sub-mass blocks 1421 and 1422. The plurality of sub-mass blocks 1421 and 1422 are surrounded by the plurality of sub-recesses 1411 and 1412 in a one-to-one correspondence. For example, sub-mass block 1421 is surrounded by sub-recesses 1411, and sub-mass block 1422 is surrounded by sub-recesses 1412. The plurality of sub-recesses 1411 and 1412 are located below the plurality of first sub-bottom electrodes 3011 and 3012 in a one-to-one correspondence. For example, sub-recesses 1411 are located below the first sub-bottom electrode 3011, and sub-recesses 1412 are located below the first sub-bottom electrode 3012.

[0087] like Figure 8As shown, the first piezoelectric thin film layer 302 includes a plurality of first sub-piezoelectric thin film layers 3021 and 3022. These plurality of first sub-piezoelectric thin film layers 3021 and 3022 are located one-to-one with the plurality of first sub-bottom electrodes 3011 and 3012 on the side away from the substrate 11. For example, the first sub-piezoelectric thin film layer 3021 is located on the side of the first sub-bottom electrode 3011 away from the substrate 11, and the first sub-piezoelectric thin film layer 3022 is located on the side of the first sub-bottom electrode 3012 away from the substrate 11.

[0088] like Figure 8 As shown, the first top electrode 303 includes a plurality of first sub-top electrodes 3031 and 3032. These plurality of first sub-top electrodes 3031 and 3032 are located one-to-one on the side of the plurality of first sub-piezoelectric thin film layers 3021 and 3022 away from the substrate 11. For example, the first sub-top electrode 3031 is located on the side of the first sub-piezoelectric thin film layer 3021 away from the substrate 11, and the first sub-top electrode 3032 is located on the side of the first sub-piezoelectric thin film layer 3022 away from the substrate 11.

[0089] In the above embodiments, two piezoelectric accelerometers are integrated together. However, those skilled in the art will understand that in order to improve detection sensitivity, more piezoelectric accelerometers can be integrated together. Therefore, the scope of the embodiments disclosed herein is not limited to this.

[0090] In the embodiments of this disclosure, a vibration sensor is integrated into the tactile reproduction device. The vibration sensor measures the amplitude or frequency of the first driver-substrate resonator. The controller adjusts the drive signal based on the amplitude or frequency of the first driver-substrate resonator, thereby controlling the first driver-substrate resonator to work in a stable state and providing the user with a stable tactile experience.

[0091] Figure 9 This is a schematic diagram illustrating the structure of a tactile reproduction device according to another embodiment of the present disclosure.

[0092] like Figure 9 As shown, the tactile reproduction device includes a substrate 11, a first driver 20, a vibration sensor 30, and a controller 40, as well as a second driver 50.

[0093] The second driver 50 is disposed on the substrate 11. The second driver 50 is configured to vibrate and drive the substrate to vibrate upon receiving a second drive signal. Here, the vibration frequency of the second driver 50 is lower than the vibration frequency of the first driver 20. For example, the second driver 50 may include an eccentric rotor and / or a linear motor, etc.

[0094] The vibration sensor 30 is also configured to generate a second detection voltage signal based on the amplitude or frequency of the vibration of the second driver 50 together with the substrate 11 in the event of substrate vibration.

[0095] The controller 40 is also configured to output a second drive signal to the second driver 50, and to receive a second detection voltage signal, and adjust the second drive signal according to the second detection voltage signal. For example, the controller 20 is also configured to decrease the amplitude or duty cycle of the second drive signal when the second detection voltage signal is greater than a second threshold, or to increase the amplitude or duty cycle of the second drive signal when the second detection voltage signal is less than the second threshold.

[0096] In the tactile reproduction device of the above embodiment, a first driver with a relatively high vibration frequency and a second driver with a relatively low vibration frequency are also provided on the substrate. In this way, the first driver uses the pressure film effect of high-frequency vibration to generate a touch boundary effect, and the second driver uses the low-frequency vibration to generate effects such as pressing, tapping, and warning, thereby improving the tactile experience.

