A three-axis linkage actuator

Abstract

The present invention discloses a three-axis linkage actuator, comprising an X-axis robotic arm driven by an X-drive assembly for reciprocating movement in the X-direction, a Y-axis robotic arm driven by a Y-axis drive assembly for reciprocating movement in the Y-direction, and a Z-axis robotic arm driven by a Z-axis drive assembly for reciprocating movement in the Z-direction. An XY-axis following stage is slidably connected to the Y-guide rail of the X-axis robotic arm and the first X-guide rail of the Y-axis robotic arm. The XY-axis following stage is also provided with a Z-guide rail. An XZ-axis following member is connected to a mounting block. The XZ-axis following member is slidably connected to the second X-guide rail of the Z-axis robotic arm. The mounting block is slidably connected to the Z-guide rail. This three-axis linkage actuator secures the drive devices for the X-axis, Y-axis, and Z-axis to a workbench and drives the corresponding robotic arms and the slidably connected components, so that the actuator end of the mechanism can move freely within the three-axis space and accurately move to a specified position.

Description

Technical Field

[0001] The invention relates to a mobile executing mechanism, in particular to a three-axis linkage executing mechanism. Background Art

[0002] With the sustained and rapid development of the national economy, my country is transforming and upgrading from labor-intensive manufacturing to intelligent manufacturing. As production technology continues to upgrade and develop, more automated production equipment is being used in various manufacturing links in the manufacturing industry.

[0003] In many manufacturing processes, actuators such as robots that can move over a large range are required. In addition to actuators that can move within a plane, actuators that can move within a space range are also needed. They can move in three directions to achieve spatial positioning and then perform specific process operations.

[0004] Most existing spatial motion actuators are constructed by installing an X-axis movable device on a designated plane, a Y-axis movable device mounted perpendicular to the X-axis movable device, and a Z-axis movable device mounted on the Y-axis movable device. The Z-axis movable device can then move up and down, the Y-axis movable device coupled with the Z-axis movable device can move forward and backward as a whole, and the X-axis movable device coupled with the Y-axis movable device and the Z-axis movable device can move left and right as a whole. Because the drive device in these existing spatial motion actuators moves along with the movable device, the load on the underlying movable devices (such as the X-axis and Y-axis movable devices) is excessive. This places a heavy load on the drive device's motor, resulting in serious motor loss. Furthermore, the load also affects the actuator's efficiency. Summary of the Invention

[0005] In view of the above-mentioned defects, the purpose of the present invention is to propose a three-axis linkage actuator to solve the problem that the spatial actuator has a heavy load on the entire mechanism and low execution efficiency because the driving device moves together with the moving device.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A three-axis linkage actuator, comprising a workbench, an X-axis drive assembly, an X-axis robotic arm, a Y-axis drive assembly, a Y-axis robotic arm, a Z-axis drive assembly, a Z-axis robotic arm, an XY following stage, an XZ following member, and a mounting block;

[0008] The X-axis drive assembly and the Y-axis drive assembly are respectively mounted on the table top of the workbench, and the Z-axis drive assembly is vertically fixed to the table top of the workbench; the X-axis drive assembly is movably mounted with the X-axis robotic arm, and the X-axis drive assembly is used to drive the X-axis robotic arm to reciprocate along the X direction; the Y-axis drive assembly is movably mounted with the Y-axis robotic arm, and the Y-axis drive assembly is used to drive the Y-axis robotic arm to reciprocate along the Y direction; the Z-axis drive assembly is movably mounted with the Z-axis robotic arm, and the Z-axis drive assembly is used to drive the Z-axis robotic arm to reciprocate along the Z direction;

[0009] The X-axis robotic arm is provided with a Y guide rail, the Y-axis robotic arm is provided with a first X guide rail, and the Z-axis robotic arm is provided with a second X guide rail;

[0010] The XY following stage is slidably connected to the Y guide rail and the first X guide rail respectively, and the XY following stage is provided with a Z guide rail;

[0011] The XZ-direction follower is slidably connected to the second X-direction guide rail, the XZ-direction follower is fixed with the mounting block, the mounting block is slidably connected to the Z-direction guide rail, and the mounting block includes at least one mounting surface.

