Load port apparatus and mapping device therefor

Abstract

A loading port device and a mapping device thereof, the mapping device of the loading port device is adapted to detect a plurality of objects to be tested placed in a container and comprises a first sensing group and a second sensing group. The first sensing group is movable relative to the container along a detection direction, the first sensing group is used to detect the objects to be tested and has a first optical axis. The second sensing group is movable relative to the container along the detection direction and is used to detect the objects to be tested and has a second optical axis inclined relative to the first optical axis, the second optical axis is farther away from the container than the first optical axis and is located in front of the first optical axis in the detection direction. Through the design of the inclination angle of the second optical axis relative to the first optical axis, the inclination angle detection function in three-dimensional space is achieved.

Description

Technical Field

[0001] The present invention relates to an apparatus suitable for manufacturing or processing semiconductor or solid-state devices or components, and particularly to a loading port device and its mapping device. Background Technology

[0002] See Figure 1 The semiconductor mapping device 101 disclosed in Japanese Patent Publication No. 4501755 includes a set of protrusion sensors 12 and a set of scanning sensors 13 mounted on a mapping frame 11. The protrusion sensors 12 and 13 are positioned at the same height, with the protrusion sensors 12 located inside the scanning sensors 13. The protrusion sensors 12 can detect whether the wafer 14 has protrusions (i.e., protruding from its normal position), ensuring that the scanning sensors 13 do not collide with the edge of the wafer 14 during the detection process. However, because the protrusion sensors 12 and 13 are at the same height, when scanning larger wafers (e.g., 12-inch wafers), if the wafer 14 is significantly offset towards the mapping device 101, the scanning sensors 13 may collide with the edge of the wafer 14 during the detection by the protrusion sensors 12, causing breakage.

[0003] See Figure 2 and Figure 3 To address the aforementioned issues, the wafer mapping apparatus 102 disclosed in Taiwan Patent Publication No. I661496B places a set of protrusion sensors 15 below a set of sweep sensors 16. Due to the height difference between the two sets of sensors, protrusions can be detected before the sweep sensors 16 pass the wafer 14, thus preventing collisions. However, protrusion sensors 15 can still collide with the wafer 14. Therefore, the wafer mapping apparatus 102 also includes a third sensor 17 between the protrusion sensors 15 to further prevent collisions.

[0004] However, the wafer mapping device 102 has the problem of having a large number of sensors and complex wiring, and there is still room for improvement. Summary of the Invention

[0005] The purpose of this invention is to provide a mapping device for a loading port device that has both scanning and protrusion detection functions and a simple structure.

[0006] The mapping device for a loading port device of the present invention is suitable for detecting multiple test objects placed in a container. The mapping device for the loading port device includes a first sensing group and a second sensing group. The first sensing group is movable relative to the container along a detection direction, and is used to detect the test objects and has a first optical axis. The second sensing group is movable relative to the container along the detection direction, and is used to detect the test objects and has a second optical axis inclined relative to the first optical axis, the second optical axis being further away from the container than the first optical axis and located ahead of the first optical axis in the detection direction.

[0007] The mapping device for the loading port device of the present invention has a first angle between the projection of the second optical axis and the first optical axis on a plane parallel to the detection direction, and a second angle between the projection of the second optical axis and the first optical axis on a plane perpendicular to the detection direction. The first angle is greater than 0 degrees but not greater than 10 degrees, and the second angle is greater than 0 degrees but not greater than 5 degrees.

[0008] The mapping device for the loading port device of the present invention has a first sensing group having a first sensing element and a second sensing element spaced apart in a left-right direction, the two ends of the first optical axis being the first sensing element and the second sensing element, respectively, and the left-right direction being substantially perpendicular to the detection direction.

[0009] The mapping device for the loading port device of the present invention has a second sensing group having a third sensing element and a fourth sensing element spaced apart in the left-right direction, the two ends of the second optical axis being the third sensing element and the fourth sensing element respectively, and the span between the fourth sensing element and the third sensing element in the left-right direction being less than the span between the first sensing element and the second sensing element in the left-right direction.

[0010] The mapping device for the loading port device of the present invention has a second sensing group having a third sensing element and a fourth sensing element spaced apart in the left-right direction, the two ends of the second optical axis being the third sensing element and the fourth sensing element, respectively, the fourth sensing element being further away from the first optical axis than the third sensing element in the detection direction, and the span between the fourth sensing element and the third sensing element in the detection direction being smaller than the span between the first sensing element and the third sensing element in the detection direction.

