Loading device, device and method for loading a reaction chamber

Abstract

The present invention relates to a loading device (100), a device and a method for loading a reaction chamber (200) into a vacuum chamber (10). The loading device (100) comprises a loading platform (110) arranged to support the reaction chamber (200), the loading platform (110) having a first end (115), a second end (116) and a first direction (A), a first loading member (120) arranged on the loading platform (110), a second loading member (122) arranged on the loading platform (110), the first loading member (120) being arranged to be independently movable relative to the loading platform (110) and the second loading member (122) in the first direction (A), and the second loading member (122) being arranged to be independently movable relative to the loading platform (110) and the first loading member (120) in the first direction (A).

Description

Technical Field

[0001] This invention relates to a loading apparatus for loading a reaction chamber into a vacuum chamber. It also relates to an apparatus for atomic layer deposition. Furthermore, it relates to a method for loading and unloading a reaction chamber within a vacuum chamber. Background Technology

[0002] Atomic layer deposition (ALD) apparatuses typically consist of a vacuum chamber and a reaction chamber within that chamber. The substrate is processed within the reaction chamber. Precursor gases are supplied to the reaction chamber from outside the vacuum chamber. The reaction chamber can be a fixed reaction chamber, with the substrate directly loaded into it. Alternatively, the reaction chamber can be a separate, movable reaction chamber that is loaded into and unloaded from the vacuum chamber. In the latter case, the substrate is loaded into and unloaded from the reaction chamber when it is outside the vacuum chamber. Separate, movable reaction chambers are preferred. Because substrate loading and unloading can be performed outside the vacuum chamber, separate, movable reaction chambers allow for efficient processing and minimal downtime.

[0003] Large substrates require large reaction chambers. These large reaction chambers are difficult to move and transport. Long moving arms are needed to load and unload large reaction chambers within a vacuum chamber. Large moving arms or bulky moving mechanisms require a large footprint and affect the efficient processing of reaction chambers within the processing facility. Furthermore, the difficulty in transporting large reaction chambers to and from the vacuum chamber hinders the integration of atomic layer deposition (ALD) equipment with other processing units. Summary of the Invention

[0004] The object of the present invention is to provide a loading device, apparatus, and method to address or at least mitigate the disadvantages of the prior art.

[0005] The object of the present invention is achieved by a loading device, characterized as described in the present invention. The object of the present invention is also achieved by an apparatus, characterized as described in the present invention. The object of the present invention is further achieved by a method, characterized as described in the present invention.

[0006] Preferred embodiments of the present invention are disclosed herein.

[0007] This invention is based on the idea of ​​providing a loading device for loading a reaction chamber into a vacuum chamber. The loading device includes: a loading platform configured to support the reaction chamber, the loading platform having a first end, a second end, and a first direction extending between the first end and the second end. The loading device further includes: a first loading member disposed on the loading platform, the first loading member including a first loading connector configured to provide a mechanical connection with the reaction chamber; and a second loading member disposed on the loading platform, the second loading member including a second loading connector configured to provide a mechanical connection with the reaction chamber. The first loading member is configured to be independently movable relative to the loading platform and the second loading member along the first direction; and the second loading member is configured to be independently movable relative to the loading platform and the first loading member along the first direction.

[0008] The independently movable first and second loading members can continue loading movement without requiring a long loading arm. Furthermore, the independently movable first and second loading members allow for alternating use of them.

[0009] In one embodiment, the first loading member is configured to move independently relative to the loading platform and the second loading member in a second direction transverse to the first direction; and the second loading member is configured to move independently relative to the loading platform and the first loading member in a second direction transverse to the first direction.

[0010] Therefore, the first loading member and the second loading member can be independently mechanically connected to the reaction chamber to be loaded along the second direction and disconnected from the reaction chamber.

[0011] In an alternative embodiment, the first loading connector of the first loading member is configured to be independently movable relative to the loading platform and the second loading member in a second direction transverse to the first direction; and the second loading connector of the second loading member is configured to be independently movable relative to the loading platform and the first loading member in a second direction transverse to the first direction.

[0012] Therefore, the first loading connector and the second loading connector can be independently and mechanically connected to and disconnected from the reaction chamber to be loaded along the second direction. The loading member does not need to move along the second direction.

[0013] In one embodiment, the loading device includes: a first loading motor connected to the first loading member and configured to move the first loading member along the first direction with a first loading motion; and a second loading motor connected to the second loading member and configured to move the second loading member along the first direction with a second loading motion.

[0014] The first loading motor is configured to cause the first loading member to move independently of the second loading member along the first direction. The second loading motor is configured to cause the second loading member to move independently of the first loading member along the first direction.

[0015] In one embodiment, the loading device includes: a first connecting motor connected to the first loading member and configured to move the first loading member along the second direction with a first connecting motion; and a second loading motor connected to the second loading member and configured to move the second loading member along the second direction with a second connecting motion.

[0016] The first connecting motor is configured to move the first loading member independently of the second loading member along the second direction to connect to and disconnect from the first loading member. The second connecting motor is configured to move the second loading member independently of the first loading member along the second direction to connect to and disconnect from the second loading member.

[0017] In an alternative embodiment, a first connecting motor is connected to the first loading connector of the first loading member and configured to move the first loading connector along the second direction with a second connecting movement; and a second loading motor is connected to the second loading connector of the second loading member and configured to move the second loading connector along the second direction with a second connecting movement.

[0018] The first connecting motor is configured to move the first loading connector independently of the second loading member and the second loading connector along the second direction to connect to and disconnect from the first loading member. The second connecting motor is configured to move the second loading connector independently of the first loading member and the first loading connector along the second direction to connect to and disconnect from the second loading member. The loading member does not need to move along the second direction.

[0019] In one embodiment, the first loading member includes a first loading arm extending along the first direction, and the second loading member includes a second loading arm extending along the first direction, the first loading arm and the second loading arm being spaced apart from each other.

[0020] The first and second longitudinal loading arms can move the reaction chamber alternately, thereby enabling efficient loading and unloading without the need for long arms.

[0021] In one embodiment, the first loading connector includes a first connector pin, and the second loading connector includes a second connector pin.

[0022] In an alternative embodiment, the first loading connector includes a first connector hole, and the second loading connector includes a second connector hole.

[0023] In one embodiment, the first connector pin and the second connector pin extend along the second direction.

[0024] In an alternative embodiment, the first connector hole and the second connector hole extend along the second direction.

[0025] The first connector pin and the second connector pin, as well as the first connector hole and the second connector hole, extend along the second direction, such that the mechanical connection with the reaction chamber can be provided by moving the loading member or the loading connector along the second direction.

[0026] In one embodiment, the loading platform includes: a first transfer track extending along the first direction; a second transfer track extending along the first direction and configured to be spaced apart from the first transfer track; the first transfer track and the second transfer track are configured to support the reaction chamber during loading.

[0027] The first and second transfer tracks provide movement guidance along the first direction for the first and second loading components, respectively.

[0028] In an alternative embodiment, the loading platform includes a single transfer track extending along the first direction and configured to support the reaction chamber during loading. Preferably, the single transfer track is disposed along the centerline of the loading platform. The centerline is the center of a direction perpendicular to the first direction, i.e., the width direction of the loading platform.

