Vacuum test device

Abstract

The embodiment of the present application provides a kind of vacuum test device, comprising: vacuum test cavity, sample bearing part is arranged in vacuum test cavity, for bearing multiple samples;Vacuum loading cavity can be communicated with each other or mutually isolated with vacuum test cavity, temporary bearing station for temporarily bearing sample is arranged in vacuum loading cavity, and vacuum loading cavity is configured to be able to provide vacuum environment for the sample that temporary bearing station bears;Sample transfer rod, sample transfer rod includes the clamping part for clamping sample and the stem portion that is connected with clamping part, stem portion is configured to drive clamping part reciprocating motion in a straight line in vacuum test cavity and vacuum loading cavity when vacuum loading cavity is communicated with each other with vacuum test cavity, to transfer sample between sample bearing part and temporary bearing station;And lifting assembly, for driving temporary bearing station vertical lifting motion, to allow stem portion drive clamping part reciprocating motion in a straight line in vacuum test cavity and vacuum loading cavity.

Description

Technical Field

[0001] This invention relates to testing apparatus, and more particularly to a vacuum testing apparatus. Background Technology

[0002] In some cases, it is necessary to test the properties of materials (such as volatility) under high vacuum and high temperature conditions. During the test, sample taking and releasing require temperature rise and fall, vacuuming, etc., which is time-consuming. Furthermore, in order to avoid introducing impurities during the sample taking and releasing process from affecting the test results, it is necessary to achieve online sample taking and releasing while the material is tested continuously. Summary of the Invention

[0003] To address the aforementioned technical problems, this application provides a vacuum testing apparatus, comprising: a vacuum testing chamber for providing a vacuum environment for testing samples, wherein a sample carrying portion is provided in the vacuum testing chamber for carrying multiple samples; a vacuum loading chamber capable of being interconnected with or isolated from the vacuum testing chamber, wherein a temporary support stage is provided in the vacuum loading chamber for temporarily carrying samples, and the vacuum loading chamber is configured to provide a vacuum environment for the samples carried by the temporary support stage; a sample transfer rod comprising a clamping portion for clamping samples and a rod portion connected to the clamping portion, wherein the rod portion is configured to drive the clamping portion to reciprocate linearly within the vacuum testing chamber and the vacuum loading chamber when the vacuum loading chamber and the vacuum testing chamber are interconnected, thereby transferring the samples between the sample carrying portion and the temporary support stage; and a lifting assembly for driving the temporary support stage to move vertically up and down, thereby allowing the rod portion to drive the clamping portion to reciprocate linearly within the vacuum testing chamber and the vacuum loading chamber.

[0004] The vacuum testing apparatus of this application embodiment, by incorporating a vacuum loading chamber and a sample transfer rod, allows for sample loading or removal without affecting the vacuum level of the vacuum testing chamber by first evacuating the vacuum loading chamber when placing a new sample into or removing a sample, thus shortening the testing time. Furthermore, the vacuum testing apparatus includes a temporary support platform, facilitating the placement and removal of samples from the vacuum loading chamber. By incorporating a lifting assembly to adjust the height of the temporary support platform, it is possible to both facilitate the sample transfer rod in removing samples from the temporary support platform and placing samples on the support platform, while also allowing the sample transfer rod room to avoid affecting the linear movement of the clamping part. Attached Figure Description

[0005] Other objects and advantages of the invention will become apparent from the following description of the invention with reference to the accompanying drawings, and will help to provide a comprehensive understanding of the invention.

[0006] Figure 1 This is a front view of a vacuum testing apparatus according to an embodiment of the present invention;

[0007] Figure 2 yes Figure 1 A cross-sectional view of the vacuum testing apparatus shown.

[0008] Figure 3 yes Figure 2 A partially enlarged schematic diagram of region A in the vacuum testing apparatus shown;

[0009] Figure 4 yes Figure 2 An enlarged schematic diagram of the lifting platform in the vacuum testing apparatus shown.

[0010] Figure 5 yes Figure 4 The diagram shows the structure of the lifting platform.

[0011] Figure 6 yes Figure 2 The schematic diagram of the sample transfer rod shown is shown.

[0012] Figure 7 yes Figure 2 A partially enlarged schematic diagram of the sample carrier and sample transfer rod shown;

[0013] Figure 8 This is a top view of the heating element and support plate according to an embodiment of the present invention;

[0014] Figure 9 yes Figure 2 The diagram shows the structural schematic of the sample support portion in the sample support section.

[0015] Figure 10 yes Figure 9 An exploded view of the sample support portion is shown.

[0016] It should be noted that the accompanying drawings are not necessarily drawn to scale, but are shown only in a schematic manner without affecting the reader's understanding.

