A laser collimation deformation measurement system and method

Abstract

The application provides a laser collimation deformation measurement system and method, comprising: a laser emission unit fixedly arranged on a structure to be measured and used for emitting a laser beam along a first direction; a plurality of laser detection units fixedly arranged on the structure to be measured along the first direction in sequence, the laser beam passing through the plurality of laser detection units in sequence, and the laser detection units being used for detecting position coordinates of the laser beam and shape and size of scattering imaging; and a terminal unit connected with the laser emission unit and the laser detection units respectively and used for calculating changes in the position coordinates of the laser beam and the shape and size of scattering imaging to determine displacement and deflection of a measurement point where each laser detection unit is located. The plurality of laser detection units determine displacement and deflection of the measurement point of each laser detection unit by measuring changes in relative position of the laser beam and shape and size of scattering imaging, and determine overall displacement and deflection of the structure to be measured based on displacement and deflection of each measurement point.

Description

Technical Field

[0001] This application relates to the field of deformation measurement technology, and in particular to a laser collimation deformation measurement system and method. Background Technology

[0002] Deformation of the surface foundation, superstructure, and surrounding environment of large structures such as high-speed rail tracks, dams, and bridges reflects the health status of these structures, indicating whether deformation has occurred. Deformation includes displacement and settlement. Monitoring the structure of these infrastructures has become a crucial daily task in the industry. This deformation data provides essential technical information for the operation, maintenance, design, management, and scientific research of infrastructure.

[0003] However, in the deformation measurement of large structures, whether using leveling, intersection measurement, static leveling, or liquid pressure leveling, there are problems such as high cost, low accuracy, and incompatibility with complex installation conditions. Therefore, they are not well applicable to deformation measurement in fields such as rail transportation.

[0004] While Chinese patent CN115112092A employs laser photoelectric measurement to measure building deformation, it does not describe the technical features related to determining the changes in the shape and size of the laser beam. Furthermore, it does not explain how to determine the coordinates of the measurement unit to determine the changes in the laser beam's position. In other words, the measurement unit does not image the laser beam. Therefore, relying solely on a cloud platform or a light spot sensor within the measurement unit to obtain the laser beam's shape and size may introduce significant errors. Thus, to accurately calculate the changes in the laser beam's shape and size, the laser detection unit must image the laser beam without affecting its path to the next laser detection unit. Reducing calculation errors is crucial for understanding building deformation. Summary of the Invention

[0005] In view of this, the purpose of this application is to provide a laser collimation deformation measurement system and method that overcomes or at least partially solves the above problems.

[0006] To achieve the above objectives, this application provides a laser collimation deformation measurement system, comprising:

[0007] A laser emitting unit is fixedly mounted on the structure to be tested and is used to emit a laser beam along a first direction, wherein the first direction is the deformation measurement direction of the structure to be tested.

[0008] A laser detection unit, comprising multiple units, is sequentially and fixedly disposed on the structure to be tested along the first direction. The laser beam passes through the multiple laser detection units sequentially. The laser detection unit is used to detect the position coordinates of the laser beam and the shape and size of the scattered image.

[0009] The terminal unit is connected to the laser emitting unit and the laser detection unit respectively, and is used to calculate the position coordinate changes of the laser beam and the shape and size changes of the scattering image to determine the displacement and deflection of the measurement point where each laser detection unit is located, and to determine the overall displacement and deflection of the structure under test based on the displacement and deflection of each measurement point.

[0010] Optionally, the laser detection unit includes a photoelectric sensor and a detector. The photoelectric sensor is connected to the detector. The photoelectric sensor is used to scatter and image the laser beam, and the detector is used to acquire the position coordinates of the laser beam.

[0011] Optionally, the photoelectric sensor includes a cavity, a beam scattering device, and a scattering imaging sensor. The cavity includes a first optical window and a second optical window arranged opposite to each other. The laser beam passes through the first optical window and the second optical window in sequence. The optical scattering device and the scattering imaging sensor are disposed in the cavity. The beam scattering device is used to scatter the laser beam to form a scattered beam, and the scattering imaging sensor is used to image the scattered beam.

[0012] Optionally, the beam scattering device includes a gas density control unit, which controls the density of gas in the cavity to form the scattered beam from the laser beam.

