Coaxial focused ultrasonic and laser processing device and method

Abstract

The application belongs to the technical field of laser processing, and specifically provides a coaxial focusing ultrasonic composite laser processing device and method. The coaxial focusing ultrasonic composite laser processing device comprises a cavity cover, an ultrasonic transducer and a laser generating assembly. The cavity cover is provided with a water outlet. The ultrasonic transducer has an upper and lower through guide channel, the upper end of the guide channel forms a light inlet, and the lower end forms a light outlet. The application forms a liquid film on the surface of the workpiece through the water outlet, generates ultrasonic waves through the ultrasonic transducer, transmits the ultrasonic waves through the liquid film, introduces the laser into the laser processing process in an efficient coaxial confocal manner, and makes the ablation products generated in the laser processing process be quickly cooled under the action of the liquid film, and be broken and quickly discharged under the action of ultrasonic vibration, so as to effectively improve the processing surface quality, and also help to improve the processing precision, so as to meet the high-precision processing requirement of the surface feature structure of the workpiece.

Description

Technical Field

[0001] This invention belongs to the field of laser processing technology, specifically relating to a coaxial focused ultrasonic composite laser processing device and method. Background Technology

[0002] Laser processing is a non-contact processing method, and the energy and speed of the high-energy laser beam are adjustable, thus enabling a variety of processing objectives. Laser processing is suitable for processing various metals and non-metals, especially materials with high hardness, high brittleness, and high melting points.

[0003] Laser processing, as an emerging processing method, has significant advantages in precision machining, surface finishing, complex structure processing, and mass automated production. However, existing laser processing technologies still have certain limitations, especially when processing workpiece surface features. Traditional laser processing methods suffer from problems such as processing recast layers, large heat-affected zones, and poor surface quality, resulting in severe ablation. These issues limit the processing accuracy and capability range of laser processing. Summary of the Invention

[0004] This invention provides a coaxial focused ultrasonic composite laser processing device and method, aiming to solve the problems of existing laser processing, such as processing recast layers, large heat-affected zones, and poor surface quality.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] In a first aspect, the present invention provides a coaxial focused ultrasonic composite laser processing apparatus, comprising:

[0007] The cavity cover has a receiving cavity, with an outlet at the bottom of the receiving cavity and an inlet on one side of the receiving cavity;

[0008] An ultrasonic transducer, at least partially housed in the receiving cavity, the lower end of the ultrasonic transducer extending to the water outlet, the ultrasonic transducer having a vertically penetrating guide channel, the upper end of the guide channel forming a light inlet and the lower end forming a light outlet, the ultrasonic transducer being used to generate ultrasonic waves; and

[0009] The laser generating assembly includes a laser generator and a focusing field lens, the focusing field lens being positioned above the ultrasonic transducer, and the laser generator emitting a laser beam that penetrates downward through the guide channel.

[0010] In one possible implementation, the ultrasonic transducer includes:

[0011] The lower end is at least partially housed in the receiving cavity, and the lower end of the lower end extends to the outlet, forming the guide channel;

[0012] A piezoelectric ceramic unit, ring-shaped, is disposed around the outer periphery of the guide channel; and

[0013] The upper end is connected to the lower end and together they form a clamping space. The piezoelectric ceramic unit is disposed in the clamping space, and the lower end of the upper end abuts against the upper surface of the piezoelectric ceramic unit.

[0014] In one possible implementation, the top of the receiving cavity is provided with a mounting hole, and the lower end is threaded into the mounting hole.

[0015] In one possible implementation, the upper end head is threaded into the lower end head.

[0016] In one possible implementation, the piezoelectric ceramic unit includes a piezoelectric ceramic body and an electrode sheet. The piezoelectric ceramic body is annular and surrounds the outer periphery of the guide channel. The electrode sheet is electrically connected to the piezoelectric ceramic body.

[0017] In one possible implementation, the lower part of the lower end forms an amplitude-changing rod structure.

[0018] In one possible implementation, the coaxial focused ultrasonic composite laser processing device further includes a moving platform, on which the cavity cover, the ultrasonic transducer, and the laser generating assembly are respectively disposed.

