Elevator system

Abstract

The application provides a kind of elevator system, comprising: elevator body and protection device;Elevator body includes motion platform and screw rod, screw rod is rotatable around its axis, to drive motion platform moves along the axial direction of screw rod;Protection device includes limiting unit and monitoring unit;Limiting unit includes limiting piece, limiting piece is movable along its axial direction, limiting piece is abutted with motion platform when overhauling elevator body;Monitoring unit includes monitoring piece, monitoring piece is arranged with screw rod interval, for monitoring the rotating speed of screw rod.Such configuration, limiting piece is abutted with motion platform when overhauling elevator body, limit the movement of motion platform along the axial direction of screw rod, ensure the safety of operator during overhauling;Monitoring piece is used for monitoring the rotating speed of screw rod, and when the rotating speed of four screw rods is inconsistent, alarm signal is sent, ensure that when the screw rod is dislocated or the position of monitoring piece changes, timely inform operator, improve the safety and practicality of the whole elevator system.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment, and in particular to an elevator system. Background Technology

[0002] In the semiconductor manufacturing process, magnetic fields can ensure the axial uniformity of crystal rods. However, the magnetic field is supported by a screw jack, which may fail during long-term operation. In addition, the screw of the screw jack may become misaligned during long-term operation. All of the above processes will pose significant safety hazards, especially the load magnetic field. Accidents could cause serious damage to products or personnel. Summary of the Invention

[0003] The purpose of this invention is to provide a lifting system to solve the safety hazards caused by lifting failure or screw misalignment during operation.

[0004] To achieve the above objectives, the present invention provides an elevator system, comprising: an elevator body and a protective device;

[0005] The elevator body includes a moving platform and a lead screw, which is rotatable about its own axis to drive the moving platform to move along the axial direction of the lead screw;

[0006] The protection device includes a limit unit and a monitoring unit;

[0007] The limiting unit includes a limiting member that is movable along its own axis. The limiting member is used to abut against the moving platform when the elevator body is being repaired, so as to restrict the movement of the moving platform along the axis of the lead screw.

[0008] The monitoring unit includes a monitoring element, which is spaced apart from the lead screw, and the monitoring element is used to monitor the rotational speed of the lead screw.

[0009] Optionally, the limiting unit further includes a limiting sleeve, the limiting sleeve having a first through hole opened along its own axial direction, and the limiting member slidably passing through the first through hole along its own axial direction.

[0010] Optionally, the limiting unit further includes a driving member connected to the limiting member, the driving member being used to drive the limiting member to rotate around its own axis and / or drive the limiting member to move along its own axial direction.

[0011] Optionally, the limiting sleeve has a first groove that penetrates the outer wall of the limiting sleeve;

[0012] The first groove has a first extension section, a second extension section, and a connecting section. The connecting section connects the first extension section and the second extension section. The distance from the first extension section to the motion table is greater than the distance from the second extension section to the motion table.

[0013] The elevator body has an operating state and a maintenance state. When the elevator body is in the operating state, the drive component is housed in the first extension section, and the limiting component is spaced apart from the moving platform. When the elevator body is in the maintenance state, the drive component is housed in the second extension section, and the limiting component abuts against the moving platform.

[0014] Optionally, the limiting unit further includes a limiting monitoring component, which has a second groove opened along its own circumference, and the limiting monitoring component is accommodated in the second groove when the elevator body is in the operating state.

[0015] Optionally, the monitoring unit further includes a speed detection element, which is sleeved on the lead screw and rotatable about an axis parallel to the axial direction of the lead screw;

[0016] The outer surface of the speed detection element has multiple outwardly protruding protrusions, and the multiple protrusions are arranged at intervals along the circumference of the lead screw.

[0017] The monitoring element is aligned with the outer surface of the speed detection element, and the monitoring element is configured to obtain the speed of the lead screw based on the time it takes for the speed detection element to rotate through the protrusion.

[0018] Optionally, the monitoring unit further includes a monitoring component mounting plate having a second through hole, through which the monitoring component is slidably disposed along its own axial direction.

