Movable ion pump high-voltage power supply device and implementation method
By designing a portable high-voltage power supply device, which utilizes battery power and DC-DC converter unit for voltage boosting, a stable power supply is provided for the ion pump. This solves the problem of maintaining vacuum in traditional ion pumps without external power, and enables stable operation and high vacuum maintenance when there is a power outage or when mains power cannot be connected.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
- Filing Date
- 2023-10-26
- Publication Date
- 2026-07-03
AI Technical Summary
Traditional ion pump high-pressure control devices cannot be used without an external power source, resulting in the inability to maintain the system vacuum, especially during power outages or when no mains power is available.
A portable high-voltage power supply device was designed, including a mobile power supply unit, a main control switch unit, a DC-DC converter unit, a high-voltage output unit, and a voltage and current processing unit. It utilizes battery power and DC-DC converter unit to boost the voltage, providing a stable power supply for the ion pump. The ion pump is connected via a high-voltage cable, enabling one-button control and display of electrical parameters.
It can maintain the operation of the ion pump without mains power and keep the system at an extremely high vacuum for more than 30 days. It is small in size, light in weight, and easy to operate. It is suitable for the stable operation of multi-channel ion pumps and for extremely high vacuum systems with high vacuum requirements.
Smart Images

Figure CN117526499B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of ultra-high vacuum ion pumps, specifically a portable high-voltage power supply device and implementation method suitable for ion pumps. Background Technology
[0002] Traditional ion pump high-voltage control devices are rack-mounted or desktop-mounted devices that use 220V AC mains power as input. They cannot be used when there is a power outage or when AC mains power is unavailable. Therefore, traditional ion pump high-voltage control devices cannot be used in situations where there are special requirements for maintaining system vacuum, such as high-end measuring instruments. Summary of the Invention
[0003] To meet the portability requirements of high-pressure ion pump devices, this invention designs a portable high-pressure power supply device and method suitable for novel ultra-high vacuum ion pumps. It can maintain the system vacuum for more than 30 days without an external power supply, and is simple to use, easy to operate, and highly stable.
[0004] The technical solution adopted by the present invention to achieve the above objectives is as follows:
[0005] A portable ion pump high-voltage power supply device includes a portable power supply unit, a main control switch unit, a DC-DC converter unit, and a high-voltage output unit connected in sequence. It also includes voltage and current processing units connected to the portable power supply unit and the high-voltage output unit respectively. The high-voltage output unit is connected to the ion pump through a high-voltage cable. The portable power supply unit, the main control switch unit, the DC-DC converter unit, the high-voltage output unit, and the voltage and current processing unit are all housed within the portable high-voltage power supply housing.
[0006] The mobile power supply unit includes: a mobile power supply cable and socket U2, a mobile power supply U1, and a charging unit U3 connected in sequence. The mobile power supply U1 is connected to the main control switch unit through the mobile power supply cable and socket U2.
[0007] The master control switch unit includes a rocker switch U4 and a status indicator U5. The rocker switch U4 is connected to the mobile power supply cable and socket U2 and the DC-DC converter unit respectively. The status indicator U5 is provided between the rocker switch U4 and the DC-DC converter unit.
[0008] The DC-DC conversion unit includes a low-voltage side conversion unit U9, a PWM control unit U10, a transformer unit U11, and a voltage doubler rectifier circuit unit U12 connected in sequence. The low-voltage side conversion unit U9 is connected to the main control switch unit, and the voltage doubler rectifier circuit unit U12 is connected to the high-voltage output unit. The low-voltage side of the transformer unit U11 is connected to the PWM control unit U10, and the high-voltage side is connected to the voltage doubler rectifier circuit unit U12.
[0009] The high-voltage output unit includes a high-voltage output socket U6, a high-voltage interlock U7, and a grounding unit U8. One side of the high-voltage output socket U6 is connected to the DC-DC converter unit via its pins, and the other side is connected to the ion pump via a high-voltage cable. The high-voltage output socket U6 is grounded sequentially through the high-voltage interlock U7 and the grounding unit U8. The grounding unit U8 is also connected to the DC-DC converter unit. The high-voltage output socket U6 and the grounding unit U8 are respectively fixed in the housing of the mobile high-voltage power supply with nuts.