[0017] Explanation of reference numerals in the attached figures:

[0018] 10. Workbench;

[0019] 20. Vacuum testing furnace; 201. Vacuum testing chamber; 21. Testing furnace body; 211. Interface; 22. Testing base;

[0020] 30. Vacuum loading furnace; 301. Vacuum loading chamber; 31. Loading furnace body; 311. Interface; 32. Loading base;

[0021] 40. Valves;

[0022] 50. Connecting pipes;

[0023] 60. Sample transfer rod; 61. Clamping part; 611. Gripper; 6111. Notch; 62. Rod part; 621. Housing; 622. Piston rod; 623. Sealing flange; 6231. Differential pressure balance port; 624. Locking button; 625. Magnetic pole; 626. Limit ring; 627. Contact switch;

[0024] 71. Sample carrier; 711. Support plate; 7111. Slot; 7112. Stepped surface; 712. Mating part; 713. Support leg; 714. Sample tray; 7141. Clamping mating part; 7142. Receiving groove; 71421. Stepped surface;

[0025] 72. Heating unit; 73. Rotating table; 74. Bearing; 75. Motor; 76. Heat insulation component; 79. Support plate; 791. Mounting slot;

[0026] 81. Temporary support platform; 82. Lifting rod; 83. Corrugated pipe; 84. Lower flange; 85. Upper flange; 860. Lifting support seat; 861. Lifting drive component; 862. Lifting screw; 863. Lifting connection part; 864. Lifting guide rail; 87. Guide rod; 88. Horizontal plate; 89. Sleeve;

[0027] 90. Sample; 91. Flange. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of this invention. Obviously, the described embodiments are one embodiment of this invention, and not all embodiments. Based on the described embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0029] It should be noted that, unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention pertains.

[0030] In the description of the embodiments of the present invention, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0031] See Figures 1 to 3 The vacuum testing device of this invention includes: a vacuum testing chamber 201, a vacuum loading chamber 301, and a sample transfer rod 60.

[0032] The vacuum test chamber 201 is used to provide a vacuum environment for testing the sample 90. The vacuum test chamber 201 is provided with a sample support part 71 for supporting multiple samples 90.

[0033] The vacuum loading chamber 301 can be connected to or isolated from the vacuum test chamber 201. The vacuum loading chamber 301 is provided with a temporary support stage 81 for temporarily supporting the sample 90, and the vacuum loading chamber 301 is configured to provide a vacuum environment for the sample 90 supported by the temporary support stage 81.

[0034] The sample transfer rod 60 includes a clamping part 61 for holding the sample and a rod part 62 connected to the clamping part 61. The rod part 62 is configured to reciprocate linearly within the vacuum test chamber 201 and the vacuum loading chamber 301 when the vacuum loading chamber 301 is in communication with the vacuum test chamber 201, so as to transfer the sample 90 between the sample support part 71 and the temporary support stage 81.

[0035] Since the clamping part 61 of the sample transfer rod 60 can only move back and forth in a straight line, when the sample transfer rod 60 clamps the sample 90 from the temporary support stage 81 and then moves towards the vacuum loading chamber 301, the temporary support stage 81 may interfere with the linear movement of the clamping part 61. In this embodiment, the vacuum testing apparatus may further include a lifting assembly for driving the temporary support stage 81 to move vertically up and down, so as to allow the rod 62 to drive the clamping part 61 to move back and forth in a straight line in the vacuum testing chamber 201 and the vacuum loading chamber 301.

[0036] The vacuum testing apparatus of this embodiment, by providing a vacuum loading chamber 301 and a sample transfer rod 60, allows for the loading or removal of the sample 90 without affecting the vacuum level of the vacuum testing chamber 201 when placing a new sample 90 into or removing the sample 90. This is achieved by first evacuating the vacuum loading chamber 301, which helps shorten the testing time. The vacuum testing apparatus also includes a temporary support platform 81, facilitating the placement and removal of the sample 90 from the vacuum loading chamber 301. By providing a lifting assembly to adjust the height of the temporary support platform 81, it is possible to facilitate the sample transfer rod 60 in removing the sample 90 from the temporary support platform 81 or placing the sample 90 on the support platform, while also allowing the sample transfer rod 60 room to move without affecting the linear movement of the clamping part 61.

[0037] The sample transfer rod 60 can employ a magnetically coupled, fully sealed design. The rod 62 can drive the clamping part 61 to move linearly and clamp the sample 90, reciprocating between the vacuum test chamber 201 and the vacuum loading chamber 301. See also... Figure 6The rod 62 is telescopic. The rod 62 may include a housing 621 and a piston rod 622 that moves linearly within the housing 621. One end of the piston rod 622, away from the housing 621, is connected to a clamping part 61. The end of the housing 621 facing the clamping part 61 is fixed to the outside of the vacuum loading chamber 301 via a sealing flange 623. The piston rod 622 extends into the vacuum loading chamber 301 through the sealing flange 623. The clamping part 61 is located within the vacuum loading chamber 301 and can extend into the vacuum test chamber 201 through the extension of the rod 62.

