A method for machining end face threads for welding of copper-chromium target material

Abstract

The application provides a copper-chromium target welding end face thread machining method, which comprises the following steps: sequentially performing fine turning and thread turning on the copper-chromium target blank welding end face; the thread turning uses a 50° thread blade; in the fine turning, the blade is fed towards the center of the copper-chromium target blank welding end face along the diameter direction of the copper-chromium target blank welding end face; in the thread turning, the blade is fed towards the edge of the copper-chromium target blank welding end face along the diameter direction of the copper-chromium target blank welding end face. The copper-chromium target welding end face thread machining method is simple and easy to operate, can effectively shorten the process and save the machining time; in addition, the thread turning tool and process parameters are limited, so that the end face thread with stable strength and regular appearance can be obtained, and the problem of burr on the thread tooth bottom is solved.

Description

Technical Field

[0001] This invention belongs to the field of sputtering targets and relates to a method for machining targets, particularly a method for machining end face threads for welding copper-chromium targets. Background Technology

[0002] Sputtering targets are mainly used in the electronics and information industries, such as integrated circuits, information storage, liquid crystal displays, laser memory, and electronic control devices. They can also be used in glass coating, wear-resistant materials, high-temperature corrosion-resistant materials, and high-end decorative products. They are an indispensable consumable material in PVD (Physical Vapor Deposition) processes.

[0003] In the sputtering process of target materials, the surface finish of the sputtering surface is an important indicator for evaluating the processing quality. The quality of the sputtering surface directly affects the sputtering performance of the target material. The ideal sputtering surface is a smooth, mirror-like finish. However, nickel-vanadium targets are magnetic targets. During the diffusion thread turning of the sputtering end face, the solution sticks to the tool, causing tooth decay and damaging the sputtering surface, thus affecting the sputtering performance of the produced target material.

[0004] CN 108660423A discloses a turning method for a target assembly, the method comprising the following steps: providing a blank of a special plastic target and a stainless steel backing plate; welding the blank of the special plastic target and the stainless steel backing plate together to form a special plastic target assembly; rough turning the special plastic target assembly using a first cutting tool; finish turning the special plastic target assembly using a second cutting tool; and grinding the special plastic target assembly. CN108672720A discloses a turning method for a high-purity tantalum target, wherein the turning method employs a machining method in which the cutting tool feeds along the diameter direction of the high-purity tantalum target towards the center of the target, and the turning speed is strictly limited. This turning method is simple to operate and has low equipment requirements.

[0005] Both of the above patents only disclose the planar turning of the target material, and do not specifically describe the turning process for copper-chromium targets.

[0006] CN 108687492A discloses a method for manufacturing a target assembly. The method specifically includes: providing a titanium target blank and a backing plate, the blank having a sputtering surface and a welding surface opposite to the sputtering surface; turning the welding surface to form threads; and welding the titanium target blank and the backing plate together using a hot isostatic pressing process to form the target assembly. A 60° thread insert is used in the turning process. When this patent uses a conventional thread insert for turning, interference occurs between the insert and the thread tip after turning to a certain depth, resulting in excessively sharp thread tips. This leads to thread tilting during subsequent diffusion welding and lower thread strength.

[0007] Therefore, it is necessary to provide a turning technique that can obtain threads with stable strength and regular morphology on the end face. Summary of the Invention

[0008] To address the shortcomings of existing technologies, the present invention aims to provide a method for machining end-face threads for copper-chromium target welding. The machining method provided by this invention can obtain end-face threads with stable strength and regular morphology; and solves the problem of built-up edge formation at the thread root.

[0009] To achieve this objective, the present invention adopts the following technical solution:

[0010] This invention provides a method for machining end face threads for welding copper-chromium target materials, the machining method comprising the following steps:

[0011] The end face of the copper-chromium target blank for welding is successively precision turned and threaded turned;

[0012] The cutting tools used in the thread turning include 50° thread cutting tools;

[0013] During the precision turning, the cutting tool is fed towards the center of the end face of the copper-chromium target blank along the diameter direction of the end face of the copper-chromium target blank.