[0019] Optionally, the monitoring unit further includes an adjusting member disposed on one side of the second through hole, used to adjust the relative position between the monitoring member and the lead screw.

[0020] Optionally, the lifting platform body includes a plurality of lead screws, the cross-sectional shape of the motion platform is rectangular, the limiting units are correspondingly arranged on each side of the motion platform, each monitoring unit is correspondingly arranged on each lead screw, and the monitoring unit is arranged on one side of the lead screw.

[0021] The protection device also includes an alarm unit, which is communicatively connected to the limit unit and the monitoring unit respectively.

[0022] The alarm unit is configured to issue an alarm signal when the limiting member is not accommodated in the second groove when the elevator body is in the operating state, or when the monitoring member detects that the rotation speeds of the multiple lead screws are inconsistent.

[0023] Optionally, the alarm signal may include: an audible signal and / or a visual signal.

[0024] In summary, the lifting system proposed in this invention includes: a lifting body and a protective device; the lifting body includes a moving platform and a lead screw, the lead screw being rotatable around its own axis to drive the moving platform to move along the axial direction of the lead screw; the protective device includes a limiting unit and a monitoring unit; the limiting unit includes a limiting member, the limiting member being movable along its own axial direction, the limiting member being used to abut against the moving platform during maintenance of the lifting body to limit the movement of the moving platform along the axial direction of the lead screw; the monitoring unit includes a monitoring element, the monitoring element being spaced apart from the lead screw, the monitoring element being used to monitor the rotational speed of the lead screw.

[0025] With this configuration, the limiter abuts against the moving platform when the elevator body is being inspected, thus restricting the movement of the moving platform along the axial direction of the lead screw and ensuring the safety of the operator during the inspection process. The monitoring component is used to monitor the rotational speed of the lead screw and issues an alarm signal when the rotational speeds of the four lead screws are inconsistent, ensuring that the operator is notified in a timely manner when the lead screw is misaligned or the position of the monitoring component changes, thereby improving the safety and practicality of the entire elevator system. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the elevator body according to an embodiment of the present invention;

[0027] Figure 2 This is a schematic diagram of the limiting unit proposed in an embodiment of the present invention;

[0028] Figure 3 This is a schematic diagram of the monitoring unit proposed in an embodiment of the present invention.

[0029] The explanations of the reference numerals in the accompanying drawings are as follows:

[0030] 1-Lifting machine body; 11-Motion table; 12-Lead screw;

[0031] 2-Limiting unit; 21-Limiting component; 22-Limiting component sleeve; 23-Driver; 24-First groove; 25-Limiting monitoring component; 26-Second groove; 241-First extension section; 242-Second extension section; 243-Connecting section;

[0032] 3-Monitoring unit; 31-Monitoring component; 32-Speed ​​detection component; 33-Monitoring component mounting plate; 34-Adjusting component; 321-Protrusion. Detailed Implementation

[0033] To make the objectives, advantages, and features of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clarify the explanation of the embodiments of this invention. Furthermore, the structures shown in the drawings are often part of the actual structures. In particular, different figures may emphasize different aspects and may sometimes use different scales.

[0034] As used herein, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. “One end” and “the other end,” as well as “proximal end” and “distal end,” generally refer to two corresponding parts, including not only endpoints. The terms “installed,” “connected,” and “joined” should be interpreted broadly; for example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two elements or the interaction between two elements. Furthermore, as used in this specification, the phrase "one element is disposed on another element" generally only indicates that there is a connection, coupling, cooperation, or transmission relationship between the two elements, and the connection, coupling, cooperation, or transmission between the two elements can be direct or indirect through an intermediate element. It should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located arbitrarily inside, outside, above, below, or to the side of another element, unless otherwise explicitly stated. The terms "above," "below," "top," and "bottom" generally refer to relative positional relationships arranged according to the direction of gravity; the terms "vertical" or "vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground; "horizontal" or "horizontal plane direction" generally refers to a direction parallel to the ground. Those skilled in the art can understand the specific meaning of the above terms in this specification according to the specific circumstances.

