X-ray grating interferometer spectral property measuring device and measuring method
By using a measuring device consisting of a shielding sleeve, a non-destructive filter, and a positioning and adjustment mechanism, combined with a cadmium zinc telluride energy spectrum probe, the problems of low energy range, high cost, and low accuracy in X-ray grating interferometer energy spectrum characteristic testing have been solved, achieving high-precision and low-cost energy spectrum characteristic measurement.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
- Filing Date
- 2023-05-11
- Publication Date
- 2026-06-23
AI Technical Summary
Existing methods for testing the energy spectrum characteristics of X-ray grating interferometers suffer from problems such as low test energy range, high cost, low accuracy, poor efficiency, poor repeatability, and difficulty in correction.
The measuring device, consisting of a shielding sleeve, a non-destructive filter, and a positioning and adjustment mechanism, combined with a cadmium zinc telluride energy dispersive spectroscopy probe, achieves high-precision measurement of energy dispersive spectral characteristics through a small aperture design and material selection.
It enables wide-range, low-cost, high-precision, repeatable, and easily correctable measurement of the energy spectrum characteristics of X-ray grating interferometers, meeting the needs of scientific research and engineering.
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Figure CN116626739B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of nuclear radiation detection technology, specifically to a device and method for measuring the energy spectrum characteristics of an X-ray grating interferometer. Background Technology
[0002] In the research and application of X-ray grating interferometry, energy spectrum characteristics are a crucial performance indicator. On one hand, the various contrast information obtained using X-ray grating interferometry, particularly phase contrast and dark-field contrast, possess unique energy spectrum properties. These properties are not only related to the emission energy spectrum of the light source and the energy spectrum response characteristics of the detector, similar to traditional X-ray imaging, but also directly related to the energy spectrum characteristics of the X-ray grating interferometer. On the other hand, for X-ray grating interferometers with specific geometries, structures, and grating components, their energy spectrum characteristics are relatively stable. Therefore, when combined with new technologies such as energy spectrum-based X-ray imaging and dual-energy / multi-energy imaging, the energy spectrum characteristics of the X-ray grating interferometer are fundamental to the design, optimization, and even backend data processing of the entire system.
[0003] There are currently two main methods for experimentally / engineering the acquisition of the energy spectrum characteristics of X-ray grating interferometers. One method uses monochromatic / quasi-monochromatic light sources, such as synchrotron radiation, as a reference to test the interferometer's visibility. The other method uses a photon counting detector to obtain the step curve visibility as a function of X-ray energy, i.e., the energy spectrum characteristics, through energy spectrum differential analysis.
[0004] Using monochromatic / quasi-monochromatic light sources, such as synchrotron radiation, as a reference, the method of testing the visibility of interferometers can achieve high accuracy, but it is very costly and cannot be widely applied to every imaging system. Moreover, the energy range tested is too low to meet application requirements. Photon counting detectors are more expensive than ordinary flat panel detectors. When used for energy spectrum measurements, due to crosstalk between detector units and the inconsistency of the detector units themselves, they suffer from low accuracy, poor efficiency, and poor repeatability, which have extremely difficult-to-correct effects on the energy spectrum characteristic measurement results. Summary of the Invention
[0005] The technical problem to be solved by the present invention is that the current methods for testing the energy spectrum characteristics of X-ray grating interferometers have problems such as low energy range, high cost or low accuracy, poor efficiency, poor repeatability, and difficulty in correction. The purpose is to provide a device and method for measuring the energy spectrum characteristics of X-ray grating interferometers, so as to achieve wide energy range, low cost, high accuracy, repeatability, and easy correction of the energy spectrum characteristics of X-ray grating interferometers.
[0006] This invention is achieved through the following technical solution:
[0007] An X-ray grating interferometer energy spectrum characteristic measurement device includes a shielding sleeve, an energy spectrum probe installed inside the shielding sleeve, a non-destructive filter installed at the end of the shielding sleeve, and a small hole formed on the non-destructive filter; the shielding sleeve is mounted on a positioning and adjustment mechanism; the X-ray grating interferometer has an analysis grating and an X-ray surface detector, and has the ability to scan and acquire static step curves.
