Fluid device and method of controlling a fluid device

Abstract

A fluid device and a control method of the fluid device capable of stably capturing a desired size of a particle. The fluid device (10) includes a flow path (20) through which a fluid containing a particle flows, an ultrasonic wave transmitting section (60) that transmits an ultrasonic wave to the fluid in the flow path (20) in accordance with input of a drive signal, a flow rate measuring section (40) that measures a flow rate of the fluid in the flow path (20), and a control section (70) that controls the ultrasonic wave transmitting section (60), the control section (70) setting an amplitude of the drive signal in accordance with a measured flow rate measured by the flow rate measuring section (40), and inputting the drive signal of the set amplitude to the ultrasonic wave transmitting section (60).

Description

Technical Field

[0001] This invention relates to fluid apparatus and methods for controlling fluid apparatus. Background Technology

[0002] Devices for separating particles dispersed in a fluid are known in the past. For example, the fluid apparatus disclosed in Patent Document 1 includes a substrate with flow paths and a piezoelectric element disposed on the substrate. Ultrasonic waves generated by the piezoelectric element are transmitted through the substrate to the flow paths, causing standing waves to be generated in the fluid within the flow paths. Due to the pressure gradient of the fluid formed by the standing waves, the particles in the fluid are concentrated within a predetermined range in the flow paths, and a concentrate including the concentrated particles is recovered.

[0003] Patent Document 1: International Publication No. 2005 / 058459

[0004] In a fluid device as described in Patent Document 1 above, it is desirable to adjust the size of the particles that can be captured. However, there is a problem: when the output of the fluid device (i.e., the amplitude of the ultrasound) is adjusted in a way that allows the capture of particles of the desired size, the size of the particles that can be captured changes due to changes in the fluid flow rate. As a result, it is difficult to stably capture particles of the desired size. Summary of the Invention

[0005] The fluid apparatus according to the first aspect of this application comprises: a flow path for the flow of a fluid containing particles; an ultrasonic transmitting unit that transmits ultrasonic waves to the fluid in the flow path according to an input drive signal; a flow velocity measuring unit that measures the flow velocity of the fluid in the flow path; and a control unit that controls the ultrasonic transmitting unit, wherein the control unit sets the amplitude of the drive signal according to the flow velocity measured by the flow velocity measuring unit, and inputs the drive signal with the set amplitude to the ultrasonic transmitting unit.

[0006] In the control method of the fluid device according to the second aspect of this application, the fluid device includes: a flow path for the flow of a fluid containing particles; an ultrasonic transmitter for transmitting ultrasonic waves to the fluid in the flow path according to the input of a drive signal; and a flow velocity measuring unit for measuring the flow velocity of the fluid in the flow path. The control method of the fluid device sets the amplitude of the drive signal based on the flow velocity measured by the flow velocity measuring unit, and inputs the drive signal with the set amplitude to the ultrasonic transmitter. Attached Figure Description

[0007] Figure 1 This is a schematic diagram illustrating the fluid apparatus of the first embodiment.

[0008] Figure 2This is a schematic cross-sectional view of the separation module in the fluid apparatus of the first embodiment.

[0009] Figure 3 This is a flowchart illustrating the control method of the fluid device according to the first embodiment.

[0010] Figure 4 This is a schematic diagram illustrating the fluid device according to the second embodiment.

[0011] Figure 5 This is a diagram showing the flow path system in a modified fluid apparatus.

[0012] Figure 6 This is a diagram illustrating the flow path system in a fluid apparatus of other variations.

[0013] Explanation of reference numerals in the attached figures

[0014] 10, 10A… Fluid device; 20… Flow path; 21… Inlet; 22… Connecting flow path; 23… Separating flow path; 231… Inflow flow path; 232… Flow path body; 233… Concentrating flow path; 234… Discharge flow path; 235… First wall surface; 236… Second wall surface; 24… Concentrating outlet; 25… Discharge outlet; 30… Pump; 40… Flow rate measuring unit; 50… Separation module; 60… Ultrasonic transmitting unit; 60A… Ultrasonic transmitting surface; 61… Component Substrate; 611…opening; 62…vibrating diaphragm; 621…vibrating part; 63…piezoelectric element; 70…control part; 71…drive circuit; 72…processor; 721…measurement control part; 722…drive control part; 723…inspection control part; 73…memory; 80…housing; 81…display part; 90…inspection module; f…predetermined frequency; L…flow path width; M…particle; S…fluid; Sd…drive signal; SW…standing wave; V…measured flow rate. Detailed Implementation

[0015] First Implementation Method

[0016] Regarding the fluid device of the first embodiment, refer to Figure 1 as well as Figure 2 Please provide an explanation.

