A quartz tube sealing and connecting device for a semiconductor thermoelectric material preparation process

Abstract

The application relates to the technical field of semiconductors, in particular to a quartz tube sealing and connecting equipment for a semiconductor thermoelectric material preparation process. In view of the fact that a broken quartz tube cannot be recycled after being taken out during preparation of a crystal bar, the cost is increased, the quartz tube sealing and connecting equipment for the semiconductor thermoelectric material preparation process comprises a vertical table, a second support base is arranged at the lower end of one side of the vertical table, a quartz tube is arranged in the second support base, a second support base capable of moving up and down is arranged at the upper end of one side of the vertical table, a glass sealing tube is arranged in the second support base, clamping devices for fixing the quartz tube and the glass sealing tube are arranged on the inner walls of the first support base and the second support base respectively, a rotating transmission shaft is further arranged on the second support base, and the quartz tube and the glass sealing tube can be synchronously rotated through the driving of the transmission shaft after the second support base moves downwards to a specified position; the broken quartz tube can be sealed and treated, and is recycled again, so that the production cost is reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process. Background Technology

[0002] Semiconductor thermoelectric material fabrication involves heating and uniformly mixing various raw materials such as bismuth telluride and silicon to form a semiconductor ingot. Subsequent processing of this ingot then forms semiconductor P and N crystals. Currently, semiconductor ingot fabrication uses a glass tube filled with raw materials, placed in a shaking furnace for heating and uniform shaking to form the ingot. However, glass tubes have a low high-temperature limit, resulting in a relatively low yield of finished ingots. Quartz tubes, due to their high temperature resistance, produce superior ingots compared to glass tubes. However, quartz tubes are expensive, and after cooling, the ingot needs to be broken to remove it, which cannot be recycled, increasing costs. Therefore, a quartz tube sealing connection device for semiconductor thermoelectric material fabrication is designed to address these issues. Summary of the Invention

[0003] This invention addresses the problem that quartz tubes cannot be recycled after being broken during the preparation of crystal rods, which increases costs. It provides a quartz tube sealing and connection device for semiconductor thermoelectric material preparation processes, which can seal broken quartz tubes for recycling, reducing production costs and effectively solving the problems mentioned in the background art.

[0004] The technical solution adopted by the present invention to solve the above problems is as follows:

[0005] A quartz tube sealing connection device for a semiconductor thermoelectric material preparation process includes a stand, a second support at the lower end of one side of the stand, a quartz tube inside the second support, and a movable second support at the upper end of one side of the stand, a glass sealing tube inside the second support. Clamping devices for fixing the quartz tube and the glass sealing tube are respectively provided on the inner walls of the first and second supports. A rotatable drive shaft is also provided on the second support. After the second support moves downward to a designated position, the drive shaft can drive the quartz tube and the glass sealing tube to rotate synchronously. A burner for heating the quartz tube and the glass sealing tube is also provided on the stand.

[0006] The inner walls of the first support and the second support are rotatably connected to C-shaped rings. The clamping device includes two first telescopic rods, which are symmetrically arranged on the inner walls of the corresponding C-shaped rings. Arc-shaped clamps are fixed to the inner ends of the first telescopic rods.

[0007] The second support is slidably connected to the front surface of the platform. Second telescopic rods are fixed to the left and right sides of the upper surface of the second support, and a second motor is fixed to the center of the upper surface of the second support. The transmission shaft is fixed to the output end of the second motor. C-shaped gear rings are coaxially fixed to the upper end of the C-ring, and two small spur gears mesh on the outer surface of the C-shaped gear rings. A first pulley, rotatably connected to the second support, is fixed to the upper end of the outer surface of the transmission shaft. Second pulleys are connected to the left and right sides of the front end of the first pulley, and the second pulleys are coaxially fixed to their respective small spur gears. A driving pulley, cooperating with the transmission shaft, is rotatably connected to the inner wall of the first support. Driven pulleys are connected to the left and right sides of the front end of the driving pulley, and the driven pulleys are coaxially fixed to their respective small spur gears.

[0008] A first motor is fixedly connected to the rear end surface of the platform, and a threaded rod is fixedly connected to the output end of the first motor. A control board is also slidably connected to the rear end surface of the platform. A threaded seat that is threadedly connected to the threaded rod is fixedly connected to one end face of the control board. A square slide groove is opened in the inner wall of the middle part of the platform. A square slider is slidably connected to the inner wall of the square slide groove. The first support is installed on the square slider. A drive shaft is provided in the inner wall of the square slider. A first track groove that cooperates with the drive shaft is opened on the control board.

[0009] The drive shaft is rotatably connected to the inner wall of the square slider. The first support is fixed to the front end surface of the drive shaft. A crank is fixed to the rear end of the outer surface of the drive shaft. A first sliding pin is fixed to the inner wall of the other end of the crank. An L-shaped seat is also slidably connected to the rear end surface of the platform. A key plate is fixed to the right end surface of the L-shaped seat. A long keyway that mates with the first sliding pin is opened on the key plate. A second sliding pin is fixed to the inner wall of the middle part of the L-shaped seat. A second track groove that mates with the second sliding pin is opened on the inner wall of the control plate.