[0097] In other embodiments, the second driver may be omitted, and a low-frequency vibration tactile feedback effect may be generated by loading a low-frequency signal onto the first driver.

[0098] In some embodiments, such as Figure 9 As shown, the tactile reproduction device also includes a piezoelectric transformer 60. The piezoelectric transformer 60 is disposed on the substrate 11. The piezoelectric transformer 60 is electrically connected between the controller 40 and the first driver 20. The piezoelectric transformer 60 is configured to receive a first drive signal from the controller 40, amplify the first drive signal, and output the amplified first drive signal to the first driver 20 to drive the first driver to vibrate. Of course, those skilled in the art will understand that the piezoelectric transformer can also be integrated into the controller.

[0099] In the embodiments of this disclosure, the tactile reproduction device described above can be applied to consumer electronics products (e.g., laptop virtual buttons, touchpads), automotive central control systems, indoor and outdoor advertising displays, hospitals, and so on.

[0100] In some embodiments of this disclosure, a display device is also provided, which includes the tactile reproduction device as described above. For example, the display device can be a mobile phone, laptop computer, tablet computer, automotive center console display screen, indoor / outdoor advertising display screen, etc. Such a display device can perform both display and tactile reproduction functions.

[0101] Figure 10 This is a flowchart illustrating a tactile reproduction method according to an embodiment of the present disclosure. Figure 10 As shown, the tactile reproduction method includes steps S1002 to S1006.

[0102] In step S1002, a first drive signal is output to a first driver disposed on the substrate, so that the first driver vibrates and drives the substrate to vibrate.

[0103] In step S1004, when the substrate vibrates, a first detection voltage signal is generated by a vibration sensor provided on the substrate based on the amplitude or frequency of the vibration of the first driver together with the substrate.

[0104] In step S1006, the first drive signal is adjusted according to the first detection voltage signal.

[0105] In some embodiments, step S1006 includes: reducing the amplitude or duty cycle of the first driving signal when the first detected voltage signal is greater than a threshold; or increasing the amplitude or duty cycle of the first driving signal when the first detected voltage signal is less than a threshold.

[0106] Thus, a tactile reproduction method according to some embodiments of the present disclosure is provided. The tactile reproduction method includes: outputting a first driving signal to a first driver to cause the first driver to vibrate and drive a substrate to vibrate; generating a first detection voltage signal using a vibration sensor based on the amplitude or frequency of the vibration of the first driver and the substrate together when the substrate vibrates; and adjusting the first driving signal based on the first detection voltage signal. This optimizes the first driving signal so that when the first driving signal causes the first driver to vibrate the substrate, the first driver-substrate resonator operates in a stable state, thereby providing the user with a stable tactile experience.

[0107] Figure 11 This is a schematic diagram illustrating the structure of a controller according to an embodiment of the present disclosure. The controller includes a memory 410 and a processor 420. Wherein:

[0108] The memory 410 can be a disk, flash memory, or any other non-volatile storage medium. The memory is used for storing... Figure 10 The instructions in the corresponding embodiment.

[0109] Processor 420 is coupled to memory 410 and can be implemented as one or more integrated circuits, such as a microprocessor or microcontroller. Processor 420 executes instructions stored in memory to cause the first driver-substrate resonator to operate in a stable state, thereby providing the user with a stable tactile experience.

[0110] In another embodiment, this disclosure also provides a non-transitory computer-readable storage medium having stored thereon computer program instructions that are implemented when executed by a processor. Figure 10The steps of the method in the corresponding embodiments are described. Those skilled in the art will understand that embodiments of this disclosure can be provided as methods, apparatus, or computer program products. Therefore, this disclosure can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this disclosure can take the form of a computer program product embodied on one or more computer-usable non-transitory storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0111] This disclosure is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this disclosure. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create a machine for implementing the flowchart illustrations. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0112] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0113] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0114] The embodiments of this disclosure have now been described in detail. To avoid obscuring the concept of this disclosure, some details known in the art have not been described. Those skilled in the art can fully understand how to implement the technical solutions disclosed herein based on the above description.

