working device

Abstract

The work implement (1) is a work implement that combines a rotary unit (Ru) and a linear motion unit (63). The rotary unit (Ru) includes a link action device (7) and a rotary actuator (Ra). In the link action device (7), a front end side link pivot hub (13) is connected to a base end side link pivot hub (12) in a posture changeable manner via three or more link mechanisms (14). The link action device (7) is installed on an output portion of the rotary actuator (Ra) in a manner that a central axis (QA) of the base end side link pivot hub (12) forms an angle (θt) with respect to a rotation axis (Ca) of the rotary actuator (Ra). The linear motion unit (63) includes a linear motion actuator (67) that constitutes an output portion, and the rotary unit (Ru) is installed on the linear motion actuator (67).

Description

[0001] Related applications

[0002] This application claims priority to JP Patent Application 2020-193449, filed on November 20, 2020, which is incorporated herein by reference in its entirety. Technical Field

[0003] This invention relates to a working device for equipment that requires high speed, high precision, a wide range of motion, and fine movements, such as medical equipment or industrial equipment. Background Technology

[0004] In Patent Document 1, a working device is proposed that performs a prescribed operation through a parallel linkage mechanism having a base plate and a movable plate, which are connected by multiple links. By coordinating the movement of these links, the movable plate is moved.

[0005] In Patent Document 2, a linkage action device was proposed that, while being compact, can perform a wide range of actions with high speed and high precision.

[0006] In Patent Document 3, a working device was proposed that combines a linear motion unit with a rotating unit as a gimbal mechanism.

[0007] Patent document 4 proposes a working device using a general vertical multi-joint robot.

[0008] Patent document 5 proposes a working device (appearance inspection device) that combines a linkage action device and a linear motion unit.

[0009] Existing technical documents

[0010] Patent documents

[0011] Patent Document 1: JP Japanese Patent Application Publication No. 2000-094245

[0012] Patent Document 2: US Patent No. 5893296

[0013] Patent Document 3: JP Japanese Patent Application Publication No. 2013-064644

[0014] Patent Document 4: JP 2017-026441

[0015] Patent Document 5: JP 2018-194443 Summary of the Invention

[0016] The problem the invention aims to solve

[0017] In the parallel linkage mechanism of Patent Document 1, because the actuation angle of each link is small, the link length becomes longer if a larger actuation range of the moving plate is desired. Therefore, the overall size of the mechanism increases, leading to a larger device. Furthermore, there are limitations due to the low overall rigidity of the mechanism and the weight of the tool mounted on the moving plate, i.e., the small transportable weight of the moving plate.

[0018] In the linkage action device of Patent Document 2, the range of motion in the rotation direction is greater than that of the parallel linkage mechanism of Patent Document 1. However, since it cannot move in the planar direction, it is difficult to achieve complex operations by means of the linkage action device alone.

[0019] In Patent Documents 3 and 4, working devices for positioning cameras and workpieces at various angles have been proposed. However, the rotating mechanism in Patent Document 3 has the same structure as the wrist joint of a typical vertical joint robot. Even with slight changes in the position of the front end, there is a problem that the rotating mechanism undergoes significant movement, resulting in a slower movement speed. Specifically, when rotation is required, the rotation axis (equivalent to the first rotation axis 131 in Patent Document 3) needs to move significantly relative to the front end. Furthermore, in the vertical joint robot in Patent Document 4, the same problem as in Patent Document 3 exists when the position of the front end is slightly changed. In addition, due to the large overall movement of the robot, the overall size of the device increases if safety barriers or similar structures are installed.

[0020] To address these issues, a working device combining a linkage mechanism and a linear motion unit, as described in Patent Document 5, has been proposed. However, while Patent Document 5 achieves a compact working device, it can only approach the workpiece from a hemispherical direction (e.g., the northern hemisphere). Therefore, even when it is desired to perform the operation from below the workpiece, the workpiece needs to be reversed.

[0021] The purpose of this invention is to provide a working device that can achieve a large working range relative to the workpiece, can perform fine work with high speed and high precision like manual work, and can shorten the adjustment work of setting.

[0022] Technical solutions for solving the problem

[0023] The working device of the present invention is a working device composed of a rotary unit and a linear motion unit.

[0024] The aforementioned rotating unit includes a linkage action device and a rotation actuator;

[0025] In the above-described linkage mechanism, the front-end linkage hub is connected to the base-end linkage hub via three or more linkage mechanisms in a manner that allows for posture changes. Each linkage mechanism includes end linkage components on the base-end side and the front-end side, and intermediate linkage components. One end of the end linkage components on the base-end side and the front-end side is rotatably connected to the base-end linkage hub and the front-end linkage hub, respectively. Both ends of the intermediate linkage component are rotatably connected to the other ends of the end linkage components on the base-end side and the front-end side, respectively. An attitude control actuator is provided on two or more of the three or more linkage mechanisms. The attitude control actuator can arbitrarily change the posture of the front-end linkage hub relative to the base-end linkage hub.

[0026] The aforementioned linkage actuation device is mounted on the output section of the aforementioned rotary actuator such that the central axis of the aforementioned linkage hub on the base end side forms an angle θt with respect to the rotation axis of the aforementioned rotary actuator;

[0027] The linear motion unit described above includes a linear motion actuator constituting the output section, and the rotary unit described above is mounted on the linear motion actuator.

[0028] According to this scheme, the central axis of the connecting rod hub on the base side of the linkage actuator is configured with the rotation axis of the rotary actuator in such a way that they form an angle θt. This allows the working range of the linkage actuator to be shifted. For example, if the linkage actuator with a maximum bending angle of 90° is installed directly below, the working range of the linkage actuator relative to the workpiece is only in the Northern Hemisphere direction. However, if the central axis of the connecting rod hub on the base side is configured with the rotation axis of the rotary actuator in such a way that they form an angle θt, then operation can be performed only in the direction forming the angle θt, from the Southern Hemisphere direction.

[0029] Furthermore, by rotating the linkage mechanism with an angle θt, the direction in which angle θt is formed can be rotated in the rotational direction. Therefore, if the rotary actuator is rotated ±180° around this axis, operation can be performed relative to the workpiece from all sides in the Southern Hemisphere. As a result, compared to the past, the working range of the workpiece can be increased, and the setup and adjustment operations can be shortened. In addition, due to the use of the linkage mechanism, high-speed, high-precision, and delicate operations similar to manual operation can be achieved.

[0030] Alternatively, two or more attitude control actuators of the aforementioned linkage action device may be arranged such that their rotation axes are perpendicular to the central axis of the linkage hub on the base end side. The intersection of the rotation axes of the two or more attitude control actuators is located on the central axis of the linkage hub on the base end side, which forms the aforementioned angle θt. The bisecting line of the rotation axes of two of the two or more attitude control actuators is located on the plane formed by the rotation axis of the rotation actuator and the central axis of the linkage hub on the base end side. The bisecting line is located on the acute angle side of the angle formed by the rotation axis of the rotation actuator and the central axis of the linkage hub on the base end side.

[0031] According to this scheme, compared to structures where the linkage mechanism is tilted in other directions, the likelihood of interference between the actuator for posture control and the rotary actuator is lower, allowing for a shorter distance between the rotary actuator and the linkage mechanism. As a result, the overall working device can be made more compact. Furthermore, due to the reduced inertial torque of the rotary actuator and the lighter weight of the rotary unit, high-speed operation of the entire working device can be achieved.