[0011] The mapping device for the loading port device of the present invention has a second sensing group having a third sensing element and a fourth sensing element spaced apart in the left-right direction, the two ends of the second optical axis being the third sensing element and the fourth sensing element, respectively, and the left-right direction being substantially perpendicular to the detection direction.

[0012] The mapping device for a loading port device of the present invention includes a container having a plurality of spacers spaced apart, wherein the span between the third sensing element and the fourth sensing element in the detection direction is not greater than twice the spacing between the spacers.

[0013] The mapping device for the loading port device of the present invention has a fourth sensor that is further away from the first optical axis in the detection direction than the third sensor, and the fourth sensor is further away from the first optical axis in the front-back direction than the third sensor, the front-back direction being substantially perpendicular to the left-right direction and the detection direction.

[0014] The mapping device for the loading port device of the present invention further includes a movable base, the movable base being movable along the detection direction and including a base body and a support being pivotable or movable relative to the base body, wherein the first sensing group and the second sensing group are disposed on the support.

[0015] Another objective of this invention is to provide a loading port device that has both scanning and protrusion detection functions and a simple structure.

[0016] The loading port device of the present invention is suitable for detecting multiple test objects placed inside a container. The loading port device includes a base and a mapping device as described above. The base is used to place the container. The mapping device is movable relative to the base along the detection direction.

[0017] The advantages of this invention are as follows: By designing the second optical axis at an angle relative to the first optical axis, the two optical axes are configured asymmetrically with different heights, depths, and angles. This allows the second optical axis to be further away from the container than the first optical axis and positioned in front of the first optical axis in the detection direction. This avoids interference between the two and achieves angled detection in three-dimensional space, while also providing dual functionality for scanning and protrusion detection. This invention has fewer sensing components, a simple structure that is easy to wire, and reduces the area of ​​interference between sensors. Furthermore, this invention can perform scanning and protrusion detection on objects of different sizes, thus offering excellent applicability. Attached Figure Description

[0018] Other features and effects of the present invention will be clearly presented in the embodiments with reference to the accompanying drawings, wherein:

[0019] Figure 1 This is a three-dimensional schematic diagram illustrating the semiconductor mapping device disclosed in Japanese Patent Publication No. 4501755;

[0020] Figure 2 This is a planar schematic diagram illustrating the wafer mapping device of Taiwan Invention Patent Publication No. I661496B.

[0021] Figure 3 This is a side view schematic diagram of the wafer mapping device according to Taiwan Invention Patent Publication No. I661496B.

[0022] Figure 4 This is a perspective view of an embodiment of the loading port device of the present invention;

[0023] Figure 5 This is an incomplete side view of the embodiment described;

[0024] Figure 6 This is an incomplete partial cross-sectional schematic diagram of the embodiment, illustrating that a mapping device of the embodiment is located in a closed position relative to a base;

[0025] Figure 7 This is an incomplete rear view of the embodiment, illustrating that a lifting mechanism of the embodiment is disposed on the base;

[0026] Figure 8 It is similar to Figure 6 A partial cross-sectional schematic diagram illustrates that the mapping device is moved to an open position relative to the base, and one of the supports of the mapping device can pivot relative to a base body;

[0027] Figure 9 This is an exploded perspective view of the mapping device, illustrating that a support drive assembly of the mapping device is used to drive the support to pivot.

[0028] Figure 10 This is a perspective view illustrating that a first sensing group and a second sensing group of the mapping device are disposed on the support.

[0029] Figure 11 This is a schematic diagram illustrating that a first optical axis of the first sensing group and a second optical axis of the second sensing group are used to detect multiple objects to be measured.

[0030] Figure 12 This is a partial cross-sectional schematic diagram, illustrating that the first optical axis and the second optical axis are used for scanning the plate and detecting the protrusion, respectively.