[0008] The energy spectrum probe is responsible for acquiring the energy spectrum distribution of the incident X-rays and is not required to have area array imaging capabilities. The energy spectrum probe needs to be matched with the energy spectrum characteristics being tested, which is constrained by the experimental or test space layout.
[0009] Non-destructive filters are responsible for beam collimation of X-rays, reducing the actual X-ray spot size incident on the energy dispersive spectroscopy probe, thereby improving the accuracy and signal-to-noise ratio of energy dispersive spectral characteristics measurements. Non-destructive filters do not alter the X-ray energy spectrum distribution and are fabricated by drilling small holes in the filter. In this method, only one hole is drilled to increase the single-hole size and reduce the hole's aspect ratio within a limited light-transmitting area and a relatively large non-destructive filter thickness, thus reducing the difficulty of test alignment. The thickness of the non-destructive filter needs to be moderate. If the thickness is too small, the blocking ability in non-hole areas is insufficient, resulting in distortion of the energy dispersive spectral test results; if the thickness is too large, the depth ratio of the hole will be too large, which will increase the difficulty of test alignment.
[0010] The shielding sleeve is responsible for blocking ionizing radiation that enters the sensitive area of the energy spectrum probe and the front-end electronic components through scattering and other means, thereby reducing test noise. If the X-ray grating interferometer is located in a relatively open area and scattering is not significant, the shielding sleeve may not be necessary.
[0011] The positioning and adjustment mechanism is responsible for switching the optical path of the energy spectrum characteristic measurement device when it is moved in and out, as well as adjusting the small hole of the non-destructive filter to align it with the X-ray incident direction.
[0012] Furthermore, the energy dispersive spectroscopy probe includes a zinc cadmium telluride energy dispersive spectroscopy probe.
[0013] For the 10-160keV energy range, the zinc cadmium telluride (CdTCH) energy spectrum probe is a typical energy spectrum probe for measuring the energy spectrum characteristics of X-ray grating interferometers due to its compact structure, simple arrangement, high accuracy, and low cost.
[0014] Furthermore, the size of the aperture is selected based on the pixel size of the imaging detector used subsequently, or by comprehensively considering other influencing factors during the measurement process; these other influencing factors include the intensity of the X-ray source, the counting capability of the energy spectrum probe, system geometry, and other factors.
[0015] Furthermore, the size of the aperture is an order of magnitude larger than the period of the analytical grating in the X-ray grating interferometer. The smaller the aperture, the higher the accuracy of the energy spectrum characteristic measurement, and the more convenient the subsequent correction.
[0016] Furthermore, the lossless filter is made of a material with a high atomic number.
[0017] Furthermore, for low-energy X-rays, the material used to prepare the non-destructive filter includes iron or copper; for high-energy X-rays, the material used to prepare the non-destructive filter includes any one of tungsten and tantalum, or a mixture of both, or an alloy mainly composed of tungsten and tantalum.
[0018] Low-energy X-rays refer to those below 30keV, which use materials such as iron or copper to balance processing performance and manufacturing cost; high-energy X-rays refer to those above 30keV, which use single materials such as tungsten or tantalum, or mixed materials or alloys to improve the blocking performance of the absorption edge of the non-destructive filter.
[0019] In alloys primarily composed of tungsten and tantalum, iron, tin, lead, or other materials with high atomic numbers can be added to improve the material's processing performance.
[0020] Furthermore, the ratio of X-rays transmitted through the non-destructive filter corresponding to the sensitive area of the energy spectrum probe to X-rays transmitted through the pinhole is less than 1%.
[0021] The ratio of X-rays transmitted through the non-destructive filter corresponding to the sensitive area of the energy spectrum probe to X-rays transmitted through the pinhole is less than 1%, which ensures the accuracy of energy spectrum characteristic measurement.
[0022] Furthermore, when the depth-to-width ratio of the small hole is less than 10, the positioning adjustment mechanism includes a support, on which a support rod is connected, and alignment is achieved visually by using a laser level; when the depth ratio of the small hole is greater than 10, alignment is achieved manually or by connecting the support rod of the positioning adjustment mechanism to an electric rotating structure for electronic adjustment.
