A Functional Modularization and Configurability Method Based on EAP System

Abstract

This invention provides a modular and configurable method for EAP systems, comprising the following steps: dividing functions into independent sub-modules, each with complete logic; sub-modules are further divided into general function modules and special function modules, where general function modules are directly encapsulated and special modules are configurable; configurability includes process configuration, function configuration, message configuration, and data collection configuration; process configuration includes packaging program steps, parsing program packages, combining processes, and generating files. This invention achieves configurable development while retaining the original functionality of the EAP system, requiring only a small number of customized needs to be redeveloped. Compared to the previous method where every type required redevelopment, this invention only requires configuration to complete development. This significantly saves development costs, accelerates deployment, and facilitates later maintenance.

Description

Technical Field

[0001] This invention relates to the field of intelligent manufacturing technology, specifically to a method for functional modularization and configurability based on an EAP system. Background Technology

[0002] Equipment Automation Program (EAP) is a communication bridge connecting upper-level systems such as MES, RMS, APC, and FDC with the equipment layer, and is an indispensable system in automated production.

[0003] The primary task of an EAP (Equipment Management Platform) system is to convert data from the equipment's main control computer into messages acceptable to the MES (Manufacturing Execution System). Factories, especially in the semiconductor industry, have a large number and variety of equipment; a 12-inch semiconductor factory can have over 500 machines on a mass production line. Coupled with complex processes, numerous influencing factors, and extremely high requirements for process control, a significant amount of manpower is consumed in collecting, organizing, and analyzing data and maintaining equipment during production. Furthermore, manual operation is prone to errors, causing unnecessary losses. Therefore, the application of EAP is becoming increasingly widespread. EAP is hailed as a "master of equipment management," providing real-time control of production line machines, automating equipment operation, saving substantial manpower, and reducing losses caused by human error.

[0004] The biggest pain point of EAP systems is that a separate EAP program needs to be developed for each type of equipment. Although the Semiconductor Equipment Association (SEMI) has established the Semiconductor Equipment Communication Standard (SECS) to provide a common communication interface between EAP and equipment, customized development is still required for different types of equipment. This is especially true for some measurement equipment, where the process technology frequently changes the data that needs to be collected. Each change requires modifying the program, making EAP system maintenance even more cumbersome. Summary of the Invention

[0005] The purpose of this invention is to provide a modular and configurable method for EAP systems. By modularizing functions and enabling customized configurability, this invention greatly reduces development and maintenance costs.

[0006] To achieve the above objectives, the present invention proposes the following technical solution: a method for functional modularization and configurability based on an EAP system, comprising the following processes:

[0007] The functions are divided into independent sub-modules. Each module has complete logic. The sub-modules are divided into general function modules and special function modules. The general function modules are directly encapsulated, while the special modules are configured.

[0008] Configuration includes process configuration, function configuration, message configuration, and data collection configuration;

[0009] The process configuration includes the following steps: Step 1, package the program, and package the developed program into a jar file;

[0010] Step 2: Parse the program package. Parse the packaged program, recursively read each JAR file, parse out the classes in each JAR file, load them through the class loader, and after loading, analyze whether there are any related annotations. Classes with related annotations are converted into nodes, and classes without related annotations will not appear in the process and can be skipped.

[0011] Step 3: Combine the processes and select the necessary nodes to combine;

[0012] Step 4: Generate a configuration file and save it to the specified path for program loading;

[0013] Functional configuration includes generating configuration files with certain functions, storing them in a specified folder for selection and use, enabling necessary functions by default, and allowing users to disable unnecessary functions or enable necessary functions by modifying the configuration file. When the process reaches the corresponding functional module, it will determine whether to execute this functional module based on the configuration in the configuration file.

[0014] Message configuration includes configuring parameters and setting fixed values ​​for messages. The default configuration is the standard format of the SECS protocol. It can delete meaningless parameters or set some parameters to fixed values ​​as needed. When the EAP program sends SECS messages to the device, it reads the configuration file and sends the corresponding messages as needed.

[0015] Data acquisition configuration includes event acquisition configuration and data acquisition configuration;

[0016] Among them, the event collection configuration first encapsulates the complete process of each event into a functional module, and configures the corresponding event ID to trigger the corresponding functional module, where ceid is the event ID defined by the device and mappingValue is the triggered functional module;

[0017] Data acquisition is configurable. Configure edcMapping, which determines whether EDC data needs to be collected and which data to collect.

[0018] The value of EDCSpecNamePatternitem can be matched with the name of the received value issued by MES through regular expression rules.

[0019] The value of VIDNameitem corresponds to the content of which VID needs to be collected;

[0020] The sourceEvent corresponds to the event that reported and triggered it; the value in valueXPath will be parsed, with each level corresponding to each node in VID, and letters representing arbitrary numbers, which means it needs to be looped; the value of Criteriaitem can be used to match the value of the corresponding field in VID for precise positioning.

[0021] Furthermore, in this invention, the EAP system is connected to a management layer, which is MES, RMS, APC, or FDC.

