A megasonic composite water guided laser processing device and method

Abstract

The application provides a megasonic composite water guide laser processing device and method, which comprises a shell, a light transmission sheet, a megasonic generating assembly and a laser generating assembly. The shell has a coupling cavity, the coupling cavity has a water inlet, a water outlet and a light inlet; the light transmission sheet is arranged at the light inlet; the megasonic generating assembly is arranged at the side of the light transmission sheet away from the water outlet; the laser generating assembly comprises a laser generator and a focusing field lens, the focusing field lens is arranged at the side of the megasonic generating assembly away from the light transmission sheet, the laser generator is used for emitting a laser beam, and the focal point of the converged light beam of the laser beam after passing through the focusing field lens corresponds to the water outlet. The shell, the light transmission sheet, the laser generating assembly and the megasonic generating assembly are combined, the processing precision and the processing efficiency of the water guide laser processing microstructure, especially the large aspect ratio structure, can be improved, during use, the megasonic composite water jet promotes the rapid discharge of ablation products, improves the limit aspect ratio of the processed structure, and also helps to improve the surface quality and the processing precision.

Description

Technical Field

[0001] This invention belongs to the field of laser processing technology, specifically relating to a mega-acoustic composite water-guided laser processing device and method. Background Technology

[0002] Laser processing is a method that uses a high-power-density laser beam to irradiate the material being processed, creating a narrow kerf as the beam moves. Traditional laser processing suffers from problems such as spatter and residue buildup in the processing area, the formation of a recast layer, a heat-affected zone on the processed surface, and large taper. To address these issues, existing technologies employ water-guided laser processing, using a fine water jet to guide the laser beam. Compared to traditional laser processing methods, this offers advantages such as a smaller heat-affected zone and cleaner kerfs.

[0003] When using water-guided lasers to process workpieces, ablation products are generated inside the structure. These ablation products are multiphase products containing solid, liquid, and plasma states. As the processing depth increases, existing water-guided laser technologies face difficulties in removing these ablation products when processing structures with large aspect ratios. Firstly, the ablation products affect the laser propagation path, preventing the laser from reaching deeper locations. This problem restricts the development of water-guided lasers for processing even larger aspect ratios. Secondly, the inability to remove the ablation products, upon solidification, affects the surface quality and processing accuracy of the processed area, making it difficult to meet the required aspect ratio and processing accuracy for microstructures or devices. Summary of the Invention

[0004] This invention provides a mega-sound composite water-guided laser processing device and method, aiming to solve the problems that the development of existing water-guided laser processing methods is limited in the direction of processing with a larger aspect ratio, and that ablation products affect the processing quality and accuracy.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] In a first aspect, the present invention provides a megaacoustic composite water-guided laser processing apparatus, comprising:

[0007] The housing has a coupling cavity extending in a predetermined direction, with a water outlet on one side and a light inlet on the other side, and the housing has a water inlet communicating with the coupling cavity.

[0008] A light-transmitting sheet is disposed at the light inlet;

[0009] A megahertz generator assembly is disposed on the side of the light-transmitting sheet opposite to the water outlet, and has a first clearance hole that extends along the preset direction and corresponds to the light inlet; and

[0010] The laser generating assembly includes a laser generator and a focusing field lens. The focusing field lens is located on the side of the megasonic generating assembly away from the light-transmitting sheet. The laser generator is used to emit a laser beam along the preset direction. The focal point of the laser beam after being converged by the focusing field lens corresponds to the water outlet.

[0011] In one possible implementation, the housing is further provided with a receiving cavity on the side opposite to the water outlet, the light inlet is connected to the receiving cavity and the coupling cavity, and the light-transmitting sheet and the megaphonic generating component are respectively housed in the receiving cavity.

[0012] In one possible implementation, the mega-acoustic composite water-guided laser processing device further includes a fixed top cover, which is disposed in the receiving cavity and has a second clearance hole that extends along the preset direction. The second clearance hole communicates with the light inlet along the preset direction, and the fixed top cover abuts against the side of the light-transmitting sheet opposite to the water outlet.

[0013] In one possible implementation, a receiving groove is formed on the side of the second clearance hole adjacent to the light-transmitting sheet, the megaphonic generating component is housed in the receiving groove, and the fixed top cover is also provided with a wire hole communicating with the receiving groove.