[0019] Compared with the prior art, the beneficial effects of the coaxial focused ultrasonic composite laser processing device provided by the present invention are:

[0020] This invention provides a coaxial focused ultrasonic composite laser processing device, comprising a cavity cover, an ultrasonic transducer, and a laser generating assembly. The cavity cover has a receiving cavity for containing deionized water (i.e., pure water), and a water outlet is provided at the bottom of the receiving cavity for water to flow out, forming a liquid film on the surface of the workpiece. The lower end of the ultrasonic transducer is housed within the receiving cavity, forming a light outlet. The ultrasonic transducer generates ultrasonic waves. The laser generating assembly includes a laser generator and a focusing lens. The laser generator emits a laser beam, which passes through the focusing lens, passes through a guiding channel, and exits from the light outlet. Finally, the laser focus converges on the surface of the workpiece, enabling surface processing.

[0021] This invention forms a liquid film on the workpiece surface through a water outlet, which weakens the thermal impact of laser processing on the workpiece, reduces ablation damage, and helps improve the surface quality of microstructures processed by laser processing. Ultrasonic waves are generated by an ultrasonic transducer and transmitted through the liquid film, introduced into the laser processing process in a highly efficient coaxial confocal manner. The combined action of the liquid film and ultrasonic waves rapidly cools various molten and plasma products generated during laser processing under the action of the liquid film, and then breaks them up and quickly removes them under the action of ultrasonic vibration. This effectively improves the surface quality of the processed product and also helps to eliminate recast layers, improving processing accuracy to meet the high-precision processing requirements of the workpiece's surface features.

[0022] This invention integrates the cavity cover, ultrasonic transducer, and laser generating component into one unit, enabling the liquid film and ultrasonic waves to move together with the laser beam. This ensures that the ultrasonic energy is always applied at a fixed point in the laser processing domain, resulting in more concentrated energy utilization and better performance.

[0023] In a second aspect, the present invention also provides a coaxial focused ultrasonic composite laser processing method, implemented using a coaxial focused ultrasonic composite laser processing apparatus as described in any of the above embodiments, comprising the following steps:

[0024] Fix the workpiece to be processed;

[0025] Deionized water is introduced into the receiving cavity through the inlet, and then flows out from the outlet to form a liquid film on the surface of the workpiece.

[0026] Ultrasonic waves are generated by an ultrasonic transducer and act on the surface of the workpiece.

[0027] A laser beam is emitted by the laser generator and focused onto the surface of the workpiece under the liquid film by the focusing field lens, thereby processing the surface of the workpiece.

[0028] In one possible implementation, the liquid film thickness is less than 0.3 mm.

[0029] Compared with the prior art, the coaxial focused ultrasonic composite laser processing method provided by the present invention is implemented by a coaxial focused ultrasonic composite laser processing device as described in any of the above implementation methods, and has the same technical effect, which will not be repeated here. Attached Figure Description

[0030] Figure 1 A schematic diagram illustrating the working principle of a coaxial focused ultrasonic composite laser processing device according to one embodiment of the present invention;

[0031] Figure 2 This is a schematic diagram of the structure of a coaxial focused ultrasonic composite laser processing device according to one embodiment of the present invention;

[0032] Figure 3 This is a cross-sectional view of the microstructure of the workpiece surface without the loading of ultrasonic waves and fluid flow.

[0033] Figure 4 for Figure 3 A magnified view of the central incision site;

[0034] Figure 5 A cross-sectional view of the microstructure of the workpiece surface when subjected to ultrasonic waves and fluid flow.

