Liquid low flow delivery system for electronic gas after liquefaction and method of delivery thereof

Abstract

The present invention discloses a low-flow delivery system and method for liquid after liquefaction of electronic gas. The system opens an output control line and a gas phase control line through a controller, closes a liquid delivery control line, and delivers the liquid after liquefaction of electronic gas to a magnetic gear pump through the output control line to pre-cool the magnetic gear pump. The liquid after liquefaction of electronic gas is converted into gas after heat exchange with the magnetic gear pump and flows back to the gas phase inlet of a raw material storage tank through the gas phase control line. The system closes the gas phase control line and starts the magnetic gear pump through the controller, and opens the liquid delivery control line. Under the action of the magnetic gear pump, the liquid after liquefaction of electronic gas in the raw material storage tank is driven to enter the liquid delivery control line through the output control line and enter the user storage tank after being filtered by a filter. The present invention does not need to repeatedly start the magnetic gear pump, can continuously deliver the liquid after liquefaction of electronic gas, and is not likely to cause secondary contamination to the liquid after liquefaction of electronic gas.

Description

Technical Field

[0001] The present invention relates to the technical field of electronic gas delivery, and more particularly to a low-flow delivery system and method for delivering liquefied electronic gas. Background Art

[0002] As an important branch of specialty gases, electronic gases have always been one of the key raw materials in the semiconductor, optical fiber, solar cell and other industries, and are widely used in processes such as etching, doping, diffusion, and deposition. With the rapid development of these industries, the consumption of electronic gases has increased day by day. Controlling the quality of electronic gases has become an important part of the electronics industry. The electronic gas delivery system is an important step in connecting production and raw materials, and is directly related to whether the purity of the electronic gas meets the standards.

[0003] Today, the upgrading of electronic consumption has led to the further expansion of product manufacturing scale, and the control of product yield and defects has become increasingly strict. How to avoid secondary contamination of electronic gases during the transportation process has become a research hotspot in today's electronics industry.

[0004] Current electronic gas delivery systems can be divided into three categories: large-scale gas supply systems, conventional gas supply systems, and simple gas supply systems. Among them, simple gas supply systems have a low delivery flow rate (2-2000L / h). However, the current simple gas supply system (low flow (2-2000L / h)) has a streamlined process and uses a plunger pump or a diaphragm pump to transport the liquid after the electronic gas is liquefied. Since the flow and pressure of the plunger pump or diaphragm pump are in pulse form, the flow pulse monitoring will fluctuate. If automatic control is adopted, the automatic control accuracy will be poor. Therefore, the current simple gas supply system (low flow (2-2000L / h)) requires manual adjustment of the knob to control the flow. Manually adjusting the knob to control the flow will result in frequent starting and stopping of the plunger pump or diaphragm pump. As a result, the simple gas supply system (low flow (2-2000L / h)) does not meet the low-flow continuous gas supply requirements, so that the gas flow cannot be stably controlled. In addition, the plunger pump or diaphragm pump is prone to wear of parts inside the pump during the continuous starting and stopping process, so it is easy to cause secondary contamination of the transported liquid when pumping the liquid.

[0005] Therefore, how to provide a low-flow liquid delivery system and delivery method for liquefied electronic gas that can continuously deliver and reduce secondary contamination of the liquid after liquefaction of electronic gas is a technical problem that technical personnel in this field urgently need to solve. Summary of the Invention

[0006] In view of this, the present invention provides a low-flow liquid delivery system and method for liquefied electronic gas, which can not only deliver the liquid continuously but also prevent the liquid from being contaminated again.

[0007] In order to achieve the above object, the present invention adopts the following technical solutions:

[0008] A low-flow liquid delivery system for liquefied electronic gas comprises: a controller, a raw material storage tank, a magnetic gear pump, a filter, and a user storage tank, wherein the liquid discharge port of the raw material storage tank is connected to the inlet of the magnetic gear pump via an output control pipeline, and the outlet of the magnetic gear pump is connected to an extension control pipeline, the extension control pipeline being connected to the gas phase inlet of the raw material storage tank via a gas phase control pipeline, and to the input port of the user storage tank via a liquid delivery control pipeline and the filter, and the output port of the user storage tank is connected to a liquid distribution control pipeline;

[0009] The magnetic gear pump, the filter, the output control pipeline, the extension control pipeline, the gas phase control pipeline, the liquid delivery control pipeline and the liquid distribution control pipeline are all electrically connected to the controller.

[0010] The present application adopts the above-mentioned technical solution. Under the action of the controller, a magnetic gear pump is used to pump the liquid after the liquefaction of the electronic gas. There is no need to repeatedly start the magnetic gear pump, so that the liquid after the liquefaction of the electronic gas can be continuously transported, and it is not easy to cause secondary pollution to the liquid after the liquefaction of the electronic gas.

[0011] Preferably, it also includes: an inert gas storage tank, a pressure relief valve and an exhaust pipeline, and the pressure relief valve is connected to the outlet of the magnetic gear pump, and the pressure relief valve and the magnetic gear pump are both located in the inert gas storage tank, one end of the exhaust pipeline is connected to the pressure relief valve, and the other end passes through the tank wall of the inert gas storage tank and extends to the outside of the inert gas storage tank and is connected to the gas phase control pipeline, and at the same time, a No. 1 switch valve is connected to the exhaust pipeline.

[0012] The present application adopts the above technical solution. When the actual pressure in the magnetic gear pump exceeds the pressure threshold set in the pressure relief valve, the pressure relief valve will release the pressure of the magnetic gear pump, thereby maintaining the pressure balance in the magnetic gear pump, making it less likely for the magnetic gear pump to stop working due to an accident.

[0013] Moreover, since the pressure relief valve and magnetic gear pump of the present application are both located in the inert gas storage tank, once the electronic gas leakage occurs, the leaked electronic gas will be in the inert gas storage tank, and it is not easy for the electronic gas to leak to the outside, so it is not easy to cause an explosion.

[0014] Preferably, the output control pipeline includes: an output main pipeline and an output branch pipeline;

[0015] One end of the output main line is connected to the liquid discharge port of the raw material storage tank, and the other end passes through the tank wall of the inert gas storage tank and is connected to the inlet of the magnetic gear pump, and the output main line is respectively connected with the No. 2 switch valve, No. 3 switch valve, the first control valve, No. 4 switch valve and No. 5 switch valve. At the same time, the No. 2 switch valve, the No. 3 switch valve, the first control valve, the No. 4 switch valve and the No. 5 switch valve are arranged in sequence on the output main line from the end close to the raw material storage tank to the end close to the magnetic gear pump;

[0016] Both ends of the output branch pipeline are connected to the output main pipeline, and one end of the output branch pipeline is located between the No. 2 switch valve and the No. 3 switch valve, and the other end is located between the No. 4 switch valve and the No. 5 switch valve. At the same time, the output branch pipeline is connected to a second control valve;

[0017] The first control valve and the second control valve are both electrically connected to the controller;

[0018] At the same time, the inert gas storage tank is connected to a second pressure monitor, and the second pressure monitor is electrically connected to the controller and interlocked with the first control valve and the second control valve respectively through the controller, and is also interlocked with the magnetic gear pump through the controller.

[0019] The present application adopts the above-mentioned technical solution. Through the second pressure monitor, it can be understood whether there is a gas leak in the inert gas storage tank, and the first control valve, the second control valve and the magnetic gear pump can be interlocked respectively through the controller. Therefore, the air intake source of the electronic gas can be cut off in time and urgently to improve the safety of the use of this application.

