A nanofiber acousto-electric device with adjustable response bandwidth

Abstract

This invention relates to a nanofiber acousto-electric device with adjustable response bandwidth, comprising two plastic film electrodes and a piezoelectric polymer nanofiber film sandwiched between the two plastic film electrodes; each plastic film electrode has several through-hole slits arranged in the middle, and the piezoelectric polymer nanofiber film exposed through the slits vibrates and deforms under the action of sound waves, thereby generating electrical energy; the nanofibers in the piezoelectric polymer nanofiber film are in an oriented and / or randomly oriented stacked structure; a metal layer is provided on one side of each plastic film electrode for collecting electrical energy; the metal layer contacts the piezoelectric polymer nanofiber film to form an acousto-electric generator. The advantage of this invention is that by adjusting the arrangement of the oriented fibers and the slits, the bandwidth of the device can be adjusted, thereby improving the utilization rate of sound and generating greater electrical energy.

Description

Technical Field

[0001] This invention relates to the field of acoustic-electric conversion technology, and more particularly to a nanofiber acoustic-electric device with adjustable response bandwidth. Background Technology

[0002] Piezoelectric nanofiber membranes can convert sound waves into electrical energy, thus possessing enormous application potential in sound detection and energy conversion. As sound sensors, piezoelectric nanofiber membranes, due to their high sensitivity and wide spectral density, can be applied to sound monitoring, recording, and information identification. On the other hand, a key characteristic of piezoelectric nanofibers is their ability to generate a large electrical output under high sound intensity (i.e., noise). This enables them to convert noise into electrical energy. Since noise is a form of white pollution, significantly impacting daily life, public health, industrial production, and the environment, converting noise into electricity can not only eliminate noise pollution but also generate additional power.

[0003] Since 2017, when Lang et al. (Lang, C.; Fang, J.; Shao, H.; Ding, X.; Lin, T., High-sensitivity acoustic sensors from nanofibers. Nat. Commum. 2016, 7, 11108) reported that electrospun PVDF nanofiber membranes possess acoustic-electric conversion properties, a series of studies have been conducted on the acoustic-electric conversion properties of electrospun nanofibers. These studies have found that the acoustic-electric output of nanofibers is far higher than that of other materials, and they have broad application prospects in sound detection, information transmission and processing, healthcare, environmental monitoring, and power generation. Nanofibers are particularly well-suited for converting high-intensity sound (i.e., noise) into high-output electrical energy. A single nanofiber acousto-electric device can generate up to 98V under noise conditions (Shao, H.; Wang, H.; Cao, Y.; Ding, X.; Bai, R.; Chang, H.; Fang, J.; Jin, X.; Wang, W.; Lin, T., Single-layer piezoelectric nanofiber membrane with substantially enhanced noise-to-electricity conversion from endogenous triboelectricity. NanoEnergy 2021, 89, 106427), potentially converting noise pollution into valuable electrical energy. Previously reported nanofiber acousto-electric devices typically consist of a nanofiber membrane and a gold-plated plastic film on one side. The plastic film acts as an electrode, while the gold plating on one side collects charge. The plastic film often has one or more pores, allowing the nanofibers within the pores to directly interact with the sound and convert energy. However, these nanofiber devices have a narrow response frequency range, typically between 100 and 400 Hz, which limits their ability to absorb and convert sound at other frequencies, thus reducing the device's utilization of sound and electrical output.

[0004] Some patents disclose acoustic-electric conversion devices based on piezoelectric polymer films and piezoelectric nanofibers. For example, patent (application number: 201911210394.2, publication number: CN110768579A) and patent (application number: 201821506464.X, publication number: CN208890683U) disclose PVDF thin-film acoustic generators. Under the action of an acoustic resonant cavity, the convergence of sound waves causes the PVDF film to vibrate and deform, thereby generating electrical energy. Patent (application number: 201420682772.3, publication number: CN204145334U) discloses a method that combines piezoelectricity with electromagnetism to improve acoustic-electric output. In an acoustic resonant cavity, the PVDF piezoelectric film uses an oscillator to move back and forth in a magnetic field, cutting magnetic field lines to generate electricity. Patents (application number: 201910571819.6, publication number: CN110296755B) and (application number: 201910571842.5, publication number: CN110350078B) disclose the use of electrospun PVDF nanofiber membranes as piezoelectric layers, which are combined with electrodes with cavities on one side to assemble a flexible acoustic-electric conversion device.