[0035] Explanation of reference numerals in the attached figures:

[0036] 1. A coaxial focused ultrasonic composite laser processing device; 2. A workpiece;

[0037] 10. Cavity cover; 11. Receiving cavity; 12. Water outlet; 13. Water inlet;

[0038] 20. Ultrasonic transducer; 21. Lower end; 211. Guide channel; 212. Amplifier rod structure; 213. Light inlet; 214. Light outlet; 22. Upper end; 23. Piezoelectric ceramic body; 24. Electrode plate;

[0039] 30. Laser generating component; 31. Laser beam; 32. Focusing field lens. Detailed Implementation

[0040] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0041] It should be noted that when an element is referred to as "fixed to," "fixed," or "attached" to another element, it can be directly on the other element or may have an intervening element. When an element is referred to as "connected to" or "connected to" another element, it can be directly connected to the other element or may have an intervening element. When an element is referred to as "set on" or "located on" another element, it can be directly on the other element or may have an intervening element. "Multiple" refers to two or more items. "At least one" refers to one or more items. "Several" refers to one or more items.

[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0043] Please refer to the following: Figures 1 to 5 The following describes a coaxial focused ultrasonic composite laser processing device 1 and method provided by an embodiment of the present invention.

[0044] Please see Figure 1 and Figure 2 In a first aspect, embodiments of the present invention provide a coaxial focused ultrasonic composite laser processing apparatus 1, comprising a cavity cover 10, an ultrasonic transducer 20, and a laser generating assembly 30. The cavity cover 10 has a receiving cavity 11, with an outlet 12 at the bottom and an inlet 13 on one side of the receiving cavity 11; the ultrasonic transducer 20 is at least partially housed in the receiving cavity 11, with its lower end extending to the outlet 12, and the ultrasonic transducer 20 having a vertically penetrating guide channel 211, with an inlet 213 at the upper end of the guide channel 211 and an outlet 214 at the lower end of the guide channel 211, the ultrasonic transducer 20 being used to generate ultrasonic waves; the laser generating assembly 30 includes a laser generator and a focusing lens 32, the focusing lens 32 being disposed above the ultrasonic transducer 20, the laser generator being used to emit a laser beam 31, the laser beam 31 penetrating downward through the guide channel 211. The laser beam 31 enters through the light inlet 213, passes through the guide channel 211, and exits through the light outlet 214. The focal point of the laser beam 31 is focused on the surface of the workpiece 2.

[0045] Compared with the prior art, the beneficial effects of the coaxial focused ultrasonic composite laser processing device 1 provided in this embodiment of the invention are:

[0046] An embodiment of the present invention provides a coaxial focused ultrasonic composite laser processing device 1, comprising a cavity cover 10, an ultrasonic transducer 20, and a laser generating assembly 30. The cavity cover 10 has a receiving cavity 11 for containing deionized water (i.e., pure water), and a water outlet 12 is provided at the bottom of the receiving cavity 11 for water to flow out. The flowing water can form a liquid film on the surface of the workpiece 2. The lower end of the ultrasonic transducer 20 is housed in the receiving cavity 11 and forms a light outlet 214, which corresponds to the water outlet 12. The ultrasonic transducer 20 can generate ultrasonic waves. The laser generating assembly 30 includes a laser generator and a focusing field lens 32. The laser generator is used to emit a laser beam 31. After passing through the focusing field lens 32, the laser beam 31 passes through the guide channel 211 and is emitted from the light outlet 214. Finally, the laser focus is concentrated on the surface of the workpiece 2, which can process the surface of the workpiece 2.

[0047] In this embodiment of the invention, a liquid film is formed on the surface of the workpiece 2 through the outlet 12, which can weaken the thermal impact of laser processing on the workpiece 2, reduce ablation damage, and improve the surface quality of the microstructure of the laser-processed workpiece. Ultrasonic waves are generated by the ultrasonic transducer 20 and transmitted through the liquid film. The ultrasonic waves are introduced into the laser processing process in a highly efficient coaxial and confocal manner. The liquid film and ultrasonic waves work together to rapidly cool various molten and plasma products generated during the laser processing under the action of the liquid film, and then break them up and quickly expel them under the action of ultrasonic vibration. This effectively improves the surface quality of the processed workpiece and also helps to eliminate the recast layer and improve the processing accuracy to meet the high-precision processing requirements of the surface feature structure of the workpiece 2.