[0010] The voltage and current processing unit includes a voltage processing unit U13 and a current processing unit U14, both of which are connected to the mobile power supply cable and socket U2 and the high voltage output unit, respectively.
[0011] A method for implementing a portable ion pump high-voltage power supply device includes the following steps:
[0012] The mobile power supply unit supplies power to the entire portable high-voltage power supply device;
[0013] The main control switch unit controls the start and stop of the high-voltage power supply output;
[0014] The DC-DC converter unit boosts the input voltage of the mobile power supply unit;
[0015] The high-voltage output unit sends the high-voltage power boosted by the DC-DC converter to the ion pump via a high-voltage cable.
[0016] The voltage and current processing unit displays the voltage and current parameters currently output by the ion pump.
[0017] The DC-DC converter unit performs the following steps:
[0018] The low-voltage side conversion unit U9 converts the voltage through a DC converter for use by the DC-DC conversion unit;
[0019] PWM control unit U10 provides PWM signals to transformer unit U11;
[0020] Transformer unit U11 increases the voltage of the power supply through the turns ratio;
[0021] The voltage multiplier rectifier circuit unit U12 achieves high voltage output through a high-frequency transformer and a voltage multiplier circuit.
[0022] The high-voltage output unit performs the following steps:
[0023] The high-voltage output socket U6 outputs the power converted by the DC-DC converter to the ion pump.
[0024] The high-voltage interlock U7 interlocks the mobile high-voltage device with the ion pump through the interlock terminals to ensure that the mobile high-voltage power supply device and the ion pump are at the same potential.
[0025] Grounding unit U8 grounds the portable high-voltage power supply device.
[0026] The present invention has the following beneficial effects and advantages:
[0027] 1. This invention enables the ion pump to remain operational and maintains the system's extremely high vacuum even when the system is unable to connect to mains power.
[0028] 2. The mobile high-pressure device of the present invention is small in size, light in weight, and large in capacity, enabling the ion pump to work for more than 30 days under extremely high vacuum conditions.
[0029] 3. This invention can achieve a maximum output current of 10uA, which can meet the continuous working requirements of the entire series of ion pumps from 3L to 2000L under extremely high vacuum.
[0030] 4. This invention enables the mobile supply of power to the ion pump while simultaneously displaying the pump's operating electrical parameters in real time on the housing, providing excellent visibility.
[0031] 5. The mobile high-voltage device of the present invention realizes one-button high-voltage output control, which is simple and convenient to operate. Attached Figure Description
[0032] Figure 1 A schematic diagram of the overall system architecture of this invention;
[0033] Figure 2 A schematic diagram of the structure of this invention;
[0034] Figure 3 Circuit diagram of the mobile power supply unit;
[0035] Figure 4 Circuit diagram of the main control switch unit;
[0036] Figure 5 DC-DC converter unit circuit diagram;
[0037] Figure 6 High-voltage output unit circuit diagram;
[0038] Figure 7 Circuit diagram of voltage and current processing unit;
[0039] Figure 8 Circuit diagram of the mobile high-voltage power supply housing unit;
[0040] Figure 9 A schematic diagram illustrating the method of using this invention. Detailed Implementation
[0041] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.
[0042] A portable high-voltage power supply device suitable for a novel ultra-high vacuum ion pump includes:
[0043] A mobile power supply unit is used to supply power to the entire mobile high-voltage power supply device;
[0044] The main control switch unit is used to control the start and stop of the high-voltage power supply output;
[0045] The DC-DC converter unit is used to boost the input voltage to provide a power source for the ion pump.
[0046] The high-voltage output unit is used to send high-voltage power to the ion pump through a high-voltage cable to ensure the stable operation of the ion pump.
[0047] Voltage and current processing unit for displaying the current voltage / current parameters output by the ion pump;
[0048] Mobile high-voltage power supply housing unit, used for the installation, operation and fixation of devices.
[0049] The mobile power supply unit includes:
[0050] The portable power supply U1 is used to provide power to the mobile high-voltage device through battery capacity, and can ensure that the ion pump can work for more than 30 days under extremely high vacuum.
[0051] The portable power supply cable and socket U2 is used to provide voltage to the portable high-voltage device through the cable and terminals, and is easy to disassemble and install.
[0052] The charging unit U3 is used to charge the mobile power supply unit via a charger.
