Electrocardio electrode and electronic device

Abstract

The embodiment of the application discloses an electrocardio electrode and an electronic device, relates to the field of electrocardio detection devices, and solves the problem of low signal quality stability of the electrocardio electrode due to the small effective contact area between the electrocardio electrode and the human body. The electrocardio electrode comprises a conductive ceramic layer and a conductive layer. The conductive ceramic layer has opposite first and second surfaces. The first surface is used for electrical connection with a wire. The conductive layer is stacked on the second surface of the conductive ceramic layer. The conductive layer is electrically connected with the conductive ceramic layer. The conductive layer can be directly or indirectly electrically connected with the conductive ceramic layer. The conductive layer is used for contacting the skin to collect an electrical signal. Since the outer surfaces of the conductive layer away from the conductive ceramic layer can all contact the skin to form an integral effective contact, the application increases the effective area of the electrocardio electrode in contact with the skin by additionally arranging the conductive layer on the conductive ceramic layer. Further, the signal quality stability of the electrocardio electrode is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electrocardio detection equipment, and particularly relates to an electrocardio electrode and an electronic device. BACKGROUND

[0002] More and more smart wearable devices take electrocardio (ECG) function as one of their main features. Thus, users can monitor the health condition of the heart at any time through the smart wearable devices in the daily use process. One of the core components of the smart wearable devices to realize the electrocardio detection function is an electrocardio electrode. Generally, the electrocardio electrode is installed on the appearance surface of the smart wearable device and can be in contact with the human skin to collect the potential of the human body surface. Then, the potential signal is transmitted to the internal processing device of the smart wearable device for further processing and analysis to obtain the electrocardiogram. The quality of the electrocardio electrode greatly affects the signal quality of the electrocardiogram.

[0003] A current electrocardio electrode is made of conductive ceramic. The conductive ceramic can directly transmit the physiological signal of the human body to the processor inside the electronic device. The conductive ceramic includes a base phase and a conductive phase, and the conductive phase is dispersed in the base phase. The conductive phases are connected to each other to form a network structure to provide the conduction performance. Only the conductive phase of the conductive ceramic is in contact with the human skin to collect the potential of the human body surface, so only part of the area on the surface of the conductive ceramic can form effective contact with the human skin. The effective contact area of the electrocardio electrode with the human body is small, so the signal quality stability of the electrocardio electrode is low. SUMMARY

[0004] Embodiments of the present application provide an electrocardio electrode and an electronic device, which solve the problem that the effective contact area of the current electrocardio electrode with the human body is small, so the signal quality stability of the electrocardio electrode is low.

[0005] To achieve the above object, the present application adopts the following technical solutions:

[0006] In a first aspect, an electrocardio electrode provided by embodiments of the present application includes a conductive ceramic layer and a conductive layer. The conductive ceramic layer has opposite first and second surfaces. The first surface is used for electrical connection with a lead wire. The conductive layer is stacked on the second surface of the conductive ceramic layer, and the conductive layer is electrically connected with the conductive ceramic layer. The conductive layer can be directly or indirectly electrically connected with the conductive ceramic layer. The conductive layer is used for contact with the skin to collect the electrical signal. The electrocardio electrode of the present application adds the conductive layer on the conductive ceramic layer, and the outer surfaces of the conductive layer away from the conductive ceramic layer can all be in contact with the skin to form an effective contact in the whole surface. Therefore, the effective contact area of the electrocardio electrode with the skin is increased. Further, the signal quality stability of the electrocardio electrode is improved.

[0007] In some embodiments, the conductive layer is made of any one of nitrides, carbides, or carbonitrides of metallic materials. The ratio of non-metallic element content to metallic element content in the conductive layer is greater than 1:9. A higher content of non-metallic elements in the conductive layer allows it to have a stable polarization potential. Furthermore, the conductive layer made of the above-mentioned material is less prone to chemical reaction with sweat, thus exhibiting good resistance to acid, alkali, and sweat corrosion.

[0008] Furthermore, in some embodiments, the ratio of non-metallic elements to metallic elements in the conductive layer is greater than 1:4. Similarly, increasing the content of non-metallic elements in the conductive layer can further improve the polarization potential stability of the conductive layer.

[0009] Based on the above, in some embodiments of this application, the material of the conductive layer is any one of TiC, TiN, TiCN, CrC, CrN, CrCN, TiNbN, and TiNbC. All of these materials can have stable polarization potentials and exhibit good resistance to acid, alkali, and sweat corrosion.

[0010] Furthermore, to further enhance the corrosion resistance of the conductive layer, in some embodiments, the material of the conductive layer also includes silicon. For example, the material of the conductive layer is any one of CrSiN, CrSiC, TiSiN, TiSiC, CrSiCN, and TiSiCN. These materials all have stronger resistance to acid, alkali, and sweat corrosion.

[0011] Furthermore, in some embodiments of this application, the thickness of the conductive layer is greater than or equal to 0.4 μm. A sufficiently thick conductive layer is necessary to ensure a stable polarization potential and to prevent chemical reactions with sweat.

[0012] The above mainly concerns the selection of materials and various physical parameters for the conductive layer. Appropriate selection of various physical parameters for the conductive ceramic layer is also necessary. In some embodiments of this application, the resistivity of the conductive ceramic layer is less than 10⁻⁶. -4 Ω·m. When an electrocardiogram (ECG) signal passes through a conductive ceramic layer with low resistivity, it encounters little resistance, facilitating the transmission of the ECG signal.

[0013] Because the conductive ceramic layer inevitably produces some porosity during fabrication, electrons experience significant scattering and noise when passing through these pores, hindering the acquisition of stable electrocardiogram (ECG) signals. Therefore, in some embodiments of this application, the porosity of the conductive ceramic layer is less than 2%. A conductive ceramic layer with lower porosity reduces ECG signal loss during transmission, thereby improving the stability of the ECG signal.

