Method for manufacturing a water cooled well and water cooled well

Abstract

The application belongs to the technical field of semiconductors, and discloses a water cooling well manufacturing method and a water cooling well. Before the inner cylinder and the outer cylinder are respectively welded with the inner ring of the first annular flange, the polishing surface is large during polishing, the direction of polishing after the inner cylinder and the outer cylinder are welded with the first annular flange is prevented from being limited, and it is ensured that the position is polished in place; before the outer pipe is welded to the outer cylinder, the welding position of the outer cylinder is polished, and it is prevented that the position is difficult to polish after welding and is not polished in place; after the welding of the above large area is completed, the semi-finished product of the present stage is vibrated to remove stress, and most of the stress in the internal part of the part is removed, so that the stress of the previous sequence is removed, the deformation of the subsequent small area welding is also small, thereby the deformation amount of the water cooling well product is reduced, the polishing difficulty of the water cooling well is reduced, the polishing time is shortened, and the polishing effect of the water cooling well is better. The water cooling well is obtained through the above method, has small deformation, short polishing time and good polishing effect.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a method for manufacturing a water-cooled well and the water-cooled well itself. Background Technology

[0002] A water-cooled well is a device used in semiconductor processing to cool high-temperature semi-finished semiconductors. Its inner cavity serves as the space for semiconductor processing, and cooling liquid flows between the inner and outer cylinders.

[0003] Water-cooled wells have numerous components connected by welding to achieve good sealing. In existing technologies, these components are welded continuously and simultaneously during manufacturing, resulting in significant internal stress within the same timeframe. This leads to substantial deformation of the formed well and increases the likelihood of dimensional deviations. Furthermore, after welding, the existing technology involves polishing the entire well. However, due to the flange and cylinder wall connection, polishing the flange surface is difficult because the cylinder wall obstructs the process, preventing thorough polishing of the flange end face. The area where the flange connects to the cylinder wall is often inaccessible. Despite this, the flange end face is a crucial functional surface, requiring considerable polishing time to achieve the required polishing standards. Even then, the polishing effect remains unsatisfactory, negatively impacting the final product's finish.

[0004] Therefore, there is an urgent need to design a water-cooled well manufacturing method and a water-cooled well to solve the above problems. Summary of the Invention

[0005] One objective of this invention is to provide a method for manufacturing water-cooled wells that can reduce the deformation of water-cooled well products, reduce the polishing difficulty of water-cooled wells, shorten polishing time, and improve the polishing effect of water-cooled wells.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] Method for manufacturing water-cooled wells, the water-cooled wells include:

[0008] First annular flange;

[0009] The cylinder includes an outer cylinder and an inner cylinder spaced apart. One end of the outer cylinder is connected to the inner ring of the first annular flange, and one end of the inner cylinder is connected to the inner ring of the first annular flange and located inside the outer cylinder. A cooling chamber is formed between the inner cylinder and the outer cylinder.

[0010] The second annular flange, the other end of the outer cylinder and the other end of the inner cylinder are both connected to the inner ring of the second annular flange;

[0011] An exhaust outlet pipe includes an outer pipe and an inner pipe spaced apart. The outer pipe surrounds the outer pipe. One end of the outer pipe is connected to the outer cylinder. One end of the inner pipe is connected to the inner cylinder. An outflow cavity is formed between the outer pipe and the inner pipe. The inner pipe can seal the other end of the outer pipe. The outflow cavity is connected to the cooling cavity.

[0012] The liquid inlet pipe is connected to the outer cylinder and communicates with the cooling chamber.

[0013] The outlet pipe is connected to the aforementioned outer pipe and communicates with the aforementioned outflow cavity; and

[0014] The third annular flange is connected to the other end of the aforementioned inner tube;

[0015] Optionally, the above-mentioned method for manufacturing a water-cooled well includes:

[0016] S10: Polish at least the welding area of ​​the part to be welded in the next step and the area adjacent to the above welding area;

[0017] S20: Weld the inner cylinder and outer cylinder to the inner ring of the first annular flange respectively, then place the second annular flange at the other end of the cylinder, and weld the other end of the inner cylinder and the other end of the outer cylinder to the inner ring of the second annular flange respectively.