[0023] To achieve the above objectives, the present invention also proposes a measurement method for an X-ray grating interferometer energy spectrum characteristic measurement device, comprising the following steps:
[0024] Step 1: After setting up the X-ray grating interferometer, turn on the X-ray source, move the energy spectrum characteristic measurement device into the optical path, align the pinhole with the X-ray incident direction, record the orientation of the center of the energy spectrum characteristic measurement device in the field of view, and test the X-ray tube power, energy spectrum measurement cumulative time and dead time during the optimized measurement.
[0025] Step 2: Move the energy spectrum characteristic measurement device out of the optical path and adjust the X-ray grating interferometer to the working state;
[0026] Step 3: Move the energy spectrum characteristic measurement device into the optical path to the position used in Step 1 for testing and optimization. Using the parameters obtained from Step 1 optimization, combine the step scanning function of the X-ray grating interferometer itself to obtain the step scanning energy spectrum results of the X-ray grating interferometer at various energies.
[0027] Step 4: Perform fitting analysis on the step scan results at each energy level to obtain the visibility of the step curve at different energies, thus obtaining the energy spectrum characteristic curve.
[0028] Furthermore, based on the morphology of the moiré fringes near the aperture of the non-destructive filter during operation, a coefficient is used to compensate for the energy spectrum characteristic curve.
[0029] The X-ray grating interferometer energy spectrum characteristic curve obtained by the aforementioned measurement method differs from the true energy spectrum characteristic curve by a composite proportionality coefficient independent of energy. Based on the morphology of the moiré fringes near the aperture of the non-destructive filter during operation, a compensation coefficient is applied to the energy spectrum characteristic curve, which can further correct the results.
[0030] Compared with the prior art, the present invention has the following advantages and beneficial effects:
[0031] (1) The X-ray grating interferometer energy spectrum characteristics measuring device of the present invention has the advantages of high detection accuracy, low manufacturing cost and very convenient operation. It can measure the energy spectrum characteristics of various X-ray grating interferometers, and the measured energy range is high, which can meet the current scientific research and engineering needs.
[0032] (2) The measuring device for the energy spectrum characteristics of the X-ray grating interferometer of the present invention can be used in scientific research to design and verify new systems and provide the basis for data calculation. In engineering, it can be used for the detection and inspection of X-ray grating interferometers.
[0033] (3) The method of measuring the energy spectrum characteristics using the X-ray grating interferometer energy spectrum characteristics measuring device in this invention is simple to operate, the detection results are accurate and reliable, the detection efficiency is high, and the measurement results are easy to correct.
[0034] (4) By using an energy spectrum probe, the cost of use is greatly reduced compared to existing photon-based detectors; by using a specially designed non-destructive filter, the actual sensitive area of the energy spectrum probe is constrained, reducing the degradation of energy spectrum characteristic data caused by factors such as angular misalignment of the X-ray grating interferometer. Attached Figure Description
[0035] The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and form part of this application, do not constitute a limitation thereof. In the drawings:
[0036] Figure 1This is the energy spectrum characteristic curve of Example 1 in this invention;
[0037] Figure 2 This is the energy spectrum characteristic curve of Example 2 in this invention;
[0038] Figure 3 These are cross-sectional views of the energy spectrum probes used in Embodiments 1 and 2 of this invention;
[0039] Figure 4 This is a left view of the energy spectrum probes used in Embodiments 1 and 2 of this invention;
[0040] Figure 5 This is a diagram showing the positional relationship between the analytical grating and imaging detector of the X-ray grating interferometer and the measuring device during measurement in Embodiments 1 and 2 of this invention;
[0041] Figure 6 The graph shows the energy spectrum characteristics of three radioactive isotopes, Am241, Ba133, and Eu152, measured using a cadmium zinc telluride probe.
[0042] Figure label:
[0043] 01-Pinhole, 02-Non-destructive filter, 03-Shielding sleeve, 04-Energy spectroscopy probe, 05-Analysis grating, 06-X-ray surface detector, 07-Positioning adjustment mechanism. Detailed Implementation
[0044] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0045] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.