[0014] In one possible implementation, the mega-acoustic composite water-guided laser processing device further includes a water cavity nozzle, one end of which is connected to the water outlet, and the other end is housed in the coupling cavity. The end of the water cavity nozzle housed in the coupling cavity is spaced at a predetermined distance from the inner wall of the coupling cavity to form a flow chamber for water supply.

[0015] The water cavity nozzle extends along the preset direction to form a water spray channel. The flow chamber connects the water inlet and the water spray channel. The focal point of the laser beam, after passing through the focusing lens, is located within the water spray channel.

[0016] In one possible implementation, the housing has a plurality of water inlets along the circumference of the flow chamber.

[0017] In one possible implementation, the megaacoustic composite water-guided laser processing device further includes a high acoustic impedance wedge, which is disposed in the coupling cavity and has a guide channel opened along the preset direction. The end of the guide channel adjacent to the megaacoustic generating component forms a conical guide cavity.

[0018] In one possible implementation, the megaacoustic composite water-guided laser processing device further includes a movable arm, wherein the housing, the megaacoustic generating component, and the laser generating component are respectively disposed on the movable arm.

[0019] In one possible implementation, the frequency of the megaphonic generator component is ≥1MHz.

[0020] Compared with the prior art, the beneficial effects of the megaacoustic composite water-guided laser processing device provided by the present invention are:

[0021] The megasonic composite water-guided laser processing device provided by this invention includes a housing, a light-transmitting plate, a laser generating component, and a megasonic generating component. The housing has a coupling cavity, which has a light inlet, a water inlet, and a water outlet. In use, the coupling cavity is connected to a water source through the water inlet, forming a water jet that exits from the water outlet and is sprayed onto the workpiece to be processed. The light-transmitting plate is located at the light inlet, ensuring that the laser beam can pass through while preventing water leakage from the coupling cavity through the light inlet. The laser generating component emits a laser beam into the coupling cavity. The laser beam is focused into the coupling cavity by a focusing lens and can undergo total internal reflection along the water jet. Finally, the laser beam acts on the workpiece to process it. The megasonic generating component generates megasonic waves. When these megasonic waves act on the workpiece, the megasonic composite water jet allows for the rapid removal of ablation products, enabling the processing of structures with larger aspect ratios. The ablation products do not solidify in the processing area after removal, which also helps improve surface quality and processing accuracy. On the other hand, high-frequency megasonic waves have the characteristics of high sound intensity and low cavitation, which can allow megasonic waves to intervene between micro and nano structures while avoiding secondary damage to the workpiece surface or microstructure. This enables precision machining and meets the machining accuracy requirements of microstructures or devices with large aspect ratios.

[0022] This invention combines a housing, a light-transmitting sheet, a laser generating assembly, and a megasonic generating assembly, significantly improving the processing accuracy and efficiency of water-guided laser machining of microstructures, especially those with large aspect ratios. During use, the megasonic wave combined with the water jet allows for the smooth removal of ablation products, eliminating their obstruction to laser beam transmission and enabling the machining of structures with even larger aspect ratios. The combined effect of the megasonic wave and the water jet ensures the smooth removal of ablation products without causing secondary damage to the workpiece, making it suitable for the precision machining of microstructures and high-precision products with large aspect ratios, thus helping to ensure the performance of microstructure devices.

[0023] In a second aspect, the present invention provides a megaacoustic composite water-guided laser processing method, implemented using a megaacoustic composite water-guided laser processing apparatus as described in any of the above embodiments, comprising the following steps:

[0024] The housing, the light-transmitting sheet, the megaphonic generator assembly, and the laser generator assembly are assembled into the megaphonic composite water-guided laser processing device.

[0025] The workpiece is fixed, deionized water is introduced into the water inlet, and the megohmmeter generator and the laser generator are activated so that the laser beam acts on the surface of the workpiece through the water jet to process the workpiece.