[0038] The sealing flange 623 is provided with a differential pressure balancing port 6231. When the vacuum loading chamber 301 starts to evacuate, a pressure difference is generated between the outer shell 621 and the vacuum loading chamber 301. The pressure must be balanced through the differential pressure balancing port 6231 before the piston rod 622 can be driven. The rod portion 62 may also include a magnetic pole 625, a locking button 624, a limit ring 626, and a contact switch 627 located at the end of the outer shell 621 away from the clamping portion 61. The piston rod 622 can be moved by the magnetic pole 625. Activating the locking button 624 can lock the clamping portion 61 and maintain the clamping force. The limit ring 626 can be manually set to limit the movement of the piston rod 622. The limit ring 626 and the contact switch 627 can be installed at both the front and rear ends of the outer shell 621 to confirm that the sample is fully clamped. The clamping and placement operations of the clamping part 61 can be operated in a non-vacuum state. Limit rings 626 are set at the clamping and placement positions. When the clamping or placement position is reached, the contact switch 627 is triggered, and the light indicates that the clamping or placement position has been reached, so that the clamping part 61 can clamp.

[0039] The sample transfer rod 60 can withstand temperatures below 150°C. Therefore, when using the clamping part 61 to take or release samples, the temperature inside the vacuum test chamber 201 can be lowered to below 150°C, for example, 120°C, before using the clamping part 61 to take or release samples.

[0040] The vacuum testing apparatus may include a vacuum loading furnace 30 and a vacuum testing furnace 20. The vacuum loading furnace 30 and the vacuum testing furnace 20 may be mounted on a workbench 10. The vacuum loading furnace 30 includes a loading furnace body 31 and a loading base 32, which are connected to form a sealed vacuum loading chamber 301. The vacuum testing furnace 20 includes a testing furnace body 21 and a testing base 22, which are connected to form a sealed vacuum testing chamber 201.

[0041] In some embodiments, the vacuum testing furnace 20 may be provided with multiple interfaces 211. Interface 211 can be a sample loading / unloading port, used for placing the test sample 90 into the vacuum testing chamber 201, and for removing the sample 90 after the test. Interface 211 can also be a vacuum port, used to connect a vacuum pump. The vacuum pump is used to evacuate the vacuum testing chamber 201 to provide a vacuum environment. The vacuum pump includes a mechanical pump, a molecular pump, and an ion pump. The mechanical pump is used to pre-evacuate the vacuum testing chamber 201. The molecular pump is used to further evacuate the pre-evacuated vacuum testing chamber 201. The ion pump is used to evacuate the vacuum testing chamber 201 to an ultra-high vacuum state. In this embodiment, an ultra-high vacuum state refers to a pressure below 1×10⁻⁶. - 6 Pa is a vacuum state.

[0042] In some embodiments, interface 211 can be a gas filling / draining interface, used to fill the vacuum test chamber 201, which is in a vacuum state, after the test is completed, so as to bring the vacuum test chamber 201 into a normal pressure state, so as to facilitate opening the vacuum test chamber 201 to take out the sample 90.

[0043] In addition, interface 211 can be a spare interface for connecting with other required devices, reserving connection interfaces for adding other functions, thereby meeting different needs.

[0044] Multiple interfaces 311 can be provided on the vacuum loading furnace 30. The interface 311 can be a sample loading port, used to place the test sample 90 into the vacuum loading chamber 301, and to remove the sample 90 after the test is completed.

[0045] Interface 311 can be a gas filling / draining interface, used to fill the vacuum loading chamber 301, which is in a vacuum state, after the test, so as to bring the vacuum loading chamber 301 to a normal pressure state, making it easier to open the vacuum loading chamber 301 to remove the sample 90. Interface 211 can be a vacuum pumping interface, used to connect a vacuum pump. The vacuum loading chamber 301 and the vacuum test chamber 201 have their own independent vacuum pump systems.

[0046] Interface 311 can be a spare interface for connecting to other required devices, reserving connection interfaces for adding other functions, thereby meeting different needs.

[0047] In some embodiments, observation windows may be provided on the vacuum testing furnace 20 and the vacuum loading furnace 30 respectively to facilitate observation of the conditions inside the chamber.