[0031] Figure 13 This is a schematic diagram illustrating the positional configuration of the first optical axis and the second optical axis in three-dimensional space;

[0032] Figure 14 It is similar to Figure 11 A schematic diagram illustrating that the mapping device is used to detect the small-sized object to be measured; and

[0033] Figure 15 It is similar to Figure 12The diagram illustrates that the first sensing group and the second sensing group are used to scan the plate and detect the protrusion, respectively. Detailed Implementation

[0034] See Figures 4 to 6 This invention provides an embodiment of a loadport device suitable for testing multiple test objects 91 placed within a container 9. The container 9 has a container opening 92 and multiple spacers 93 located inside and equally spaced, with the spacing between the spacers 93 defined as S. The spacers 93 are used to place the test objects 91. In this embodiment, a 12-inch wafer cassette is used as an example of the container 9; therefore, each test object 91 is a 12-inch wafer. The container 9 has a cover (not shown) for closing the container opening 92. The test objects 91 are not limited to wafers; they can also be semiconductor-related substrates or semi-finished products. The loadport device includes a base 2, a lifting mechanism 3, an opening / closing mechanism 4, and a mapping device 500.

[0035] The base 2 includes a main board 21 extending along a height direction Z, and a platform 22 disposed on the main board 21. The main board 21 has a loading opening 211 and a fixed sensor 212 disposed on the loading opening 211. The fixed sensor 212 is used to detect whether the test object 91 inside the container 9 protrudes from the container 9. In this embodiment, the fixed sensor 212 is a transmissive light sensor. The platform 22 is located behind the main board 21 in a front-rear direction X perpendicular to the height direction Z. The container 9 is placed on the platform 22 with its opening 92 opposite to the loading opening 211.

[0036] See Figures 5 to 7The lifting mechanism 3 is disposed on the main board 21 of the base 2 and located below the platform 22. In this embodiment, the lifting mechanism 3 includes a lifting drive device 31, two guide rails 32, and a slide 33. The lifting drive device 31 in this embodiment has a lead screw 311 extending along the height direction Z and rotatable about its own axis, and a lifting driver 312 connected to the bottom end of the lead screw 311 and used to drive the lead screw 311 to rotate. The lifting driver 312 is a motor. The guide rails 32 extend along the height direction Z and are spaced apart on the main board 21 in a left-right direction Y perpendicular to the height direction Z and the front-back direction X. The slide 33 is connected to the lead screw 311 and slidably disposed on the guide rails 32. The slide 33 is driven by the lead screw 311 and can move up and down along the guide rails 32. In some variations, the lifting drive device 31 may also be a pneumatic cylinder, an electric cylinder, a linear motor, a belt drive, a rack and pinion drive, or a similar component, which can also drive the slide 33 to move up and down.

[0037] See Figures 6 to 8 The opening and closing mechanism 4 is disposed on the slide 33 of the lifting mechanism 3. The opening and closing mechanism 4 includes an opening and closing actuator 41. In this embodiment, the opening and closing actuator 41 is a pneumatic cylinder, but it can also be replaced by an electric cylinder, a motor-driven screw, a belt drive, a gear and rack drive, or similar components. The opening and closing actuator 41 has a drive body 411 disposed on the slide 33 and a piston rod 412 retractably disposed on the drive body 411. The piston rod 412 can extend and retract along the front-rear direction X.

[0038] The mapping device 500 is connected to one end of the piston rod 412 of the opening and closing mechanism 4, and is driven by the piston rod 412 of the opening and closing driver 41 to move along the front-rear direction X. The mapping device 500 includes a movable base 5 fixed to the piston rod 412, and a first sensing group 6 and a second sensing group 7 disposed at the top of the movable base 5. The mapping device 500 is driven by the opening and closing mechanism 4 to be in a closed position relative to the base 2 (see...). Figure 6 ) and an open position (see Figure 8 The movable seat 5 moves between the closed and open positions. When in the closed position, the movable seat 5 covers the loading opening 211 of the motherboard 21. When in the open position, the movable seat 5 moves away from the loading opening 211 by a certain distance, so that the loading opening 211 is exposed.

[0039] See Figures 8 to 10The movable seat 5 includes a seat body 51 fixed to and driven by the piston rod 412, a bracket 52 pivotally mounted on the top of the seat body 51, and a bracket drive assembly 53 mounted on the seat body 51 for driving the bracket 52 to pivot. The seat body 51 has an internal space for mounting the bracket drive assembly 53. The bracket 52 has two side rods 521 pivotally mounted on both sides of the seat body 51, and a crossbar 522 extending along the left-right direction Y and connected to the side rods 521. The bracket drive assembly 53 has a bracket driver 531 fixed to the seat body 51, and a rotating shaft 532 extending from the bracket driver 531 along the left-right direction Y, one end of which is connected to one of the side rods 521. The bracket driver 531 drives the rotating shaft 532 to rotate, which in turn causes the bracket 52 to pivot relative to the base body 51, thereby causing the crossbar 522 of the bracket 52 to move closer to or further away from the loading opening 211 of the base 2.