[0005] Other patents disclose acoustic-to-electric conversion devices based on the triboelectric principle. For example, patents (application number: 201510483373.3, publication number: CN105208497A) and (application number: 201410044942.X, publication number: CN104836472A) disclose acoustic-to-electric devices composed of an acoustic resonant cavity, a friction medium, and electrodes. These devices require a resonant cavity to amplify the sound, thus occupying a large volume. Patent (application number: 201510024832.1, publication number: CN105871249B) discloses an acoustic-to-electric conversion device composed of a metal electrode with micro-perforations and a polymer material with a microstructured surface. The micro-perforations on the electrode and the microstructure of the polymer material increase the contact area, thereby improving the acoustic-to-electric conversion efficiency and acoustic-to-electric output. The patent (application number: 202010581078.2, publication number: CN111641347B) provides a flexible acoustic-electric conversion device that uses the frictional effect of electrospun P(VDF-TrFE) nanofiber membrane and conductive fabric to convert acoustic energy into electrical energy, avoiding the use of acoustic resonant cavities and featuring portability and high electrical output performance.

[0006] However, none of the aforementioned patents address the frequency response range of acoustic-to-electric conversion, and they lack methods for adjusting the sound response frequency. This significantly limits the application of these devices, as different sound sources produce sound at different frequencies. Effective acoustic-to-electric conversion can only be achieved when the audio response of the acoustic-to-electric device matches the frequency of the sound source. Therefore, adjusting the frequency of the acoustic-to-electric device helps improve the utilization of sound, thereby expanding its application range. In light of this, we propose a nanofiber acoustic-to-electric device with adjustable response bandwidth. Summary of the Invention

[0007] The purpose of this invention is to overcome the shortcomings of existing technologies and meet practical needs by providing a nanofiber acousto-electric device with adjustable response bandwidth. This addresses the limitation of existing nanofiber acousto-electric devices, which typically have narrow bandwidths, mostly between 100-400Hz, restricting their widespread application. This invention provides a nanofiber acousto-electric device with adjustable response bandwidth, comprising a nanofiber film and two layers of slit plastic film electrodes, with the nanofiber film sandwiched between the two layers of plastic film electrodes. The response bandwidth of the device can be adjusted by the alignment direction of the nanofibers with the electrode slits. When the nanofibers are aligned perpendicularly to the slits, the bandwidth can be increased to 100-900Hz, which improves the utilization rate of multi-frequency noise and electrical output.

[0008] To achieve the objectives of this invention, the technical solution adopted is as follows: A nanofiber acousto-electric device with adjustable response bandwidth is designed, comprising two plastic film electrodes and a piezoelectric polymer nanofiber film, wherein the piezoelectric polymer nanofiber film is sandwiched between the two plastic film electrodes; each plastic film electrode has several through-hole slits arranged in the middle, and the piezoelectric polymer nanofiber film exposed through the slits vibrates and deforms under the action of sound waves, thereby generating electrical energy; the nanofibers in the piezoelectric polymer nanofiber film are in an oriented and / or randomly oriented stacked structure; a metal layer is provided on one side of the plastic film electrode for collecting electrical energy; the metal layer contacts the piezoelectric polymer nanofiber film to form an acousto-electric generator. This invention provides a nanofiber acousto-electric device with adjustable response bandwidth, employing an oriented nanofiber film and plastic film electrodes with slits, and increasing the response bandwidth of the device by adjusting the arrangement direction between the piezoelectric nanofibers and the electrode slits. When nanofibers are aligned perpendicularly to the slits, the bandwidth of these devices can be increased from 100-400Hz to 100-900Hz, and the generated electrical energy can be used to drive various microelectronic devices and stored in batteries and capacitors.

[0009] In the above technical solution, the nanofibers are made of piezoelectric polymers such as PVDF, P(VDF-TrFE), PLA, polyimide and PAN, and the diameter of the nanofibers is less than 1000nm and the thickness is 30-300μm.

[0010] In the above technical solution, the nanofibers can also be made of composite materials, such as those containing inorganic piezoelectric materials, such as quartz (SiO2), barium titanate, lead zirconate titanate, barium zirconate titanate and barium calcium titanate particles, etc. The diameter of the inorganic piezoelectric materials is 20-2000nm, and the content is 0.1-30% (the mass ratio of inorganic materials to fiber materials).