[0115] While specific embodiments of this disclosure have been described in detail by way of examples, those skilled in the art should understand that the examples are for illustrative purposes only and not intended to limit the scope of this disclosure. Those skilled in the art should understand that modifications can be made to the above embodiments or equivalent substitutions can be made to some technical features without departing from the scope and spirit of this disclosure. The scope of this disclosure is defined by the appended claims.

Claims

1. A tactile reproduction device, comprising: substrate; A first driver, disposed on the substrate, is configured to vibrate and drive the substrate to vibrate upon receiving a first driving signal; A vibration sensor, disposed on the substrate, is configured to generate a first detection voltage signal based on the amplitude or frequency of the vibration of the first driver together with the substrate when the substrate vibrates. as well as The controller is configured to output a first drive signal to the first driver, and to receive the first detection voltage signal, and adjust the first drive signal according to the first detection voltage signal; The vibration sensor includes an accelerometer, and the accelerometer includes a piezoelectric accelerometer. The piezoelectric accelerometer includes: The first bottom electrode on the substrate; A first portion of the substrate below the first bottom electrode, wherein the first portion includes a recess on the side away from the first bottom electrode and a mass block surrounded by the recess, wherein the thickness of the portion of the first portion at the bottom of the recess in a direction perpendicular to the substrate is less than the thickness of the mass block in a direction perpendicular to the substrate. A first piezoelectric thin film layer on the side of the first bottom electrode away from the substrate; and The first top electrode on the side of the first piezoelectric thin film layer away from the substrate; The first bottom electrode and the first top electrode are electrically connected to the controller, and the orthographic projection of the recessed layer on the substrate at least partially overlaps with the orthographic projection of the first piezoelectric thin film layer on the substrate.

2. The tactile reproduction device according to claim 1, wherein, The controller is configured to reduce the amplitude or duty cycle of the first drive signal when the first detected voltage signal is greater than a threshold, or If the first detected voltage signal is less than the threshold, increase the amplitude or duty cycle of the first drive signal.

3. The tactile reproduction device according to claim 1, wherein, The piezoelectric accelerometer also includes: The first lead electrode is electrically connected to the first bottom electrode; and A second lead-out electrode electrically connected to the first top electrode; The first bottom electrode is electrically connected to the controller via the first lead electrode, and the first top electrode is electrically connected to the controller via the second lead electrode.

4. The tactile reproduction device according to claim 1, wherein, Viewed from a angle perpendicular to the substrate, the shape of the recess includes a circular ring, a square ring, or a hexagonal ring.

5. The tactile reproduction device according to claim 1, wherein, The first bottom electrode includes a plurality of first sub-bottom electrodes, which are electrically connected to each other; The recess includes multiple sub-recesses, and the mass block includes multiple sub-mass blocks, wherein the multiple sub-mass blocks are surrounded by the multiple sub-recesses in a one-to-one correspondence, and the multiple sub-recesses are located below the multiple first sub-bottom electrodes in a one-to-one correspondence. The first piezoelectric thin film layer includes a plurality of first sub-piezoelectric thin film layers, and the plurality of first sub-piezoelectric thin film layers are located one-to-one on the side of the plurality of first sub-bottom electrodes away from the substrate; The first top electrode includes a plurality of first sub-top electrodes, which are located one-to-one on the side of the plurality of first sub-piezoelectric thin film layers away from the substrate.

6. The tactile reproduction device according to claim 1, wherein, The first driver includes: The second bottom electrode on the substrate; The second portion of the substrate below the second bottom electrode; A second piezoelectric thin film layer on the side of the second bottom electrode away from the substrate; and The second top electrode on the side of the second piezoelectric thin film layer away from the substrate; The second bottom electrode and the second top electrode are electrically connected to the controller.

