Method for Improving Temperature Stability of Torque Sensor in Quartz Flexible Accelerometer

Abstract

The present invention provides a method for improving the temperature stability of a torquer in a quartz flexible accelerometer, addressing the technical problem that existing methods cannot simultaneously ensure high magnetic properties and a stable low expansion coefficient of the yoke, thereby resulting in low accelerometer measurement and control accuracy and temperature stability. The method achieves temperature stability of the torquer by heat treating the low expansion alloy used in the yoke. The heat treatment steps of the low expansion alloy are as follows: S1, solution treatment of the low expansion alloy; S2, cryogenic treatment of the low expansion alloy after the solution treatment in step S1; S3, aging treatment of the low expansion alloy after the cryogenic treatment in step S2; S4, stabilization treatment of the low expansion alloy after the aging treatment in step S3; S5, processing the low expansion alloy after the stabilization treatment in step S4 into a yoke, and performing a two-stage annealing treatment on the yoke to obtain a yoke with high magnetic properties and a stable low expansion coefficient, thereby achieving temperature stability of the torquer.

Description

Technical Field

[0001] The invention relates to a quartz flexible accelerometer, and in particular to a processing method for improving the temperature stability of a torquer in the quartz flexible accelerometer. Background Art

[0002] Modern inertial navigation systems demand increasingly high accuracy and reliability. Quartz flexure accelerometers, due to their low cost and simple structure, are widely used in various missile weapon systems. The torquer in a quartz flexure accelerometer generates feedback torque in response to an input signal to balance the inertial moment. The stability of the torquer affects system stability and measurement accuracy, and its temperature stability also impacts its stability. Temperature changes alter the remanence, coercivity, and relative permeability of the materials in the torquer's magnetic circuit, thereby affecting the magnitude and stability of the magnetic flux density in the working air gap. Furthermore, thermal expansion and contraction can cause deformation in the torquer structure, reducing mechanical stability. Dimensional changes in the internal coils and pendulum components can also affect the magnetic flux density in the working air gap. Therefore, a low thermal expansion coefficient material should be selected to match the thermal expansion coefficient of the quartz components. Low-expansion alloys, due to their ability to maintain nearly constant shape and dimensions within a certain temperature range, are widely used in various missile weapon systems, as well as in spacecraft, satellites, aviation, navigation, and weaponry. However, with the continuous development of the aerospace and defense industries, the performance requirements for low-expansion alloys are also increasing.

[0003] The torquer primarily consists of a yoke, magnets, and pole pieces. The yoke, a key structural component, is made of a low-expansion alloy, such as 4J36, 4J32, or 4J32A. Currently, when heat-treating low-expansion alloy 4J36, only an intermediate annealing at 850°C is performed. This process is intended solely to eliminate work hardening, restore plasticity, and improve processability. This heat treatment method presents the following major issues: 1) When only the intermediate annealing at 850°C is performed, carbon (C) impurities appear in the microstructure. When dissolved in the alloy through interstitial or substitutional means, they cause lattice distortion and stress, hindering domain wall movement. Furthermore, the excess carbon, exceeding its solubility, precipitates as inclusions at grain boundaries, hindering grain growth during annealing and resulting in a decrease in magnetic properties. 2) When only the intermediate annealing at 850°C is performed, the temperature is too low to provide the necessary driving force for grain growth. Consequently, the crystal contains numerous internal defects, which significantly pin domain wall movement, making it difficult and, consequently, reducing magnetic properties. 3) During intermediate annealing, grains grow, the alloy volume increases, and the linear expansion coefficient increases. In summary, currently, during the use of quartz flexible accelerometers, the linear expansion coefficient of low-expansion alloys is unstable and the magnetic properties are low. This cannot meet high-precision requirements and reduces the performance of the entire product. There is no good solution for simultaneously ensuring high magnetic properties of the yoke and a stable low expansion coefficient. Summary of the Invention