[0017] Structure of fluid devices

[0018] like Figure 1 as well as Figure 2 As shown, the fluid device 10 of this embodiment includes: a flow path 20 for the flow of fluid S containing particles M; a pump 30 for generating the flow of fluid S within the flow path 20; a flow rate measuring unit 40 for measuring the flow rate of fluid S in the flow path 20; a separation module 50 including a portion of the flow path 20; a control unit 70 for controlling the operation of the fluid device 10; and a housing 80 for accommodating these components.

[0019] The fluid device 10 of this embodiment captures particles M in the fluid S within the flow path 20 of the separation module 50 using ultrasound, thereby enabling the recovery of fluid S concentrated with the particles M. Furthermore, the fluid device 10 of this embodiment measures the flow rate of the fluid S flowing in the flow path 20, and based on the measurement results, sets or adjusts the output of the fluid device 10 (i.e., the amplitude of the ultrasound).

[0020] In this embodiment, the fluid S is not particularly limited; for example, it can be any liquid such as water or blood. The particle M is not particularly limited; for example, it can be a microfiber or a cell. It should be noted that... Figure 2 In the figure, for the sake of simplicity, multiple particles M are of the same size, but it is assumed that particles M of various sizes are dispersed in fluid S.

[0021] like Figure 1 As shown, the flow path 20 has: an inlet 21 for the inflow of fluid S; a connecting flow path 22 connecting the inlet 21 to the separation module 50; a separation flow path 23 included in the separation module 50; a concentration outlet 24 for discharging fluid S (i.e., concentrate) including particles M captured by the separation module 50; and a discharge outlet 25 for discharging fluid S other than the concentrate from the separation module 50. It should be noted that the concentration outlet 24 and the discharge outlet 25 correspond to the discharge outlet of this invention.

[0022] For example, pump 30 can be any device that generates the flow of fluid S within flow path 20, such as a peristaltic pump or a diaphragm pump. In this embodiment, pump 30 is disposed at any position within the connected flow path 22.

[0023] For example, the flow velocity measuring unit 40 can be any device, such as an ultrasonic flow meter, used to measure the flow velocity of the fluid S in the flow path 20. In this embodiment, the flow velocity measuring unit 40 is provided in the connecting flow path 22 at a position downstream of the pump 30, but it can also be provided at a position upstream of the pump 30.

[0024] like Figure 2 As shown, the separation module 50 includes: a separation flow path 23, which is a part of the flow path 20; and an ultrasonic transmitting unit 60 that transmits ultrasonic waves to the fluid S within the separation flow path 23.

[0025] For example, a separation flow path 23 is formed on a flow path substrate 51. The flow path substrate 51 is composed of a base substrate having a groove corresponding to the separation flow path 23 and a cover substrate covering the groove. There are no particular limitations on these substrates; for example, a glass substrate or a silicon substrate can be used. In addition, the separation flow path 23 has: an inflow flow path 231 for which fluid S flows in from the connecting flow path 22; a flow path body 232 having a standing wave formed therein; a concentration flow path 233 for selectively allowing fluid S, including particles captured by the standing wave, to flow through; and an outflow flow path 234 for selectively allowing other fluids S to flow through.

[0026] The flow path body 232 has a first wall 235 and a second wall 236 that are opposite each other in any flow path width direction (Y direction) orthogonal to the flow direction (X direction) of the fluid S. Assume that the flow path width L between the first wall 235 and the second wall 236 is a known value.

[0027] The concentration flow path 233 is connected to the concentration outlet 24 mentioned above, and the discharge flow path 234 is connected to the discharge outlet 25 mentioned above.

[0028] The ultrasonic transmitting unit 60 has an ultrasonic transmitting surface 60A that forms part of the first wall surface 235, and can transmit ultrasonic waves to the fluid S in the flow path body 232 through the ultrasonic transmitting surface 60A.

[0029] Specifically, the ultrasonic transmitting unit 60 includes a component substrate 61, a vibrating diaphragm 62 supported by the component substrate 61, and a piezoelectric element 63 disposed on the vibrating diaphragm 62. The component substrate 61 is made of a semiconductor substrate such as Si, and has an opening 611 extending through the component substrate 61 in the thickness direction. For example, the vibrating diaphragm 62 is made of a laminate obtained by laminating various types of films such as SiO2 films and ZrO2 films, is supported by the component substrate 61, and closes the opening 611. An acoustic matching layer may also be disposed in the opening 611. In this vibrating diaphragm 62, the portion of the component substrate 61 that overlaps with the opening 611 in the thickness direction when viewed from above constitutes the vibrating unit 621 for transmitting ultrasonic waves. The piezoelectric element 63 may also be disposed at a position overlapping the vibrating unit 621. Although not shown in the figure, the piezoelectric element 63 is constructed by sequentially laminating a lower electrode, a piezoelectric film, and an upper electrode on the vibrating diaphragm 62.