[0020] Preferably, the magnetic gear pump comprises:

[0021] The pump body comprises a coaxially connected gear cavity and a bearing cavity, wherein a pair of gear rotors are rotatably connected in the gear cavity, and a low-pressure area and a high-pressure area are formed on both sides of the gear cavity corresponding to the rotation of the gear rotor. The pump body is provided with a liquid inlet connected to the low-pressure area and a liquid outlet connected to the high-pressure area; bearings are installed at both ends of the gear rotor, and the bearings are fixed in the bearing cavities at the corresponding ends;

[0022] a sealing gasket, the sealing gasket being mounted on an end edge of the gear rotor and isolating the bearing cavity from the gear cavity;

[0023] A driving part is fixed to one end of the pump body, an output shaft of the driving part is connected to the magnetic outer rotor and the magnetic inner rotor, a pressure-bearing isolation sleeve is fixed between the magnetic outer rotor and the magnetic inner rotor, and the magnetic inner rotor is drivingly connected to the gear rotor.

[0024] The beneficial effects of the present invention are as follows: the present invention changes the internal parts structure of the original gear pump, adds a sealing gasket sleeve, and realizes the isolation of the bearing cavity and the gear cavity, so that the internal parts of the magnetic gear pump are not easy to rub against each other, thereby not easily causing secondary pollution to the transported liquid.

[0025] In addition, the sealing gasket sleeve has the function of axial positioning of the gear rotor. The oil film between the sealing gasket sleeve and the gear rotor is used to form an isolation seal. A pressure-bearing isolation sleeve is provided between the magnetic inner and outer rotors. The isolation sleeve can ensure that the medium in the pump body does not leak. The present invention improves the shaft sealing mechanism and uses a magnetic isolation sleeve sealing structure suitable for low-temperature performance and a wear-resistant gear rotor. Under the low temperature condition of the whole machine, the sealing performance is guaranteed to be good, so that the liquefied electronic high-purity gas can be pressurized and metered and transported, achieving low-flow process control performance, and the flow control range is 2 to 2000L / h.

[0026] Preferably, a cooling jacket is provided on the outer peripheral side of the pump body, a cooling pipeline is provided inside the cooling jacket, one end of the cooling pipeline is a refrigerant inlet, and the other end is a refrigerant outlet.

[0027] The resulting technical effect is that the cooling jacket can pre-cool the pump body and can also be used for temperature control during the operation of the pump body to prevent the material from gasifying and the pump body from being able to absorb liquefied liquid.

[0028] Preferably, a temperature sensor is provided on the pump body.

[0029] The resulting technical effect is: using the temperature sensor to assist in achieving constant temperature control of the pump body.

[0030] Preferably, the gear rotor includes a driving gear shaft and a driven gear shaft, the gear cavity includes a driving gear cavity and a driven gear cavity connected on one side, both ends of the driving gear cavity and the driven gear cavity are provided with bearing cavities, the driving gear shaft is rotatably connected in the driving gear cavity and fixedly connected to the magnetic inner rotor, and the driven gear shaft is rotatably connected in the driven gear cavity.

[0031] The resulting technical effect is that both the driving gear cavity and the driven gear cavity adapt to the shapes of the driving gear shaft and the driven gear shaft, and the bearing cavity can be understood as the end part of the gear cavity, making it easy to assemble the bearing and the gear rotor.

[0032] Preferably, a driving gear is provided in the middle of the driving gear shaft, and a driven gear adapted to mesh with the driving gear is provided in the middle of the driven gear shaft, and both the driving gear and the driven gear are provided with a Teflon coating.

[0033] The resulting technical effect is that the driving gear and the driven gear have Teflon coating, which will reduce the wear of the gears during operation, reduce the pollution to the materials and extend the service life.

[0034] Preferably, one end of the pump body is fixedly connected to a front end cover, the other end of the pump body is fixed to a rear pressure cover, the end of the driving part close to the rear pressure cover is fixed to a connecting cylinder seat, and a transition adapter plate is fixedly connected between the rear pressure cover and the connecting cylinder seat; the rear pressure cover is provided with an axial hole for the avoidance driving gear shaft.

[0035] Preferably, the extended control pipeline includes: an extension pipeline and a check valve, and one end of the extension pipeline is connected to the outlet of the magnetic gear pump, and the other end passes through the tank wall of the inert gas storage tank and extends to the outside of the inert gas storage tank and is respectively connected to the gas phase control pipeline and the liquid delivery control pipeline, and the check valve is connected to the extension pipeline.

[0036] Preferably, the gas phase control pipeline includes: a gas phase pipeline, a third control valve and a No. 7 switch valve, and one end of the gas phase pipeline is connected to one end of the extension pipeline extending outside the inert gas storage tank, and the other end is connected to the gas phase inlet of the raw material storage tank. At the same time, the third control valve and the No. 7 switch valve are both connected to the gas phase pipeline, and the third control valve is electrically connected to the controller, and the No. 7 switch valve is close to the raw material storage tank, and the third control valve is close to the extension pipeline.

[0037] Preferably, the liquid delivery control pipeline includes: a first liquid delivery pipeline and a second liquid delivery pipeline, and one end of the first liquid delivery pipeline is connected to the end of the extension pipeline extending outside the inert gas storage tank, and the other end is connected to the inlet end of the filter, one end of the second liquid delivery pipeline is connected to the outlet of the filter, and the other end is connected to the input port of the user storage tank, and at the same time, the first liquid delivery pipeline is respectively connected with an eighth switch valve, a flow meter, a first pressure monitor and a ninth switch valve, and the eighth switch valve is close to the extension pipeline, the ninth switch valve is close to the filter, and the flow meter is located between the eighth switch valve and the ninth switch valve; the second liquid delivery pipeline is respectively connected with a tenth switch valve and a fourth control valve, and the tenth switch valve is close to the filter, and the fourth control valve is close to the user storage tank;

[0038] The flow meter, the first pressure monitor and the fourth control valve are all electrically connected to the controller. At the same time, the flow meter is interlocked with the magnetic gear pump through the controller so that the magnetic gear pump can regulate the output flow of the magnetic gear pump according to the indication of the flow meter.

[0039] The application adopts the technical scheme, and in the process of transmitting the medium into the user storage tank through the magnetic gear pump, the flow meter monitors the flow in the liquid sending control pipeline, so that the controller can adjust the output flow of the magnetic gear pump according to the reading of the flow meter, thereby improving the stability of the liquid medium transmitted through the liquid sending control pipeline.

[0040] Preferably, the application further comprises a flow discharge pipeline, one end of the flow discharge pipeline is connected to the second liquid sending pipeline and located between the tenth switch valve and the fourth control valve, the other end of the flow discharge pipeline is connected to the raw material storage tank, the fifth control valve and the sixth switch valve are respectively connected to the flow discharge pipeline, the fifth control valve is close to the second liquid sending pipeline, the sixth switch valve is close to the raw material storage tank, the fourth control valve and the fifth control valve are electrically connected to the controller, and the first pressure monitor is interlocked with the fifth control valve and the fourth switch valve through the controller.

[0041] The first temperature meter is connected to the flow discharge pipeline, the second temperature meter is connected to the first liquid sending pipeline, the first temperature meter and the second temperature meter are electrically connected to the controller, and the first temperature meter, the second temperature meter, the fifth control valve and the fourth switch valve are interlocked through the controller.