[0014] During the thread turning process, the cutting tool is fed towards the edge of the copper-chromium target blank welding end face along the diameter direction of the end face of the copper-chromium target blank welding.

[0015] This invention uses precision turning to make the end face of the copper-chromium target blank for welding smooth and flat, and then uses thread turning to process threads on the end face of the copper-chromium target blank for welding, which is more conducive to improving the quality of sputter welding between the copper-chromium target material and the back plate.

[0016] In addition, the present invention uses a 50° thread insert for thread turning, which solves the interference friction between the tool and the thread root; and avoids the tool friction process affecting the overall thread morphology.

[0017] Preferably, the cutting tools used in the finish turning include carbide cutting tools.

[0018] Preferably, the surface roughness of the end face of the copper-chromium target for welding after precision turning is <0.05mm, for example, it can be 0.045mm, 0.04mm, 0.035mm, 0.03mm, 0.025mm or 0.02mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0019] This invention uses precision turning to make the end face of the copper-chromium target blank for welding smooth and flat. If the surface roughness is too high, it will lead to burrs on the surface product when the thread cutter is turned, which will affect the morphology of the thread tip.

[0020] Preferably, the feed rate in the finish turning is 0.1 to 0.15 mm / r, for example, it can be 0.1 mm / r, 0.11 mm / r, 0.12 mm / r, 0.13 mm / r, 0.14 mm / r or 0.15 mm / r, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0021] Preferably, the depth of cut in the finishing turning is 0.05 to 0.1 mm, for example, it can be 0.05 mm, 0.06 mm, 0.07 mm, 0.08 mm or 0.09 mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0022] Preferably, the rotational speed of the cutting tool in the finish turning is 600-800 r / min, for example, it can be 600 r / min, 640 r / min, 680 r / min, 720 r / min, 760 r / min or 800 r / min, but is not limited to the listed values. Other values ​​not listed within the range are also applicable.

[0023] Preferably, the thread turning includes forming threads on the end face of the copper-chromium target for welding after finish turning.

[0024] Preferably, the pitch of the thread is 0.2 to 0.25 mm, for example, it can be 0.2 mm, 0.21 mm, 0.22 mm, 0.23 mm, 0.24 mm or 0.25 mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0025] Preferably, the thread height is 0.1 to 0.15 mm, for example, it can be 0.1 mm, 0.11 mm, 0.12 mm, 0.13 mm, 0.14 mm or 0.15 mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0026] The thread pitch of the present invention is 0.2–0.25 mm, and the thread height is 0.1–0.15 mm. By limiting the thread height and pitch, the number of threads can be increased, thereby increasing the overall engagement area. If the pitch is too large, the number of planar threads will be relatively reduced, affecting the engagement area during subsequent welding. If the pitch is too small, the surface threads will be too small, affecting the strength of the threads. If the thread height is too large, the thread teeth will have an irregular shape, resulting in a thin and long thread that will tilt during welding. If the thread height is too low, the thread tips will form planar bosses, resulting in insufficient welding engagement depth and thus affecting the welding strength.

[0027] Preferably, the cutting tools used in the thread turning include carbide cutting tools.

[0028] Preferably, the depth of cut in the thread turning is <0.05mm, for example, it can be 0.045mm, 0.04mm, 0.035mm, 0.03mm, 0.025mm or 0.02mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0029] In the thread turning process described in this invention, the depth of cut is <0.05mm. If the depth of cut is too large, it will produce large chips, resulting in poor chip removal. The chips will get stuck between the tool and the thread, and squeeze into the thread after turning, causing the thread to tilt as a whole.

[0030] Preferably, the rotational speed of the cutting tool in the thread turning is 150 to 200 r / min, for example, it can be 150 r / min, 160 r / min, 170 r / min, 180 r / min, 190 r / min or 200 r / min, but is not limited to the listed values, other unlisted values ​​within the range.