[0018] S30: Polish at least the locations where the outer cylinder needs to connect with the outer tube and the adjacent locations;

[0019] S40: Weld one end of the outer tube to the outer cylinder;

[0020] S50: Insert the inner tube into the welded outer tube and weld one end of the inner tube to the inner cylinder. The inner tube has a sealing part protruding radially outward, and the outer periphery of the sealing part is welded to the other end of the outer tube.

[0021] S60: Vibration stress relief;

[0022] S70: Weld the above-mentioned inlet pipe to the above-mentioned outer cylinder, weld the above-mentioned outlet pipe to the above-mentioned outer pipe, and weld the above-mentioned third annular flange to the other end of the above-mentioned inner pipe.

[0023] Optionally, the inner tube includes a body portion and a protrusion portion. The protrusion portion protrudes radially from the other end of the body portion. An annular groove is formed circumferentially on the protrusion portion, and a sealing portion is formed on one side of the annular groove. The sealing portion seals the other end connected to the outer tube. S50 includes:

[0024] S51: Insert the inner tube into the welded outer tube and weld one end of the inner tube to the inner cylinder.

[0025] S52: Weld one end of the above-mentioned protrusion along the axial direction to seal the other end of the above-mentioned outer tube;

[0026] S53: Mill out the above-mentioned annular groove.

[0027] Optionally, an annular support plate is provided between the inner tube and the outer tube, the inner and outer rings of the annular support plate respectively abutting against the inner tube and the outer tube, and a plurality of through holes are formed on the annular support plate. S51 includes:

[0028] S511: The above-mentioned annular support plate is sleeved on the outside of the above-mentioned inner tube and the two are welded together;

[0029] S512: Insert the inner tube with the aforementioned annular support plate welded on it into the inside of the welded outer tube and weld one end of the inner tube to the inner cylinder.

[0030] Optionally, a connecting portion is formed on the other side of the aforementioned annular groove. In S70, the outer peripheral surface and end face of the connecting portion are welded to the aforementioned third annular flange.

[0031] Optionally, the polishing positions of S10 are the upper end face of the first annular flange, the outer peripheral surface of the outer cylinder, and the lower end face of the second annular flange.

[0032] Optionally, an annular sealing groove is formed on the lower end face of the first annular flange, the annular sealing groove being used to accommodate a sealing ring. The water-cooled well manufacturing method further includes S70, which includes:

[0033] S71: Dimensional inspection;

[0034] S72: Polish the water-cooled well as a whole, and polish the annular sealing groove.

[0035] Optionally, the polishing direction of the annular sealing groove is along the circumferential direction of the annular sealing groove.

[0036] Optionally, the above-mentioned water-cooled well manufacturing method further includes S80, wherein S80 includes:

[0037] S81: Perform leak detection tests on the above-mentioned water-cooled wells;

[0038] S82: Re-polish to remove scratches caused by fixing the water-cooled well during leak detection testing.

[0039] Optionally, the manufacturing method of the inner cylinder and the outer cylinder is S100, which includes:

[0040] S110: Rolling the sheet material into a cylindrical shape;

[0041] S120: Weld the two ends of the side wall of the cylindrical plate;

[0042] S130: The welded sheet metal is machined to remove the weld protrusions;

[0043] S140: Polish the above-mentioned cylindrical plate.

[0044] Another objective of this invention is to provide a water-cooled well with small deformation, short polishing time, and good polishing effect.