[0012] Preferably, the XY following stage is a sliding stage composed of a horizontal stage and a vertical stage vertically connected to each other, the top of the horizontal stage is provided with an upper sliding groove, the horizontal stage is slid on the Y guide rail through the setting of the upper sliding groove, the bottom of the horizontal stage is provided with a downward groove, the horizontal stage is slid on the first X guide rail through the setting of the downward groove, and the vertical stage is provided with the Z guide rail.

[0013] Preferably, the XZ-direction follower is a strip-shaped member whose length direction is parallel to the Y-axis. The XZ-direction follower is slidably connected to the second X-direction guide rail through a first slider. The first slider is provided with a first Y-direction slide groove and a first X-direction slide groove facing back to back and perpendicular to each other. The first Y-direction slide groove is opened on the upper surface of the first slider. The first Y-direction slide groove is slidably connected to the XZ-direction follower. The first X-direction slide groove is opened on the lower surface of the first slider. The first X-direction slide groove is slidably connected to the second X-direction guide rail.

[0014] Preferably, the Z-axis robotic arm is divided into a first Y-axis extension section and a first X-axis extension section, one end of the first Y-axis extension section is movably connected to the Z-axis drive assembly, the other end of the first Y-axis extension section is vertically connected to the first X-axis extension section, the first X-axis extension section is provided with a second X-direction guide rail, the height of the plane where the top surface of the first X-axis extension section is located is lower than the plane where the top surface of the first Y-axis extension section is located, and an avoidance zone is between the plane where the top surface of the first X-axis extension section is located and the plane where the top surface of the first Y-axis extension section is located, and the avoidance zone is for the XZ-direction follower to pass through.

[0015] Preferably, the X-axis drive assembly, Y-axis drive assembly and Z-axis drive assembly are all linear drive devices, the movers of the linear drive devices are connected to the corresponding X-axis robotic arm, Y-axis robotic arm and Z-axis robotic arm, and the stators of the linear drive devices are fixed to the workbench.

[0016] Preferably, the X-axis robot arm is divided into an X-axis mover connecting section and a second Y-direction extending section, the X-axis mover connecting section is fixedly connected to the mover of the X-axis linear drive device, and forms a C-shaped notch with the mover of the X-axis linear drive device, the mover of the X-axis linear drive device is the lower structure of the C-shaped notch, the C-shaped notch faces the stator of the X-axis linear drive device, and a slider is installed on the inner groove wall of the C-shaped notch, and the slider is slidably connected to the guide rail of the X-axis linear drive device;

[0017] The second Y-direction extension section is horizontally arranged, one end of the second Y-direction extension section is vertically connected to the X-axis mover connecting section, the other end of the second Y-direction extension section extends along the Y direction, the bottom surface of the second Y-direction extension section is flush with the bottom surface of the C-shaped notch, and the Y guide rail is installed on the bottom surface of the second Y-direction extension section.

[0018] Preferably, the Y-axis robot arm is divided into a Y-axis mover connecting section and a second X-direction extending section, the Y-axis mover connecting section is fixedly connected to the mover of the Y-axis linear drive device, and forms a C-shaped notch with the mover of the Y-axis linear drive device, the mover of the Y-axis linear drive device is the lower structure of the C-shaped notch, the C-shaped notch faces the stator of the Y-axis linear drive device, and a slider is installed on the inner groove wall of the C-shaped notch, and the slider is slidably connected to the guide rail of the Y-axis linear drive device;

[0019] The second X-direction extension section is horizontally arranged, one end of the second X-direction extension section is vertically connected to the Y-axis mover connecting section, the other end of the second X-direction extension section extends along the X-direction, the bottom surface of the second X-direction extension section is flush with the bottom surface of the C-shaped notch, and the first X-direction guide rail is installed on the top surface of the second X-direction extension section.

[0020] Preferably, the linear drive device includes a grating scale and an encoder.

[0021] Preferably, an origin position sensor is provided on the outside of the stator of the linear drive device, and the origin position sensor is located at one side end of the stator along the length direction. The X-axis robotic arm, Y-axis robotic arm and Z-axis robotic arm are respectively provided with a metal sensing part used in conjunction with the corresponding origin position sensor.

[0022] Preferably, the X-axis robotic arm, Y-axis robotic arm, Z-axis robotic arm, XY following platform, XZ following member and mounting block are made of aviation aluminum material.