[0029] In one embodiment, the loading device includes a body to which the loading platform is rotatably supported.

[0030] Therefore, the orientation of the loading platform, as well as the first and second loading members, can be adjusted by rotating the loading platform relative to the body. Thus, the loading platform is rotatably supported to the body and configured to rotate relative to the body. Preferably, the axis of rotation extends vertically so that the loading platform rotates horizontally about the axis of rotation.

[0031] The present invention is also based on the idea of ​​providing an apparatus for atomic layer deposition. The apparatus includes: a vacuum chamber having a loading port; and a loading device configured opposite the loading port of the vacuum chamber for loading a reaction chamber into the vacuum chamber through the loading port.

[0032] The loading device includes: a first transfer track extending along a first direction of the loading device; and a second transfer track extending along the first direction. The loading device further includes: a first loading member provided with a first loading connector configured to provide connection to the reaction chamber; and a second loading member provided with a second loading connector configured to provide connection to the reaction chamber. The first loading member is configured to be independently movable relative to the second loading member and the vacuum chamber along the first direction; and the second loading member is configured to be independently movable relative to the first loading member and the vacuum chamber along the first direction.

[0033] Therefore, the first loading member and the second loading member can be used independently and alternately to load the reaction chamber into and from the vacuum chamber. Thus, the size of the loading member and the loading device can be minimized.

[0034] In one embodiment, the apparatus further includes a movable reaction chamber comprising: a first support rail extending along a third direction of the reaction chamber and configured to support the first transfer rail of the loading device; and a second support rail extending along the third direction and configured to support the second transfer rail of the loading device. The movable reaction chamber further includes: two or more first opposing connectors continuously arranged along the third direction and configured to connect to the first loading connector of the first loading member; and two or more second opposing connectors continuously arranged along the third direction and configured to connect to the second loading connector of the second loading member.

[0035] Therefore, the movable reaction chamber can move along the first transfer track and the second transfer track in the first direction of the loading device.

[0036] In an alternative embodiment, the loading device or the loading platform includes a single transfer track extending along the first direction and configured to support the reaction chamber during loading. Similarly, the movable reaction chamber includes a single support track extending along the third direction of the reaction chamber and configured to support the single transfer track of the loading device. Thus, the movable reaction chamber is supported to the loading device via the single transfer track and the single support track.

[0037] Preferably, the transfer track is arranged along the centerline of the loading platform. The centerline is the center of a direction perpendicular to the first direction, i.e., the width direction of the loading platform. Preferably, the support track is arranged along the centerline of the movable reaction chamber. The centerline is the center of a direction perpendicular to the third direction, i.e., the width direction of the movable reaction chamber.

[0038] In one embodiment, the first loading member is configured to be independently movable relative to the second loading member in a second direction transverse to the first direction; and the second loading member is configured to be independently movable relative to the first loading member in a second direction transverse to the first direction.

[0039] Therefore, by moving the first loading member and the second loading member along the second direction, the first loading member and the second loading member can be independently and detachably connected to the movable reaction chamber and disconnected from the movable reaction chamber.

[0040] In an alternative embodiment, the first loading connector of the first loading member is configured to be independently movable relative to the second loading member in a second direction transverse to the first direction; and the second loading connector of the second loading member is configured to be independently movable relative to the first loading member in a second direction transverse to the first direction.

[0041] Therefore, by moving the first loading connector and the second loading connector along the second direction, the first loading connector and the second loading connector can be independently and detachably connected to the movable reaction chamber and disconnected from the movable reaction chamber.

[0042] In one embodiment, the first loading connector includes a first connector pin, and the two or more first opposing connectors include two or more first opposing connector holes, the first connector pin and the two or more first opposing connector holes extending in a second direction transverse to the first direction and the third direction; and the second loading connector includes a second connector pin, and the two or more second opposing connectors include two or more second opposing connector holes, the second connector pin and the two or more second opposing connector holes extending in a second direction transverse to the first direction and the third direction.

[0043] By extending the loading member or the loading connector along the second direction, the first connector pin and the second connector pin can be respectively disposed in the first opposing connector hole and the second opposing connector hole.

[0044] In one embodiment, the loading port of the vacuum chamber includes a lower opening edge, and the first transfer track and the second transfer track are disposed vertically above the lower opening edge of the loading port.

[0045] Therefore, the reaction chamber can be transported horizontally to the vacuum chamber and loaded and unloaded within the vacuum chamber.

[0046] Preferably, the loading device of the apparatus is the loading device disclosed above.

[0047] The present invention is also based on the idea of ​​providing a method for loading and unloading a reaction chamber within a vacuum chamber, the vacuum chamber including a loading port. The method is performed by a loading device configured opposite the loading port of the vacuum chamber, the loading device comprising: a first loading member provided with a first loading connector configured to provide connection to the reaction chamber, the first loading member being configured to be independently movable along a first direction of the loading device; and a second loading member provided with a second loading connector configured to provide connection to the reaction chamber, the second loading member being configured to be independently movable along the first direction of the loading device. The reaction chamber includes: two or more first opposing connectors continuously arranged along a third direction of the reaction chamber and configured to provide connection to the first loading connectors of the first loading member; and two or more second opposing connectors continuously arranged along the third direction of the reaction chamber and configured to provide connection to the second loading connectors of the second loading member.

[0048] The method includes loading the reaction chamber into the vacuum chamber, the loading comprising the following steps:

[0049] a) The reaction chamber is movably supported to the loading device such that the first direction of the loading device and the third direction of the reaction chamber extend parallel to each other;

[0050] b) Position the first loading member to the first initial loading position and connect the first loading connector of the first loading member to the first opposing connector of the reaction chamber corresponding to the first initial loading position;

[0051] c) By moving the first loading member connected to the reaction chamber along the first direction to a first forward position, the reaction chamber is moved toward the vacuum chamber along the first direction;

[0052] d) Position the second loading member to the second initial loading position and connect the second loading connector of the second loading member to the second opposing connector of the reaction chamber corresponding to the second initial loading position;

[0053] e) Disconnect the first loading connector of the first loading member from the first opposing connector of the reaction chamber; and

[0054] f) By moving the second loading member connected to the reaction chamber along the first direction to a second forward position, the reaction chamber is transferred toward the vacuum chamber along the first direction.

[0055] The method of the present invention enables the reaction chamber to be loaded into the vacuum chamber without the need for a long arm by using the arm in an alternating manner.

[0056] In one embodiment, the method further includes the following steps:

[0057] g) Move the first loading member, which is disconnected from the reaction chamber, away from the vacuum chamber along the first direction to a first rear position, step g) is performed after step e);

[0058] h) Connect the first loading connector of the first loading member to the first opposing connector of the reaction chamber corresponding to the first rear position;

[0059] i) Disconnect the second loading connector of the second loading member from the second opposing connector of the reaction chamber; and

[0060] j) The reaction chamber is moved toward the vacuum chamber in the first direction by moving the first loading member connected to the reaction chamber toward the vacuum chamber in the first direction.