[0004] The purpose of the present invention is to solve the technical problem that the existing method for processing the temperature stability of the torquer in the quartz flexible accelerometer cannot simultaneously ensure the high magnetic properties of the yoke iron and the stable low expansion coefficient, which leads to low measurement and control accuracy and temperature stability of the quartz flexible accelerometer, and provide a method for improving the temperature stability of the torquer in the quartz flexible accelerometer.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A method for improving the temperature stability of a torquer in a quartz flexible accelerometer, wherein the torquer includes a yoke. The method is characterized in that the yoke is made of a low-expansion alloy. The method improves the temperature stability of the torquer in the quartz flexible accelerometer by heat treating the low-expansion alloy. The heat treatment of the low-expansion alloy includes the following steps:

[0007] S1. Solution treating the low expansion alloy at 830°C to 850°C;

[0008] S2, subjecting the low expansion alloy after the solution treatment in step S1 to a cryogenic treatment at a temperature of -80°C to -196°C;

[0009] S3, performing aging treatment on the low expansion alloy after cryogenic treatment in step S2 at 300°C to 340°C;

[0010] S4, stabilizing the low expansion alloy after aging treatment in step S3 at 95° C. to 120° C.;

[0011] S5. Processing the low expansion alloy stabilized in step S4 into a yoke, and subjecting the yoke to a two-stage annealing treatment to obtain a yoke with high magnetic properties and a stable low expansion coefficient, thereby achieving temperature stability of the torquer in the quartz flexible accelerometer.

[0012] Furthermore, step S2 specifically comprises: placing the low expansion alloy after the solution treatment in step S1 into a cryogenic box for heat preservation, wherein the temperature of the cryogenic box is -80°C to -196°C, and the heat preservation time is 10 minutes to 30 minutes;

[0013] In step S5, the yoke is subjected to a two-stage annealing treatment as follows: the yoke is placed in a vacuum furnace at room temperature, the temperature is raised to 450°C to 600°C within 1 hour, then the temperature is raised to 820°C to 850°C within 40 minutes, and after keeping warm for 1 hour to 4 hours, the temperature is further raised to 1050°C to 1200°C within 30 minutes, and after keeping warm for 1 hour to 4 hours, the temperature is lowered to 550°C to 650°C by furnace cooling, and then filled with 800mbar to 1200mbar nitrogen to cool to room temperature and take out of the furnace.

[0014] Furthermore, step S1 specifically comprises: placing the low expansion alloy in a resistance furnace for heating at a temperature of 830° C. to 850° C. for 60 minutes, and then cooling to room temperature by water cooling;

[0015] Step S3 specifically comprises: placing the low expansion alloy after cryogenic treatment in step S2 into a high temperature box or vacuum furnace, then heating the temperature to 300°C to 340°C at a heating rate of 8°C to 12°C / min, keeping the temperature for 4 to 8 hours, and then cooling the alloy to room temperature before removing it from the furnace;

[0016] Step S4 is specifically as follows: placing the low expansion alloy after aging treatment in step S3 into a high temperature box, heating the alloy to a temperature of 95° C. to 120° C., keeping the temperature for 6 h to 48 h, and then cooling the alloy to room temperature by air cooling.

[0017] Furthermore, in order to save time and labor costs while achieving material structure stability, step S3 is specifically as follows: placing the low expansion alloy after deep freezing treatment in step S2 into a high temperature box, and then heating it to 300°C to 340°C at a heating rate of 8°C to 12°C / min, keeping it warm for 4h to 8h, and then cooling it to room temperature before taking it out of the furnace.

[0018] Furthermore, in step S1, the heating temperature is 850°C;

[0019] In step S2, the temperature of the deep freezer is -196°C and kept warm for 15 minutes;

[0020] In step S3, the temperature was raised to 320°C at a rate of 8°C / min and kept at that temperature for 4 hours;

[0021] In step S4, the heating temperature is 120°C and the temperature is kept for 8 hours;

[0022] In step S5, the temperature is raised to 600°C within 1 hour, then to 840°C within 40 minutes, and kept at this temperature for 3 hours. The temperature is then further raised to 1100°C within 30 minutes, and kept at this temperature for 3 hours. The temperature is then lowered to 600°C by furnace cooling, and then filled with 1000 mbar nitrogen to cool to room temperature before being taken out of the furnace.