[0048] In some embodiments, the vacuum testing furnace 20 and the vacuum loading furnace 30 may also each include a vacuum measuring element, which is used to measure the vacuum level within the chamber in real time. The vacuum measuring element can be a vacuum gauge; a backing vacuum gauge with a vacuum measurement range of 5 x 10⁻⁶ is installed on the pipeline between the molecular pump and the mechanical pump. -2 The pa, compound vacuum gauge is installed in the chamber, and its measuring range is 2x10. -6 pa~10pa.

[0049] The vacuum testing apparatus also includes a connecting pipe 50 and a valve 40. The connecting pipe 50 connects the vacuum loading chamber 301 and the vacuum testing chamber 201. The valve 40 is disposed on the connecting pipe 50 and is used to open or close the connecting pipe 50. When the clamping part 61 of the sample transfer rod 60 moves linearly, the clamping part 61 can enter the vacuum testing chamber 201 from the vacuum loading chamber 301 via the connecting pipe 50, and return to the vacuum testing chamber 201 from the vacuum loading chamber 301 via the connecting pipe 50.

[0050] The vacuum loading chamber 301 is designed to take samples without disrupting the high-temperature vacuum state inside the vacuum test chamber 201. The vacuum loading chamber 301 and the vacuum test chamber 201 can be connected via a flange port, and a gate valve installed between the two chambers can isolate them.

[0051] In some embodiments, the bottom wall of the vacuum loading cavity 301 (i.e., the loading base 32) forms a bottom wall opening.

[0052] The lifting assembly includes a lifting rod 82 and a bellows 83. The lifting rod 82 extends upward from the bottom wall opening of the vacuum loading chamber 301 and enters the vacuum loading chamber 301, connecting with the temporary support platform 81. The bellows 83 is fitted radially outside the lifting rod 82 below the bottom wall opening of the vacuum loading chamber 301. The upper end of the bellows 83 is sealed to the periphery of the bottom wall opening of the vacuum loading chamber 301, and the lower end of the bellows 83 is sealed to the lifting rod 82. When the lifting rod 82 moves up and down within the bottom wall opening, the bellows 83 can correspondingly contract or extend. In this embodiment, because the upper end of the bellows 83 is sealed to the periphery of the bottom wall opening of the vacuum loading chamber 301, and the lower end of the bellows 83 is sealed to the lifting rod 82, the airtightness of the vacuum loading chamber 301 is ensured.

[0053] The upper end of the bellows 83 can be sealed to the periphery of the bottom wall opening of the vacuum loading chamber 301 via the upper flange 85; the lower end of the bellows 83 can be fixedly and sealed to the lifting rod 82 via the lower flange 84. Both the upper flange 85 and the lower flange 84 can be ultra-high vacuum flanges.

[0054] The lifting assembly also includes a drive unit for driving the lifting rod 82 to move up and down, thereby moving the temporary support platform 81 up and down. The drive unit allows for flexible adjustment of the height of the temporary support platform 81 to make way for the sample transfer rod 60.

[0055] The drive unit is located outside the vacuum loading chamber 301 and can be mounted on the loading base 32. The drive unit can be connected to the lower flange 84 to drive the lower flange 84 to move up and down.

[0056] See Figure 4 and Figure 5 The drive unit includes a lifting support base 860, a lifting drive component 861, a lifting screw 862, a lifting guide rail 864, and a lifting connecting part 863. The lifting support base 860 supports and mounts the lifting drive component 861, the lifting screw 862, and the lifting guide rail 864. The lifting support base 860 has a top support plate and a bottom support plate, with the top support plate mounted on a loading base 32. The lifting guide rail 864 is fixed between the top and bottom support plates, and both ends of the lifting screw 862 are rotatably connected to the two support plates. The lifting connecting part 863 is slidably connected to the lifting guide rail 864 between the two support plates. The lifting connecting part 863 has a threaded hole that mates with the lifting screw 862, with the lifting screw 862 passing through the threaded hole.

[0057] In this embodiment, the lifting connection part 863 is fixedly connected to the lower flange 84. Through the cooperation of the lifting screw 862 and the threaded hole, when the lifting screw 862 rotates, it can drive the lifting connection part 863 to move up and down along the lifting guide rail 864, thereby driving the lower flange 84 to move up and down, thereby realizing the lifting of the lifting rod 82 and the contraction or extension of the bellows 83.

[0058] Furthermore, the lifting drive component 861 is installed on the lower surface of the bottom support plate, and the lifting drive component 861 is connected to the lifting screw 862. When the lifting drive component 861 rotates, it can drive the lifting screw 862 to rotate, thereby realizing the up and down movement of the lifting connection part 863. In some embodiments, the lifting drive component 861 is a manual rotating wheel, and the lifting of the sample 90 collection part can be realized by manually rotating the wheel.

