A single crystal silicon rod surface flaw detection device and detection system

Abstract

The application provides a single crystal silicon rod surface flaw detection device and a detection system, and belongs to the technical field of single crystal silicon rod flaw detection. The single crystal silicon rod surface flaw detection device comprises a square frame body, a top support, a light shield, a silicon rod clamping mechanism, a lifting mechanism, a rotating mechanism, a light source assembly, a visual acquisition assembly, a visual controller and a main controller, wherein: an artificial detection opening is formed in the front side plate; the top support is fixedly installed on the U-shaped opening edge of the water platform in the square frame body; the light source assembly and the visual acquisition assembly are installed on the top support; the lifting mechanism is installed on the inner surface of the front side plate, the silicon rod clamping mechanism is installed on the lifting mechanism and is used for clamping the silicon rod, the rotating mechanism is installed on the silicon rod clamping mechanism, and the silicon rod, the rotating mechanism and the silicon rod clamping mechanism are lifted synchronously with the lifting mechanism; the visual controller is connected with the visual acquisition assembly, and the main controller is connected with the visual controller through a switch.

Description

Technical Field

[0001] This invention relates to the field of single-crystal silicon rod defect detection technology, and in particular to a single-crystal silicon rod surface defect detection device and detection system. Background Technology

[0002] The silicon wafer processing flow is mainly divided into four stages: crystal pulling, squaring, slicing, and sorting. In the squaring process, there may be appearance defects such as scratches and chipping on the surface of the silicon rod. Therefore, the industry uses different methods to verify and detect these defects. Currently, the detection method is generally through manual observation, directly observing with the naked eye whether there are defects on each surface and corner of the silicon rod. Due to the large size of the silicon rod, it is laborious to turn it over, and the surface area to be inspected is also very large. This direct inspection method is not convenient for operators, has a high labor intensity, and the detection results are inevitably prone to errors. Summary of the Invention

[0003] In view of this, the present invention provides a device and system for detecting surface defects of single crystal silicon rods, which automates the silicon rod detection process, eliminates the need for direct manual observation, reduces labor intensity, and improves the accuracy of detection results.

[0004] The technical solution adopted by the embodiments of the present invention to solve its technical problem is as follows: A surface defect detection device for a single-crystal silicon rod includes: a cuboid frame (1) with a front side plate, a top support (2), a light shield (3), a photoelectric sensor switch (4), a lifting mechanism, a silicon rod clamping mechanism, a rotating mechanism, a light source assembly, a vision acquisition assembly, a main controller, and a vision controller. The photoelectric sensor switch (4), the silicon rod clamping mechanism, the lifting mechanism, the rotating mechanism, and the light source assembly are all connected to the main controller. The vision acquisition assembly is connected to the vision controller. The main controller is connected to the vision controller via a switch. A manual inspection port (12) is provided on the front side panel (11). The height of the manual inspection port (12) is the same as the height of the inspection position. The cover plate (13) is connected to the front side panel (11) by a hinge (14). The hinge (14) is installed on the outer surface of the front side panel above the manual inspection port (12). The cover plate (13) completely covers the manual inspection port (12). The cuboid frame (1) has a horizontal platform (13) inside, and the horizontal platform (13) has a U-shaped opening with the opening direction facing forward. The top bracket (2) is fixedly installed on the upper surface of the horizontal platform (13) and the connection position is located at the outer edge of the U-shaped opening. The light source assembly and the vision acquisition assembly are both connected to the top bracket (2). The lifting mechanism is installed on the inner surface of the front side plate, the silicon rod clamping mechanism is installed on the lifting mechanism for clamping the silicon rod (10), the rotating mechanism is installed on the silicon rod clamping mechanism for controlling the silicon rod (10) to flip at a preset angle, and the silicon rod (10), the rotating mechanism, and the silicon rod clamping mechanism move up and down synchronously with the lifting mechanism. The photoelectric sensor switch (4) is installed on the inner surface of the front side plate, below the manual detection port (12), and at the same height as the initial position of the silicon rod (10); The light shield (3) is placed on top of the cuboid frame (1), covering the top and four sides of the cuboid frame (1), and has an opening at the bottom. The front of the light shield (3) covers the upper edge of the manual inspection port (12), the back covers the bottom of the cuboid frame (1), and the left and right sides cover the height required for the conveying mechanism to drive the silicon rod (10) in and out. After the photoelectric sensor switch (4) detects that the silicon rod (10) to be detected has been transported to the initial position by the conveying mechanism, it sends a signal to the main controller. The main controller receives the signal from the photoelectric sensor switch (4) and controls the silicon rod clamping mechanism to clamp the silicon rod. The lifting mechanism drives the silicon rod clamping mechanism to move upward until the silicon rod (10) reaches the detection position. The rotating mechanism rotates the silicon rod (10) at regular intervals, causing the silicon rod (10) to rotate axially at a preset angle. After rotating to the specified position, the main controller sends a shooting control command to the vision controller through the switch. The vision controller controls the vision acquisition component to perform multi-directional surface image acquisition of the silicon rod (10) based on the rotation of each silicon rod and inputs the acquired data to the vision controller. The vision controller is used to perform image data analysis for surface defects. After the vision acquisition component finishes acquiring the data, the rotating mechanism stops rotating the silicon rod (10), the lifting mechanism moves downward and sends the silicon rod (10) to the initial position, and the silicon rod clamping mechanism resets to release the silicon rod (10).

[0005] Preferably, the lifting mechanism includes a pair of lifting slide rails (51), a lifting screw assembly (52), and a lifting motor (53). The pair of lifting slide rails (51) are mounted on the inner surface of the front side plate, arranged opposite to each other on both sides of the manual inspection port, and perpendicular to the ground. The lifting screw assembly (52) includes two fixed bearing seats (521) arranged vertically, a screw (522) passing through the two bearing seats (521), and a first screw slide (523) passing through the screw (522). The fixed bearing seats (521) are all fixedly installed on the inner surface of the front side plate. The lead screw (522) is set perpendicular to the ground and its end is connected to the output shaft of the lifting motor (53). The lifting motor (53) is installed on the lifting motor seat (531), and the lifting motor seat (531) is fixedly installed on the inner surface of the front side plate. During the forward and reverse rotation of the lifting motor (53), the first lead screw slide (523) reciprocates along the lead screw (522) between the two fixed bearing seats (521).