[0014] In some embodiments of the present application, the porosity of the conductive ceramic layer is less than 0.5%. In this way, the stability of the electrocardio signal can be further improved.

[0015] In some embodiments of the present application, the difference between the electrochemical potential of the conductive ceramic layer and the electrochemical potential of the conductive layer is less than 0.3V. In this way, the electrochemical potential of the conductive ceramic layer is close to the electrochemical potential of the conductive layer, and the conductive ceramic layer and the conductive layer are less likely to have a galvanic cell reaction, further reducing the electrochemical corrosion of the conductive layer. In this way, the electrocardio electrode is less likely to discolor.

[0016] In some embodiments of the present application, the electrocardio electrode further comprises a conductive connecting layer disposed between the conductive layer and the conductive ceramic layer. The conductive layer is electrically connected to the conductive ceramic layer through the conductive connecting layer. The coefficient of thermal expansion of the conductive connecting layer is between the coefficient of thermal expansion of the conductive layer and the coefficient of thermal expansion of the conductive ceramic layer. The modulus of the conductive connecting layer is between the modulus of the conductive layer and the modulus of the conductive ceramic layer. In this way, the conductive connecting layer can act as a buffer layer during deposition and cooling, reducing the accumulation of stress in the conductive layer. In this way, the adhesion between the conductive layer and the conductive ceramic layer can be improved. In some embodiments, the material of the conductive connecting layer is chromium or titanium.

[0017] In some embodiments of the present application, the electrocardio electrode further comprises a transition conductive connecting layer disposed between the conductive connecting layer and the conductive layer. The conductive layer is electrically connected to the conductive ceramic layer through the conductive connecting layer and the transition conductive connecting layer. The coefficient of thermal expansion of the transition conductive connecting layer is between the coefficient of thermal expansion of the conductive connecting layer and the coefficient of thermal expansion of the conductive layer. The modulus of the transition conductive connecting layer is between the modulus of the conductive connecting layer and the modulus of the conductive layer. In this way, the transition conductive connecting layer can also act as a buffer layer during deposition and cooling, further reducing the accumulation of stress in the conductive layer. In this way, the adhesion between the conductive layer and the conductive ceramic layer can be further improved. In some embodiments, the material of the transition conductive connecting layer is a mixture of chromium and titanium or a mixture of chromium and carbon.

[0018] In some embodiments, the conductive connecting layer, the transition conductive connecting layer, and the conductive layer are formed by physical vapor deposition. The conductive connecting layer, the transition conductive connecting layer, and the conductive layer are uniform and dense, have strong adhesion to the conductive ceramic layer, and have simple process flow without the need for complex jigs.

[0019] Secondly, embodiments of this application provide an electronic device, which includes a fixed structure and the electrocardiogram (ECG) electrodes described in the above embodiments. The ECG electrodes can be mounted on the fixed structure. Since the ECG electrodes in the electronic device of this application have the same structure as the ECG electrodes described in the above embodiments, and both can solve the same technical problems and achieve the same technical effects, further details are omitted here. Attached Figure Description

[0020] To illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be described below.

[0021] Figure 1 This is one of the three-dimensional structural diagrams of the electronic device being a smartwatch according to an embodiment of this application;

[0022] Figure 2 This is a schematic diagram showing the module connections of various components in the smartwatch of this application embodiment;

[0023] Figure 3 This is a second three-dimensional structural diagram of a smartwatch as an embodiment of this application.

[0024] Figure 4 This is a schematic diagram of the connection between the processor and the ECG electrodes in a smartwatch according to an embodiment of this application;

[0025] Figure 5 This is a schematic diagram of the structure of an electrocardiogram electrode and an arm in an electronic device;

[0026] Figure 6 for Figure 5 Enlarged view of part A in the image;

[0027] Figure 7 This is a schematic diagram of the structure of ECG electrodes and wires in the electronic device according to an embodiment of this application;

[0028] Figure 8 A schematic diagram of the structure of electrocardiogram electrodes in another electronic device;

[0029] Figure 9 This is a schematic diagram showing the thickness of the conductive layer in the electrocardiogram electrodes of the electronic device according to an embodiment of this application;

[0030] Figure 10 This is a schematic diagram of the structure of the electrocardiogram electrodes with a conductive connection layer in the electronic device according to an embodiment of this application;

[0031] Figure 11 This is a schematic diagram of the structure of the electrocardiogram electrode in the electronic device according to an embodiment of the present application, which has a conductive connection layer and a buffer conductive connection layer;

[0032] Figure 12Fig. 1 is a structural schematic diagram of a process step for manufacturing an electrocardio electrode in an electronic device according to an embodiment of the present application;

[0033] Figure 13 Fig. 4 is a structural schematic diagram of an electronic device according to an embodiment of the present application, wherein the electrocardio electrode is mounted on a temple of the electronic device;

[0034] Figure 14 Fig. 5 is a structural schematic diagram of an electronic device according to an embodiment of the present application, wherein the electrocardio electrode is mounted on a nose bridge of the electronic device;

[0035] Figure 15 Fig. 6 is a structural schematic diagram of an electronic device according to an embodiment of the present application, wherein the electrocardio electrode is integrated on a main control key of the electronic device;

[0036] Figure 16 Fig. 7 is a cross-sectional partial view of the electrocardio electrode of Example 1 taken by a scanning electron microscope.