[0046] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0047] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, a joint, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0048] Example 1
[0049] Reference Figures 3 to 5 This embodiment provides an X-ray grating interferometer energy spectrum characteristic measurement device, including a shielding sleeve 03, an energy spectrum probe 04 installed inside the shielding sleeve 03, a non-destructive filter 02 installed at the end of the shielding sleeve 03, and a small hole 01 opened on the non-destructive filter 02; the shielding sleeve 03 is mounted on a positioning adjustment mechanism 07; the X-ray grating interferometer has an analysis grating 05 and an X-ray surface detector 06, and has the ability to scan and acquire static step curves.
[0050] Specifically, the energy spectrum probe 04 is a zinc cadmium telluride energy spectrum probe 04.
[0051] A cadmium zinc telluride (CZN) probe was used to measure three radioactive isotopes: Am241, Ba133, and Eu152. The characteristic radiation of these radioactive isotopes was used to calibrate the detector's energy spectrum performance (e.g., Figure 6 (As shown in the figure). Two points can be observed from the graph: the horizontal axis represents the channel address, corresponding to the characteristic peak values in keV for several isotopes. Plotting the channel address and keV on a single graph and performing linear fitting reveals that the linearity of the energy spectrum measurement for cadmium zinc telluride (CZN) is actually very good. The characteristic peaks are very close to monoenergetic, so the width of the characteristic peaks can, to some extent, reflect the accuracy of the CZN energy spectrum probe at this energy level.
[0052] Specifically, the size of the aperture 01 is chosen to be 0.5 mm, the period of the analysis grating 05 in the X-ray grating interferometer is 3 micrometers, the sluggishness of the aperture 01 is two orders of magnitude higher than that of the analysis grating 05, the thickness of the aperture 01 is 5 mm, and the aspect ratio is 10.
[0053] Specifically, the non-destructive filter 02 is made of tungsten.
[0054] Specifically, the positioning adjustment mechanism 07 includes a support, on which a support rod is connected.
[0055] Specifically, the key parameters for testing the X-ray grating interferometer are a design energy point of 32 keV and a third-order Talbot distance.
[0056] The measurement method using the energy spectrum characteristic measuring device of this embodiment is as follows:
[0057] Step 1: After setting up the X-ray grating interferometer, turn on the X-ray source. The tube voltage and tube current are arbitrary; just emit light. Move the energy spectrum characteristic measurement device into the optical path, align the pinhole 01 with the X-ray incident direction, and record the orientation of the center of the energy spectrum characteristic measurement device in the field of view. Test and optimize the measurement by measuring the X-ray tube power, energy spectrum measurement accumulation time, and dead time.
[0058] Step 2: Move the energy spectrum characteristic measurement device out of the optical path and adjust the X-ray grating interferometer to the working state;
[0059] Step 3: Move the energy spectrum measurement device into the optical path to the position used in Step 1 for testing and optimization, and use the parameters obtained in Step 1 for optimization. Set the X-ray tube voltage to 80 kVp according to the desired energy range. Using the step-scan function of the composite X-ray grating interferometer, obtain the step-scan energy spectrum results at various energies of the X-ray grating interferometer.
[0060] Step 4: Perform fitting analysis on the step scan results at each energy level to obtain the visibility of the step curves at different energies, thus obtaining the energy spectrum characteristic curves (e.g., Figure 1 (As shown).
[0061] Example 2
[0062] Reference Figures 3 to 5 This embodiment provides an X-ray grating interferometer energy spectrum characteristic measurement device, including a shielding sleeve 03, an energy spectrum probe 04 installed inside the shielding sleeve 03, a non-destructive filter 02 installed at the end of the shielding sleeve 03, and a small hole 01 opened on the non-destructive filter 02; the shielding sleeve 03 is mounted on a positioning adjustment mechanism 07; the X-ray grating interferometer has an analysis grating 05 and an X-ray surface detector 06, and has the ability to scan and acquire static step curves.
[0063] Specifically, the energy spectrum probe 04 is a zinc cadmium telluride energy spectrum probe 04.