[0023] The technical solution provided by the present invention can have the following beneficial effects:

[0024] By fixing the X-axis drive assembly, Y-axis drive assembly and Z-axis drive assembly on the workbench, driving the corresponding robotic arms to move along the drive assembly, and coordinating with components that are slidably connected to each other, the execution end of the mechanism can move freely in the space surrounded by the drive assembly and can accurately move to the specified position. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings further illustrate the present invention, but the contents in the accompanying drawings do not constitute any limitation to the present invention.

[0026] Figure 1 It is a structural schematic diagram of an embodiment of the present invention;

[0027] Figure 2 It is a structural schematic diagram of the XY following stage of the present invention;

[0028] Figure 3 It is a structural schematic diagram of the XZ-direction follower and the second X-direction guide rail of the present invention;

[0029] Figure 4 It is a structural schematic diagram of the X-axis drive assembly and the X-axis robotic arm of the present invention;

[0030] Figure 5 It is a schematic structural diagram of the Y-axis drive assembly and the Y-axis robotic arm of the present invention;

[0031] Figure 6 It is a structural schematic diagram of the Z-axis drive assembly and the Z-axis mechanical arm of the present invention.

[0032] in:

[0033] X-axis drive assembly 1;

[0034] X-axis robotic arm 2, Y-guide rail 21, X-axis mover connecting section 22, second Y-direction extension section 23;

[0035] Y-axis drive assembly 3;

[0036] Y-axis robotic arm 4, first X-direction guide rail 41, Y-axis mover connecting section 42, second X-direction extending section 43;

[0037] Z-axis drive assembly 5;

[0038] Z-axis robot arm 6, second X-direction guide rail 61, first Y-direction extension section 62, first X-direction extension section 63;

[0039] XY following stage 7, Z guide rail 71, upper slide 72, lower slide 7;

[0040] XZ follower 8, mounting block 9;

[0041] First slider 10, first Y-direction slide groove 101, first X-direction slide groove 102;

[0042] The mover 111 , the grating scale 222 , the encoder 333 , the origin position sensor 444 and the metal sensing part 555 . DETAILED DESCRIPTION

[0043] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0044] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0045] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0046] The following is combined with Figures 1 to 6 The technical solution of the present invention is further illustrated through specific implementation methods.

[0047] A three-axis linkage actuator includes a workbench, an X-axis drive assembly 1, an X-axis robotic arm 2, a Y-axis drive assembly 3, a Y-axis robotic arm 4, a Z-axis drive assembly 5, a Z-axis robotic arm 6, an XY-direction following stage 7, an XZ-direction following member 8, and a mounting block 9;

[0048] The X-axis drive assembly 1 and the Y-axis drive assembly 3 are respectively mounted on the table top of the workbench, and the Z-axis drive assembly 5 is vertically fixed on the table top of the workbench. The space on the workbench formed by the X-axis drive assembly 1, the Y-axis drive assembly 3 and the Z-axis drive assembly 5 is the moving space of the execution end of the mechanism; the X-axis drive assembly 1 is movably mounted with the X-axis robot 2, the Y-axis drive assembly 3 is movably mounted with the Y-axis robot 4, and the Z-axis drive assembly 5 is movably mounted with the Z-axis robot 6. The X-axis drive assembly 1, the Y-axis drive assembly 3 and the Z-axis drive assembly 5 mounted on the workbench serve as power sources for the three axes. The X-axis drive assembly 1 is used to drive the X-axis robot 2 to reciprocate along the X direction, the Y-axis drive assembly 3 is used to drive the Y-axis robot 4 to reciprocate along the Y direction, and the Z-axis drive assembly 5 is used to drive the Z-axis robot 6 to reciprocate along the Z direction.

[0049] The X-axis robot 2 is provided with a Y guide rail 21, the Y-axis robot is provided with a first X guide rail 41, and the Z-axis robot is provided with a second X guide rail 61. The XY following stage 7 is slidably connected to the Y guide rail 21 and the first X guide rail 41, respectively, so that the XY following stage 7 can move back and forth in the X direction with the X-axis robot 2 and in the Y direction with the Y-axis robot 4, and can move in the X and Y directions simultaneously without affecting each other.