[0061] Performing the movement allows the reaction chamber to be moved a considerable distance along the first direction by alternating the use of the first loading member and / or the second loading member two or more times.

[0062] In one embodiment, the method includes unloading the reaction chamber into the vacuum chamber, the unloading comprising the following steps:

[0063] k) Position the first loading member to the first initial unloading position and connect the first loading connector of the first loading member to the first opposing connector of the reaction chamber corresponding to the first initial unloading position;

[0064] l) By moving the first loading member connected to the reaction chamber along the first direction to a first rear position, the reaction chamber is moved away from the vacuum chamber along the first direction;

[0065] m) Position the second loading member to the second initial unloading position and connect the second loading connector of the second loading member to the second opposing connector of the reaction chamber corresponding to the second initial unloading position;

[0066] n) Disconnect the first loading connector of the first loading member from the first opposing connector of the reaction chamber; and

[0067] o) By moving the second loading member connected to the reaction chamber along the first direction to a second rear position, the reaction chamber is moved away from the vacuum chamber along the first direction.

[0068] Therefore, the reaction chamber can be unloaded from the vacuum chamber in a manner similar to loading.

[0069] In one embodiment, the method and uninstallation further include the following steps:

[0070] p) Move the first loading member, which is disconnected from the reaction chamber, toward the vacuum chamber along the first direction to a first pre-position, step p) is performed after step n);

[0071] q) Connect the first loading connector of the first loading member to the first opposing connector of the reaction chamber corresponding to the first front position;

[0072] r) Disconnect the second loading connector of the second loading member from the second opposing connector of the reaction chamber; and

[0073] s) The reaction chamber is moved away from the vacuum chamber in the first direction by moving the first loading member connected to the reaction chamber away from the vacuum chamber in the first direction.

[0074] Performing the movement allows the reaction chamber to be moved a considerable distance along the first direction by alternating the use of the first loading member and / or the second loading member two or more times.

[0075] In one embodiment, by moving the first loading member or the first loading connector along a second direction, the first loading connector of the first loading member is connected to the first opposing connector of the reaction chamber, and the connection between the first loading connector of the first loading member and the first opposing connector of the reaction chamber is disconnected, the second direction being transverse to the first direction; and by moving the second loading member or the second loading connector along the second direction, the second loading connector of the second loading member is connected to the second opposing connector of the reaction chamber, and the connection between the second loading connector of the first loading member and the second opposing connector of the reaction chamber is disconnected, the second direction being transverse to the first direction.

[0076] Therefore, the first loading member and the second loading member can be connected to the reaction chamber and disconnected from the reaction chamber by simple movement, so that the reaction chamber can be moved efficiently.

[0077] Preferably, the method is performed by the apparatus and loading device disclosed above.

[0078] One advantage of the present invention is that the loading device, apparatus, and method enable the reaction chamber to be moved a considerable distance without the use of long motions and long arms. This further enables the provision of a rotary loading platform while positioning the loading device close to the vacuum chamber. Attached Figure Description

[0079] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments, wherein...

[0080] Figure 1 A schematic view of the atomic layer deposition apparatus and loading apparatus is shown;

[0081] Figure 2 A schematic side view of the loading device according to the present invention is shown;

[0082] Figure 3 A schematic top view of one embodiment of the loading device according to the present invention is shown;

[0083] Figure 4 A schematic top view of another embodiment of the loading device according to the invention is shown;

[0084] Figure 5 It shows Figure 4 A schematic end view of the loading device;

[0085] Figure 6 A schematic end view of one embodiment of the reaction chamber is shown;

[0086] Figure 7 A schematic side view of the support track of the reaction chamber is shown;

[0087] Figure 8 A schematic side view of the opposing connector elements of the reaction chamber is shown;

[0088] Figure 9 A schematic end view of another embodiment of the reaction chamber is shown;

[0089] Figure 10 A schematic top view of the reaction chamber is shown;

[0090] Figure 11 A schematic side view of the reaction chamber is shown;

[0091] Figure 12 A schematic bottom view of the reaction chamber is shown;

[0092] Figure 13 The reaction chamber on the loading device is schematically shown; and

[0093] Figures 14 to 21 The operation of the loading device is illustrated schematically. Detailed Implementation

[0094] Figure 1 An apparatus for atomic layer deposition or an atomic layer deposition reactor apparatus having an atomic layer deposition reactor 10 is schematically shown.

[0095] The atomic layer deposition reactor 10 includes a vacuum chamber 20 having a front wall 21 or a loading wall 21 with a loading port 25 for loading and unloading a substrate or a separate reaction chamber within and from the vacuum chamber 20. The loading wall 21 is a vertically or upwardly extending loading wall 21. The loading port 25 provides an opening between the interior and exterior of the vacuum chamber 20. The loading port 25 is provided with a loading door (not shown) for opening and closing the loading port 25.

[0096] The vacuum chamber 20 also includes a rear wall 22 opposite to the front wall 21, a top wall 24, a bottom wall 26 opposite to the top wall 24, and a side wall 23 extending between the front wall 21 and the rear wall 22 and between the top wall 24 and the bottom wall 26.

[0097] In an alternative embodiment, vacuum chamber 20 may be a cylindrical vacuum chamber extending horizontally. Top wall 24, bottom wall 26 and side wall 23 are replaced by cylindrical protective walls extending between front wall 21 and rear wall 22.

[0098] Vacuum chamber walls 21, 22, 23, 24, and 26 are structurally designed to maintain a vacuum. Therefore, vacuum chamber walls 21, 22, 23, 24, and 26 are configured to maintain a considerable vacuum state during processing without damage.

[0099] The atomic layer deposition reactor 10 includes chamber support legs 12 for supporting the vacuum chamber 20 on a support surface such as a facility floor. The chamber support legs 12 are configured such that the vacuum chamber 20 and the loading port 25 are positioned at a loading / unloading height above the support surface, allowing for the loading and unloading of a substrate or separable reaction chamber within the vacuum chamber without requiring vertical lifting or movement of the substrate or separable reaction chamber. The loading port 25 includes a lower loading port edge 27 positioned at the loading / unloading height.

[0100] The chamber support leg 12 is located below the vacuum chamber 20. The chamber support leg 12 extends from the bottom surface 26 of the vacuum chamber 20 and is mounted on the bottom surface 26 of the vacuum chamber 20.

[0101] It should be noted that the chamber support leg 12 can be replaced by any suitable support member configured to support the vacuum chamber 20 on the support surface.

[0102] The atomic layer deposition reactor 10 also includes a precursor system 40 configured to supply one or more precursor gases to and from the reaction chamber within the vacuum chamber 20. The precursor system 40 includes one or more precursor sources (not shown), a supply conduit (not shown), an exhaust conduit (not shown), and one or more supply and / or exhaust pumps (not shown). The precursor system 40 is configured to expose the surface of the substrate to one or more precursor gases within the vacuum chamber 20 and the reaction chamber.

[0103] The atomic layer deposition reactor 10 also includes a vacuum system 50 configured to provide a vacuum within the vacuum chamber 20 when the loading port 25 is closed. The vacuum system 50 includes one or more vacuum devices, such as a vacuum pump, for creating vacuum conditions within the vacuum chamber 20.