[0040] To prevent the first sensing group 6 and the second sensing group 7 from impacting and damaging the lid of the container 9 when the mapping device 500 moves to the closed position, the bracket 52 is designed to pivot relative to the base body 51. It is understood that the bracket 52 can also be designed to move horizontally relative to the base body 51, thus avoiding the impact problem. In some applications, such as when the container 9 is front-opening and has no lid, there is no need to avoid impact, and the bracket 52 can be designed to be fixed. In this case, the first sensing group 6 uses a reflective light sensor.

[0041] See Figure 8 , Figure 10 and Figure 11The first sensing group 6 and the second sensing group 7 are disposed on the crossbar 522 of the support 52 and are used to move relative to the container 9 along a detection direction D to detect the object to be tested 91. The detection direction D is parallel to the height direction Z, so the detection direction D is substantially perpendicular to the left-right direction Y and the front-back direction X. In this embodiment, the moving seat 5 advances gradually from top to bottom along the detection direction D. The first sensing group 6 has a first sensing element 61 and a second sensing element 62 spaced apart in the left-right direction Y. The first sensing element 61 and the second sensing element 62 are at the same position in the height direction Z. The first sensing element 61 and the second sensing element 62 form a first optical axis 601 substantially perpendicular to the detection direction D, that is, the two ends of the first optical axis 601 are the first sensing element 61 and the second sensing element 62, respectively. The first optical axis 601 is used to scan the sample to detect whether the object under test 91 has missing pieces, overlapping pieces, oblique pieces, or related information such as its thickness. In this embodiment, the first sensing group 6 is a transmissive light sensor, the first sensing element 61 is a light emitter, and the second sensing element 62 is a light receiver, but their positions can be interchanged and are not limited thereto. In other variations, the first sensing group 6 can also be other types of light sensors, such as reflective light sensors, as long as they can sense objects.

[0042] The second sensing group 7 is lower than the first sensing group 6 in the height direction Z, and has a third sensing element 71 and a fourth sensing element 72 spaced apart in the left-right direction Y. In this embodiment, the second sensing group 7 is a transmissive light sensor, the third sensing element 71 is a light emitter, and the fourth sensing element 72 is a light receiver, but their positions can be interchanged and are not limited thereto.

[0043] The third sensor 71 is adjacent to the first sensor 61 and is positioned lower than the first sensor 61 in the height direction Z. The fourth sensor 72 is adjacent to the second sensor 62 and is positioned lower than the second sensor 62 in the height direction Z. The fourth sensor 72 is positioned lower than the third sensor 71 in the height direction Z. In this embodiment, the span L1 between the fourth sensor 72 and the third sensor 71 in the left-right direction Y is less than the span L2 between the first sensor 61 and the second sensor 62 in the left-right direction Y. Since there is a height difference between the first sensing group 6 and the second sensing group 7 in the height direction Z, in other variations, the span L1 between the fourth sensor 72 and the third sensor 71 in the left-right direction Y can also be greater than or equal to the span L2 between the first sensor 61 and the second sensor 62 in the left-right direction Y, and is not limited thereto.

[0044] See Figures 10 to 12 The third sensing element 71 and the fourth sensing element 72 form a second optical axis 701, meaning that the two ends of the second optical axis 701 are the third sensing element 71 and the fourth sensing element 72, respectively. The second optical axis 701 is used to detect whether the position of the object to be tested 91 protrudes beyond its normal position (i.e., a protrusion). To prevent the fourth sensing element 72, located at the lowest point in the height direction Z, from hitting too many protruding objects to be tested 91 before detecting the protrusion, the second optical axis 701 is tilted relative to the first optical axis 601 in three-dimensional space. The projections of the second optical axis 701 and the first optical axis 601 on a plane parallel to the detection direction D (i.e., the YZ plane) form a first angle A1, and the projections of the second optical axis 701 and the first optical axis 601 on a plane perpendicular to the detection direction D (i.e., the XY plane) form a second angle A2. The first angle A1 is greater than 0 degrees but not greater than 15 degrees, and the second angle A2 is greater than 0 degrees but not greater than 10 degrees. To achieve a better configuration, for example, the position of the fourth sensing element 72 in the front-rear direction X is designed so as not to interfere with the fixed sensor 212 (see...). Figure 8 The maximum offset of the protrusion is used as a reference, so that the first included angle A1 is no greater than 10 degrees and the second included angle A2 is no greater than 5 degrees.