[0026] The mega-acoustic composite water-guided laser processing method provided by the present invention is implemented using the mega-acoustic composite water-guided laser processing device provided in any of the above implementation methods, and has the same technical effect as it, which will not be described in detail here. Attached Figure Description

[0027] Figure 1 A schematic diagram illustrating the working principle of a megaacoustic composite water-guided laser processing device according to one embodiment of the present invention;

[0028] Figure 2 A schematic diagram of the structure of a megaacoustic composite water-guided laser processing device provided in one embodiment of the present invention. Figure 1 ;

[0029] Figure 3 A schematic diagram of the structure of a megaacoustic composite water-guided laser processing device provided in one embodiment of the present invention. Figure 2 ;

[0030] Figure 4 This is a perspective sectional view of the housing in one embodiment of the present invention;

[0031] Figure 5 This is a perspective sectional view of the fixed top cover in one embodiment of the present invention;

[0032] Figure 6 This is a perspective sectional view of a water cavity nozzle in one embodiment of the present invention;

[0033] Figure 7 This is a schematic diagram of the structure of a high acoustic impedance wedge in one embodiment of the present invention;

[0034] Figure 8 This is a schematic diagram showing the laser beam and water jet acting on the workpiece surface during operation of a mega-acoustic composite water-guided laser processing device according to one embodiment of the present invention.

[0035] Figure 9 This is a schematic diagram of the total internal reflection of the laser beam in a water jet during operation of a mega-acoustic composite water-guided laser processing device provided in one embodiment of the present invention.

[0036] Explanation of reference numerals in the attached figures:

[0037] 1. A mega-acoustic composite water-guided laser processing device; 2. A workpiece;

[0038] 10. Shell; 11. Coupling cavity; 12. Water outlet; 13. Light inlet; 14. Water inlet; 15. Receiving cavity;

[0039] 20. Transparent sheet;

[0040] 30. Megasound generator assembly;

[0041] 40. Laser generating assembly; 41. Laser beam; 42. Focusing lens;

[0042] 50. Fixed top cover; 51. Second clearance hole; 52. Threading hole; 53. Receiving groove;

[0043] 60. Water chamber nozzle; 61. Flow chamber; 62. Water spray channel;

[0044] 70. High acoustic impedance wedge; 71. Guide channel; 72. Guide cavity. Detailed Implementation

[0045] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0046] It should be noted that when an element is referred to as "fixed to," "fixed," or "attached" to another element, it can be directly on the other element or may have an intervening element. When an element is referred to as "connected to" or "connected to" another element, it can be directly connected to the other element or may have an intervening element. When an element is referred to as "set on" or "located on" another element, it can be directly on the other element or may have an intervening element. "Multiple" refers to two or more items. "At least one" refers to one or more items. "Several" refers to one or more items.

[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0048] Please refer to the following: Figures 1 to 9 The following describes a megaacoustic composite water-guided laser processing device 1 and method provided by an embodiment of the present invention.

[0049] Please see Figures 1 to 4In a first aspect, embodiments of the present invention provide a megaacoustic composite water-guided laser processing device 1, comprising a housing 10, a light-transmitting plate 20, a megaacoustic generating component 30, and a laser generating component 40. The housing 10 has a coupling cavity 11 extending along a predetermined direction, with a water outlet 12 formed on one side of the coupling cavity 11 and a light inlet 13 formed on the other side. The housing 10 has a water inlet 14 communicating with the coupling cavity 11. The light-transmitting plate 20 is disposed at the light inlet 13. The megaacoustic generating component 30 is disposed on the side of the light-transmitting plate 20 away from the water outlet 12 and has a first clearance hole extending along a predetermined direction and corresponding to the light inlet 13. The laser generating component 40 includes a laser generator and a focusing lens 42. The focusing lens 42 is disposed on the side of the megaacoustic generating component 30 away from the light-transmitting plate 20. The laser generator is used to emit a laser beam 41 along a predetermined direction, and the focal point of the laser beam 41 after being converged by the focusing lens 42 corresponds to the water outlet 12.

[0050] Compared with the prior art, the beneficial effects of the megaacoustic composite water-guided laser processing device 1 provided in this embodiment of the invention are:

[0051] The megaacoustic composite water-guided laser processing device provided in this embodiment of the invention includes a housing 10, a light-transmitting plate 20, a laser generating component 40, and a megaacoustic generating component 30. The housing 10 has a coupling cavity 11, which has a light inlet 13, a water inlet 14, and a water outlet 12. In use, the coupling cavity 11 is connected to a water source through the water inlet 14, forming a water jet that is ejected from the water outlet 12 and sprayed onto the surface of the workpiece 2 to be processed. The light-transmitting plate 20 is disposed at the light inlet 13, which on the one hand ensures that the laser beam 41 can pass through, and on the other hand prevents water in the coupling cavity 11 from leaking out of the light inlet 13. The laser generating component 40 is used to emit a laser beam 41 into the coupling cavity 11. The laser beam 41 is focused into the coupling cavity 11 by a focusing field lens 42 and can be conducted along the water jet. Finally, the laser beam 41 acts on the workpiece 2 to process the workpiece 2.