[0006] Preferably, the silicon rod clamping mechanism includes a steel frame (61), a bidirectional lead screw assembly (62), two clamping claws (63) arranged opposite to each other, and a clamping drive motor (64). The steel frame (61) is fixedly connected to the bottom of the first lead screw slide (523) of the lifting mechanism. The front side of the steel frame (61) has two sliders arranged left and right, and each of the two sliders is slidably connected to one of the lifting slide rails (51). The rear side of the steel frame (61) has a first clamping claw guide rail and a second clamping claw guide rail arranged vertically. The first clamping claw guide rail (611) and the second clamping claw guide rail (612) are both arranged horizontally. The bidirectional lead screw (621) in the bidirectional lead screw assembly (62) is horizontally arranged and passes through two second lead screw slides (622). Each of the two second lead screw slides (622) is fixedly connected to a clamping claw (63). The front side of the clamping claw (63) has a first clamping claw slider and a second clamping claw slider arranged vertically. The first clamping claw slider is slidably connected to the first clamping claw guide rail (611), and the second clamping claw slider is slidably connected to the second clamping claw guide rail (612). The end of the bidirectional lead screw (621) is connected to the shaft extension end of the clamping drive motor (64). The clamping drive motor (64) is fixedly connected to the bottom surface of the steel frame (61) through the clamping drive motor fixing seat (641). The silicon rod clamping mechanism reciprocates in the vertical direction following the first lead screw slide (523) of the lifting mechanism. When the clamping drive motor (64) drives the bidirectional lead screw (621) to rotate, the two clamping claws (63) slide in opposite directions or towards each other in the horizontal direction along the first clamping claw guide rail (611) and the second clamping claw guide rail (612) following the two second lead screw slides (622) of the bidirectional lead screw.

[0007] Preferably, each of the clamping jaws (63) is equipped with a rotating mechanism, which consists of a silicon rod rotating motor (71), a rotating motor fixing support (72), and a pressure plate (73) with a shaft extension, wherein: A pressure plate (631) is fixedly installed on the rear side of the clamping claw (63). The pressure plate (631) is perpendicular to the clamping claw and the ground. A through hole is opened on the pressure plate (631), and a tapered roller bearing (74) is installed in the through hole. The rotary motor fixing support (72) is fixedly installed on the pressure plate (631). The silicon rod rotary motor (71) is fixedly installed on the rotary motor fixing support (72). The shaft extension end of the pressure plate (73) passes through the tapered roller bearing and is coaxially connected to the shaft of the silicon rod rotary motor (71) through a coupling (75). The silicon rod contact surfaces of the pressure plates (73) of the two rotary mechanisms are arranged opposite each other and located at the left and right ends of the silicon rod (10). The two rotating mechanisms slide in opposite directions or in opposite directions along the two clamping jaws (63) to clamp or release the silicon rod in coordination; the single rotation angle of the silicon rod rotating motor (71) is 90 degrees.

[0008] Preferably, the light source assembly includes a top strip light source (81), a left strip light source (82), a right strip light source (83), a left L-shaped bracket (84), a right L-shaped bracket (85), a screen (86), a left screen limiting block (87), and a right screen limiting block (88), wherein: The top strip light source (81) is installed on the top bracket, above the manual inspection port (12), parallel to the long axis of the silicon rod, and the irradiation direction faces the upper surface of the silicon rod. The left L-shaped bracket (84) and the right L-shaped bracket (85) are respectively installed below the two U-shaped sides of the U-shaped opening, and are fixedly connected to the lower surface of the horizontal platform (13) and the inner surface of the front panel. The left strip light source (82) is fixedly installed on the horizontal side of the left L-shaped bracket (84), perpendicular to the long axis of the silicon rod, and the irradiation direction faces the left side of the silicon rod. The right strip light source (83) is fixedly installed on the horizontal side of the right L-shaped bracket (85), perpendicular to the long axis of the silicon rod, and the irradiation direction faces the right side of the silicon rod. The lower crossbar of the curtain (86) is fixed at both ends to the vertical sides of the left L-shaped bracket (84) and the right L-shaped bracket (85). The upper crossbar of the curtain (86) is fixed at both ends by the left curtain limiting block (87) and the right curtain limiting block (88). The left curtain limiting block (87) is installed on the left horizontal connecting frame (21) of the top bracket (2) located on the left side of the U-shaped opening. The right curtain limiting block (88) is installed on the right horizontal connecting frame (22) of the top bracket (2) located on the right side of the U-shaped opening. The upper and lower horizontal bars of the curtain 11 are both horizontally arranged and work together to tension the curtain body. The illumination parts of the left bar light source (82), the top bar light source (81), and the right bar light source (83) are located on the left side, the upper side, and the right side of the silicon rod, respectively. The curtain 11 is used to reflect the illumination light from the top bar light source (81) to the upper side of the silicon rod.

[0009] Preferably, the acquisition component includes four camera mounting brackets (91) fixedly mounted on the top bracket, four duckbill brackets (92) fixedly mounted on the ends of each of the camera mounting brackets (91), and four cameras mounted on each of the duckbill brackets (92). The lenses of the four cameras are all facing the silicon rod (10) located at the detection position. The shooting range of camera 1 (93) includes the left side and the left end of the upper side of the silicon rod, the shooting range of camera 2 (94) includes the left half of the upper side of the silicon rod, the shooting range of camera 3 (95) includes the right half of the upper side of the silicon rod, and the shooting range of camera 4 (96) includes the right end of the upper side and the right side of the silicon rod.

[0010] Preferably, the vision controller has at least five network ports, which are used to connect the first camera (93), the second camera (94), the third camera (95), the fourth camera (96), and the switch, respectively.

[0011] Preferably, the material of the light shield is light-shielding cloth or light-shielding plate.

[0012] Furthermore, the present invention provides a surface defect detection system for monocrystalline silicon rods, including a conveying mechanism and the aforementioned surface defect detection device for monocrystalline silicon rods. The conveying mechanism is used to transport the silicon rod to the location of the surface defect detection device for surface defect detection, and then remove the detected silicon rod. The moving path of the conveying mechanism passes through the left and right sides of the lower part of the cubic frame of the surface defect detection device. The surface defect detection device is used to acquire images of the silicon rod to be detected in four poses, each pose having four shooting angles. The main controller of the surface defect detection device includes: A receiving module is used to receive signals from the photoelectric sensor switch; The silicon rod clamping mechanism drive module is used to drive the clamping mechanism drive motor of the silicon rod clamping mechanism to rotate, so that the two rotating mechanisms move towards each other until they contact and clamp the silicon rod; The lifting mechanism drive module is used to drive the lifting mechanism to rise, so that the silicon rod moves from the initial position to the detection position; The light source component driving module is used to activate the top bar light source, the left bar light source, and the right bar light source to provide supplementary lighting; it is also used to adjust the brightness of the top bar light source, the left bar light source, and the right bar light source. The vision controller drive module is used to generate a drive signal after the silicon rod is in a specified pose and send it to the vision controller through a switch, so that the vision controller drives the vision acquisition component to take pictures and obtain images of the silicon rod at four shooting angles in the current pose. A rotation mechanism drive module is used to drive two of the rotation mechanisms to rotate the silicon rod axially to change the position of the silicon rod. The single rotation angle is 90 degrees, the rotation frequency is f seconds, and the rotation mechanism returns to the center position after 4 rotations. The vision controller includes: A receiving module is used to receive the drive signal sent by the main controller via the switch; The image acquisition module is used to execute the driving signal and acquire images of the silicon rod in its current pose from cameras 1, 2, 3, and 4 through the vision controller. The defect identification module is used to identify defects in silicon rods based on the images acquired by the image acquisition module and the inference model, and to obtain defect identification results for each pose. Each defect identification result contains defect location identification information from four images. A storage module is used to store the images acquired by the image acquisition module and the identification information of the defective parts; The defect result identification module is used to obtain the silicon rod defect identification result based on the defect identification result of each of the aforementioned poses. The silicon rod defect identification result is either qualified or unqualified, wherein qualified means that no defective parts were found in the images captured in each of the aforementioned poses.