[0030] In this ultrasonic transmitting unit 60, when a driving signal Sd is input to the piezoelectric element 63 from the driving circuit 71 (described later), the piezoelectric film of the piezoelectric element 63 expands and contracts, thereby causing the vibrating unit 621 to bend and vibrate in the thickness direction of the element substrate 61. The bending vibration of the vibrating unit 621 is converted into a compression wave of the fluid S, thereby transmitting ultrasonic waves from the ultrasonic transmitting unit 60 to the fluid S. Here, the thickness direction of the element substrate 61 is along the flow path width direction (Y direction) of the flow path body 232, so ultrasonic waves are transmitted in this flow path width direction (Y direction).

[0031] like Figure 1 As shown, the control unit 70 includes: a drive circuit 71 for driving the ultrasonic transmitter 60; a processor 72 for performing various controls; and a memory 73.

[0032] The drive circuit 71 outputs a drive signal Sd of a predetermined frequency to the ultrasonic transmitter 60. It should be noted that the amplitude of the drive signal Sd (i.e., the drive voltage Vd) corresponds to the amplitude of the ultrasonic wave transmitted from the ultrasonic transmitter 60.

[0033] The processor 72 functions as the measurement control unit 721 and the drive control unit 722 by executing programs stored in the memory 73. Details regarding the measurement control unit 721 and the drive control unit 722 will be described later.

[0034] The memory 73 is a storage device for storing various programs and data. For example, the memory 73 stores a drive table or calculation coefficients showing the correspondence between the measured flow rate V and the drive voltage Vd. Preferably, the drive table or calculation coefficients are prepared for each particle M that becomes the target of capture. It should be noted that the size of the particle M can also be divided into arbitrary numerical ranges, such as the size and volume of the particle M.

[0035] The housing 80 houses the flow path 20, the flow rate measuring unit 40, the separation module 50, and the control unit 70. Thus, the fluid device 10 is configured as a single unit. It should be noted that the inlet 21, the concentration outlet 24, and the discharge outlet 25 of the flow path 20 are provided in the housing 80. Furthermore, the housing 80 may also house a battery that supplies power to various parts of the fluid device 10. While not particularly limiting, it is preferable to miniaturize the fluid device 10 by housing all parts in a housing 80 of 100cc or less.

[0036] Control mechanism of fluid device

[0037] In the fluid apparatus 10 of this embodiment, the mechanism for concentrating the particles M in the fluid S will be described.

[0038] The ultrasonic waves transmitted from the ultrasonic transmitting unit 60 diffuse radially in the fluid S as spherical waves. The ultrasonic waves traveling along the width direction (Y direction) of the flow path are repeatedly reflected between the first wall surface 235 and the second wall surface 236, thereby generating a standing wave SW in the flow path body 232.

[0039] Here, when the frequency of the ultrasonic wave transmitted from the ultrasonic transmitting unit 60 is set to f, the mode of the standing wave SW is set to m, the sound velocity in the fluid S is set to c, and the flow path width of the flow path 20 is set to L, the standing wave SW is formed under the condition that the following equation (1) is satisfied.

[0040]

[0041] like Figure 2 As shown, in the case of a standing wave SW generated in the first-order mode, a node appears at the center of the flow path width direction (Y direction) of the flow path body 232, and antinodes appear at each of the two ends of the flow path width direction of the flow path body 232. In this case, particles M with a higher acoustic impedance than the fluid S concentrate towards the node of the standing wave SW, i.e., the center of the flow path width direction of the flow path body 232, as the fluid S flows within the flow path body 232 (acoustic concentration). Thus, the fluid S (concentrate) including the concentrated particles M is discharged from the concentration outlet 24 via the concentration flow path 233, while the rest of the fluid S is discharged from the outlet 25 via the discharge flow path 234. That is, particles M are separated from the fluid S as concentrate.

[0042] It should be noted that, in this embodiment, for the sake of simplicity, an example of generating a first-order mode standing wave SW is used, but the mode order of the standing wave SW is not particularly limited.

[0043] Here, the so-called capture force of the particle M based on the fluid device 10 is the capture force that determines the lower limit of the size of the particles that can be captured by acoustic concentration. The greater the capture force, the smaller the particles can be captured.