[0045] To achieve this objective, the present invention adopts the following technical solution:

[0046] A water-cooled well, manufactured by the above-described water-cooled well manufacturing method, wherein the water-cooled well comprises:

[0047] First annular flange;

[0048] The cylinder includes an outer cylinder and an inner cylinder spaced apart. One end of the outer cylinder is connected to the inner ring of the first annular flange, and one end of the inner cylinder is connected to the inner ring of the first annular flange and located inside the outer cylinder. A cooling chamber is formed between the inner cylinder and the outer cylinder.

[0049] The second annular flange, the other end of the outer cylinder and the other end of the inner cylinder are both connected to the inner ring of the second annular flange;

[0050] An exhaust outlet pipe includes an outer pipe and an inner pipe spaced apart. The outer pipe surrounds the outer pipe. One end of the outer pipe is connected to the outer cylinder. One end of the inner pipe is connected to the inner cylinder. An outflow cavity is formed between the outer pipe and the inner pipe. A sealing part is provided radially outward on the inner pipe. The sealing part is integrally formed with the inner pipe. The sealing part can seal the other end of the outer pipe. The outflow cavity is connected to the cooling cavity.

[0051] The liquid inlet pipe is connected to the outer cylinder and communicates with the cooling chamber.

[0052] The outlet pipe is connected to the aforementioned outer pipe and communicates with the aforementioned outflow cavity; and

[0053] The third annular flange is fitted onto the other end of the aforementioned inner pipe.

[0054] The beneficial effects of this invention are as follows:

[0055] This invention provides a method for manufacturing a water-cooled well. Before welding the inner and outer cylinders to the inner ring of a first annular flange, the parts to be welded are polished. The polishing surface is large to prevent the polishing direction from being restricted after welding the inner and outer cylinders to the first annular flange. Simultaneously, pre-polishing ensures that the welded connection area is properly polished. Before welding the outer tube to the outer cylinder, the welding area on the outer cylinder is polished to prevent difficulty or incomplete polishing after welding. After the large-area welding is completed, the semi-finished product is subjected to vibration stress relief to remove most of the internal stress of the parts, preventing the accumulation of stress in subsequent welding from causing a significant increase in deformation. Simultaneously, vibration stress relief at this time removes the stress from the preceding process, reducing deformation in subsequent small-area welding. This water-cooled well manufacturing method reduces the deformation of the water-cooled well product, lowers the polishing difficulty, shortens the polishing time, and improves the polishing effect.

[0056] The present invention also provides a water-cooled well, which is obtained by the above-described water-cooled well manufacturing method. The water-cooled well has small deformation, short polishing time, and good polishing effect. Attached Figure Description

[0057] Figure 1 This is a schematic diagram of the structure of a water-cooled well provided in an embodiment of the present invention. Figure 1 ;

[0058] Figure 2 This is a sectional view of the water-cooled well along the axial longitudinal section of the exhaust gas outlet pipe provided in an embodiment of the present invention;

[0059] Figure 3 yes Figure 2 Enlarged view of point A in the middle;

[0060] Figure 4 This is a schematic diagram of the structure of a water-cooled well provided in an embodiment of the present invention. Figure 2 ;

[0061] Figure 5 yes Figure 3 Sectional view at point BB.

[0062] In the picture:

[0063] 10. First annular flange; 11. Annular sealing groove; 20. Cylinder body; 21. Inner cylinder; 22. Outer cylinder; 23. Cooling chamber;

[0064] 30. Second annular flange; 40. Exhaust gas outlet pipe;

[0065] 41. Inner tube; 411. Body part; 412. Protrusion; 4121. Sealing part; 4122. Annular groove; 4123. Connecting part; 42. Outer tube; 43. Outflow cavity; 44. Annular support plate; 441. Through hole;

[0066] 50. Inlet pipe; 60. Outlet pipe; 70. Third ring flange. Detailed Implementation