[0031] The rotational speed during thread turning as described in this invention should not be too fast or too slow. If the rotational speed is too fast, the chip removal from the thread will be poor, and the friction between the chips and the thread tip will easily deform the thread tip. If the rotational speed is too slow, there will be too much friction between the tool and the thread, and more built-up edge will be generated inside the thread, which will affect the subsequent welding engagement.

[0032] Preferably, cutting fluid is used in both finish turning and thread turning.

[0033] Preferably, the machining fluid comprises an aqueous solution of an emulsion.

[0034] Preferably, the mass concentration of the aqueous solution of the emulsion is ≤15wt%, for example, it can be 15wt%, 16wt%, 17wt%, 18wt%, 19wt%, or 20wt%, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0035] Preferably, the oil content of the emulsion is 8 to 12 vol%, for example, it can be 8 vol%, 9 vol%, 10 vol%, 11 vol%, or 12 vol%, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0036] Preferably, the emulsion comprises Caltex AmQuart 3380 water-soluble machining fluid.

[0037] The turning fluid provided by this invention can cool and lubricate, reduce the occurrence of surface defects during turning, and reduce the wear of cutting tools.

[0038] The mass concentration of the emulsion in the turning fluid provided by this invention is ≤15wt%. If the mass concentration is greater than 15wt%, it will affect the cooling and lubrication of the turning fluid, thereby affecting the roughness of the turning surface and the surface quality of the turning surface.

[0039] As a preferred embodiment of the present invention, the method for machining end face threads for welding copper-chromium target materials provided by the present invention includes the following steps:

[0040] The end face of the copper-chromium target blank for welding is successively precision turned and threaded turned;

[0041] During the finish turning, the cutting tool is fed towards the center of the copper-chromium target blank welding end face along the diameter direction of the end face of the copper-chromium target blank; the feed rate during the finish turning is 0.1-0.15 mm / r, the depth of cut is 0.05-0.1 mm, and the cutting tool rotation speed is 600-800 r / min; the surface roughness of the copper-chromium target blank welding end face after the finish turning is <0.05 mm;

[0042] In the thread turning process, the 50° thread insert is fed along the diameter direction of the end face of the copper-chromium target blank towards the edge of the end face of the copper-chromium target blank; the thread pitch in the thread turning process is 0.2 to 0.25 mm, the thread height is 0.1 to 0.15 mm, the depth of cut is <0.05 mm, and the rotational speed of the insert is 150 to 200 r / min.

[0043] Both finishing turning and thread turning use cutting fluid; the cutting fluid includes an aqueous solution of an emulsion; the mass concentration of the aqueous solution of the emulsion is ≤15wt%, the oil content of the emulsion is 8-12vol%, and the emulsion includes Caltex Anquad 3380 water-soluble cutting fluid.

[0044] The numerical range described in this invention includes not only the point values ​​listed above, but also any point values ​​within the numerical ranges not listed above. Due to space limitations and for the sake of brevity, this invention will not exhaustively list all the specific point values ​​included in the range.

[0045] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0046] (1) In the processing method provided by the present invention, the cutting tool will not interfere with the thread, thereby enhancing the overall strength of the thread;

[0047] (2) By using the thread cutting process parameters in the processing method provided by the present invention, it is not easy to get stuck with chips during the processing, thereby ensuring the thread shape;

[0048] (3) The present invention uses a small pitch thread, which increases the number of surface threads and increases the engagement area. Detailed Implementation

[0049] The technical solution of the present invention will be further illustrated below through specific embodiments. Those skilled in the art should understand that the embodiments described are merely illustrative of the present invention and should not be construed as limiting the invention in any way.