[0010] The front surface of the platform is also provided with a feeding device, which includes a calibration port that cooperates with the quartz tube. The feeding device also includes a storage box that can move left and right. The lower end of the storage box is provided with a valve. When the storage box moves to the right, it can form a structure in which the valve is opened.

[0011] The storage box has a first spring fixed to the upper and lower sides of the right end surface, and the other end of the first spring is fixed to a spring seat fixed to the vertical platform. The storage box has a material hopper fixed to the lower end surface, and a discharge nozzle fixed to the lower end surface of the material hopper. The front end surface of the vertical platform also has a baffle fixed to it. The left end surface of the baffle has two guide rods that are slidably connected to the discharge nozzles. The left end surface of the two guide rods has a connecting plate fixed to it. The valve is fixed to the connecting plate. The inner wall of the discharge nozzle has a discharge port that cooperates with the valve.

[0012] A side plate is fixed to the lower right side of the storage box. Two first support plates are fixed to the left end surface of the side plate. Small rotating shafts are rotatably connected to the inner walls of the first support plates. A connecting sleeve is fixed to the inner end face of the two small rotating shafts. The calibration port is fixed to the left end surface of the connecting sleeve. A flexible tube is fixed to the right end surface of the connecting sleeve. The other end of the flexible tube is fixed to the discharge nozzle. Coil springs are also fixed to the inner walls of the first support plates. The other end of the coil springs is fixed to the outer surface of the corresponding small rotating shafts. Sleeve rods are fixed to the outer sides of the outer surfaces of the small rotating shafts. Stop pins that cooperate with the corresponding sleeve rods are fixed to the outer end faces of the two first support plates.

[0013] The present invention has a novel and ingenious structure, and has the following advantages compared with the prior art:

[0014] In use, after cutting the end of the quartz tube flat, insert the quartz tube and the glass sealing tube into the corresponding first and second supports, respectively, and clamp them with arc-shaped clamps. Then, by starting the first motor, the control board moves downward, and the quartz tube moves to the right while flipping to the left. When it flips to the left until it is horizontal, it stops flipping and moves horizontally to the right. When the quartz tube moves to the right, it meets the calibration port. With the calibration port having a small inner diameter, it inserts into the inner wall of the upper end of the quartz tube. As the quartz tube continues to move to the right, it drives the corresponding calibration port and storage box to move to the right simultaneously. When the storage box moves to the right, it opens the valve, allowing the material in the storage box to flow into the calibration port and the quartz tube. This process replaces the traditional loading method, avoiding damage to the bottom wall of the quartz tube. After loading is completed, the first motor is started to reset the control board and the first support to their initial state. Through the rotatable transmission shaft, when the second support moves down to the designated position, that is, when the bottom of the glass sealing tube contacts the upper end of the quartz tube, the corresponding quartz tube and glass sealing tube can be driven to rotate synchronously when the transmission shaft rotates. When the burner is working, the quartz tube and glass sealing tube can be heated and melted, thereby realizing flame welding and sealing the upper end of the quartz tube. This process can also seal damaged quartz tubes, allowing for the recycling of quartz tubes and reducing production costs. Then, the glass sealing tube is vacuum-sealed by a vacuum pump. At this point, the quartz tube can be placed in the swing furnace to prepare crystal rods. Attached Figure Description

[0015] Figure 1 This is an isometric view I of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0016] Figure 2 This is an isometric view II of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0017] Figure 3This is a schematic diagram of the installation of a square slider in a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0018] Figure 4 This is a schematic diagram of the first support structure of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0019] Figure 5 This is a schematic diagram of the C-ring installation of a quartz tube sealing connection device in a semiconductor thermoelectric material preparation process according to the present invention.

[0020] Figure 6 This is a C-shaped sectional view of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0021] Figure 7 This is a schematic diagram of the control board installation of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0022] Figure 8 This is a schematic diagram of the drive shaft installation of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0023] Figure 9 This is a schematic diagram of the crank mounting of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0024] Figure 10 This is a front view of the control board of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0025] Figure 11 This is a schematic diagram of the first spring installation in a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0026] Figure 12 This is a schematic diagram of the hopper installation of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0027] Figure 13 This is a cross-sectional view of the storage tank of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0028] Figure 14 This is a cross-sectional view of the valve in a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0029] Figure 15 This is a cross-sectional view of the first support plate of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0030] Figure 16This is a schematic diagram of the installation of the second support of a quartz tube sealing connection device in a semiconductor thermoelectric material preparation process according to the present invention.

[0031] Figure 17 This is a cross-sectional view of the second support of a quartz tube sealing connection device for a semiconductor thermoelectric material preparation process according to the present invention.