[0013] Optionally, the beam scattering device includes: a plurality of optical materials arranged side by side in the cavity along the first direction for forming the scattered beam.

[0014] Optionally, the scattering imaging sensor includes at least one imaging surface for imaging a scattered light beam incident on the imaging surface, and the imaging surface is disposed on the inner wall of the cavity excluding the first optical window and the second optical window.

[0015] Optionally, the terminal unit is used to acquire a complete image of each of the scattered beams on the imaging surface, and calculate the average size of the complete image to determine the deflection of the laser emitting unit and / or the laser detection unit.

[0016] The method for measuring laser collimation deformation using the system described above includes:

[0017] At a first moment, the laser emitting unit is controlled to emit the laser beam, and each of the laser detection units measures the first position of the laser beam passing through it; and records the first shape and size of the laser beam scattering image.

[0018] At a second time, the laser emitting unit is controlled to emit the laser beam, and each of the laser detection units measures the second position of the laser beam passing through it and records the second shape and size of the laser beam scattering image;

[0019] Calculate the coordinate difference between the second position and the first position of each laser detection unit to determine the displacement of each laser detection unit. Calculate the deviation between the second shape dimension and the first shape dimension of each laser detection unit to determine the deflection of each laser detection unit. Combine the displacement and deflection of each laser detection unit to determine the overall displacement and overall deflection of the structure.

[0020] Optionally, the process of determining the first position and the second position includes:

[0021] At the first moment, the laser emitting unit is controlled to emit the laser beam, and the detector of each laser detection unit records the first center point of the laser beam in the first optical window, and establishes a coordinate system with the first center point as the origin and the second direction and the third direction as the coordinate axes; the second direction and the third direction are perpendicular.

[0022] Record the first center point as the first position;

[0023] At the second time, the laser emitting unit is controlled to emit the laser beam, and the detector of each laser detection unit records the second center point of the laser beam in the first optical window, and determines the position coordinates of the second center point in the coordinate system as the second position.

[0024] Optionally, calculating the deviation between the shape and size of the second scattering image and the shape and size of the first scattering image for each laser detection unit, and determining the deflection of each laser detection unit, includes:

[0025] At the first moment, the average shape size of all complete scattering images of the imaging surface of the scattering imaging sensor is calculated as the first shape size;

[0026] At the second time, the average shape size of all complete scattering images of the imaging surface of the scattering imaging sensor is calculated as the second shape size;

[0027] The deviation between the second shape size and the first shape size is calculated to determine the deflection of each laser detection unit.

[0028] As can be seen from the above, the laser collimation deformation measurement system and method provided in this application can simultaneously measure the displacement changes of multiple measurement points on the same structure. At the same time, multiple laser detection units determine the displacement of their respective measurement points by measuring the relative position and shape and size changes of the laser beam. The measurement accuracy is high, the error caused by the laser detection unit itself refraction of the laser beam is eliminated, the measurement accuracy is high, the cost is low, and it can adapt to complex installation environment conditions.

[0029] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and in order to make the above and other objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention are described below. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in this application or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of a laser collimation deformation measurement system according to an embodiment of this application;

[0032] Figure 2 This is a schematic diagram of a laser emitting unit according to an embodiment of this application;

[0033] Figure 3 This is a schematic diagram of a laser detection unit according to an embodiment of this application;

[0034] Figure 4 This is a schematic diagram of a photoelectric sensor according to an embodiment of this application;

[0035] Figure 5 This is a schematic diagram of another photoelectric sensor according to an embodiment of this application. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with specific embodiments and the accompanying drawings.