[0011] In the above technical solution, the piezoelectric polymer nanofiber film is prepared by electrospinning, centrifugal spinning, wet spinning, or melt electrospinning. When using electrospinning, the nanofiber film can be used directly; when using centrifugal spinning or wet spinning, the prepared nanofibers need to be polarized to make them exhibit piezoelectric properties. When polarization treatment is required, the temperature is 30-100℃, the applied electric field is 0.1-10kV / cm, and the polarization time is 2-20 hours.

[0012] In the above technical solution, the substrate of the plastic film electrode is a plastic, such as polyethylene terephthalate, polypropylene, polyethylene, nylon, and polyvinyl chloride, or paper, or metal (such as aluminum, copper, stainless steel foil, etc.). When using a plastic or paper substrate, the thickness of the substrate is 10-1000 μm; when using a metal substrate directly, the thickness of the substrate is 10-500 μm.

[0013] In the above technical solution, the metal layer is made by magnetron sputtering, thermal evaporation or chemical electrodeposition, and the metal material is gold, silver, platinum, copper and nickel, etc. The thickness of the metal coating is 50-1000nm.

[0014] In the above technical solution, the slit on the plastic film electrode is formed by laser cutting or other methods, and the slit width is 0.1-10mm, while the length is arbitrary.

[0015] In the above technical solution, the acoustic generator is fixed by stitching with fine thread, bonding with glue, or fixing with plastic rivets.

[0016] In the above technical solution, the metal layer is made by magnetron sputtering and / or thermal evaporation and / or chemical electrodeposition, and the metal material is one or more of gold, silver, platinum, copper and nickel, and the thickness of the metal coating is 50-1000nm.

[0017] In the above technical solution, the orientation arrangement includes being perpendicular to the slit and / or parallel to the slit. When the orientation nanofibers are perpendicular to the slit, the bandwidth is the largest, and when the orientation nanofibers are parallel to the slit, the bandwidth is smaller.

[0018] In the above technical solution, the acoustic generator can be used for acoustic sensing and acoustic power generation, such as recording sound, driving various microelectronics, or storing energy in lithium-ion batteries and capacitors.

[0019] Compared with the prior art, the advantages of this invention are: 1. Simple structure, assembled from only three thin films; 2. The acoustic-electric device made of highly oriented fibers and slit electrodes can adjust the bandwidth, displaying a bandwidth of up to 100-900Hz; 3. The device can generate 52.72V (power density of 127mW / m²). 2 This is sufficient to develop applications for acoustic sensors, drive various microelectronics, or store energy in lithium-ion batteries and capacitors.

[0020] Another advantage of this invention lies in the fact that the bandwidth of the device can be adjusted by regulating the arrangement of the oriented fibers and the slits. When the oriented fibers are arranged perpendicularly to the slits, the vibration of the slits is restricted by the vertically arranged nanofibers, thus requiring higher frequency sound waves to cause the device to resonate. The vibration of the slits stretches the fibers, causing deformation and generating electrical energy. Since actual sound sources are often composed of multiple frequencies of sound, the increased bandwidth allows the device to convert more frequencies of sound waves into electrical energy, thereby improving the utilization rate of sound and generating more electrical energy. Attached Figure Description

[0021] Figure 1 This is a flowchart illustrating the fabrication process of the acoustic generator in this invention.

[0022] Figure 2 This is a test circuit diagram of the acoustic generator in this invention (including voltage, current and power tests);

[0023] Figure 3 This is a diagram showing the fiber morphology and acoustic-electric properties of an acoustic-electric device prepared from a randomly oriented nanofiber membrane in Example 1 of the present invention.

[0024] Figure 4 This is a diagram showing the fiber morphology and acoustic-electric properties of an acoustic-electric device prepared from a nanofiber membrane with nanofibers aligned parallel to the length direction of the slit in Example 2 of the present invention.

[0025] Figure 5 This is an acoustic-electric performance diagram of an acoustic-electric device prepared from a nanofiber membrane with nanofibers oriented perpendicular to the slit length direction in Example 3 of the present invention.

[0026] Figure 6 This is a graph showing the conversion performance of the device prepared in Embodiment 1 of the present invention for mixed sound.