[0059] In addition, the lifting support 860 also includes a side plate connected between the two support plates. In some embodiments, the side plate is also marked with a scale for measuring the lifting distance of the lifting connection 863.

[0060] A heating element can be installed in the vacuum loading chamber 301 to heat the sample 90 supported by the temporary support stage 81.

[0061] In some embodiments, when the sample 90 carried by the temporary support stage 81 in the vacuum loading chamber 301 is a high-temperature sample 90 taken out of the vacuum test furnace 20, in order to accelerate the cooling of the sample 90 and quickly remove the sample 90 from the vacuum loading furnace 30, in some embodiments, the vacuum loading furnace 30 is also provided with a cooling section for cooling the temporary support stage 81.

[0062] In this embodiment, the temporary support platform 81 can be hollow, and the lifting rod 82 can include an inner tube and an outer tube sleeved radially outside the inner tube. The upper ends of the inner and outer tubes are respectively connected to the cavity of the temporary support platform 81. The lower ends of both the inner and outer tubes can extend downward to below the lower flange 84. The lower end of the inner tube can be connected to the coolant inlet, and the portion of the annular space between the inner and outer tubes located below the lower flange 84 can be connected to the coolant outlet, so that the coolant can flow out from the annular gap between the inner and outer tubes after flowing through the inner tube to the cavity of the temporary support platform 81. With this configuration, the sample 90 can be rapidly cooled by the coolant after being transferred from the vacuum test chamber 201 to the vacuum loading chamber 301.

[0063] In some embodiments, see Figure 9 and Figure 10 The sample carrier 71 includes a support plate 711 and a plurality of sample trays 714. The circumferential end face of the support plate 711 forms a plurality of radially extending slots 7111. Each sample tray 714 is used to carry at least one sample 90. Each sample tray 714 is radially inserted into a slot 7111. The clamping portion 61 of the sample transfer rod 60 is used to clamp the sample tray 714. The rod portion 62 drives the clamping portion 61 to reciprocate linearly to remove the sample tray 714 from the slot 7111 and transfer it to a temporary support stage 81, or to transfer the sample tray 714 from the temporary support stage 81 to the insertion slot 7111. Since the sample tray 714 is radially inserted into the slot 7111, the insertion and release of the sample tray 714 into the slot 7111 can be achieved by utilizing the linear movement of the clamping portion 61 of the sample transfer rod 60.

[0064] In some embodiments, the support plate 711 forms a plurality of slots 7111 spaced apart along the circumferential direction. The slots 7111 are recessed inward from the circumferential end face of the support plate 711 and extend through the upper and lower end faces of the support plate 711. The groove wall of the slot 7111 forms a groove for insertion with the sample tray 714.

[0065] In some embodiments, the groove wall of the slot 7111 forms a stepped surface 7112, and the sample carrier 71 also includes a mating member 712, which is installed on the support plate 711 by fasteners. The mating member 712 and the stepped surface 7112 together form a groove for insertion with the sample tray 714.

[0066] The sample tray 714 can be made of a high-temperature resistant nickel-based alloy, which is lightweight and helps to be clamped by the clamping part 61 to prevent it from falling.

[0067] The sample tray 714 is provided with a clamping engagement part 7141 for clamping by the clamping part 61 of the sample transfer rod 60. The clamping part 61 includes two jaws 611 for clamping the clamping engagement part 7141.

[0068] See Figure 10 The clamping and mating part 7141 can be a cross-shaped structure; see correspondingly. Figure 7 The opposing surfaces of the two grippers 611 are respectively formed with cross-shaped notches 6111, so that when the two grippers 611 are clamped, they match the cross-shaped structure of the clamping mating part 7141, thereby ensuring that the sample tray 714 does not shake when the sample transfer rod 60 moves in a straight line, and preventing the sample 90 in the sample tray 714 from falling off the sample tray 714.

[0069] The support plate 711 may have a circular structure, and each sample tray 714 may have a fan-shaped structure.

[0070] Multiple downwardly recessed receiving grooves 7142 can be formed on the sample tray 714, and each sample 90 is placed in one receiving groove 7142.

[0071] In some embodiments, a mark may be formed on the temporary support stage 81 to indicate alignment with the clamping portion 61 of the sample transfer rod 60. The user can place the sample tray 714 on the temporary support stage 81 according to the mark so that the clamping portion 61 can be aligned with and clamped by the clamping engagement portion 7141 of the sample tray 714 during linear movement.

[0072] In some embodiments, in order to prevent the lifting rod 82 from rotating during the lifting process, causing the mark to rotate at a certain angle, so that the clamping part 61 cannot be aligned with the clamping mating part 7141 of the sample tray 714 during linear movement, the vacuum testing device further includes a guide part for preventing the lifting rod 82 from rotating during the lifting process.