[0067] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0068] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0069] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0070] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0071] This embodiment provides a water-cooled well, such as Figure 1 and Figure 2As shown, the water-cooled well includes a first annular flange 10, a cylinder 20, a second annular flange 30, a tail gas outlet pipe 40, a liquid inlet pipe 50, a liquid outlet pipe 60, and a third annular flange 70. The cylinder 20 includes an outer cylinder 22 and an inner cylinder 21 spaced apart. One end of the outer cylinder 22 is connected to the inner ring of the first annular flange 10, and one end of the inner cylinder 21 is connected to the inner ring of the first annular flange 10 and located inside the outer cylinder 22. A cooling chamber 23 is formed between the inner cylinder 21 and the outer cylinder 22. The other ends of the outer cylinder 22 and the inner cylinder 21 are both connected to the inner ring of the second annular flange 30. The exhaust outlet pipe 40 includes an outer pipe 42 and an inner pipe 41 spaced apart. The outer pipe 42 surrounds the inner pipe 41. One end of the outer pipe 42 is connected to the outer cylinder 22, and one end of the inner pipe 41 is connected to the inner cylinder 21. An outlet cavity 43 is formed between the outer pipe 42 and the inner pipe 41. The inner pipe 41 can seal the other end of the outer pipe 42. The outlet cavity 43 is connected to the cooling cavity 23. The liquid inlet pipe 50 is connected to the outer cylinder 22 and is connected to the cooling cavity 23. The liquid outlet pipe 60 is connected to the outer pipe 42 and is connected to the outlet cavity 43. A third annular flange 70 is fitted onto the other end of the inner pipe 41. The aforementioned water-cooled well is welded into place using existing technology, and then the entire water-cooled well is polished. However, due to the connection between the flange and the cylinder wall, the flange end face cannot be polished extensively due to the obstruction of the cylinder wall. Furthermore, the area where it connects to the root of the cylinder wall cannot even be polished. Yet, the flange end face is an important functional surface, and achieving the required polishing time would require a considerable amount of time. Even so, the polishing effect is still unsatisfactory, affecting the final product's process quality.

[0072] To address the aforementioned problems, this embodiment provides a method for manufacturing a water-cooled well, which can reduce the deformation of the water-cooled well product, lower the polishing difficulty, shorten the polishing time, and improve the polishing effect of the water-cooled well. The water-cooled well manufacturing method includes:

[0073] S10: Polish at least the welding area of ​​the part to be welded in the next step and the area adjacent to the welding area;

[0074] S20: Weld the inner cylinder 21 and the outer cylinder 22 to the inner ring of the first annular flange 10 respectively, and then place the second annular flange 30 at the other end of the cylinder 20, and weld the other end of the inner cylinder 21 and the other end of the outer cylinder 22 to the inner ring of the second annular flange 30 respectively.

[0075] S30: Polish at least the location where the outer cylinder 22 needs to connect with the outer tube 42 and the adjacent locations;

[0076] S40: Weld one end of the outer tube 42 to the outer cylinder 22;

[0077] S50: Insert the inner tube 41 into the welded outer tube 42 and weld one end of the inner tube 41 to the inner cylinder 21. The inner tube 41 has a sealing part 4121 protruding outward in the radial direction. Weld the outer periphery of the sealing part 4121 to the other end of the outer tube 42.

[0078] S60: Vibration stress relief;

[0079] S70: Weld the inlet pipe 50 to the outer cylinder 22, weld the outlet pipe 60 to the outer pipe 42, and weld the third annular flange 70 to the other end of the inner pipe 41.

[0080] This water-cooled well manufacturing method involves polishing the parts to be welded before welding the inner cylinder 21 and outer cylinder 22 to the inner ring of the first annular flange 10. The polishing surface is large to prevent the polishing direction from being restricted after welding the inner cylinder 21 and outer cylinder 22 to the first annular flange 10. Simultaneously, pre-polishing ensures the welded connection area is properly polished. Before welding the outer pipe 42 to the outer cylinder 22, the welding area of ​​the outer cylinder 22 is polished to prevent difficulty or incomplete polishing after welding. After the large-area welding is completed, the semi-finished product is subjected to vibration stress relief to remove most of the internal stress of the parts, preventing the accumulation of stress in subsequent welding from causing a significant increase in deformation. Simultaneously, vibration stress relief at this time removes the stress from the preceding process, reducing deformation in subsequent small-area welding. This water-cooled well manufacturing method reduces the deformation of the water-cooled well product, lowers the polishing difficulty, shortens the polishing time, and improves the polishing effect.