[0048] In this embodiment of the invention, the cavity cover 10, the ultrasonic transducer 20 and the laser generating component 30 are integrated into one unit, which enables the liquid film and ultrasonic waves to move together with the laser beam 31, so that the ultrasonic energy can always act on the laser processing domain at a fixed point, resulting in more concentrated energy utilization and better performance.

[0049] In this embodiment of the invention, the cavity cover 10 serves two purposes: firstly, to form a receiving cavity 11 and a water outlet 12; and secondly, to provide mounting and support positions for components such as the ultrasonic transducer 20 mounted thereon. The receiving cavity 11 has a water outlet 12 at its bottom and a water inlet 13 on its side wall. The water inlet 13 can be connected to a water pump via a hose, connector, etc., and the water pump delivers deionized water (i.e., pure water). The deionized water flows out from the water outlet 12 and forms a liquid film on the surface of the workpiece 2.

[0050] On the one hand, deionized water film can remove heat during processing to eliminate the heat-affected zone. On the other hand, deionized water film can serve as a medium for ultrasonic wave conduction, allowing ultrasonic waves to act on the processing position, removing ablation products generated during laser processing. Molten products and plasma products are rapidly cooled under the action of the liquid film and broken up and discharged under the action of ultrasonic waves, thereby effectively improving processing accuracy and surface quality.

[0051] It should be noted that the liquid film formed by deionized water on the surface of workpiece 2 is relatively thin, generally less than 0.3 mm. The processing structure of workpiece 2 is generally limited to the surface feature structure to avoid the formation of a thick liquid film inside the structure due to excessive feature structure depth, which would cause excessive absorption of the laser beam 31 energy and reduce the utilization rate of laser energy.

[0052] Understandably, the inlet 13 can be located at the top, side wall, or bottom of the receiving cavity 11, as long as it allows deionized water to flow into the receiving cavity 11. One or more inlets 13 can be provided as needed.

[0053] In this embodiment of the invention, the ultrasonic transducer 20 is disposed within the receiving cavity 11. It can be entirely housed within the receiving cavity 11, or only its lower end can be housed within the receiving cavity 11, as long as the guiding channel 211 extends downward to the water outlet 12. The ultrasonic transducer 20 and the cavity cover 10 can be assembled and fixed by means of fastening adhesive, screw connection, or other methods.

[0054] The ultrasonic transducer 20 has a vertically extending guide channel 211, which allows the laser beam 31 to pass through from top to bottom. After passing through the focusing lens 32, the laser beam 31 gradually converges and exits from the exit port 214 after passing through the guide channel 211. The focal point of the converged laser beam 31 acts on the surface of the workpiece 2, processing the surface features of the workpiece 2. For example... Figure 2As shown, the light outlet 214 and the water outlet 12 are located on the same vertical line (i.e., coaxial). The light outlet 214 can be flush with the water outlet 12, or slightly higher or lower than the plane where the water outlet 12 is located, as long as it meets the usage requirements.

[0055] An ultrasonic transducer is used to generate ultrasonic waves. The transducer has a piezoelectric ceramic unit, which is a ring-shaped hollow structure surrounding the guide channel 211. Specifically, the piezoelectric ceramic unit may include a ring-shaped piezoelectric ceramic body 23 and electrode plates 24 or wires for energizing the piezoelectric ceramic body 23. The central hole of the ring-shaped piezoelectric ceramic body 23 is coaxially arranged with the guide channel 211. An amplitude transformer structure 212 can be designed at the transmitting end of the piezoelectric ceramic unit in the ultrasonic transducer. The amplitude transformer structure 212 serves to focus the ultrasonic energy, making the ultrasonic energy transmitted to the water film more concentrated.

[0056] Ionized water flows out of the outlet 12 of the cavity cover 10, forming a liquid film adhering to the surface of the workpiece 2 between the workpiece 2 and the outlet 12. The liquid film can provide energy for the ultrasonic waves through a liquid bridge. Under the action of ultrasonic flow and cavitation, the ablation products can be discharged quickly. With the assistance of the liquid flow, the ablation products are quickly transported away.