[0050] The XZ follower 8 is slidably connected to the second X-direction guide rail 61. The mounting block 9 is fixed to the XZ follower 8, allowing the XY following stage 7 to drive the mounting block 9 to move within its respective XY plane. Furthermore, the mounting block 9 is slidably connected to the Z-direction guide rail 71 of the XY following stage 7. Therefore, when the Z-axis robot arm 6 moves in the Z direction, the XZ follower 8 drives the mounting block 9 along the Z-direction guide rail 71. In summary, the mounting block 9, as the actuator of this mechanism, can achieve movement within the XYZ spatial range through the linkage of the above-mentioned structure.

[0051] The present invention fixes the X-axis drive assembly, Y-axis drive assembly and Z-axis drive assembly on the table surface of the workbench, and the power supply structures with heavier weight in the three-axis directions are all fixed on the workbench. Through the arrangement of the mechanical arms, guide rails, XZ-direction followers and XY-direction following tables corresponding to the three axes, a lightweight arrangement of the movable parts of the drive structure is achieved, thereby achieving high-speed and high-precision movement.

[0052] In addition, the mounting block 9 includes at least one mounting surface, which can be used to install different components or devices, such as gripping structures, in accordance with specific production and working modes. This allows the target object to be moved from the initial position to the target position within the spatial range of the workbench, and can adapt to many application scenarios.

[0053] Furthermore, the XY following stage 7 is a sliding stage composed of a horizontal stage and a vertical stage connected perpendicularly to each other. The top of the horizontal stage is provided with an upper slide groove 72, which slides onto the Y guide rail 21 via the upper slide groove 72. The bottom of the horizontal stage is provided with a lower slide groove 73, which slides onto the first X guide rail 41 via the lower slide groove 73. This ensures that the XY following stage 7's moving guide rails in the X and Y directions are located on different horizontal planes, equivalent to the XY following stage 7 being sandwiched between the Y guide rail 21 sliding above and the first X guide rail 41 below, making the movement of the XY following stage 7 in its XY plane more stable. Furthermore, the vertical stage is provided with the Z guide rail 71. By providing the horizontal and vertical stages, the tracks on different planes are more compactly integrated into a single structure, resulting in a simple and stable structure.

[0054] Furthermore, the XZ-direction follower 8 is a strip-shaped member whose length direction is parallel to the Y-axis. The XZ-direction follower 8 is slidably connected to the second X-direction guide rail 61 through a first slider 10. The first slider 10 is provided with a first Y-direction slide groove 101 and a first X-direction slide groove 102 that are back to back and perpendicular to each other. The first Y-direction slide groove 101 is opened on the upper surface of the first slider 10. The first Y-direction slide groove 101 is slidably connected to the XZ-direction follower 8. The first X-direction slide groove 102 is opened on the lower surface of the first slider 10. The first X-direction slide groove 102 is slidably connected to the second X-direction guide rail 61.

[0055] Specifically, because this mechanism is a three-axis linkage actuator, the XZ follower 8 must have an elongated strip extending along the Y-axis to contact and slide on the second X-guide rail 61. By providing a first slider 10 to allow the XZ follower 8 to slide on the second X-guide rail 61, the relative sliding of the XZ follower 8 and the second X-guide rail 61 is smoother. Furthermore, the upper and lower surfaces of the first slider 10 are provided with a first Y-direction slot 101 and a first X-direction slot 102, respectively. This effectively restricts the sliding of the XZ follower 8 and the second X-guide rail 61 within the corresponding slots of the first slider 10 during linkage execution, preventing deviation and ensuring more accurate overall movement of the mechanism.

[0056] Furthermore, if Figure 6As shown, the Z-axis robot 6 is divided into a first Y-direction extension section 62 and a first X-direction extension section 63. One end of the first Y-direction extension section 62 is movably connected to the Z-axis drive assembly 5, and the other end of the first Y-direction extension section 62 is vertically connected to the first X-direction extension section 63. The first X-direction extension section 63 is provided with a second X-direction guide rail 61. The height of the plane where the top surface of the first X-direction extension section 63 is located is lower than the plane where the top surface of the first Y-direction extension section 62 is located, and there is an avoidance area between the plane where the top surface of the first X-direction extension section 63 is located and the plane where the top surface of the first Y-direction extension section 62 is located, and the avoidance area is for the XZ-direction follower 8 to pass through.