[0037] Reference Signs List:

[0038] 1000-electronic device, 100-watchband, 200-watch main body, 10-housing, 20-processor, 30-memory, 40-communication module, 50-charging module, 60-display screen, 70, 70a, 70b-electrocardio electrode, 80-wire, 1-conductive ceramic layer, 1a-first surface, 1b-second surface, 11-matrix phase, 12-conductive phase, 13-sintering aid, 2-conductive layer, 3-conductive connection layer, 4-transition conductive connection layer, 101-temple, 102-nose bridge, 103-main control key, 01-insulating support block, 02-ring-shaped conductive layer. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings.

[0040] Hereinafter, the terms "first", "second", and the like are only used for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second", and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0041] In addition, in the present application, the orientation terms such as "up", "down", "left", "right", "horizontal", and "vertical" are defined with respect to the orientation of the components shown in the drawings, and it should be understood that these directional terms are relative concepts, which are used for relative description and clarification, and can be changed accordingly according to the change of the orientation of the components placed in the drawings.

[0042] In this application, unless otherwise expressly specified and limited, the term "connection" should be interpreted broadly, for example, "connection" can refer to mechanical structure, physical structure connection. It can be fixed connection, or detachable connection, or integral; it can be directly connected, or indirectly connected through intermediate media. It can also be understood as physical contact and electrical conduction of components, or as a form of connection between different components in the circuit structure through the entity circuit of PCB copper foil or wire that can transmit electrical signals.

[0043] The electronic device provided in the embodiments of the present application includes various smart devices that can be in direct contact with the skin. For example, the electronic device includes various wearable smart devices such as smart watches, smart bracelets, smart glasses, smart helmets, smart headbands, smart clothes, smart backpacks, smart canes, smart accessories, and also includes devices that can be contacted by users, such as mobile phones, tablet personal computers (tablets), laptop computers (laptops), personal digital assistants (PDAs), smart speakers, smart table lamps, smart televisions, smart refrigerators, and devices with electrocardiogram detection functions, such as electrocardiogram machines and electrocardiogram monitors. The embodiments of the present application do not specially limit the specific form of the above electronic device. For the convenience of explanation, the following is an example of a smart watch as shown in Figure 1

[0044] Please refer to Figure 1 , Figure 1 the figure of the electronic device provided in some embodiments of the present application. As described above, in the present embodiment, the electronic device 1000 is a smart watch. The electronic device 1000 can include a watchband 100 and a watch main body 200 connected with the watchband 100. The watchband 100 is connected with both ends of the watch main body 200 and is used to be fixed on the wrist of the human body. The watch main body 200 includes a housing 10, and the housing 10 is provided with a first opening and a second opening, and the first opening and the second opening are oppositely arranged. Moreover, the first opening is away from the human body, and the second opening is close to the human body. A containing cavity is formed in the housing 10 and located between the first opening and the second opening. The containing cavity is in communication with the first opening and the second opening.

[0045] As shown in Figure 2 ​As shown, the electronic device 1000 can further include a processor 20, a memory 30, a communication module 40, a charging module 50, a display screen 60, and the like. The processor 20 is electrically connected with the memory 30, the communication module 40, the charging module 50, and the display screen 60. The processor 20, the memory 30, the communication module 40, and the charging module 50 are all arranged in the accommodating cavity of the shell 10. The display screen 60 is mounted at the first opening of the shell 10.

[0046] The communication module 40 is used to realize the functions of WLAN (such as Wi-Fi network), Bluetooth (BR / EDR, BLE), global navigation satellite system (GNSS), frequency modulation (FM) radio, and the like on the smart watch. The processor 20 can analyze the signals received by the communication module 40. The memory 30 is used to store various operating systems, software programs, and / or multiple sets of instructions, and the like. The charging module 50 is used to provide power to all electronic devices in the smart watch. The display screen 60 is used to display images or information.

[0047] Also, for the smart watch with electrocardiogram detection function, as shown in Figure 3 The electronic device 1000 further includes an electrocardiogram electrode 70 and a lead wire 80, and the electrocardiogram electrode 70 can be mounted at the second opening of the shell 10. Therefore, the electrocardiogram electrode 70 can be in contact with the skin of the human body. The electrocardiogram electrode 70 can also be integrated on the control button on the side of the shell 10. When used to operate the control button, it can be in contact with the skin. The electrocardiogram electrode 70 is electrically connected with the processor 20, and the processor can also process the electrocardiogram data collected by the electrocardiogram electrode 70. For example, as shown in Figure 4 The electrocardiogram electrode 70 is electrically connected with the processor 20 through the lead wire 80. When the electronic device 1000 performs the electrocardiogram detection function, the electrocardiogram electrode 70 collects the data of the electrocardiogram changes of the user, and transmits the data to the processor 20 through the lead wire 80 for processing. Then, the electrocardiogram obtained after being processed by the processor 20 is displayed on the display screen 60. Also, the heart rate value obtained after being processed by the processor 20 is displayed on the display screen 60.

[0048] It should be noted that if the electrocardiogram electrode 70 is directly made of conductive ceramic, the electrocardiogram electrode 70 made of conductive ceramic has the advantages of high voltage resistance, radiation resistance, and high temperature resistance. As shown in Figure 5 and Figure 6 The conductive ceramic includes a base phase 11 and a conductive phase 12. The base phase 11 is an insulating material. The base phase 11 can make the electrocardiogram electrode 70a have good sintering performance and mechanical properties. The conductive phase 12 is dispersed in the base phase 11 in a network shape, and forms multiple conductive paths to provide conduction performance.