[0027] Figure 7 This is a graph showing the conversion performance of the device prepared in Embodiment 2 of the present invention for mixed sound;

[0028] Figure 8 This is a graph showing the conversion performance of the device prepared in Embodiment 3 of the present invention for mixed sound;

[0029] Figure 9 This is a recording signal diagram of the music "A Laugh in the Vast Sea" recorded by the device prepared in Embodiment 3 of the present invention;

[0030] Figure 10 This is a circuit diagram of the device prepared in Embodiment 3 of the present invention for use in LED lighting;

[0031] Figure 11 The circuit and voltage diagram of the device prepared in Embodiment 3 of the present invention for transmitting wireless signals are shown below.

[0032] Figure 12 The circuit and voltage diagram of the device prepared in Embodiment 3 of the present invention for charging a lithium-ion battery are shown below.

[0033] Figure 13 The circuit and voltage diagram of the device prepared in Embodiment 3 of the present invention for charging a supercapacitor. Detailed Implementation

[0034] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0035] The fabrication process of the acoustic-electric device provided by this invention is as follows: Figure 1 As shown, the acoustic-electric device consists of two plastic film electrodes and a piezoelectric polymer nanofiber film sandwiched between the two electrodes. One side of each plastic film electrode has a metal layer for collecting electrical energy. Each plastic film electrode has several slits penetrating the plastic film, arranged perpendicularly to the piezoelectric polymer nanofiber film. The piezoelectric polymer nanofiber film is prepared by electrospinning. The metal side of the plastic film electrode is in contact with the piezoelectric polymer nanofiber film, and the assembled acoustic generator is fixed by thin wires. When the device operates, the piezoelectric polymer nanofiber film exposed through the slits vibrates and deforms under the action of sound waves, thereby generating electrical energy. The plastic film electrode with the metal layer is connected to an external circuit by wires. Since the device generates an alternating current signal, it needs to be converted into a direct current pulse by an external circuit. The schematic diagram of the test circuit is shown below. Figure 2 As shown.

[0036] Example 1: An acousto-electric device was fabricated from a randomly oriented nanofiber membrane. The electrospinning parameters were: spinning solution concentration of 12%, spinning flow rate of 1 mL / h, spinning distance of 10 cm, voltage of 20 kV, and roller speed of 100 rpm. The orientation angle of the collected nanofibers ranged from -90 to 90°, the diameter of the fibers was 359 ± 39 nm, and the thickness of the nanofiber layer was 33 ± 4 μm. The nanofiber membrane was assembled with slit electrodes to form an acousto-electric device (overall size: 40 × 30 mm, slit size: 30 × 2 mm, 5 slits). Under the action of a 100 Hz, 115 dB acoustic wave, the open-circuit voltage of the device was 38.84 ± 1.21 V, and the short-circuit current was 5.34 ± 0.13 μA; under the action of a 382 Hz, 115 dB acoustic wave, the open-circuit voltage was 9.38 ± 0.56 V, and the short-circuit current was 1.54 ± 0.07 μA. The device has a bandwidth of 100-440Hz. Its maximum output power is 7.13±0.56μW, and its internal resistance is 7.83±0.32MΩ. Fiber morphology and acoustic-electric properties are as follows: Figure 3 As shown in the figure: (a) electron microscope image of randomly oriented PAN nanofibers, (b) fiber diameter distribution, (c) fiber orientation angle distribution, (d) response spectrum, (e) relationship between output and sound pressure level (sound frequency: 382 Hz), (f) power graph (sound frequency: 382 Hz; sound pressure level: 115 dB).

[0037] Example 2: Preparation of an Acousto-Electro-Mechanical Device using Oriented PAN Nanofiber Membranes—The nanofibers are parallel to the length direction of the slit. Electrospinning parameters are: spinning solution concentration 14%, spinning flow rate 1 mL / h, spinning distance 10 cm, voltage 20 kV, and roller speed 2100 rpm. The obtained PAN nanofibers have a diameter of 354 ± 52 nm, a nanofiber membrane thickness of 33 ± 4 μm, and an orientation angle ranging from -22.5° to 17.5°. In the acousto-electric device, the nanofibers are parallel to the length direction of the slit. Under the influence of a 104 Hz, 115 dB acoustic wave, the open-circuit voltage of the device is 61.73 ± 2.08 V, and the short-circuit current is 9.66 ± 0.19 μA; under the influence of a 382 Hz, 115 dB acoustic wave, the open-circuit voltage is 23.76 ± 1.08 V, and the short-circuit current is 3.97 ± 0.1 μA. The device has a bandwidth of 100-550Hz, a maximum output power of 24.76±3.25μW, and an internal resistance of 6.06±0.33MΩ. Fiber morphology and acoustic-electric properties are as follows: Figure 4 As shown in the figure: (a) electron microscope image of randomly oriented PAN nanofibers, (b) fiber diameter distribution, (c) fiber orientation angle distribution, (d) response spectrum, (e) relationship between output and sound pressure level (sound frequency: 382 Hz), (f) power graph (sound frequency: 382 Hz; sound pressure level: 115 dB).