[0042] In addition, the first pressure monitor is interlocked with the fifth control valve and the fourth switch valve through the controller, and the first temperature meter, the second temperature meter, the fifth control valve and the fourth switch valve are interlocked through the controller, thereby improving the safety performance of the application.

[0043] Preferably, the liquid level meter is connected to the user storage tank, the liquid level meter is electrically connected to the controller, and the fourth control valve and the fifth control valve are interlocked through the controller.

[0044] The application adopts the technical scheme, and once an accident occurs, the application can be urgently cut off, thereby improving the safety performance of the application.

[0045] Preferably, the application further comprises a pressure charging pipeline and a purge gas source, one end of the pressure charging pipeline is connected to the purge gas source, the other end of the pressure charging pipeline is connected to the inert gas storage tank, the eleventh switch valve and the twelfth switch valve are respectively connected to the pressure charging pipeline, and the thirteenth switch valve is connected to the inert gas storage tank.

[0046] The application has an independent purge gas source, so that inert gas can be filled into the inert gas storage tank.

[0047] In the second aspect, a liquid low-flow delivery method for liquefied electronic gas comprises the following steps:

[0048] S1, opening the output control pipeline and the gas phase control pipeline through the controller, and delivering the liquid after liquefaction of the electronic gas to the magnetic gear pump through the output control pipeline to pre-cool the magnetic gear pump, and the liquid after liquefaction of the electronic gas is converted into gas after heat exchange with the magnetic gear pump, and flows back to the gas phase inlet of the raw material storage tank through the gas phase control pipeline;

[0049] S2, closing the gas phase control pipeline and starting the magnetic gear pump through the controller, and simultaneously opening the liquid delivery control pipeline, so that the liquid after liquefaction of the electronic gas in the raw material storage tank is driven by the magnetic gear pump to enter the liquid delivery control pipeline through the output control pipeline, and then enter the user storage tank after being filtered by the filter;

[0050] S3, when the liquid stored in the user tank needs to be used, the controller controls to open the liquid distribution control pipeline to distribute the liquid stored in the user tank through the liquid distribution control pipeline.

[0051] The present application adopts the above-mentioned technical solution, and pre-cools the magnetic gear pump first, which can improve the stability of the use of the magnetic gear pump. In addition, the present application uses the magnetic gear pump to pump the liquid after the electronic gas is liquefied, so there is no need to repeatedly start the magnetic gear pump, thereby continuously transporting the liquid after the electronic gas is liquefied, and it is not easy to cause secondary pollution to the liquid after the electronic gas is liquefied.

[0052] As can be seen from the above technical solutions, compared with the prior art, the present invention provides a low-flow liquid delivery system and method for liquefied electronic gas, which can achieve the following technical effects:

[0053] Under the action of the controller, the liquid formed by the liquefied electronic gas is pumped by the magnetic gear pump, and there is no need to repeatedly start the magnetic gear pump, so that the liquid formed by the liquefied electronic gas can be continuously transported, and it is not easy to cause secondary pollution to the liquid formed by the liquefied electronic gas.

[0054] This application has a variety of emergency stop measures to ensure system safety. While ensuring real-time on-site monitoring, the flow path can be urgently cut off in the event of an unexpected situation to improve the stability and safety of the operation of this application. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the accompanying drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the accompanying drawings in the following description only are the embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative effort based on the provided drawings.

[0056] Figure 1 The structural principle diagram of the liquid low-flow conveying system after electronic gas liquefaction.

[0057] Figure 2 The sectional view of the magnetic gear pump.

[0058] Figure 3 The cooling jacket installation schematic diagram of the magnetic gear pump.

[0059] In the figure, 1 is a raw material storage tank, 2 is a magnetic gear pump, 3 is a filter, 4 is a user storage tank, 5 is an inert gas storage tank, 6 is a pressure relief valve, 7 is an exhaust pipeline, 101 is a first on-off valve, 11 is an output main pipeline, 12 is an output branch pipeline, 102 is a second on-off valve, 103 is a third on-off valve, 201 is a first control valve, 104 is a fourth on-off valve, 105 is a fifth on-off valve, 202 is a second control valve, 22 is an extension pipeline, 106 is a check valve, 31 is a gas phase pipeline, 203 is a third control valve, 107 is a seventh on-off valve, 41 is a first liquid feeding pipeline, 42 is a second liquid feeding pipeline, 108 is an eighth on-off valve, 420 is a flow meter, 43 is a first pressure monitor, 109 is a ninth on-off valve, 110 is a tenth on-off valve, 204 is a fourth control valve, 205 is a fifth control valve, 206 is a sixth on-off valve, 51 is a flow discharge pipeline, 52 is a first thermometer, 410 is a second thermometer, 401 is a liquid level meter, 61 is a pressure charging pipeline, 62 is a purge gas source, 111 is an eleventh on-off valve, 112 is a twelfth on-off valve, 113 is a thirteenth on-off valve, 71 is a liquid distribution pipeline, 114 is a fourteenth on-off valve, 50 is a second pressure monitor, 91 is a driving gear shaft, 92 is a driven gear shaft, 93 is a front end cover, 94 is a bearing sleeve, 95 is a bearing, 96 is a sealing gasket sleeve, 97 is a pump body, 98 is a transition adapter disc, 99 is a magnetic inner rotor, 910 is an isolation sleeve, 911 is a magnetic outer rotor, 912 is a connecting cylinder base, 913 is a rear gland, 914 is a driving part, 915 is a cooling jacket, 916 is a liquid inlet, 917 is a liquid outlet, 918 is a coolant inlet, and 919 is a coolant outlet. DETAILED DESCRIPTION

[0060] Clearly, the described embodiments are only a part of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0061] In the description of the present application, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0062] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "provided with", "connection" and the like should be broadly understood, for example, "connection" can be fixed connection, can also be detachable connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication inside two elements. For a person of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0063] The embodiment of the present application discloses a liquid low-flow delivery system after electronic gas liquefaction, comprising: a controller, a raw material storage tank 1, a magnetic gear pump 2, a filter 3 and a user storage tank 4, and the liquid outlet of the raw material storage tank 1 is connected to the inlet of the magnetic gear pump 2 through an output control pipeline, and the outlet of the magnetic gear pump 2 is communicated with an extension control pipeline, the extension control pipeline is connected to the gas phase inlet of the raw material storage tank 1 through a gas phase control pipeline, and is connected to the input port of the user storage tank 4 through a liquid delivery control pipeline and the filter 3, and the output port of the user storage tank 4 is connected with a liquid distribution control pipeline.

[0064] The magnetic gear pump 2, the filter 3, the output control pipeline, the extension control pipeline, the gas phase control pipeline, the liquid delivery control pipeline and the liquid distribution control pipeline are electrically connected with the controller.

[0065] The working principle of the present application is as follows:

[0066] S1, the output control pipeline and the gas phase control pipeline are opened by the controller, the liquid delivery control pipeline is closed, and the liquid after the liquefaction of the electronic gas is delivered to the magnetic gear pump 2 through the output control pipeline to pre-cool the magnetic gear pump 2. The liquid after the liquefaction of the electronic gas is converted into gas after heat exchange with the magnetic gear pump 2, and flows back to the gas phase inlet of the raw material storage tank 1 through the gas phase control pipeline;

[0067] S2, through the controller, close the gas phase control pipeline, start the magnetic gear pump 2, and open the liquid delivery control pipeline at the same time, so that under the action of the magnetic gear pump 2, the liquid after the electronic gas liquefaction in the raw material storage tank 1 is driven to enter the liquid delivery control pipeline through the output control pipeline, and then enter the user storage tank 4 after being filtered by the filter 3;

[0068] S3, when the liquid stored in the user storage tank 4 needs to be used, the controller controls to open the liquid distribution control pipeline to distribute the liquid stored in the user storage tank 4 through the liquid distribution control pipeline.