[0022] An apparatus for implementing the above-described method for modularizing and configuring the functional modules of an EAP system, comprising:

[0023] The functional division module is used to divide functions into independent sub-modules. Each module has complete logic. The sub-modules are divided into general function modules and special function modules. The general function modules are directly encapsulated, while the special modules are configured.

[0024] The configuration module is used for process configuration, function configuration, message configuration, and data collection configuration.

[0025] An electronic device includes a memory, a processor, and a computer program stored in the memory and running on the processor, wherein the processor executes the program to implement the network fault diagnosis method described above.

[0026] A computer-readable storage medium storing a computer program that is executed by a processor to implement the network fault diagnosis method described above.

[0027] Beneficial effects: The technical solution of this application has the following advantages: This invention achieves configurable development while retaining the original functions of the EAP system, requiring only a small number of customized needs to be redeveloped. Compared to the previous method where each type required redevelopment, this invention only requires configuration to complete development. This greatly saves development costs, accelerates the deployment process, and facilitates later maintenance.

[0028] It should be understood that all combinations of the foregoing concepts and the additional concepts described in more detail below can be considered part of the inventive subject matter of this disclosure, provided that such concepts do not contradict each other.

[0029] The foregoing and other aspects, embodiments, and features of the teachings of the present invention will be more fully understood from the following description in conjunction with the accompanying drawings. Other additional aspects of the invention, such as features and / or beneficial effects of exemplary embodiments, will become apparent from the following description or may be learned through practice of specific embodiments according to the teachings of the present invention. Attached Figure Description

[0030] The accompanying drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component shown in the various figures may be denoted by the same reference numeral. For clarity, not every component is labeled in each figure. Embodiments of various aspects of the invention will now be described by way of example and with reference to the accompanying drawings, wherein:

[0031] Figure 1 This is a schematic diagram of the process of the present invention.

[0032] Figure 2 This is a schematic diagram of the system structure of the present invention.

[0033] Figure 3 This is a schematic diagram illustrating the process configuration of the present invention. Detailed Implementation

[0034] To better understand the technical content of this invention, specific embodiments are described below in conjunction with the accompanying drawings. Various aspects of the invention are described in this disclosure with reference to the accompanying drawings, which illustrate numerous illustrative embodiments. The embodiments of this disclosure are not necessarily defined to include all aspects of the invention. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed in this invention are not limited to any particular implementation. Furthermore, some aspects of this invention can be used alone or in any suitable combination with other aspects of this invention.

[0035] like Figure 1-3 As shown, this invention is an optimized system based on the traditional EAP system, achieving functional modularization and configurability. A method for functional modularization and configurability based on an EAP system includes the following processes:

[0036] Functional partitioning involves dividing a complete functional module within a workflow into sub-workflows, creating independent sub-modules. Each sub-module has complete logic and is further divided into general-purpose and special-purpose modules. General-purpose modules, such as device mode switching reporting, are present on all devices and perform identical operations; they can be developed entirely according to their logic. Special-purpose modules, on the other hand, are configurable.

[0037] Configuration includes process configuration, function configuration, message configuration, and data collection configuration;

[0038] The process configuration includes the following steps: Step 1, package the program, and package the developed program into a jar file;

[0039] Step 2: Parse the program package. Parse the packaged program, recursively read each JAR file, parse out the classes in each JAR file, load them through the class loader, and after loading, analyze whether there are any related annotations. Classes with related annotations are converted into nodes, and classes without related annotations will not appear in the process and can be skipped.

[0040] Step 3: Combine the process. According to the scenario of the equipment operation, connect the nodes of the functional modules with arrows. The direction of the arrows represents the direction of the process, and the parameters on the arrows represent the return value of the previous node. When the return value after the previous node finishes execution is consistent with the return value set on the arrow, the next functional node will be executed.

[0041] Step 4: Generate a configuration file and save it to the specified path for program loading;

[0042] Functional configuration includes generating a configuration file with all functions, storing it in a specified folder for use, and enabling necessary functions by default. Unnecessary functions can be disabled or necessary functions can be enabled by modifying the configuration file. When the process runs to the corresponding functional module, it will determine whether to execute this functional module based on the configuration in the configuration file.

[0043] Message configuration includes configuring parameters and setting fixed values ​​for messages. The default configuration is the standard format of the SECS protocol. Meaningless parameters can be deleted or some parameters can be set to fixed values ​​as needed. When the EAP program sends SECS messages to the device, it will read the configuration file and send the corresponding messages as needed.

[0044] Data acquisition configuration includes event acquisition configuration and data acquisition configuration;

[0045] Among them, the event collection configuration first encapsulates the complete process of each event into a functional module. It is recommended to name it with the event name and configure the corresponding event ID to trigger the corresponding functional module. Here, ceid is the event ID defined by the device, and mappingValue is the functional module named with the event name. When the device reports the corresponding ceid message, the EAP program will call the corresponding functional module according to the mappingValue bound to the ceid in the configuration file.