[0032] The aforementioned rotary actuator may further include an actuator body for rotation control, and a reducer for slowing down the rotation of the actuator body. At least a cable carrier (cable chain, registered trademark) protecting and guiding the cable extending from the attitude control actuator is provided in a manner that allows it to slide around the rotary actuator in the rotational direction. With this structure, the rotary actuator has an actuator body for rotation control and a reducer; therefore, compared to rotary actuators with a rotation drive without a reducer, radial compactness of the rotary actuator can be achieved. By providing a cable chain that slides in the rotational direction around the rotary actuator, which provides free space, the cable connected to the attitude control actuator of the linkage mechanism can be compactly stored in the cable chain. Therefore, cable handling becomes easier, and concerns about cable breakage are reduced.

[0033] The aforementioned linear motion unit may further include: a first linear motion actuator, a second linear motion actuator, and a third linear motion actuator constituting the output portion of the aforementioned linear motion unit, all mounted on a frame. The rotary unit is mounted on the third linear motion actuator. With this structure, workpieces transported by a conveyor or the like can be processed; for example, it can be configured as a single unit without changing the conveyor line.

[0034] The aforementioned linear motion unit may also include: the aforementioned first linear motion actuator, the aforementioned second linear motion actuator, and the aforementioned third linear motion actuator. The first linear motion actuator has a first sliding portion mounted on the aforementioned platform and a first sliding portion driven forward and backward along the first sliding portion. The second linear motion actuator has a second sliding portion connected to the aforementioned first sliding portion and a second sliding portion driven forward and backward along the second sliding portion. The third linear motion actuator has a third sliding portion connected to the aforementioned second sliding portion and a third sliding portion driven forward and backward along the third sliding portion. According to this scheme, in the linear motion unit, the second sliding portion is connected to the first sliding portion, and the third sliding portion is connected to the second sliding portion. Therefore, the working device can be easily installed on an existing conveyor line. Thus, the versatility of the working device can be improved.

[0035] Alternatively, the first and second linear motion actuators can be configured such that their forward and backward directions are orthogonal to each other, and the third linear motion actuator can be configured such that its forward and backward direction is orthogonal to the forward and backward directions of the first and second sliding parts. By arranging the linear motion units in this way, moving in orthogonal three-axis directions, the working device can be operated intuitively. Therefore, not only is operability improved, but the balance of the working device is also stabilized, enabling high-speed operation.

[0036] Alternatively, the third linear motion actuator can be configured such that the retraction direction of the third sliding part is vertical, with the third sliding part serving as a guide for the linear motion actuator and the third slidable part serving as a sliding worktable for the linear motion actuator. This design easily avoids interference between the workpiece and the third sliding part of the linear motion unit, allowing for a compact overall size of the working device. In this design, because the workpiece's operating range is expanded, the third sliding part, particularly in the third linear motion actuator constituting the output section of the linear motion unit, easily contacts the workpiece. If, as in this design, the guide for the third sliding part moves vertically, the linear motion unit can be moved at high speed in all directions while simultaneously moving the third sliding part relative to the workpiece to a position that avoids interference.

[0037] The aforementioned rotary actuator can also be configured such that its rotation axis is parallel to the forward and backward direction of the third sliding part. With this structure, operations on workpieces conveyed by conveyors or the like become easier. When operating on workpieces conveyed by conveyors, operations are primarily performed on the upper and side surfaces of the workpiece; when operations are desired on the lower surface, etc., the workpiece is often flipped. In this structure, operations can be performed not only on the upper and side surfaces of the workpiece but also on the lower surface, without requiring adjustments or setup.

[0038] In the aforementioned linkage actuation device, the maximum angle between the central axis of the linkage hub on the base end side and the central axis of the linkage hub on the front end side can be 90° or more. According to this scheme, even if the angle θt formed between the central axis of the linkage hub on the base end side and the rotation axis of the rotary actuator in the linkage actuation device is small, the working range of the workpiece can still be increased.

[0039] The aforementioned linkage actuation device can also be installed with the central axis of the linkage hub on the base end side orthogonal to the rotation axis of the rotary actuator. By employing a linkage actuation device with a maximum bending angle of 90° or more, and by setting it with the central axis of the linkage hub on the base end side orthogonal to the rotation axis of the rotary actuator, work can be performed on the upper surface from the vertical direction of the lower surface relative to the workpiece, and work can be performed on the entire surface of the workpiece.

[0040] This working device can also be a visual inspection device that mounts an image processor on the aforementioned linkage mechanism. With this structure, visual inspection processes that have traditionally been performed by humans from all directions can be carried out at high speed, with high precision, and automatically. Furthermore, when cables connecting to the image processor, such as cameras and illuminators, can pass through the internal space of the linkage mechanism, cable handling is easy; even with repeated rotational movements, the cables do not twist, and the risk of breakage is reduced.

[0041] Any combination of at least two structures disclosed in the claims and / or description and / or drawings is included in this invention. In particular, any combination of two or more of the claims is included in this invention. Attached Figure Description

[0042] The invention can be more clearly understood from the following description of preferred embodiments with reference to the accompanying drawings. However, the embodiments and drawings are for illustration and description only and should not be used to limit the scope of the invention. The scope of the invention is defined by the claims. In the drawings, the same reference numerals in the plurality of drawings denote the same or equivalent parts.

[0043] Figure 1 This is a front view of the working apparatus according to the first embodiment of the present invention;

[0044] Figure 2 This is a partial enlarged view of the rotating unit of the working device;

[0045] Figure 3 This is a perspective view of the linkage mechanism of the rotating unit;

[0046] Figure 4 A simplified model of the two linkage mechanisms of the linkage action device is shown in the front view, omitting the two linkage mechanisms.

[0047] Figure 5 For along Figure 4 A partial sectional view of the VV line.

[0048] Figure 6 This is a diagram showing a linkage mechanism represented by straight lines;

[0049] Figure 7 A diagram showing the maximum bending angle, etc., of the linkage mechanism;

[0050] Figure 8A This is a horizontal cross-sectional view of the rotary actuator of the rotary unit;

[0051] Figure 8B This is a longitudinal sectional view of the rotary actuator.

[0052] Figure 9 This is a front view of the linear motion unit of the working device;

[0053] Figure 10 This is a top view of the linear motion unit;

[0054] Figure 11 A front view of the working device showing the state of working on the upper surface of the workpiece;

[0055] Figure 12 A front view of the working device showing the state of working on the lower surface of the workpiece;

[0056] Figure 13 A front view of the working device showing the state of working on the right side of the workpiece;

[0057] Figure 14 A front view of an appearance inspection device with an image processor mounted on a linkage mechanism;

[0058] Figure 15 This is a front view of the working apparatus according to the second embodiment of the present invention;

[0059] Figure 16 A front view of the working device showing the state of working on the upper surface of the workpiece;

[0060] Figure 17 A front view of the working device showing the state of working on the lower surface of the workpiece;

[0061] Figure 18 A front view of the working device showing the state of working on the right side of the workpiece;

[0062] Figure 19 This is a front view of the working apparatus according to the third embodiment of the present invention;

[0063] Figure 20 This is a front view of the working apparatus according to the fourth embodiment of the present invention;

[0064] Figure 21 This is a front view of the working apparatus according to the fifth embodiment of the present invention. Detailed Implementation

[0065] [First Implementation]

[0066] according to Figures 1 to 14 The working device that combines a rotary unit and a linear motion unit will be described.

[0067] <Brief Structure of the Working Device>

[0068] like Figure 1 As shown, a linear motion unit 63 is mounted on a platform 62 fixed to the floor, which serves as the ground. A rotary unit Ru is mounted on the guide (third sliding part) 67b of the third linear motion actuator 67, which constitutes the output of the linear motion unit 63. The rotary unit Ru includes a rotary actuator Ra and a linkage actuation device 7. The rotation axis Ca of the rotary actuator Ra is arranged parallel to the forward and backward direction (in this example, the vertical direction) of the guide 67b of the third linear motion actuator 67.