[0037] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this application should have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0038] When measuring the deformation of large structures such as high-speed railway tracks, dams, and bridges, relevant technologies utilize leveling methods, such as photoelectric levels with passive targets. However, these instruments require manual on-site measurement each time, making online measurement impossible. While convergence leveling is costly and these instruments are large and have stringent environmental requirements, a more advanced method for settlement measurement is the hydrostatic level based on the connecting pipe principle. This method involves filling individual sensor tanks with liquid, which are connected by a connecting pipe. This creates a reference surface within the tanks, and displacement sensors measure the changes in each point relative to this reference surface. Sensors based on this principle are widely used in engineering, but their large size, the need for liquid filling, and cumbersome construction limit their application. Another type of level uses the liquid pressure measurement principle. This involves sealing the liquid tanks of each sensor and connecting them through a liquid connecting pipe. The pressure generated by the liquid at different heights and the relationship between the liquid height and density are used to measure the relative displacement between points, thus measuring changes in settlement. However, the data deviation is large due to the influence of ambient temperature, and the measurement accuracy is on the order of several millimeters. Meanwhile, in related technologies, sensors that utilize laser collimation characteristics to achieve point-to-point measurement operate on a point-to-point basis. When either point is tilted, it significantly affects the measurement results. The sensor cannot distinguish whether the false alarm is caused by horizontal, vertical, or tilted displacement. Similarly, the sensor cannot distinguish whether the laser beam is deflected or the support structure of the laser emitter and receiver has changed due to temperature.

[0039] In summary, when performing deformation measurement using related technologies, it is impossible to simultaneously measure the displacement and deflection of multiple measurement points using a single laser emitting unit and multiple laser detection units. Essentially, one measuring device measures one point. If multiple measurement points are to be measured simultaneously, multiple laser emitting units are required, which is costly. Furthermore, since the laser emitting and receiving units are point-to-point, any displacement or deflection at any point, or changes in the support structure of the laser emitting and receiving ends due to temperature variations, can significantly impact the measurement results.

[0040] In order to reduce costs, the system can simultaneously measure the displacement and deflection of multiple detection points on a structure. Furthermore, when displacement or deflection occurs at one detection point, it will not affect the measurement of other detection points, thereby reducing or even eliminating the measurement error of each detection point.

[0041] Based on this, refer to Figure 1 In a first aspect, this application provides a laser collimation deformation measurement system, comprising:

[0042] A laser emitting unit 11 is fixedly mounted on the structure 15 to be tested and is used to emit a laser beam 17 along a first direction, wherein the first direction is the deformation measurement direction of the structure 15 to be tested. The structure 15 to be tested can be any large structure 15 such as a high-speed rail track, dam, or bridge. The laser emitting unit 11 is used to emit the laser beam 17. It can be understood that the laser emitting unit 11 serves as a reference point fixing a certain position of the structure 15, and the direction of the laser beam 17 is used as the measurement direction of the deformation of the structure 15, which is the first direction. Figure 1 In the diagram, the first direction is the direction of the X-axis.

[0043] Further, refer to Figure 2 The laser emitting unit 11 includes a laser emitter 22, an optical component 23, and a laser controller 24. The optical component 23 is coupled to the emitting end of the laser emitter 22 and is used to compress the laser emitted by the laser emitter 22 to form a laser beam 17. The laser emitter 22 is connected to the laser controller 24, which is used to modulate the phase and energy of the laser beam 17. It is understood that the laser emitted by the laser emitter 22 has good directionality, but it may still have a certain divergence angle. By controlling the laser emitted by the laser emitter 22 through the optical component 23, the emitted laser can form a parallel laser beam 17 or a laser beam 17 with a divergence angle of less than 1 mrad. Similarly, the optical component 23 can also split the laser emitted by the laser emitter 22 to generate structured light, which is not limited here. It is understood that the laser controller 24 improves the stability of the laser beam 17 by modulating its phase and energy.

[0044] Multiple laser detection units 12 are sequentially fixedly arranged on the structure 15 under test along the first direction. The laser beam 17 passes through the multiple laser detection units 12 sequentially. The laser detection units 12 are used to detect the position coordinates and the shape and size of the scattered image of the laser beam 17. In order to simultaneously measure multiple detection points using a single laser emitting unit 11, multiple laser detection units 12 are arranged along the first direction of the structure 15, so that the laser beam 17 emitted by the laser emitting unit 11 passes through the multiple laser detection units 12 sequentially. The position coordinates of the laser beam 17 incident at the first time and the second time are detected by each laser detection unit 12. At the same time, the laser detection units 12 perform scattering imaging on the incident laser beam 17, and each laser detection unit 12 detects the size of the scattering image of the laser beam 17 incident at the first time and the second time. It is understandable that when the laser beam 17 passes through the first laser detection unit 12 for scattering imaging, it will not affect the laser beam 17 passing through the first laser detection unit 12 and continuing to be emitted towards the second laser detection unit 12 along the first direction. Similarly, the laser beam 17 can pass through all the laser detection units 12 along the first direction.