[0052] The megasonic generator component 30 can generate megasonic waves. When these megasonic waves act on the workpiece 2, on the one hand, the megasonic wave combined with the water jet can rapidly remove ablation products. These ablation products will not interfere with the transmission of the laser beam 41, enabling the processing of structures with larger aspect ratios. Furthermore, the ablation products will not solidify in the processing area after removal, which also helps improve surface quality and processing accuracy. On the other hand, the high-frequency megasonic waves have the characteristics of high sound intensity and low cavitation, allowing them to intervene between micro and nanostructures while avoiding secondary damage to the surface or microstructure of the workpiece 2. This enables precision machining, meeting the processing accuracy requirements of microstructures or devices with large aspect ratios.

[0053] This invention combines the housing 10, the light-transmitting sheet 20, the laser generating assembly 40, and the megasonic generating assembly 30, which improves the processing accuracy and efficiency of water-guided laser processing of microstructures, especially structures with large aspect ratios. During use, the megasonic wave combined with the water jet rapidly removes ablation products, eliminating the obstruction of the ablation products to the laser beam 41, thereby enabling the processing of structures with larger aspect ratios. The combined effect of the megasonic wave and the water jet ensures the smooth removal of ablation products without causing secondary damage to the workpiece 2, making it suitable for the precision machining of microstructures with large aspect ratios and high-precision products, and helping to ensure the performance of microstructure devices.

[0054] In this embodiment of the invention, the housing 10 has a coupling cavity 11 extending through a predetermined direction. For ease of explanation, the end of the coupling cavity 11 used to enter the laser beam 41 is named the light inlet 13, and the end of the coupling cavity 11 used to spray water jets is named the water outlet 12. A water inlet 14 is provided on the side wall of the coupling cavity 11 for connecting to an external deionized water (i.e., pure water) source. The coupling cavity 11 is opened along a predetermined direction, which can be a vertical direction or a direction inclined at a certain angle to the vertical direction.

[0055] The preset direction is the same as the direction of the laser beam 41 during processing. The laser beam 41 enters the coupling cavity 11 through the light inlet 13, and water enters the coupling cavity 11 through the water inlet 14. The coupling cavity 11 of the housing 10 is used to combine the megasonic wave and the laser beam 41 within the water jet, enabling it to be conducted along the water jet. The laser beam 41 and the water jet combine within the coupling cavity 11 (specifically, at the water outlet 12), and then exit from the water outlet 12. The laser beam 41 undergoes total internal reflection within the water jet (see details). Figure 9 The water outlet 12 is used to process workpiece 2. It should be noted that there is no specific limitation on the height of the water outlet 12 from the workpiece; it can be a few millimeters, tens of millimeters, hundreds of millimeters, etc.

[0056] The light-transmitting sheet 20 is positioned at the light inlet 13 to prevent water leakage from the light inlet 13 while ensuring that the laser beam 41 can pass through smoothly. The light-transmitting sheet 20 can be made of transparent quartz glass and can be embedded in the light inlet 13 or fixed to the light inlet 13 by means of adhesive bonding, fastener connection, etc.

[0057] The megaphonic generator 30 is used to generate sound waves with a frequency greater than 1 MHz. Specifically, the megaphonic generator 30 may include an annular piezoelectric ceramic and a wire for energizing the piezoelectric ceramic. The central hole of the annular piezoelectric ceramic forms a first clearance hole for laser to pass through. The first clearance hole extends along a preset direction and corresponds to the light inlet 13. The light inlet 13 and the first clearance hole are coaxially arranged.

[0058] The laser generating assembly 40 includes a laser generator and a focusing field lens 42. The laser generator is used to generate a laser beam 41. The laser emitter can be a product with existing specifications on the market, and this embodiment of the invention does not impose specific limitations on it. For example, the laser generator type can be a diode-pumped solid-state Nd:YAG (yttrium aluminum garnet crystal) pulsed laser with a wavelength of 532nm and an average laser power ≥100W.