[0049] Since the stability of ECG signal quality is directly related to the effective contact area between the human body and the electrode, the larger the effective contact area, the more stable the ECG signal quality. In the ECG electrode 70a directly fabricated from conductive ceramic material, effective contact can only be formed when the conductive phase 12 in the conductive ceramic layer 1 comes into contact with human skin. Since the ECG electrode 70a is formed by a mixture of matrix phase 11 and conductive phase 12, the surface of the ECG electrode 70a in contact with human skin (i.e.,...) Figure 4 The upper surface of the ECG electrode 70a shown has only a portion of the conductive phase 12, resulting in a small effective contact area and low signal quality stability for the conductive ceramic ECG electrode 70a.

[0050] To solve the above problems, refer to Figure 7 The electrocardiogram (ECG) electrode 70 of this embodiment includes a conductive ceramic layer 1 and a conductive layer 2. The conductive ceramic layer 1 has a first surface 1a and a second surface 1b opposite to each other. The first surface 1a of the conductive ceramic layer 1 is connected to a wire 80. The conductive layer 2 is stacked on the second surface 1b of the conductive ceramic layer 1 and is electrically connected to the conductive ceramic layer 1. The outer surface of the conductive layer 2, away from the conductive ceramic layer 1, is used to contact the skin to collect electrical signals. Specifically, the electrical signal can be an electromyographic (EMG) signal from a human body or other organism.

[0051] Therefore, compared to the above Figure 5 The ECG electrode 70a shown in this embodiment has an additional conductive layer 2 on top of the conductive ceramic layer 1. The outer surface of the conductive layer 2, away from the conductive ceramic layer 1, can uniformly contact the skin to form effective contact across the entire surface, thus increasing the effective contact area between the ECG electrode 70 and the skin. Consequently, the signal quality stability of the ECG electrode 70 is improved.

[0052] Furthermore, for Figure 8 The ECG electrode 70b shown is embedded in the aforementioned housing 10. The ECG electrode 70b includes an insulating support block 01 (made of materials such as sapphire or glass) and an annular conductive layer 02 surrounding the outer wall of the insulating support block 01 (from the inside to the outside of the housing 10). When fabricating the annular conductive layer 02 using physical vapor deposition (PVD), the insulating support block 01 needs to be rotated to deposit conductive material on multiple surfaces of the insulating support block 01. Therefore, the requirements for the fixture fixing the insulating support block 01 are very high, and the fabrication of the annular conductive layer 02 is time-consuming. Furthermore, smaller surfaces on the insulating support block 01 (such as the surface 011 of the insulating support block 01 opposite to the housing 10) are prone to incomplete coverage of the conductive material. Moreover, if multiple electrodes are fabricated simultaneously... Figure 8The multiple insulation support blocks 01 rotate in the reaction chamber of the physical vapor deposition device, and interference or collision between the multiple insulation support blocks 01 is likely to occur. Therefore, compared with the prior art, the electrocardio electrode 70b has the advantages that the process flow is simple, the manufacturing of the conductive layer 2 is time-saving, no complex jigs are needed, and the problem of interference or collision between the multiple electrocardio electrodes 70 in the reaction chamber of the physical vapor deposition device is avoided. Figure 8 The electrocardio electrode 70b has the advantages that the process flow is simple, the manufacturing of the conductive layer 2 is time-saving, no complex jigs are needed, and the problem of interference or collision between the multiple electrocardio electrodes 70 in the reaction chamber of the physical vapor deposition device is avoided. Figure 9 The electrocardio electrode 70b has the advantages that the process flow is simple, the manufacturing of the conductive layer 2 is time-saving, no complex jigs are needed, and the problem of interference or collision between the multiple electrocardio electrodes 70 in the reaction chamber of the physical vapor deposition device is avoided.

[0053] It should be noted that if the manufacturing material of the conductive layer 2 is a pure metal material, it is not easy to achieve a stable polarization potential. In addition, the conductive layer 2 is also likely to form a primary cell with the conductive ceramic layer 1, and electrochemical corrosion occurs, which seriously affects the appearance and electrocardio measurement function of the electrocardio electrode 70, and reduces the service life of the electrocardio electrode 70. Therefore, the manufacturing material of the conductive layer 2 in the embodiments of the present application is any one of nitrides, carbides, and carbonitrides of metal materials. For example, the material of the conductive layer 2 is any one of TiC, TiN, TiCN, CrC, CrN, CrCN, TiNbN, and TiNbC. These materials have the advantages of stable polarization potential, corrosion resistance, and wear resistance. Thus, the above problems can be avoided.

[0054] In addition, the content of the non-metallic element in the conductive layer 2 is different from the content of the metallic element, and the polarization potential of the conductive layer 2 is also different. In some embodiments of the present application, the ratio of the content of the non-metallic element to the content of the metallic element in the conductive layer 2 is greater than 1:9, such as 1:8, 1:6, 1:4, or 1:2. A higher content of non-metallic elements can make the conductive layer 2 have a stable polarization potential. Thus, the conductive layer 2 is not easy to chemically react with sweat, and the electrocardio electrode 70 has good acid and alkali sweat corrosion resistance.

[0055] Based on the above, in some other embodiments of the present application, the ratio of the content of the non-metallic element to the content of the metallic element in the conductive layer 2 is greater than 1:4, such as 1:3, 1:2, or 1:1. A higher content of non-metallic elements can make the conductive layer 2 have a more stable polarization potential, and it is also less likely to chemically react with sweat, and the electrocardio electrode 70 has better acid and alkali sweat corrosion resistance.

[0056] In addition, in addition to the content of non-metallic elements in the conductive layer 2 affecting the acid and alkali sweat corrosion characteristics of the electrocardio electrode 1, some embodiments of the present application increase the silicon element in the material of the conductive layer 2. For example, the material of the conductive layer 2 is any one of CrSiN, CrSiC, TiSiN, TiSiC, CrSiCN, and TiSiCN. The silicon element can also further improve the acid and alkali sweat corrosion resistance of the conductive layer 2.