[0023] Furthermore, the low expansion alloy is 4J36 alloy.

[0024] Beneficial effects of the present invention:

[0025] 1. The present invention provides a method for improving the temperature stability of the torquer in a quartz flexible accelerometer. This method is simple to operate, requires no additional steps, is low-cost, and does not require special equipment or technical means. This method significantly improves the overall performance of the low-expansion alloy used in the yoke, making it suitable for mass production. This method ensures that the yoke simultaneously possesses high magnetic properties and a stable low expansion coefficient, thereby improving the test accuracy and temperature stability of the quartz flexible accelerometer.

[0026] 2. The present invention provides a method for improving the temperature stability of a torquer in a quartz flexible accelerometer. This method increases the saturation magnetic flux density and relative permeability of the low-expansion alloy used in the yoke iron of the torquer's magnetic circuit system, significantly reduces coercive force, and thus improves the stability of the magnetic flux density in the working air gap. Furthermore, the lower linear expansion coefficient and higher temperature stability enhance the mechanical stability of the torquer, thereby stabilizing the dimensional variations of the internal coil and pendulum assembly and increasing the magnetic flux density at the working air gap. This method is rational and simple, increasing the maximum magnetic permeability by approximately 9 times with a minimal loss in linear expansion coefficient. This significant improvement in the magnetic flux density and stability of the torquer also significantly enhances the temperature stability of the quartz flexible accelerometer.

[0027] 3. The low-expansion alloy used in the yoke, the main structural component of the torquer in the quartz flexible accelerometer, can be processed by the processing method provided by the present invention to obtain a single-phase austenite structure before annealing. The structure is evenly distributed and has a low linear expansion coefficient. The purpose of the solution treatment is to obtain a single-phase austenite structure and reduce the linear expansion coefficient. This is because the face-centered cubic γ-Fe atoms are ferromagnetic, and two magnetic ordering states, spin-parallel (large volume) and anti-spin-parallel (small volume), coexist in the alloy. When the temperature rises, the volume of the alloy increases with the vibration of the atoms. At this time, the alloy enters the anti-spin-parallel state to offset the volume expansion caused by temperature, reducing the linear expansion coefficient. The stabilization treatment is to ensure the stability of the linear expansion coefficient.

[0028] 4. In the present invention, the yoke iron is subjected to a two-stage annealing treatment at 820°C to 850°C to eliminate work hardening and restore plasticity. At 1050°C to 1200°C, impurities in the alloy are removed and the alloy is purified, thereby reducing coercivity and increasing saturation magnetization. Simultaneously, the holding time is relatively extended to ensure sufficient growth of the alloy grains, reduce intracrystalline defects, facilitate domain wall movement, and improve magnetic properties. Furthermore, the low-expansion alloy after solution treatment is cryogenically treated to obtain a martensitic structure. During the subsequent two-stage annealing treatment, the martensitic structure transforms into an inverted austenitic structure. Simultaneously, the martensitic phase transformation causes volume expansion, which offsets the volume contraction caused by thermal expansion and contraction during cooling, thereby stabilizing the expansion coefficient and reducing the linear expansion coefficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 Flowchart of a method for processing the temperature stability of a torquer in a quartz flexible accelerometer of the present invention;

[0030] Figure 2 This is a metallographic structure diagram of the yoke iron after treatment in accordance with the first embodiment of the present invention;

[0031] Figure 3 This is the metallographic structure diagram of the yoke iron after treatment according to the second embodiment of the present invention;

[0032] Figure 4 This is the metallographic structure diagram of the yoke iron after treatment in Example 3 of the present invention;

[0033] Figure 5 This is the metallographic structure diagram of the yoke iron after treatment according to the fourth embodiment of the present invention;