[0013] As can be seen from the above technical solution, the single-crystal silicon rod surface defect detection device and system provided in this embodiment of the invention comprises: a cuboid frame, a top support, a light shield, a silicon rod clamping mechanism, a lifting mechanism, a rotating mechanism, a light source assembly, a vision acquisition assembly, a vision controller, and a main controller. The front side plate has a manual inspection port; the top support is fixedly installed on the edge of the U-shaped opening on the horizontal platform inside the cuboid frame; the light source assembly and the vision acquisition assembly are installed on the top support; the lifting mechanism is installed on the inner surface of the front side plate, the silicon rod clamping mechanism is installed on the lifting mechanism for clamping the silicon rod, and the rotating mechanism is installed on the silicon rod clamping mechanism. The silicon rod, the rotating mechanism, and the silicon rod clamping mechanism move up and down synchronously with the lifting mechanism; the vision controller is connected to the vision acquisition assembly and an interactive device. This automates the silicon rod detection process, eliminating the need for direct manual observation, reducing labor intensity, and improving the accuracy of the detection results. Attached Figure Description

[0014] Figure 1 This is a first schematic diagram of the single-crystal silicon rod surface defect detection device of the present invention.

[0015] Figure 2 This is a second schematic diagram of the single-crystal silicon rod surface defect detection device of the present invention.

[0016] Figure 3 This is a partial structural schematic diagram of a device for detecting surface defects on a single-crystal silicon rod.

[0017] Figure 4 This is an appearance diagram of a device for detecting surface defects in single-crystal silicon rods.

[0018] Figure 5 This is a schematic diagram of a rotating mechanism.

[0019] Figure 6 A schematic diagram of the installation structure for the camera mounting bracket 91 and the duckbill bracket 92.

[0020] Figure 7 This is a schematic diagram of the camera's position and angle.

[0021] Figure 8 A diagram illustrating the shooting range of each camera.

[0022] Figure 9 The diagram illustrates the principles of light enhancement for the screen and the shooting principles of camera 1 and camera 2.

[0023] Figure 10 Diagram illustrating the principles of side lighting, camera #3, and camera #4.

[0024] Figure 11 This describes the workflow of a device for detecting surface defects in single-crystal silicon rods.

[0025] Figure 12 This is a system workflow diagram.

[0026] Figure 13 This is a flowchart illustrating the process of a defect detection software system performing single pose detection on a silicon rod.

[0027] Figure 14 The technical approach for implementing the system defect identification module.

[0028] In the diagram: 1. Cube frame; 2. Top support; 3. Sunshade; 4. Photoelectric sensor switch; 10. Silicon rod; 11. Front side plate; 12. Manual inspection port; 13. Cover plate; 14. Hinge; 21. Left horizontal connecting frame; 22. Right horizontal connecting frame; 51. Lifting slide rail; 52. Lifting screw assembly; 53. Lifting motor; 521. Bearing seat; 522. Screw; 523. First screw slide table; 531. Lifting motor seat; 61. Steel frame; 62. Bidirectional screw assembly; 63. Clamping jaws; 64. Clamping drive motor; 611. First clamping jaw guide rail; 612. Second clamping jaw guide rail; 613. Bidirectional screw. 621. Second lead screw slide; 622. Pressure plate; 631. Clamping drive motor mounting base; 641. Silicon rod rotary motor; 71. Rotary motor mounting support; 72. Pressure plate; 73. Tapered roller bearing; 74. Through coupling; 75. Top strip light source; 81. Left strip light source; 82. Right strip light source; 83. Left L-shaped bracket; 84. Right L-shaped bracket; 85. Screen; 86. Left screen limit block; 87. Right screen limit block; 88. Camera mounting bracket; 91. Duckbill bracket; 92. Camera 1; 93. Camera 2; 94. Camera 3; 95. Camera 4; 96. Detailed Implementation

[0029] The technical solution and effects of the present invention will be further described in detail below with reference to the accompanying drawings.

[0030] This invention provides a surface defect detection device for monocrystalline silicon rods, which is part of a silicon rod production line. The cut silicon rods are rectangular in shape and are transported by a silicon rod conveying mechanism (e.g., a silicon rod trolley) to the location of the surface defect detection device for surface defect detection. Figures 1-5 As shown, the single-crystal silicon rod surface defect detection device comprises: a cuboid frame 1 with a front side plate, a top support 2, a light shield 3, a photoelectric sensor switch 4, a lifting mechanism, a silicon rod clamping mechanism, a rotating mechanism, a light source assembly, a vision acquisition assembly, a main controller, and a vision controller. The photoelectric sensor switch 4, silicon rod clamping mechanism, lifting mechanism, rotating mechanism, and light source assembly are all connected to the main controller. The vision acquisition assembly is connected to the vision controller. The main controller is connected to the vision controller via a switch. The main controller is a PLC controller, and its installation position can be any location on the single-crystal silicon rod surface defect detection device, as long as wiring is convenient.

[0031] The cuboid frame 1 is a cuboid or cube, specifically constructed from profiles, fixing brackets, and bolts. For example, the main frame is constructed using 18 aluminum profiles (40*40), and fixed with brackets as needed. The side panels mentioned are made of sheet metal. A manual inspection port 12 is provided on the front side plate 11. The height of the manual inspection port 12 is the same as the inspection position height. The opening size of the manual inspection port can be determined according to the size of the silicon rod, so that the silicon rod located at the inspection position is fully exposed. The cover plate 13 is connected to the front side plate 11 by a hinge 14. The hinge 14 is installed on the outer surface of the front side plate, above the manual inspection port 12. The cover plate 13 completely covers the manual inspection port 12. The cover plate 13 can be flipped up for manual inspection of the working condition. The manual inspection port can be used for manual observation of the silicon rod, and can also be used for mechanical maintenance of the device.