[0057] In addition, in order to ensure that the conductive layer 2 can have the above-mentioned stable polarization potential and the performance of not being easy to chemically react with sweat, the thickness of the conductive layer 2 cannot be too small. Therefore, in some embodiments of the present application, as shown in the figure, the thickness T1 of the conductive layer 2 is greater than or equal to 0.4 μm, such as the thickness T1 of the conductive layer 2 is 0.5 μm, 0.6 μm, 0.7 μm or 0.8 μm. The conductive layer 2 with sufficient thickness can ensure to achieve the performance of having the above-mentioned stable polarization potential and not being easy to chemically react with sweat. Figure 9

[0058] The above mainly explains various physical parameters required for designing the conductive layer 2. The material and various physical parameters of the conductive ceramic layer also need to be designed to ensure that the electrocardio electrode 70 has good performance.

[0059] The base phase 11 of the conductive ceramic layer 1 in the electrocardio electrode 70 of the embodiments of the present application can be made of materials such as zirconium oxide and silicon carbide, so as to have good mechanical strength, sinterability, corrosion resistance, etc. The conductive phase 12 of the conductive ceramic layer 1 can be made of nitrides, carbides, and carbonitrides of transition metals. For example, the conductive phase 12 can be made of titanium carbide and titanium nitride. The resistivity of titanium carbide and titanium nitride is less than 10 -5 Ω·m, therefore, the overall resistivity of the conductive ceramic layer 1 made of the above two materials can be less than 10 -4 Ω·m. The small overall resistivity can make the electrocardio signal pass through the conductive ceramic layer 1 with small resistance, facilitating the transmission of the electrocardio signal. In addition, the content of the conductive phase 12 in the conductive ceramic layer 1 should be greater than the percolation threshold, so as to ensure that the conductive phase 12 can be connected with the base phase 11 and form a conductive network.

[0060] It should be noted that in some embodiments of the present application, the conductive ceramic layer 1 can also contain a small amount of sintering aids. The sintering aids are used to improve the wetting of the base phase 11 and the conductive phase 12 and enhance the bonding force between different components. For example, the content of the sintering aids in the conductive ceramic layer 1 is less than or equal to 10% (referring to the weight percentage) of the total content of the conductive ceramic layer 1. The small content of the sintering aids has small influence on the structure of the conductive ceramic layer 1.

[0061] ​In addition, since the conductive ceramic layer 1 cannot guarantee perfect contact of all raw material powders during sintering, pores may appear in some areas. The electrons transmitting the electrocardio signal will have more scattering and generate noise when passing through the pores in the conductive ceramic layer 1, which is not conducive to accurate transmission of the electrocardio signal. Therefore, in some embodiments of the present application, the porosity of the conductive ceramic layer 1 described above is less than 2%, such as the porosity of the conductive ceramic layer 1 being 0.5%, 1%, 1.5% or 1.8%. The conductive ceramic layer 1 has fewer pores, reducing the loss of the electrocardio signal during transmission. Thus, the influence of the pores on the accuracy of the electrocardio signal transmission is reduced, and the stability of the electrocardio signal quality is higher.

[0062] Based on the above, in some other embodiments of the present application, the porosity of the conductive ceramic layer 1 described above is less than 0.5%, such as the porosity of the conductive ceramic layer 1 being 0.1%, 0.3% or 0.4%. The conductive ceramic layer 1 has very few pores, further reducing the influence of the pores on the accuracy of the electrocardio signal transmission, and ensuring that the stability of the electrocardio signal quality is high.

[0063] In addition, the difference between the electrochemical potential of the conductive ceramic layer 1 and the electrochemical potential of the conductive layer 2 will also affect the corrosion resistance of the electrocardio electrode 70. When the difference between the electrochemical potential of the conductive ceramic layer 1 and the electrochemical potential of the conductive layer 2 is large, the conductive ceramic layer 1 and the conductive layer 2 are easy to form a primary cell and cause electrochemical corrosion. When the difference between the electrochemical potential of the conductive ceramic layer 1 and the electrochemical potential of the conductive layer 2 is small, the conductive ceramic layer 1 and the conductive layer 2 are less likely to have a primary cell reaction, so it is not easy to cause electrochemical corrosion. Therefore, in some embodiments of the present application, the difference between the electrochemical potential of the conductive ceramic layer 1 and the electrochemical potential of the conductive layer 2 is less than 0.3v, such as the difference between the electrochemical potential of the conductive ceramic layer 1 and the electrochemical potential of the conductive layer 2 being 0.1v or 0.2v. The electrochemical potential of the conductive ceramic layer 1 is close to the electrochemical potential of the conductive layer 2, which can further make the conductive layer 2 less likely to cause electrochemical corrosion. Thus, the electrocardio electrode 70 is also less likely to have discoloration problems.

[0064] Based on the above materials and physical parameters of the conductive ceramic layer 1 and the materials and physical parameters of the conductive layer 2, the conductive ceramic layer 1 and the conductive layer 2 may also have a mismatch in the coefficient of thermal expansion and / or a mismatch in the modulus. Therefore, when the conductive layer 2 is made on the conductive ceramic layer 1 using a physical vapor deposition process, it is easy to cause a large stress to accumulate in the conductive layer 2 during deposition and cooling, resulting in cracking or poor adhesion of the conductive layer 2.