[0057] Specifically, because the XZ-axis follower 8 slides on the second X-direction guide rail 61 via the first slider 10, and the first slider 10 is connected to the first Y-direction slot 101 and the first X-direction slot 102, the XZ-axis follower 8 and the first slider 10 have a certain thickness as a whole. When the Z-axis drive assembly 5 drives the Z-axis robot 6 to a certain height, the XZ-axis follower 8 may collide with the Y-axis robot 4 mounted on the workbench. However, by providing an avoidance zone for the Z-axis robot 6, the XZ-axis follower 8 always moves within this avoidance zone, reducing the possibility of being affected by other components of the mechanism.

[0058] Furthermore, the X-axis drive assembly 1, the Y-axis drive assembly 3 and the Z-axis drive assembly 5 are all linear drive devices. The linear drive devices in the prior art have a simple and compact structure, fast response speed, high precision, and can be extended to obtain a longer linear drive device by increasing the number of stators; the mover 111 of the linear drive device is connected to the corresponding X-axis robot arm 2, the Y-axis robot arm 4 and the Z-axis robot arm 6, and the stator of the linear drive device is fixed to the workbench. By energizing the stator, an electromagnetic thrust can be generated, and the mover 111 can drive the robot arm to generate high-speed, high-thrust drive; at the same time, since there is no relative friction between the stator and the mover, there is no wear and the service life is longer.

[0059] Furthermore, if Figure 4As shown, the X-axis manipulator 2 is divided into an X-axis mover connecting section 22 and a second Y-direction extension section 23. The X-axis mover connecting section 22 is fixedly connected to the mover 111 of the X-axis linear drive device, and forms a C-shaped notch with the mover 111 of the X-axis linear drive device. The mover 111 of the X-axis linear drive device is the lower structure of the C-shaped notch. The C-shaped notch faces the stator of the X-axis linear drive device. A slider is installed on the inner groove wall of the C-shaped notch, and the slider is slidably connected to the guide rail of the X-axis linear drive device. Specifically, the X-axis manipulator 2 is connected to the mover 111 of the X-axis linear drive device through the X-axis mover connecting section 22, and the X-axis manipulator 2 is driven to move along the X-direction through the mover 111. The X-axis mover connecting section 22 is installed with a slider that can slide along the guide rail of the X-axis linear drive device, so that the linear movement of the X-axis manipulator 2 along the X-axis is guided by the linear guide rail, the movement is not easy to deviate, and the movement in the X-axis direction is more accurate.

[0060] The second Y-direction extension section 23 is arranged horizontally, one end of the second Y-direction extension section 23 is vertically connected to the X-axis mover connecting section 22, the other end of the second Y-direction extension section 23 extends along the Y-direction, and the bottom surface of the second Y-direction extension section 23 is arranged flush with the bottom surface of the C-shaped notch, so that the second Y-direction extension section 23 is closer to the power output end and responds more quickly.

[0061] Similarly, if Figure 5 As shown, the Y-axis robot 4 is divided into a Y-axis mover connecting section 42 and a second X-direction extension section 43. The Y-axis mover connecting section 42 is fixedly connected to the mover 111 of the Y-axis linear drive device, and forms a C-shaped notch with the mover 111 of the Y-axis linear drive device. The mover 111 of the Y-axis linear drive device is the lower structure of the C-shaped notch. The C-shaped notch faces the stator of the Y-axis linear drive device. A slider is installed on the inner groove wall of the C-shaped notch, and the slider is slidably connected to the guide rail of the Y-axis linear drive device. Specifically, the Y-axis robot 4 is connected to the mover 111 of the Y-axis linear drive device through the Y-axis mover connecting section 42, and the Y-axis robot 4 is driven to move along the Y-direction through the mover 111. The Y-axis mover connecting section 42 is installed with a slider that can slide along the guide rail of the Y-axis linear drive device, so that the linear movement of the Y-axis robot 4 along the Y-axis is guided by the linear guide rail, the movement is not easy to deviate, and the movement in the Y-axis direction is more accurate.

[0062] The second X-direction extension section 43 is arranged horizontally, one end of the second X-direction extension section 43 is vertically connected to the Y-axis mover connecting section 42, the other end of the second X-direction extension section 43 extends along the X-direction, and the bottom surface of the second X-direction extension section 43 is arranged flush with the bottom surface of the C-shaped notch, so that the second X-direction extension section 43 is closer to the power output end and responds more quickly.