[0045] Since the second optical axis 701 needs to move ahead of the first optical axis 601 to detect whether the object to be tested 91 has a protrusion before the first sensing group 6 arrives, thus avoiding impact, the second optical axis 701 needs to be located ahead of the first optical axis 601 in the detection direction D, and the second optical axis 701 needs to be farther away from the container 9 than the first optical axis 601. In this embodiment, the moving seat 5 moves from top to bottom along the detection direction D, meaning that the second optical axis 701 is lower than the first optical axis 601 in the height direction Z. Therefore, the fourth sensing element 72 is farther away from the first optical axis 601 in the detection direction D than the third sensing element 71, and the fourth sensing element 72 is farther away from the first optical axis 601 in the front-back direction X than the third sensing element 71. Of course, in other embodiments, the moving seat 5 can also move from bottom to top along the detection direction D. In this case, the second optical axis 701 needs to be designed to be higher than the first optical axis 601 in the height direction Z, so that it can move ahead of the first optical axis 601 to detect the protrusion and avoid impact.

[0046] See Figure 6 , Figure 8 and Figure 11In this embodiment, to prevent the fourth sensor 72 from colliding with the container 9 when the mapping device 500 moves to the bottommost object 91, the span L3 between the third sensor 71 and the fourth sensor 72 in the detection direction D is no greater than twice the distance S of the spacer 93. Furthermore, to ensure that the second sensing group 7 can detect the topmost object 91 within the container 9, it is more appropriate to design the span L3 between the fourth sensor 72 and the third sensor 71 in the detection direction D to be smaller than the span L4 between the first sensor 61 and the third sensor 71 in the detection direction D.

[0047] See Figure 13 The schematic diagram of the optical axis makes it clearer how the relative positions of the first optical axis 601 and the second optical axis 701 are in three-dimensional space. The present invention designs the second optical axis 701 and the first optical axis 601 into an asymmetrical configuration with different heights, depths and angles, which can not only avoid mutual interference between the two, but also achieve the function of oblique angle detection in three-dimensional space.

[0048] See Figure 5 and Figure 8 During testing, the lifting mechanism 3 drives the mapping device 500 to descend to a position close to the top of the container 9, and then the opening and closing mechanism 4 moves the mapping device 500 to the open position, driving the support drive assembly 53 (see...). Figure 9 The support 52 is pivoted toward the container 9, causing the first sensing group 6 and the second sensing group 7 to extend into the container opening 92. Then, the lifting mechanism 3 is driven to move the mapping device 500 gradually downwards along the detection direction D, causing the first sensing group 6 and the second sensing group 7 to move relative to the container 9 to detect the object to be tested 91.

[0049] See Figure 12 In the figure, the solid line represents the test object 91 in its normal position, and the dashed line represents the test object 91 protruding from its normal position (i.e., protrusion). The second optical axis 701 can detect the test object 91 indicated by the dashed line first, and then issue a warning signal or stop the device for inspection to prevent the second sensing element 62 of the first sensing group 6 from colliding with the test object 91 (i.e., protrusion). As long as there is no protrusion, the first optical axis 601 can scan the surface to obtain relevant information about the test object 91 (missing piece, stacked piece, oblique piece, or thickness, etc.). Therefore, the mapping device 500 of the present invention can achieve the dual function of surface scanning and protrusion detection through the first sensing group 6 and the second sensing group 7. Compared with existing devices that require three sets of sensors for surface scanning and protrusion detection, the present invention has fewer sensing components, a simpler structure, easier wiring, and can reduce the area of ​​mutual interference between sensors.

[0050] See Figure 14 and Figure 15 In addition to detecting 12-inch wafers, this embodiment can also detect smaller test objects 91, such as, but not limited to, 8-inch wafers. By driving the mapping device 500 to the open position and extending the first sensing group 6 and the second sensing group 7 into the container 9, the first sensing group 6 and the second sensing group 7 can be gradually moved relative to the container 9 to detect the test object 91.

[0051] Figure 15 Solid lines represent the test object 91 in its normal position, while dashed lines represent test objects 91 protruding from their normal position (i.e., protrusions). The second optical axis 701 can detect test objects 91 protruding from their normal position. As long as no protrusions are detected, the first optical axis 601 will continue scanning. This invention can scan test objects 91 of different sizes and detect protrusions, offering excellent applicability.