[0044] The capturing force of the particles M in such a fluid device 10 depends on the amplitude of the ultrasonic wave (i.e., the driving voltage Vd) and the flow rate of the fluid S. If the driving voltage Vd is adjusted at a predetermined flow rate to capture particles M of the desired size, the range of particle sizes that can be captured will change if the flow rate varies due to variations in the output of the pump 30, etc. For example, if the flow rate increases, the fluid S will pass through the formation range of the standing wave SW before the particles M of the desired size are sufficiently concentrated, and the particles M of the desired size cannot be sufficiently captured. On the other hand, if the flow rate decreases, during the period when the fluid S passes through the formation range of the standing wave SW, smaller particles M, in addition to those of the desired size, will also concentrate, reducing the accuracy of the size of the particles M that can be captured.

[0045] Therefore, in this embodiment, the flow rate of fluid S is measured in the manner described below, and the driving voltage Vd is adjusted according to the measured flow rate (measured flow rate V), thereby enabling the stable capture of particles M of the desired size.

[0046] Control methods for fluid devices

[0047] An example of the control method for the fluid device 10 of this embodiment is referred to... Figure 3 The flowchart is explained below. It should be noted that, alternatively, the size of the particle M to be captured can be preset before the flowchart begins, or it can be set according to the user's operation. Furthermore, in this embodiment, for the sake of simplicity, the predetermined frequency f used to form the standing wave SW is set to a predetermined value.

[0048] First, pump 30 starts according to the user's initial operation (step S1). At this time, the output of pump 30 can be set according to the user's operation or can be preset to a predetermined output.

[0049] After a predetermined time has elapsed since the pump 30 was started, the measurement control unit 721 outputs a measurement instruction to the flow rate measurement unit 40, and acquires the flow rate of the fluid S (i.e., the measured flow rate V) measured by the flow rate measurement unit 40 (step S2). It should be noted that, for example, the predetermined time is the time required for the pump 30 to stabilize. Furthermore, the value of the measured flow rate V measured in step S2 is stored in the memory 73 as a reference flow rate Vs.

[0050] Next, the drive control unit 722 sets the drive voltage Vd based on the measured flow rate V measured in step S2 (step S3). This sets the amplitude of the ultrasonic wave transmitted from the ultrasonic wave transmitter 60.

[0051] For example, the drive control unit 722 determines the drive table or operation coefficient corresponding to the size of the particle M of the captured object from the memory 73, and calculates the value of the drive voltage Vd corresponding to the measured flow rate V measured in step S2 based on the determined drive table or operation coefficient, and sets the calculated value in the drive circuit 71.

[0052] Subsequently, the drive circuit 71 begins to output a drive signal Sd to the ultrasonic transmitter 60, having a predetermined frequency f for forming a standing wave SW and a drive voltage Vd set in step S3 (step S4). As a result, ultrasonic waves are transmitted from the ultrasonic transmitter 60, forming a standing wave in the fluid S, thereby initiating the separation of the concentrated liquid containing the particles M.

[0053] Then, the measurement control unit 721 determines whether a predetermined measurement time has been reached (step S5). If the measurement time has been reached (step S5; if "yes"), it outputs a measurement command to the flow rate measurement unit 40 and obtains the measurement flow rate V measured by the flow rate measurement unit 40 (step S6). The measurement time is not particularly limited; for example, it can be set to every predetermined time interval.

[0054] Next, the drive control unit 722 determines whether the measured flow rate V measured in step S6 is consistent with the reference flow rate Vs stored in the memory 73 (step S7). Here, "consistent" is not limited to complete consistency, but is defined as including a predetermined error. That is, if |V-Vs| is within a predetermined error range, it is determined that the two are consistent.

[0055] If the result is "no" in step S7, the drive control unit 722 adjusts the drive voltage Vd based on the measured flow rate V measured in step S5 (step S8).

[0056] Specifically, the drive control unit 722 determines the drive table or calculation coefficients corresponding to the size of the particles M to be captured from the memory 73, and calculates the value of the drive voltage Vd corresponding to the measured flow rate V measured in step S6 based on the determined drive table or calculation coefficients, and sets the calculated value in the drive circuit 71. In addition, the drive control unit 722 updates the value of the measured flow rate V measured in step S6 to the reference flow rate Vs stored in the memory 73.

[0057] If the measured flow velocity V is greater than the reference flow velocity Vs, the drive control unit 722 calculates a larger value than the current set value as the drive voltage Vd, and increases the drive voltage Vd set in the drive circuit 71. As a result, the particle M in the fluid S concentrates faster, so that particles M of the desired size can be sufficiently concentrated during the period when the fluid S passes through the formation range of the standing wave SW.

[0058] On the other hand, when the measured flow velocity V is smaller than the reference flow velocity Vs, the drive control unit 722 calculates a smaller value than the current set value as the drive voltage Vd, and reduces the drive voltage Vd set in the drive circuit 71. As a result, the concentration rate of particles M in the fluid S slows down, so that particles M of the desired size can be concentrated during the period when the fluid S passes through the formation range of the standing wave SW, and particles M of smaller than the desired size cannot be concentrated.