[0045] Terminal unit 16, connected to laser emitting unit 11 and laser detection unit 12 respectively, is used to calculate the position coordinate changes of laser beam 17 and the shape and size changes of scattering imaging to determine the displacement and deflection of the measurement points of each laser detection unit 12, and to determine the overall displacement and deflection of the structure under test 15 based on the displacement and deflection of each measurement point. By calculating the position coordinates of the laser beam 17 incident by each laser detection unit 12 at the first and second times, it is determined whether the position of the laser beam 17 detected by each laser detection unit 12 at the second time has changed relative to the position of the laser beam 17 detected by each laser detection unit 12 at the first time, thereby determining the displacement of the detection point of each laser detection unit 12. At the same time, it is calculated that the shape and size of the scattering imaging of the laser beam 17 incident by each laser detection unit 12 at the first and second times has changed relative to the shape and size of the laser beam 17 detected by each laser detection unit 12 at the second time, thereby determining the deflection of the detection point of each laser detection unit 12.

[0046] It is understood that the terminal unit 16 can also be used to store data of the laser emitting unit 11 and the laser detection unit 12, and send control commands to the laser emitting unit 11 and the laser detection unit 12, so as to synchronously control the operation of the laser emitting unit 11 and the laser detection unit 12.

[0047] Here, terminal unit 16 can be one or more terminal devices, or it can be a server. Terminal devices include, but are not limited to, desktop computers, mobile phones, mobile computers, tablet computers, media players, smart wearable devices, personal digital assistants (PDAs), or other electronic devices capable of performing the above functions. The server can be an independent physical server, a server cluster or distributed system composed of multiple physical servers, or a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, CDN, and big data and artificial intelligence platforms.

[0048] In some embodiments, both the laser emitting unit 11 and the laser detection unit 12 are provided with a communication module for communicating with the terminal unit 16, i.e., sending data to the terminal unit 16 and receiving and executing control commands issued by the terminal unit 16. The communication modules of the laser emitting unit 11 and the laser detection unit 12 can be wired or wireless. The wireless communication module can be Wi-Fi, LoRa, or NB-IoT based on a public network, or a 4G or 5G communication module. The wired communication module can use Ethernet communication for wired connection communication.

[0049] In some embodiments, reference Figure 3 The laser detection unit 12 includes a photoelectric sensor 32 and a detector 31. The photoelectric sensor 32 is used to scatter and image the laser beam 17, and the detector 31 is used to acquire the position coordinates of the laser beam 17. It can be understood that the detector 31 detects and records the position coordinates of the laser beam 17 incident on the laser detection unit 12. Simultaneously, the detector 31 is connected to the photoelectric sensor 32, which scatters and images the laser beam 17, while the detector 31 similarly detects and records the shape and size of the image formed by the scattering of the laser beam 17.

[0050] Further, refer to Figure 4 , Figure 5The photoelectric sensor 32 includes a cavity 48, a beam scattering device, and a scattering imaging sensor 44. The cavity 48 includes a first optical window 41 and a second optical window 43 arranged opposite to each other. The laser beam 17 emitted from the laser emitting unit 11 enters through the first optical window 41 and exits through the second optical window 43. Between the first optical window 41 and the second optical window 43, the optical scattering device scatters the laser beam 17 entering the first optical window 41 to form a scattered beam 46. The scattered beam 46 is imaged by the scattering imaging sensor 44. It can be understood that when the optical scattering device scatters the laser beam 17, it does not affect the transmission of the laser beam 17 from the first optical window 41 to the second optical window 43, ensuring that the laser beam 17 can pass through the laser detection unit 12.

[0051] The detector 31 records the position coordinates of the laser beam 17 on the first optical window 41, and at the same time records the shape and size of the laser beam 17 imaged by the scattering imaging sensor 44.