[0053] The mobile power supply unit is:
[0054] One side of the mobile power supply U1 is connected to the main control switch unit via a mobile power supply cable and socket U2 to supply power to the mobile high-voltage device; the other side of the mobile power supply U1 is charged via a charging unit U3, which can charge the mobile power supply unit when its power is insufficient.
[0055] The master control switch unit includes:
[0056] The rocker switch U4 is used to control the power supply unit through dual-channel switch contacts 1 and 2, and to control the DC-DC converter power supply unit through dual-channel switch contacts 3 and 4.
[0057] Status indicator U5 is used to indicate whether the main control switch unit is in the open or closed state.
[0058] The main control switch unit is:
[0059] The rocker switch U4 of the main control switch unit has its contact 1 connected to the V+ of the mobile power supply cable and socket U2, its contact 2 connected to the V- of the mobile power supply cable and socket U2, its contact 3 connected to the control port 1 of the DC-DC converter unit, and its contact 4 connected to the control port 2 of the DC-DC converter unit. This is used to realize the power supply switch control of the mobile high-voltage device. The status indicator U5 is connected to the rocker switch contact 3 on one side and to the rocker switch contact 4 on the other side via a resistor R. This is used to indicate the switching status of the main control switch unit.
[0060] The high-voltage output unit includes:
[0061] The high-voltage output socket U6 is used to send high-voltage power to the ion pump through a high-voltage cable to ensure the stable operation of the ion pump.
[0062] The high-voltage interlock U7 is used to interlock the mobile high-voltage device with the ion pump through the interlock terminal, ensuring a reliable connection of the cable;
[0063] Grounding unit U8 is used to ensure reliable grounding between the mobile high-voltage device and the ion pump via a grounding post;
[0064] The high-voltage output unit is:
[0065] The high-voltage output socket U6 is locked to the mobile high-voltage power supply housing unit with a hexagonal nut. One side of the high-voltage output socket U6 is connected to the DC-DC converter unit through its pins, and the other side is connected to the ion pump through a high-voltage cable. One side of the high-voltage interlock U7 is connected to the grounding unit U8 through a cable, and the other side is connected to the interlocking terminal of the high-voltage cable to ensure that the mobile high-voltage device and the ion pump are at the same potential. The grounding unit U8 is locked to the mobile high-voltage power supply housing unit with an M4 nut. One side is connected to the ground of the DC-DC converter unit, and the other side is connected to the ion pump through a ground wire, connecting to the equipment ground to ensure personal safety.
[0066] The DC-DC conversion unit includes:
[0067] The low-voltage side conversion unit U9 is used to convert voltage via a DC converter for use by the DC-DC conversion unit;
[0068] PWM control unit U10 is used as a high-frequency transformer input via a PWM generator;
[0069] Transformer unit U11 is used to achieve voltage boosting through a high-frequency transformer;
[0070] The voltage multiplier rectifier circuit unit U12 is used to achieve high voltage output through a high-frequency transformer and a voltage multiplier circuit;
[0071] The DC-DC conversion unit is:
[0072] The low-voltage side conversion unit U9 is connected to the DC-DC conversion unit on one side and to the PWM control unit on the other side via a cable. The PWM control unit is connected to the low-voltage side of the transformer unit U11 on the other side, providing the transformer with a PWM signal. The high-voltage side of the transformer is connected to the voltage doubler rectifier circuit unit U12, which raises the voltage through the turns ratio. The voltage doubler rectifier circuit unit U12 is connected to the high-voltage output socket U6 on the other side, providing a power source for the ion pump.
[0073] The voltage and current processing unit includes:
[0074] The voltage processing unit U13 is used to accurately display the high voltage output value through voltage conversion;
[0075] The current processing unit U14 is used to accurately display the operating current of the ion pump through voltage conversion.
[0076] The voltage and current processing unit is:
[0077] One end of the current processing unit U14 is connected to the R3 / R4 / HGND port, and the other end is grounded. The other end of the resistor R4 is directly grounded. The output current is displayed accurately in real time through the resistor R4. The other end is connected to the mobile power supply cable and socket U2 to supply power to it. One end of the voltage processing unit U13 is connected to R2 / R3 and then to the high voltage output unit through the resistor R2. The other end is connected to the R3 / R4 / HGND port. The ion pump operating current is displayed accurately in real time through differential sampling of R3. The other end is connected to the mobile power supply cable and socket U2 to supply power to it.