[0059] If the determination in step S7 is "yes", the driving of the ultrasonic transmitting unit 60 based on the current driving voltage Vd is continued, and the process proceeds to step S9.

[0060] Subsequently, the control unit 70 determines whether to stop the separation of the concentrate (step S9). For example, if a stop instruction has been given by the user or a predetermined time has elapsed, the control unit 70 determines "yes" in step S9 and stops the operation of the pump 30 and the ultrasonic transmitter 60 (step S10). On the other hand, if the control unit 70 determines "no" in step S9, it returns to step S5.

[0061] Based on the above, Figure 3 During the continued flow of the flowchart, the driving voltage Vd is controlled according to the measured flow rate V.

[0062] The effect of this implementation method

[0063] As described above, the fluid device 10 of this embodiment can concentrate particles M in the fluid S using the acoustic force of the ultrasonic waves transmitted from the ultrasonic wave transmitter 60. Furthermore, the amplitude of the ultrasonic waves can be appropriately set by adjusting the amplitude of the drive signal Sd according to the measured flow velocity V. As a result, particles M of the desired size can be stably captured.

[0064] In this embodiment, the control unit 70 increases the amplitude of the drive signal Sd when the measured flow velocity V is greater than the reference flow velocity Vs, and decreases the amplitude of the drive signal Sd when the measured flow velocity V is less than the reference flow velocity Vs. This allows for more stable capture of particles M of the desired size.

[0065] In this embodiment, the control unit 70 adjusts the amplitude of the drive signal Sd based on the set particle size M and the measured flow rate V. This allows for better recovery of particles M of the desired size.

[0066] In this embodiment, the flow rate measuring unit 40 measures the flow rate of the fluid S between the separation module 50 and the pump 30 in the flow path 20. In this structure, the pump 30, the flow rate measuring unit 40, and the separation module 50 can be configured as independent components, so the installation and maintenance of each component are easy.

[0067] The ultrasonic transmitting unit 60 of this embodiment includes a vibrating unit 621 disposed in the flow path 20, which can efficiently transmit ultrasonic waves from the ultrasonic transmitting unit 60 to the fluid S. This reduces power consumption.

[0068] In this embodiment, the ultrasonic transmitting unit 60 generates a standing wave SW in the fluid S by transmitting ultrasonic waves into the fluid S, which is perpendicular to the flow direction of the fluid S. As a result, the particles M in the fluid S can be concentrated at the nodes (or antinodes) of the standing wave SW, and the particles M can be effectively recovered.

[0069] In this embodiment, a housing 80 is also provided to house the flow rate measuring unit 40, the ultrasonic wave transmitting unit 60, and the control unit 70. The housing 80 is provided with an inlet 21, a concentration outlet 24, and a discharge outlet 25 for the flow path 20. In this structure, the fluid device 10 is integrated into one unit, which improves the portability of the fluid device 10.

[0070] Second Implementation Method

[0071] Regarding the fluid device of the second embodiment, refer to Figure 4 Please provide an explanation.

[0072] The fluid device 10A of the second embodiment, except that it also has a structure for inspecting particles M, has almost the same structure as the first embodiment. Hereinafter, the same symbols will be used for the same structures as in the first embodiment, and their descriptions will be omitted or simplified.

[0073] The fluid device 10A of the second embodiment includes an inspection module 90, which replaces the concentration outlet 24 of the flow path 20 of the first embodiment. The inspection module 90 is connected to the concentration flow path 233 in the separation module 50, recovers the fluid S (concentrate) including concentrated particles M, and obtains various information about the particles M in the recovered concentrate.

[0074] Furthermore, the processor 72 in the second embodiment also functions as the inspection control unit 723 of the inspection module 90 by executing the program stored in the memory 73. This inspection control unit 723 analyzes the particles M based on the information obtained by the inspection module 90. The inspection control unit 723 can display the analysis results on the display unit 81 or transmit the analysis results to an external terminal via wired or wireless means.

[0075] It should be noted that the types of inspections and analyses performed by the inspection module 90 and the inspection control unit 723 are not particularly limited. For example, the inspection module 90 and the inspection control unit 723 may also be configured as a spectrophotometer such as a cell counter for measuring the concentration of particles M. Alternatively, the inspection module 90 may be equipped with an imaging unit, and the inspection control unit 723 may analyze particles M based on the captured image. Or, the inspection module 90 may be equipped with a laser light source and a spectrometer, and the inspection control unit 723 may analyze particles M using various spectroscopic methods such as absorbance spectrophotometry and Raman spectroscopy.