[0052] Further, refer to Figure 4 The beam scattering device includes a gas density control unit 42, which controls the gas density in the cavity 48 to form the scattered beam 46 from the laser beam 17. By changing the gas in the cavity 48 through the gas density control unit 42, the refractive index of the gas in the cavity 48 is altered, causing the laser beam 17 to generate the scattered beam 46 due to the change in refractive index. This scattered beam 46 becomes visible to the scattering imaging sensor 44, which then images the scattered beam 46. Taking any one of the laser detection units 12 as an example, the deviation between the shape and size of the image of the second-time scattered beam 46 and the image of the first-time scattered beam 46 is calculated. This determines the deviation in the shape and size of the laser beam 17 detected twice by the same laser detection unit 12, thus determining the deflection of the laser detection unit 12.

[0053] Here, the gas density control unit 42 can be an electrothermal device that changes the density of the gas in the cavity 48 by heating, making the refractive index of the gas in the cavity 48 non-uniform. The gas in the cavity 48 generates scattering, making the scattered light beam 46 visible. It should be noted that the gas density control unit 42 in this application is not limited to an electrothermal device. Any device that can change the gas density in the cavity 48 and achieve the above-mentioned corresponding effect can be used as a replacement for the gas density control unit 42. No specific limitation is made here.

[0054] Similarly, the gas in cavity 48 can be air or other gases. Due to the fluidity of air, changes in air density will cause changes in the image formed by the scattered beam 46, and these changes are random. Here, based on the scattered imaging sensor 44 recording all shapes and sizes of the scattered images when the gas in the cavity reaches a certain density or temperature within the first time period, the terminal unit 16 determines the shape and size of the scattered image at the first time period by calculating the average value of all shapes and sizes of the scattered images. Similarly, based on the scattered imaging sensor 44 recording all shapes and sizes of the scattered images when the gas in the cavity reaches the same density or temperature within the second time period, the terminal unit 16 determines the shape and size of the scattered image at the second time period by calculating the average value of all shapes and sizes of the scattered images. By comparing the shape and size of the scattered image at the second time period with that at the first time period, it is determined whether the current laser detection unit 12 has deflected, thereby determining whether the measurement point where the current laser detection unit 12 is located has deflected. Simultaneously, averaging eliminates random errors and increases measurement accuracy.

[0055] In some embodiments, the beam scattering device includes a plurality of optical materials 51 for forming the scattered beam 46. It is understood that the function of the plurality of optical materials 51 is the same as that of the gas density control unit 42 described above; the laser beam 17 is emitted and scattered by the optical materials 51 to form the scattered beam 46. The refractive indices of the plurality of optical materials 51 can be the same or different. The laser beam 17 is scattered at the interface of the plurality of optical materials 51 to form the scattered beam 46. The scattered beam 46 is imaged on the scattering imaging sensor 44. The plurality of optical materials are arranged side-by-side in the cavity 48 along a first direction. It should be noted that the optical materials need to scatter the laser beam 17 while also allowing the laser beam 17 to be projected through the optical materials, so that the laser beam 17 exits from the second optical window 43.

[0056] In some embodiments, the plurality of optical materials 51 may be transparent gels. Alternatively, materials that perform the same function as transparent gels in forming a scattered beam of laser beam may be used instead, and no specific limitation is made here.

[0057] In some embodiments, the scattering imaging sensor 44 includes at least one imaging surface for imaging the scattered beam 46 incident on the imaging surface. In related technologies, to image the laser beam 17, the imaging surface needs to face the laser beam 17 directly. However, if the imaging surface faces the laser beam 17 directly, the laser beam 17 cannot propagate to subsequent laser detection units 12 after imaging at the laser detection unit 12 closest to the laser emitting unit 11. To solve this problem, this application proposes to use the scattering of the laser beam 17 for imaging. In this way, the imaging surface does not need to face the laser beam 17 propagating from the first optical window 41 to the second optical window 43. The imaging surface is disposed on the inner wall of the cavity 48 excluding the first optical window 41 and the second optical window 43. Figure 4 and Figure 5 As shown, the imaging surface can be installed on the inner walls of the four side walls of the cavity 48, which will not affect the laser beam 17 passing through the laser detection unit 12, while also enabling the laser beam 17 to be scattered and imaged.