[0069] In order to further optimize the above technical solution, the liquid distribution control pipeline includes: a liquid distribution pipeline 71 and a No. 14 switch valve 114.

[0070] Specifically, when the liquid stored in the user storage tank 4 needs to be distributed, the fourteenth switch valve 114 is opened to allow the liquid stored in the user storage tank 4 to flow from the liquid distribution pipeline 71 to various user points.

[0071] Among them, the No. 14 switch valve 114 is a one-way valve, and the flow direction of the No. 14 switch valve 114 is from the user storage tank 4 to the user point; and the No. 14 switch valve 114 is a normally open manual valve, which needs to be closed only when the system needs maintenance.

[0072] In addition, the raw material storage tank 1, the filter 3 and the user storage tank 4 are all mature existing technologies, and their structures are not described in detail here.

[0073] In order to further optimize the above technical solution, please refer to the attached Figures 2 to 3 , magnetic gear pump includes:

[0074] The pump body 97 has a coaxially connected gear cavity and bearing cavity. A pair of gear rotors are rotatably connected in the gear cavity. The gear cavity forms a low-pressure zone and a high-pressure zone corresponding to the rotation of the gear rotors. The pump body 97 is provided with a liquid inlet 916 connected to the low-pressure zone and a liquid outlet 917 connected to the high-pressure zone. Bearings 95 are installed at both ends of the gear rotor and fixed in the bearing cavity at the corresponding end.

[0075] Sealing gasket 96, which is installed at the end edge of the gear rotor and isolates the bearing cavity from the gear cavity; it has the function of limiting the gear rotor;

[0076] The driving part 914 is fixed to one end of the pump body 97. The output shaft of the driving part 914 is connected to the magnetic outer rotor 911 and the magnetic inner rotor 99. A pressure-bearing isolation sleeve 910 is fixed between the magnetic outer rotor 911 and the magnetic inner rotor 99. The isolation sleeve can prevent the liquid from leaking from the gear pump drive shaft position to the atmosphere. The magnetic inner rotor 99 is connected to the gear rotor in a transmission manner.

[0077] In other embodiments, a cooling jacket 915 is provided on the outer periphery of the pump body 97. A cooling pipeline is provided inside the cooling jacket 915. One end of the cooling pipeline is a refrigerant inlet 918, and the other end is a refrigerant outlet 919. Refrigerant (a refrigerant such as liquid nitrogen or R23) enters through the refrigerant inlet 918 and is discharged from the refrigerant outlet 919 through the cooling jacket 915, removing heat from the system and achieving a cooling effect.

[0078] In other specific embodiments, a temperature sensor is provided on the pump body 97. In conjunction with a cooling jacket, the temperature of the pump body is controlled to achieve a constant low temperature effect of the pump body, ensuring that the liquid is smoothly sucked into the pump body.

[0079] In some other embodiments, the gear rotor includes a driving gear shaft 91 and a driven gear shaft 92, the gear cavity includes a driving gear cavity and a driven gear cavity connected on one side, and bearing cavities are provided at both ends of the driving gear cavity and the driven gear cavity. The driving gear shaft 91 is rotatably connected in the driving gear cavity and fixedly connected to the magnetic inner rotor, and the driven gear shaft 92 is rotatably connected in the driven gear cavity.

[0080] In other embodiments, a driving gear is provided in the middle of the driving gear shaft 91, and a driven gear is provided in the middle of the driven gear shaft 92 to mesh with the driving gear. Both the driving gear and the driven gear are provided with a Teflon coating. The Teflon-coated gears reduce wear during operation and contamination of materials.

[0081] In other embodiments, one end of the pump body 97 is fixedly connected to the front end cover 93, the other end of the pump body 97 is fixed to the rear pressure cover 913, the end of the driving part 914 close to the rear pressure cover 913 is fixed to the connecting tube seat 912, and a transition adapter plate 98 is fixedly connected between the rear pressure cover 913 and the connecting tube seat 912; that is, the rear pressure cover 913 and the connecting tube seat 912 are connected by using the transition adapter plate 98; the rear pressure cover 913 is provided with an axial hole for the avoidance driving gear shaft 91.

[0082] The ends of the gear chamber close to the front end cover 93 and the rear pressure cover 913 are both provided with bearing sleeves 94 for mounting limit bearings.

[0083] Specific pumping process:

[0084] The low-temperature liquefied liquid enters the pump body from the liquid inlet 916, the driving part 914 (motor) is electrified to rotate, the magnetic outer rotor 11, the magnetic inner rotor 99 and the driving gear shaft 91 are synchronously driven to rotate, the driving gear shaft 91 and the driven gear shaft 92 are synchronously rotated due to the gear meshing on the driving gear shaft 91 and the driven gear shaft 92, and when the gears mesh and disengage, a local vacuum, that is, a low-pressure area is formed on the suction side, the liquid is sucked into the gear cavity from the liquid inlet 916, the sucked liquid fills the gears and is brought to the discharge side, when the gears mesh, the liquid is compressed to form high-pressure liquid, and the high-pressure liquid is discharged from the pump through the liquid outlet of the pump, and the liquid pressure boosting and conveying are completed.

[0085] The magnetic gear pump of the application realizes the low-flow (2-2000L / h) conveying of liquefied electronic gas under the guarantee of sealing safety and reduces the pollution of electronic gas caused by the conveying process after the liquefaction of the electronic gas.

[0086] The pump body has small relative friction, small leakage risk, high safety, low-flow low-pressure conveying power, low energy consumption, and the use of a control system (PLC or DCS) to detect the outlet pressure / flow to control the rotating speed of the magnetic gear pump, so that the technical effect of constant pumping flow is realized.

[0087] In order to further optimize the above technical scheme, the inert gas storage tank 5, the pressure relief valve 6 and the exhaust pipeline 7 are further included, the pressure relief valve 6 is communicated with the outlet of the magnetic gear pump 2, the pressure relief valve 6 and the magnetic gear pump 2 are located in the inert gas storage tank 5, one end of the exhaust pipeline 7 is communicated with the pressure relief valve 6, the other end of the exhaust pipeline 7 extends through the tank wall of the inert gas storage tank 5 to the outside of the inert gas storage tank 5 and is communicated with the gas phase control pipeline, and a first on-off valve 101 is communicated with the exhaust pipeline 7.

[0088] Specifically, a pressure threshold is set in the pressure relief valve 6, if the actual pressure in the magnetic gear pump 2 exceeds the pressure threshold, the pressure relief valve 6 will automatically start to relieve the pressure of the magnetic gear pump 2, and the first on-off valve 101 is opened, then the excess gas in the magnetic gear pump 2 will enter the raw material storage tank 1 through the exhaust pipeline 7 and the gas phase control pipeline in turn.

[0089] The first on-off valve 101 is a one-way valve, and the flow direction of the first on-off valve 101 is from the pressure relief valve 6 to the gas phase control pipeline; and the first on-off valve 101 is a normally open valve, which needs to be closed only when the system is overhauled.

[0090] In order to further optimize the above technical scheme, the output control pipeline includes an output main pipeline 11 and an output branch pipeline 12.