7. The tactile reproduction device according to claim 6, wherein, The first driver also includes: The third lead electrode is electrically connected to the second bottom electrode; and The fourth lead-out electrode is electrically connected to the second top electrode; The second bottom electrode is electrically connected to the controller via the third lead electrode, and the second top electrode is electrically connected to the controller via the fourth lead electrode.

8. The tactile reproduction device according to claim 6, wherein, The material of the first bottom electrode is the same as the material of the second bottom electrode; The material of the first piezoelectric thin film layer is the same as the material of the second piezoelectric thin film layer; The material of the first top electrode is the same as that of the second top electrode.

9. The tactile reproduction device according to claim 6, wherein, The second piezoelectric thin film layer includes a plurality of second sub-piezoelectric thin film layers, which are spaced apart from each other and arranged along the extension direction of the second bottom electrode.

10. The tactile reproduction device according to claim 1, wherein, The first driver includes a plurality of first drivers arranged on the substrate along a first direction; The vibration sensor includes a plurality of vibration sensors, which are arranged on the substrate along a second direction; Wherein, the first direction is perpendicular to the second direction.

11. The tactile reproduction device according to claim 1, further comprising: A piezoelectric transformer is disposed on the substrate and electrically connected between the controller and the first driver. It is configured to receive the first drive signal from the controller, amplify the first drive signal, and output the amplified first drive signal to the first driver to drive the first driver to vibrate.

12. The tactile reproduction device according to claim 1, further comprising: A second driver, disposed on the substrate, is configured to vibrate and drive the substrate to vibrate upon receiving a second driving signal, wherein the vibration frequency of the second driver is lower than the vibration frequency of the first driver. The vibration sensor is further configured to generate a second detection voltage signal based on the amplitude or frequency of the second driver vibrating together with the substrate when the substrate vibrates. The controller is also configured to output a second drive signal to the second driver, and to receive the second detection voltage signal, and adjust the second drive signal according to the second detection voltage signal.

13. A display device, comprising: The tactile reproduction device as described in any one of claims 1 to 12.

14. A tactile reproduction method, comprising: A first drive signal is output to a first driver disposed on the substrate, so that the first driver vibrates and drives the substrate to vibrate; In the event of substrate vibration, a vibration sensor disposed on the substrate generates a first detection voltage signal based on the amplitude or frequency of the vibration of the first driver together with the substrate. The vibration sensor includes an accelerometer, specifically a piezoelectric accelerometer, comprising: a first bottom electrode on the substrate; a first portion of the substrate below the first bottom electrode, wherein the first portion includes a recess on a side away from the first bottom electrode and a mass block surrounded by the recess; wherein the thickness of the portion of the first portion at the bottom of the recess in a direction perpendicular to the substrate is less than the thickness of the mass block in the same direction; a first piezoelectric thin film layer on the side of the first bottom electrode away from the substrate; and a first top electrode on the side of the first piezoelectric thin film layer away from the substrate; wherein the orthographic projection of the recess on the substrate at least partially overlaps the orthographic projection of the first piezoelectric thin film layer on the substrate. The first drive signal is adjusted based on the first detected voltage signal.

15. The tactile reproduction method according to claim 14, wherein, The step of adjusting the first driving signal based on the first detected voltage signal includes: If the first detected voltage signal is greater than the threshold, reduce the amplitude or duty cycle of the first driving signal; or If the first detected voltage signal is less than the threshold, increase the amplitude or duty cycle of the first drive signal.

16. A controller, comprising: Memory; as well as A processor coupled to the memory, the processor being configured to perform the method as described in claim 14 or 15 based on instructions stored in the memory.

17. A non-transitory computer-readable storage medium having stored thereon computer program instructions that, when executed by a processor, implement the method as claimed in claim 14 or 15.

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