[0046] Data collection is configured by configuring edcMapping. edcMapping configures whether EDC data needs to be collected and which data to collect. When EAP requests carrier information from MES requiring the carrier to report EDC data, the EAP program reads edcMapping from the configuration file and parses the following parameters.

[0047] The value of EDCSpecNamePatternitem is configured as a regular expression. When EAP receives the value name from MES, it will match the value of each EDCSpecNamePatternitem in turn. When it encounters a matching regular expression, it will parse the item under EDCSpecNamePattern.

[0048] The `value` parameter of `VIDNameitem` is configured with the name of the VID. When the EAP program obtains this parameter, it will traverse the VID list in the configuration file, find the corresponding VID, and then retrieve the content of the corresponding VID from the message reported by the device. The `sourceEvent` parameter is configured with which event report will trigger the event. The default configuration is `WaferData`. This is related to the event collection configuration mentioned above. The data collection function module is named `WaferData`, and the `mappingValue` of the corresponding ceid is also configured as `WaferData` in the event collection configuration. When the device reports the ceid, EAP will call the data collection function module. The `valueXPath` parameter is configured with the specific position of the parameter, for example: 1~2~i~2. The EAP program will split the obtained value using the '~' symbol as the splitting rule, and then retrieve 1, 2, i, 2. When a number is retrieved, the node of the corresponding level in the content of the corresponding VID is retrieved. When a letter is retrieved, the value of all nodes in that level is retrieved in a loop.

[0049] The value of Criteriaitem can be used to match the value of the corresponding field in VID for precise positioning. The keyXPath in Criteriaitem is used in the same way as valueXPath. When encountering letters that need to be looped, only the values ​​under the nodes whose parameter values ​​are equal to the value of Criteriaitem will be retrieved.

[0050] This invention largely avoids the problem of frequent changes in data acquisition requirements by designing the data acquisition part as configurable.

[0051] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Those skilled in the art can make various modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention shall be determined by the claims.

Claims

1. A method for modularizing and configuring functions based on an EAP system, characterized in that: The process includes the following: The functions are divided into independent sub-modules. Each module has complete logic. The sub-modules are divided into general function modules and special function modules. The general function modules are directly encapsulated, while the special modules are configured. Configuration includes process configuration, function configuration, message configuration, and data collection configuration; The process configuration includes the following steps: Step 1, package the program, and package the developed program into a jar file; Step 2: Parse the program package. Parse the packaged program, recursively read each JAR file, parse out the classes in each JAR file, load them through the class loader, and after loading, analyze whether there are any related annotations. Classes with related annotations are converted into nodes, and classes without related annotations will not appear in the process and can be skipped. Step 3: Combine the processes and select the necessary nodes to combine; Step 4: Generate a configuration file and save it to the specified path for program loading; Functional configuration includes generating a configuration file with functions, storing it in a specified folder for selection and use, enabling necessary functions by default, and allowing users to disable unnecessary functions or enable necessary functions by modifying the configuration file. When the process reaches the corresponding functional module, it will determine whether to execute this functional module based on the configuration in the configuration file. Message configuration includes configuring parameters and setting fixed values ​​for messages. The default configuration is the standard format of the SECS protocol. It can delete meaningless parameters or set some parameters to fixed values ​​as needed. When the EAP program sends SECS messages to the device, it reads the configuration file and sends the corresponding messages as needed. Data acquisition configuration includes event acquisition configuration and data acquisition configuration; Among them, the event collection configuration first encapsulates the complete process of each event into a functional module, and configures the corresponding event ID to trigger the corresponding functional module, where ceid is the event ID defined by the device and mappingValue is the triggered functional module; Data acquisition is configurable. Configure edcMapping, which determines whether EDC data needs to be collected and which data to collect. The value of the EDCSpecNamePattern item is matched with the name of the received value issued by MES according to the rules of regular expression; The value of the VIDName item corresponds to the content of which VID needs to be collected; The sourceEvent corresponds to the event that reported and triggered it; the value in valueXPath will be parsed, with each level corresponding to each node in VID, and letters representing arbitrary numbers, which means it needs to be looped; the value of the Criteria item is used to match the value of the corresponding field in VID for precise positioning.

2. The method for modularizing and configurable functions based on an EAP system according to claim 1, characterized in that: The EAP system is connected to a management layer, which can be MES, RMS, APC, or FDC.

3. A device for implementing the functional modularization and configurability method based on an EAP system as described in any one of claims 1-2, characterized in that: include: The functional division module is used to divide functions into independent sub-modules. Each module has complete logic. The sub-modules are divided into general function modules and special function modules. The general function modules are directly encapsulated, while the special modules are configured. The configuration module is used for process configuration, function configuration, message configuration, and data collection configuration.

4. An electronic device, characterized in that, It includes a memory, a processor, and a computer program stored in the memory and running on the processor, wherein the processor executes the program to implement a functional modularization and configurability method for an EAP-based system as described in any one of claims 1-2.

5. A computer-readable storage medium storing a computer program, characterized in that, The computer program is executed by a processor to implement a modular and configurable method for an EAP-based system as described in any one of claims 1-2.

Images