[0057] The laser generating assembly 30 includes a laser generator and a focusing lens 32. The laser generator generates a laser beam 31, and the focusing lens 32 focuses the laser beam 31 onto the surface of the workpiece 2. The focused laser beam 31 after passing through the focusing lens 32 and the ultrasonic vibration of the piezoelectric ceramic unit are both focused onto the surface of the workpiece 2 through the bonding liquid film formed by deionized water and the workpiece 2, realizing coaxial focused ultrasonic composite laser processing of the surface microstructure.

[0058] When in use, a fixed distance should be maintained between the focusing field lens 32 and the workpiece 2 to ensure that the focal plane of the laser beam 31 acts on the surface of the workpiece 2.

[0059] It should be noted that there are no restrictions on parameters such as the wavelength of the laser beam 31, the specific operating frequency of the piezoelectric ceramic unit, the water pressure in the cavity 11, and the water flow rate at the outlet 12. After understanding the technical solution of this invention, those skilled in the art can directly select existing laser generators and piezoelectric ceramic unit products on the market, and there are no obstacles to implementation.

[0060] In some possible embodiments, the laser beam 31 is derived from various short-wavelength (below 1024nm) long-pulse lasers (pulse width is generally greater than 10 picoseconds) to ensure that the energy loss of the laser beam 31 when passing through the liquid film between the deionized water and the workpiece 2 can be ignored.

[0061] Please see Figure 3 , Figure 4 and Figure 5 The beneficial effects of a coaxial focused ultrasonic composite laser processing device 1 provided in this embodiment of the invention will be described below in conjunction with specific applications. Figure 3 This is a cross-sectional view of the surface microstructure of workpiece 2 when no ultrasonic waves or fluid flow are applied, magnified 100 times. Figure 4 for Figure 3 A magnified view of the central incision site. Figure 5 This is a cross-sectional view of the surface microstructure of workpiece 2 when subjected to ultrasonic waves and fluid flow, magnified 100 times.

[0062] The laser power used in this experiment was 4W and the ultrasonic power was 30W. A microgroove structure was fabricated on the brass surface. The cross-sectional view of the surface microstructure without ultrasonic or liquid flow loading can be found in the instruction manual. Figure 3 and Figure 4 The surface microstructure profile under ultrasonic and fluid flow loading is shown in the attached instruction manual. Figure 5 As can be seen from the comparison of the figures, a recast layer exists on the upper surface of the microgroove without ultrasonic and fluid flow loading, and the machining cone angle is relatively large. When ultrasonic and fluid flow are loaded, the surface microstructure recast layer disappears, and the machining cone angle is relatively small.

[0063] Please see Figure 1 and Figure 2 In some possible embodiments, the ultrasonic transducer 20 includes a lower end 21, a piezoelectric ceramic unit, and an upper end 22. The lower end 21 is at least partially housed in the receiving cavity 11, and the lower end of the lower end 21 extends to the outlet 12, forming a guide channel 211. The piezoelectric ceramic unit is annular and surrounds the outer periphery of the guide channel 211, and is used to generate ultrasonic waves. The upper end 22 is connected to the lower end 21 and together with the lower end 21 forms a clamping space. The piezoelectric ceramic unit is disposed in the clamping space, and the lower end of the upper end 22 abuts against the upper surface of the piezoelectric ceramic unit and applies a downward clamping force to the piezoelectric ceramic unit.

[0064] In this embodiment, the lower end 21 and the upper end 22 form a clamping space, and the piezoelectric ceramic unit is disposed within the clamping space to form a sandwich-type ultrasonic transducer 20. The vibration mode of the piezoelectric ceramic unit can be changed by different excitation modes. Optionally, the vibration mode of the piezoelectric ceramic unit can be set to a higher-order longitudinal vibration mode, a longitudinal bending mode, a longitudinal torsion mode, or a combined bending-torsion mode, and generally a first-order longitudinal vibration mode is used.