[0032] Labels in the diagram: 1-Standing platform, 2-Support leg, 3-Burner, 4-First support, 5-Driving pulley, 6-Driven pulley, 7-Small spur gear, 8-C-shaped gear ring, 9-C-shaped ring, 10-Arc-shaped clamp, 11-First telescopic rod, 12-Quartz tube, 13-First motor, 14-Threaded rod, 15-Threaded seat, 16-Control board, 17-Drive shaft, 18-Square slider, 19-Square slide groove, 20-First track groove, 21-Crank, 22-First sliding pin, 23-Key plate, 24-Key groove, 25-L-shaped seat, 27-Second sliding pin, 28-Second track groove, 29-First oblique slide groove, 30-First straight groove, 31-First... 32-Second straight groove, 33-Wave groove, 34-Storage box, 35-Spring seat, 36-First spring, 37-Box cover, 38-Gathering hopper, 39-Side plate, 40-Baffle, 41-Guide rod, 42-Second spring, 43-Connecting plate, 44-Discharge nozzle, 45-Valve, 46-Discharge port, 47-Soft connecting pipe, 48-Connecting sleeve, 49-Calibration port, 50-First support plate, 51-Sleeve rod, 52-Stop pin, 53-Small rotating shaft, 54-Coil spring, 55-Second support, 56-Second telescopic rod, 57-Second motor, 58-Drive shaft, 59-First pulley, 60-Second pulley, 61-Glass sealing tube. Detailed Implementation

[0033] The following are specific embodiments of the present invention, and the technical solutions of the present invention will be further described in conjunction with the accompanying drawings. However, the present invention is not limited to these embodiments.

[0034] like Figure 1-17 As shown, the present invention provides a quartz tube sealing connection device for semiconductor thermoelectric material preparation process, including a platform 1. A second support 55 is provided at the lower end of one side of the platform 1, and a quartz tube 12 is provided inside the second support 55. A second support 55 that can move up and down is provided at the upper end of one side of the platform 1, and a glass sealing tube 61 is provided inside the second support 55. The inner walls of the first support 4 and the second support 55 are respectively provided with clamping devices for fixing the quartz tube 12 and the glass sealing tube 61. The second support 55 is also provided with a rotatable drive shaft 58. After the second support 55 moves down to a designated position, it can form a structure in which the quartz tube 12 and the glass sealing tube 61 rotate synchronously through the drive of the drive shaft 58. The platform 1 is also provided with a burner 3 for heating the quartz tube 12 and the glass sealing tube 61.

[0035] like Figure 1-2 As shown in Figure 17, the platform 1 supports and fixes the entire device. Multiple evenly distributed support legs 2 are fixed to the lower sides of the front and rear sides of the platform 1 to ensure stability. The quartz tube 12 is placed in the first support 4, and the glass sealing tube 61 is placed in the second support 55. A clamping device secures the quartz tube 12 and the glass sealing tube 61. A rotatable drive shaft 58 drives the corresponding quartz tube 12 and glass sealing tube 61 to rotate synchronously when the second support 55 moves downwards to a designated position, i.e., when the bottom of the glass sealing tube 61 contacts the upper end of the quartz tube 12. The burner 3 is configured as follows. Figure 1 As shown, the burner 3 is filled with hydrogen and oxygen gas. When the burner 3 is working, it can heat and melt the quartz tube 12 and the glass sealing tube 61 to achieve flame welding and seal the upper end of the quartz tube 12. The burner 3 is existing technology and will not be described in detail. It can also seal the damaged quartz tube 12 and recycle it, reducing production costs.

[0036] The inner walls of the first support 4 and the second support 55 are respectively rotatably connected to C-shaped rings 9. The clamping device includes two first telescopic rods 11. The first telescopic rods 11 are respectively centrally symmetrically arranged on the inner walls of the corresponding C-shaped rings 9. The inner ends of the first telescopic rods 11 are respectively fixed with arc-shaped clamping plates 10.

[0037] like Figure 4-6 As shown in Figures 16-17, the first support 4 and the second support 55 have the same shape. Each of the first support 4 and the second support 55 has a C-shaped groove that mates with a corresponding C-shaped ring 9. The corresponding C-shaped ring 9 is installed on the inner wall of the C-shaped groove. The C-shaped ring 9 and the C-shaped groove facilitate the placement of the quartz tube 12 and the glass sealing tube 61 into the first support 4 and the second support 55. The installation and shape of the arc-shaped clamp 10 and the first telescopic rod 11 are as follows: Figure 6 As shown, the first telescopic rod 11 can extend or retract inward or outward. The telescopic rod can be a pneumatic rod or a hydraulic rod. When activated, it can cause the arc-shaped clamping plate 10 to close inward or move outward. Pneumatic rods and hydraulic rods are existing technologies and will not be described in detail. When the arc-shaped clamping plate 10 moves inward, it can clamp and fix the quartz tube 12 or the glass sealing tube 61.

[0038] The second support 55 is slidably connected to the front surface of the stand 1. The left and right sides of the upper surface of the second support 55 are respectively fixed to the second telescopic rods 56. The middle of the upper surface of the second support 55 is fixed to the second motor 57. The transmission shaft 58 is fixed to the output end of the second motor 57. The upper end of the C-shaped ring 9 is coaxially fixed to the C-shaped gear ring 8. Two small spur gears 7 are meshed on the outer surface of the C-shaped gear ring 8. The upper end of the outer surface of the transmission shaft 58 is fixed to the first pulley 59, which is rotatably connected to the second support 55. The left and right sides of the front end of the first pulley 59 are respectively connected to the second pulley 60. The second pulley 60 is coaxially fixed to the corresponding small spur gear 7. The inner wall of the first support 4 is rotatably connected to the driving pulley 5 that cooperates with the transmission shaft 58. The left and right sides of the front end of the driving pulley 5 are respectively connected to the driven pulley 6. The driven pulley 6 is coaxially fixed to the corresponding small spur gear 7.