[0059] The focusing lens 42 can focus the laser beam 41 and position the focal point within the coupler (specifically, within the outlet 12 of the coupling cavity 11), enabling the laser beam 41 to undergo total internal reflection transmission within the water jet. The focusing lens 42 and the laser generator can be mounted and fixed using structures such as mounting brackets.

[0060] Please see Figure 2 , Figure 3 and Figure 4 In some possible embodiments, the housing 10 is provided with a receiving cavity 15 on the side opposite to the water outlet 12, and the light inlet 13 connects the receiving cavity 15 and the coupling cavity 11. The light-transmitting sheet 20 and the megaphonic generator 30 are respectively housed in the receiving cavity 15.

[0061] In this embodiment, a receiving cavity 15 is formed on the side of the housing 10 adjacent to the laser generating component 40. The receiving cavity 15 is used to accommodate the light-transmitting sheet 20 and the megasonic generating component 30. The light-transmitting sheet 20 can be fixed by means of bonding or the like. The megasonic generating component 30 can be set on the side of the light-transmitting sheet 20 away from the outlet 12. The megasonic generating component 30 can be fixed by means of bonding, fasteners or the like.

[0062] Please see Figures 2 to 5 In some possible embodiments, a mega-sound composite water-guided laser processing device 1 further includes a fixed upper cover 50, which is disposed in the receiving cavity 15 and has a second clearance hole 51 that extends in a preset direction. The second clearance hole 51 extends in the preset direction with the light inlet 13. The fixed upper cover 50 abuts against the side of the light-transmitting sheet 20 away from the water outlet 12.

[0063] In this embodiment, the fixed cover 50 is disposed within the receiving cavity 15, and can be connected and fixed by means of snap-fit, threaded connection, adhesive bonding, etc. In order to avoid the fixed cover 50 from blocking the laser beam 41, the fixed cover 50 is provided with a through second clearance hole 51 along a preset direction. After the fixed cover 50 is installed, its end abuts against the light-transmitting sheet 20, which can apply pressure to the light-transmitting sheet 20. This can prevent the light-transmitting sheet 20 from being blown open by the water pressure inside the coupling cavity 11, and can also ensure that the light-transmitting sheet 20 is tightly fitted to the bottom of the receiving cavity 15 to prevent leakage.

[0064] Please see Figures 2 to 5In some possible embodiments, a receiving groove 53 is formed on the side of the second clearance hole 51 adjacent to the light-transmitting sheet 20, the megaphonic generating component 30 is housed in the receiving groove 53, and the fixed cover 50 is also provided with a wire hole 52 communicating with the receiving groove 53.

[0065] In this embodiment, a receiving groove 53 is provided on the side of the fixed top cover 50 adjacent to the light-transmitting sheet 20. During installation, the megaphonic generating component 30 is placed into the receiving groove 53 and glued in place, making installation convenient. To facilitate the passage of wires, a wire hole 52 is also provided on the fixed top cover 50. The megaphonic generating component 30 can be a patch-type annular piezoelectric ceramic, which is fixed in the receiving groove 53 by adhesive bonding.

[0066] In some possible embodiments, the inner wall of the receiving cavity 15 has internal threads, and the fixed cover 50 has external threads that mate with it. The threaded connection facilitates installation and disassembly, and makes it convenient to install, repair and replace components such as the light-transmitting sheet 20 and the megaphonic generator assembly 30.

[0067] Please refer to 2. Figure 3 and Figure 6 In some possible embodiments, a mega-acoustic composite water-guided laser processing device 1 further includes a water cavity nozzle 60. One end of the water cavity nozzle 60 is connected to the water outlet 12, and the other end is housed in the coupling cavity 11. The end of the water cavity nozzle 60 housed in the coupling cavity 11 is spaced at a preset distance from the inner wall of the coupling cavity 11 to form a flow chamber 61 for water supply. The water cavity nozzle 60 extends along a preset direction to form a water spray channel 62. The flow chamber 61 connects the water inlet 14 and the water spray channel 62. The focal point of the laser beam 41 after being focused by the focusing field lens 42 corresponds to the water spray channel 62.

[0068] In this embodiment, the water cavity nozzle 60 is located at the water outlet 12 to guide the water flow into a water jet, which is then sprayed out from the water spray channel 62. The water cavity nozzle 60 can be installed at the water outlet 12 by means of threaded connection, snap-fit ​​connection, etc., which facilitates installation and replacement.