[0050] Example 1

[0051] This embodiment provides a method for machining end face threads for welding copper-chromium target materials, the machining method including the following steps:

[0052] The end face of the copper-chromium target blank for welding is successively precision turned and threaded turned;

[0053] In the finish turning, the cutting tool is fed towards the center of the copper-chromium target blank welding end face along the diameter direction of the end face of the copper-chromium target blank welding; the feed rate in the finish turning is 0.12 mm / r, the depth of cut is 0.08 mm, and the cutting tool rotation speed is 700 r / min; the surface roughness of the copper-chromium target blank welding end face after finish turning is 0.045 mm;

[0054] In the thread turning process, the 50° thread insert is fed along the diameter direction of the end face of the copper-chromium target blank towards the edge of the end face of the copper-chromium target blank; the thread pitch in the thread turning process is 0.22 mm, the thread height is 0.15 mm, the depth of cut is 0.045 mm, and the rotational speed of the insert is 180 r / min.

[0055] Both finishing turning and thread turning use cutting fluid; the cutting fluid includes an aqueous solution of an emulsion; the aqueous solution of the emulsion has a mass concentration of 15 wt%, the emulsion has an oil content of 10 vol%, and the emulsion includes Caltex Anquad 3380 water-soluble cutting fluid.

[0056] Example 2

[0057] This embodiment provides a method for machining end face threads for welding copper-chromium target materials, the machining method including the following steps:

[0058] The end face of the copper-chromium target blank for welding is successively precision turned and threaded turned;

[0059] In the finish turning, the cutting tool is fed towards the center of the copper-chromium target blank welding end face along the diameter direction of the end face of the copper-chromium target blank welding; the feed rate in the finish turning is 0.1 mm / r, the depth of cut is 0.05 mm, and the cutting tool rotation speed is 600 r / min; the surface roughness of the copper-chromium target blank welding end face after finish turning is <0.05 mm;

[0060] In the thread turning process, the 50° thread insert is fed along the diameter direction of the end face of the copper-chromium target blank for welding towards the edge of the end face of the copper-chromium target blank for welding; the thread pitch in the thread turning process is 0.2 mm, the thread height is 0.1 mm, the depth of cut is 0.04 mm, and the rotational speed of the insert is 200 r / min.

[0061] Both finishing turning and thread turning use cutting fluid; the cutting fluid includes an aqueous solution of an emulsion; the aqueous solution of the emulsion has a mass concentration of 13 wt%, the emulsion has an oil content of 8 vol%, and the emulsion includes Caltex Anquad 3380 water-soluble cutting fluid.

[0062] Example 3

[0063] This embodiment provides a method for machining end face threads for welding copper-chromium target materials, the machining method including the following steps:

[0064] The end face of the copper-chromium target blank for welding is successively precision turned and threaded turned;

[0065] In the finish turning, the cutting tool is fed towards the center of the copper-chromium target blank welding end face along the diameter direction of the end face of the copper-chromium target blank welding; the feed rate in the finish turning is 0.15 mm / r, the depth of cut is 0.1 mm, and the cutting tool rotation speed is 800 r / min; the surface roughness of the copper-chromium target blank welding end face after finish turning is <0.05 mm;

[0066] In the thread turning process, the 50° thread insert is fed along the diameter direction of the end face of the copper-chromium target blank towards the edge of the end face of the copper-chromium target blank; the thread pitch in the thread turning process is 0.25 mm, the thread height is 0.13 mm, the depth of cut is 0.03 mm, and the rotation speed of the insert is 150 r / min.

[0067] Both finishing turning and thread turning use cutting fluid; the cutting fluid includes an aqueous solution of an emulsion; the aqueous solution of the emulsion has a mass concentration of 10 wt%, the oil content of the emulsion is 12 vol%, and the emulsion includes Caltex Anquad 3380 water-soluble cutting fluid.