[0039] like Figure 4-5 As shown in Figures 16-17, the second support 55 is slidably connected to the front surface of the platform 1. Support seats are fixedly connected to the upper surface of the second telescopic rod 56, and the bottom ends of the support seats are fixedly connected to the front surface of the platform 1. This is equivalent to the second telescopic rod 56 being fixedly connected to the front surface of the platform 1. When the second telescopic rod 56 extends and retracts, it drives the corresponding second support 55 to move up and down. The second telescopic rod 56 can be a pneumatic rod or a hydraulic rod, both existing technologies, and will not be described further. The function of the second motor 57 is to drive the transmission shaft 58. The motor provides rotational power and is existing technology, so it will not be described in detail. The lower end of the drive shaft 58 passes through the second support 55 and is rotatably connected to the inner wall of the second support 55. The inner walls of the first pulley 59 and the corresponding small spur gear 7, and the driven pulley 6 and the corresponding small spur gear 7 are respectively coaxially fixed with rotating shafts. The rotating shafts are rotatably connected to the inner walls of the corresponding first support 4 and the second support 55. The C-shaped gear ring 8 is rotatably connected to the inner walls of the corresponding first support 4 and the second support 55, and limits the C-shaped gear ring 8 and the C-shaped ring 9. It can only rotate; the inner wall of the center of the drive pulley 5 has a spline hole that mates with the long rotating shaft. When the second support 55 and the long rotating shaft move downward to the designated position, they can engage with the spline hole, thereby driving the drive pulley 5 to rotate when the long rotating shaft rotates; when the second telescopic rod 56 is activated to move the second support 55 downward, it will drive the corresponding glass sealing tube 61, the second motor 57, the transmission shaft 58, etc. to move downward synchronously. When the glass sealing tube 61 moves to contact the quartz tube 12, that is, when the corresponding... When the drive shaft 58 moves to engage with the drive pulley 5, the second motor 57 is started, which will drive the corresponding drive shaft 58, drive pulley 5, first pulley 59, driven pulley 6, second pulley 60, and small spur gear 7 to rotate synchronously. The rotation of the small spur gear 7 will cause the C-shaped gear ring 8, C-shaped ring 9, quartz tube 12, and glass sealing tube 61 to rotate synchronously through meshing with the C-shaped gear ring 8. When the burner 3 is working, flame welding can be performed on the contact ground of the quartz tube 12 and the glass sealing tube 61.

[0040] A first motor 13 is fixedly connected to the rear end surface of the platform 1, and a threaded rod 14 is fixedly connected to the output end of the first motor 13. A control plate 16 is also slidably connected to the rear end surface of the platform 1. A threaded seat 15 that is threadedly connected to the threaded rod 14 is fixedly connected to one side end face of the control plate 16. A square slide groove 19 is opened in the middle inner wall of the platform 1. A square slider 18 is slidably connected to the inner wall of the square slide groove 19. The first support 4 is installed on the square slider 18. A drive shaft 17 is provided in the inner wall of the square slider 18. A first track groove 20 that cooperates with the drive shaft 17 is opened on the control plate 16.

[0041] like Figure 3 , 7 As shown in Figure -10, the first motor 13 provides rotational power to the threaded rod 14. A bearing seat is rotatably connected to the lower end of the outer surface of the threaded rod 14, and the bottom end of the bearing seat is fixed to the rear end surface of the platform 1. The control plate 16 is slidably connected to the rear end surface of the platform 1. Through the threaded connection between the threaded seat 15 and the threaded rod 14, when the first motor 13 is started, the threaded rod 14 can rotate. The rotation of the threaded rod 14 can drive the corresponding threaded seat 15 and platform 1 to move upwards or downwards. The threaded connection has a self-locking function; when the first motor 13 is not started, the corresponding threaded seat 15 and control plate 16 are in a fixed position. The square slider 18 can slide left and right on the inner wall of the square slide groove 19. Through the engagement of the drive shaft 17 with the first track groove 20, when the control plate 16 moves downwards, the drive shaft 17, square slider 18, and first support 4 can move to the right. The first track groove 20 includes a first inclined slide groove 29 and a first straight groove 30, as shown... Figure 10 As shown, when the drive shaft 17 is engaged with the first inclined slide groove 29, it can drive the corresponding first support 4 to move to the right when the control plate 16 moves downward. When the drive shaft 17 is engaged with the first straight groove 30, it will no longer drive the first support 4 to move to the right when the control plate 16 continues to move downward, that is, the first support 4 is in a stationary state.

[0042] The drive shaft 17 is rotatably connected to the inner wall of the square slider 18. The first support 4 is fixed to the front end surface of the drive shaft 17. The rear end of the outer surface of the drive shaft 17 is fixed to a crank 21. The inner wall of the other end of the crank 21 is fixed to a first sliding pin 22. The rear end surface of the platform 1 is also slidably connected to an L-shaped seat 25. The right end surface of the L-shaped seat 25 is fixed to a key plate 23. The key plate 23 is provided with a long keyway that cooperates with the first sliding pin 22. The inner wall of the middle part of the L-shaped seat 25 is fixed to a second sliding pin 27. The inner wall of the control plate 16 is provided with a second track groove 28 that cooperates with the second sliding pin 27.