[0069] One end of the water nozzle 60 is connected to the outlet 12, and the other end is housed in the coupling cavity 11, forming a flow chamber 61 with the inner wall of the coupling cavity 11. In use, deionized water enters the flow chamber 61 from the inlet 14 and then sprays out from the spray channel 62 to form a water jet. The focal point of the laser beam 41 after passing through the focusing lens 42 is located in the spray channel 62, so that the laser beam 41 can be transmitted in the water jet.

[0070] Please see Figure 2 and Figure 3 In some possible embodiments, the housing 10 has a plurality of water inlets 14 circumferentially arranged in the flow chamber 61.

[0071] In this embodiment, the housing 10 has multiple water inlets 14 along the circumference of the flow chamber 61. Specifically, there may be two, three, six, etc. The multiple water inlets 14 are connected to a deionized water source (such as a water pump) through water inlet pipes, which can simultaneously supply deionized water into the coupling chamber 11.

[0072] Please see Figure 2 , Figure 3 and Figure 7 In some possible embodiments, a megaphonic composite water-guided laser processing device 1 further includes a high acoustic impedance wedge 70, which is disposed in the coupling cavity 11 and has a guide channel 71 opened in a preset direction. The guide channel 71 forms a tapered guide cavity 72 at one end adjacent to the megaphonic generator component 30.

[0073] In this embodiment, the high acoustic impedance wedge 70 is disposed in the coupling cavity 11, located between the megaphon generation component 30 and the water cavity nozzle 60. The high acoustic impedance wedge 70 can be designed as a ring, with its central hole forming a guide channel 71. One end of the guide channel 71 adjacent to the megaphon generation component 30 forms a funnel-shaped guide cavity 72.

[0074] In this embodiment, by adding a ring-shaped high acoustic impedance wedge 70, the sound intensity of the megason wave is further amplified during the propagation of the high-frequency megason. Simultaneously, the megason wave is coupled into the water jet, generating an acoustic flow that acts on the workpiece 2, facilitating the smooth discharge of ablation products from the structure and thus achieving machining with a large aspect ratio. The high acoustic impedance wedge 70 can be made of materials such as quartz or stainless steel.

[0075] In some possible embodiments, the high acoustic impedance wedge 70 is disposed on the side of the water cavity nozzle 60 adjacent to the megaphon generating assembly 30. The high acoustic impedance wedge 70 is fixed to the water cavity nozzle 60 by adhesive, which facilitates installation.

[0076] In some possible embodiments, a megasonic composite water-guided laser processing device 1 further includes a movable arm, on which the housing 10, the megasonic generating component 30, and the laser generating component 40 are respectively disposed. The movable arm can specifically be a multi-axis manipulator. By setting the movable arm, the housing 10, the light-transmitting sheet 20, the megasonic generating component 30, and the laser generating component 40 can move along a preset path with the movable arm.

[0077] In some possible embodiments, the frequency of the megasonic generating component 30 is ≥1MHz. Specific values ​​for water flow velocity, water jet diameter, and water pressure are not limited; for example, the water jet diameter can be a few micrometers, tens of micrometers, or hundreds of micrometers, and the water pressure within the coupling cavity 11 can be ≥600 bar. The water flow velocity and water jet diameter can be adjusted by regulating the water pressure at the inlet and the specifications of the water cavity nozzle 60. The megasonic wave has a frequency greater than 1MHz. High-frequency megasonic waves have the characteristics of high sound intensity and low cavitation, allowing the megasonic wave to intervene between micro and nanostructures while avoiding secondary damage to the surface or microstructure of the workpiece 2.

[0078] In a second aspect, embodiments of the present invention provide a megaacoustic composite water-guided laser processing method, implemented using a megaacoustic composite water-guided laser processing device 1 as claimed in any one of claims 1-9, comprising the following steps: assembling a housing 10, a light-transmitting sheet 20, a megaacoustic generating component 30, and a laser generating component 40 into a megaacoustic composite water-guided laser processing device 1; fixing a workpiece 2, introducing deionized water into a water inlet 14, activating the megaacoustic generating component 30 and the laser generating component 40, so that the laser beam 41 acts on the workpiece 2 through a water jet for processing.

[0079] The megasonic composite water-guided laser processing method provided in this invention can process structures with large aspect ratios. By introducing megasonic waves into a constricted water jet in a specific manner, the megasonic waves act on the workpiece 2 during processing, building upon the existing water-guided laser processing. This allows for the smooth removal of ablation products from the structure, while simultaneously improving the processing accuracy and surface quality of structures with large aspect ratios. Furthermore, the megasonic waves do not damage the device or structure, ensuring the performance of the microstructure device.