[0034] Figure 6 The metallographic structure diagram of the yoke iron after processing the temperature stability of the torquer in the existing quartz flexible accelerometer is provided;

[0035] Figure 7 1 is a curve diagram showing the amplitude variation of the hysteresis value K1 (scale factor) of the quartz flexible accelerometer using the yoke treated in Example 1;

[0036] Figure 8 This is a curve showing the amplitude variation of the hysteresis value K1 (scale factor) of a quartz flexible accelerometer using untreated yoke iron. DETAILED DESCRIPTION

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0038] Example 1

[0039] like Figure 1 As shown, the present invention provides a method for improving the temperature stability of a torquer in a quartz flexible accelerometer. The torquer includes a yoke, which is made of a low-expansion alloy. In this embodiment, the yoke is made of 4J36 alloy (in other embodiments, 4J32 alloy, 4J32A alloy, etc. can be used). The temperature stability of the torquer in the quartz flexible accelerometer is improved by heat treating the 4J36 alloy. The heat treatment of the 4J36 alloy includes the following steps:

[0040] S1. Solution treatment of 4J36 alloy

[0041] The 4J36 alloy was placed in a resistance furnace and heated at a temperature of 830°C to 850°C for 60 minutes, and then cooled to room temperature by water cooling. In this embodiment, the heating temperature is 850°C.

[0042] S2, cryogenically treating the 4J36 alloy after the solution treatment in step S1

[0043] The 4J36 alloy after the solution treatment in step S1 is placed in a cryogenic box for insulation, the cryogenic box temperature is -80°C to -196°C, and the insulation time is 10 minutes to 30 minutes. In this embodiment, the cryogenic box temperature is -196°C, and the insulation time is 15 minutes.

[0044] S3, aging treatment of the 4J36 alloy after cryogenic treatment in step S2

[0045] The 4J36 alloy after cryogenic treatment in step S2 is placed in a high temperature box (in other embodiments, it can be placed in a vacuum furnace), and then heated to 300°C to 340°C at a heating rate of 8°C to 12°C / min, kept at this temperature for 4 to 8 hours, and then cooled to room temperature before being taken out of the furnace; in this embodiment, the temperature is raised to 320°C at a heating rate of 8°C / min and kept at this temperature for 4 hours;

[0046] S4, stabilizing the 4J36 alloy after aging treatment in step S3

[0047] The 4J36 alloy after the aging treatment in step S3 is placed in a high temperature box, heated to 95°C to 120°C, kept warm for 6 hours to 48 hours, and then cooled to room temperature by air cooling. In this embodiment, the heating temperature is 120°C and kept warm for 8 hours.

[0048] S5. Process the 4J36 alloy stabilized in step S4 into a yoke, perform a two-stage annealing treatment on the yoke, place the yoke in a vacuum furnace at room temperature, heat it to 450°C to 600°C within 1 hour, then heat it to 820°C to 850°C within 40 minutes, hold it for 1 hour to 4 hours, then heat it to 1050°C to 1200°C within 30 minutes, hold it for 1 hour to 4 hours, cool it to 550°C to 650°C by furnace cooling, then fill it with 800mbar to 1200mbar nitrogen and cool it to room temperature before taking it out of the furnace, thereby obtaining a stable yoke with high magnetic properties and a low expansion coefficient, thereby achieving the temperature stability of the torquer in the quartz flexible accelerometer. In this embodiment, the temperature is raised to 600°C within 1 hour, then raised to 840°C within 40 minutes, kept at this temperature for 3 hours, and then further raised to 1100°C within 30 minutes. After being kept at this temperature for 3 hours, the temperature is lowered to 600°C by furnace cooling, and then filled with 1000mbar nitrogen to cool to room temperature before being taken out of the furnace.