[0064] A cadmium zinc telluride (CZN) probe was used to measure three radioactive isotopes: Am241, Ba133, and Eu152. The characteristic radiation of these radioactive isotopes was used to calibrate the detector's energy spectrum performance (e.g., Figure 6 (As shown in the figure). Two points can be observed from the graph: the horizontal axis represents the trace address, corresponding to the characteristic peak values in keV for several isotopes. Plotting the trace address and keV on a single graph and performing linear fitting reveals that the linearity of the energy spectrum measurement for cadmium zinc telluride (CZN) is actually very good. The characteristic peaks are close to a single energy level, so the width of the characteristic peaks can, to some extent, reflect the accuracy of the CZN energy spectrum probe at that energy level.
[0065] Specifically, the size of the aperture 01 is chosen to be 0.5 mm. The period of the analysis grating 05 in the X-ray grating interferometer is 3 micrometers. The size of the aperture 01 is two orders of magnitude larger than the period of the analysis grating 05. The thickness of the aperture 01 is 5 mm, and the aspect ratio is 10.
[0066] Specifically, the non-destructive filter 02 is made of tungsten.
[0067] Specifically, the positioning adjustment mechanism 07 includes a support, on which a support rod is connected.
[0068] Specifically, the key parameters for testing the X-ray grating interferometer are a design energy point of 53 keV and a first-order Talbot distance.
[0069] The measurement method using the energy spectrum characteristic measuring device of this embodiment is as follows:
[0070] Step 1: After setting up the X-ray grating interferometer, turn on the X-ray source. The tube voltage and tube current are arbitrary; just emit light. Move the energy spectrum characteristic measurement device into the optical path, align the pinhole 01 with the X-ray incident direction, and record the orientation of the center of the energy spectrum characteristic measurement device in the field of view. Test and optimize the measurement by measuring the X-ray tube power, energy spectrum measurement accumulation time, and dead time.
[0071] Step 2: Move the energy spectrum characteristic measurement device out of the optical path and adjust the X-ray grating interferometer to the working state;
[0072] Step 3: Move the energy spectrum measurement device into the optical path to the position used in Step 1 for testing and optimization, and use the parameters obtained in Step 1 for optimization. Set the X-ray tube voltage to 160 kVp according to the desired energy range. Using the step-scan function of the composite X-ray grating interferometer, obtain the step-scan energy spectrum results at various energies of the X-ray grating interferometer.
[0073] Step 4: Perform fitting analysis on the step scan results at each energy level to obtain the visibility of the step curves at different energies, thus obtaining the energy spectrum characteristic curves (e.g., Figure 2 (As shown).
[0074] For the energy spectrum probes in Examples 1 and 2, the measured energy spectrum accuracy was 6.5% @ 59.4 keV, and the minimum scale for energy spectrum measurement was 0.056 keV. Both theory and practice show that, generally, the measurement accuracy of the cadmium zinc telluride energy spectrum probe is higher than that of the energy spectrum acquisition method using a photon counting detector with energy band differential measurement, because the latter faces problems such as non-uniformity of detector pixel response and lower efficiency.
[0075] As can be seen from the energy spectrum characteristic measurement results of Examples 1 and 2, using this method in conjunction with a 160kV-level X-ray tube, it is possible to measure energy spectrum characteristics covering a range of 10-150keV, which saves a lot of time and hardware costs compared to the method of synchrotron radiation monoenergetic light source, and the coverage of a single measurement is also larger.
[0076] The design energy point and Talbot order are different in Examples 1 and 2. Theoretically, the highest point of the energy spectrum characteristic curve is the design energy point. In practice, because it is difficult for the grating to completely block and transmit X-rays, the difficulty increases with higher energy, so the test energy point will be slightly lower. The Talbot order mainly affects the shape of the curve, including the number of high-visibility peaks and the presence of secondary peaks, etc. Since it is theoretically impossible to consider all aspects at present, such as the grating substrate and the subsequent sample addition, etc., multiple measurements of the same system using this method yielded basically consistent energy spectrum characteristic measurement results, or differed only by a scaling factor independent of X-ray energy.