[0035] The purpose of this invention is to provide a lifting system to solve the problem that safety hazards can easily be caused by lifting failure or screw misalignment during operation.

[0036] The following explanation is based on the accompanying drawings.

[0037] Please refer to Figures 1 to 3 This invention provides an elevator system, including: an elevator body 1 and a protective device; the elevator body 1 includes a moving platform 11 and a lead screw 12, the lead screw 12 being rotatable around its own axis to drive the moving platform 11 to move along the axial direction of the lead screw 12; the protective device includes a limiting unit 2 and a monitoring unit 3; the limiting unit 2 includes a limiting member 21, the limiting member 21 being movable along its own axial direction, the limiting member 21 being used to abut against the moving platform 11 during maintenance of the elevator body 1 to limit the movement of the moving platform 11 along the axial direction of the lead screw 12; the monitoring unit 3 includes a monitoring member 31, the monitoring member 31 being spaced apart from the lead screw 12, the monitoring member 31 being used to monitor the rotational speed of the lead screw 12. It should be noted that the axis A of the lead screw 12 is an axis set along its own axial direction, and it can rotate around axis A; in Figure 1 In the illustrated example, the limiting unit 2 can be located in region A1, and the monitoring unit 3 can be located in region A2. Furthermore, in this embodiment, the motion table 11 is a rectangular component, and there are four lead screws 12. Therefore, there are also four limiting units 2 and four monitoring units 3. The limiting units 2 are respectively located on the four side walls of the motion table 11, and the monitoring units 3 are respectively located on one side of each lead screw 12. Figure 1 Only one setting location is marked in the text; the remaining setting locations are in... Figure 1 The center is obscured; of course, in other embodiments, the number of limiting units 2 and monitoring units 3 may also vary with the shape of the motion table 11 and the number of lead screws 12. Those skilled in the art can configure the number of limiting units 2 and monitoring units 3 according to the actual situation.

[0038] With this configuration, the limiting component 21 abuts against the moving platform 11 when the elevator body 1 is under maintenance, thereby limiting the movement of the moving platform 11 along the axial direction of the lead screw 12 and ensuring the safety of the operator during the maintenance process. The monitoring component 31 is used to monitor the rotational speed of the lead screw 12 and issues an alarm signal when the rotational speeds of the four lead screws 12 are inconsistent, ensuring that the operator is notified in time when the lead screw 12 is misaligned or the position of the monitoring component 31 changes, thus improving the safety and practicality of the entire elevator system.

[0039] Please refer to Figure 2 The limiting unit 2 also includes a limiting sleeve 22, which has a first through hole (not shown in the figure) opened along its own axial direction, and the limiting member 21 is slidably inserted into the first through hole along its own axial direction. Figure 2For example, the limiting member 21 is a cylindrical component, which can be a pin. Correspondingly, the limiting member sleeve 22 is also a cylindrical component. The first through hole is opened along the axial direction of the limiting member sleeve 22 so that the limiting member 21 can pass through it. In other embodiments, the limiting member 21 can also be a rectangular or other shaped component. Correspondingly, the limiting member sleeve 22 can also be a component of other shapes that are adapted to the limiting member 21.

[0040] Furthermore, the limiting unit 2 also includes a driving member 23, which is connected to the limiting member 21. The driving member 23 is used to drive the limiting member 21 to rotate around its own axis and / or drive the limiting member 21 to move along its own axial direction. It should be noted that the axis B of the limiting member 21 is an axis set along its own axial direction, enabling it to rotate around axis B; Figure 2 In the example shown, the drive member 23 is a handle that is fixedly connected to the outer surface of the limiting member 21. The operator can move the drive member 23 to realize the rotation of the limiting member 21 around the axis and the movement along its own axis.