[0069] like Figure 2 As shown, the linkage actuation device 7 is mounted on the output part Raa of the rotary actuator Ra via the mounting member 3 and the spacer 4, such that the central axis QA of the linkage hub 12 (described later) on the base end side of the linkage actuation device 7 forms an angle θt with the rotation axis Ca of the rotary actuator Ra. In the following description, the aforementioned angle θt is sometimes referred to as the "mounting angle θt".

[0070] like Figure 1 As shown, the workpiece 2, which is the object of the operation, is loaded onto the workpiece setting table 8 and transported by a conveying device 5 such as a conveyor. Alternatively, the workpiece 2 may not be placed on the workpiece setting table 8, but may be lifted from the conveying device 5 by a workpiece lifting device 8A when it arrives at the work step. Alternatively, the workpiece 2 may not be transported by the conveying device 5, but may be placed on the workpiece setting table 8 by an operator or other robot.

[0071] The working device 1 performs work relative to the workpiece 2 by positioning the end effector Ee on the front end component 40 of the linkage action device 7. The rotary unit Ru and the linear motion unit 63 are connected to a common controller for synchronous control. Alternatively, the rotary unit Ru and the linear motion unit 63 can be controlled asynchronously.

[0072] <Linkage mechanism>

[0073] like Figure 3 and Figure 4 As shown, the linkage action device 7 includes a parallel linkage mechanism 9 and a posture control actuator 10, which causes the parallel linkage mechanism 9 to move.

[0074] Parallel Linkage Mechanism

[0075] In the parallel linkage mechanism 9, the front-end linkage hub 13 is connected to the base-end linkage hub 12 via three sets of linkage mechanisms 14 in a manner that allows for changing posture. There may also be four or more sets of linkage mechanisms 14. Furthermore, in Figure 4 In the diagram, only one linkage mechanism 14 is shown, while the remaining two linkage mechanisms are omitted.

[0076] Each linkage 14 includes an end linkage component 15 on the base side, an end linkage component 16 on the front side, and an intermediate linkage component 17, forming a four-section interlocking linkage mechanism composed of four rotary kinematic pairs. The end linkage components 15 and 16 on the base side and the front side are L-shaped, with one end rotatably connected to the linkage hub 12 on the base side and the linkage hub 13 on the front side, respectively. At both ends of the intermediate linkage component 17, it is rotatably connected to the other ends of the end linkage components 15 and 16 on the base side and the front side, respectively.

[0077] Parallel linkage mechanism 9 is a structure combining two spherical linkage mechanisms. The central axes of each rotary joint of the base-end linkage hub 12 and the end linkage component 15, as well as the central axes of each rotary joint of the end linkage component 15 and the intermediate linkage component 17, intersect at the center PA of the spherical linkage on the base-end side. Similarly, the central axes of each rotary joint of the front-end linkage hub 13 and the end linkage component 16, as well as the central axes of each rotary joint of the end linkage component 16 and the intermediate linkage component 17, intersect at the center PB of the spherical linkage on the front-end side.

[0078] Furthermore, the centers of the rotary kinematic pairs of the base-end hinge hub 12 and the base-end end link member 15 are equidistant from the center PA of the base-end spherical link. Similarly, the centers of the rotary kinematic pairs of the base-end end link member 15 and the intermediate link member 17 are equidistant from the center PA of the base-end spherical link. Likewise, the centers of the rotary kinematic pairs of the front-end hinge hub 13 and the front-end end link member 16 are equidistant from the center PB of the front-end spherical link. The centers of the rotary kinematic pairs of the front-end end link member 16 and the intermediate link member 17 are equidistant from the center PB of the front-end spherical link. The central axes of each rotary kinematic pair of the base-end and front-end end link members 15 and 16 and the intermediate link member 17 can have an intersection angle γ or be parallel.

[0079] Figure 5 This shows the relationship between the central axis O1 of each rotary kinematic pair of the base-end side connecting rod hub 12 and the end connecting rod component 15 and the center PA of the spherical connecting rod. The front-end side connecting rod hub 13 ( Figure 4 ) and the end link component 16 on the front side ( Figure 4 The shape and positional relationship of ) are also related to Figure 5 The same, although not shown in the figure. Figure 5 In the case of the connecting rod hub 12 on the base end side and the end connecting rod component 15 on the base end side, the angle α formed by the central axis O1 of each rotary kinematic pair with the central axis O2 of each rotary kinematic pair of the end connecting rod component 15 and the intermediate connecting rod component 17 on the base end side is 90°. However, the aforementioned angle α can also be an angle other than 90°.

[0080] The three linkage mechanisms 14 are geometrically identical. Geometrically, identical shape means that... Figure 6 As shown, the geometric models of each link component 15, 16, and 17 are represented by straight lines. That is, the models represented by each rotary joint and the straight lines connecting these rotary joints have the following shape: regardless of the orientation, the base end portion and the front end portion are symmetrical with respect to the middle portion of the intermediate link component 17. Figure 6 This diagram illustrates a set of linkage mechanisms 14 represented by straight lines. The parallel linkage mechanism 9 of this embodiment is rotationally symmetric, forming a base-end portion (comprised of a base-end hinge hub 12 and a base-end end link member 15) and a front-end portion (comprised of a front-end hinge hub 13 and a front-end end link member 16) whose positions are rotationally symmetric with respect to the centerline C of the intermediate linkage members 17. The middle portions of each intermediate linkage member 17 are located on a common track circle D.

[0081] A two-degree-of-freedom mechanism is formed by the connecting hub 12 on the base side and the connecting hub 13 on the front side, together with three sets of linkage mechanisms 14. In this two-degree-of-freedom mechanism, the connecting hub 13 on the front side rotates freely about two orthogonal axes relative to the connecting hub 12 on the base side. In other words, a mechanism is formed in which the connecting hub 13 on the front side can freely change its posture with rotation as its two degrees of freedom relative to the connecting hub 12 on the base side. This two-degree-of-freedom mechanism is compact while expanding the range of motion of the connecting hub 13 on the front side relative to the connecting hub 12 on the base side.

[0082] For example, at the centers PA and PB of the spherical connecting rods passing through the base end side and the front end side, and the central axis O1 of each rotary kinematic pair of the connecting rod hubs 12 and 13 on the base end side and the end connecting rod components 15 and 16 on the base end side and the front end side. Figure 5 When the perpendicularly intersecting straight lines are the central axes QA and QB of the connecting rod hubs 12 and 13 on the base end side and the front end side, respectively, the maximum angle θmax of the angle θ between the central axis QA of the connecting rod hub 12 on the base end side and the central axis QB of the connecting rod hub 13 on the front end side can be approximately ±90°. Furthermore, the rotation angle φ of the connecting rod hub 13 on the front end side relative to the connecting rod hub 12 on the base end side can be set within the range of 0° to 360°. The angle θ is the vertical angle at which the central axis QB of the connecting rod hub 13 on the front end side is tilted relative to the central axis QA of the connecting rod hub 12 on the base end side. On the other hand, the rotation angle φ is the horizontal angle at which the central axis QB of the connecting rod hub 13 on the front end side is tilted relative to the central axis QA of the connecting rod hub 12 on the base end side. Moreover, the maximum angle θmax can be 90° or higher.