[0043] like Figure 2 , 7 As shown in Figure -10, the L-shaped seat 25 is slidably connected to the rear end surface of the platform 1. The installation and shape of the crank 21, drive shaft 17, and first sliding pin 22 are as follows. Figure 9As shown, when the first sliding pin 22 moves, it can drive the crank 21 to oscillate in a circular motion. The oscillation of the crank 21 will cause the drive shaft 17 to rotate. The rotation of the drive shaft 17 will cause the first support 4 to rotate and the quartz tube 12 to flip. The second track groove 28 includes a second straight groove 31, a second inclined groove, and a wave groove 33. The second inclined groove 32 has the same slope as the first inclined groove 29 and belongs to two parallel inclined grooves, such as... Figure 10 As shown, when the control plate 16 moves downward, the second sliding pin 27, L-shaped seat 25, and key plate 23 will remain stationary due to the engagement of the second sliding pin 27 and the second straight groove 31. When the second sliding pin 27 engages with the second inclined slide groove 32, the corresponding second sliding pin 27, L-shaped plate, and key plate 23 will move synchronously to the right. Furthermore, when the slopes of the second inclined slide groove 32 and the first inclined slide groove 29 are the same, the L-shaped plate and key plate 23 can move synchronously to the right with the first support 4, drive shaft 17, crank 21, and first sliding pin 22. When the second sliding pin 27 engages with the wave groove 33, it causes the second sliding pin 27, the L-shaped plate, the key plate 23, etc., to move synchronously in a small-amplitude reciprocating left and right oscillation. When the control plate 16 moves downward, through the cooperation of the first track groove 20 and the second track groove 28, and under the engagement of the drive shaft 17 and the first inclined slide groove 29, the corresponding drive shaft 17, the first support 4, the crank 21, the first sliding pin 22, etc., can move synchronously to the right. Under the engagement of the second sliding pin 27 and the first straight groove 30, the corresponding L-shaped seat 25, the key plate 23, etc., will be restricted from moving synchronously to the right. That is, the L-shaped seat 25 and the key plate 23 will remain stationary for a short period of time. When the drive shaft 17 and crank 21 move to the right, the first sliding pin 22 engages with the key groove 24, and the key plate 23 remains stationary. Therefore, the first sliding pin 22 will flip downward along the drive shaft 17, causing the crank 21 and drive shaft 17 to rotate to the left. When the drive shaft 17 rotates, it will drive the corresponding first support 4 to rotate, that is, the corresponding quartz tube 12 will flip to the left. When the control plate 16 continues to move downward and the second sliding pin 27 enters the second inclined slide groove 32, the corresponding crank 21 and the first sliding pin 22 will rotate downward. Pin 22 and drive shaft 17 rotate 90 degrees, that is, the corresponding first support 4 flips 90 degrees and the quartz tube 12 flips 90 degrees to a horizontal state. When the control plate 16 continues to move downward, the corresponding drive shaft 17 is still engaged with the inner wall of the first inclined slide groove 29. The second sliding pin 27, under the engagement with the second inclined slide groove 32, will cause the corresponding L-shaped seat 25, key plate 23, first sliding pin 22, drive shaft 17, crank 21, first support 4, and quartz tube 12 to move to the right in sync. The highest point 62 of the first inclined slide groove 29 is lower than the highest point 63 of the second inclined slide groove 32. Figure 10As can be clearly observed by setting auxiliary dotted lines, when the control plate 16 continues to move downwards, causing the drive shaft 17 to move to the highest point 62 of the first inclined slide groove 29, that is, when the drive shaft 17 is about to enter the first straight groove 30, the control plate 16 will no longer move the drive shaft 17, the first support 4, etc. to the right when it continues to move downwards. When the drive shaft 17 is at the highest point 62 of the first inclined slide groove 29, the second sliding pin 27 has not yet reached the highest point 63 of the second inclined slide groove 32. When the control plate 16 continues to move downwards, the engagement of the second sliding pin 27 with the second inclined slide groove 32 will cause the corresponding L-shaped seat 25, key plate 23, etc. to move to the right synchronously. Since the drive shaft 17 no longer moves to the right when it is engaged with the first straight groove 30, when the key plate 23 moves to the right, the engagement of the key groove 24 with the first sliding pin 22 will cause the first sliding pin 22 to move to the right. When the first sliding pin 22 moves to the right... This will drive crank 21, drive shaft 17, etc., to rotate synchronously to the right. That is, the corresponding first support 4 rotates to the right, and the quartz tube 12 deflects to the right by a small angle, meaning it is no longer in a horizontal state but tilted downwards. When the control plate 16 continues to move downwards, since drive shaft 17 is engaged in the first straight groove 30 section, the first support 4, drive shaft 17, crank 21, etc., no longer move to the right. The second sliding pin 27 will then engage in the wave groove 33 section. When the control plate 16 moves downward, the engagement of the wave groove 33 with the second sliding pin 27 enables the second sliding pin 27, L-shaped seat 25, key plate 23, etc. to move back and forth slightly. When the key plate 23 moves back and forth, the engagement of the key groove 24 with the first sliding pin 22 will cause the corresponding crank 21 to rotate. When the crank 21 rotates, it will drive the corresponding drive shaft 17, first support 4, etc. to rotate back and forth, and will also cause the quartz tube 12 to swing back and forth.