[0078] The mobile high-voltage power supply housing unit includes:
[0079] The housing unit U15 is designed to ensure accurate installation and dustproof sealing of components through an ABS plastic box and customized opening design.
[0080] Warning sign unit U16 is used to provide a warning function for mobile high-voltage devices through bright-colored sign configuration;
[0081] The mobile high-voltage power supply housing unit is:
[0082] Square holes 1 and 2 on the top cover of housing unit U15 are used for the installation and fixing of voltage and current processing units, and the black frame area on the top cover is used for attaching warning label unit U16; square hole 3 on the front cover of housing unit U15 is used for the installation and fixing of the master control switch unit, circular hole 1 is used for the installation and fixing of status indicator U5, and circular hole 2 is used for the installation and fixing of the charging unit; circular hole 3 on the rear cover of housing unit U15 is used for the installation and fixing of high voltage output socket U6, circular hole 4 is used for the installation and fixing of high voltage interlocking unit U7, and circular hole 5 is used for the installation and fixing of grounding unit.
[0083] A portable high-voltage power supply device and implementation method suitable for ion pumps, comprising the following steps:
[0084] A mobile power supply unit is used to supply power to the entire mobile high-voltage power supply device;
[0085] The main control switch unit is used to control the start and stop of the high-voltage power supply output;
[0086] The DC-DC converter unit is used to boost the input voltage to provide a power source for the ion pump.
[0087] The high-voltage output unit is used to send high-voltage power to the ion pump through a high-voltage cable to ensure the stable operation of the ion pump.
[0088] Voltage and current processing unit for displaying the current voltage / current parameters output by the ion pump;
[0089] Mobile high-voltage power supply housing unit, used for the installation, operation and fixation of devices.
[0090] The mobile power supply unit performs the following steps:
[0091] The portable power supply U1 is used to provide power to the mobile high-voltage device through battery capacity, and can ensure that the ion pump can work for more than 30 days under extremely high vacuum.
[0092] The portable power supply cable and socket U2 is used to provide voltage to the portable high-voltage device through the cable and terminals, and is easy to disassemble and install.
[0093] The charging unit U3 is used to charge the mobile power supply unit via a charger.
[0094] The main control switch unit performs the following steps:
[0095] The rocker switch U4 is used to control the power supply unit through dual-channel switch contacts 1 and 2, and to control the DC-DC converter power supply unit through dual-channel switch contacts 3 and 4.
[0096] Status indicator U5 is used to indicate whether the main control switch unit is in the open or closed state.
[0097] The high-voltage output unit performs the following steps:
[0098] The high-voltage output socket U6 is used to send high-voltage power to the ion pump through a high-voltage cable to ensure the stable operation of the ion pump.
[0099] The high-voltage interlock U7 is used to interlock the mobile high-voltage device with the ion pump through the interlock terminal, ensuring a reliable connection of the cable;
[0100] Grounding unit U8 is used to ensure reliable grounding between the mobile high-voltage device and the ion pump via a grounding post;
[0101] The DC-DC converter unit performs the following steps:
[0102] The low-voltage side conversion unit U9 is used to convert voltage via a DC converter for use by the DC-DC conversion unit;
[0103] PWM control unit U10 is used as a high-frequency transformer input via a PWM generator;
[0104] Transformer unit U11 is used to achieve voltage boosting through a high-frequency transformer;
[0105] The voltage multiplier rectifier circuit unit U12 is used to achieve high voltage output through a high-frequency transformer and a voltage multiplier circuit;
[0106] The voltage and current processing unit performs the following steps:
[0107] The voltage processing unit U13 is used to accurately display the high voltage output value through voltage conversion;
[0108] The current processing unit U14 is used to accurately display the operating current of the ion pump through voltage conversion.
[0109] The mobile high-voltage power supply housing unit performs the following steps:
[0110] The housing unit U15 is designed to ensure accurate installation and dustproof sealing of components through an ABS plastic box and customized opening design.
[0111] The warning sign unit U16 is used to provide a warning for mobile high-voltage devices through the configuration of bright-colored signs.