[0091] One end of the output main line 11 is connected to the liquid discharge port of the raw material storage tank 1, and the other end passes through the tank wall of the inert gas storage tank 5 and is connected to the inlet of the magnetic gear pump 2. The output main line 11 is respectively connected to the No. 2 switch valve 102, the No. 3 switch valve 103, the first control valve 201, the No. 4 switch valve 104 and the No. 5 switch valve 105. At the same time, the No. 2 switch valve 102, the No. 3 switch valve 103, the first control valve 201, the No. 4 switch valve 104 and the No. 5 switch valve 105 are arranged in sequence on the output main line 11 from the end close to the raw material storage tank 1 to the end close to the magnetic gear pump 2;

[0092] Both ends of the output branch line 12 are connected to the output main line 11, and one end of the output branch line 12 is located between the No. 2 switch valve 102 and the No. 3 switch valve 103, and the other end is located between the No. 4 switch valve 104 and the No. 5 switch valve 105. At the same time, the output branch line 12 is connected to the second control valve 202;

[0093] The second switch valve 102, the third switch valve 103, the first control valve 201, the fourth switch valve 104, the fifth switch valve 105 and the second control valve 202 are all electrically connected to the controller;

[0094] At the same time, the inert gas storage tank 5 is connected to a second pressure monitor 50 , and the second pressure monitor 50 is electrically connected to the controller and interlocked with the first control valve 201 and the second control valve 202 through the controller, and interlocked with the magnetic gear pump 2 through the controller.

[0095] Among them, the No. 2 switch valve 102, the No. 3 switch valve 103, the No. 4 switch valve 104, and the No. 5 switch valve 105 are all normally open manual valves, and the corresponding switch valves need to be closed only when the system is under maintenance; and, the No. 2 switch valve 102, the No. 3 switch valve 103, the No. 4 switch valve 104, and the No. 5 switch valve 105 are all one-way valves, and the flow direction is from the raw material storage tank 1 to the magnetic gear pump 2.

[0096] Before starting the magnetic gear pump 2 of the present application, when it is necessary to pre-cool the magnetic gear pump 2, open the No. 2 switch valve 102, the No. 3 switch valve 103, the first control valve 201, the No. 4 switch valve 104 and the No. 5 switch valve 105, and at the same time, open the gas phase control pipeline and close the liquid delivery control pipeline, so that the liquid after the electronic gas in the raw material storage tank 1 is liquefied can flow into the magnetic gear pump 2 through the output main pipeline 11.

[0097] In addition, when there is leaked electronic gas in the inert gas storage tank 5, the reading of the second pressure monitor 50 will increase. At this time, the controller will automatically control the first control valve 201 and the second control valve 202 to close to cut off the feed of the magnetic gear pump 2, and at this time the controller will control the magnetic gear pump 2 to stop patrolling.

[0098] In order to further optimize the above technical solution, the extended control pipeline includes: an extension pipeline 22 and a check valve 106, and one end of the extension pipeline 22 is connected to the outlet of the magnetic gear pump 2, and the other end passes through the tank wall of the inert gas storage tank 5 and extends to the outside of the inert gas storage tank 5 and is respectively connected to the gas phase control pipeline and the liquid delivery control pipeline, and the check valve 106 is connected to the extension pipeline 22.

[0099] In this application, when the magnetic gear pump 2 is required to output the medium, the check valve 106 automatically opens.

[0100] In order to further optimize the above technical solution, the gas phase control pipeline includes: a gas phase pipeline 31, a third control valve 203 and a No. 7 switch valve 107, and one end of the gas phase pipeline 31 is connected to one end of the extension pipeline 22 extending to the outside of the inert gas storage tank 5, and the other end is connected to the gas phase inlet of the raw material storage tank 1. At the same time, the third control valve 203 and the No. 7 switch valve 107 are both connected to the gas phase pipeline 31, and the third control valve 203 is electrically connected to the controller, and the No. 7 switch valve 107 is close to the raw material storage tank 1, and the third control valve 203 is close to the extension pipeline 22.

[0101] Among them, the No. 7 switch valve 107 is a normally open manual valve, and the No. 7 switch valve 107 needs to be closed only when the system is under maintenance; in addition, the No. 7 switch valve 107 is a one-way valve, and its flow direction is from the magnetic gear pump 2 to the gas phase inlet of the raw material storage tank 1.

[0102] Before the magnetic gear pump 2 of the present application is started, when the magnetic gear pump 2 needs to be pre-cooled, the third control valve 203 and the No. 7 switch valve 107 are opened, and the liquid delivery control pipeline is closed at the same time, so that the liquid after the liquefaction of the electronic gas delivered to the magnetic gear pump 2 through the output control pipeline is converted into gas through heat exchange by the magnetic gear pump 2 and is sequentially delivered to the gas phase inlet of the raw material storage tank 1 from the extension pipeline 22 and the gas phase pipeline 31.

[0103] In order to further optimize the above technical solution, the liquid delivery control pipeline includes: a first liquid delivery pipeline 41 and a second liquid delivery pipeline 42, and one end of the first liquid delivery pipeline 41 is connected to one end of the extension pipeline 22 extending outside the inert gas storage tank 5, and the other end is connected to the inlet end of the filter 3, one end of the second liquid delivery pipeline 42 is connected to the outlet of the filter 3, and the other end is connected to the input port of the user storage tank 4, and at the same time, the first liquid delivery pipeline 41 is respectively connected with the No. 8 switch valve 108, the flow meter 420, the first pressure monitor 43 and the No. 9 switch valve 109, and the No. 8 switch valve 108 is close to the extension pipeline 22, the No. 9 switch valve 109 is close to the filter 3, and the flow meter 420 is located between the No. 8 switch valve 108 and the No. 9 switch valve 109; the second liquid delivery pipeline 42 is respectively connected with the No. 10 switch valve 110 and the fourth control valve 204, and the No. 10 switch valve 110 is close to the filter 3, and the fourth control valve 204 is close to the user storage tank 4;

[0104] The flow meter 420, the first pressure monitor 43 and the fourth control valve 204 are electrically connected with the controller, and the flow meter 420 is interlocked with the magnetic gear pump 2 through the controller, so that the magnetic gear pump 2 adjusts the output flow according to the reading of the flow meter 420.

[0105] The eighth, ninth and tenth switch valves 108, 109 and 110 are all normally open hand valves, which are closed only when the system is overhauled. In addition, the eighth, ninth and tenth switch valves 108, 109 and 110 are all one-way valves, and their flow directions are from the magnetic gear pump 2 to the user tank 4.

[0106] After the magnetic gear pump 2 is pre-cooled, the eighth, ninth and tenth switch valves 108, 109 and 110 and the fourth control valve 204 are opened, the non-return valve 106 is opened, the second switch valve 102, the third switch valve 103, the first control valve 201, the fourth switch valve 104 and the fifth switch valve 105 are opened, the third control valve 203 is closed, and the magnetic gear pump 2 is started, under the action of the magnetic gear pump 2, the liquefied electronic gas in the raw material tank 1 passes through the output main pipeline 11, the magnetic gear pump 2, the extension pipeline 22 and the first liquid feeding pipeline 41 into the filter 3 for filtration, and the filtered liquid passes through the second liquid feeding pipeline 42 into the user tank 4 for storage.