[0044] The front surface of the stand 1 is also provided with a feeding device. The feeding device includes a calibration port 49 that cooperates with the quartz tube 12. The feeding device also includes a storage box 34 that can move left and right. The lower end of the storage box 34 is provided with a valve 45. When the storage box 34 moves to the right, it can form a structure in which the valve 45 is opened.

[0045] like Figure 11-14As shown, the storage box 34 is used to hold raw materials such as bismuth telluride and silicon for making semiconductor chips. A cover 37 is hinged to the upper end of the storage box 34 to seal the upper port. A calibration port 49 is provided, with one end having a smaller inner diameter to facilitate insertion into the inner wall of the quartz tube 12. When the control plate 16 moves downwards, the corresponding quartz tube 12 will move to the right and flip to the left simultaneously. When it flips to the left until the quartz tube 12... When in a horizontal position, it stops rotating. At this point, the quartz tube 12 moves horizontally to the right. When the quartz tube 12 moves to the right, it encounters the calibration port 49. With the calibration port 49 having a small inner diameter at one end, it inserts into the inner wall of the upper port of the quartz tube 12. As the quartz tube 12 continues to move to the right, it drives the corresponding calibration port 49 and the storage tank 34 to move synchronously to the right. When the storage tank 34 moves to the right, it causes the valve 45 to open, allowing the storage tank to open. Material flows from box 34 into calibration port 49, i.e., quartz tube 12. Since quartz tube 12 is horizontal at this time, the loading capacity is very limited. Therefore, when control plate 16 continues to move downward, it can cause quartz tube 12 to tilt downward, i.e., to be in a slightly downward tilted state. At this time, material in storage box 34 can flow smoothly into quartz tube 12. When control plate 16 continues to move downward, it will cause quartz tube 12 to swing up and down slightly. When quartz tube 12 swings up and down slightly, the material can be loaded more evenly and fully. In the existing technology, quartz tube 12 is fixed on support, and then the support and quartz tube 12 are moved to one side for loading. Since quartz tube 12 is vertical at this time, although the loading process can be completed quickly, the impact force of the material under free fall is large, which can easily break the bottom wall of quartz tube 12, thus causing quartz tube 12 to be scrapped. Therefore, this loading method can prevent damage to the bottom wall of quartz tube 12.

[0046] The storage box 34 has a first spring 36 fixed to the upper and lower sides of the right end surface, and the other end of the first spring 36 is fixed to a spring seat 35 fixed to the vertical platform 1. The storage box 34 has a material hopper 38 fixed to the lower end surface, and a discharge nozzle 44 fixed to the lower end surface of the material hopper 38. The front end surface of the vertical platform 1 is also fixed to a baffle 40. The left end surface of the baffle 40 is fixed to a guide rod 41 that is slidably connected to the two discharge nozzles 44. The left end surface of the two guide rods 41 is fixed to a connecting plate 43. The valve 45 is fixed to the connecting plate 43. The inner wall of the discharge nozzle 44 has a discharge port 46 that cooperates with the valve 45.

[0047] like Figure 11-14As shown, the function of the spring seat 35 is to support the first spring 36. The function of the first spring 36 is to drive the storage box 34 with a leftward driving force, so that the storage box 34 can return to the leftmost position when it is not under force in normal conditions. The storage box 34 can slide left and right on the front surface of the stand 1. The installation and shape of the baffle 40, guide rod 41, and discharge nozzle 44 are as shown. Figure 14 As shown, valve 45 and guide rod 41 are slidably connected to the inner wall of discharge nozzle 44. The discharge port 46 facilitates the outflow of material from storage tank 34. When storage tank 34 moves to the right, it compresses the first spring 36. This movement also drives hopper 38 and discharge nozzle 44 to move synchronously to the right. When discharge nozzle 44 moves to the right and causes valve 45 at discharge port 46 to become misaligned, valve 45 no longer blocks and seals discharge port 46. At this point, valve 45 is in the open state. Material can flow out from the outlet 46; when the quartz tube 12 is finished loading, it no longer drives the calibration port 49, storage box 34, etc., that is, when the quartz tube 12 is reset, the corresponding storage box 34 and outlet 44 will also be reset under the elastic force of the first spring 36. At this time, the valve 45 will seal the outlet 46 again, that is, it is in the closed state; the guide rod 41 is respectively fitted with a second spring 42. The function of the second spring 42 is to drive the outlet 44 to the left with a driving force, further improving the reset function of the outlet 44.