[0104] It should be noted that in some embodiments, the vacuum chamber 20 also forms a reaction chamber.

[0105] The apparatus also includes a loading device 100. This loading device is positioned opposite the loading wall 21 and loading port 25 of the vacuum chamber 20. The loading device 100 is configured to load a separate reaction chamber or a separate substrate within the vacuum chamber 20 through the loading port 25.

[0106] The loading device 100 includes a first loading member 120 and a second loading member 122. The first loading member 120 and the second loading member 122 are configured to load and unload the separate reaction chamber into the vacuum chamber 20 through the loading port 25.

[0107] The first loading member 120 and the second loading member 122 are disposed above the lower loading port edge 27 in the loading device 100, such that the separate reaction chamber is configured to be transported horizontally to and from the vacuum chamber.

[0108] Figure 2 A schematic side view of an embodiment of a loading device 100 according to the present invention is shown. The loading device 100 includes a loading device body 104, which is supported to a support surface such as a facility floor by one or more support legs 102.

[0109] The loading device 100 also includes a loading platform 110. The loading platform 110 is a loading table or loading plate. The loading platform 110 is supported to the loading device body 104. The loading platform 110 is rotatably supported to the loading device body 104 such that the loading platform 110 can rotate in the horizontal direction and in the direction of its upper surface 111. The loading device 100 includes a vertical rotation axis 114, and the loading platform 110 is configured to be rotatably supported to the loading device body 104 such that the loading platform 110 can rotate relative to the loading device body 104 about the vertical rotation axis 114. The vertical rotation axis 114 is connected to the loading platform 110. The loading device 100 also includes a rotary motor 112 connected to the vertical rotation axis 114 and configured to rotate the vertical rotation axis and further rotate the loading platform 110.

[0110] The loading device 100 also includes a first loading member 120 and a second loading member 122 disposed on the loading platform 110. The first loading member 120 and the second loading member 122 are supported to the loading platform 110 and are configured to rotate or swivel together with the loading platform 110 about the rotation axis 114.

[0111] like Figure 2 As shown, the first loading member and the second loading member are supported on the upper surface 111 of the loading platform 110.

[0112] Figure 3A top view of the loading device 10 and the loading platform 110 is shown. The loading platform 110 includes a first end 115, a second end 116, and a first direction A extending in a certain direction between the first end 115 and the second end 116. The first end 115 is configured to face and be directed toward the loading port of the vacuum chamber 20.

[0113] The loading platform 110 is provided with a first loading member 120. The first loading member 120 is formed as a longitudinal loading arm extending along a first direction A. The first loading member 120 is provided with a first loading connector 124 to provide connection with the reaction chamber.

[0114] The first loading connector 124 is located at or near the first distal end 121 of the first loading arm. The first distal end 121 faces the vacuum chamber 20. Figure 3 In one embodiment, the first loading connector 124 is a first connector pin that extends from the first loading arm laterally or perpendicularly to the first direction A.

[0115] The loading platform 110 is also provided with a second loading member 122. The second loading member 122 is formed as a longitudinal loading arm extending along a first direction A. The first loading arm and the second loading arm are arranged parallel to each other and spaced apart from each other. The second loading member 122 is provided with a second loading connector 126 to provide a connection to the reaction chamber.

[0116] The second loading connector 126 is located at or near the second distal end 123 of the second loading arm. The second distal end 123 faces the vacuum chamber 20. Figure 3 In one embodiment, the second loading connector 126 is a second connector pin that extends from the second loading arm laterally or perpendicularly to the first direction A.

[0117] exist Figure 3 In this configuration, the first connector pin extends laterally in a first direction A from the first loading arm toward the second loading arm. Similarly, the second connector pin extends laterally in a first direction A from the second loading arm toward the first loading arm.

[0118] The first loading arm is configured to move independently relative to the loading platform 110 and the second loading arm along a first direction A. Therefore, the first loading arm is configured to move independently along its longitudinal direction and the first direction A. The first loading arm is configured to move on the loading platform 110 along the first direction A.

[0119] The loading device 100 includes a first loading motor 140, which is configured to move a first loading arm along a first direction A with a first loading motion X1. The first loading motor 140 is connected to or operably connected to the first loading arm.

[0120] The first loading member 120 is configured to move independently relative to the loading platform 110 and the second loading member 122 in a second direction that is transverse to or perpendicular to the first direction A. Therefore, the first loading arm is configured to move independently transverse to or perpendicular to its longitudinal direction and the first direction A. The first loading arm is configured to move along the second direction on the loading platform 110.

[0121] The loading device 100 includes a first connecting motor 130 configured to move a first loading arm along a second direction by a first connecting motion Y1. The first connecting motor 130 is connected to or operably connected to the first loading arm.

[0122] The second loading arm is configured to move independently relative to the loading platform 110 and the first loading arm along a first direction A. Therefore, the second loading arm is configured to move independently along its longitudinal direction and the first direction A. The second loading arm is configured to move on the loading platform 110 along the first direction A.

[0123] The loading device 100 includes a second loading motor 142, which is configured to move a second loading arm along a first direction A with a second loading motion X2. The second loading motor 142 is connected to or operably connected to the second loading arm.

[0124] The second loading member 122 is also configured to move independently relative to the loading platform 110 and the first loading member 120 along a second direction that is transverse to or perpendicular to the first direction A. Therefore, the second loading arm is configured to move independently transverse to or perpendicular to its longitudinal direction and the first direction A. The second loading arm is configured to move along the second direction on the loading platform 110.

[0125] The loading device 100 includes a second connecting motor 132 configured to move a second loading arm along a second direction by a second connecting motion Y2. The second connecting motor 132 is connected to or operably connected to the second loading arm.

[0126] The loading platform 110 is also provided with a first transfer track 160 extending along a first direction A. The first transfer track 160 is supported on the upper surface 111 of the loading platform 110.

[0127] exist Figure 3 In one embodiment, the first transfer track 160 is configured to extend from a first end 115 of the loading platform 110 to a second end 116 along a first direction A.

[0128] The loading platform 110 is also provided with a second transfer track 162 extending along the first direction A. The second transfer track 162 is supported on the upper surface 111 of the loading platform 110.

[0129] exist Figure 3 In one embodiment, the second transfer track 162 is configured to extend from the first end 115 of the loading platform 110 to the second end 116 along a first direction A.

[0130] The first transfer track 160 and the second transfer track 162 are arranged to extend parallel to each other and spaced apart from each other along a first direction A. A first loading arm and a second loading arm are disposed between the first transfer track 160 and the second transfer track 162. The first transfer track 160 and the second transfer track 162 are configured to support the reaction chamber during loading into and unloading from the vacuum chamber 20. Furthermore, the reaction chamber is configured to move along and on the first transfer track 160 and the second transfer track 162 in the first direction A.

[0131] Figure 4 An alternative embodiment is shown where the first loading arm is supported to the first loading track 170. The first loading track 170 extends along a first direction A, and the first loading arm is configured to move along the first loading track 170 in the first direction A with a first loading motion X1 via a first loading motor 140.