[0083] The attitude change of the front-end connecting rod hub 13 relative to the base-end connecting rod hub 12 is centered on the intersection point O of the central axis QA of the base-end connecting rod hub 12 and the central axis QB of the front-end connecting rod hub 13. Figure 7 The solid line indicates that the central axis QA of the connecting rod hub 12 on the base side and the central axis QB of the connecting rod hub 13 on the front side are on the same line. Figure 7 The double-dotted line indicates that the central axis QB of the connecting rod hub 13 on the front end side is at a certain action angle (bending angle) relative to the central axis QA of the connecting rod hub 12 on the base end side. For example... Figure 6 As shown, even if the posture of the connecting hub 13 on the front end side changes relative to the connecting hub 12 on the base end side, the distance L between the centers PA and PB of the spherical connecting rod on the base end side and the front end side remains unchanged.

[0084] like Figure 5 and Figure 6As shown, in this parallel linkage mechanism 9, when all conditions 1 to 5 are satisfied, from a geometrical symmetry perspective, the base-end portion, composed of the base-end connecting hub 12 and the base-end end connecting rod member 15, and the front-end portion, composed of the front-end connecting hub 13 and the front-end end connecting rod member 16, move in the same manner. Therefore, when the parallel linkage mechanism 9 transmits rotation from the base-end side to the front-end side, it functions as a constant-velocity universal coupling that rotates at the same speed and forms the same rotation angle between the base-end side and the front-end side.

[0085] Condition 1: The angle of the central axis O1 of the rotational kinematic pair of the connecting hubs 12 and 13 on the base end side and the end connecting rod components 15 and 16 on the base end side and the front end side in each linkage mechanism 14 is equal to the length of the distance from the center PA and PB of the spherical connecting rod on the base end side and the front end side.

[0086] Condition 2: The central axis O1 of the rotary kinematic pair of the connecting hubs 12 and 13 on the base end side and the front end side of each linkage mechanism 14 with the end connecting rod components 15 and 16 on the base end side and the front end side, and the central axis O2 of the rotary kinematic pair of the end connecting rod components 15 and 16 on the base end side and the front end side with the intermediate connecting rod component 17, intersects with the spherical connecting rod centers PA and PB on the base end side and the front end side.

[0087] Condition 3: The end link component 15 on the base side and the end link component 16 on the front side have the same geometric shape.

[0088] Condition 4: The base end portion and the front end portion of the intermediate connecting rod component 17 have the same geometric shape.

[0089] Condition 5: With respect to the plane of symmetry of the intermediate connecting rod component 17, the angular positional relationship between the intermediate connecting rod component 17 and the end connecting rod components 15 and 16 on the base end side and the front end side is the same on the base end side and the front end side.

[0090] like Figure 3 and Figure 4 As shown, the connecting rod hub 12 on the base end side includes a flat base end member 6 and three rotating shaft connecting members 21, which are integrally formed with the base end member 6. Figure 5 As shown, the base component 6 has a circular through hole 6a in the middle, and around this through hole 6a, three rotating shaft connecting components 21 are arranged at equal intervals in the circumferential direction. Figure 4 and Figure 5As shown, the center of the through hole 6a is located on the central axis QA of the connecting rod hub 12 on the base end side. A rotating shaft 22 is rotatably connected to each rotating shaft connecting member 21, and the axis of this rotating shaft 22 intersects the central axis QA of the connecting rod hub 12 on the base end side. One end of the end connecting rod member 15 on the base end side is connected to this rotating shaft 22.

[0091] like Figure 5 As shown, the rotating shaft 22 includes a large-diameter portion 22a, a small-diameter portion 22b, and an externally threaded portion 22c in sequence along the axial direction. It is rotatably supported on the rotating shaft connecting member 21 via the small-diameter portion 22b and two bearings 23. The bearings 23 are, for example, ball bearings such as deep groove ball bearings or angular contact ball bearings. These bearings 23 are fixed by being fitted into the inner diameter grooves provided on the rotating shaft connecting member 21 in a state where their outer rings are fitted into the outer circumferential surface. The types and arrangement of bearings provided on other rotating parts are the same.

[0092] The rotating shaft 22 is arranged concentrically on the large-diameter portion 22a and the output shaft 52a of the reduction mechanism 52 (described later). One end of the end connecting rod member 15 on the base end side is connected to the rotating shaft 22 in a manner that allows it to rotate integrally with the rotating shaft 22. A notch 25 is formed at one end of the end connecting rod member 15 on the base end side, and the two sides of the notch 25 form a pair of inner and outer rotating shaft support portions 26, 27. Through holes are formed in each of the pair of rotating shaft support portions 26, 27. The rotating shaft connecting member 21 is disposed inside the notch 25, and the small-diameter portion 22b of the rotating shaft 22 passes through the aforementioned through hole and the inner circumferential surface of the inner ring of the bearing 23. The external thread portion 22c of the rotating shaft 22 protrudes further inward than the inner rotating shaft support portion 27.

[0093] A spacer 28 is fitted onto the outer periphery of the large-diameter portion 22a of the rotating shaft 22. The end connecting rod member 15 on the base end side and the output shaft 52a of the reduction mechanism 52 are fixed via this spacer 28 by bolts 29. Furthermore, a nut is screwed onto the external thread portion 22c of the rotating shaft 22. A spacer is sandwiched between the inner ring end face of the bearing 23 and a pair of rotating shaft support portions 26, 27. When the nut is screwed in, a preload is applied to the bearing 23.

[0094] The other end of the end connecting rod member 15 on the base end side is connected to a rotating shaft 35, which is rotatably connected to one end of the intermediate connecting rod member 17. This rotating shaft 35 is identical to the rotating shaft 22 of the connecting rod hub 12 on the base end side, including a large-diameter portion 35a, a small-diameter portion 35b, and an externally threaded portion 35c. It is rotatably supported on one end of the intermediate connecting rod member 17 via two bearings 36 through the small-diameter portion 35b. A notch 37 is formed at the other end of the end connecting rod member 15 on the base end side, and the two sides of the notch 37 form a pair of inner and outer rotating shaft support portions 38 and 39. Through holes are formed in these rotating shaft support portions 38 and 39 respectively. The externally threaded portion 35c protrudes further inward than the inner rotating shaft support portion 39.

[0095] One end of the intermediate connecting rod component 17 is disposed inside the notch 37, and the aforementioned small-diameter portion 35b passes through the aforementioned through hole and the inner circumferential surface of the inner ring of the bearing 36. Furthermore, a nut is screwed onto the external thread portion 35c. A spacer is sandwiched between the end face of the inner ring of the bearing 36 and a pair of rotating shaft support portions 38, 39, and a preload is applied to the bearing 36 when the nut is screwed on.

[0096] like Figure 3 and Figure 7 As shown, the front-end connecting rod hub 13 includes a flat front-end component 40 and three rotating shaft connecting components 41, which are circumferentially spaced on the bottom surface of the front-end component 40. The center of the circumference of each rotating shaft connecting component 41 is located on the central axis QB of the front-end connecting rod hub 13. A rotating shaft 43 is rotatably connected to each rotating shaft connecting component 41, and the axis of the rotating shaft 43 intersects the central axis QB of the front-end connecting rod hub 13. One end of the front-end end connecting rod component 16 is connected to the rotating shaft 43. A rotating shaft 45 is connected to the other end of the front-end end connecting rod component 16, and the rotating shaft 45 is rotatably connected to the other end of the intermediate connecting rod component 17.

[0097] The rotation shaft 43 of the front connecting rod hub 13 and the rotation shaft 45 of the intermediate connecting rod component 17 are also the same shape as the aforementioned rotation shaft 35, and are rotatably connected to the other end of the rotating shaft connecting component 41 and the intermediate connecting rod component 17 via two bearings (not shown in the figure).