[0112] Example
[0113] like Figure 1 and Figure 2As shown, the invention mainly includes a mobile power supply unit, a main control switch unit, a DC-DC conversion unit, a high-voltage output unit, a voltage and current processing unit, and a mobile high-voltage power supply housing unit.
[0114] A mobile power supply unit is used to supply power to the entire mobile high-voltage power supply device;
[0115] The main control switch unit is used to control the start and stop of the high-voltage power supply output;
[0116] The DC-DC converter unit is used to boost the input voltage to provide a power source for the ion pump.
[0117] The high-voltage output unit is used to send high-voltage power to the ion pump through a high-voltage cable to ensure the stable operation of the ion pump.
[0118] Voltage and current processing unit for displaying the current voltage / current parameters output by the ion pump;
[0119] Mobile high-voltage power supply housing unit, used for the installation, operation and fixation of devices.
[0120] like Figure 3 As shown, the mobile power supply unit is used to supply power to the entire mobile high-voltage power supply device; it mainly includes a mobile power supply unit U1, a mobile power supply cable and socket U2, and a charging unit U3. One side of the mobile power supply unit U1 is connected to the main control switch unit via the mobile power supply cable and socket U2 to supply power to the mobile high-voltage device; the other side of the mobile power supply unit U1 is charged via the charging unit U3, which can charge the mobile power supply unit when its power is insufficient.
[0121] like Figure 4 As shown, the master control switch unit is mainly used to control the start and stop of the high-voltage power output. It mainly includes a rocker switch U4 and a status indicator U5. The rocker switch U4 contact 1 is connected to the V+ of the mobile power supply cable and socket U2, the rocker switch U4 contact 2 is connected to the V- of the mobile power supply cable and socket U2, the rocker switch contact 3 is connected to the control port 1 of the DC-DC converter unit, and the rocker switch contact 4 is connected to the control port 2 of the DC-DC converter unit. This is used to realize the power supply switch control of the mobile high-voltage device. The status indicator U5 is connected to the rocker switch contact 3 on one side and to the rocker switch contact 4 on the other side via a resistor R. This is used to indicate the switching status of the master control switch unit.
[0122] like Figure 5As shown, the DC-DC converter unit is mainly used to boost the input voltage to provide power for the ion pump. It mainly includes a low-voltage side conversion unit U9, a PWM control unit U10, a transformer unit U11, and a voltage doubler rectifier circuit unit U12. The low-voltage side conversion unit U9 is connected to the DC-DC converter unit on one side and to the PWM control unit via a cable on the other side, providing power to the DC-DC converter unit. The PWM control unit is connected to the low-voltage side of the transformer unit U11 on the other side, providing PWM signals to the transformer. The high-voltage side of the transformer is connected to the voltage doubler rectifier circuit unit U12, which boosts the voltage through the turns ratio. The voltage doubler rectifier circuit unit U12 is connected to the high-voltage output socket U6 on the other side, providing power for the ion pump.
[0123] like Figure 6 As shown, the high-voltage output unit is mainly used to send high-voltage power to the ion pump via a high-voltage cable, ensuring the stable operation of the ion pump. It mainly includes a high-voltage output socket U6, a high-voltage interlock, and a grounding unit U8. The high-voltage output socket U6 is locked to the mobile high-voltage power supply housing unit with a hexagonal nut. One side of the high-voltage output socket U6 is connected to the DC-DC converter unit via its pins, and the other side is connected to the ion pump via a high-voltage cable. The high-voltage interlock U7 is connected to the grounding unit U8 via a cable on one side and to the interlock terminal of the high-voltage cable on the other side, ensuring that the mobile high-voltage device and the ion pump are at the same potential. The grounding unit U8 is locked to the mobile high-voltage power supply housing unit with an M4 nut. One side is connected to the ground of the DC-DC converter unit, and the other side is connected to the ion pump via a ground wire, connecting to the equipment ground to ensure personal safety.
[0124] like Figure 7 As shown, the voltage and current processing unit is used to display the current voltage / current parameters output by the ion pump. It mainly includes a voltage processing unit U13 and a current processing unit U14. One end of the current processing unit U14 is connected to the R3 / R4 / HGND port, and the other end is grounded. The other end of the resistor R4 is directly grounded. The output current is displayed accurately in real time through the resistor R4. The other end is connected to the mobile power supply cable and socket U2 to supply power to it. One end of the voltage processing unit U13 is connected to R2 / R3 and then connected to the high voltage output unit through the resistor R2. The other end is connected to the R3 / R4 / HGND port. The ion pump's operating voltage is displayed accurately in real time through differential sampling of R3. The other end is connected to the mobile power supply cable and socket U2 to supply power to it.