[0032] The interior of the cuboid frame 1 has a horizontal platform surface 13, which can be fixedly installed on the vertical profile by means of corner brackets and bolts. The horizontal platform surface 13 has a U-shaped opening with the opening direction facing forward. The top bracket 2 is fixedly installed on the upper surface of the horizontal platform surface 13, and the connection position is located at the outer edge of the U-shaped opening. The light source component and the vision acquisition component are both connected to the top bracket 2. The lifting mechanism is installed on the inner surface of the front side plate. The silicon rod clamping mechanism is installed on the lifting mechanism and is used to clamp the silicon rod 10. The rotating mechanism is installed on the silicon rod clamping mechanism and is used to control the silicon rod 10 to flip at a preset angle. The silicon rod 10, the rotating mechanism, and the silicon rod clamping mechanism move up and down synchronously with the lifting mechanism. The photoelectric sensor switch 4 is installed on the inner surface of the front panel, below the manual detection port 12, and at the same height as the initial position of the silicon rod 10; refer to Figure 4The light shield 3 is placed on top of the cuboid frame 1, covering the top and four sides of the cuboid frame 1, and has an opening at the bottom. The front of the light shield 3 covers above the manual inspection port 12 (or the upper edge of the manual inspection port), the back covers the bottom of the cuboid frame 1, and the left and right sides cover to a height higher than the height required for the conveying mechanism to drive the silicon rod 10 in and out. Here, the silicon rod is transported by the silicon rod running trolley of the production line. Specifically, it enters and exits from the bottom of the left and right sides of the cuboid frame 1. The trolley sends the silicon rod into the workstation from one side, and then it is inspected by the lifting mechanism. After the inspection is completed, the silicon rod is placed on the trolley and then sent out from the other side.

[0033] After the photoelectric sensor switch 4 detects that the silicon rod 10 to be tested has been transported to the initial position by the conveying mechanism, it sends a signal to the main controller. The main controller receives the signal from the photoelectric sensor switch 4 and controls the silicon rod clamping mechanism to clamp the silicon rod. The lifting mechanism drives the silicon rod clamping mechanism to move upward until the silicon rod 10 reaches the detection position. The rotating mechanism rotates the silicon rod 10 at timed intervals, causing the silicon rod 10 to rotate axially at a preset angle. After rotating to the designated position, the main controller sends a shooting control command to the vision controller through the switch. The vision controller controls the vision acquisition component to perform multi-directional surface image acquisition of the silicon rod 10 based on the rotation of each silicon rod and inputs the acquired data to the vision controller. The vision controller is used to perform image data analysis for surface defects. Here, the vision controller is a terminal such as a computer with image analysis function, data storage function, and a data port. After the vision acquisition component completes the acquisition, the rotating mechanism stops rotating the silicon rod 10, the lifting mechanism moves downward to send the silicon rod 10 to the initial position, the silicon rod clamping mechanism resets to release the silicon rod 10 onto the trolley, and the silicon rod is transported by the trolley to the next workstation.

[0034] The lifting mechanism includes a pair of lifting slide rails 51, a lifting screw assembly 52, and a lifting motor 53. The pair of lifting slide rails 51 are installed on the inner surface of the front side plate, opposite each other on both sides of the manual inspection port, and are perpendicular to the ground. The lifting screw assembly 52 includes two fixed bearing seats 521 arranged vertically, a screw 522 passing through the two bearing seats 521, and a first screw slide 523 passing through the screw 522. As shown in the figure, both fixed bearing seats 521 are fixedly installed on the inner surface of the front side plate. The screw 522 is perpendicular to the ground and its end is connected to the output shaft of the lifting motor 53. As shown in the figure, the screw is located on the right side of the inner surface of the front side plate. The lifting motor 53 is installed on the lifting motor seat 531, and the lifting motor seat 531 is fixedly installed on the inner surface of the front side plate. During the forward and reverse rotation of the lifting motor 53, the first screw slide 523 reciprocates along the screw 522 between the two fixed bearing seats 521.

[0035] refer to Figure 2 and Figure 3The silicon rod clamping mechanism includes a steel frame 61, a bidirectional lead screw assembly 62, two clamping claws 63 arranged opposite each other, and a clamping drive motor 64. The steel frame 61 is fixedly connected to the bottom of the first lead screw slide 523 of the lifting mechanism. The front side of the steel frame 61 has two sliders arranged left and right, and each slider is slidably connected to a lifting slide rail 51. Here, the lifting slide rail 51 and the sliders are connected by a mechanical slide rail. The sliders can only slide along the track direction within the lifting slide rail 51 and cannot be disengaged from the lifting slide rail 51. The lifting slide rail 51 can provide support for the steel frame. The rear side of the steel frame 61 has a first clamping claw guide rail 611 and a second clamping claw guide rail 612 arranged vertically. Both the first clamping claw guide rail 611 and the second clamping claw guide rail 612 are arranged horizontally. The bidirectional lead screw 621 in the bidirectional lead screw assembly 62 is horizontally arranged and passes through two second lead screw slides 622. Each of the two second lead screw slides 622 is fixedly connected to a clamping claw 63. The front side of the clamping claw 63 has a first clamping claw slider and a second clamping claw slider arranged vertically. The first clamping claw slider is slidably connected to the first clamping claw guide rail 611, and the second clamping claw slider is slidably connected to the second clamping claw guide rail 612. Here, the clamping claw guide rail is also a mechanical slide rail, which can provide support for the clamping claw. One end of the bidirectional lead screw 621 is connected to the shaft extension end of the clamping drive motor 64. The clamping drive motor 64 is fixedly connected to the bottom surface of the steel frame 61 through the clamping drive motor mounting base 641. The clamping drive motor mounting base 641 and the steel frame can be connected by bolts. The silicon rod clamping mechanism reciprocates vertically along the first lead screw slide 523 of the lifting mechanism. When the clamping drive motor 64 drives the bidirectional lead screw 621 to rotate, the two clamping claws 63 follow the two second lead screw slides 622 of the bidirectional lead screw to slide in opposite directions or in opposite directions along the first clamping claw guide rail and the second clamping claw guide rail.

[0036] Each clamping jaw 63 is equipped with a rotating mechanism, which consists of a silicon rod rotating motor 71, a rotating motor fixing support 72, and a pressure plate 73 with a shaft extension, wherein: A clamping plate 631 is fixedly installed on the rear side of the clamping jaw 63. The clamping plate 631 is perpendicular to the clamping jaw and the ground. A through hole is opened on the clamping plate 631, and a tapered roller bearing 74 is installed in the through hole. A rotary motor fixing support 72 is fixedly installed on the clamping plate 631. A silicon rod rotary motor 71 is fixedly installed on the rotary motor fixing support 72. The shaft extension end of the pressure plate 73 passes through the tapered roller bearing and is coaxially connected to the shaft of the silicon rod rotary motor 71 through a coupling 75. The silicon rod contact surfaces of the pressure plates 73 of the two rotating mechanisms are arranged opposite each other and located at the left and right ends of the silicon rod 10. Two rotating mechanisms slide in opposite directions or in opposite directions along the two clamping jaws 63 to clamp or release the silicon rod in coordination; the silicon rod rotating motor 71 rotates 90 degrees in a single rotation.