[0041] As an optional embodiment, the limiting sleeve 22 has a first groove 24 that penetrates the outer wall of the limiting sleeve 22; the first groove 24 has a first extension 241, a second extension 242, and a connecting section 243, the connecting section 243 connecting the first extension 241 and the second extension 242, the distance from the first extension 241 to the motion platform 11 is greater than the distance from the second extension 242 to the motion platform 11; the elevator body 1 has an operating state and a maintenance state. When the elevator body 1 is in the operating state, the drive member 23 is housed in the first extension 241, and the limiting member 21 is spaced apart from the motion platform 11; when the elevator body 1 is in the maintenance state, the drive member 23 is housed in the second extension 242, and the limiting member 21 abuts against the motion platform 11. It should be noted that... Figure 2The diagram shows the elevator body 1 in operation. At this time, the drive component 23 is housed in the first extension section 241, and the limiting component 21 is spaced apart from the moving platform 11. When maintenance of the elevator body 1 is required, the operator needs to lift the drive component 23 along the extension direction of the first extension section 241 to drive the limiting component 21 to rotate around its own axis B. Then, the drive component 23 is moved along the extension direction of the connecting section 243 to drive the limiting component 21 to move along its own axial direction until the limiting component 21 abuts against the side wall of the moving platform 11. Finally, the drive component 23 is moved along the second extension section 241... The extension direction of segment 242 is lowered to drive the limiting member 21 to rotate around its own axis B, thereby locking the position of the limiting member 21 and ensuring that the position of the moving platform 11 is fixed when the elevator body 1 is under maintenance, thus improving the safety performance of the entire system. After maintenance is completed, the operator needs to move the driving member 23 along the sequence of the second extension segment 242, the connecting segment 243, and the first extension segment 241 to the first extension segment 241, so that the limiting member 21 and the moving platform 11 are spaced apart, and then the elevator body 1 is switched from the maintenance state to the operation state, ensuring the safe operation of the elevator body 1. Figure 2 In the first extension segment 241, the second extension segment 242 and the connecting segment 243 are all straight lines; in some other embodiments, the first extension segment 241, the second extension segment 242 and the connecting segment 243 may also be arc-shaped. Those skilled in the art can configure the configuration of the first groove 24 according to the actual situation.

[0042] Please continue to refer to this. Figure 2 The limiting unit 2 also includes a limiting monitoring component 25. The limiting component 21 has a second groove 26 formed along its circumference. The limiting monitoring component 25 is accommodated in the second groove 26 when the elevator body 1 is in operation. It should be noted that the limiting monitoring component 25 can be a limit switch. When the elevator body 1 is in operation (i.e., the drive component 23 is located in the first extension section 241), it is accommodated in the second groove 26 to form an initial signal. When the operator begins to move the drive component 23 (i.e., the drive component 23 is located in the connecting section 243 and the second extension section 242), the limiting monitoring component 25 pops up to form a misalignment signal. The operator can determine the current position of the limiting component 21 based on the initial signal and the misalignment signal.

[0043] Please refer to Figure 3The monitoring unit 3 also includes a speed detection element 32, which is sleeved on the lead screw 12 and rotatable about an axis parallel to the axial direction of the lead screw 12. The outer surface of the speed detection element 32 has multiple outwardly protruding protrusions 321, which are spaced apart circumferentially along the lead screw 12. A monitoring element 31 is aligned with the outer surface of the speed detection element 32 and is configured to acquire the speed of the lead screw 12 based on the time it takes for the speed detection element 32 to rotate through the protrusions 321. It should be noted that the axis parallel to the axial direction of the lead screw 12 can be... Figure 1 The axis A is shown in the figure; the monitoring element 31 is a sensor that can generate a first signal when rotating through the protrusion 321. The operator combines the time when the first signal is generated by the monitoring element 31 and the length of the protrusion 321 to obtain the rotational speed of the lead screw 12; in this embodiment, the rotational speed detection element 32 is a cylindrical component, and the multiple protrusions 321 on its outer surface are arc-shaped components of equal size. The multiple protrusions 321 are arranged at intervals along the circumference of the lead screw 12. When the monitoring element 31 is aligned with the groove between two adjacent protrusions 321, the monitoring element 31 has no signal output; of course, in some alternative embodiments, the rotational speed detection element 32 can also be a rectangular component, and its outer surface can also be provided with an inwardly recessed portion. Those skilled in the art can configure the rotational speed detection element 32 according to the actual situation.