[0125] The housing unit U15 is designed to enable accurate installation and dustproof sealing of components through an ABS plastic box and customized opening design.
[0126] The warning sign unit U16 is used to provide a warning for mobile high-voltage devices through the configuration of bright-colored signs.
[0127] The mobile high-voltage power supply housing unit is:
[0128] like Figure 8 As shown, the mobile high-voltage power supply housing unit is used for the installation, operation, and fixation of devices. It mainly includes housing unit U15 and warning label unit U16. Square holes 1 and 2 on the top cover of housing unit U15 are used for the installation and fixation of voltage and current processing units, and the black frame area on the top cover is used for affixing warning label unit U16. Square hole 3 on the front cover of housing unit U15 is used for the installation and fixation of the master control switch unit, circular hole 1 is used for the installation and fixation of the status indicator U5, and circular hole 2 is used for the installation and fixation of the charging unit. Circular hole 3 on the rear cover of housing unit U15 is used for the installation and fixation of the high-voltage output socket U6, circular hole 4 is used for the installation and fixation of the high-voltage interlocking unit U7, and circular hole 5 is used for the installation and fixation of the grounding unit.
[0129] like Figure 9 As shown, the process of using this invention includes the following steps:
[0130] (1) Connection system: Connect the ion pump to the ultra-high vacuum system chamber, and connect the evacuation port of the ultra-high vacuum system chamber to the pre-evacuation pump group respectively;
[0131] (2) Background vacuum pre-evacuation: The pre-evacuation pump group is powered. Before starting, ensure that the pre-evacuation pump group has an appropriate collector to prevent the liquid vapor of the rough pump from flowing into the ultra-high vacuum system chamber and the ion pump. Start the pre-evacuation pump group to evacuate the ultra-high vacuum system chamber to a vacuum state (below -3Pa).
[0132] (3) Ion pump operation: Connect the ion pump to the conventional ion pump controller using a high-voltage radiation-resistant cable, and start the high-voltage output of the conventional ion pump controller;
[0133] (4) Operation of the ultra-high vacuum system: When the system vacuum is less than 1X10-8Pa, turn off the conventional ion pump control high voltage output, connect the mobile high voltage device to the ion pump with a high voltage cable, and the voltage and current display unit on the device can display the voltage and current parameters of the ion pump operation.
[0134] This invention enables the ion pump to maintain normal operation and sustain the vacuum level of the ultra-high vacuum system for more than 30 days even when the system or equipment is unable to connect to mains power. Based on a mobile power supply unit, a master control switch unit, a DC-DC converter unit, a high-voltage output unit, a voltage and current processing unit, and a mobile high-voltage power supply housing unit, this invention achieves portability of the ion pump high-voltage power supply device, making it highly suitable for ultra-high vacuum systems with stringent requirements for maintaining system vacuum levels.
[0135] Based on a rechargeable high-capacity battery and low-power hardware circuit design, the mobile ion pump for ultra-high vacuum systems maintains its operating performance and can be used for more than 30 days.
[0136] The device of this invention is small in size and light in weight, can be operated with one hand, and features one-button control for high voltage output. The high voltage output status is clear and easy for users to learn.
[0137] The device of this invention integrates the control of four-channel ion pumps into one device. It is small in size, light in weight, and highly integrated, making it very suitable for systems or equipment that require multiple-channel ion pumps but have requirements on the size of the controller.
[0138] The device of this invention is low in cost and has a wide range of applications, and is of great significance for maintaining the ultra-high vacuum system of ion pumps in high-end instruments or equipment.
[0139] This device is simple to operate, flexible to use, and highly practical. It enables the ion pump to maintain normal operation and the system to maintain an extremely high vacuum level even when there is a power outage or the equipment cannot be connected to the mains power. It is very suitable for ultra-high vacuum systems that have high requirements for maintaining the system vacuum level.