[0037] The light source assembly includes a top strip light source 81, a left strip light source 82, a right strip light source 83, a left L-shaped bracket 84, a right L-shaped bracket 85, a screen 86, a left screen limiting block 87, and a right screen limiting block 88, wherein: Refer to together Figure 7 A top bar light source 81 is mounted on a top bracket, above the manual inspection port 12, parallel to the long axis of the silicon rod, and irradiating towards the upper surface of the silicon rod. Left L-shaped brackets 84 and right L-shaped brackets 85 are respectively mounted below the two U-shaped sides of the U-shaped opening, fixedly connected to the lower surface of the horizontal platform 13 and the inner surface of the front panel. A left bar light source 82 is fixedly mounted on the horizontal side of the left L-shaped bracket 84, perpendicular to the long axis of the silicon rod, and irradiating towards the left side of the silicon rod. A right bar light source 83 is fixedly mounted on the horizontal side of the right L-shaped bracket 85, perpendicular to the long axis of the silicon rod, and irradiating towards the right side of the silicon rod. The left and right bar light sources 82 and 83 are used to supplement the light on the sides of the silicon rod. Figure 10 As shown; The lower horizontal bar of the curtain 86 is fixed at both ends to the vertical sides of the left L-shaped bracket 84 and the right L-shaped bracket 85. The upper horizontal bar of the curtain 86 is fixed at both ends by the left curtain limiting block 87 and the right curtain limiting block 88. The left curtain limiting block 87 is installed on the left horizontal connecting frame 21 located on the left side of the U-shaped opening in the top bracket 2, and the right curtain limiting block 88 is installed on the right horizontal connecting frame 22 located on the right side of the U-shaped opening in the top bracket 2. The two ends of the upper horizontal bar can slide on the left horizontal connecting frame 21 and the right horizontal connecting frame 22. After being limited by the limiting blocks, the position remains unchanged. The limiting blocks can be adjusted in position. The limiting blocks are fixed to the connecting frames by bolts. The upper and lower horizontal bars of the screen 11 are both horizontally positioned and work together to tension the screen body. The illumination points of the left-side bar light source 82, the top bar light source 81, and the right-side bar light source 83 are located on the left side, the upper side, and the right side of the silicon rod, respectively, as shown in the reference diagram. Figure 9 The screen reflection principle shown is that the white fiberglass screen 11 is used to reflect the illumination light from the top strip light source 81 to the upper side of the silicon rod, so as to provide uniform supplementary light to the upper surface and avoid mirror imaging interference by fixing the angle.

[0038] Please refer to the above. Figure 6The acquisition assembly includes four camera mounting brackets 91 fixedly mounted on a top bracket, four duckbill brackets 92 fixedly mounted at the ends of each camera mounting bracket 91, and four cameras mounted on each duckbill bracket 92. The lenses of all four cameras face the silicon rod 10 located at the detection position. Specifically, camera 1 93's field of view includes the left side and the left end of the upper side of the silicon rod; camera 2 94's field of view includes the left half of the upper side of the silicon rod; camera 3 95's field of view includes the right half of the upper side of the silicon rod; and camera 4 96's field of view includes the right end of the upper side and the right side of the silicon rod. The installation orientation and angle of the four cameras are as follows: Figure 7 As shown, the shooting range is as follows Figure 8 As shown, the areas marked ①, ②, ③, and ④ correspond to the acquisition areas of cameras 1, 2, 3, and 4, respectively. To ensure the integrity of the acquired content, adjacent areas may overlap.

[0039] Figure 9 The diagram shows the installation positions and relationships of cameras 2 and 3. Designed to address the strong reflectivity of silicon rod surfaces, the principle is as follows: light emitted from a light source is reflected relatively uniformly by a white fiberglass screen onto the silicon rod surface, and then reflected by the industrial camera for imaging. The camera positions are shown in the diagram, with the camera fixed at a 45° angle to the horizontal. The white fiberglass screen is suspended, first supported by struts 1 and 2, and then secured to a designated structure. During setup, it's crucial to ensure the images captured by the camera are free from strong reflection interference. The key aspect here is the design of the white fiberglass screen, which serves two purposes: first, to provide uniform illumination to the silicon rod surface; and second, to avoid imaging interference caused by specular reflection from the silicon rod, ensuring image quality. This solution can be further extended to supplementary lighting technologies for visual inspection in other fields, such as large-area, reflective surfaces like floor tiles and glass.

[0040] Figure 10 The image shows the installation positions and relationships of cameras 1 and 4. The installation angle is approximately 45° to the horizontal plane, which can be slightly adjusted according to actual needs. There is no reflection on the end face of the silicon rod, so normal supplemental lighting is sufficient. The light source is fixed to the top bracket with screws, and the height is adjusted according to the camera installation angle.

[0041] Key points during mechanical system debugging: 1) The camera is fixed at a suitable angle without shaking; 2) Appropriate supplementary lighting angle, information acquisition angle, and supplementary lighting brightness. Point 1) is mainly considered and adjusted during design and assembly, using a stable bracket; 2) Regarding the supplementary lighting angle, installation and debugging are strictly carried out according to the hardware design, and parameters such as supplementary lighting brightness and camera exposure time are adjusted to obtain ideal image data, thereby improving the quality of acquired image information.

[0042] Figure 7 This paper proposes a structured light supplementary lighting method for silicon rod surfaces. The method has been validated in actual production and shows good results. It can be further extended to supplementary lighting solutions for visual inspection of large-area, highly reflective object surfaces. Specifically, a strip light source 81 illuminates a white fiberglass screen, which then reflects the light evenly onto the upper surface of the silicon rod, creating a good shooting environment for cameras 2 and 3. During the debugging process, special attention must be paid to ensuring the light source brightness is appropriate; too bright a light source will cause overexposure, while too dim a light source will cause the loss of defect features. Since the sides of the silicon rod do not have strong reflective properties, strip light sources 82 and 83 are used directly to supplement the side illumination.

[0043] Its characteristics are: First, it significantly reduces costs. Currently, most supplementary lighting methods used for large-area object surface inspection are surface light sources, which are expensive and costly. Second, it avoids interference caused by mirror imaging from reflective surfaces. Actual industrial environments are complex; supplementary lighting and imaging from a fixed angle can avoid interference caused by mirror imaging. Third, it enhances the detection features through surface reflection.

[0044] In this invention, the material of the light shield is light-shielding cloth or light-shielding plate. The function of the light shield is to avoid interference from uneven external light and ensure uniform illumination on each surface of the silicon rod inside the device.

[0045] The vision controller has at least 5 network ports, which are used to connect to camera 1 (93), camera 2 (94), camera 3 (95), camera 4 (96), and the field switch. The main controller can output control commands to the vision controller through the interactive device, and the vision controller will execute the control commands after detecting them.