[0132] In addition, the first connecting motor 130 is configured to move the first loading arm along the first loading track 170 in a second direction.

[0133] The second loading arm is supported on the second loading track 172. The second loading track 172 extends along a first direction A, and the second loading arm is configured to move along the second loading track 172 in the first direction A with a second loading motion X2 via a second loading motor 142.

[0134] In addition, the second connecting motor 132 is configured to move the second loading arm along the second loading track 172 in the second direction.

[0135] The first loading track 170 and the second loading track 172 are disposed and supported on the upper surface 111 of the loading platform 110. The first loading track 170 and the second loading track 172 are fixed on the loading platform 110.

[0136] Figure 5 It shows Figure 4 An end view of the loading device 100. A first transfer track 160 includes a first transfer surface 162 configured to support the upper surface of the reaction chamber. A second transfer track 162 includes a second transfer surface 166 configured to support the upper surface of the reaction chamber. The second transfer track 162 includes a groove extending along it. A second support surface 166 is configured as the bottom surface of the groove. The sidewalls of the groove provide lateral support to the reaction chamber during loading and unloading along the first transfer track 160 and the second transfer track 162.

[0137] Figure 6 A reaction chamber 200 is shown to be supported on a loading device 100 and a loading platform 110. The reaction chamber 200 includes a chamber base 210 and a processing chamber 250 supported on the chamber base 210. The processing chamber 250 is supported on an upper base surface 212 of the chamber base 210. The chamber base 210 and the reaction chamber 200 include a first chamber end 215 and a second chamber end 216.

[0138] The chamber base 210 is provided with first longitudinal support rails 220, 221, 222 and second longitudinal support rails 224, 225, 226. The first longitudinal support rails 220, 221, 222 and the second longitudinal support rails 224, 225, 226 are spaced apart from each other and extend parallel to each other. The first support rails 220, 221, 222 are configured to support a first transmission rail 160 or a first transmission surface 164. The second support rails 224, 225, 226 are configured to support a second transmission rail 162 or a second transmission surface 166.

[0139] The first longitudinal support rails 220, 221, 22 and the second longitudinal support rails 224, 225, 226 are disposed on the bottom surface 214 of the chamber base 210.

[0140] The first longitudinal support track includes a first support wheel 220 supported between opposing longitudinal wheel supports 221 and 222. The first support wheel 220 is arranged sequentially along the first support tracks 220, 221, and 222, as follows: Figure 7 As shown. Figure 13 As shown, the first support wheel 220 is configured to support the first transmission track 160 or the first transmission surface 164.

[0141] The second longitudinal support track includes a first support wheel 224 supported between opposing longitudinal wheel supports 225 and 226. The second support wheel 224 is sequentially arranged along the second support tracks 224, 225, and 226. Figure 13 As shown, the second support wheel 224 is configured to support the second transmission track 162 or the second transmission surface 166.

[0142] like Figure 8 As shown, the chamber base 210 is also provided with a first longitudinal loading element 230, which has two or more first opposing connectors 234. The first longitudinal loading element 230 is arranged to extend parallel to the first support rails 220, 221, 222, and the two or more first opposing connectors 234 are continuously arranged along the direction of the first longitudinal loading element 230. The first opposing connectors 234 are formed as first opposing connector holes.

[0143] The chamber base 210 is also provided with a second longitudinal loading element 232, which has two or more second opposing connectors 234. The second longitudinal loading element 232 is configured to extend parallel to the first support rails 220, 221, 222 and the first longitudinal loading element 230, and the two or more second opposing connectors 234 are continuously arranged along the direction of the second longitudinal loading element 232. The second opposing connectors 234 are formed as second opposing connector holes.

[0144] The first longitudinal loading element 230 and the second longitudinal loading element 232 are disposed on the bottom surface 214 of the chamber base 210.

[0145] Alternatively, the first opposing connector and the second opposing connector are respectively disposed on the first support rails 220, 221, 222 and the second support rails 224, 225, 226.

[0146] Figure 9 An alternative embodiment is shown with only one longitudinal loading element 235 disposed on the chamber base 210. The longitudinal loading element 235 includes a first opposing connector 234 located on a first side 236 configured to face the first support rails 220, 221, 222. The longitudinal loading element 235 includes a second opposing connector 234 located on a second side 237 configured to face the second support rails 224, 225, 226.

[0147] Figure 10 A top view of the reaction chamber 200 is shown. The chamber base 210 includes a gas outlet 260 disposed between a second chamber end 216 of the chamber base 210 and a processing chamber 250. The gas outlet 260 extends through the chamber base 210. The chamber base 210 also includes a gas supply outlet 262 disposed between a first chamber end 215 of the chamber base 210 and the processing chamber 250. The gas supply outlet 262 extends through the chamber base 210.

[0148] Figure 11 A side view of reaction chamber 200 is shown. Reaction chamber 200 includes a gas discharge conduit 264 extending between gas discharge port 260 and processing chamber 250. Reaction chamber 200 also includes a gas supply conduit 266 extending between gas supply port 262 and processing chamber 250.

[0149] Figure 12 A bottom view of the reaction chamber 200 is shown. The reaction chamber 200 and the chamber base 210 include a first chamber end 215, a second chamber end 216, and a third direction B extending between the first chamber end 215 and the second chamber end 216.

[0150] The first longitudinal loading element 230 and the second longitudinal loading element 232, as well as the first support rails 220, 221, 222 and the second support rails 224, 225, 226, are configured to extend along a third direction B.

[0151] Preferably, the first longitudinal loading element 230 and the second longitudinal loading element 232, as well as the first support rails 220, 221, 222 and the second support rails 224, 225, 226 are configured to extend along a third direction B and from the first chamber end 215 to the second chamber end 216.

[0152] Figure 13 A reaction chamber 200 or chamber base 210 is shown, which is supported by the loading device 100 and the loading platform 110. When the reaction chamber 200 is supported by the loading platform 110, a third direction B of the loading platform 110 is parallel to a first direction A of the loading platform 110. Furthermore, first support rails 220, 221, and 222 are supported by a first transfer rail 160, and second support rails 224, 225, and 226 are supported by a second transfer rail 162, and they extend parallel to each other.

[0153] exist Figure 13 In this configuration, a first loading arm is configured to connect to a parallel first longitudinal loading element 230. Therefore, a first loading connector 124 connects to one of the first opposing connectors 234 of the first longitudinal loading element 230. A second loading arm is configured to disconnect from the parallel second longitudinal loading element 232. Therefore, a second loading connector 126 disconnects from the second opposing connector 234 of the second longitudinal loading element 232.

[0154] Figures 14 to 21 A method for loading or unloading reaction chamber 200 within and from vacuum chamber 20 is shown. During loading and unloading, as... Figure 13 As shown, the reaction chamber 200 is supported by the loading device 100 and the loading platform 110.

[0155] In this method, the reaction chamber 200 is movably supported to the loading device 100 such that the first direction A of the loading device 100 and the third direction B of the reaction chamber 200 extend parallel to each other.