[0058] In some embodiments, the terminal unit 16 is used to acquire a complete image of each of the scattered beams 46 on the imaging surface and calculate the average size of the complete image to determine the shape change of the laser beam 17. As described above, it can be understood that, regardless of whether a gas density control device or multiple optical materials are used, when scattering the laser beam 17 to form a scattered beam 46, there cannot be only one scattered beam 46. That is, there may be more than one scattered image on the imaging surface of the scattering imaging sensor 44. Therefore, when the terminal unit 16 acquires the shape size of the scattered image, errors may occur due to the uncertainty of scattering. The solution is to acquire complete images of all scattered images on the imaging surface and then calculate the average shape size of all complete images.

[0059] It is understandable that, regarding the shape and size of the aforementioned scattering image, if the cross-sectional shape (spot) of the laser beam 17 is circular, the diameter of the cross-sectional shape of the laser beam 17 can be used as a reference to calculate the average shape of the scattering image; if the cross-sectional shape of the laser beam 17 is rectangular, the length and width of the cross-sectional shape of the laser beam 17 can be used as a reference to calculate the average shape of the scattering image.

[0060] The method for measuring laser collimation deformation using the system described above includes:

[0061] At a first moment, the laser emitting unit is controlled to emit the laser beam, and each of the laser detection units measures the first position of the laser beam passing through it; and records the first shape and size of the laser beam scattering image.

[0062] At a second time, the laser emitting unit is controlled to emit the laser beam, and each of the laser detection units measures the second position of the laser beam passing through it and records the second shape and size of the laser beam scattering image;

[0063] Calculate the coordinate difference between the second position and the first position of each laser detection unit to determine the displacement of each laser detection unit. Calculate the deviation between the second shape dimension and the first shape dimension of each laser detection unit to determine the deflection of each laser detection unit. Combine the displacement and deflection of each laser detection unit to determine the overall displacement and deflection of the structure.

[0064] It is understandable that the aforementioned two measurements, the second time and the first time, use the data measured by each laser detection unit at the first time as the baseline data. By comparing the data detected by each laser detection unit at the second time with the baseline data, the change of each laser detection unit at the second time relative to the first time can be measured. Furthermore, the time interval between the second time and the first time can be any interval, such as six months or a year. Similarly, the second time can also be the time after a natural disaster occurs to the structure; no specific limitation is made here.

[0065] In some embodiments, the process of determining the first position and the second position includes:

[0066] At the first moment, the laser emitting unit is controlled to emit the laser beam, and the detector of each laser detection unit records the laser beam at the first center point of the first optical window, and establishes coordinates with the first center point as the origin and the second direction and the third direction as coordinate axes; the second direction and the third direction are perpendicular.

[0067] Record the first center point as the first position;

[0068] refer to Figure 1 One laser emitting unit is placed on the far left, and three laser detection units are arranged sequentially from near to far from the laser emitting unit. The laser beam emitted by the laser emitting unit passes through the three laser detection units in sequence. At the first instant, the coordinates of the center point of the first optical window recorded by the three laser detection units are x and x respectively. 11 y 11 x 12 y 12 and x 13 y 13 That is, x 11 y 11 x 12 y 12 x 13 y 13 The values ​​are 0, 0, 0, 0, 0, 0.

[0069] At the second time, the laser emitting unit is controlled to emit the laser beam, and the detector of each laser detection unit records the second center point of the laser beam in the first optical window, and determines the position coordinates of the second center point in the coordinate system as the second position.

[0070] At the second time, the coordinates of the center point of the first optical window recorded by the three laser detection units are x 21 y 21 x 22 y 22 and x 23 y 23 .

[0071] Calculate the coordinate difference between the second position and the first position to determine the displacement of each laser detection unit, and simultaneously determine the overall displacement of the structure based on the coordinate difference;

[0072] Based on the above description, the coordinate difference between the second position and the first position is DX. 11 =x 21 -x 11 DY 11 =y 21 -y 11 DX 12 =x 22 -x 12 DY 12 =y 22 -y 12 DX 13 =x 23 -x 13 DY 13 =y 23 -y 13 , where DX 11 DX 12 and DX 13 The displacements along the x-axis of the second position recorded at the second time and the first position recorded at the first time, respectively, are given by the three laser detection units: DY. 11 DY 12 and DY 13 The displacements along the y-axis are calculated by combining the displacements of the three laser detection units along the x-axis and y-axis at the second and first time points, respectively, for the second position recorded at the second time point and the first position recorded at the first time point. The overall displacement of the structure is determined by comprehensively calculating the displacements of the three laser detection units along the x-axis and y-axis.