[0044] Furthermore, the monitoring unit 3 also includes a monitoring element mounting plate 33, which has a second through hole (not shown in the figure), through which the monitoring element 31 is slidably inserted along its own axial direction. Figure 3 In the illustrated example, the monitoring element 31 is a cylindrical component, and the second through hole is also a circular hole; in some other embodiments, the monitoring element 31 may also be a component of other shapes, and the second through hole may also be a hole-shaped component adapted to the monitoring element 31.

[0045] Furthermore, the monitoring unit 3 also includes an adjusting member 34, which is disposed on one side of the second through hole and used to adjust the relative position between the monitoring member 31 and the lead screw 12. It should be noted that the adjusting member 34 can be an adjusting nut. The operator can rotate the adjusting member 34 to change the distance between the monitoring member 31 and the lead screw 12 or the angle of the monitoring member 31 relative to the lead screw 12, so that the monitoring member 31 can monitor the lead screw 12 in real time and detect problems promptly.

[0046] Please refer to Figures 1 to 3The elevator body 1 includes multiple lead screws 12. The cross-sectional shape of the motion platform 11 is rectangular. Limiting units 2 are correspondingly arranged on each side of the motion platform 11. Each monitoring unit 3 is correspondingly arranged on each lead screw 12, and the monitoring unit 3 is located on one side of the lead screw 12. The protection device also includes an alarm unit (not shown in the figure), which is communicatively connected to the limiting unit 2 and the monitoring unit 3. The alarm unit is configured to issue an alarm signal when the limiting member 21 is not accommodated in the second groove 26 when the elevator body 1 is in operation, or when the monitoring member 31 detects that the rotation speeds of the multiple lead screws 12 are inconsistent. It should be noted that in this embodiment, there are four lead screws 12. The alarm unit can be integrated with the limiting monitoring member 25 and the monitoring member 31, or it can be located outside the elevator body 1. Those skilled in the art can configure the alarm unit according to the space size of the elevator body 1. As those skilled in the art will understand, when the limiting member 21 is in the operating state of the elevator body 1, it is accommodated in the second groove 26, that is, the limiting member 21 is still abutting against the moving platform 11. At this time, operating the elevator body 1 is prone to damage to the elevator body 1 and accidents are likely to occur. When the monitoring member 31 detects that the rotation speeds of the four lead screws 12 are inconsistent, the moving platform 11 is prone to overturning, which will affect the normal operation of the magnetic equipment and cause unnecessary losses.

[0047] As an optional embodiment, the alarm signal includes: an audible signal and / or a visual signal. It should be noted that the alarm unit can be a buzzer, a flashing light, or an app; correspondingly, the alarm signal can be an audible signal, a visual signal, or an app alert. Those skilled in the art can configure the alarm unit according to actual conditions.

[0048] In summary, the lifting system provided in this embodiment of the invention includes: a lifting body and a protection device; the lifting body includes a moving platform and a lead screw, the lead screw being rotatable around its own axis to drive the moving platform to move along the axial direction of the lead screw; the protection device includes a limiting unit and a monitoring unit; the limiting unit includes a limiting member, the limiting member being movable along its own axial direction, the limiting member being used to abut against the moving platform during maintenance of the lifting body to limit the movement of the moving platform along the axial direction of the lead screw; the monitoring unit includes a monitoring element, the monitoring element being spaced apart from the lead screw, the monitoring element being used to monitor the rotational speed of the lead screw.