[0081] In S10, the parts that need to be polished include at least the first annular flange 10, the second annular flange 30, the inner cylinder 21, and the outer cylinder 22. The two opposite end faces of the first annular flange 10 and the second annular flange 30 are the finished surfaces and are polished with emphasis. It should be noted that other parts can also be polished in this step of S10, and there are no restrictions on this.

[0082] Preferably, the polishing positions of S10 are the upper end face of the first annular flange 10, the outer peripheral face of the outer cylinder 22, and the lower end face of the second annular flange 30. These surfaces are the key surfaces in the finished product and require focused polishing to ensure the surface quality of these key surfaces.

[0083] Preferably, the inner tube 41 includes a body portion 411 and a protrusion 412. The protrusion 412 protrudes radially from the other end of the body portion 411. The protrusion 412 has an annular groove 4122 circumferentially formed. A sealing portion 4121 is formed on one side of the annular groove 4122. The sealing portion 4121 seals the other end connected to the outer tube 42. This arrangement allows the outflow cavity 43 to be sealed at the other end of the outer tube 42 by the sealing portion 4121, thereby allowing liquid to flow out from the outlet tube 60.

[0084] Among them, such as Figure 4 and Figure 5 As shown, a welding hole is opened on the outer tube 42, and the liquid outlet pipe 60 is welded to the periphery of the welding hole, so that the coolant flows out of the liquid outlet pipe 60 from the outlet cavity 43.

[0085] Preferably, such as Figure 2 As shown, S50 includes:

[0086] S51: Insert the inner tube 41 into the welded outer tube 42 and weld one end of the inner tube 41 to the inner cylinder 21;

[0087] S52: Weld one end of the protrusion 412 along the axial direction to seal it to the other end of the outer tube 42;

[0088] S53: Mill out the annular groove 4122.

[0089] With the above configuration, the protrusion 412 is welded to the outer tube 42 before the annular groove 4122 is milled out. The protrusion 412 is relatively thick, so it is not easy to deform during the circumferential welding process. After the welding is in place, the annular groove 4122 is milled to prevent the sealing part 4121 from deforming too much and exceeding the dimensional tolerance due to the sealing part 4121 being too thin during the welding process.

[0090] In the prior art, the sealing part 4121 is an annular part. After it is sleeved onto the inner tube 41, the sealing part 4121 and the inner tube 41 are welded. Since the pipe wall of the inner tube 41 and the sealing part are both thin, they are prone to deformation during the welding process, which makes the axis of the exhaust gas outlet pipe 40 not straight and the dimensions out of tolerance.

[0091] To solve the above problems, the sealing part 4121 provided in this embodiment is integrally formed with the inner tube 41, that is, the protrusion 412 is integrally formed with the inner tube 41, which eliminates the need for welding, avoids deformation caused by welding, and ensures the straightness of the axis of the exhaust gas outlet pipe 40.

[0092] Because the inner tube 41 and outer tube 42 are relatively long and lack rigidity, they are prone to slight deviation, which can cause the product's appearance to be distorted. At the same time, the radial dimensions of the outflow cavity 43 are not uniform at different positions in the circumference, affecting the flow rate of the coolant.

[0093] To solve the above problems, such as Figure 2 and Figure 3As shown, in this embodiment, an annular support plate 44 is provided between the inner pipe 41 and the outer pipe 42. The inner and outer rings of the annular support plate 44 abut against the inner pipe 41 and the outer pipe 42, respectively. Several through holes 441 are provided on the annular support plate 44. Through the above arrangement, the annular support plate 44 provides better support for the inner pipe 41 and the outer pipe 42, improves the overall strength and rigidity of the exhaust outlet pipe 40, prevents its deformation or skewness, and ensures the uniformity of the dimensions of the outflow cavity 43.