[0049] The metallographic structure of the yoke iron after treatment in this embodiment is shown in FIG. Figure 2 , the linear expansion coefficient of the yoke is 1.683×

[0050] 10 -6 / ℃, its magnetic performance data are: initial magnetic permeability μ0 is 10.6mh / m, maximum magnetic permeability μ m It is 43.8mh / m, the coercive force Hc is 3.7A / m, and the saturation magnetic induction intensity Bs is 1.22T.

[0051] Example 2

[0052] The method and steps of this embodiment are the same as those of the first embodiment, except that:

[0053] In step S1, the heating temperature is 830°C.

[0054] In step S2, the temperature of the deep freezer is -80°C and kept warm for 10 minutes.

[0055] In step S3, the temperature is raised to 300°C at a heating rate of 12°C / min.

[0056] In step S4, the heating temperature is 105° C. and the temperature is kept for 6 hours.

[0057] In step S5, the temperature is raised to 500°C within 1 hour, then raised to 820°C within 40 minutes, kept at this temperature for 1 hour, and then further raised to 1050°C within 30 minutes. After being kept at this temperature for 1 hour, the temperature is lowered to 550°C by furnace cooling.

[0058] The metallographic structure of the yoke iron after treatment in this embodiment is shown in FIG. Figure 3 , the linear expansion coefficient of the yoke is 1.755×

[0059] 10 -6 / ℃, its magnetic performance data are: initial magnetic permeability μ0 is 4.6mh / m, maximum magnetic permeability μ m It is 29.1mh / m, the coercive force Hc is 10.3A / m, and the saturation magnetic induction intensity Bs is 1.19T.

[0060] Example 3

[0061] The method and steps of this embodiment are the same as those of the first embodiment, except that:

[0062] In step S1, the heating temperature is 840°C.

[0063] In step S2, the temperature of the cryogenic box is -140°C.

[0064] In step S3, the temperature is raised to 300°C at a heating rate of 10°C / min and kept at this temperature for 6 hours.

[0065] In step S4, the heating temperature is 95° C. and the temperature is kept at 95° C. for 48 hours.

[0066] In step S5, the temperature is raised to 450°C within 1 hour, then to 830°C within 40 minutes, kept at this temperature for 2 hours, and then further raised to 1100°C within 30 minutes. After being kept at this temperature for 2 hours, the temperature is lowered to 600°C by furnace cooling, and then filled with 800 mbar nitrogen to cool to room temperature before being taken out of the furnace.

[0067] The metallographic structure of the yoke iron after treatment in this embodiment is shown in FIG. Figure 4 , the linear expansion coefficient of the yoke is 1.638×

[0068] 10 -6 / ℃, its magnetic performance data are: initial magnetic permeability μ0 is 5.7mh / m, maximum magnetic permeability μ m It is 31.6mh / m, the coercive force Hc is 9.3A / m, and the saturation magnetic induction intensity Bs is 1.21T.

[0069] Example 4

[0070] The method and steps of this embodiment are the same as those of the first embodiment, except that:

[0071] In step S1, the heating temperature is 840°C.

[0072] In step S2, the temperature of the deep freezer is -196°C and kept warm for 30 minutes.

[0073] In step S3, the temperature is raised to 340°C at a heating rate of 8°C / min and kept at this temperature for 8 hours.

[0074] In step S4, the heating temperature is 120° C. and the temperature is kept for 12 hours.

[0075] In step S5, the temperature is raised to 550°C within 1 hour, then raised to 850°C within 40 minutes, kept at this temperature for 4 hours, and then further raised to 1200°C within 30 minutes. After being kept at this temperature for 4 hours, the temperature is lowered to 650°C by furnace cooling, and then filled with 1200 mbar nitrogen to cool to room temperature before being taken out of the furnace.

[0076] The metallographic structure of the yoke iron after treatment in this embodiment is shown in FIG. Figure 5 , the linear expansion coefficient of the yoke is 1.785×

[0077] 10 -6 / ℃, its magnetic performance data are: initial magnetic permeability μ0 is 12.6mh / m, maximum magnetic permeability μ m It is 54.5mh / m, the coercive force Hc is 3.7A / m, and the saturation magnetic induction intensity Bs is 1.21T.