[0077] The X-ray grating interferometer energy spectrum characteristic measurement device and method provided in this application realize wide-range, low-cost, high-precision, repeatable, and easily correctable measurement of the X-ray grating interferometer energy spectrum characteristics, providing basic data research for the design, optimization, and even back-end data processing of the entire system.
[0078] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.
Claims
1. A device for measuring the energy spectrum characteristics of an X-ray grating interferometer, characterized in that, The device includes a shielding sleeve, an energy spectrum probe installed inside the shielding sleeve, and a non-destructive filter installed at the end of the shielding sleeve, with small holes formed on the non-destructive filter; the shielding sleeve is mounted on a positioning and adjustment mechanism; the X-ray grating interferometer has an analysis grating and an X-ray surface detector, and is capable of scanning and acquiring static step curves.
2. The X-ray grating interferometer energy spectrum characteristic measuring device according to claim 1, characterized in that, The energy dispersive detector includes a zinc cadmium telluride energy dispersive detector.
3. The X-ray grating interferometer energy spectrum characteristic measuring device according to claim 1, characterized in that, The size of the aperture is selected based on the pixel size of the imaging detector used subsequently, or by a comprehensive selection based on other influencing factors during the measurement process; these other influencing factors include the intensity of the X-ray source, the counting capability of the energy spectrum probe, and system geometry.
4. The X-ray grating interferometer energy spectrum characteristic measuring device according to claim 3, characterized in that, The size of the aperture is one order of magnitude larger than the period of the analytical grating in the X-ray grating interferometer.
5. The X-ray grating interferometer energy spectrum characteristic measuring device according to claim 1, characterized in that, The non-destructive filter is made of a material with a high atomic number.
6. The X-ray grating interferometer energy spectrum characteristic measuring device according to claim 5, characterized in that, For low-energy X-rays, the material used to prepare the non-destructive filter includes iron or copper; for high-energy X-rays, the material used to prepare the non-destructive filter includes any one of tungsten and tantalum, or a mixture of both, or an alloy mainly composed of tungsten and tantalum.
7. The X-ray grating interferometer energy spectrum characteristic measuring device according to claim 1, characterized in that, The ratio of X-rays transmitted through the non-destructive filter corresponding to the sensitive area of the energy spectrum probe to X-rays transmitted through the pinhole is less than 1%.
8. The X-ray grating interferometer energy spectrum characteristic measuring device according to claim 1, characterized in that, When the depth-to-width ratio of the small hole is less than 10, the positioning adjustment mechanism includes a support, on which a support rod is connected. Alignment is achieved visually by using a laser level. When the depth ratio of the small hole is greater than 10, alignment is achieved manually or by connecting the support rod of the positioning adjustment mechanism to an electric rotating structure for electronic adjustment.
9. A measurement method for the X-ray grating interferometer energy spectrum characteristic measuring device according to any one of claims 1 to 8, characterized in that, Includes the following steps: Step 1: After setting up the X-ray grating interferometer, turn on the X-ray source, move the energy spectrum characteristic measurement device into the optical path, align the pinhole with the X-ray incident direction, record the orientation of the center of the energy spectrum characteristic measurement device in the field of view, and test the X-ray tube power, energy spectrum measurement cumulative time and dead time during the optimized measurement. Step 2: Move the energy spectrum characteristic measurement device out of the optical path and adjust the X-ray grating interferometer to the working state; Step 3: Move the energy spectrum characteristic measurement device into the optical path to the position used in Step 1 for testing and optimization. Using the parameters obtained from Step 1 optimization, combine the step scanning function of the X-ray grating interferometer itself to obtain the step scanning energy spectrum results of the X-ray grating interferometer at various energies. Step 4: Perform fitting analysis on the step scan results at each energy level to obtain the visibility of the step curve at different energies, thus obtaining the energy spectrum characteristic curve.
10. The measurement method of the X-ray grating interferometer energy spectrum characteristic measuring device according to claim 9, characterized in that, Based on the shape of the moiré fringes near the aperture of the non-destructive filter during operation, a coefficient is used to compensate for the energy spectrum characteristic curve.