[0156] First, the first and second loading arms are disconnected from the reaction chamber.

[0157] like Figure 14As shown, the method includes connecting a first loading arm to a reaction chamber 200. In this method, the first loading arm is moved to a first initial loading position by a first connecting motor 130 along a second direction transverse to the first direction A with a first connecting motion Y1. The first loading arm moves toward a first loading element 230 and / or a second loading arm with the first connecting motion Y1, such that a first loading connector 124 of the first loading arm is connected to a first opposing connector 234 of the reaction chamber 200 corresponding to the first initial loading position.

[0158] Then, as Figure 15 As shown, the first loading member 120 connected to the reaction chamber 200 is moved to a first forward position along the first direction A with a first loading motion X1 by the first loading motor 140, and the reaction chamber 200 moves toward the vacuum chamber 20 or forward along the first direction A.

[0159] like Figure 16 As shown, the method includes connecting a second loading arm to a reaction chamber 200. In this method, the second loading arm is moved to a second initial loading position by a second connecting motor 132 along a second direction transverse to the first direction A with a second connecting motion Y2. The second loading arm moves toward a second loading element 232 and / or a first loading arm with the second connecting motion Y2, such that a second loading connector 126 of the second loading arm is connected to a second opposing connector 234 of the reaction chamber 200 corresponding to the second initial loading position.

[0160] Then, as Figure 17 As shown, the method includes disconnecting the first loading arm from the reaction chamber 200. Disconnection is performed by moving the first loading arm in a second direction transverse to the first direction A with a first connecting motion Y1 via a first connecting motor 130. The first loading arm moves away from the first loading element 230 and / or the second loading arm with the first connecting motion Y1, causing the first loading connector 124 of the first loading arm to disconnect from the first opposing connector 234 of the reaction chamber 200.

[0161] like Figure 18 As shown, the method further includes: moving the second loading member 122 connected to the reaction chamber 200 to a second forward position along the first direction A with a second loading motion X2 via the second loading motor 142, so that the reaction chamber 200 moves toward the vacuum chamber 20 or forward along the first direction A.

[0162] Therefore, during loading, the reaction chamber 200 moves alternately toward the vacuum chamber 20 via the first loading arm and the second loading arm.

[0163] like Figure 18As shown, the method may further include: moving a first loading arm, which is disconnected from the reaction chamber 200, away from the vacuum chamber 20 along a first direction A to a first rear position. Therefore, the first loading arm is moved rearward away from the vacuum chamber 20 along the first direction A by a first loading motion X1 via the first loading motor 140.

[0164] The method and loading can continue, such that the method includes connecting a first loading arm to the reaction chamber 200. In this method, the first loading arm moves toward the first loading element 230 and / or the second loading arm with a first connection movement Y1, such that a first loading connector 124 of the first loading arm connects to a first opposing connector 234 of the reaction chamber 200 corresponding to the first rear position, as shown. Figure 19 As shown.

[0165] Then, as Figure 20 As shown, the method includes disconnecting the second loading arm from the reaction chamber 200. Disconnection is performed by moving the second loading arm in a second direction transverse to the first direction A with a second connection movement Y2 via a second connection motor 132. The second loading arm moves away from the second loading element 232 and / or the first loading arm with the second connection movement Y2, causing the second loading connector 126 of the second loading arm to disconnect from the second opposing connector 234 of the reaction chamber 200.

[0166] Then, as Figure 21 As shown, the first loading member 120 connected to the reaction chamber 200 is moved toward the vacuum chamber 20 along the first direction A with a first loading motion X1 by the first loading motor 140, and the reaction chamber 200 is further moved toward the vacuum chamber 20 or forward along the first direction A.

[0167] like Figure 21 As shown, the method may further include: moving a second loading arm, which is disconnected from the reaction chamber 200, away from the vacuum chamber 20 along a first direction A to a second rear position. Therefore, the second loading arm is moved rearward away from the vacuum chamber 20 along the first direction A by a second loading motion X2 via the second loading motor 142.

[0168] The reaction chamber 200 can continue to move alternately via the first loading arm and the second loading arm until the reaction chamber 200 is loaded into the vacuum chamber 20.

[0169] The method may also include unloading reaction chamber 200 from vacuum chamber 20.

[0170] The method for unloading includes: firstly, the first loading arm is moved forward toward the vacuum chamber 20 in a first loading motion X1 along a first direction A by the first loading motor 140 to a first initial unloading position.

[0171] The method then includes connecting a first loading arm to the reaction chamber 200. In this method, the first loading arm is moved by a first connecting motor 130 along a second direction transverse to the first direction A by a first connecting motion Y1. The first loading arm moves toward the first loading element 230 and / or the second loading arm by the first connecting motion Y1, such that a first loading connector 124 of the first loading arm is connected to a first opposing connector 234 of the reaction chamber 200 corresponding to the first initial unloading position.

[0172] Then, the first loading member 120 connected to the reaction chamber 200 is moved to a first rear position along the first direction A with a first loading motion X1 by the first loading motor 140, and the reaction chamber 200 moves away from the vacuum chamber 20 or moves backward along the first direction A.

[0173] The method for unloading includes: firstly, the second loading arm is moved forward toward the vacuum chamber 20 in a second loading motion X2 along the first direction A by the second loading motor 140 to the second initial unloading position.

[0174] The method includes connecting a second loading arm to a reaction chamber 200. In this method, the second loading arm is moved by a second connecting motor 132 along a second direction transverse to the first direction A by a second connecting motion Y2. The second loading arm moves with the second connecting motion Y2 toward a second loading element 232 and / or a first loading arm, such that a second loading connector 126 of the second loading arm connects to a second opposing connector 234 of the reaction chamber 200 corresponding to a second initial unloading position.

[0175] The method then includes disconnecting the first loading arm from the reaction chamber 200. Disconnection is performed by moving the first loading arm in a second direction transverse to the first direction A with a first connecting motion Y1 via a first connecting motor 130. The first loading arm moves away from the first loading element 230 and / or the second loading arm with the first connecting motion Y1, causing the first loading connector 124 of the first loading arm to disconnect from the first opposing connector 234 of the reaction chamber 200.

[0176] Then, the second loading member 122 connected to the reaction chamber 200 is moved to the second rear position along the first direction A with a second loading motion X2 by the second loading motor 142, so that the reaction chamber 200 moves away from the vacuum chamber 20 or moves backward along the first direction A.

[0177] Therefore, during unloading, the reaction chamber 200 moves away from the vacuum chamber 20 alternately by the first loading arm and the second loading arm.

[0178] The method may further include: moving a first loading arm, which is disconnected from the reaction chamber 200, toward a first forward position along a first direction A toward the vacuum chamber 20. Therefore, the first loading arm is moved forward toward the vacuum chamber 20 along the first direction A by a first loading motion X1 via the first loading motor 140.

[0179] The method and unloading can continue, such that the method includes connecting a first loading arm to the reaction chamber 200. In this method, the first loading arm moves toward the first loading element 230 and / or the second loading arm with a first connection movement Y1, such that a first loading connector 124 of the first loading arm connects to a first opposing connector 234 of the reaction chamber 200 corresponding to the first pre-position.