[0052] In summary, this invention, through its oblique angle design of the second optical axis 701 relative to the first optical axis 601, creates an asymmetrical configuration where the second optical axis 701 and the first optical axis 601 differ in height, depth, and angle. This allows the second optical axis 701 to be further away from the container 9 than the first optical axis 601 and positioned in front of the first optical axis 601 in the detection direction D. This achieves oblique angle detection in three-dimensional space, thus providing a dual function of scanning and protrusion detection. This invention has fewer sensing components, a simple structure, and is easy to wire, reducing the area of ​​interference between sensors. Furthermore, it can perform scanning and protrusion detection on the test object 91 of different sizes, demonstrating excellent applicability and effectively achieving the objectives of this invention.

[0053] The above description is merely an embodiment of the present invention and should not be construed as limiting the scope of the present invention. Any simple equivalent changes and modifications made in accordance with the claims and description of the present invention shall still fall within the scope of the present invention.

Claims

1. A mapping device for loading port equipment, suitable for detecting multiple test objects placed in a container, characterized in that: The mapping device for the loading port device includes: A first sensing group, movable relative to the container along a detection direction, is used to detect the object to be tested and has a first optical axis; and The second sensing group is movable relative to the container along the detection direction. The second sensing group is used to detect the object to be tested and has a second optical axis that is tilted relative to the first optical axis. The second optical axis is farther away from the container than the first optical axis and is located in front of the first optical axis in the detection direction.

2. The mapping device for loading port devices according to claim 1, characterized in that: The projection of the second optical axis onto the first optical axis on a plane parallel to the detection direction forms a first angle, and the projection of the second optical axis onto the first optical axis on a plane perpendicular to the detection direction forms a second angle. The first angle is greater than 0 degrees but not greater than 10 degrees, and the second angle is greater than 0 degrees but not greater than 5 degrees.

3. The mapping device for loading port devices according to claim 1, characterized in that: The first sensing group has a first sensing element and a second sensing element spaced apart in the left-right direction, the two ends of the first optical axis are the first sensing element and the second sensing element respectively, and the left-right direction is substantially perpendicular to the detection direction.

4. The mapping device for loading port devices according to claim 3, characterized in that: The second sensing group has a third sensing element and a fourth sensing element spaced apart in the left-right direction. The two ends of the second optical axis are the third sensing element and the fourth sensing element, respectively. The span between the fourth sensing element and the third sensing element in the left-right direction is smaller than the span between the first sensing element and the second sensing element in the left-right direction.

5. The mapping device for loading port devices according to claim 3, characterized in that: The second sensing group has a third sensing element and a fourth sensing element spaced apart in the left-right direction. The two ends of the second optical axis are the third sensing element and the fourth sensing element, respectively. The fourth sensing element is farther away from the first optical axis than the third sensing element in the detection direction. The span between the fourth sensing element and the third sensing element in the detection direction is smaller than the span between the first sensing element and the third sensing element in the detection direction.

6. The mapping device for loading port devices according to claim 1, characterized in that: The second sensing group has a third sensing element and a fourth sensing element spaced apart in the left-right direction, and the two ends of the second optical axis are the third sensing element and the fourth sensing element, respectively. The left-right direction is substantially perpendicular to the detection direction.

7. The mapping device for loading port devices according to claim 6, characterized in that: The container has multiple spacers spaced apart, and the span between the third sensing element and the fourth sensing element in the detection direction is no greater than twice the spacing between the spacers.

8. The mapping device for loading port devices according to claim 6, characterized in that: The fourth sensor is further away from the first optical axis in the detection direction than the third sensor, and the fourth sensor is further away from the first optical axis in the front-back direction than the third sensor, the front-back direction being substantially perpendicular to the left-right direction and the detection direction.

9. The mapping device for loading port devices according to claim 1, characterized in that: The mapping device for the loading port device further includes a movable base, which is movable along the detection direction and includes a base body and a support that is pivotable or movable relative to the base body, wherein the first sensing group and the second sensing group are disposed on the support.

10. A loading port device suitable for detecting multiple test objects placed inside a container, characterized in that: The loading port device includes: A base for placing the container; and The mapping device for the loading port device according to claim 1 is movable relative to the base along the detection direction.

Images