[0098] <Actuator for Posture Control>

[0099] like Figure 3 and Figure 5As shown, the attitude control actuator 10 is a rotary actuator with a reduction mechanism 52, which is coaxially mounted on the bottom surface of the base end member 6 of the connecting rod hub 12 on the base end side. The attitude control actuator 10 and the reduction mechanism 52 are integrally mounted, and the reduction mechanism 52 is fixed to the base end member 6 by the motor fixing member 53. Alternatively, the attitude control actuator 10 may also be of the type with a brake.

[0100] In this example, all three sets of linkage mechanisms 14 are provided with attitude control actuators 10. However, if attitude control actuators 10 are provided in at least two of the three sets of linkage mechanisms 14, the attitude of the front-end linkage hub 13 relative to the base-end linkage hub 12 can be determined.

[0101] Three attitude control actuators 10 are aligned with their rotation axes 22 and the central axis QA of the base-side connecting rod hub 12. Figure 4 The actuators 10 for attitude control are arranged perpendicularly to each other. The midpoint P10, which is the intersection of the rotation axes 22 of these actuators 10, is located at the angle θt formed above. Figure 2 The central shaft QA of the connecting rod hub 12 on the base end side of the ) Figure 4 Furthermore, the bisecting line 22L of the rotation axis 22 of two of the three attitude control actuators 10 lies on the plane formed by the rotation axis Ca of the rotary actuator Ra and the central axis QA of the connecting rod hub 12 on the base end side. The aforementioned bisecting line 22L is orthogonal to the axis of the "rotation axis 22" and passes through the midpoint of the length direction between the base end of the large-diameter portion 22a of the "rotation axis 22" and the front end of the external thread portion 22c. Additionally, the aforementioned bisecting line 22L lies on the acute angle side of the angle formed by the rotation axis Ca of the rotary actuator Ra and the central axis QA of the connecting rod hub 12 on the base end side.

[0102] like Figure 5 As shown, the reduction mechanism 52 has a flange output and a large-diameter output shaft 52a. The top surface of the output shaft 52a forms a planar flange surface 54 orthogonal to the centerline of the output shaft 52a. The output shaft 52a is connected to the rotation shaft support 26 of the end connecting rod member 15 on the base end side via the aforementioned spacer 28 and bolts 29. The connecting rod hub 12 on the base end side ( Figure 4 The rotary motion pair of the end connecting rod component 15 on the base side. The large diameter portion 22a of the rotating shaft 22 is embedded in the inner diameter groove 57 provided on the output shaft 52a of the reduction mechanism 52.

[0103] like Figure 4 and Figure 5As shown, the linkage actuation device 7 drives the attitude control actuators 10 by rotation, thereby actuating the parallel linkage mechanism 9. Specifically, if the attitude control actuators 10 are driven to rotate, the rotation is slowed down via the reduction mechanism 52 and transmitted to the rotation shaft 22. As a result, the angle between the end link member 15 on the base end side and the link hub 12 on the base end side changes, arbitrarily altering the attitude of the link hub 13 on the front end side relative to the link hub 12 on the base end side.

[0104] <Rotary Actuator>

[0105] like Figure 1 As shown, the rotary actuator Ra is mounted on the output of the linear motion unit 63, which will be described later. Figure 2 , Figure 8A as well as Figure 8B As shown, the rotary actuator Ra has an actuator body 18 for rotation control and a reducer 19 for reducing the rotation of the actuator body 18. In this example, the rotary actuator Ra uses a motor with a reducer, in which the actuator body 18 and the reducer 19 are integrally mounted. Furthermore, in this example, the central axis QA of the base-end side connecting rod hub 12 of the connecting rod actuation device 7 and the rotation axis Ca of the rotary actuator Ra are mounted in a crossed manner; however, they may also be mounted without crossing.

[0106] The output section installed in the linear motion unit 63 ( Figure 1 Multiple support columns 24 are erected parallel to each other on the connecting component 20. A rotary actuator fixing component 30 is provided at the front end of each of these support columns 24, and the aforementioned motor with a speed reducer is fixed to this rotary actuator fixing component 30. The output Raa of the rotary actuator Ra rotates about the rotation axis Ca with a rotation angle θp. The maximum range of the rotation angle θp is ±180°.

[0107] A mounting member 3 is fixed to the output shaft of the reducer 19, which serves as the output part Raa of the rotary actuator Ra, by bolts or the like. The linkage actuation device 7 is positioned at an angle θt on the output shaft of the rotary actuator Ra via the mounting member 3. Specifically, an inclined surface 3a, inclined at a predetermined angle relative to the rotation axis Ca of the rotary actuator Ra, is provided at the front end of the mounting member 3. The base end member 6 of the base end side linkage hub 12 is fixed to this inclined surface 3a via a spacer 4 by bolts or the like.

[0108] The aforementioned angle θt is set within the range of greater than 0° and less than 90° (0° < θt ≤ 90°). In this example, the angle θt is 45°, but it is not limited to this. Furthermore, the linkage actuation device 7 is mounted such that the central axis QA of the linkage hub 12 on the base end side intersects with the rotation axis Ca of the rotary actuator Ra. With this structure, the linkage actuation device 7 rotates around the rotation axis CA of the rotary actuator Ra while tilted at an angle θt relative to the aforementioned rotation axis Ca.

[0109] <End effector>

[0110] An end effector Ee is mounted on the front end component 40 of the connecting rod hub 13 on the front end side. The end effector Ee can be, for example, a hand containing a gripper, a cleaning nozzle, a dispenser, a welding torch, or an image processor Eg. Figure 14 )wait.

[0111] Figure 14 The image processor Eg shown includes, for example, a camera Cr for photographing workpiece 2 and a lighting fixture Le for illuminating workpiece 2. The working device in this case is a visual inspection device 1A that mounts the image processor Eg on a linkage mechanism 7. The camera Cr and the lighting fixture Le are connected to a camera control system (not shown in the figure) via wiring, and various controls during photographing are performed by the aforementioned camera control system.

[0112] <Cover, cable drag chains, etc.>

[0113] like Figure 8A as well as Figure 8B As shown, a cover 31 is provided around the rotary actuator Ra. The cover 31 has a cylindrical cover fixing body 32 and a cover rotating body 33. These cover fixing bodies 32 and cover rotating bodies 33 are coaxial with each other and arranged coaxially with the rotation axis Ca of the rotary actuator Ra. Moreover, the cover rotating body 33 is arranged in a manner that its diameter is larger than that of the cover fixing body 32 and that it can rotate relative to the cover fixing body 32.

[0114] The cover fixing body 32 has a cylindrical portion 32a that is fixed to the rotary actuator fixing member 30 by bolts or the like, and a flange portion 32b that extends radially outward from the base end side portion of the cylindrical portion 32a. The base end side portion of the inner peripheral surface of the cylindrical portion 32a is fixed to the outer peripheral surface of the rotary actuator fixing member 30.

[0115] The cover rotating body 33 has a cylindrical portion 33a and a flange portion 33b extending radially inward from the base end of the cylindrical portion 33a. A circular plate-shaped rotating body mounting member 34 is provided on the mounting member 3 mounted on the output portion Raa of the rotary actuator Ra. This rotating body mounting member 34 is coaxially arranged with the rotation axis Ca of the rotary actuator Ra. The flange portion 33b of the cover rotating body 33 is provided on the outer peripheral side of the rotating body mounting member 34, separated by a gasket 42. Therefore, the cover rotating body 33 rotates synchronously with the output portion Raa of the rotary actuator Ra. An annular gap δ1 is provided between the inner peripheral edge of the flange portion 33b and the outer peripheral edge of the flange portion 32b of the cover fixing body 32 to prevent the two flange portions 33b, 32b from interfering with each other.