[0094] Preferably, S51 includes:

[0095] S511: Fit the annular support plate 44 onto the outside of the inner tube 41 and weld the two together;

[0096] S512: The inner tube 41, to which the annular support plate 44 is welded, is inserted into the welded outer tube 42, and one end of the inner tube 41 is welded to the inner cylinder 21. Through the above arrangement, the annular support plate 44 provides better support for the inner tube 41 and the outer tube 42, improves the overall strength and rigidity of the exhaust outlet pipe 40, prevents it from deforming or deviating, ensures the uniformity of the dimensions of the outflow cavity 43, and the through hole 441 ensures the connection between the cooling cavity 23 and the outflow cavity 43.

[0097] In this embodiment, the annular support plate 44 cannot be integrally formed with the inner tube 41 because it has a through hole 441. If it were integrally formed, the annular support plate 44 would easily deform when machining the through hole 441.

[0098] Preferably, the annular support plate 44 is located at one end of the body part 411 near the inner cylinder 21. With the above arrangement, the annular support plate 44 is located at the root of the body part 411, and the deformation is small during welding, which has little impact on the straightness of the inner tube 41 axis.

[0099] Optionally, such as Figure 2 As shown, a connecting portion 4123 is formed on the other side of the annular groove 4122. In S70, the third annular flange 70 is welded to the connecting portion 4123, and both the outer peripheral surface and the end face of the connecting portion 4123 are welded to the third annular flange 70. This arrangement improves the connection strength of the third annular flange 70.

[0100] Preferably, such as Figure 2 and Figure 3 As shown, an annular sealing groove 11 is formed on the lower end face of the first annular flange 10. The annular sealing groove 11 is used to accommodate the sealing ring (not shown in the figure). Through the above arrangement, the sealing performance of the first annular flange 10 is ensured when it is connected with other components.

[0101] Furthermore, the water-cooled well manufacturing method also includes S70, which includes:

[0102] S71: Dimensional inspection;

[0103] S72: Polish the water-cooled well as a whole, and polish the annular sealing groove 11.

[0104] After dimensional inspection, the water-cooled well will inevitably be scratched. After overall polishing, the scratches generated during dimensional inspection will be polished. At the same time, the annular sealing groove 11 will also be polished to improve polishing efficiency.

[0105] Since the sealing ring is annular, meaning its extension direction is along its axial direction, if the polishing marks are along the radial direction of the annular sealing groove 11, they may not fit well with the sealing ring, causing air leakage. To solve this problem, in this embodiment, the polishing direction of the annular sealing groove 11 is along its circumferential direction, consistent with the extension direction of the sealing ring. This ensures better fit between the polishing marks and the sealing ring, and the polishing marks are properly filled by the sealing ring, improving sealing performance.

[0106] Preferably, the water-cooled well manufacturing method further includes S80, S80 comprising:

[0107] S81: Leak detection test for water-cooled wells;

[0108] S82: Polish again to remove scratches caused by fixing the water-cooling well during the leak test. Because the water-cooling well needs to be fixed during the leak test, its surface is easily damaged by pressure. This polishing step ensures the surface quality of the final product.

[0109] In the prior art, when manufacturing the inner cylinder 21 or the outer cylinder 22, a large block to be processed is first purchased, and the inner cavity of the cylinder is removed through machining. This process involves a large amount of material removal, a long processing time, and a significant waste of raw materials, resulting in increased manufacturing costs. To solve the above problems, in the water-cooled well manufacturing method of this embodiment, the manufacturing method of the inner cylinder 21 and the outer cylinder 22 is S100, which includes:

[0110] S110: Rolling the sheet material into a cylindrical shape;

[0111] S120: Weld the two ends of the side wall of the cylindrical plate;

[0112] S130: Machining is performed on the welded sheet metal to remove weld protrusions;

[0113] S140: Polishing treatment of cylindrical plates.