[0048] A side plate 39 is fixedly connected to the lower right side of the storage box 34. Two first support plates 50 are fixedly connected to the left end surface of the side plate 39. Small rotating shafts 53 are rotatably connected to the inner walls of the first support plates 50. A connecting sleeve 48 is fixedly connected to the inner end face of the two small rotating shafts 53. The calibration port 49 is fixedly connected to the left end surface of the connecting sleeve 48. A flexible tube 47 is fixedly connected to the right end surface of the connecting sleeve 48. The other end of the flexible tube 47 is fixedly connected to the discharge nozzle 44. A coil spring 54 is also fixedly connected to the inner wall of the first support plate 50. The other end of the coil spring 54 is fixedly connected to the outer surface of the corresponding small rotating shaft 53. A sleeve rod 51 is fixedly connected to the outer side of the outer surface of the small rotating shaft 53. A stop pin 52 that cooperates with the corresponding sleeve rod 51 is fixedly connected to the outer end face of the two first support plates 50.

[0049] like Figure 13-15 As shown, the side plate 39 is used to support components such as the first support plate 50, the connecting sleeve 48, and the calibration port 49; with the small rotating shaft 53 connected to the connecting sleeve 48, the connecting sleeve 48 is essentially hinged to the two first support plates 50; the flexible tube 47 provides space for the connecting sleeve 48 and the calibration port 49 to swing up and down, and under the guidance of the flexible tube 47, the material will flow out from the calibration port 49 under the action of gravity; the installation and shape of the coil spring 54, the small rotating shaft 53, the sleeve rod 51, and the stop pin 52 are as follows. Figure 15As shown, the coil spring 54 provides a rightward rotational force to the small rotating shaft 53. The stop pin 52, in conjunction with the sleeve rod 51, prevents the sleeve rod 51 from rotating to the right, thus allowing the corresponding connecting sleeve 48 and calibration port 49 to rotate only to the right to a horizontal position. Furthermore, under the coiling force of the coil spring 54, the connecting sleeve 48 and calibration port 49 remain horizontal under normal conditions, facilitating the insertion of the calibration port 49 into the inner wall of the quartz tube 12. The maximum diameter of the calibration port 49 is smaller than the inner diameter of the quartz tube 12, ensuring that the quartz tube 12 does not experience any movement obstruction when driving the calibration port 49 to swing up and down.

[0050] In use, after the end of the quartz tube 12 is cut flat, the quartz tube 12 and the glass sealing tube 61 are inserted into the corresponding first support 4 and second support 55, respectively, and clamped and fixed with the arc-shaped clamp 10. Then, by starting the first motor 13, the control plate 16 moves downward, and the quartz tube 12 moves to the right and flips to the left. When it flips to the left until the quartz tube 12 is in a horizontal state, it stops flipping. At this time, the quartz tube 12 will be in a horizontal state moving to the right. When the quartz tube 12 moves to the right, it will meet the calibration port 49. With the calibration port 49 having a small inner diameter at one end, it will be inserted into the inner wall of the upper end of the quartz tube 12. At this time, the quartz tube 12 continues to move to the right, which will drive the corresponding calibration port 49, storage box 34, etc. to move to the right synchronously. When the storage box 34 moves to the right, the valve 45 will open. After the valve 45 opens, the material in the storage box 34 will flow into the calibration port 4. 9. Inside the quartz tube 12, instead of the traditional loading method, damage to the bottom wall of the quartz tube 12 is avoided. After loading is completed, the first motor 13 is started to reset the control board 16 and the first support 4 to the initial state. Through the set rotatable transmission shaft 58, when the second support 55 moves down to the designated position, that is, when the bottom of the glass sealing tube 61 contacts the upper end of the quartz tube 12, the corresponding quartz tube 12 and glass sealing tube 61 can be driven to rotate synchronously when the transmission shaft 58 rotates. When the burner 3 is working, the quartz tube 12 and glass sealing tube 61 can be heated and melted, thereby realizing flame welding and sealing the upper end of the quartz tube 12. This can seal the damaged quartz tube 12 and recycle the quartz tube 12, reducing production costs. Then, the glass sealing tube 61 is vacuum sealed by the vacuum pump. At this time, the quartz tube 12 can be placed in the swing furnace to prepare crystal rods.

[0051] The specific embodiments described herein are merely illustrative of the spirit of the invention. Those skilled in the art to which this invention pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the spirit of the invention or exceeding the scope defined by the appended claims.