[0116] A cable drag chain 44 is arranged in an annular space surrounded by a rotating cover 33 and a fixed cover 32. The cable drag chain 44 protects and guides the actuator 10 for attitude control and the end effector Ee. Figure 2 The extended cable Cb. Furthermore, in Figure 8B The cable drag chain is omitted. The cable drag chain 44 is arranged to slide around the rotary actuator Ra in the direction of rotation. One end of the cable drag chain 44 in the longitudinal direction is fixed to a part of the cover rotating body 33 by bolts or the like, and the other end in the longitudinal direction is fixed to a part of the cover fixing body 32 by bolts or the like. Thus, the cable drag chain 44 is guided by its respective cylindrical portions 32a, 33a and flange portions 32b, 33b. Specifically, the cable Cb mentioned above includes the encoder cable and power cable connected to the attitude control actuator 10.

[0117] <Linear Motion Unit>

[0118] like Figure 1 , Figure 9 and Figure 10 As shown, the linear motion unit 63 includes an XYZ stage that moves in orthogonal three-axis directions. The linear motion unit 63 includes first, second, and third linear motion actuators 65, 66, and 67. The first linear motion actuator 65 moves in the X-axis direction (…). Figure 1 The first linear actuator moves forward and backward in the left-right direction. The second linear actuator 66 moves forward and backward in the Y-axis direction, which is orthogonal to the X-axis direction. The third linear actuator 67 moves forward and backward in the Z-axis direction, which is orthogonal to both the X-axis and Y-axis directions. In this example, the Z-axis direction is set to the up-down direction.

[0119] The first, second, and third linear motion actuators 65, 66, and 67 each have a conversion mechanism (not shown in the figure) such as a ball screw, which is driven by motors 65a, 66a, and 67a as drive sources, converting the rotation of each motor 65a, 66a, and 67a into linear reciprocating motion. The first linear motion actuator 65 has a guide member 65b as a first sliding part, a sliding worktable 65c as a first sliding part, and a motor 65a. The guide member 65b as the first sliding part extends along the X-axis direction.

[0120] The second linear motion actuator 66 includes a guide member 66b as the second sliding part, a sliding worktable 66c as the second sliding part, and a motor 66a. The guide member 66b as the second sliding part extends along the Y-axis direction. The first and second linear motion actuators 65 and 66 are arranged in a manner that the forward and backward directions of the sliding worktables 65c and 66c as the first and second sliding parts are orthogonal to each other.

[0121] The third linear motion actuator 67 includes a sliding worktable 67c as the third sliding part, a guide member 67b as the third sliding part, and a motor 67a. The guide member 67b as the third sliding part extends along the Z-axis direction. The third linear motion actuator 67 is configured such that the forward and backward direction of the guide member 67b as the third sliding part is orthogonal to the forward and backward direction of the sliding worktables 65c and 66c as the first and second sliding parts.

[0122] A guide 65b of the first linear motion actuator 65 is mounted on the frame 62. A sliding table 65c is driven forward and backward along the guide 65b, which extends in the X-axis direction. A guide 66b of the second linear motion actuator 66 is connected to the sliding table 65c via a connecting fixing member 68. The sliding table 66c is driven forward and backward along the guide 66b, which extends in the Y-axis direction. A sliding table 67c is connected to the sliding table 66c via a connecting fixing member 69. Furthermore, the sliding table 67c of the third linear motion actuator 67 can also be directly fixed to the sliding table 66c of the second linear motion actuator 66. The guide portion 67b of the third linear motion actuator 67, which is driven forward and backward relative to the sliding table 67c, constitutes the output portion of the linear motion unit 63.

[0123] A rotating unit Ru is mounted on the guide member 67b, which serves as the output section. Specifically, a rotating actuator Ra is mounted at the lower end of the guide member 67b, and the rotation axis Ca of the rotating actuator Ra is mounted parallel to the forward / backward direction (vertical in this example) of the third linear motion actuator 67. In this embodiment, the rotating unit Ru is provided at the lower end of the guide member 67b of the third linear motion actuator 67, and the guide member 67b and the rotating unit Ru operate in conjunction. Therefore, fewer components are required around the rotating unit Ru, allowing for a larger working area. Furthermore, the rotation axis Ca of the rotating actuator Ra can also be mounted at an angle relative to the forward / backward direction of the third linear motion actuator 67.

[0124] In this embodiment, a rotating unit Ru is provided at the lower end of the guide member 67b of the third linear motion actuator 67. However, the rotating unit Ru may also be provided at a location other than the lower end of the guide member 67b of the third linear motion actuator 67. The first or second linear motion actuators 65 and 66 may also be used as the output portion of the linear motion unit 63. Furthermore, the guide member 67b may be fixed to the second actuator 66, and the rotating unit Ru may be fixed to the sliding table 67c for movement. In this case, the guide member 67b corresponds to the third slidable portion, and the sliding table 67c corresponds to the third sliding portion.

[0125] <Example of operation of the working device>

[0126] exist Figure 1 The text indicates that the end effector Ee is facing the front side and operating relative to the left side of the workpiece 2. The linkage actuation device 7 is in a state with a bend angle θ = 45° and a rotation angle φ = 0°. Furthermore, in this embodiment, the rotation angle θp of the rotary actuator Ra in this state is set to 0°, and the counterclockwise direction when viewed from above is defined as the + direction.

[0127] Figure 11 This indicates the state of operation on the upper surface of workpiece 2. The linkage mechanism 7 is in a state of angle θ = 45° and rotation angle φ = 180°, with the end effector Ee facing directly downwards. The rotation angle θp of the rotary actuator Ra is relative to... Figure 1 There is no action in the current state.

[0128] Figure 12 This indicates the state of operation on the lower surface of workpiece 2. The linkage mechanism 7 is in a state of angle θ = 90° and rotation angle φ = 0°, with the end effector Ee facing obliquely upwards. The rotation angle θp of the rotary actuator Ra is relative to... Figure 1 There is no action in the current state.

[0129] Figure 13This indicates the state of operation on the right side of workpiece 2. The linkage action device 7 and... Figure 1 Similarly, in the state of θ = 45° bend angle and φ = 0° rotation angle, the end effector Ee is facing the side, but the rotary actuator Ra has rotated 180° (rotation angle θp = 180°).

[0130] Although not shown in the figure, when working on the inner side of workpiece 2, the rotary actuator Ra is moved from... Figure 1 The state is rotated 90° clockwise (rotation angle θp = -90°). When working on the near-front side of workpiece 2, simply from... Figure 1 The state is such that the rotary actuator Ra rotates counterclockwise by 90° (rotation angle θp = 90°).

[0131] Here, an example of operation is shown relative to a cuboid workpiece 2. However, even for cylindrical or complex-shaped workpieces, the rotation angle θp of the rotary actuator Ra and the posture (bending angle θ, rotation angle φ) of the linkage 7 can be determined according to the shape of the workpiece. Therefore, it is possible to operate on workpieces 2 of any shape. In this embodiment, an example of an installation angle θt = 45° is shown, but any installation angle θt can be used. Although the X-axis is fixed to the platform as the first linear motion actuator, other axes can also be fixed to the platform or the like as the first linear motion actuator. In addition, the platform can be fixed to the ground (floor), but it can also be fixed to the ceiling or wall, etc.

[0132] <Effects>

[0133] The working device 1 described above rotates the linkage mechanism 7 at an angle θt relative to the rotary actuator Ra mounted on the output of the linear motion unit 63. This allows the workpiece 2 to be approached from a direction above the hemispherical plane, even when the maximum bending angle θmax of the linkage mechanism 7 is 90°. For example, when the rotary actuator Ra is set vertically downwards and the linkage mechanism 7 is mounted at an angle θt, it can be approached not only from the Northern Hemisphere but also from the Southern Hemisphere. Therefore, compared to the past, the working range of the workpiece 2 can be increased, and the setup and adjustment work can be shortened. Furthermore, since the rotary unit Ru includes the linkage mechanism 7, high-speed, high-precision, and meticulous work, similar to manual operation, can be achieved.