[0068] Example 4

[0069] This embodiment provides a method for machining end face threads for welding copper-chromium target materials, the machining method including the following steps:

[0070] The end face of the copper-chromium target blank for welding is successively precision turned and threaded turned;

[0071] In the finish turning, the cutting tool is fed towards the center of the copper-chromium target blank welding end face along the diameter direction of the end face of the copper-chromium target blank; the feed rate in the finish turning is 0.14 mm / r, the depth of cut is 0.06 mm, and the cutting tool rotation speed is 650 r / min; the surface roughness of the copper-chromium target blank welding end face after finish turning is 0.03 mm;

[0072] In the thread turning process, the 50° thread insert is fed along the diameter direction of the end face of the copper-chromium target blank for welding towards the edge of the end face of the copper-chromium target blank for welding; the thread pitch in the thread turning process is 0.23 mm, the thread height is 0.115 mm, the depth of cut is 0.035 mm, and the rotational speed of the insert is 170 r / min.

[0073] Both finishing turning and thread turning use cutting fluid; the cutting fluid includes an aqueous solution of an emulsion; the aqueous solution of the emulsion has a mass concentration of 12%, the oil content of the emulsion is 9 vol%, and the emulsion includes Caltex Anquad 3380 water-soluble cutting fluid.

[0074] Example 5

[0075] This embodiment provides a method for machining end face threads for welding copper-chromium target materials. The only difference between this machining method and Embodiment 1 is that:

[0076] In this embodiment, the surface roughness of the end face of the copper-chromium target used for welding after precision turning is changed to 0.05 mm.

[0077] Compared with Example 1, increasing the surface roughness of the end face of the copper-chromium target for welding after precision turning will result in more residual burrs on the thread tips, which are relatively difficult to remove.

[0078] Example 6

[0079] This embodiment provides a method for machining end face threads for welding copper-chromium target materials. The only difference between this machining method and Embodiment 1 is that:

[0080] In this embodiment, the rotational speed of the cutting tool in thread turning is changed to 140 r / min.

[0081] Compared to Example 1, reducing the rotational speed of the cutting tool during thread turning results in a longer contact time between the cutting tool and the thread teeth, leading to a smoother thread profile.

[0082] Example 7

[0083] This embodiment provides a method for machining end face threads for welding copper-chromium target materials. The only difference between this machining method and Embodiment 1 is that:

[0084] In this embodiment, the rotational speed of the cutting tool in thread turning is changed to 220 r / min.

[0085] Compared to Example 1, increasing the rotational speed of the cutting tool during thread turning leads to faster wear of the cutting tool and relatively less smooth chip removal during the turning process.

[0086] Example 8

[0087] This embodiment provides a method for machining end face threads for welding copper-chromium target materials. The only difference between this machining method and Embodiment 1 is that:

[0088] In this embodiment, the depth of cut in thread turning is changed to 0.06mm.

[0089] Compared to Example 1, increasing the depth of cut in thread turning results in larger chips, which are more prone to entanglement and greater tool wear.

[0090] Example 9

[0091] This embodiment provides a method for machining end face threads for welding copper-chromium target materials. The only difference between this machining method and Embodiment 1 is that:

[0092] In this embodiment, the thread pitch in thread turning is changed to 0.5mm.

[0093] Compared with Example 1, increasing the thread pitch during thread turning will result in a reduction in the number of thread teeth within the same range, leading to a smaller welding engagement area and relatively lower strength.

[0094] Example 10

[0095] This embodiment provides a method for machining end face threads for welding copper-chromium target materials. The only difference between this machining method and Embodiment 1 is that:

[0096] In this embodiment, the thread height in thread turning is changed to 0.3mm.

[0097] Compared with Example 1, increasing the thread height during thread turning will cause interference between the thread cutting tool and the thread, resulting in a slender thread, relatively low thread strength, and the thread will tilt during welding engagement.

[0098] Comparative Example 1

[0099] This comparative example provides a method for machining end face threads for welding copper-chromium target materials. The only difference between this machining method and Example 1 is that:

[0100] This comparative example changes the inserts used in thread turning to 60° thread inserts.

[0101] Compared to Example 1, when a 60° thread insert is used to cut a thread with a pitch of 0.2, interference occurs between the side edge of the insert and the thread teeth when the depth reaches 0.15, resulting in an irregular thread shape.