[0140] The portable high-voltage power supply device of this invention is small in size, light in weight, simple to operate, and highly portable. It can not only maintain the working state of the ion pump and maintain the ultra-high vacuum of the system in the event of a power outage or when it is not connected to the mains power, but also accurately measure the working electrical parameters (voltage and current) of the ion pump. It is very suitable for ultra-high vacuum systems or equipment that have high requirements for maintaining the vacuum system.
Claims
1. A mobile ion pump high voltage power supply device, characterized by, It includes a mobile power supply unit, a main control switch unit, a DC-DC converter unit, and a high-voltage output unit connected in sequence, and also includes voltage and current processing units connected to the mobile power supply unit and the high-voltage output unit respectively. The high-voltage output unit is connected to the ion pump through a high-voltage cable. The mobile power supply unit, the main control switch unit, the DC-DC converter unit, the high-voltage output unit, and the voltage and current processing unit are all located inside the mobile high-voltage power supply housing. The mobile power supply unit includes: a mobile power supply cable and socket U2, a mobile power supply U1, and a charging unit U3 connected in sequence. The mobile power supply U1 is connected to the main control switch unit through the mobile power supply cable and socket U2. The high-voltage output unit includes a high-voltage output socket U6, a high-voltage interlock U7, and a grounding unit U8. One side of the high-voltage output socket U6 is connected to the DC-DC converter unit via its pins, and the other side is connected to the ion pump via a high-voltage cable. The high-voltage output socket U6 is grounded sequentially through the high-voltage interlock U7 and the grounding unit U8. The grounding unit U8 is also connected to the DC-DC converter unit. The high-voltage output socket U6 and the grounding unit U8 are respectively fixed in the housing of the mobile high-voltage power supply with nuts. The voltage and current processing unit includes a voltage processing unit U13 and a current processing unit U14, both of which are connected to the mobile power supply cable and socket U2 and the high voltage output unit.
2. The portable ion pump high-voltage power supply device according to claim 1, characterized in that, The master control switch unit includes a rocker switch U4 and a status indicator U5. The rocker switch U4 is connected to the mobile power supply cable and socket U2 and the DC-DC converter unit respectively. The status indicator U5 is provided between the rocker switch U4 and the DC-DC converter unit.
3. The portable ion pump high-voltage power supply device according to claim 1, characterized in that, The DC-DC conversion unit includes a low-voltage side conversion unit U9, a PWM control unit U10, a transformer unit U11, and a voltage doubler rectifier circuit unit U12 connected in sequence. The low-voltage side conversion unit U9 is connected to the main control switch unit, and the voltage doubler rectifier circuit unit U12 is connected to the high-voltage output unit. The low-voltage side of the transformer unit U11 is connected to the PWM control unit U10, and the high-voltage side is connected to the voltage doubler rectifier circuit unit U12.
4. A method for implementing a portable ion pump high-voltage power supply device, applied to the portable ion pump high-voltage power supply device described in claim 3, characterized in that, Includes the following steps: The mobile power supply unit supplies power to the entire portable ion pump high-voltage power supply unit; The main control switch unit controls the start and stop of the high-voltage power supply output; The DC-DC converter unit boosts the voltage input to the mobile power supply unit; The high-voltage output unit sends the high-voltage power boosted by the DC-DC converter to the ion pump via a high-voltage cable. The voltage and current processing unit displays the voltage and current parameters currently output by the ion pump.
5. The method for implementing a portable ion pump high-voltage power supply device according to claim 4, characterized in that, The DC-DC converter unit performs the following steps: The low-voltage side conversion unit U9 converts the voltage through a DC converter for use by the DC-DC conversion unit; PWM control unit U10 provides PWM signals to transformer unit U11; Transformer unit U11 increases the voltage of the power supply through the turns ratio; The voltage doubler rectifier circuit unit U12 achieves high voltage output through the voltage doubler circuit.
6. The method for implementing a portable ion pump high-voltage power supply device according to claim 4, characterized in that, The high-voltage output unit performs the following steps: The high-voltage output socket U6 outputs the power converted by the DC-DC converter to the ion pump. The high-voltage interlock U7 interlocks the portable ion pump high-voltage power supply unit with the ion pump through the interlock terminal to ensure that the portable ion pump high-voltage power supply unit and the ion pump are at the same potential. Grounding unit U8 grounds the high-voltage power supply unit of the portable ion pump.