[0180] The method then includes disconnecting the second loading arm from the reaction chamber 200. Disconnection is performed by moving the second loading arm in a second direction transverse to the first direction A with a second connection movement Y2 via a second connection motor 132. The second loading arm moves away from the second loading element 232 and / or the first loading arm with the second connection movement Y2, causing the second loading connector 126 of the second loading arm to disconnect from the second opposing connector 234 of the reaction chamber 200.

[0181] The first loading motor 140 causes the first loading member 120 connected to the reaction chamber 200 to move away from the vacuum chamber 20 along the first direction A with a first loading movement X1, and the reaction chamber 200 moves further away from the vacuum chamber 20 or moves backward along the first direction A.

[0182] The method may further include moving a second loading arm, which is disconnected from the reaction chamber 200, toward a second forward position along a first direction A toward the vacuum chamber 20. Therefore, the second loading arm is moved forward toward the vacuum chamber 20 along the first direction A by a second loading motion X2 via the second loading motor 142.

[0183] The reaction chamber 200 can continue to move alternately via the first loading arm and the second loading arm until the reaction chamber 200 is unloaded from the vacuum chamber 20.

[0184] Therefore, in this invention, the first loading member 120 or the first loading connector 124 is moved along the second direction by the first loading motor 130 with a first connection movement Y1, so that the first loading connector 124 of the first loading member 120 is connected to the first opposing connector 234 of the reaction chamber 200, and the connection between the first loading connector 124 of the first loading member 120 and the first opposing connector 234 of the reaction chamber 200 is disconnected.

[0185] Similarly, the second loading member 122 or the second loading connector 126 is moved along the second direction with a second connection movement Y2 by the second loading motor 132, connecting the second loading connector 126 of the second loading member 122 to the second opposing connector 234 of the reaction chamber 200, and disconnecting the connection between the second loading connector 126 of the first loading member 120 and the second opposing connector 234 of the reaction chamber 200.

[0186] The invention has been described above with reference to the examples shown in the accompanying drawings. However, the invention is by no means limited to the above examples, but can be varied within the scope of the claims.

Claims

1. A loading device (100) for loading a reaction chamber (200) into a vacuum chamber (20), characterized in that, The loading device (100) includes: - A loading platform (110) is configured to support the reaction chamber (200), the loading platform (110) having a first end (115), a second end (116) and a first direction (A) extending in a certain direction between the first end (115) and the second end (116). - A first loading member (120), disposed on the loading platform (110), the first loading member (120) including a first loading connector (124), the first loading connector (124) being configured to provide a mechanical connection with the reaction chamber (200); and - A second loading member (122) is disposed on the loading platform (110), the second loading member (122) including a second loading connector (126) configured to provide a mechanical connection with the reaction chamber (200); The first loading member (120) is configured to move independently relative to the loading platform (110) and the second loading member (122) along the first direction (A); and The second loading member (122) is configured to move independently relative to the loading platform (110) and the first loading member (120) along the first direction (A), wherein, - The first loading member (120) is configured to move independently relative to the loading platform (110) and the second loading member (122) in a second direction transverse to the first direction (A); and - The second loading member (122) is configured to move independently relative to the loading platform (110) and the first loading member (120) in a second direction transverse to the first direction (A); or - The first loading connector (124) of the first loading member (120) is configured to be independently movable relative to the loading platform (110) and the second loading member (122) in a second direction transverse to the first direction (A); and - The second loading connector (126) of the second loading member (122) is configured to be independently movable relative to the loading platform (110) and the first loading member (120) in a second direction transverse to the first direction (A).

2. The loading device (100) according to claim 1, characterized in that, The loading device (100) includes: - A first loading motor (140), connected to the first loading member (120) and configured to move the first loading member (120) along the first direction (A) in a first loading motion (X1); and - A second loading motor (142) is connected to the second loading member (122) and is configured to move the second loading member (122) along the first direction (A) in a second loading motion (X2).

3. The loading device (100) according to claim 1, characterized in that, The loading device (100) includes: - A first connecting motor (130), connected to the first loading member (120) and configured to move the first loading member (120) along the second direction with a first connecting motion (Y1); and - A second connecting motor (132), connected to the second loading member (122) and configured to move the second loading member (122) along the second direction with a second connecting motion (Y2); or - A first connecting motor (130), connected to the first loading connector (124) of the first loading member (120) and configured to move the first loading connector (124) along the second direction with a first connecting movement (Y1); and - A second connecting motor (132) is connected to the second loading connector (126) of the second loading member (122) and is configured to move the second loading connector (126) in the second direction with a second connecting motion (Y2).

4. The loading device (100) according to claim 1, characterized in that, The first loading member (120) includes a first loading arm extending along the first direction (A), and the second loading member (122) includes a second loading arm extending along the first direction (A), the first loading arm and the second loading arm being spaced apart from each other.

5. The loading device (100) according to claim 1, characterized in that: - The first loading connector (124) includes a first connector pin, and the second loading connector (126) includes a second connector pin; or - The first loading connector (124) includes a first connector hole, and the second loading connector (126) includes a second connector hole.

6. The loading device (100) according to claim 5, characterized in that: - The first connector pin and the second connector pin extend along the second direction; or - The first connector hole and the second connector hole extend along the second direction.

7. The loading device (100) according to claim 1, characterized in that, The loading platform (110) includes: - A first transmission track (160) extending along the first direction (A); and - A second transmission track (162) extends along the first direction (A) and is configured to be spaced apart from the first transmission track (160); The first transfer track (160) and the second transfer track (162) are configured to support the reaction chamber (200) during loading.

8. The loading device (100) according to claim 1, characterized in that, The loading device (100) includes a main body (102, 104) and the loading platform (110) is rotatably supported on the main body (102, 104).

9. An apparatus for atomic layer deposition, the apparatus comprising: - Vacuum chamber (20) is provided with loading port (25); as well as - A loading device (100) is configured opposite the loading port (25) of the vacuum chamber (20) for loading the reaction chamber (200) into the vacuum chamber (20) through the loading port (25). The loading device (100) is characterized in that it comprises: - A first transfer track (160) extends along a first direction (A) of the loading device (100); and - A second transmission track (162) extends along the first direction (A); - A first loading member (120) is provided with a first loading connector (124), the first loading connector (124) being configured to provide a connection with the reaction chamber (200); and - The second loading member (122) is provided with a second loading connector (126), which is configured to provide a connection with the reaction chamber (200); The first loading member (120) is configured to be independently movable relative to the second loading member (122) and the vacuum chamber (20) along the first direction (A); and The second loading member (122) is configured to move independently relative to the first loading member (120) and the vacuum chamber (20) along the first direction (A), wherein, - The first loading member (120) is configured to be independently movable relative to the second loading member (122) in a second direction transverse to the first direction (A); and - The second loading member (122) is configured to move independently relative to the first loading member (120) in a second direction transverse to the first direction (A); or - The first loading connector (124) of the first loading member (120) is configured to be independently movable relative to the second loading member (122) in a second direction transverse to the first direction (A); and - The second loading connector (126) of the second loading member (122) is configured to be independently movable relative to the first loading member (120) in a second direction transverse to the first direction (A).