[0065] In order to reduce the above problems, in some embodiments of the present application, the electrocardio electrode 70 described above further comprises, for example Figure 10The conductive connection layer 3 is arranged between the conductive layer 2 and the conductive ceramic layer 1. The conductive layer 2 is electrically connected to the conductive ceramic layer 1 through the conductive connection layer 3. At this time, the conductive layer 2 is indirectly electrically connected to the conductive ceramic layer 1. The thermal expansion coefficient of the conductive connection layer 3 is between the thermal expansion coefficient of the conductive layer 2 and the thermal expansion coefficient of the conductive ceramic layer 1. The modulus of the conductive connection layer 3 is between the modulus of the conductive layer 2 and the modulus of the conductive ceramic layer 1. In other words, along the direction away from the second surface 1b of the conductive ceramic layer 1, the thermal expansion coefficient of the coating layer including the conductive connection layer 3 and the conductive layer 2 gradually increases or decreases, and the modulus of the coating layer gradually increases or decreases, so that the deformation amount of the conductive connection layer 3 under the influence of temperature change is between the deformation amount of the conductive layer 2 and the deformation amount of the conductive ceramic layer 1. Thus, during the deposition and cooling process of making the coating layer, the conductive connection layer 3 can act as a buffer layer, improving the bonding force between the conductive layer 2 and the conductive ceramic layer 1, and reducing the problem of cracking or poor adhesion of the conductive layer 2.

[0066] For example, the material of the conductive connection layer 3 can be chromium or titanium. The conductive connection layer 3 has some elements in common with the conductive layer 2 and the conductive ceramic layer 1, so the thermal expansion coefficient and modulus of the conductive layer 2 are close to those of the conductive layer 2 or the conductive ceramic layer 1.

[0067] In addition, in some embodiments of the present application, the electrocardio electrode 70 includes the conductive connection layer 3 as described above, and also includes a transition conductive connection layer 4 arranged between the conductive connection layer 3 and the conductive layer 2. Figure 11 The transition conductive connection layer 4 is arranged between the conductive connection layer 3 and the conductive layer 2. The conductive layer 2 is electrically connected to the conductive ceramic layer 1 through the conductive connection layer 3 and the transition conductive connection layer 4. At this time, the conductive layer 2 is also indirectly electrically connected to the conductive ceramic layer 1. The thermal expansion coefficient of the transition conductive connection layer 4 is between the thermal expansion coefficient of the conductive connection layer 3 and the thermal expansion coefficient of the conductive layer 2. The modulus of the transition conductive connection layer 4 is between the modulus of the conductive connection layer 3 and the modulus of the conductive layer 2. Similarly, along the direction away from the second surface 1b of the conductive ceramic layer 1, the thermal expansion coefficient of the coating layer including the conductive connection layer 3, the transition conductive connection layer 4 and the conductive layer 2 gradually increases or decreases, and the modulus of the conductive connection layer 3, the transition conductive connection layer 4 and the conductive layer 2 gradually increases or decreases, so that the deformation amount of the transition conductive connection layer 4 under the influence of temperature change is between the deformation amount of the conductive connection layer 3 and the deformation amount of the conductive layer 2. Thus, during the deposition and cooling process of making the coating layer, the conductive connection layer 3 and the transition conductive connection layer 4 can simultaneously act as buffer layers, which can further avoid the problem of cracking of the conductive layer 2.

[0068] It should be noted that the above transition conductive connection layer 4 can be one layer or multiple layers, and the embodiments of the present application do not limit this. If the electrocardio electrode 70 includes one transition conductive connection layer 4, and the material of the conductive connection layer 3 is chromium or titanium, and the material of the conductive layer 2 is any one of TiC, TiN, TiCN, CrC, CrN, CrCN, TiNbN, and TiNbC, then the material of the transition conductive connection layer 4 is a chromium-titanium mixture or a chromium-carbon mixture. Thus, the thermal expansion coefficient and modulus of the transition conductive connection layer 4 can be between the thermal expansion coefficient and modulus of the conductive connection layer 3 and the thermal expansion coefficient and modulus of the conductive layer 2. If the transition conductive connection layer 4 is multiple layers, then the material composition of the multiple transition conductive connection layer 4 can gradually transition from the material composition close to the conductive connection layer 3 to the material composition close to the conductive layer 2, so that the thermal expansion coefficient and modulus of the multiple transition conductive connection layer 4 gradually increase or decrease from the thermal expansion coefficient and modulus of the conductive connection layer 3 to the thermal expansion coefficient and modulus close to the conductive layer 2.

[0069] It should be noted that the above conductive connection layer 3, transition conductive connection layer 4, and conductive layer 2 can all be formed by a physical vapor deposition process. The formed conductive connection layer 3, transition conductive connection layer 4, and conductive layer 2 are uniform and dense in film formation, have strong connection with the conductive ceramic layer 1, and have simple process flow and do not require complex jigs.

[0070] Moreover, the resistance in the transmission path of the electrocardio signal needs to be within a suitable range to ensure smooth transmission of the electrocardio signal. Therefore, the thickness of the conductive connection layer 3 and the thickness of the transition conductive connection layer 4 need to be reasonably designed so that the resistance of the film coating layer including the conductive connection layer 3, the transition conductive connection layer 4, and the conductive layer 2 in the thickness direction is less than 10 kΩ. Therefore, in some embodiments of the present application, the thickness T of the film coating layer is in the range of 0.8-2.5 μm, such as 0.8 μm, 1.4 μm, 1.8 μm, or 2.5 μm, so that the resistance of the film coating layer in the thickness direction is less than 10 kΩ.

[0071] Moreover, in another embodiment of the present application, the thickness T of the film coating layer is in the range of 1.0 μm-1.5 μm, such as 1.0 μm, 1.2 μm, 1.4 μm, or 1.5 μm, and for the same reason, the resistance of the film coating layer in the thickness direction can be further reduced.

[0072] Based on the structure of the above electrocardio electrode 70, as shown in FIG. 1, the electrocardio electrode 70 can be prepared by the following process method. The process method includes the following steps: Figure 12

[0073] S100: preparing the conductive ceramic layer 1.