[0049] With this configuration, the limiter abuts against the moving platform when the elevator body is being inspected, thus restricting the movement of the moving platform along the axial direction of the lead screw and ensuring the safety of the operator during the inspection process. The monitoring component is used to monitor the rotational speed of the lead screw and issues an alarm signal when the rotational speeds of the four lead screws are inconsistent, ensuring that the operator is notified in a timely manner when the lead screw is misaligned or the position of the monitoring component changes, thereby improving the safety and practicality of the entire elevator system.

[0050] The above description is merely a description of preferred embodiments of the present invention and is not intended to limit the scope of the present invention in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A lifting system, characterized in that, include: The elevator body and its protective devices; The elevator body includes a moving platform and a lead screw, which is rotatable about its own axis to drive the moving platform to move along the axial direction of the lead screw; The protection device includes a limit unit and a monitoring unit; The limiting unit includes a limiting member that is movable along its own axis. The limiting member is used to abut against the moving platform when the elevator body is being repaired, so as to restrict the movement of the moving platform along the axis of the lead screw. The monitoring unit includes a monitoring element, which is spaced apart from the lead screw, and the monitoring element is used to monitor the rotational speed of the lead screw; The limiting unit further includes a limiting sleeve and a driving component, a portion of the limiting component is located inside the limiting sleeve, and the driving component is connected to the limiting component; The limiting sleeve has a first groove, the first groove has a first extension, a second extension and a connecting section, and the connecting section connects the first extension and the second extension. When the elevator body is in operation, the drive component is housed in the first extension section, and the limiting component is spaced apart from the moving platform; when the elevator body is under maintenance, the drive component is housed in the second extension section, and the limiting component abuts against the moving platform. The elevator body has an operating state and a maintenance state. The limiting unit also includes a limiting monitoring component. The limiting component has a second groove opened along its own circumference. When the elevator body is in the operating state, the limiting monitoring component is accommodated in the second groove. The elevator body includes multiple lead screws, and the protection device also includes an alarm unit; The alarm unit is configured to issue an alarm signal when the limiting member is not accommodated in the second groove when the elevator body is in the operating state, or when the monitoring member detects that the rotation speeds of the multiple lead screws are inconsistent.

2. The elevator system as described in claim 1, characterized in that, The alarm unit is communicatively connected to both the limit unit and the monitoring unit.

3. The elevator system as described in claim 1, characterized in that, The limiting sleeve has a first through hole opened along its own axial direction, and the limiting member is slidably inserted through the first through hole along its own axial direction.

4. The elevator system as described in claim 3, characterized in that, The driving member is used to drive the limiting member to rotate around its own axis, and / or drive the limiting member to move along its own axial direction.

5. The elevator system as described in claim 4, characterized in that, The first groove penetrates the outer wall of the limiting sleeve; The distance from the first extension section to the motion table is greater than the distance from the second extension section to the motion table.

6. The elevator system as described in claim 1, characterized in that, The monitoring unit further includes a speed detection element, which is sleeved on the lead screw and rotatable about an axis parallel to the axial direction of the lead screw; The outer surface of the speed detection element has multiple outwardly protruding protrusions, and the multiple protrusions are arranged at intervals along the circumference of the lead screw. The monitoring element is aligned with the outer surface of the speed detection element, and the monitoring element is configured to obtain the speed of the lead screw based on the time it takes for the speed detection element to rotate through the protrusion.

7. The elevator system as described in claim 6, characterized in that, The monitoring unit further includes a monitoring component mounting plate, which has a second through hole, through which the monitoring component is slidably inserted along its own axial direction.

8. The elevator system as described in claim 7, characterized in that, The monitoring unit further includes an adjusting component, which is disposed on one side of the second through hole and is used to adjust the relative position between the monitoring component and the lead screw.

9. The elevator system as described in claim 1 or 8, characterized in that, The motion table has a rectangular cross-sectional shape. The limiting units are arranged one-to-one on each side of the motion table. Each monitoring unit is arranged one-to-one with each lead screw, and the monitoring unit is located on one side of the lead screw.

10. The elevator system as described in claim 9, characterized in that, The alarm signals include: audible signals and / or visual signals.

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