[0076] The control method of the fluid device 10A in the second embodiment is the same as that in the first embodiment. Among them, Figure 3 In step S9, the determination can also be based on whether the concentrate has been successfully recovered in the inspection module 90.

[0077] In the fluid apparatus 10A of the second embodiment described above, based on the effects of the first embodiment, the recovered particles M can be inspected effectively. In particular, the fluid apparatus 10A of the second embodiment can be well utilized in inspecting particles M of a specific size in a fluid S containing particles M of various sizes.

[0078] Variations

[0079] It should be noted that the present invention is not limited to the above-described embodiments. Structures obtained by modifications, improvements, and suitable combinations of the embodiments within the scope of achieving the purpose of the present invention are included in the present invention.

[0080] Variation Example 1

[0081] In the above embodiments, an example is shown in which the flow rate measuring unit 40 is set up to measure the flow rate of the fluid S between the separation module 50 and the pump 30, but the configuration of the flow rate measuring unit 40 is not limited to this.

[0082] Figure 5 This is a flow path diagram showing the configuration of the flow rate measuring unit 40 involved in the modified example. For example... Figure 5 As shown, the flow rate measuring unit 40 may also measure the flow rate of the fluid S within the separation module 50. In this case, the flow rate measuring unit 40 can be integrated with the separation module 50. In this variation, by measuring the flow rate of the fluid S within the separation module 50, the amplitude of the drive signal Sd can be adjusted with higher precision.

[0083] Figure 6 This is a flow path diagram showing the configuration of the flow rate measuring unit 40 in other variations. For example... Figure 6 As shown, the flow rate measuring unit 40 may also measure the flow rate of the fluid S within the pump 30. In this case, the flow rate measuring unit 40 can be integrated with the pump 30. In such a variation, a commercially available pump integrated with a flow meter can be used as both the pump 30 and the flow rate measuring unit 40.

[0084] It should be noted that, in the above embodiments, for the sake of simplicity, the flow velocity measuring unit 40 is described as a component that outputs flow velocity. However, the flow velocity measuring unit 40 may be at least a sensor that detects flow velocity. In this case, the measurement control unit 721 may perform calculation processing to calculate the flow velocity based on the detection signal input from the flow velocity measuring unit 40.

[0085] Variation Example 2

[0086] In the above embodiments, the control methods for the fluid devices 10 and 10A are as follows (see...) Figure 3In order to initially set the reference flow rate Vs, a flow rate measurement based on the flow rate measuring unit 40 is performed (step S2), but it is not limited to this. For example, the initial value of the reference flow rate Vs may also be preset based on the output of the pump 30, etc. In this case, the drive voltage Vd may also be preset.

[0087] Variation Example 3

[0088] In the above embodiments, the control methods for the fluid devices 10 and 10A are as follows (see...) Figure 3 After the separation of the concentrate begins, the flow rate is repeatedly measured (step S6), and the driving voltage Vd is adjusted according to the measured flow rate V, but is not limited to this.

[0089] For example, after initially setting the driving voltage Vd based on the initially measured flow rate V (step S3), the driving voltage Vd may not be adjusted based on the measured flow rate V (steps S6 to S8).

[0090] Variation Example 4

[0091] The fluid devices 10 and 10A described above are equipped with a pump 30 that generates the flow of fluid S, but such a pump 30 may not be provided. For example, the pump 30 may be disposed outside the housing 80, and installed independently of the fluid devices 10 and 10A. Alternatively, the pump 30 may not be provided when there is flow of fluid S supplied to the fluid devices 10 and 10A.

[0092] Modified Example 5

[0093] The fluid devices 10 and 10A of the above embodiments are equipped with housings 80 that accommodate each structure, but may not be equipped with such housings 80.

[0094] Variation Example 6

[0095] In the separation module 50 of the above embodiments, a part of the flow path 20, namely the separation flow path 23, is formed, but it is not limited to this. It is also possible that the entire flow path 20 is formed in the separation module 50.

[0096] Modification Example 7

[0097] In the fluid devices 10 and 10A of the above embodiments, the structure of the ultrasonic transmitting unit 60 is not limited to the above structure.

[0098] For example, the ultrasonic transmitting unit 60 may also have multiple vibrating units 621. In this case, multiple openings 611 may be arranged in an array relative to the element substrate 61, and the portion overlapping with each opening 611 provided in the vibrating diaphragm 62 of the element substrate 61 constitutes a vibrating unit 621. A piezoelectric element 63 is provided for each vibrating unit 621, and ultrasonic waves are transmitted from each vibrating unit 621.