[0046] This invention also provides a surface defect detection system for single-crystal silicon rods, including a conveying mechanism and... Figures 1-10 The single-crystal silicon rod surface defect detection device shown includes a conveying mechanism for transporting the silicon rod to the location of the device for surface defect detection, and then removing the detected silicon rod. The conveying mechanism passes through the left and right sides of the lower part of the cubic frame of the single-crystal silicon rod surface defect detection device. The single-crystal silicon rod surface defect detection device is used to acquire images of the silicon rod to be detected in four positions (A-side up, B-side up, C-side up, and D-side up), with each position having images from four shooting angles. The main controller of the single-crystal silicon rod surface defect detection device includes: The receiving module is used to receive signals from the photoelectric sensor switch; The silicon rod clamping mechanism drive module is used to drive the clamping mechanism drive motor of the silicon rod clamping mechanism to rotate, so that the two rotating mechanisms move towards each other until they contact and clamp the silicon rod. The lifting mechanism drive module is used to drive the lifting mechanism to rise, so that the silicon rod moves from the initial position to the detection position; The light source component driver module is used to activate the top bar light source, the left bar light source, and the right bar light source to provide supplementary lighting; it is also used to adjust the brightness of the top bar light source, the left bar light source, and the right bar light source. The vision controller driver module is used to generate a drive signal after the silicon rod is in a specified pose and send it to the vision controller through a switch, so that the vision controller drives the vision acquisition component to take pictures and obtain images of the silicon rod at four shooting angles in the current pose. The rotation mechanism drive module is used to drive two rotation mechanisms to rotate the silicon rod axially to change the position of the silicon rod. The single rotation angle is 90 degrees, the rotation frequency is f seconds, and the rotation mechanism returns to the center position after 4 rotations. The vision controller includes: The receiving module is used to receive drive signals sent by the main controller via the switch. The image acquisition module is used to acquire images of various poses captured by cameras 1, 2, 3, and 4 through the vision controller; The defect identification module is used to identify defects in silicon rods based on images acquired by the image acquisition module and an inference model, obtaining defect identification results for each pose. Each defect identification result contains defect location identification information from four images; for example... Figure 14 As shown, a defect dataset can be created using historical defect data. This dataset can then be input into the training model to further optimize the model's network structure, calculate the optimal weights, and further adjust the parameters and optimize the model. The inference model extracts defect features from the dataset during model training to predict defect information in unknown images. The specific process for obtaining the inference model's features is described in [reference needed]. Figure 14 The model training section shown is completed using a computing server to obtain the optimal model required for the defect identification process. The inference engine is the key to the defect identification module, used to predict whether defects exist, output the prediction results, and store the relevant data of this defect identification in the defect data set.

[0047] The storage module is used to store the images acquired by the image acquisition module and the identification information of the defective parts; The defect result identification module is used to obtain the silicon rod defect identification result based on the defect identification result of each of the aforementioned poses. The silicon rod defect identification result is either qualified or unqualified, wherein qualified means that no defective parts were found in the images captured in each of the aforementioned poses.

[0048] The working process of the single-crystal silicon rod surface defect detection device is as follows: Figure 11 As shown. A specific embodiment is provided below, which also incorporates manual inspection: When a silicon rod arrives on the production line, it triggers a photoelectric sensor switch. The PLC controller detects the change in the photoelectric sensor switch, reads the silicon rod's code, and assigns it to a specific node. The detection system software monitors this node. When the node value is not "NULL", it indicates that there is a silicon rod to be detected, and the system needs to be in a ready-to-detect state. Conversely, if the node value is "NULL", it means that there is no silicon rod to be detected on the production line at the moment, and the system can be set to a "dormant" state to reduce energy consumption.

[0049]

[0050] When a silicon rod is to be inspected on the production line, the system detects that the silicon rod's coded node information is not empty, and activates the system. The on-site PLC controller sends a signal indicating that surface A has rotated into position, sets the signal node to "True", and holds it for 200ms. The system detects that surface A has rotated into position, triggers the camera to acquire surface A and saves the acquired data. Then, it sends a signal to the recognition module in the system indicating that four images have been acquired. The inference and recognition module then completes the detection of the four images of surface A and saves the surface A result to a string variable (here, surface A represents the pose with surface A facing upwards).

[0051] The process takes approximately 2.3 seconds from the completion of image acquisition from side A to the start of image acquisition from side B. The system's time to recognize four images is less than 1 second. Therefore, when image acquisition from side B begins, side A has ample time to complete the detection. However, to prevent information confusion, the acquired images are named according to a specific logic to avoid data errors. This process is repeated for sides B, C, and D. After completion, the recognition results for all four sides (A, B, C, and D) are written into the system. The written data includes: 1. Silicon rod code, 2. Side A recognition result, 3. Side B recognition result, 4. Side C recognition result, 5. Side D recognition result, 6. Manual recognition result, and 7. Machine recognition result. The silicon rod defect recognition result is a summary of the defect detection results for each of the four sides (A, B, C, and D) in the upward-facing pose. A satisfactory defect recognition result means that no defect was detected in any of the 16 images corresponding to the four poses. Conversely, a failed defect recognition result means that at least one defect was found in the 16 images.

[0052] The workflow of PLC controllers and vision controllers can be found in the following references. Figure 12 , and Figure 11 Yes, they correspond.

[0053] The detection process for a single pose of a silicon rod is as follows: Figure 13The diagram shows the workflow of the system recognizing a single side. Note that a single silicon rod has four sides: A, B, C, and D, corresponding to four poses: side A facing upwards, side B facing upwards, side C facing upwards, and side D facing upwards. Each side requires image data to be collected from four camera positions (1, 2, 3, and 4), resulting in a total of 16 images for a single silicon rod. All image data is stored in the system for evaluation of recognition results and further optimization.

[0054] The specific process for completing the testing of a single silicon rod is as follows: The photoelectric sensor detects that the conveying mechanism has delivered the silicon rod to be tested to its initial position. Then, the PLC controller detects the silicon rod's arrival signal and controls the clamping mechanism's drive motor to rotate, which in turn drives the bidirectional lead screw to rotate. The lead screw then drives the silicon rod clamping jaws (left and right) to move along the slide rails fixed to the steel frame, completing the clamping action. After clamping, the PLC controls the lifting motor to rotate, driving the lifting lead screw to raise the silicon rod to the test position. The silicon rod detection system receives the arrival signal and begins detecting side A. The system saves and outputs the detection result. The silicon rod rotates 90°, and the same steps are used to detect side B. Then, sides C and D are detected sequentially. After the silicon rod is completely detected, the system analyzes the results and outputs them to the PLC controller. The PLC controls the lifting motor to rotate and drive the lifting screw to place the silicon rod onto the conveying mechanism. It also controls the clamping mechanism to release the silicon rod, and then the clamping mechanism rises to ensure that the flow of silicon rods on the production line is not affected. The system transmits the identification result data to the PLC controller and proceeds to the next process as needed according to the result conditions. Thus, the appearance defect detection of a single silicon rod is completed.