[0114] The inner cylinder 21 and outer cylinder 22 are formed by rolling and then undergo a small amount of de-machining after welding, which avoids material waste, reduces the manufacturing cost of the inner cylinder 21 and outer cylinder 22, and shortens the processing time of the inner cylinder 21 and outer cylinder 22.

[0115] This embodiment also provides a water-cooled well, which is manufactured by the above-described water-cooled well manufacturing method. The water-cooled well has small deformation, short polishing time, and good polishing effect.

[0116] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A method for manufacturing a water-cooled well, wherein the water-cooled well includes: First annular flange (10); The cylinder (20) includes an outer cylinder (22) and an inner cylinder (21) spaced apart. One end of the outer cylinder (22) is connected to the inner ring of the first annular flange (10), and one end of the inner cylinder (21) is connected to the inner ring of the first annular flange (10) and located inside the outer cylinder (22). A cooling chamber (23) is formed between the inner cylinder (21) and the outer cylinder (22). The second annular flange (30) has the other end of the outer cylinder (22) and the other end of the inner cylinder (21) connected to the inner ring of the second annular flange (30); The exhaust outlet pipe (40) includes an outer pipe (42) and an inner pipe (41) spaced apart. The outer pipe (42) surrounds the outer pipe (41). One end of the outer pipe (42) is connected to the outer cylinder (22), and one end of the inner pipe (41) is connected to the inner cylinder (21). An outflow cavity (43) is formed between the outer pipe (42) and the inner pipe (41). The inner pipe (41) can seal the other end of the outer pipe (42). The outflow cavity (43) is connected to the cooling cavity (23). The liquid inlet pipe (50) is connected to the outer cylinder (22) and communicates with the cooling chamber (23); The outlet pipe (60) is connected to the outer pipe (42) and communicates with the outflow chamber (43); as well as The third annular flange (70) is connected to the other end of the inner tube (41); The method for manufacturing the water-cooled well is characterized by comprising: S10: Polish at least the welding area of ​​the workpiece to be welded in the next step and the area adjacent to the welding area; S20: Weld the inner cylinder (21) and outer cylinder (22) to the inner ring of the first annular flange (10) respectively, and then place the second annular flange (30) at the other end of the cylinder (20), and weld the other end of the inner cylinder (21) and the other end of the outer cylinder (22) to the inner ring of the second annular flange (30) respectively; S30: Polish at least the position where the outer cylinder (22) needs to be connected to the outer tube (42) and the adjacent position; S40: Weld one end of the outer tube (42) to the outer cylinder (22); S50: Insert the inner tube (41) into the welded outer tube (42) and weld one end of the inner tube (41) to the inner cylinder (21). The inner tube (41) has a sealing part (4121) protruding outward in the radial direction. Weld the outer periphery of the sealing part (4121) to the other end of the outer tube (42). S60: Vibration stress relief; S70: Weld the inlet pipe (50) to the outer cylinder (22), weld the outlet pipe (60) to the outer pipe (42), and weld the third annular flange (70) to the other end of the inner pipe (41).

2. The method for manufacturing a water-cooled well according to claim 1, characterized in that, The inner tube (41) includes a body portion (411) and a protrusion (412). The protrusion (412) protrudes radially from the body portion (411) at the other end of the body portion (411). The protrusion (412) has a circumferentially formed an annular groove (4122). One side of the annular groove (4122) forms the sealing portion (4121), which seals the other end connected to the outer tube (42). S50 includes: S51: Insert the inner tube (41) into the welded outer tube (42) and weld one end of the inner tube (41) to the inner cylinder (21); S52: Weld one end of the protrusion (412) along the axial direction to seal the other end of the outer tube (42); S53: Mill out the annular groove (4122).