Claims

1. A quartz tube sealing connection device for semiconductor thermoelectric material preparation process, comprising a vertical platform (1), characterized in that: The lower end of one side of the platform (1) is provided with a first support (4), and a quartz tube (12) is provided inside the first support (4). The upper end of one side of the platform (1) is provided with a second support (55) that can move up and down, and a glass sealing tube (61) is provided inside the second support (55). The inner walls of the first support (4) and the second support (55) are respectively provided with clamping devices for fixing the quartz tube (12) and the glass sealing tube (61). The second support (55) is also provided with a rotatable drive shaft (58). After the second support (55) moves down to a designated position, it can form a structure in which the quartz tube (12) and the glass sealing tube (61) rotate synchronously through the drive of the drive shaft (58). The platform (1) is also provided with a burner (3) for heating the quartz tube (12) and the glass sealing tube (61). The rear end surface of the platform (1) is fixedly connected to a first motor (13), and the output end of the first motor (13) is fixedly connected to a threaded rod (14). The rear end surface of the platform (1) is also slidably connected to a control plate (16). A threaded seat (15) that is threadedly connected to the threaded rod (14) is fixedly connected to one side end face of the control plate (16). A square sliding groove (19) is opened in the middle inner wall of the platform (1). A square slider (18) is slidably connected to the inner wall of the square sliding groove (19). The first support (4) is installed on the square slider (18). A drive shaft (17) is provided on the inner wall of the square slider (18). A first track groove (20) that cooperates with the drive shaft (17) is opened on the control plate (16). The drive shaft (17) is rotatably connected to the inner wall of the square slider (18). The first support (4) is fixed to the front end surface of the drive shaft (17). A crank (21) is fixed to the rear end of the outer surface of the drive shaft (17). A first sliding pin (22) is fixed to the inner wall of the other end of the crank (21). An L-shaped seat (25) is also slidably connected to the rear end surface of the platform (1). A key plate (23) is fixed to the right end surface of the L-shaped seat (25). A long keyway that cooperates with the first sliding pin (22) is opened on the key plate (23). A second sliding pin (27) is fixed to the inner wall of the middle part of the L-shaped seat (25). A second track groove (28) that cooperates with the second sliding pin (27) is opened on the inner wall of the control plate (16).

2. The quartz tube sealing connection device for a semiconductor thermoelectric material preparation process as described in claim 1, characterized in that: The inner walls of the first support (4) and the second support (55) are respectively rotatably connected to C-shaped rings (9). The clamping device includes two first telescopic rods (11). The first telescopic rods (11) are respectively centrally symmetrically arranged on the inner walls of the corresponding C-shaped rings (9). The inner ends of the first telescopic rods (11) are respectively fixed with arc-shaped clamps (10).

3. The quartz tube sealing connection device for a semiconductor thermoelectric material preparation process as described in claim 2, characterized in that: The second support (55) is slidably connected to the front surface of the stand (1). The second telescopic rod (56) is fixedly connected to the left and right sides of the upper surface of the second support (55). The second motor (57) is fixedly connected to the middle of the upper surface of the second support (55). The transmission shaft (58) is fixedly connected to the output end of the second motor (57). The upper end of the C-shaped ring (9) is coaxially fixedly connected to the C-shaped gear ring (8). Two small spur gears (7) mesh on the outer surface of the C-shaped gear ring (8). The upper end of the outer surface of the transmission shaft (58) is fixedly connected to the C-shaped gear ring (8). A first pulley (59) is fixedly connected to the second support (55) and rotatably connected to it. The front ends of the first pulley (59) are respectively connected to the left and right sides of the second pulley (60), and the second pulleys (60) are respectively coaxially fixed to the corresponding small spur gears (7). The inner wall of the first support (4) is rotatably connected to a driving pulley (5) that cooperates with the transmission shaft (58). The front ends of the driving pulley (5) are respectively connected to the left and right sides of the driven pulley (6), and the driven pulleys (6) are respectively coaxially fixed to the corresponding small spur gears (7).

4. The quartz tube sealing connection device for a semiconductor thermoelectric material preparation process as described in claim 1, characterized in that: The front surface of the stand (1) is also provided with a feeding device. The feeding device includes a calibration port (49) that cooperates with the quartz tube (12). The feeding device also includes a storage box (34) that can move left and right. A valve (45) is provided at the lower end of the storage box (34). When the storage box (34) moves to the right, it can form a structure in which the valve (45) is opened.

5. The quartz tube sealing connection device for a semiconductor thermoelectric material preparation process as described in claim 4, characterized in that: The storage box (34) has a first spring (36) fixed to the upper and lower sides of the right end surface, and the other end of the first spring (36) is fixed to a spring seat (35) fixed to the platform (1). The storage box (34) has a material hopper (38) fixed to the lower end surface, and a discharge nozzle (44) fixed to the lower end surface of the material hopper (38). The platform (1) also has a baffle (40) fixed to the front end surface. The baffle (40) has two guide rods (41) that are slidably connected to the discharge nozzles (44) fixed to the left end surface. The two guide rods (41) have a connecting plate (43) fixed to the left end surface. The valve (45) is fixed to the connecting plate (43). The discharge port (46) that cooperates with the valve (45) is opened on the inner wall of the discharge nozzle (44).

6. The quartz tube sealing connection device for a semiconductor thermoelectric material preparation process as described in claim 5, characterized in that: A side plate (39) is fixed to the lower right side of the storage box (34). Two first support plates (50) are fixed to the left end surface of the side plate (39). Small shafts (53) are rotatably connected to the inner walls of the first support plates (50). A connecting sleeve (48) is fixed to the inner end face of the two small shafts (53). The calibration port (49) is fixed to the left end surface of the connecting sleeve (48). A flexible tube (47) is fixed to the right end surface of the connecting sleeve (48). The other end of the flexible tube (47) is fixed to the discharge nozzle (44). A coil spring (54) is also fixed to the inner wall of the first support plate (50). The other end of the coil spring (54) is fixed to the outer surface of the corresponding small shaft (53). A sleeve rod (51) is fixed to the outer side of the outer surface of the small shaft (53). A stop pin (52) that cooperates with the corresponding sleeve rod (51) is fixed to the outer end face of the two first support plates (50).

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