[0063] In addition, the Y-direction guide rail 21 is arranged on the bottom surface of the second Y-direction extension section 23, and the first X-direction guide rail 41 is arranged on the top surface of the second X-direction extension section 43, which can better adapt to the sliding requirements of the upper slide groove 72 and the lower slide groove 73 of the XY following stage 7, more effectively utilize the space between the X-axis robot arm 2 and the Y-axis robot arm 4, and ensure that the internal structure of the mechanism is compact.

[0064] Furthermore, refer to Figure 5 As shown, the linear drive device includes a grating ruler 222 and an encoder 333. Specifically, after receiving a pulse signal from the controller, the linear drive device amplifies the signal and transmits it to the mover 111 of the linear drive device. The mover 111 moves according to the received pulse signal. At this time, the encoder 333 reads the number of gratings on the grating ruler 222 and feeds back to the controller to ensure that the robot arm moves accurately.

[0065] Furthermore, the three-axis linkage actuator also includes an origin position sensor 444 disposed on the exterior of the stator of the linear drive device. The origin position sensor 444 is located at one of the longitudinal ends of the stator. The X-axis robot arm 2, the Y-axis robot arm 4, and the Z-axis robot arm 6 are each provided with a metal sensing portion 555 for use with the corresponding origin position sensor 444. Specifically, when any robot arm carrying the metal sensing portion 555 moves to the origin position sensor 444, the controller receives a corresponding signal indicating that the position information of the linear drive device has been reset to zero, i.e., returned to its initial position. If the linear drive device subsequently needs to move, the controller then sends a corresponding pulse signal to the mover 111, thereby achieving movement to the precise position.

[0066] Furthermore, the X-axis robotic arm 2, Y-axis robotic arm 4, Z-axis robotic arm 6, XY-axis follower stage 7, XZ-axis follower 8, and mounting block 9 are all fabricated from aircraft aluminum. Due to its lightweight and non-deformable properties, using aircraft aluminum as a key material for the robotic arm reduces the overall weight of the linkage actuator, further improving its movement and response speed.

[0067] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are intended solely to illustrate the principles of the present invention and are not to be construed in any way as limiting the scope of protection of the present invention. Based on the explanations herein, those skilled in the art will readily conceive of other specific embodiments of the present invention without inventive effort, and such embodiments will fall within the scope of protection of the present invention.

Claims

1. A three-axis linkage actuator, characterized in that: Including workbench, X-axis drive assembly, X-axis robotic arm, Y-axis drive assembly, Y-axis robotic arm, Z-axis drive assembly, Z-axis robotic arm, XY following stage, XZ following parts and mounting block; The X-axis drive assembly and the Y-axis drive assembly are respectively mounted on the table top of the workbench, and the Z-axis drive assembly is vertically fixed to the table top of the workbench; the X-axis drive assembly is movably mounted with the X-axis robotic arm, and the X-axis drive assembly is used to drive the X-axis robotic arm to reciprocate along the X direction; the Y-axis drive assembly is movably mounted with the Y-axis robotic arm, and the Y-axis drive assembly is used to drive the Y-axis robotic arm to reciprocate along the Y direction; the Z-axis drive assembly is movably mounted with the Z-axis robotic arm, and the Z-axis drive assembly is used to drive the Z-axis robotic arm to reciprocate along the Z direction; The X-axis robotic arm is provided with a Y guide rail, the Y-axis robotic arm is provided with a first X guide rail, and the Z-axis robotic arm is provided with a second X guide rail; The XY following stage is slidably connected to the Y guide rail and the first X guide rail respectively, and the XY following stage is provided with a Z guide rail; The XZ-direction follower is slidably connected to the second X-direction guide rail, the XZ-direction follower is fixed with the mounting block, the mounting block is slidably connected to the Z-direction guide rail, and the mounting block includes at least one mounting surface.

2. A three-axis linkage actuator according to claim 1, characterized in that: The XY following stage is a sliding stage composed of a horizontal stage and a vertical stage connected perpendicularly to each other. The top of the horizontal stage is provided with an upper slide groove, and the horizontal stage is slid on the Y guide rail through the setting of the upper slide groove. The bottom of the horizontal stage is provided with a lower slide groove, and the horizontal stage is slid on the first X guide rail through the setting of the lower slide groove. The vertical stage is provided with the Z guide rail.