[0038] Example 3: Fabrication of an Acousto-Electronic Device Using Oriented PAN Nanofiber Membrane—The nanofibers are perpendicular to the slit length direction. The fabrication method of the oriented nanofibers is the same as in Example 2. During the fabrication of the acoustic-electric device, the nanofibers are perpendicular to the slit length direction. Under the action of a 382Hz, 115dB acoustic wave, the open-circuit voltage of the device is 52.72±1.67V, and the short-circuit current is 7.97±0.17μA; under the action of a 104Hz, 115dB acoustic wave, the open-circuit voltage is 22.76±0.99V, and the short-circuit current is 5.97±0.13μA. The bandwidth of the device is 100-900Hz. The maximum output power is 152.41±14.92μW, and the internal resistance is 6.15±0.37MΩ. The acoustic-electric performance is as follows: Figure 5 As shown in the figure: (a) response spectrum, (b) output versus sound pressure level (sound frequency: 382Hz), (c) power graph (sound frequency: 38Hz; sound pressure level: 115dB).

[0039] Example 4: Conversion performance of mixed-frequency sound in acousto-electric devices prepared with nanofiber membranes;

[0040] The device fabricated in Example 1 exhibits the following characteristics in a mixed tone range of 100-900 Hz and 115 dB: open-circuit voltage of 11.32 ± 0.68 V, short-circuit current of 2.08 ± 0.07 μA, and maximum output power of 8.32 ± 0.56 μW. Its acoustic-electric performance is as follows: Figure 6 As shown in the figure: (a) open circuit voltage, (b) short circuit current, (c) power diagram (sound frequency: 382Hz; sound pressure level: 115dB).

[0041] The device fabricated in Example 2 exhibits the following characteristics in a mixed tone range of 100-900 Hz and 115 dB: open-circuit voltage of 27.12 ± 0.98 V, short-circuit current of 3.97 ± 0.12 μA, and maximum output power of 39.11 ± 4.21 μW. Its acoustic-electric performance is as follows: Figure 7 As shown in the figure: (a) open circuit voltage, (b) short circuit current, (c) power diagram (sound frequency: 382Hz; sound pressure level: 115dB).

[0042] The device fabricated in Example 3 exhibits the following characteristics in a mixed tone range of 100-900 Hz and 115 dB: open-circuit voltage of 39.85 ± 1.34 V, short-circuit current of 6.23 ± 0.16 μA, and maximum output power of 96.64 ± 8.12 μW. Its acoustic-electric performance is as follows: Figure 8 As shown in the figure, (a) is the open-circuit voltage, (b) is the short-circuit current, and (c) is the power diagram (sound frequency: 382Hz; sound pressure level: 115dB).

[0043] Example 5: Application of nanofiber membrane fabrication for generating electrical energy in acoustic and electronic devices;

[0044] (1) Application in recording sound: The device prepared in Example 3 can convert speech into electrical signals, which can realize recording. Figure 9 The image shows the electrical signal of the classic music "A Laugh in the Vast Sea" recorded by the acoustic device. The recorded waveform has almost the same waveform characteristics as the original sound wave, such as... Figure 9 As shown.

[0045] (2) Application in LED lighting: Under noise conditions of 115dB (sound frequency 382Hz), the electrical energy generated by the device prepared in Example 3, after rectification, can directly light 47 LEDs connected in series. The circuit diagram is shown below. Figure 10 As shown.

[0046] (3) Application in wireless signal transmission: The electrical energy generated by the device prepared in Example 3 under continuous noise can be used to transmit wireless signals. Its circuit diagram is shown below. Figure 11 As shown in (a), taking the noise generated by a high-speed train as an example, the sound frequency near the high-speed train is 220-630Hz, and the sound pressure level is 110.3-115.6dB. When the high-speed train passes, the electrical energy generated by the acousto-electric device made of nanofiber membrane is stored in a capacitor in the wireless sensing system. After 16 seconds, the capacitor reaches 4.8V, triggering the transmission of the first wireless signal. Then the voltage drops to about 3.0V. After another 10 seconds, the capacitor is charged to the energy level that can send a second signal. As long as the sound state is maintained, the system sends a signal every 10 seconds, such as... Figure 11 As shown in (b), the signals transmitted by the wireless sensing system can be received by a nearby receiver. In this way, the system achieves self-sustaining detection without relying on an external power source.