[0099] Alternatively, the ultrasonic transmitting unit 60 may have a structure that vibrates a piezoelectric actuator, or it may have a structure that vibrates a vibrating plate included in an electrostatic actuator. Such an ultrasonic element, by applying a drive signal Sd at a predetermined drive frequency, is able to generate vibration and transmit ultrasonic waves.

[0100] Variation Example 8

[0101] In the above embodiments, a standing wave SW is generated in the width direction of the flow path 20 as a direction orthogonal to the flow direction of the fluid S, but a standing wave SW can also be generated in the depth direction of the flow path 20.

[0102] Furthermore, the fluid devices 10 and 10A in the above embodiments are not limited to forming a standing wave SW within the flow path. For example, the fluid devices 10 and 10A can be devices that operate particles M of a desired size using acoustic forces based on ultrasound.

[0103] Summary of this application

[0104] The following is a summary of this application.

[0105] Appendix 1

[0106] The fluid apparatus of this application comprises: a flow path for the flow of a fluid containing particles; an ultrasonic transmitter for transmitting ultrasonic waves to the fluid within the flow path based on an input drive signal; a flow velocity measuring unit for measuring the flow velocity of the fluid in the flow path; and a control unit for controlling the ultrasonic transmitter, wherein the control unit sets the amplitude of the drive signal based on the flow velocity measured by the flow velocity measuring unit, and inputs the drive signal with the set amplitude to the ultrasonic transmitter.

[0107] In this structure, the acoustic force of ultrasonic waves transmitted from the ultrasonic transmitter can manipulate particles in the fluid and recover them. Furthermore, the amplitude of the ultrasonic waves can be adjusted by regulating the amplitude of the drive signal based on the measured flow rate, thereby stabilizing the size of the recovered particles.

[0108] Appendix 2

[0109] In the fluid apparatus described in Appendix 1, preferably, during the period when the ultrasonic transmitting unit transmits the ultrasonic waves to the fluid, the control unit increases the amplitude of the drive signal when the measured flow rate is greater than the reference flow rate, and decreases the amplitude of the drive signal when the measured flow rate is less than the reference flow rate. This allows for the stable recovery of particles of the desired size.

[0110] Appendix 3

[0111] In the fluid apparatus described in Appendix 1 or Appendix 2, it is preferable that the control unit sets the amplitude of the drive signal based on the size of the particles and the measured flow rate. This allows for better recovery of particles of the desired size.

[0112] Appendix 4

[0113] The fluid apparatus described in any of Appendices 1 to 3 may also include a separation module and a pump. The separation module is equipped with the ultrasonic transmitting unit and includes a portion of the flow path. The pump generates the flow of the fluid in the flow path, and the flow velocity measuring unit measures the flow velocity of the fluid between the separation module and the pump in the flow path. In such a structure, the pump, the flow velocity measuring unit, and the separation module can be constructed as independent components, so the installation and maintenance of each component are easy.

[0114] Appendix 5

[0115] The fluid apparatus described in any of Appendices 1 to 3 may also include a separation module, which is equipped with the ultrasonic transmitting unit and includes at least a portion of the flow path, wherein the flow velocity measuring unit measures the flow velocity of the fluid within the separation module. In such a configuration, the amplitude of the driving signal used to operate particles of the desired size can be set more accurately.

[0116] Appendix 6

[0117] The fluid apparatus described in any of Appendices 1 to 3 may also include a pump that generates the flow of the fluid in the flow path, and the flow velocity measuring unit measures the flow velocity of the fluid within the pump. In such a configuration, a commercially available pump integrated with a flow meter can be effectively utilized.

[0118] Appendix 7

[0119] In any of the fluid apparatuses described in Appendices 1 to 6, the ultrasonic transmitting unit preferably includes: a vibrating part disposed in the flow path; a piezoelectric element disposed in the vibrating part, and transmits the ultrasonic waves to the fluid by bending and vibrating the vibrating part. This improves the transmission efficiency of the ultrasonic waves from the ultrasonic transmitting unit to the fluid and reduces power consumption.

[0120] Appendix 8

[0121] In any of the fluid apparatuses described in Appendices 1 to 7, the ultrasonic transmitting unit preferably generates a standing wave in the fluid in a direction orthogonal to the flow direction of the fluid by transmitting ultrasonic waves into the fluid. This allows for the concentration of particles in the fluid at the nodes (or antinodes) of the standing wave, thereby enabling better particle recovery.

[0122] Appendix 9

[0123] The fluid device described in any of Annexes 1 to 8 preferably further comprises a housing accommodating the flow rate measuring unit, the ultrasonic wave transmitting unit, and the control unit, wherein the housing is provided with an inlet for the fluid to flow into the flow path and one or more outlets for the fluid to flow out of the flow path. In such a structure, the fluid device is integrated into one unit, which improves the portability of the fluid device.

