Hybrid ultrasonic transducer system
By introducing an isolation chamber into the integrated chip structure to isolate PMUT and CMUT, the mutual interference problem between PMUT and CMUT is solved, improving the signal-to-noise ratio and overall performance.
CN116553469BActive Publication Date: 2026-07-14TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
- Filing Date
- 2022-08-15
- Publication Date
- 2026-07-14
AI Technical Summary
Technical Problem
In existing integrated chip structures, there is mutual interference between piezoelectric micromechanical ultrasonic transducers (PMUTs) and capacitive micromechanical ultrasonic transducers (CMUTs), leading to noise and performance degradation.
Method used
By introducing isolation chambers into the integrated chip structure, PMUT and CMUT are laterally isolated, reducing crosstalk and noise and improving performance.
Benefits of technology
It effectively reduces the noise between PMUT and CMUT, and improves the signal-to-noise ratio and overall performance of the integrated chip structure.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN116553469B_ABST
Abstract
The present disclosure relates to a hybrid ultrasound transducer system. The present disclosure relates to an integrated chip structure. The integrated chip structure includes a dielectric stack disposed on a substrate. The integrated chip structure further includes one or more piezoelectric micromachined ultrasonic transducers (PMUTs) and one or more capacitive micromachined ultrasonic transducers (CMUTs). The one or more PMUTs include a piezoelectric stack disposed within the dielectric stack over one or more PMUT cavities. The one or more CMUTs include electrodes disposed within the dielectric stack and separated by one or more CMUT cavities. An isolation chamber is disposed within the dielectric stack laterally between the one or more PMUTs and the one or more CMUTs. The isolation chamber extends in a vertical direction through at least a portion of both the one or more PMUTs and the one or more CMUTs.
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