[0107] In addition, during the process of transmitting medium to the user tank 4 through the magnetic gear pump 2, the flow meter 420 monitors the flow in the liquid feeding control pipeline, so that the controller adjusts the output flow of the magnetic gear pump 2 according to the reading of the flow meter 420.

[0108] In order to further optimize the above technical solution, the unloading pipeline 51 is further included, one end of the unloading pipeline 51 is connected to the second liquid feeding pipeline 42 and located between the tenth switch valve 110 and the fourth control valve 204, the other end of the unloading pipeline 51 is connected to the raw material tank 1, the fifth control valve 205 and the sixth switch valve 206 are respectively connected to the unloading pipeline 51, the fifth control valve 205 is close to the second liquid feeding pipeline 42, the sixth switch valve 206 is close to the raw material tank 1, the fourth control valve 204 and the fifth control valve 205 are electrically connected with the controller, and the first pressure monitor 43 is interlocked with the fifth control valve 205 and the fourth control valve 204 through the controller.

[0109] The unloading pipe 51 is connected to a first thermometer 52, and the first liquid delivery pipe 41 is connected to a second thermometer 410. At the same time, the first thermometer 52 and the second thermometer 410 are electrically connected to the controller, and the first thermometer 52, the second thermometer 410, the fifth control valve 205 and the fourth control valve 204 are interlocked by the controller.

[0110] Among them, the sixth switch valve 206 is a normally open manual valve, which needs to be closed only when the system is under maintenance; and the sixth switch valve 206 is a one-way valve, and its flow direction is from the end away from the raw material storage tank 1 to the end close to the raw material storage tank 1.

[0111] The present application monitors the pressure in the liquid delivery control pipeline through the first pressure monitor 43. When the reading of the first pressure monitor 43 is too high, the controller automatically controls to open the fifth control valve 205, so that the medium in the liquid delivery control pipeline flows into the raw material storage tank 1 through the unloading pipe 51 to facilitate emergency pressure relief, thereby ensuring the safety of the system of the present application.

[0112] At the same time, the second thermometer 410 monitors the temperature of the flow in the first liquid delivery pipeline 41, and the first thermometer 52 monitors the temperature of the flow in the unloading pipeline 51. When the reading of the second thermometer 410 is too high, it means that the medium in the first liquid delivery pipeline 41 is easy to turn into gas. At this time, the controller will automatically control the fifth control valve 205 to open, so that the medium in the liquid delivery control pipeline at this time flows from the unloading pipeline 51 to the raw material storage tank 1. When the first thermometer 52 monitors that the temperature of the flow in the unloading pipeline 51 drops to the normal range, the controller automatically closes the fifth control valve 205 and the fourth control valve 204.

[0113] In order to further optimize the above technical solution, a liquid level gauge 401 is connected to the user storage tank 4, and the liquid level gauge 401 is electrically connected to the controller and interlocked with the fourth control valve 204 and the fifth control valve 205 respectively through the controller.

[0114] The liquid level meter 401 of the present application always monitors the liquid level in the user storage tank 4. When the liquid level in the user storage tank 4 is too high, under the action of the controller, the fourth control valve 204 is automatically closed and the fifth control valve 205 is opened at the same time, so that the medium transported in the liquid delivery control pipeline flows back to the raw material storage tank 1 through the unloading pipe 51.

[0115] In order to further optimize the above technical solution, it also includes: a charging pipeline 61 and a purge gas source 62, and one end of the charging pipeline 61 is connected to the purge gas source 62, and the other end is connected to the inert gas storage tank 5. At the same time, the charging pipeline 61 is respectively connected to the switch valve No. 111 and the switch valve No. 12 112, and the inert gas storage tank 5 is connected to the switch valve No. 13 113.

[0116] Among them, the No. 11 switch valve 111, the No. 12 switch valve 112 and the No. 13 switch valve 113 are all normally open manual valves, and the corresponding switch valves are closed only when the system needs maintenance.

[0117] In addition, the No. 1 switch valve 101 will only be closed when the No. 13 switch valve 113 is under maintenance.

[0118] Before pre-cooling the magnetic gear pump 2, the present application opens the No. 11 switch valve 111 and the No. 12 switch valve 112, and simultaneously closes the No. 13 switch valve 113, and starts the purge gas source 62 to allow the inert gas generated in the purge gas source 62 to flow from the charging pipeline 61 into the inert gas storage tank 5. When the second pressure monitor 50 detects that the inert gas storage tank 5 is pressurized to the set pressure, the No. 13 switch valve 113 is controlled to be opened, and the No. 11 switch valve 111 and the No. 12 switch valve 112 are closed at the same time to discharge the inert gas in the inert gas storage tank 5.

[0119] The above operation is repeated several times to repeatedly charge and discharge the pressure in the inert gas storage tank 5. The original air in the inert gas storage tank 5 can be completely replaced. Finally, the No. 11 switch valve 111 and the No. 12 switch valve 112 are opened, and the No. 13 switch valve 113 is closed at the same time. The purge gas source 62 is started to allow the inert gas generated in the purge gas source 62 to flow from the charging pipeline 61 into the inert gas storage tank 5. When the second pressure monitor 50 detects that the pressure in the inert gas storage tank 5 has reached the set value, the purge gas source 62, the No. 11 switch valve 111 and the No. 12 switch valve 112, and the No. 13 switch valve 113 are closed, so that the inert gas finally remaining in the inert gas storage tank 5 is used as a protective gas for the safety protection of the magnetic gear pump 2.

[0120] In a second aspect, a method for low-flow delivery of liquid after liquefaction of electronic gas comprises the following steps:

[0121] S1, opening the output control pipeline and the gas phase control pipeline through the controller, and delivering the liquid after the electronic gas liquefaction to the magnetic gear pump 2 through the output control pipeline to pre-cool the magnetic gear pump 2, and the liquid after the electronic gas liquefaction is converted into gas after heat exchange with the magnetic gear pump 2, and flows back to the gas phase inlet of the raw material storage tank 1 through the gas phase control pipeline;

[0122] S2, through the controller, close the gas phase control pipeline, start the magnetic gear pump 2, and open the liquid delivery control pipeline at the same time, so that under the action of the magnetic gear pump 2, the liquid after the electronic gas liquefaction in the raw material storage tank 1 is driven to enter the liquid delivery control pipeline through the output control pipeline, and then enter the user storage tank 4 after being filtered by the filter 3;

[0123] S3, when the liquid stored in the user storage tank 4 needs to be used, the controller controls to open the liquid distribution control pipeline to distribute the liquid stored in the user storage tank 4 through the liquid distribution control pipeline.

[0124] Specifically:

[0125] Before performing S1, open the No. 11 switch valve 111 and the No. 12 switch valve 112, and close the No. 13 switch valve 113 at the same time, and start the purge gas source 62 to allow the inert gas generated in the purge gas source 62 to flow into the inert gas storage tank 5 from the charging pipeline 61. When the second pressure monitor 50 detects that the inert gas storage tank 5 is pressurized to the set pressure, open the No. 13 switch valve 113, and close the No. 11 switch valve 111 and the No. 12 switch valve 112 at the same time to discharge the inert gas in the inert gas storage tank 5.