[0078] Comparative Example

[0079] The 4J36 alloy was processed into a yoke, which was subjected to only one annealing treatment. The yoke was placed in a vacuum furnace at room temperature, heated to 850°C at a heating rate of 8°C / min, kept at that temperature for 2 hours, cooled to 200°C, and then filled with 800mbar nitrogen to cool to room temperature before being taken out of the furnace.

[0080] The metallographic structure of the yoke iron after the above treatment is shown in Figure 6 , the linear expansion coefficient of the yoke is 2.845×10 -6 / ℃, its magnetic performance data are: initial magnetic permeability μ0 is 2.1mh / m, maximum magnetic permeability μ m It is 4.8mh / m, the coercive force Hc is 38.1A / m, and the saturation magnetic induction intensity Bs is 1.17T.

[0081] From the magnetic performance data, it can be concluded that the maximum magnetic permeability μ of the yoke treated by the present invention is m The coercive force Hc decreases and the saturation magnetic induction intensity Bs increases, which shows that the magnetic properties are better, and the linear expansion coefficient of the yoke iron treated by the present invention is reduced.

[0082] from Figure 2-Figure 6 As you can see, Figure 2There are granular precipitates at the grain boundaries, and the inclusions in this area are relatively concentrated. At the same time, the inclusions hinder the merging of adjacent grains, which causes the grains to merge and grow during annealing, resulting in a decrease in magnetic properties. When the 4J36 alloy is magnetically treated at above 1000°C, secondary recrystallization occurs in the matrix. At this time, due to the increase in grain size, the inclusions in the structure are purified more thoroughly, the magnetocrystalline structure is more perfect, and the lattice defects are eliminated. Therefore, the magnetic properties of the 4J36 alloy are optimized. At the same time, during the continuous growth of the grains, the coercive force decreases, the saturation magnetic induction intensity increases, and the magnetic properties of the 4J36 alloy are easier to improve. In addition, combined with Figure 2-Figure 5 From the alloy structure and linear expansion coefficients of Examples 1 to 4, it can be seen that Figure 2-Figure 5 The alloy structures are all austenitic, and their linear expansion coefficients are all lower than 2.0×10 -6 / ℃, so for 4J36 alloy, the stability and uniformity of its alloy structure have a stabilizing effect on the linear expansion coefficient. In addition, the change in the alloy expansion coefficient is related to the motion state of Fe atoms during heating and the magnetostriction during its spontaneous magnetization. After solution treatment, the volume increase caused by magnetostriction due to spontaneous magnetization of the alloy and the volume reduction caused by thermal expansion and contraction offset each other, ensuring the stability of the expansion coefficient. Taking into account the linear expansion coefficient and magnetic properties, the quartz flexible accelerometer K1 (scale factor) hysteresis value of the yoke treated in Example 1 and the quartz flexible accelerometer K1 hysteresis value of the untreated yoke are tested respectively. The corresponding test results are shown in Tables 1 and 2 below, and the corresponding K1 hysteresis value amplitude change curve is shown in Figure 7 and Figure 8 By comparison, it is found that the K1 hysteresis value of the quartz flexible accelerometer using the yoke treated in Example 1 has a smaller fluctuation in the value change within the range of -20°C to 20°C, and its value is smaller, and the temperature stability of the quartz flexible accelerometer is improved.

[0083] Table 1

[0084]

[0085] Table 2

[0086]

[0087] According to statistical comparison of data, the test accuracy of the quartz flexible accelerometer using the yoke treated in Example 1 is improved by 2 times compared with the quartz flexible accelerometer using the untreated yoke.

[0088] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present invention shall be covered by the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims.