[0055] This system primarily targets the appearance inspection of square silicon rods during the squaring process. The inspected surface possesses complex optical properties, including strong reflection and diffraction. In actual production, numerous uncertainties contribute to the formation of defects, resulting in a wide variety and unpredictable types of defects, making identification challenging. Furthermore, the actual production environment presents significant interference factors, all of which are key issues in the development of intelligent manufacturing. This invention first designs a mechanical system for silicon rod appearance inspection, such as a supplementary lighting system. Then, it utilizes a YOLO neural network to extract defect features from a dataset. Based on OpenVino edge deployment technology, it achieves silicon rod defect detection functionality suitable for industrial production environments. Finally, it combines a multi-camera + silicon rod rotation technology to realize the appearance inspection of square silicon rods. This invention proposes a supplementary lighting method suitable for large-area, highly reflective object surfaces, achieved through structured light, reflective supplementary lighting, and reflection characteristics. The software system employs OPC UA communication technology, deep learning technology, and OpenVino edge deployment technology as key technologies, proposing a multi-camera + object rotation detection method. In the deep learning part of the system, the YOLO object detection model is used. During the later optimization process, it can be adjusted according to actual needs, such as replacing it with a two-stage detection model RCNN, etc., and all of them can be integrated into the system for users to choose from.

[0056] The above-disclosed embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the invention. Those skilled in the art will understand that implementing all or part of the above-described embodiments and making equivalent changes in accordance with the claims of the present invention are still within the scope of the invention.

Claims

1. A device for detecting surface defects in a single-crystal silicon rod, characterized in that, include: The system comprises a cuboid frame (1) with a front side panel, a top support (2), a light shield (3), a photoelectric sensor switch (4), a lifting mechanism, a silicon rod clamping mechanism, a rotating mechanism, a light source assembly, a vision acquisition assembly, a main controller, and a vision controller. The photoelectric sensor switch (4), the silicon rod clamping mechanism, the lifting mechanism, the rotating mechanism, and the light source assembly are all connected to the main controller. The vision acquisition assembly is connected to the vision controller. The main controller is connected to the vision controller via a switch. A manual inspection port (12) is provided on the front side panel (11). The height of the manual inspection port (12) is the same as the height of the inspection position. The cover plate (13) is connected to the front side panel (11) by a hinge (14). The hinge (14) is installed on the outer surface of the front side panel above the manual inspection port (12). The cover plate (13) completely covers the manual inspection port (12). The cuboid frame (1) has a horizontal platform (13) inside, and the horizontal platform (13) has a U-shaped opening with the opening direction facing forward. The top bracket (2) is fixedly installed on the upper surface of the horizontal platform (13) and the connection position is located at the outer edge of the U-shaped opening. The light source assembly and the vision acquisition assembly are both connected to the top bracket (2). The lifting mechanism is installed on the inner surface of the front side plate, the silicon rod clamping mechanism is installed on the lifting mechanism for clamping the silicon rod (10), the rotating mechanism is installed on the silicon rod clamping mechanism for controlling the silicon rod (10) to flip at a preset angle, and the silicon rod (10), the rotating mechanism, and the silicon rod clamping mechanism move up and down synchronously with the lifting mechanism. The photoelectric sensor switch (4) is installed on the inner surface of the front side plate, below the manual detection port (12), and at the same height as the initial position of the silicon rod (10); The light shield (3) is placed on top of the cuboid frame (1), covering the top and four sides of the cuboid frame (1), and has an opening at the bottom. The front of the light shield (3) covers the upper edge of the manual inspection port (12), the back covers the bottom of the cuboid frame (1), and the left and right sides cover the height required for the conveying mechanism to drive the silicon rod (10) in and out. After the photoelectric sensor switch (4) detects that the silicon rod (10) to be detected has been transported to the initial position by the conveying mechanism, it sends a signal to the main controller. The main controller receives the signal from the photoelectric sensor switch (4) and controls the silicon rod clamping mechanism to clamp the silicon rod. The lifting mechanism drives the silicon rod clamping mechanism to move upward until the silicon rod (10) reaches the detection position. The rotating mechanism rotates the silicon rod (10) at regular intervals, causing the silicon rod (10) to rotate axially at a preset angle. After rotating to the specified pose, the main controller sends a shooting control command to the vision controller through the switch. The vision controller controls the vision acquisition component to perform multi-directional surface image acquisition of the silicon rod (10) based on the rotation of each silicon rod. The vision acquisition component inputs the acquired data to the vision controller. The vision controller is used to perform image data analysis for surface defects. After the images of each pose of the silicon rod have been acquired, the rotating mechanism resets, the lifting mechanism moves downward to send the silicon rod (10) to the initial position, and the silicon rod clamping mechanism resets to release the silicon rod (10). The light source assembly includes a top strip light source (81), a left strip light source (82), a right strip light source (83), a left L-shaped bracket (84), a right L-shaped bracket (85), a screen (86), a left screen limiting block (87), and a right screen limiting block (88), wherein: The top strip light source (81) is installed on the top bracket, above the manual inspection port (12), parallel to the long axis of the silicon rod, and the irradiation direction faces the upper surface of the silicon rod. The left L-shaped bracket (84) and the right L-shaped bracket (85) are respectively installed below the two U-shaped sides of the U-shaped opening and are fixedly connected to the lower surface of the horizontal platform (13) and the inner surface of the front side plate. The left strip light source (82) is fixedly installed on the horizontal side of the left L-shaped bracket (84), perpendicular to the long axis of the silicon rod, and the irradiation direction faces the left side of the silicon rod. The right strip light source (83) is fixedly installed on the horizontal side of the right L-shaped bracket (85), perpendicular to the long axis of the silicon rod, and the irradiation direction faces the right side of the silicon rod. The lower crossbar of the curtain (86) is fixed at both ends to the vertical sides of the left L-shaped bracket (84) and the right L-shaped bracket (85). The upper crossbar of the curtain (86) is fixed at both ends by the left curtain limiting block (87) and the right curtain limiting block (88). The left curtain limiting block (87) is installed on the left horizontal connecting frame (21) of the top bracket (2) located on the left side of the U-shaped opening. The right curtain limiting block (88) is installed on the right horizontal connecting frame (22) of the top bracket (2) located on the right side of the U-shaped opening. The upper and lower horizontal bars of the curtain (86) are both horizontally arranged and work together to tension the curtain body. The illumination parts of the left bar light source (82), the top bar light source (81), and the right bar light source (83) are located on the left side, the upper side, and the right side of the silicon rod, respectively. The curtain (86) is used to reflect the illumination light of the top bar light source (81) to the upper side of the silicon rod to provide uniform illumination on the upper surface and avoid interference from mirror imaging.

2. The single-crystal silicon rod surface defect detection device as described in claim 1, characterized in that, The lifting mechanism includes a pair of lifting slide rails (51), a lifting screw assembly (52), and a lifting motor (53). The pair of lifting slide rails (51) are installed on the inner surface of the front side plate, opposite to each other on both sides of the manual inspection port, and perpendicular to the ground. The lifting screw assembly (52) includes two fixed bearing seats (521) arranged vertically, a screw (522) passing through the two bearing seats (521), and a first screw slide (523) passing through the screw (522). The two fixed shafts The bearing seats (521) are all fixedly installed on the inner surface of the front side plate. The lead screw (522) is set perpendicular to the ground and its end is connected to the output shaft of the lifting motor (53). The lifting motor (53) is installed on the lifting motor seat (531), and the lifting motor seat (531) is fixedly installed on the inner surface of the front side plate. During the forward and reverse rotation of the lifting motor (53), the first lead screw slide (523) reciprocates along the lead screw (522) between the two fixed bearing seats (521).