[0126] The above operation is repeated several times to repeatedly charge and discharge the pressure in the inert gas storage tank 5. The original air in the inert gas storage tank 5 can be completely replaced. Finally, the No. 11 switch valve 111 and the No. 12 switch valve 112 are opened, and the No. 13 switch valve 113 is closed at the same time. The purge gas source 62 is started to allow the inert gas generated in the purge gas source 62 to flow from the charging pipeline 61 into the inert gas storage tank 5. When the second pressure monitor 50 detects that the pressure in the inert gas storage tank 5 has reached the set value, the purge gas source 62, the No. 11 switch valve 111 and the No. 12 switch valve 112, and the No. 13 switch valve 113 are closed, so that the inert gas finally remaining in the inert gas storage tank 5 is used as a protective gas for the safety protection of the magnetic gear pump 2.

[0127] The specific steps of S1 are: opening the No. 2 switch valve 102, the No. 3 switch valve 103, the first control valve 201, the No. 4 switch valve 104, the No. 5 switch valve 105, the check valve 106, the third control valve 203 and the No. 7 switch valve 107, and closing the No. 8 switch valve 108, so that the liquid after the liquefaction of the electronic gas stored in the raw material storage tank 1 enters the magnetic gear pump 2 through the output main line 11 to pre-cool the magnetic gear pump 2, and the gas converted after the heat exchange with the magnetic gear pump 2 flows into the gas phase inlet of the raw material storage tank 1 through the extension line 22 and the gas phase line 31 in sequence;

[0128] The specific steps of S2 are as follows: keeping the second switch valve 102, the third switch valve 103, the first control valve 201, the fourth switch valve 104, the fifth switch valve 105, and the check valve 106 open, closing the third control valve 203, opening the eighth switch valve 108, the ninth switch valve 109, the tenth switch valve 110, and the fourth control valve 204, and controlling the magnetic gear pump 2 to start, so that the liquefied electronic gas in the raw material storage tank 1 flows into the filter 3 through the output main pipeline 11, the magnetic gear pump 2, the extension pipeline 22, and the first liquid feeding pipeline 41 in sequence for filtration, and the filtered liquid flows into the user storage tank 4 through the second liquid feeding pipeline 42 for storage.

[0129] The specific steps of S3 are as follows: when the liquid stored in the user storage tank 4 needs to be used, the fourteenth switch valve 114 is opened, so that the liquid stored in the user storage tank 4 flows from the liquid distribution pipeline 71 to each user point.

[0130] In addition, the present application has the following protection measures for ensuring system safety, in the case of real-time monitoring on site, once an accident occurs, the protection measures can be cut off in emergency:

[0131] (1) The flow meter 420 is interlocked with the magnetic gear pump 2 through the controller, so that the magnetic gear pump 2 controls the output flow of the magnetic gear pump 2 according to the reading of the flow meter 420, so as to accurately control the output flow of the magnetic gear pump 2 by frequency conversion, thereby improving the stability of the present application for conveying the liquefied electronic gas.

[0132] (2) The inert gas storage tank 5 is connected with the second pressure monitor 50, and the second pressure monitor 50 is electrically connected with the controller and is interlocked with the first control valve 201 and the second control valve 202 through the controller, and is also interlocked with the magnetic gear pump 2 through the controller. When there is leaked electronic gas in the inert gas storage tank 5, the reading of the second pressure monitor 50 will increase, at this time the controller will automatically control the first control valve 201 and the second control valve 202 to close, so as to cut off the feeding of the magnetic gear pump 2, and at this time the controller will control the magnetic gear pump 2 to stop running.

[0133] (3) The first thermometer 52 is connected to the discharge pipeline 51, and the second thermometer 410 is connected to the first liquid feeding pipeline 41, and the first thermometer 52 and the second thermometer 410 are electrically connected to the controller, and the first thermometer 52, the second thermometer 410, the fifth control valve 205 and the fourth switch valve 204 are interlocked through the controller. The second thermometer 410 monitors the temperature of the flow in the first liquid feeding pipeline 41, and the first thermometer 52 monitors the temperature of the flow in the discharge pipeline 51. When the reading of the second thermometer 410 is too high, it indicates that the medium in the first liquid feeding pipeline 41 is easy to become gas, and at this time the controller automatically controls the fifth control valve 205 and the fourth switch valve 204 to open, so that the medium in the liquid feeding control pipeline flows from the discharge pipeline 51 into the raw material storage tank 1, and when the first thermometer 52 monitors that the temperature of the flow in the discharge pipeline 51 is reduced to the normal range, the controller automatically closes the fifth control valve 205 and the fourth switch valve 204.

[0134] (4) The liquid level meter 401 is connected to the user storage tank 4, and the liquid level meter 401 is electrically connected to the controller and is interlocked with the fourth control valve 204 and the fifth control valve 205 through the controller. The liquid level meter 401 of the present application always monitors the liquid level in the user storage tank 4. When the liquid level in the user storage tank 4 is too high, the fourth control valve 204 is automatically closed and the fifth control valve 205 is automatically opened under the action of the controller, so that the medium transported in the liquid feeding control pipeline flows back to the raw material storage tank 1 through the discharge pipeline 51.

[0135] (5) The first pressure monitor 43 is connected to the first liquid feeding pipeline 41, and the first pressure monitor 43 is interlocked with the fifth control valve 205 and the fourth switch valve 204 through the controller. The first pressure monitor 43 monitors the pressure in the liquid feeding control pipeline. When the reading of the first pressure monitor 43 is too high, the controller automatically controls the fifth control valve 205 to open, so that the medium in the liquid feeding control pipeline flows into the raw material storage tank 1 through the discharge pipeline 51, so as to emergency pressure relief, thereby ensuring the safety of the system.

[0136] In order to further optimize the above technical solutions, the exhaust pipeline 7, the output main pipeline 11, the output branch pipeline 12, the extension pipeline 22, the gas phase pipeline 31, the first liquid feeding pipeline 41, the second liquid feeding pipeline 42, the discharge pipeline 51, the pressure charging pipeline 61 and the liquid distribution pipeline 71 are all EP polished pipes of 316L, which are surface treated and polished to prevent trace particle pollution, thereby increasing the corrosion resistance of the pipes to a certain extent.

[0137] The various embodiments described in this specification are implemented in a progressive manner, each embodiment focusing on the differences from other embodiments, and the same or similar parts between embodiments can be mutually referred to. For the apparatus disclosed by the embodiments, since it corresponds to the method disclosed by the embodiments, the description is relatively simple, and the relevant parts can be referred to the description of the method part.