[0080] The megasonic composite water-guided laser processing method provided in this embodiment of the invention emits megasonic waves through the megasonic generator component 30, which can significantly improve the processing depth-to-width ratio, improve the surface roughness and processing accuracy of the processing surface of the workpiece 2, and also help to improve processing efficiency.

[0081] It is understood that the parts in the above embodiments can be freely combined or deleted to form different combined embodiments. The specific contents of each combined embodiment will not be repeated here. After this description, it can be considered that the present invention specification has recorded each combined embodiment and can support different combined embodiments.

[0082] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A mega-acoustic composite water-guided laser processing device, characterized in that, include: The housing has a coupling cavity extending in a predetermined direction, with a water outlet on one side and a light inlet on the other side, and the housing has a water inlet communicating with the coupling cavity. A light-transmitting sheet is disposed at the light inlet; A megaphonic generator assembly is disposed on the side of the light-transmitting sheet opposite to the water outlet, and has a first clearance hole that extends through the predetermined direction; and A laser generating assembly includes a laser generator and a focusing field lens. The focusing field lens is located on the side of the megasonic generating assembly away from the light-transmitting sheet. The laser generator is used to emit a laser beam along the preset direction. The focal point of the laser beam after being converged by the focusing field lens corresponds to the water outlet. The megaacoustic composite water-guided laser processing device further includes a high acoustic impedance wedge, which is disposed in the coupling cavity and has a guide channel opened along the preset direction. The end of the guide channel adjacent to the megaacoustic generating component forms a conical guide cavity.

2. The megaacoustic composite water-guided laser processing device according to claim 1, characterized in that, The housing also has a receiving cavity on the side opposite to the water outlet. The light inlet connects the receiving cavity and the coupling cavity. The light-transmitting sheet and the megaphonic generator are respectively housed in the receiving cavity.

3. The megaacoustic composite water-guided laser processing device according to claim 2, characterized in that, The mega-sound composite water-guided laser processing device further includes a fixed top cover, which is disposed in the receiving cavity and has a second clearance hole that extends through the preset direction. The second clearance hole communicates with the light inlet in the preset direction, and the fixed top cover abuts against the side of the light-transmitting sheet opposite to the water outlet.

4. The megaacoustic composite water-guided laser processing device according to claim 3, characterized in that, The second clearance hole has a receiving groove formed on the side adjacent to the light-transmitting sheet, the megaphonic generating component is housed in the receiving groove, and the fixed top cover also has a wire hole communicating with the receiving groove.

5. The megaacoustic composite water-guided laser processing device according to claim 1, characterized in that, The mega-sound composite water-guided laser processing device further includes a water cavity nozzle, one end of which is connected to the water outlet, and the other end is housed in the coupling cavity. The end of the water cavity nozzle housed in the coupling cavity is spaced at a preset distance from the inner wall of the coupling cavity to form a flow chamber for water supply. The water cavity nozzle extends along the preset direction to form a water spray channel. The flow chamber connects the water inlet and the water spray channel. The focal point of the laser beam after being focused by the focusing field lens corresponds to the water spray channel.

6. The megaacoustic composite water-guided laser processing device according to claim 5, characterized in that, The housing has multiple water inlets along the circumference of the flow chamber.

7. The megaacoustic composite water-guided laser processing device according to claim 1, characterized in that, The megaacoustic composite water-guided laser processing device further includes a movable arm, and the housing, the megaacoustic generating component, and the laser generating component are respectively disposed on the movable arm.

8. The megaacoustic composite water-guided laser processing device according to claim 1, characterized in that, The frequency of the megaphonic generator component is ≥1MHz.

9. A megaacoustic composite water-conducting laser processing method, characterized in that, The process is achieved using a megaacoustic composite water-guided laser processing device as described in any one of claims 1-8, comprising the following steps: The housing, the light-transmitting sheet, the megaphonic generator assembly, and the laser generator assembly are assembled into the megaphonic composite water-guided laser processing device. The workpiece is fixed, deionized water is introduced into the water inlet, and the megohmmeter generator and the laser generator are activated so that the laser beam acts on the surface of the workpiece through the water jet to process the workpiece.

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