3. The method for manufacturing a water-cooled well according to claim 2, characterized in that, An annular support plate (44) is provided between the inner tube (41) and the outer tube (42). The inner and outer rings of the annular support plate (44) respectively abut against the inner tube (41) and the outer tube (42). A plurality of through holes (441) are provided on the annular support plate (44). S51 includes: S511: The annular support plate (44) is fitted over the inner tube (41) and the two are welded together; S512: Insert the inner tube (41) with the welded annular support plate (44) into the welded outer tube (42) and weld one end of the inner tube (41) to the inner cylinder (21).

4. The method for manufacturing a water-cooled well according to claim 2, characterized in that, A connecting portion (4123) is formed on the other side of the annular groove (4122). In S70, the outer peripheral surface and end face of the connecting portion (4123) are welded to the third annular flange (70).

5. The method for manufacturing a water-cooled well according to claim 1, characterized in that, The polishing positions of S10 are the upper end face of the first annular flange (10), the outer peripheral surface of the outer cylinder (22), and the lower end face of the second annular flange (30).

6. The method for manufacturing a water-cooled well according to any one of claims 1-5, characterized in that, An annular sealing groove (11) is formed on the lower end face of the first annular flange (10), the annular sealing groove (11) is used to accommodate a sealing ring, and the water-cooled well manufacturing method further includes S70, which includes: S71: Dimensional inspection; S72: Polish the water-cooled well as a whole, and polish the annular sealing groove (11).

7. The method for manufacturing a water-cooled well according to claim 6, characterized in that, The polishing direction of the annular sealing groove (11) is along the circumferential direction of the annular sealing groove (11).

8. The method for manufacturing a water-cooled well according to any one of claims 1-5, characterized in that, The water-cooled well manufacturing method further includes step S80, which includes: S81: Perform a leak detection test on the water-cooled well; S82: Re-polish to remove scratches caused by fixing the water-cooled well during leak detection testing.

9. The method for manufacturing a water-cooled well according to any one of claims 1-5, characterized in that, The manufacturing method of the inner cylinder (21) and the outer cylinder (22) is S100, which includes: S110: Rolling the sheet material into a cylindrical shape; S120: Weld the two ends of the side wall of the cylindrical plate; S130: The welded plate is machined to remove the weld protrusions; S140: Polish the cylindrical plate.

10. A water-cooled well, characterized in that, The water-cooled well is manufactured by the method of manufacturing according to any one of claims 1-9, wherein the water-cooled well comprises: First annular flange (10); The cylinder (20) includes an outer cylinder (22) and an inner cylinder (21) spaced apart. One end of the outer cylinder (22) is connected to the inner ring of the first annular flange (10), and one end of the inner cylinder (21) is connected to the inner ring of the first annular flange (10) and located inside the outer cylinder (22). A cooling chamber (23) is formed between the inner cylinder (21) and the outer cylinder (22). The second annular flange (30) has the other end of the outer cylinder (22) and the other end of the inner cylinder (21) connected to the inner ring of the second annular flange (30); The exhaust outlet pipe (40) includes an outer pipe (42) and an inner pipe (41) spaced apart. The outer pipe (42) surrounds the outer pipe (41). One end of the outer pipe (42) is connected to the outer cylinder (22). One end of the inner pipe (41) is connected to the inner cylinder (21). An outlet cavity (43) is formed between the outer pipe (42) and the inner pipe (41). A sealing part (4121) is provided radially outward on the inner pipe (41). The sealing part (4121) is integrally formed with the inner pipe (41). The sealing part (4121) can seal the other end of the outer pipe (42). The outlet cavity (43) is connected to the cooling cavity (23). The liquid inlet pipe (50) is connected to the outer cylinder (22) and communicates with the cooling chamber (23); An outlet pipe (60) is connected to the outer pipe (42) and communicates with the outflow chamber (43); and The third annular flange (70) is fitted onto the other end of the inner tube (41).

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