[0074] For example, as shown in FIG. 1, Figure 12 ​As shown in (a), the conductive ceramic layer 1 can be fabricated using processes such as spark plasma sintering, hot pressing sintering, and atmospheric pressure sintering. Then, the second surface 1b of the conductive ceramic layer 1 is processed. For example, the surface flatness of the second surface 1b of the conductive ceramic layer 1 is altered using methods such as grinding and lapping, and surface textures are created on the second surface 1b of the conductive ceramic layer 1 using methods such as sandblasting, wire drawing, polishing, and laser processing to facilitate the subsequent deposition of a coating layer (such as the conductive layer 2).

[0075] S200: A conductive connection layer 3, a transition conductive connection layer 4 and a conductive layer 2 are formed sequentially from top to bottom on the second surface 1b of the conductive ceramic layer 1.

[0076] For example, such as Figure 12 As shown in (b), (c) and (d), a conductive connection layer 3, a transition conductive connection layer 4 and a conductive layer 2 are sequentially formed on the second surface 1b of the conductive ceramic layer 1 using a physical vapor deposition process.

[0077] The ECG electrodes 70 in the above embodiments are all described using the example of installation on a smartwatch. It should be noted that when the ECG electrodes 70 are applied to other electronic devices 1000, the ECG electrodes 70 need to be installed in a location on the electronic device 1000 that allows them to come into contact with the skin. For example, such as... Figure 13 As shown, the electronic device 1000 is a smart glasses. The ECG electrode 70 is mounted on the inner wall of the temple 101 of the smart glasses, at a position where it can contact the skin of the face. Therefore, the fixing structure of the ECG electrode 70 is the temple 101. Or, as... Figure 14 As shown, the ECG electrode 70 is mounted on the nose bridge support 102 of the smart glasses frame. Therefore, the fixing structure of the ECG electrode 70 is the nose bridge support 102 housing.

[0078] For example, such as Figure 15 As shown, in the case of an electronic device 1000, which is a smartphone, the ECG electrode 70 can be directly integrated with the smartphone's main control button 103 (such as a fingerprint recognition button or volume button). Therefore, the fixed structure of the ECG electrode 70 is the housing of the main control button 103. The user's ECG signal can be detected when the user performs fingerprint recognition or button operation. Similarly, in the case of an electronic device 1000, which is a tablet computer, the ECG electrode 70 can be directly integrated with the tablet's central control button. Likewise, the user's ECG signal can be detected when the user performs fingerprint recognition or button operation.

[0079] The ECG electrode 70 described above will be specifically described below with reference to specific embodiments. The ECG electrode 70 in the following embodiments includes a conductive ceramic layer 1, a conductive connection layer 3, a transition conductive connection layer 4, and a conductive layer 2, which are stacked sequentially. The first surface 1a of the conductive ceramic layer 1, away from the conductive connection layer 3, is connected to the wire 80. The conductive ceramic layer 1 is electrically connected to the conductive layer 2 through the conductive connection layer 3 and the transition conductive connection layer 4.

[0080] Example 1

[0081] In this example, the conductive ceramic layer 1 of the ECG electrode 70 includes a matrix phase 11, a conductive phase 12, and as shown in the example. Figure 16 The sintering aid 13 is shown. The matrix phase 11 is made of silicon carbide, and its content in the conductive ceramic layer 1 is 44.4%. The conductive phase 12 is made of titanium carbide, and its content in the conductive ceramic layer 1 is 45.6%. The sintering aid 13 is a mixture of alumina and yttrium oxide. The alumina content in the conductive ceramic layer 1 is 4.3%. The yttrium oxide content in the conductive ceramic layer 1 is 5.7%. All percentages are by weight. The thickness of the conductive ceramic layer 1 is 1.2 mm.

[0082] The conductive layer 3 is made of chromium, the transition conductive layer 4 is made of a chromium-titanium mixture, and the conductive layer 2 is made of titanium nitride. The ratio of titanium to nitrogen in the conductive layer 2 is 1.5:1. The thickness of the conductive layer 3 is 0.1 μm, the thickness of the transition conductive layer 4 is 1.4 μm, and the thickness of the conductive layer 2 is 0.5 μm. Therefore, the total thickness of the conductive layer 3, the transition conductive layer 4, and the conductive layer 2 is 2.0 μm.

[0083] The ECG electrode 70 with the above parameters can be fabricated using the following steps:

[0084] S101: Preparation of conductive ceramic layer 1.

[0085] For example, the conductive ceramic layer 1 is prepared in the order of mixing, forming, drying, and sintering. The preparation of the conductive ceramic layer 1 specifically includes the following steps:

[0086] S1011: Mix silicon carbide (44.4% by weight), titanium carbide (45.6% by weight), alumina (4.3% by weight), and yttrium oxide (5.7% by weight) to obtain a mixed powder. Then, add polyvinyl alcohol (8% by weight of the total weight of the mixed powder) as a binder to the mixed powder.

[0087] S1012: The mixture containing the binder is pressed into the mold at a pressure of 150 MPa for molding.

[0088] S1013: The green body formed in the mold is demolded. After demolding, the green body is dried in an environment with a temperature of 80°C for 10 hours to obtain a green body.

[0089] S1014: The green body is placed into a vacuum sintering furnace. Then, the temperature in the furnace cavity of the vacuum sintering furnace is raised to 1850°C and kept at constant pressure, and the green body is sintered for 1 hour. Finally, the green body is naturally cooled to room temperature to obtain the conductive ceramic layer 1.