Claims

1. A method for improving the temperature stability of a torquer in a quartz flexible accelerometer, wherein the torquer comprises a yoke; The yoke is made of a low expansion alloy. The temperature stability of the torquer in the quartz flexible accelerometer is achieved by heat treating the low expansion alloy. The heat treatment of the low expansion alloy includes the following steps: S1. Solution treating the low expansion alloy at 830°C to 850°C; S2, subjecting the low expansion alloy after the solution treatment in step S1 to a cryogenic treatment at a temperature of -80°C to -196°C; S3, performing aging treatment on the low expansion alloy after cryogenic treatment in step S2 at 300°C to 340°C; S4, stabilizing the low expansion alloy after aging treatment in step S3 at 95° C. to 120° C.; S5. Processing the low expansion alloy stabilized in step S4 into a yoke iron, and subjecting the yoke iron to a two-stage annealing treatment, specifically: placing the yoke iron in a vacuum furnace at room temperature, heating the temperature to 450° C. to 600° C. within 1 hour, then heating the temperature to 820° C. to 850° C. within 40 minutes, holding the temperature for 1 hour to 4 hours, then heating the temperature to 1050° C. to 1200° C. within 30 minutes, holding the temperature for 1 hour to 4 hours, then cooling the temperature to 550° C. to 650° C. by furnace cooling, then cooling the temperature to room temperature by filling the furnace with 800 mbar to 1200 mbar nitrogen, and then removing the furnace; A stable yoke with high magnetic properties and low expansion coefficient is obtained, thereby realizing the temperature stability processing of the torquer in the quartz flexible accelerometer.

2. The method for improving the temperature stability of the torquer in the quartz flexible accelerometer according to claim 1, characterized in that: Step S2 specifically includes: placing the low expansion alloy after the solution treatment in step S1 into a cryogenic box for heat preservation, wherein the temperature of the cryogenic box is -80°C to -196°C, and the heat preservation time is 10 minutes to 30 minutes.

3. The method for improving the temperature stability of the torquer in the quartz flexible accelerometer according to claim 2, characterized in that: Step S1 specifically comprises: placing the low expansion alloy into a resistance furnace for heating at a temperature of 830° C. to 850° C. for 60 minutes, and then cooling to room temperature by water cooling; Step S3 specifically comprises: placing the low expansion alloy after cryogenic treatment in step S2 into a high temperature box or vacuum furnace, then heating the temperature to 300°C to 340°C at a heating rate of 8°C to 12°C / min, keeping the temperature for 4 to 8 hours, and then cooling the alloy to room temperature before removing it from the furnace; Step S4 is specifically as follows: placing the low expansion alloy after aging treatment in step S3 into a high temperature box, heating the alloy to a temperature of 95° C. to 120° C., keeping the temperature for 6 h to 48 h, and then cooling the alloy to room temperature by air cooling.

4. The method for improving the temperature stability of the torquer in the quartz flexible accelerometer according to claim 3, characterized in that: Step S3 is specifically as follows: placing the low expansion alloy after deep freezing treatment in step S2 into a high temperature box, then heating it to 300°C to 340°C at a heating rate of 8°C to 12°C / min, keeping it warm for 4h to 8h, and then cooling it to room temperature before taking it out of the furnace.

5. The method for improving the temperature stability of a torquer in a quartz flexible accelerometer according to claim 4, characterized in that: In step S1, the heating temperature is 850°C; In step S2, the temperature of the deep freezer is -196°C and kept warm for 15 minutes; In step S3, the temperature was raised to 320°C at a rate of 8°C / min and kept at that temperature for 4 hours; In step S4, the heating temperature is 120°C and the temperature is kept for 8 hours; In step S5, the temperature is raised to 600°C within 1 hour, then to 840°C within 40 minutes, and kept at this temperature for 3 hours. The temperature is then further raised to 1100°C within 30 minutes, and kept at this temperature for 3 hours. The temperature is then lowered to 600°C by furnace cooling, and then filled with 1000 mbar nitrogen to cool to room temperature before being taken out of the furnace.

6. The method for improving the temperature stability of a torquer in a quartz flexible accelerometer according to any one of claims 1 to 5, characterized in that: The low expansion alloy is 4J36 alloy.

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