3. The single-crystal silicon rod surface defect detection device as described in claim 2, characterized in that, The silicon rod clamping mechanism includes a steel frame (61), a bidirectional lead screw assembly (62), two clamping claws (63) arranged opposite to each other, and a clamping drive motor (64). The steel frame (61) is fixedly connected to the bottom of the first lead screw slide (523) of the lifting mechanism. The front side of the steel frame (61) has two sliders arranged left and right, and each of the two sliders is slidably connected to one of the lifting slide rails (51). The rear side of the steel frame (61) has a first clamping claw guide rail and a second clamping claw guide rail arranged vertically. The first clamping claw guide rail (611) and the second clamping claw guide rail (612) are both arranged horizontally. The bidirectional lead screw (621) in the bidirectional lead screw assembly (62) is horizontally arranged and passes through two second lead screw slides (622). Each of the two second lead screw slides (622) is fixedly connected to a clamping claw (63). The front side of the clamping claw (63) has a first clamping claw slider and a second clamping claw slider arranged vertically. The first clamping claw slider is slidably connected to the first clamping claw guide rail (611), and the second clamping claw slider is slidably connected to the second clamping claw guide rail (612). The end of the bidirectional lead screw (621) is connected to the shaft extension end of the clamping drive motor (64). The clamping drive motor (64) is fixedly connected to the bottom surface of the steel frame (61) through the clamping drive motor fixing seat (641). The silicon rod clamping mechanism reciprocates in the vertical direction following the first lead screw slide (523) of the lifting mechanism. When the clamping drive motor (64) drives the bidirectional lead screw (621) to rotate, the two clamping jaws (63) slide in opposite directions or towards each other in the horizontal direction along the first clamping jaw guide rail (611) and the second clamping jaw guide rail (612) following the two second lead screw slides (622) of the bidirectional lead screw.

4. The single-crystal silicon rod surface defect detection device as described in claim 3, characterized in that, Each of the clamping jaws (63) is equipped with a rotating mechanism, which consists of a silicon rod rotating motor (71), a rotating motor fixing support (72), and a pressure plate (73) with a shaft extension, wherein: A pressure plate (631) is fixedly installed on the rear side of the clamping claw (63). The pressure plate (631) is perpendicular to the clamping claw and the ground. A through hole is opened on the pressure plate (631), and a tapered roller bearing (74) is installed in the through hole. The rotary motor fixing support (72) is fixedly installed on the pressure plate (631). The silicon rod rotary motor (71) is fixedly installed on the rotary motor fixing support (72). The shaft extension end of the pressure plate (73) passes through the tapered roller bearing and is coaxially connected to the shaft of the silicon rod rotary motor (71) through a coupling (75). The silicon rod contact surfaces of the pressure plates (73) of the two rotary mechanisms are arranged opposite each other and located at the left and right ends of the silicon rod (10). The two rotating mechanisms slide in opposite directions or in opposite directions along the two clamping jaws (63) to clamp or release the silicon rod in coordination; the single rotation angle of the silicon rod rotating motor (71) is 90 degrees.

5. The single-crystal silicon rod surface defect detection device as described in claim 4, characterized in that, The acquisition assembly includes four camera mounting brackets (91) fixedly mounted on the top bracket, four duckbill brackets (92) fixedly mounted on the ends of each of the camera mounting brackets (91), and four cameras mounted on each of the duckbill brackets (92). The lenses of the four cameras are all facing the silicon rod (10) located at the detection position. The shooting range of camera 1 (93) includes the left side and the left end of the upper side of the silicon rod, the shooting range of camera 2 (94) includes the left half of the upper side of the silicon rod, the shooting range of camera 3 (95) includes the right half of the upper side of the silicon rod, and the shooting range of camera 4 (96) includes the right end of the upper side and the right side of the silicon rod.

6. The single-crystal silicon rod surface defect detection device as described in claim 5, characterized in that, The vision controller has at least five network ports, which are used to connect to camera 1 (93), camera 2 (94), camera 3 (95), camera 4 (96), and the switch, respectively.

7. The single-crystal silicon rod surface defect detection device as described in claim 6, characterized in that, The material of the light shield is light-shielding cloth or light-shielding board.

8. A surface defect detection system for a single-crystal silicon rod, characterized in that, The device includes a conveying mechanism and a single-crystal silicon rod surface defect detection device as described in any one of claims 1-7. The conveying mechanism is used to transport the silicon rod to the location of the single-crystal silicon rod surface defect detection device for surface defect detection, and then remove the detected silicon rod. The moving path of the conveying mechanism passes through the left and right sides of the lower part of the cubic frame of the single-crystal silicon rod surface defect detection device. The single-crystal silicon rod surface defect detection device is used to acquire images of the silicon rod to be detected in four poses, each pose having images from four shooting angles. The main controller of the single-crystal silicon rod surface defect detection device includes: A receiving module is used to receive signals from the photoelectric sensor switch; The silicon rod clamping mechanism drive module is used to drive the clamping mechanism drive motor of the silicon rod clamping mechanism to rotate, so that the two rotating mechanisms move towards each other until they contact and clamp the silicon rod; The lifting mechanism drive module is used to drive the lifting mechanism to rise, so that the silicon rod moves from the initial position to the detection position; The light source component driving module is used to activate the top bar light source, the left bar light source, and the right bar light source to provide supplementary lighting; it is also used to adjust the brightness of the top bar light source, the left bar light source, and the right bar light source. The vision controller drive module is used to generate a drive signal after the silicon rod is in a specified pose and send it to the vision controller through a switch, so that the vision controller drives the vision acquisition component to take pictures and obtain images of the silicon rod at four shooting angles in the current pose. A rotation mechanism drive module is used to drive two of the rotation mechanisms to rotate the silicon rod axially to change the position of the silicon rod. The single rotation angle is 90 degrees, the rotation frequency is f seconds, and the rotation mechanism returns to the center position after 4 rotations. The vision controller includes: A receiving module is used to receive the drive signal sent by the main controller via the switch; The image acquisition module is used to execute the driving signal and acquire images of the silicon rod in its current pose from cameras 1, 2, 3, and 4 through the vision controller. The defect identification module is used to identify defects in silicon rods based on the images acquired by the image acquisition module and the inference model, and to obtain defect identification results for each pose. Each defect identification result contains defect location identification information from four images. A storage module is used to store the images acquired by the image acquisition module and the identification information of the defective parts; The defect result identification module is used to obtain the silicon rod defect identification result based on the defect identification result of each of the aforementioned poses. The silicon rod defect identification result is either qualified or unqualified, wherein qualified means that no defective parts were found in the images captured in each of the aforementioned poses.

Images