[0102] In summary, the end-face thread machining method for copper-chromium target welding provided by this invention is simple and easy to operate, which can effectively shorten the process and save machining time. In addition, by limiting the cutting tools and process parameters for thread turning, end-face threads with stable strength and regular morphology can be obtained, solving the problem of built-up edge formation at the thread root.

[0103] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above descriptions are merely specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for machining end face threads for welding copper-chromium target materials, characterized in that, The processing method includes the following steps: The end face of the copper-chromium target blank for welding is subjected to precision turning and thread turning in sequence; the surface roughness of the end face of the copper-chromium target blank for welding after precision turning is <0.05mm; the depth of cut in the thread turning is <0.05mm; The cutting tools used in the thread turning include 50° thread cutting tools; During the precision turning, the cutting tool is fed towards the center of the end face of the copper-chromium target blank along the diameter direction of the end face of the copper-chromium target blank. During the thread turning process, the cutting tool is fed towards the edge of the copper-chromium target blank welding end face along the diameter direction of the end face of the copper-chromium target blank welding.

2. The method for machining end face threads for welding copper-chromium target materials according to claim 1, characterized in that, The cutting tools used in the finishing turning include carbide cutting tools.

3. The method for machining end face threads for welding copper-chromium target materials according to claim 1, characterized in that, The feed rate in the finish turning is 0.1~0.15 mm / r.

4. The method for machining end face threads for welding copper-chromium target materials according to claim 1, characterized in that, The depth of cut in the finishing turning is 0.05~0.1mm.

5. The method for machining end face threads for welding copper-chromium target materials according to claim 1, characterized in that, The thread turning includes forming threads on the end face of the copper-chromium target for welding after finish turning.

6. The method for machining end face threads for welding copper-chromium target materials according to claim 5, characterized in that, The thread pitch is 0.2~0.25mm.

7. The method for machining end face threads for welding copper-chromium target materials according to claim 5, characterized in that, The thread height is 0.1~0.15mm.

8. The method for machining end face threads for welding copper-chromium target materials according to claim 1, characterized in that, The cutting tools used in the thread turning include carbide cutting tools.

9. The method for machining end face threads for welding copper-chromium target materials according to claim 1, characterized in that, Cutting fluid is used in both finish turning and thread turning.

10. The method for machining end face threads for welding copper-chromium target materials according to claim 9, characterized in that, The turning fluid includes an aqueous solution of an emulsion.

11. The method for machining end face threads for welding copper-chromium target materials according to claim 10, characterized in that, The mass concentration of the aqueous solution of the emulsion is ≤15wt%.

12. The method for machining end face threads for welding copper-chromium target materials according to claim 10, characterized in that, The oil content of the emulsion is 8-12 vol.

13. The method for machining end face threads for welding copper-chromium target materials according to claim 10, characterized in that, The emulsion includes Caltex Amex 3380 water-soluble machining fluid.

14. The method for machining end face threads for welding copper-chromium target materials according to claim 1, characterized in that, The processing method includes the following steps: The end face of the copper-chromium target blank for welding is successively precision turned and threaded turned; In the finish turning, the cutting tool is fed towards the center of the end face of the copper-chromium target blank along the diameter direction of the end face of the copper-chromium target blank; the feed rate in the finish turning is 0.1~0.15mm / r, and the depth of cut is 0.05~0.1mm; the surface roughness of the end face of the copper-chromium target blank after finish turning is <0.05mm; In the thread turning process, the 50° thread insert is fed along the diameter direction of the end face of the copper-chromium target blank to the edge of the end face of the copper-chromium target blank; the thread pitch in the thread turning process is 0.2~0.25mm, the thread height is 0.1~0.15mm, and the depth of cut is <0.05mm. Both finishing turning and thread turning use cutting fluid; the cutting fluid includes an aqueous solution of emulsion; the mass concentration of the aqueous solution of emulsion is ≤15wt%, the oil content of the emulsion is 8~12vol%, and the emulsion includes Caltex Anquad 3380 water-soluble cutting fluid.