10. The apparatus according to claim 9, characterized in that, The device further includes a movable reaction chamber (200), the movable reaction chamber (200) comprising: - A first support track (220, 221, 222) extends along a third direction (B) of the reaction chamber (200) and is configured to support the first transfer track (160) of the loading device (100). - Second support rails (224, 225, 226) extend along the third direction (B) and are configured to support the second transfer rail (162) of the loading device (100). - Two or more first opposing connectors (234), continuously arranged along the third direction (B) and configured to connect with the first loading connector (124) of the first loading member (120); and - Two or more second opposing connectors (234) are arranged continuously along the third direction (B) and configured to connect with the second loading connector (126) of the second loading member (122).

11. The apparatus according to claim 10, characterized in that: - The first loading connector (124) includes a first connector pin, and the two or more first opposing connectors (234) include two or more first opposing connector holes, the first connector pin and the two or more first opposing connector holes extending along a second direction transverse to the first direction (A) and the third direction (B); as well as - The second loading connector (126) includes a second connector pin, and the two or more second opposing connectors (234) include two or more second opposing connector holes, the second connector pin and the two or more second opposing connector holes extending in a second direction transverse to the first direction (A) and the third direction (B).

12. The apparatus according to claim 9, characterized in that, The loading port (25) of the vacuum chamber (20) includes a lower opening edge (27), and the first transfer track (160) and the second transfer track (162) are arranged vertically above the lower opening edge (27) of the loading port (25).

13. The apparatus according to claim 9, characterized in that, The loading device (100) is the loading device according to any one of claims 1 to 8.

14. A method for loading and unloading a reaction chamber (200) within and therefrom a vacuum chamber (20), said vacuum chamber (20) comprising a loading port (25), characterized in that, The method is performed by a loading device (100) configured to face the loading port (25) of the vacuum chamber (20), the loading device (100) comprising: - A first loading member (120) is provided with a first loading connector (124), the first loading connector (124) being configured to provide a connection with the reaction chamber (200), and the first loading member (120) being configured to be independently movable along a first direction (A) of the loading device (100); and - A second loading member (122) is provided with a second loading connector (126), the second loading connector (126) being configured to provide a connection with the reaction chamber (200), and the second loading member (122) being configured to be independently movable along the first direction (A) of the loading device (100); and The reaction chamber (200) includes: - Two or more first opposing connectors (234) are continuously arranged along a third direction (B) of the reaction chamber (200) and configured to provide connection with the first loading connectors (124) of the first loading member (120); and - Two or more second opposing connectors (234) are arranged continuously along the third direction (B) of the reaction chamber and are configured to provide connection with the second loading connector (126) of the second loading member (122); The method includes loading the reaction chamber (200) into the vacuum chamber (20), the loading comprising the following steps: a) The reaction chamber (200) is movably supported to the loading device (100) such that the first direction (A) of the loading device (100) and the third direction (B) of the reaction chamber extend parallel to each other; b) Set the first loading member (120) to the first initial loading position and connect the first loading connector (124) of the first loading member (120) to the first opposing connector (234) of the reaction chamber (200) corresponding to the first initial loading position. c) By moving the first loading member (120) connected to the reaction chamber (200) along the first direction (A) to a first forward position, the reaction chamber (200) is moved toward the vacuum chamber (20) along the first direction (A); d) Position the second loading member (122) to the second initial loading position and connect the second loading connector (126) of the second loading member (122) to the second opposing connector (234) of the reaction chamber (200) corresponding to the second initial loading position. e) Disconnect the first loading connector (124) of the first loading member (120) from the first opposing connector (234) of the reaction chamber (200); and f) By moving the second loading member (122) connected to the reaction chamber (200) along the first direction (A) to a second forward position, the reaction chamber (200) is moved toward the vacuum chamber (20) along the first direction (A).

15. The method according to claim 14, characterized in that, The method further includes the following steps: g) Move the first loading member (120) disconnected from the reaction chamber (200) away from the vacuum chamber (20) along the first direction (A) to a first rear position, step g) is performed after step e); h) Connect the first loading connector (124) of the first loading member (120) to the first opposing connector (234) of the reaction chamber (200) corresponding to the first rear position. i) Disconnect the second loading connector (126) of the second loading member (122) from the second opposing connector (234) of the reaction chamber (200); and j) The reaction chamber (200) is moved toward the vacuum chamber (20) along the first direction (A) by moving the first loading member (120) connected to the reaction chamber (200) toward the vacuum chamber (20) along the first direction (A).

16. The method according to claim 14, characterized in that, The method includes unloading the reaction chamber (200) into the vacuum chamber (20), the unloading comprising the following steps: k) Set the first loading member (120) to the first initial unloading position and connect the first loading connector (124) of the first loading member (120) to the first opposing connector (234) of the reaction chamber (200) corresponding to the first initial unloading position. l) By moving the first loading member (120) connected to the reaction chamber (200) along the first direction (A) to a first rear position, the reaction chamber (200) is moved away from the vacuum chamber (20) along the first direction (A); m) Set the second loading member (122) to the second initial unloading position and connect the second loading connector (126) of the second loading member (122) to the second opposing connector (234) of the reaction chamber (200) corresponding to the second initial unloading position. n) Disconnect the first loading connector (124) of the first loading member (120) from the first opposing connector (234) of the reaction chamber (200); and o) By moving the second loading member (122) connected to the reaction chamber (200) along the first direction (A) to a second rear position, the reaction chamber (200) is moved away from the vacuum chamber (20) along the first direction (A).

17. The method according to claim 16, characterized in that, The method further includes the following steps: p) Move the first loading member (120), which is disconnected from the reaction chamber (200), toward the vacuum chamber (20) in the first direction (A) to a first pre-position, and step p) is performed after step n); q) Connect the first loading connector (124) of the first loading member (120) to the first opposing connector (234) of the reaction chamber (200) corresponding to the first preposition. r) Disconnect the second loading connector (126) of the second loading member (122) from the second opposing connector (234) of the reaction chamber (200); and s) The reaction chamber (200) is moved away from the vacuum chamber (20) along the first direction (A) by moving the first loading member (120) connected to the reaction chamber (200) away from the vacuum chamber (20) along the first direction (A).

18. The method according to claim 14, characterized in that: - By moving the first loading member (120) or the first loading connector (124) along a second direction, the first loading connector (124) of the first loading member (120) is connected to the first opposing connector (234) of the reaction chamber (200), and the connection between the first loading connector (124) of the first loading member (120) and the first opposing connector (234) of the reaction chamber (200) is disconnected, the second direction being transverse to the first direction; and - By moving the second loading member (122) or the second loading connector (126) along the second direction, the second loading connector (126) of the second loading member (122) is connected to the second opposing connector (234) of the reaction chamber (200), and the connection between the second loading connector (126) of the first loading member (120) and the second opposing connector (234) of the reaction chamber (200) is disconnected, the second direction being transverse to the first direction.

19. The method according to claim 14, characterized in that, The method is performed by the apparatus according to any one of claims 9 to 13.

Images