[0047] (4) Application in charging lithium-ion batteries: Under noise (frequency 382Hz; sound pressure level 115dB), the electrical energy generated by the device prepared in Example 3 can charge a lithium-ion battery (3.7V, 40mA) after rectification. The circuit diagram is shown below. Figure 12 As shown in (a). Figure 12 As shown in (b), the battery voltage increased by 0.473V within 3600s.

[0048] (5) Application in supercapacitor charging: Under noise conditions (frequency 382Hz, sound pressure level 115dB), the electrical energy generated by the device prepared in Example 3 can charge the capacitor after rectification. The circuit diagram is shown below. Figure 13 As shown in (a), it takes 7 seconds to charge a 4.7μF capacitor to 10V, and a charging time of 50 seconds can raise the voltage of a 22μF capacitor to 9V and the voltage of a 47μF capacitor to 3.5V. Figure 13 As shown in (b).

[0049] The table below summarizes the acoustic and electrical properties of the devices prepared in Examples 1, 2, and 3.

[0050]

[0051] The embodiments disclosed in this invention are preferred embodiments, but are not limited thereto. Those skilled in the art can easily understand the spirit of this invention based on the above embodiments and make different extensions and variations, but as long as they do not depart from the spirit of this invention, they are all within the protection scope of this invention.

Claims

1. A nanofiber acousto-electric device with adjustable response bandwidth, characterized in that, It includes two plastic film electrodes and a piezoelectric polymer nanofiber film, wherein the piezoelectric polymer nanofiber film is sandwiched between the two plastic film electrodes; Each plastic film electrode has several through-hole slits arranged in the middle. The piezoelectric polymer nanofiber film exposed through the slits vibrates and deforms under the action of sound waves, thereby generating electrical energy. The nanofibers in the piezoelectric polymer nanofiber film are arranged in an oriented or randomly oriented stacked structure. A metal layer is provided on one side of the plastic film electrode for collecting electrical energy; The metal layer comes into contact with the piezoelectric polymer nanofiber film to form an acoustic generator.

2. The nanofiber acousto-electric device with adjustable response bandwidth as described in claim 1, characterized in that, The nanofibers are made of piezoelectric polymers and have a diameter of less than 1000 nm and a thickness of 30-300 μm.

3. The nanofiber acousto-electric device with adjustable response bandwidth as described in claim 1, characterized in that, The nanofibers are made of composite materials, including inorganic piezoelectric materials and fiber materials. The diameter of the inorganic piezoelectric materials is 20-2000 nm, and the mass ratio of the inorganic piezoelectric materials to the fiber materials is 0.1-30%.

4. The nanofiber acousto-electric device with adjustable response bandwidth as described in claim 1, characterized in that, The piezoelectric polymer nanofiber film is prepared by electrospinning, centrifugal spinning or wet spinning, wherein the electrospinning method is melt electrospinning.

5. The nanofiber acousto-electric device with adjustable response bandwidth as described in claim 4, characterized in that, The polarization treatment temperature for preparing the nanofibers by the centrifugal spinning method and / or wet spinning method is 30-100℃, the applied electric field is 0.1-10kV / cm, and the polarization time is 2-20 hours.

6. The nanofiber acousto-electric device with adjustable response bandwidth as described in claim 1, characterized in that, The slit width is 0.1-10 mm.

7. The nanofiber acousto-electric device with adjustable response bandwidth as described in claim 1, characterized in that, The acoustic generator is fixed by stitching with fine thread, gluing, or fixing with plastic rivets.

8. The nanofiber acousto-electric device with adjustable response bandwidth as described in claim 1, characterized in that, The metal layer is made by magnetron sputtering and / or thermal evaporation and / or chemical electrodeposition, and the metal material is one or more of gold, silver, platinum, copper and nickel, with a thickness of 50-1000 nm.

9. The nanofiber acousto-electric device with adjustable response bandwidth as described in claim 1, characterized in that, The orientation arrangement includes either perpendicular to the slit or parallel to the slit.

Images