[0073] See Figure 4 and Figure 5The guide section may include a guide rod 87, a horizontal plate 88, and a sleeve 89. The sleeve 89 is fixed to the lower surface of the loading base 32. The guide rod 87 is arranged parallel to the lifting rod 82. The lower end of the guide rod 87 is axially movable and positioned within the sleeve 89. The upper end of the guide rod 87 extends upward through the loading base 32. The guide rod 87 is rigidly connected to the lifting rod 82 via the horizontal plate 88. When the lifting assembly is used to raise or lower the lifting rod 82, the lifting rod 82 drives the horizontal plate 88 and the guide rod 87 to rise and fall together. Due to the constraint of the horizontal plate 88 and the guide rod 87, the lifting rod 82 will not rotate. See also... Figure 7 and Figure 8 The vacuum testing apparatus also includes a heating unit 72, which is located below the support plate 711 to heat the sample 90 carried by the sample tray 714, thereby enabling the sample 90 to be tested under high temperature vacuum conditions.

[0074] In some embodiments, the receiving groove 7142 extends through the lower end face of the sample tray 714, and the groove wall of the receiving groove 7142 forms a stepped surface 71421; a flange 91 is formed on the upper part of the sample 90, and the flange 91 is supported by the stepped surface, so that the sample 90 can be stuck on the sample tray 714 for heating and sampling.

[0075] The sample tray 714 can hold six 10mm*10mm*2mm samples 90 at the same time.

[0076] The slot 7111 penetrates the upper and lower end faces of the support plate 711. Since the receiving groove 7142 penetrates the upper and lower end faces of the sample tray 714, and the slot 7111 penetrates the upper and lower end faces of the support plate 711, the upper and lower surfaces of the sample can be exposed. Because the heating element 72 is located below the support plate 711, it is convenient to directly heat the sample 90 using the heating element 72, and it also facilitates volatilization tests on the sample 90.

[0077] The sample carrier 71 may further include a support plate 79 and a plurality of legs 713. A heating element 72 is disposed in the support plate 79. The support plate 79 is provided with a plurality of mounting slots 791. The legs 713 are connected to the bottom surface of the support plate 711, and each leg 713 passes through the heating element 72 and is inserted into the mounting slot 791 of the support plate 79. In this embodiment, it is advantageous to use the heat from the heating element 72 to uniformly heat each sample 90.

[0078] A small observation window flange can be installed on the top of the vacuum test chamber 201, and the temperature is controlled by detecting the surface temperature of the sample through the observation window using an infrared temperature sensor.

[0079] The heating element 72 heats the sample 90 using radiant heating. The temperature of the sample 90 can be detected and controlled using an infrared measuring instrument. The temperature range of the sample 90 can be 100℃ to 1000℃. Tantalum, which has low vapor volume, low vapor pressure, and good chemical stability, can be used as the material for the heating element 72.

[0080] The support plate 79 is made of insulating material. The support plate 79 may have four electrodes, which are enclosed by an electrode protective cover.

[0081] See Figure 8 The heating element 72 can be formed by a bent extension of a heating wire, and the support leg 713 passes through the gap of the heating element 72 and is inserted into the mounting groove 791 of the support plate 79. For example, the heating wire can be wound back and forth parallel on the frame to ensure that the electromagnetic field generated when current passes through the heating wire is minimized. A tantalum plate can be used as the frame, a tantalum wire as the heating wire, and a thin-walled Al2O3 ceramic tube for electrical insulation.

[0082] A small observation window flange is installed on the top of the vacuum test chamber 201. An infrared temperature sensor detects the surface temperature of the sample through the observation window to control the temperature.

[0083] In order for the sample transfer rod 60 to clamp each sample tray 714, the sample carrier 71 is configured to be rotatably disposed in the vacuum test chamber 201 so that each sample tray 714 can be aligned with the sample transfer rod 60.

[0084] See Figure 2 and Figure 3 In some embodiments, the sample carrier 71 is mounted on the test base 22 via a rotating stage 73. An opening may be formed in the test base 22, and a bearing 74 may be installed at the opening for the rotation shaft of the rotating stage 73 to pass through. A motor 75 and a gearbox assembly may be installed below the test base 22 to drive the rotating stage 73 to rotate.

[0085] In some embodiments, the sample carrier 71 further includes a heat insulation member 76. The heat insulation member 76 is connected between the rotating stage 73 and the support plate 79 to isolate the heating part 72 from the rotating stage 73, preventing the heat of the heating part 72 from being transferred to the outside of the vacuum test chamber 201, thereby achieving heat preservation of the vacuum test chamber 201.