[0073] In some embodiments, calculating the change in shape and size of the second scattering image of each laser detection unit relative to the shape and size of the first scattering image, and determining the deflection of each laser detection unit, includes:

[0074] At the first moment, the average shape size of all complete scattering images of the imaging surface of the scattering imaging sensor is calculated as the first shape size;

[0075] At the second time, the average shape size of all complete scattering images of the imaging surface of the scattering imaging sensor is calculated as the second shape size;

[0076] The deviation between the second shape dimension and the first shape dimension is calculated to determine the deflection of each laser detection unit, and the overall deflection of the structure is determined based on the deflection of each laser detection unit.

[0077] As mentioned above, the laser transmitter and receiver are point-to-point. When either point is tilted, it significantly affects the measurement results. The sensor cannot distinguish whether the false alarm is caused by horizontal, vertical, or tilted displacement. (Reference) Figure 1 For example, if the laser detection unit closest to the laser emitting unit shifts upward and deflects to the right, and if the center position of the laser beam is at the same coordinate position in the first optical window at the first and second times, but the current laser detection unit has shifted and deflected, then the difference between the coordinates of the second and first positions indicates that the current laser detection unit has not shifted. However, the deviation between the second and first shape dimensions indicates that the current laser detection unit has deflected. By fitting the deviation between the first and second shape dimensions, the deflection angle of the current laser detection unit can be determined. For example, if the first and second shape dimensions deviate by 1 cm in a certain direction, then the current laser detection unit has deflected 5 degrees to the right. If the first and second shape dimensions deviate by 1 cm in the opposite direction, then the current laser detection unit has deflected 5 degrees to the left. By using the fitting result, the upward displacement distance of the current laser detection unit can be determined, thus eliminating the false alarms mentioned above.

[0078] Of course, on the other hand, if the coordinate difference between the second and first positions of each laser detection unit is the same, and the second shape and size are identical to the first shape and size, the laser emitting unit may shift upwards or downwards (settle). If the coordinate difference between the second and first positions of each laser detection unit is zero, and the second shape and size are identical to the first shape and size, then the structure will not deform, or it may settle (rise) synchronously. Synchronous settlement (rise) has virtually no impact on the structure. Similarly, changes in the supporting structure between the laser emitting unit and the laser detection unit and the structure due to temperature are also synchronous changes. This can be understood as the change in the supports of the laser emitting unit and the laser detection unit due to temperature being equivalent to synchronous settlement (rise).

[0079] The laser collimation measurement system of this application is easy to install and can measure the displacement of the measurement point where the laser measurement unit is located along the x-axis (horizontal) and y-axis (vertical). At the same time, it can measure the deflection of the laser detection unit caused by the tilt of the measurement point, making it more practical.

[0080] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this application (including the claims) is limited to these examples; within the framework of this application, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of the embodiments of this application as described above, which are not provided in the details for the sake of brevity.

[0081] Additionally, to simplify the description and discussion, and to avoid obscuring the embodiments of this application, the well-known power / ground connections to integrated circuit (IC) chips and other components may or may not be shown in the provided drawings. Furthermore, the apparatus may be shown in block diagram form to avoid obscuring the embodiments of this application, and this also takes into account the fact that the details of the implementation of these block diagram apparatuses are highly dependent on the platform on which the embodiments of this application will be implemented (i.e., these details should be fully understood by those skilled in the art). While specific details (e.g., circuits) have been set forth to describe exemplary embodiments of this application, it will be apparent to those skilled in the art that the embodiments of this application can be implemented without these specific details or with variations thereof. Therefore, these descriptions should be considered illustrative rather than restrictive.

[0082] Although this application has been described in conjunction with specific embodiments thereof, many substitutions, modifications, and variations of these embodiments will be apparent to those skilled in the art from the foregoing description. For example, other memory architectures (e.g., dynamic RAM (DRAM)) may be used with the embodiments discussed.