[0065] Please see Figure 1 and Figure 2In some possible embodiments, the piezoelectric ceramic unit includes a piezoelectric ceramic body 23 and electrode plates 24. The piezoelectric ceramic body 23 is annular and surrounds the outer periphery of the guide channel 211. The electrode plates 24 are electrically connected to the piezoelectric ceramic body 23 and are used to supply an excitation signal to the piezoelectric ceramic body 23. The piezoelectric ceramic body 23 is powered by the two electrode plates 24. The electrode plates 24 supply an excitation signal to the piezoelectric ceramic body 23, causing the piezoelectric ceramic body 23 to generate ultrasonic vibrations. These vibrations are then acted upon by the liquid film of deionized water between the cavity cover 10 and the workpiece 2 on the surface of the workpiece 2.

[0066] In some possible embodiments, the lower end 21 and the upper end 22 are connected by threads. The top of the lower end 21 is provided with a stud with external threads. The upper end 22 has a threaded hole that mates with the stud. The piezoelectric ceramic body 23 is sleeved on the stud. During installation, rotating the upper end 22 can fasten the piezoelectric ceramic body 23.

[0067] Please see Figure 1 and Figure 2 In some possible embodiments, the top of the receiving cavity 11 has a mounting hole, and the lower end 21 is threaded into the mounting hole. In this embodiment, the top of the receiving cavity 11 has a mounting hole, and the lower end 21 is threaded into the mounting hole during installation. The threaded engagement of the lower end 21 with the mounting hole also facilitates adjustment, so that the light outlet 214 is in a suitable position.

[0068] Please see Figure 1 and Figure 2 In some possible embodiments, the upper end 22 is threaded to the lower end 21 to facilitate installation and to apply clamping force to the piezoelectric ceramic body 23.

[0069] Please see Figure 1 and Figure 2 In some possible embodiments, the lower part of the lower end 21 forms an amplitude transformer structure 212, which serves to focus ultrasonic energy, further increasing the intensity of the ultrasonic waves and facilitating the rapid removal of ablation products. The lower end 21 may be made of stainless steel.

[0070] Please see Figure 1 and Figure 2 In some possible embodiments, a coaxial focused ultrasonic composite laser processing device 1 further includes a moving platform, on which the cavity cover 10, ultrasonic transducer 20 and laser generating assembly 30 are respectively disposed.

[0071] The mobile platform can specifically be a multi-axis robot. By setting up the mobile platform, the cavity cover 10, ultrasonic transducer 20 and laser generating assembly 30 can move along a preset path with the mobile platform to complete the processing of the surface features of the workpiece 2.

[0072] In a second aspect, embodiments of the present invention also provide a coaxial focused ultrasonic composite laser processing method, implemented using a coaxial focused ultrasonic composite laser processing device 1 as provided in any of the above embodiments, comprising the following steps: fixing the workpiece 2 to be processed; introducing deionized water into the receiving cavity 11 through the water inlet 13, causing the deionized water to flow out through the water outlet 12 and form a liquid film on the surface of the workpiece 2; generating ultrasonic waves through a piezoelectric ceramic unit, the ultrasonic waves acting on the surface of the workpiece 2 after passing through the amplitude transformer structure 212 and the liquid film; emitting a laser beam 31 through a laser generator, the laser beam 31 being focused on the surface of the workpiece 2 under the liquid film by a focusing field lens 32, thereby processing the surface of the workpiece 2.

[0073] In some possible embodiments, the liquid film thickness is less than 0.3 mm.

[0074] In the implementation of the coaxial focused ultrasonic composite laser processing method provided in this embodiment of the invention, the workpiece 2 is clamped and fixed. A water pump is connected to the water inlet 13 via a hose and connector, and deionized water is pumped into the receiving cavity 11 through the water inlet 13 and flows out through the water outlet 12, forming a liquid film on the surface of the workpiece 2. An excitation signal is passed through the piezoelectric ceramic body 23, which is annular in shape, through the electrode plate 24. The piezoelectric ceramic body 23 generates ultrasonic vibration, which acts on the surface of the workpiece 2 via the liquid film between the cavity cover 10 and the workpiece 2. Then, a laser beam 31 is emitted and focused onto the surface of the workpiece 2 under the liquid film by the focusing lens 32, realizing focused ultrasonic composite laser processing of surface feature structures.