[0086] In some embodiments, the heat insulation member 76 includes a plurality of heat insulation columns. The plurality of heat insulation columns are fixed to the rotating platform 73 and are evenly distributed circumferentially on the rotating platform 73, with a support plate 79 disposed at the upper end of the plurality of heat insulation columns. By providing heat insulation columns, not only is the support plate 79 supported and fixed, but the heating part 72 is also isolated from the rotating platform 73, improving the heat insulation effect. Furthermore, a plurality of heat insulation holes are evenly provided on the heat insulation columns. By providing a plurality of heat insulation holes, the thermal conductivity of the heat insulation columns is reduced, further reducing the heat dissipation of the heating part 72 to the outside.

[0087] The sample carrier 71 may also include a cooling unit for cooling the rotating stage 73.

[0088] In some embodiments, the method for obtaining the ultra-high vacuum experimental environment of the vacuum test chamber 201 and the vacuum loading chamber 301 includes: using an oil-free scroll mechanical pump and a molecular pump as the main pumps, wherein the oil-free scroll mechanical pump is used as a pre-evacuation pump, and the two sets of vacuum pumps are connected in series. In actual operation, the chamber is first evacuated to about 10 Pa by the oil-free scroll mechanical pump; then, the entire device is heated to 120°C using a patch heating belt to reduce the gas adsorbed on the inner wall, and the molecular pump is started to evacuate the chamber to the final required 1×10 Pa. -6 Approximately Pa.

[0089] Sampling process: The temperature of the vacuum test chamber 201 is lowered to 120℃. Without damaging the vacuum, the sample transfer rod 60 can be used to grab the sample tray 714 and move it to the vacuum loading chamber 301. The gate valve closes the channels of the vacuum test chamber 201 and the vacuum loading chamber 301. After the temperature measuring device detects that the temperature of the sample 90 has returned to room temperature, it starts to slowly introduce air to increase the pressure. After the pressure in the vacuum loading chamber 301 returns to the room pressure, the flange of the vacuum loading chamber 301 is opened to take the sample.

[0090] Sample placement process: Place sample 90 into sample tray 714 of vacuum loading chamber 301 and lock the flange of vacuum loading chamber 301. Vacuum loading chamber 301 is evacuated to about 10 Pa. Vacuum loading chamber 301 is heated to 120°C to reduce the gas adsorbed on the inner wall. The molecular pump is started to evacuate vacuum loading chamber 301 to the final required 1×10-6 Pa. Then, the gate valve is opened and the sample transfer rod 60 is used to place sample tray 714 into the slot of support plate 711 of vacuum test chamber 201. Vacuum test chamber 201 is heated to the specified temperature.

[0091] The workbench 10 has a frame made of aluminum profiles and is covered with aluminum composite panels. The workbench 10 is supported by casters at the bottom, which facilitates the movement, fixing and leveling of the device.

[0092] The electrical control unit is installed inside the workbench 10 to control and collect relevant data from various parts.

[0093] The water cooling system consists of a chiller, a water distributor assembly, a flow monitor, etc. The equipment is cooled by the chiller.

[0094] The vacuum test chamber 201 is a cylindrical cavity installed on one side of the workbench 10. It is constructed of 316 stainless steel and undergoes a special process of vacuum degassing, glass bead blasting, and chemical polishing. The side features an observation window, sample transfer window, molecular pump connection, composite vacuum gauge connection, filling / discharging interface, and safety valve.

[0095] The vacuum loading chamber 301 is a cylindrical cavity mounted on the worktable 10. The chamber is constructed of 316 stainless steel and undergoes a special process of vacuum degassing, glass bead blasting, and chemical polishing. The side features a sample transfer window, vacuum chamber, molecular pump connection, spare port, composite vacuum gauge connection, safety valve, and venting port.

[0096] A pre-vacuum gauge is installed between the mechanical pump and the molecular pump to determine if the molecular pump has started. A composite vacuum gauge is used to measure the vacuum level in the vacuum test chamber 201 and the vacuum loading chamber 301. The vacuum pumping system of the vacuum test chamber 201 and the vacuum loading chamber 301 consists of a mechanical pump and a molecular pump connected in series, with the molecular pump installed on the vacuum heating chamber and the vacuum loading chamber 301.

[0097] The vacuum testing device of this application embodiment can perform principle verification tests on the thermal vacuum volatilization characteristics of high-temperature materials. It can complete the sampling and placement operations of the test sample 90 while maintaining the ambient vacuum and temperature of the sample 90, avoiding the introduction of impurities during the sampling and placement process, and greatly shortening the total test time.

[0098] Regarding the embodiments of the present invention, it should also be noted that, without conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other to obtain new embodiments.