[0134] Two or more attitude control actuators 10 are arranged such that their rotation axes 22 are perpendicular to the central axis QA of the base-end side connecting rod hub 12. The intersection point (middle position P10) of the rotation axes 22 of the two attitude control actuators 10 is located on the central axis QA of the base-end side connecting rod hub 12, which forms the angle θt. In addition, the bisecting line 22L of the rotation axes 22 of two of the two or more attitude control actuators 10 is located on the plane formed by the rotation axis Ca of the rotary actuator Ra and the central axis QA of the base-end side connecting rod hub 12. The bisecting line 22L is located on the acute angle side of the angle θt formed by the rotation axis Ca of the rotary actuator Ra and the central axis QA of the base-end side connecting rod hub 12.

[0135] According to this design, compared to structures where the linkage actuator is tilted in other directions, the likelihood of interference between the attitude control actuator 10 and the rotary actuator Ra of the linkage actuator 7 is lower, allowing for a shorter distance between the rotary actuator Ra and the linkage actuator 7. Therefore, the overall working device can be made more compact. Furthermore, because the inertial torque of the rotary actuator Ra is reduced, the rotary unit Ru is made lighter, enabling high-speed operation of the entire working device.

[0136] The rotary actuator Ra has an actuator body 18 for rotary control and a reducer 19, thus achieving radial compactness compared to rotary actuators with rotary drive methods that do not have a reducer. By providing a cable chain 44 that slides in the rotational direction around the rotary actuator Ra, which provides free space, the cable Cb connected to the attitude control actuator 10 of the linkage action device 7 can be compactly stored in the cable chain 44. Therefore, handling the cable Cb becomes easier, and concerns about cable breakage are reduced.

[0137] The linear motion unit 63 includes a first linear motion actuator 65, a second linear motion actuator 66 mounted on the frame 62, and a third linear motion actuator 67 constituting the output section of the linear motion unit 63. Thus, it is possible to operate on the workpiece 2 conveyed by a conveyor or the like, and it can be configured as a single unit without changing the conveyor line.

[0138] By arranging the linear motion unit 63 in a manner that moves in orthogonal three-axis directions, the working device 1 can be operated intuitively. As a result, not only is operability improved, but the balance and stability of the working device 1 are also improved, enabling high-speed operation.

[0139] The third linear motion actuator 67 is configured such that the guide member 67b, which serves as the third sliding part, moves in the vertical direction, and the third slidable part is the sliding worktable 67c of the linear motion actuator 67. This easily avoids interference between the workpiece 2 and the third sliding part in the linear motion unit 63, allowing for a compact overall size of the working device. In this solution, because the working range relative to the workpiece 2 is expanded, the third sliding part, particularly in the third linear motion actuator 67 constituting the output part of the linear motion unit 63, easily comes into contact with the workpiece 2. In this solution, where the guide member 67b, which serves as the third sliding part, moves vertically, the guide member 67b can be moved relative to the workpiece 2 to a position that avoids interference, while the linear motion unit 63 moves at high speed in all directions.

[0140] The rotary actuator Ra is configured such that its rotation axis Ca is parallel to the forward and backward direction of the third sliding part. Therefore, operation on the workpiece 2 conveyed by a conveyor or the like becomes easier. When operating on workpieces conveyed by a conveyor or the like, the operation is mainly performed on the upper surface and sides of the workpiece; when it is necessary to operate on the lower surface, etc., the workpiece is often flipped. In the above structure, operation can be performed not only on the upper surface and sides of the workpiece 2, but also on the lower surface, without the need for adjustments or other modifications.

[0141] In the linkage action device 7, the maximum angle θmax between the central axis QA of the base-end side linkage hub 12 and the central axis QB of the front-end side linkage hub 16 can be greater than 90°. In this case, even if the angle θt formed between the central axis QA of the base-end side linkage hub 12 and the rotation axis Ca of the rotary actuator Ra is small, the working range of the workpiece 2 can still be increased.

[0142] In the case of the visual inspection device 1A that mounts the image processor Eg on the linkage mechanism 7, the visual inspection process that was previously performed by humans from all directions can be automatically performed at high speed and with high precision. Furthermore, it is possible to perform visual inspections of the workpiece 2 from all directions, such as checking for scratches or dents, and the presence or absence of parts. Additionally, when cables connecting the image processor Eg, such as the camera Cr and the illumination Le, are passed through the internal space of the linkage mechanism 7, the handling of these cables is easy; even during repeated rotational movements, the cables do not twist, and defects such as wire breakage are reduced.

[0143] <Regarding other implementation methods>

[0144] In the following description, the parts corresponding to the matters previously described in each embodiment are marked with the same reference numerals, and repeated descriptions are omitted. When only a part of the structure is described, the other parts of the structure are described in the same way as previously described, unless otherwise specified. The same structure achieves the same effect. Not only combinations of parts specifically described in each embodiment, but also embodiments can be partially combined with each other, as long as there is no particular obstacle to combination.

[0145] [Second Implementation]

[0146] according to Figures 15 to 18 The working device of the second embodiment will be described.

[0147] The operating device 1B represents the embodiment described above. Figure 1 The example shows the linkage actuation device 7 having its mounting angle θt changed from 45° to 90°. That is, the linkage actuation device 7 is mounted such that the central axis QA of the linkage hub 12 on the base end side is orthogonal to the rotation axis Ca of the rotary actuator Ra. In practice, the linkage actuation device 7 is further rotated 180° around the central axis of the linkage hub 12 on its base end side before being mounted on the mounting component 3.

[0148] <Posture of the linkage mechanism>

[0149] Figure 15 : Folding angle θ = 0°, rotation angle φ = 0°, rotation angle θp = 0°

[0150] Figure 16 : Folding angle θ = 90°, rotation angle φ = 0°, rotation angle θp = 0°

[0151] Figure 17 : Folding angle θ = 90°, rotation angle φ = 180°, rotation angle θp = 0°

[0152] Figure 18 : Folding angle θ = 0°, rotation angle φ = 0°, rotation angle θp = 180°

[0153] According to the second embodiment, a linkage actuation device 7 with a maximum bending angle θmax of 90° or more is used, and it is configured such that the central axis QA of the linkage hub 12 on the base end side is orthogonal to the rotation axis Ca of the rotary actuator Ra. This allows the end effector Ee to approach the workpiece 2 from the perpendicular direction of each face to perform its operation. Other structures are the same as in the first embodiment described above, achieving the same effects.

[0154] [Third Embodiment: Operating Device 1C]

[0155] It is also possible to Figure 19As shown, the third linear motion actuator 67, which moves forward and backward in the Z-axis direction, is provided on the workpiece 2 side. In the third embodiment, a rotary actuator Ra is mounted on the sliding worktable 66c of the second linear motion actuator 66. The rotation axis Ca of this rotary actuator Ra is parallel to the forward and backward direction (vertical direction) of the third linear motion actuator 67, as in the first and second embodiments described above. In this case, it is possible to achieve weight reduction of the assembly including the rotary unit Ru and the linear motion actuator (in this example, the second linear motion actuator 66) supporting the rotary unit Ru, and high-speed operation of the entire working device can be achieved. In addition, the range of motion of the linear motion unit 63 can be compactly accommodated, making it easy to achieve a compact overall working device.