[0138] The above description of disclosed embodiments enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those of ordinary skill in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Therefore, the application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A low-flow liquid delivery system for liquefied electronic gas, characterized in that: include: A controller, a raw material storage tank (1), a magnetic gear pump (2), a filter (3) and a user storage tank (4), wherein the liquid discharge port of the raw material storage tank (1) is connected to the inlet of the magnetic gear pump (2) through an output control pipeline, and the outlet of the magnetic gear pump (2) is connected to an extension control pipeline, and the extension control pipeline is connected to the gas phase inlet of the raw material storage tank (1) through a gas phase control pipeline, and is connected to the input port of the user storage tank (4) through a liquid delivery control pipeline and the filter (3), and the output port of the user storage tank (4) is connected to a liquid distribution control pipeline; The magnetic gear pump (2), the filter (3), the output control pipeline, the extension control pipeline, the gas phase control pipeline, the liquid delivery control pipeline and the liquid distribution control pipeline are all electrically connected to the controller; The invention also comprises: an inert gas storage tank (5), a pressure relief valve (6) and an exhaust pipeline (7), wherein the pressure relief valve (6) is connected to the outlet of the magnetic gear pump (2), and the pressure relief valve (6) and the magnetic gear pump (2) are both located in the inert gas storage tank (5); one end of the exhaust pipeline (7) is connected to the pressure relief valve (6), and the other end passes through the tank wall of the inert gas storage tank (5) and extends to the outside of the inert gas storage tank (5) and is connected to the gas phase control pipeline; and at the same time, a No. 1 switch valve (101) is connected to the exhaust pipeline (7); The output control pipeline includes: an output main pipeline (11) and an output branch pipeline (12); One end of the output main line (11) is connected to the liquid discharge port of the raw material storage tank (1), and the other end passes through the tank wall of the inert gas storage tank (5) and is connected to the inlet of the magnetic gear pump (2), and the output main line (11) is respectively connected to the second switch valve (102), the third switch valve (103), the first control valve (201), the fourth switch valve (104) and the fifth switch valve (105), and the second switch valve (102), the third switch valve (103), the first control valve (201), the fourth switch valve (104) and the fifth switch valve (105) are arranged in sequence on the output main line (11) from one end close to the raw material storage tank (1) to one end close to the magnetic gear pump (2); Both ends of the output branch pipeline (12) are connected to the output main pipeline (11), and one end of the output branch pipeline (12) is located between the second switch valve (102) and the third switch valve (103), and the other end is located between the fourth switch valve (104) and the fifth switch valve (105). At the same time, the output branch pipeline (12) is connected to a second control valve (202); The first control valve (201) and the second control valve (202) are both electrically connected to the controller; At the same time, the inert gas storage tank (5) is connected to a second pressure monitor (50), and the second pressure monitor (50) is electrically connected to the controller and interlocked with the first control valve (201) and the second control valve (202) respectively through the controller, and is also interlocked with the magnetic gear pump (2) through the controller.

2. The low-flow liquid delivery system for liquefied electronic gas according to claim 1, characterized in that: The extension control pipeline comprises: an extension pipeline (22) and a check valve (106), and one end of the extension pipeline (22) is connected to the outlet of the magnetic gear pump (2), and the other end passes through the tank wall of the inert gas storage tank (5) and extends to the outside of the inert gas storage tank (5) and is respectively connected to the gas phase control pipeline and the liquid delivery control pipeline, and the check valve (106) is connected to the extension pipeline (22).

3. The low-flow liquid delivery system for liquefied electronic gas according to claim 2, characterized in that: The gas phase control pipeline comprises: a gas phase pipeline (31), a third control valve (203) and a No. 7 switch valve (107), and one end of the gas phase pipeline (31) is connected to one end of the extension pipeline (22) extending to the outside of the inert gas storage tank (5), and the other end is connected to the gas phase inlet of the raw material storage tank (1), and the third control valve (203) and the No. 7 switch valve (107) are both connected to the gas phase pipeline (31), and the third control valve (203) is electrically connected to the controller, and the No. 7 switch valve (107) is close to the raw material storage tank (1), and the third control valve (203) is close to the extension pipeline (22).

4. The low-flow liquid delivery system for liquefied electronic gas according to claim 2, characterized in that: The liquid delivery control pipeline comprises: a first liquid delivery pipeline (41) and a second liquid delivery pipeline (42), wherein one end of the first liquid delivery pipeline (41) is connected to one end of the extension pipeline (22) extending to the outside of the inert gas storage tank (5), and the other end is connected to the inlet end of the filter (3); one end of the second liquid delivery pipeline (42) is connected to the outlet of the filter (3), and the other end is connected to the input port of the user storage tank (4); and the first liquid delivery pipeline (41) is respectively connected to the eighth switch valve (108), the flow meter (420), the first pressure monitoring valve (421), and the second pressure monitoring valve (422). The flowmeter (420) is located between the No. 8 switch valve (108) and the No. 9 switch valve (109), and the No. 8 switch valve (108) is close to the extension pipeline (22), the No. 9 switch valve (109) is close to the filter (3), and the flowmeter (420) is located between the No. 8 switch valve (108) and the No. 9 switch valve (109); the second liquid delivery pipeline (42) is connected to the No. 10 switch valve (110) and the fourth control valve (204), respectively, and the No. 10 switch valve (110) is close to the filter (3), and the fourth control valve (204) is close to the user storage tank (4); The flow meter (420), the first pressure monitor (43) and the fourth control valve (204) are all electrically connected to the controller, and the flow meter (420) is interlocked with the magnetic gear pump (2) through the controller, so that the magnetic gear pump (2) regulates the output flow of the magnetic gear pump (2) according to the reading of the flow meter (420).

5. The low-flow liquid delivery system for liquefied electronic gas according to claim 4, characterized in that: Also includes: A discharge pipe (51), one end of which is connected to the second liquid delivery pipe (42) and is located between the No. 10 switch valve (110) and the fourth control valve (204), while the other end of the discharge pipe (51) is connected to the raw material storage tank (1), and the discharge pipe (51) is respectively connected to a fifth control valve (205) and a sixth switch valve (206), and the fifth control valve (205) is close to the second liquid delivery pipe (42), and the sixth switch valve (206) is close to the raw material storage tank (1), and the fourth control valve (204) and the fifth control valve (205) are both electrically connected to the controller, and the first pressure monitor (43) is interlocked with the fifth control valve (205) and the fourth control valve (204) through the controller; The unloading pipe (51) is connected to a first thermometer (52), and the first liquid delivery pipe (41) is connected to a second thermometer (410). The first thermometer (52) and the second thermometer (410) are both electrically connected to the controller, and the first thermometer (52), the second thermometer (410), the fifth control valve (205) and the fourth control valve (204) are interlocked by the controller.

6. The low-flow liquid delivery system for liquefied electronic gas according to claim 5, characterized in that: The user storage tank (4) is connected to a liquid level meter (401), and the liquid level meter (401) is electrically connected to the controller and interlocked with the fourth control valve (204) and the fifth control valve (205) respectively through the controller.

7. The low-flow liquid delivery system for liquefied electronic gas according to claim 1, characterized in that: Also includes: A charging pipeline (61) and a purge gas source (62) are provided, and one end of the charging pipeline (61) is connected to the purge gas source (62), and the other end is connected to the inert gas storage tank (5). At the same time, the charging pipeline (61) is respectively connected to a No. 11 switch valve (111) and a No. 12 switch valve (112), and the inert gas storage tank (5) is connected to a No. 13 switch valve (113).

8. A low-flow liquid delivery system after liquefaction of electronic gas, and a low-flow liquid delivery method after liquefaction of electronic gas according to any one of claims 1 to 7, characterized in that: The steps include: S1, opening the output control pipeline and the gas phase control pipeline through the controller, and delivering liquid after liquefaction of the electronic gas to the magnetic gear pump (2) through the output control pipeline to pre-cool the magnetic gear pump (2), and the liquid after liquefaction of the electronic gas is converted into gas after heat exchange with the magnetic gear pump (2), and flows back to the gas phase inlet of the raw material storage tank (1) through the gas phase control pipeline; S2, closing the gas phase control pipeline and starting the magnetic gear pump (2) through the controller, and simultaneously opening the liquid delivery control pipeline, so that under the action of the magnetic gear pump (2), the liquid after liquefaction of the electronic gas in the raw material storage tank (1) is driven to enter the liquid delivery control pipeline through the output control pipeline, and then enter the user storage tank (4) after being filtered by the filter (3); S3, when the liquid stored in the user storage tank (4) needs to be used, the controller controls the opening of the liquid distribution control pipeline to distribute the liquid stored in the user storage tank (4) through the liquid distribution control pipeline.

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