[0083] The embodiments of this application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the embodiments of this application should be included within the protection scope of this application.

Claims

1. A laser collimation deformation measurement system, characterized in that, include: A laser emitting unit is fixedly mounted on the structure to be tested and is used to emit a laser beam along a first direction, wherein the first direction is the deformation measurement direction of the structure to be tested. A laser detection unit, comprising multiple units, is sequentially and fixedly disposed on the structure to be tested along the first direction. The laser beam passes through the multiple laser detection units sequentially. The laser detection unit is used to detect the position coordinates of the laser beam and the shape and size of the scattered image. The terminal unit is connected to the laser emitting unit and the laser detection unit respectively, and is used to calculate the position coordinate change of the laser beam and the shape and size change of the scattering image to determine the displacement and deflection of the measurement points where each laser detection unit and the laser emitting unit are located, and to determine the overall displacement and deflection of the structure under test based on the displacement and deflection of each measurement point; The laser detection unit includes a photoelectric sensor, which is used to scatter and image the laser beam; The photoelectric sensor includes a cavity, a beam scattering device, and a scattering imaging sensor. The cavity includes a first optical window and a second optical window arranged opposite to each other. The laser beam passes through the first optical window and the second optical window in sequence. The beam scattering device and the scattering imaging sensor are disposed in the cavity. The beam scattering device is used to scatter the laser beam to form a scattered beam, and the scattering imaging sensor is used to image the scattered beam. The beam scattering device includes a gas density control unit, which controls the density of gas in the cavity to form the scattered beam from the laser beam.

2. The system according to claim 1, characterized in that, The laser detection unit also includes a detector, and the photoelectric sensor is connected to the detector. The detector is used to collect the position coordinates of the laser beam.

3. The system according to claim 1, characterized in that, The beam scattering device includes: a plurality of optical materials arranged side by side in the cavity along the first direction to form the scattered beam.

4. The system according to claim 1, characterized in that, The scattering imaging sensor includes at least one imaging surface, which is used to image the scattered light beam incident on the imaging surface, and the imaging surface is disposed on the inner wall of the cavity excluding the first optical window and the second optical window.

5. The system according to claim 4, characterized in that, The terminal unit is also used to acquire all complete images of the scattered beam on the imaging surface and to calculate the average shape and size of the complete images.

6. A method for measuring laser collimation deformation using the system described in any one of claims 1-5, characterized in that, include: At a first moment, the laser emitting unit is controlled to emit the laser beam, and each of the laser detection units measures the first position of the laser beam passing through it; and records the first shape and size of the laser beam scattering image. At a second time, the laser emitting unit is controlled to emit the laser beam, and each of the laser detection units measures the second position of the laser beam passing through it and records the second shape and size of the laser beam scattering image; Calculate the coordinate difference between the second position and the first position of each laser detection unit to determine the displacement of each laser detection unit. Calculate the deviation between the second shape dimension and the first shape dimension of each laser detection unit to determine the deflection of each laser detection unit. Combine the displacement and deflection of each laser detection unit to determine the overall displacement and overall deflection of the structure.

7. The method according to claim 6, characterized in that, The process of determining the first position and the second position includes: At the first moment, the laser emitting unit is controlled to emit the laser beam, and the detector of each laser detection unit records the first center point of the laser beam in the first optical window, and establishes a coordinate system with the first center point as the origin and the second direction and the third direction as the coordinate axes; the second direction and the third direction are perpendicular. Record the first center point as the first position; At the second time, the laser emitting unit is controlled to emit the laser beam, and the detector of each laser detection unit records the second center point of the laser beam in the first optical window, and determines the position coordinates of the second center point in the coordinate system as the second position.

8. The method according to claim 7, characterized in that, Calculating the change in shape and size of the second scattering image of each laser detection unit compared to the shape and size of the first scattering image, and determining the deflection of each laser detection unit, includes: At the first moment, the average shape size of all complete scattering images of the imaging surface of the scattering imaging sensor is calculated as the first shape size; At the second time, the average shape size of all complete scattering images of the imaging surface of the scattering imaging sensor is calculated as the second shape size; The deviation between the second shape size and the first shape size is calculated to determine the deflection of each laser detection unit.

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