[0124] Appendix 10

[0125] The fluid device described in any of Appendices 1 to 6 may also include an inspection module that recovers the particles concentrated by the ultrasonic waves and inspects the recovered particles.

[0126] Appendix 11

[0127] The control method for a fluid device according to this application includes: a flow path for the flow of a fluid containing particles; an ultrasonic transmitter that transmits ultrasonic waves to the fluid within the flow path based on an input drive signal; and a flow velocity measuring unit that measures the flow velocity of the fluid within the flow path. The control method for the fluid device sets the amplitude of the drive signal based on the flow velocity measured by the flow velocity measuring unit, and inputs the drive signal with the set amplitude to the ultrasonic transmitter. This method enables the stabilization of the size of the recovered particles.

Claims

1. A fluid device, characterized by, have: A flow path for the flow of a fluid containing particles, and having a first wall and a second wall facing each other in a flow path width direction orthogonal to the flow direction of the fluid; An ultrasonic transmitting unit transmits ultrasonic waves to the fluid within the flow path based on the input of a drive signal; A flow velocity measuring unit measures the flow velocity of the fluid in the flow path; and The control unit controls the ultrasonic transmitting unit. The ultrasonic transmitting unit has an ultrasonic transmitting surface that forms part of the first wall surface. The ultrasonic waves transmitted from the ultrasonic transmitting unit travel along the width direction of the flow path and are repeatedly reflected between the first wall surface and the second wall surface, thereby generating a standing wave within the flow path. The control unit sets the amplitude of the drive signal based on the flow rate measured by the flow rate measuring unit, and inputs the drive signal with the set amplitude to the ultrasonic wave transmitting unit.

2. The fluid device according to claim 1, characterized in that, During the period when the ultrasonic transmitting unit transmits the ultrasonic wave to the fluid, the control unit increases the amplitude of the drive signal when the measured flow rate is greater than the reference flow rate, and decreases the amplitude of the drive signal when the measured flow rate is less than the reference flow rate.

3. The fluid device according to claim 1, characterized in that, The control unit sets the amplitude of the drive signal based on the size of the particles to be captured and the measured flow rate.

4. The fluid device according to claim 1, characterized in that, The fluid device further comprises: a separation module including at least a portion of the flow path and equipped with the ultrasonic transmitting unit; and A pump that generates the flow of the fluid in the flow path. The flow rate measuring unit measures the flow rate of the fluid between the separation module and the pump in the flow path.

5. The fluid device according to claim 1, characterized in that, The fluid device further includes a separation module, which comprises at least a portion of the flow path and is equipped with the ultrasonic transmitting unit. The flow rate measuring unit measures the flow rate of the fluid within the separation module.

6. The fluid device according to claim 1, characterized in that, The fluid device also includes a pump that generates the flow of the fluid in the flow path. The flow rate measuring unit measures the flow rate of the fluid inside the pump.

7. The fluid device according to claim 1, characterized in that, The ultrasonic transmitting unit has: A vibrating element is disposed in the flow path. A piezoelectric element is disposed in the vibrating part, and the ultrasonic waves are transmitted to the fluid by causing the vibrating part to bend and vibrate.

8. The fluid device according to claim 1, characterized in that, The ultrasonic transmitting unit generates a standing wave in the fluid in a direction orthogonal to the flow direction of the fluid by transmitting the ultrasonic waves into the fluid.

9. The fluid device according to claim 1, characterized in that, The fluid device further includes a housing that accommodates the flow rate measuring unit, the ultrasonic wave transmitting unit, and the control unit. The housing is provided with: an inlet for the fluid to flow into the flow path; and one or more outlets for the fluid to flow out of the flow path.

10. The fluid device according to claim 1, characterized in that, The fluid device also includes an inspection module that recovers the particles concentrated by the ultrasonic waves and inspects the recovered particles.

11. A control method for a fluid device, characterized in that, The fluid device includes: A flow path for the flow of a fluid containing particles, and having a first wall and a second wall facing each other in a flow path width direction orthogonal to the flow direction of the fluid; An ultrasonic transmitting unit transmits ultrasonic waves to the fluid within the flow path based on the input of a drive signal; as well as The flow velocity measuring unit measures the flow velocity of the fluid in the flow path. The ultrasonic transmitting unit has an ultrasonic transmitting surface that forms part of the first wall surface. The ultrasonic waves transmitted from the ultrasonic transmitting unit travel along the width direction of the flow path and are repeatedly reflected between the first wall surface and the second wall surface, thereby generating a standing wave within the flow path. The control method of the fluid device sets the amplitude of the drive signal based on the flow rate measured by the flow rate measuring unit, and inputs the drive signal with the set amplitude to the ultrasonic transmitter.

Images