[0075] Compared with traditional laser processing methods, this method is less likely to produce a recast layer and heat-affected zone, which helps to improve the surface quality and processing accuracy. At the same time, it can also ensure high processing efficiency, thereby improving the processing accuracy and processing capability range of laser processing, and meeting the high-precision processing requirements of the surface feature structure of workpiece 2.

[0076] It is understood that the parts in the above embodiments can be freely combined or deleted to form different combined embodiments. The specific contents of each combined embodiment will not be repeated here. After this description, it can be considered that the present invention specification has recorded each combined embodiment and can support different combined embodiments.

[0077] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A coaxial focused ultrasonic composite laser processing device, characterized in that, include: The cavity cover has a receiving cavity, with an outlet at the bottom of the receiving cavity and an inlet on one side of the receiving cavity; An ultrasonic transducer, at least partially housed in the receiving cavity, the lower end of the ultrasonic transducer extending to the water outlet, the ultrasonic transducer having a vertically penetrating guide channel, the upper end of the guide channel forming a light inlet and the lower end forming a light outlet, the ultrasonic transducer being used to generate ultrasonic waves; and The laser generating assembly includes a laser generator and a focusing lens. The focusing lens is located above the ultrasonic transducer. The laser generator is used to emit a laser beam, which penetrates downward through the guide channel and is introduced into the laser processing process in a coaxial and confocal manner. The light outlet corresponds to the water outlet. The deionized water flowing out of the water outlet forms a liquid film on the surface of the workpiece, and the thickness of the liquid film is less than 0.3 mm. After passing through the focusing field lens, the laser beam passes through the guiding channel inside the ultrasonic transducer and is emitted from the light outlet. The laser focus is concentrated on the surface of the workpiece. The ultrasonic transducer includes: The lower end is at least partially housed in the receiving cavity, and the lower end of the lower end extends to the outlet, forming the guide channel; A piezoelectric ceramic unit, ring-shaped, is disposed around the outer periphery of the guide channel; and The upper end is connected to the lower end and together they form a clamping space. The piezoelectric ceramic unit is disposed in the clamping space, and the lower end of the upper end abuts against the upper surface of the piezoelectric ceramic unit.

2. The coaxial focused ultrasonic composite laser processing device according to claim 1, characterized in that, The top of the receiving cavity is provided with a mounting hole, and the lower end is threaded into the mounting hole.

3. The coaxial focused ultrasonic composite laser processing device according to claim 1, characterized in that, The upper end and the lower end are threaded together.

4. The coaxial focused ultrasonic composite laser processing device according to claim 1, characterized in that, The piezoelectric ceramic unit includes a piezoelectric ceramic body and an electrode plate. The piezoelectric ceramic body is annular and surrounds the outer periphery of the guide channel. The electrode plate is electrically connected to the piezoelectric ceramic body.

5. The coaxial focusing ultrasonic composite laser processing device according to claim 1, characterized in that, The lower part of the lower end forms an amplitude transformer structure.

6. The coaxial focused ultrasonic composite laser processing device according to claim 1, characterized in that, The coaxial focused ultrasonic composite laser processing device further includes a moving platform, and the cavity cover, the ultrasonic transducer and the laser generating component are respectively disposed on the moving platform.

7. A coaxial focused ultrasonic-laser composite processing method, characterized in that, The process is achieved using a coaxial focused ultrasonic composite laser processing device as described in any one of claims 1-6, comprising the following steps: Fix the workpiece to be processed; Deionized water is introduced into the receiving cavity through the inlet, and then flows out from the outlet to form a liquid film on the surface of the workpiece. Ultrasonic waves are generated by an ultrasonic transducer and act on the surface of the workpiece. A laser beam is emitted by the laser generator and focused onto the surface of the workpiece under the liquid film by the focusing field lens, thereby processing the surface of the workpiece.

8. The coaxial focused ultrasonic composite laser processing method according to claim 7, characterized in that, The thickness of the liquid film is less than 0.3 mm.

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