[0156] [Fourth Embodiment: Operating Device 1D]

[0157] It can also be like Figure 20 As shown, the first and second linear motion actuators 65 and 66, which move forward and backward in the X and Y axes, are provided on the side of the workpiece 2. In this example, the first linear motion actuator 65 is provided on the ground, and the guide member 66b of the second linear motion actuator 66 is fixed to the sliding worktable 65c via the connecting fixing member 68. The workpiece 2 is placed on the sliding worktable 66c, which moves forward and backward along the guide member 66b, via the workpiece setting platform 8 or the workpiece lifting device 8A. The third linear motion actuator 67, which moves forward and backward in the Z-axis direction, is mounted on the frame 62 via the connecting fixing member 69. In this case, it is possible to achieve weight reduction of the assembly including the rotating unit Ru and the linear motion actuator (in this example, the third linear motion actuator 67) supporting the rotating unit Ru, and high-speed operation of the entire working device can be achieved.

[0158] [Fifth Embodiment: Operating Device 1E]

[0159] Other than that Figure 21 As shown, the linear motion unit 63 is disposed on the workpiece 2 side, and the rotary actuator Ra is mounted on the frame 62. In this case, since the rotary unit Ru can be supported independently of the linear motion unit 63, high-speed operation of the entire working device can be achieved.

[0160] This invention is not limited to the embodiments described above, and various additions, modifications, or deletions can be made without departing from the spirit of the invention. For example, in the above embodiments, a motor with a speed reducer is used as the rotary actuator, but other structures such as a direct-drive motor or a servo motor without a speed reducer may also be used. Furthermore, the cover surrounding the rotary actuator can be a fixed cover fixed to the fixing part of the rotary actuator, or a cable drag chain can be disposed within the cover. Moreover, without a cover, the cable drag chain can be simply arranged to slide around the rotary actuator in the rotational direction. Therefore, such a structure is also included within the scope of this invention.

[0161] Explanation of the labels:

[0162] The designations 1B, 1C, 1D, and 1E indicate the working device;

[0163] The designation 1A indicates a visual inspection device;

[0164] The number 7 indicates a linkage mechanism;

[0165] The number 10 indicates an actuator for posture control;

[0166] The number 12 indicates the connecting rod hub on the base side;

[0167] The number 13 indicates the connecting rod hub on the front side;

[0168] The designation 14 indicates a linkage mechanism;

[0169] The designation 15 indicates the end link component on the base side;

[0170] The number 16 indicates the end link component on the front side;

[0171] The number 17 indicates the intermediate connecting rod component;

[0172] The number 18 indicates the actuator body;

[0173] The designation 19 indicates a speed reducer;

[0174] The designation 44 indicates a cable drag chain;

[0175] The number 62 indicates the platform;

[0176] The number 63 indicates a linear motion unit;

[0177] The numbers 65, 66, and 67 represent the 1st, 2nd, and 3rd linear motion actuators, respectively.

[0178] The designation 65b indicates the guide member (the first sliding part);

[0179] The designation 65c indicates the sliding worktable (first sliding section);

[0180] The designation 66b indicates the guide member (the second sliding part);

[0181] The designation 66c indicates the sliding worktable (second sliding section);

[0182] The designation 67b indicates the guide component (third sliding part);

[0183] The designation 67c indicates the sliding worktable (the third sliding part);

[0184] The symbol Cb represents a cable;

[0185] The symbol Eg represents an image processor;

[0186] The symbol Ra represents a rotary actuator;

[0187] The symbol Ru represents a rotating unit.

Claims

1. A working device, comprising a rotary unit and a linear motion unit; The aforementioned rotating unit includes a linkage action device and a rotation actuator; In the above-described linkage mechanism, the front-end linkage hub is connected to the base-end linkage hub via three or more linkage mechanisms in a manner that allows for posture changes. Each linkage mechanism includes end linkage components on the base-end side and the front-end side, and intermediate linkage components. One end of the end linkage components on the base-end side and the front-end side is rotatably connected to the base-end linkage hub and the front-end linkage hub, respectively. Both ends of the intermediate linkage component are rotatably connected to the other ends of the end linkage components on the base-end side and the front-end side, respectively. An attitude control actuator is provided on two or more of the three or more linkage mechanisms. The attitude control actuator can arbitrarily change the posture of the front-end linkage hub relative to the base-end linkage hub. The aforementioned linkage actuation device is mounted on the output section of the aforementioned rotary actuator such that the central axis of the aforementioned linkage hub on the base end side forms an angle θt with respect to the rotation axis of the aforementioned rotary actuator; The aforementioned linear motion unit includes a linear motion actuator constituting the output section, and the aforementioned rotary unit is mounted on the linear motion actuator. Two or more attitude control actuators of the above-mentioned linkage action device are arranged such that their rotation axes are perpendicular to the central axis of the linkage hub on the base end side. The intersection of the rotation axes of the two or more attitude control actuators is located on the central axis of the connecting rod hub on the base end side that forms the angle θt.

2. The working device according to claim 1, wherein, The bisecting lines of the rotation axes of two of the above-mentioned two or more attitude control actuators lie on the plane formed by the rotation axis of the above-mentioned rotary actuator and the central axis of the above-mentioned connecting rod hub on the base end side; The aforementioned bisecting line is located on the acute angle side of the angle formed by the rotation axis of the aforementioned rotary actuator and the central axis of the aforementioned connecting rod hub on the base end side.

3. The working device according to claim 1 or 2, wherein, The aforementioned rotary actuator has an actuator body for rotation control and a speed reducer for reducing the rotation of the actuator body; The cable chain, which at least protects and guides the cable extending from the aforementioned attitude control actuator, is arranged to slide around the aforementioned rotary actuator in the direction of rotation.

4. The working device according to claim 1 or 2, wherein, The aforementioned linear motion unit includes: a first linear motion actuator, a second linear motion actuator, and a third linear motion actuator constituting the output portion of the aforementioned linear motion unit, wherein the aforementioned rotary unit is mounted on the third linear motion actuator.

5. The working device according to claim 4, wherein, The aforementioned linear motion unit includes: The first linear motion actuator described above has a first sliding part mounted on the frame and a first sliding part that is driven to move forward and backward along the first sliding part; The aforementioned second linear motion actuator has a second slidable portion connected to the aforementioned first sliding portion and a second sliding portion driven to move forward and backward along the second slidable portion; and The aforementioned third linear motion actuator has a third slidable portion connected to the aforementioned second sliding portion and a third sliding portion that is driven to move forward and backward along the third slidable portion.

6. The working device according to claim 5, wherein, The first and second linear motion actuators are arranged in a manner that the forward and backward directions of the first and second sliding parts are orthogonal to each other; The aforementioned third linear motion actuator is configured such that the forward and backward direction of the aforementioned third sliding part is orthogonal to the forward and backward directions of the aforementioned first and second sliding parts.

7. The working device according to claim 5 or 6, wherein, The aforementioned third linear motion actuator is configured such that the advancing and retreating direction of the aforementioned third sliding part is the up-down direction; The third sliding part is the guide of the linear motion actuator, and the third sliding part is the sliding worktable of the linear motion actuator.

8. The working device according to claim 5, wherein, The rotation axis of the aforementioned rotary actuator is arranged parallel to the forward and backward direction of the aforementioned third sliding part.

9. The working device according to claim 1 or 2, wherein, In the aforementioned linkage actuation device, the maximum angle between the central axis of the connecting rod hub on the base end side and the central axis of the connecting rod hub on the front end side is 90° or more.

10. The working device according to claim 9, wherein, The aforementioned linkage actuation device is installed such that the central axis of the linkage hub on the base end side is orthogonal to the rotation axis of the aforementioned rotary actuator.

11. The working device according to claim 1 or 2, wherein, The working device is a visual inspection device, which has an image processor mounted on the aforementioned linkage action device.

Images