[0099] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. The scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A vacuum testing apparatus, comprising: A vacuum test chamber is used to provide a vacuum environment for testing samples. The vacuum test chamber is equipped with a sample support section for supporting multiple samples. The vacuum loading chamber can be connected to or isolated from the vacuum test chamber. The vacuum loading chamber is provided with a temporary support stage for temporarily supporting the sample. The vacuum loading chamber is configured to provide a vacuum environment for the sample supported by the temporary support stage. A sample transfer rod, comprising a clamping part for clamping a sample and a rod part connected to the clamping part, the rod part being configured to drive the clamping part to reciprocate linearly in the vacuum test chamber and the vacuum loading chamber when the vacuum loading chamber and the vacuum test chamber are in communication, so as to transfer the sample between the sample carrier part and the temporary carrier stage; as well as The lifting assembly is used to drive the temporary support platform to move vertically up and down, so as to allow the rod to drive the clamping part to reciprocate in a straight line in the vacuum test chamber and the vacuum loading chamber; The vacuum loading cavity is also equipped with a cooling section for cooling the temporary support platform; The sample carrier includes: Multiple sample trays, each of which is used to hold at least one sample; The bottom wall of the vacuum loading cavity forms a bottom wall opening, and the lifting assembly includes: The lifting rod extends upward from the bottom wall opening of the vacuum loading chamber and enters the vacuum loading chamber to connect with the temporary support platform; The sample tray is provided with a clamping mating part for clamping by the clamping part of the sample conveying rod; The temporary support platform is marked with an indication of alignment with the clamping part of the sample transfer rod; The vacuum testing device further includes a guide section for preventing the lifting rod from rotating during the lifting process; The lifting assembly further includes a bellows, which is fitted radially outward of the lifting rod below the opening in the bottom wall of the vacuum loading cavity. The upper end of the bellows is sealed to the periphery of the opening in the bottom wall of the vacuum loading cavity, and the lower end of the bellows is sealed to the lifting rod. When the lifting rod moves up and down within the opening in the bottom wall, the bellows can correspondingly contract or extend. The upper end of the bellows is sealed to the periphery of the bottom wall opening of the vacuum loading chamber via an upper flange; the lower end of the bellows is fixed and sealed to the lifting rod via a lower flange. The temporary support platform has an internal cavity. The lifting rod includes an inner tube and an outer tube sleeved radially outside the inner tube. The upper ends of the inner tube and the outer tube are respectively connected to the cavity of the temporary support platform. The lower ends of the inner tube and the outer tube both extend downward to below the lower flange. The lower end of the inner tube is connected to the coolant inlet. The portion of the annular space between the inner tube and the outer tube located below the lower flange is connected to the coolant outlet, thereby allowing the coolant to flow out from the annular space after flowing through the inner tube into the cavity of the temporary support platform.

2. The apparatus according to claim 1, wherein, The lifting assembly also includes: The drive unit is used to drive the lifting rod to move up and down, thereby moving the temporary support platform up and down.

3. The apparatus according to claim 1, wherein, The sample carrier also includes: A support plate extending horizontally, wherein the circumferential end face of the support plate forms a plurality of slots extending radially; Each of the sample trays is inserted radially into the slot; The sample transfer rod has a clamping part for clamping the sample tray. The rod drives the clamping part to reciprocate in a straight line to remove the sample tray from the slot and transfer it to the temporary support platform, or to transfer the sample tray from the temporary support platform to the slot.

4. The apparatus according to claim 3, wherein, The sample tray has multiple downwardly recessed receiving slots, and each sample is placed in one of the receiving slots.

5. The apparatus according to claim 4, wherein, The receiving groove extends through the lower end face of the sample tray, and the groove wall forms a stepped surface; The sample has a flange at its upper part, which is supported by the stepped surface.

6. The apparatus according to claim 3, further comprising: A heating element is disposed below the support plate to heat the sample held in the sample tray. The slot extends through the upper and lower end faces of the support plate.

7. The apparatus according to claim 6, wherein, The sample carrier also includes: A support plate, wherein the heating element is disposed within the support plate, and the support plate is provided with multiple mounting slots; and Multiple support legs are connected to the bottom surface of the support plate, and each support leg passes through the heating element and is inserted into the mounting groove of the support plate.

8. The apparatus according to claim 3, wherein, The sample carrier is configured to be rotatably disposed in the vacuum test chamber so that each sample tray can be aligned with the sample transfer rod.

9. The apparatus according to claim 1, further comprising: A connecting pipe is used to connect the vacuum loading chamber and the vacuum test chamber; and A valve, installed on the connecting pipe, is used to open or close the connecting pipe.

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