3. The three-axis linkage actuator according to claim 1, characterized in that: The XZ-direction follower is a strip member whose length direction is parallel to the Y-axis. The XZ-direction follower is slidably connected to the second X-direction guide rail through a first slider. The first slider is provided with a first Y-direction slide groove and a first X-direction slide groove facing back to back and perpendicular to each other. The first Y-direction slide groove is opened on the upper surface of the first slider. The first Y-direction slide groove is slidably connected to the XZ-direction follower. The first X-direction slide groove is opened on the lower surface of the first slider. The first X-direction slide groove is slidably connected to the second X-direction guide rail.

4. The three-axis linkage actuator according to claim 3, characterized in that: The Z-axis robotic arm is divided into a first Y-direction extension section and a first X-direction extension section. One end of the first Y-direction extension section is movably connected to the Z-axis drive assembly, and the other end of the first Y-direction extension section is vertically connected to the first X-direction extension section. The first X-direction extension section is provided with a second X-direction guide rail. The plane where the top surface of the first X-direction extension section is located is lower than the plane where the top surface of the first Y-direction extension section is located, and an avoidance zone is formed between the plane where the top surface of the first X-direction extension section is located and the plane where the top surface of the first Y-direction extension section is located, and the avoidance zone is for the XZ-direction follower to pass through.

5. The three-axis linkage actuator according to claim 1, characterized in that: The X-axis drive assembly, Y-axis drive assembly and Z-axis drive assembly are all linear drive devices, the movers of the linear drive devices are connected to the corresponding X-axis robotic arm, Y-axis robotic arm and Z-axis robotic arm, and the stators of the linear drive devices are fixed to the workbench.

6. The three-axis linkage actuator according to claim 5, characterized in that: The X-axis robot arm is divided into an X-axis mover connecting section and a second Y-direction extending section, the X-axis mover connecting section is fixedly connected to the mover of the X-axis linear drive device, and forms a C-shaped notch with the mover of the X-axis linear drive device, the mover of the X-axis linear drive device is the lower structure of the C-shaped notch, the C-shaped notch faces the stator of the X-axis linear drive device, and a slider is installed on the inner groove wall of the C-shaped notch, and the slider is slidably connected to the guide rail of the X-axis linear drive device; The second Y-direction extension section is horizontally arranged, one end of the second Y-direction extension section is vertically connected to the X-axis mover connecting section, the other end of the second Y-direction extension section extends along the Y direction, the bottom surface of the second Y-direction extension section is flush with the bottom surface of the C-shaped notch, and the Y guide rail is installed on the bottom surface of the second Y-direction extension section.

7. The three-axis linkage actuator according to claim 5, characterized in that: The Y-axis robot arm is divided into a Y-axis mover connecting section and a second X-direction extending section, the Y-axis mover connecting section is fixedly connected to the mover of the Y-axis linear drive device, and forms a C-shaped notch with the mover of the Y-axis linear drive device, the mover of the Y-axis linear drive device is the lower structure of the C-shaped notch, the C-shaped notch faces the stator of the Y-axis linear drive device, and a slider is installed on the inner groove wall of the C-shaped notch, and the slider is slidably connected to the guide rail of the Y-axis linear drive device; The second X-direction extension section is horizontally arranged, one end of the second X-direction extension section is vertically connected to the Y-axis mover connecting section, the other end of the second X-direction extension section extends along the X-direction, the bottom surface of the second X-direction extension section is flush with the bottom surface of the C-shaped notch, and the first X-direction guide rail is installed on the top surface of the second X-direction extension section.

8. The three-axis linkage actuator according to claim 5, characterized in that: The linear drive device includes a grating ruler and an encoder.

9. The three-axis linkage actuator according to claim 8, characterized in that: An origin position sensor is provided on the outside of the stator of the linear drive device, and the origin position sensor is located at one side end of the stator along the length direction. The X-axis robotic arm, Y-axis robotic arm and Z-axis robotic arm are respectively provided with a metal sensing part used in conjunction with the corresponding origin position sensor.

10. The three-axis linkage actuator according to claim 1, characterized in that: The X-axis robotic arm, Y-axis robotic arm, Z-axis robotic arm, XY following platform, XZ following member and mounting block are made of aviation aluminum material.

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