[0090] S1015: After the process steps of polishing, rough polishing, and fine polishing are performed on the second surface 1b of the conductive ceramic layer 1, the second surface 1b with a roughness less than 0.2 μm is obtained.

[0091] S201: The conductive ceramic layer 1 is subjected to process steps such as water washing, degreasing, and drying. Then, the conductive ceramic layer 1 is placed into the cavity of a physical vapor deposition device, and the second surface 1b of the conductive ceramic layer 1 is cleaned by plasma for 10 minutes. Then, the conductive connection layer 3, the transition conductive connection layer 4, and the conductive layer 2 are sequentially plated on the second surface 1b of the conductive ceramic layer 1 by physical vapor deposition.

[0092] Figure 16 The cross-sectional partial view of the electrocardio electrode 70 made by the above steps is taken by a scanning electron microscope. The porosity of the conductive ceramic layer 1 in the electrocardio electrode 70 is 0.28%, the resistivity of the conductive ceramic layer 1 is 1.7 x 10 -5 Ω·m, the density of the conductive ceramic layer 1 is 3.8 g / cm 3 , and the bending strength of the conductive ceramic layer 1 is 428 MPa. Therefore, the conductive ceramic layer 1 has the advantages of low density, high bending strength, excellent mechanical properties, and the like.

[0093] The electrocardio electrode 70 made by the above steps and the electrocardio electrode 70 without plating film and with the material of the conductive phase 12 being titanium boride and the material of the base phase 11 being titanium carbide are subjected to electrocardiogram signal testing. The test shows that, compared with the latter, the electrocardio electrode 70 of the present example can improve the stability of the electrocardio signal curve by 18%, which is helpful for more accurate electrocardio diagnosis and reduces the possibility of misdiagnosis.

[0094] Furthermore, the electrocardio electrode 70 made by the above steps and the electrocardio electrode 70 without plating film and with the conductive phase 12 being titanium boride and the base phase 11 being titanium carbide are subjected to acid and alkali sweat wrapping tests. After 120 hours, the test results show that the electrocardio electrode 70 of the present example does not appear to be discolored or corroded in the acidic and alkaline sweat environments, while the electrocardio electrode 70 of the latter appears to be yellow after the alkaline sweat test.

[0095] Example 2

[0096] The conductive ceramic layer 1 of the example cardiac electrode 70 includes a base phase 11 and a conductive phase 12. The material of the base phase 11 is zirconium oxide, and the content of the base phase 11 in the conductive ceramic layer 1 is 44%. The material of the conductive phase 12 is titanium carbide, and the content of the conductive phase 12 in the conductive ceramic layer 1 is 56%. The percentages of the above contents are all weight percentages. The thickness of the conductive ceramic layer 1 is 1.2 mm.

[0097] The material of the conductive connecting layer 3 is chromium, the material of the transition conductive connecting layer 4 is a chromium-carbon mixture, and the material of the conductive layer 2 is chromium carbide. The content ratio of chromium element to nitrogen element in the conductive layer 2 is 4.6:1. The thickness of the conductive connecting layer 3 is 0.1 μm, the thickness of the transition conductive connecting layer 4 is 1 μm, and the thickness of the conductive layer 2 is 0.4 μm. Therefore, the total thickness of the conductive connecting layer 3, the transition conductive connecting layer 4, and the conductive layer 2 is 1.5 μm.

[0098] The cardiac electrode 70 with the above parameters can be manufactured by the following steps:

[0099] S102: preparing the conductive ceramic layer 1.

[0100] In an example, the preparation of the conductive ceramic layer 1 is performed in the order of mixing, shaping, drying, and sintering. The preparation of the conductive ceramic layer 1 specifically includes the following steps:

[0101] S1021: mixing the zirconium oxide at a weight percentage of 44% and the titanium carbide at a weight percentage of 56% to obtain a mixed powder. Then, 10% of polyvinyl alcohol by weight of the total weight of the mixed powder is added to the mixed powder as a binder.

[0102] S1022: shaping the mixture containing the binder by pressing into a mold at a pressure of 100 MPa.

[0103] S1023: demolding the shaped body in the mold. After demolding, the body is dried in an environment at a temperature of 80°C for 10 hours to obtain a green body. Then, the green body is placed in an environment at a temperature of 700°C for 5 hours for degassing.

[0104] S1024: placing the green body after degassing into a vacuum sintering furnace. Then, the temperature in the furnace cavity of the vacuum sintering furnace is raised to 1750°C and kept at constant pressure, and the green body is sintered for 2 hours. Finally, the green body is naturally cooled to room temperature to obtain the conductive ceramic layer 1.

[0105] S1025: after the process steps of polishing, rough polishing, and fine polishing on the second surface 1b of the conductive ceramic layer 1, the second surface 1b with a roughness of 0.9 μm is obtained.

[0106] S202: The conductive ceramic layer 1 is subjected to water washing, degreasing, drying and other process steps. Then, the conductive ceramic layer 1 is placed in the cavity of the physical vapor deposition equipment, and the second surface 1b of the conductive ceramic layer 1 is cleaned by plasma for 10 minutes. Then, the conductive connection layer 3, the transition conductive connection layer 4 and the conductive layer 2 are sequentially plated on the second surface 1b of the conductive ceramic layer 1 by physical vapor deposition process.

[0107] In the electrocardio electrode 70 prepared by the above process steps, the porosity of the conductive ceramic layer 1 is 0.5%, the resistivity of the conductive ceramic layer 1 is 8.0 x 10 -5 Ω·m, the density of the conductive ceramic layer 1 is 5.6 g / cm 3 , and the bending strength of the conductive ceramic layer 1 is 592 MPa. Therefore, the conductive ceramic layer 1 has low density, high bending strength and excellent mechanical properties.

[0108] The electrocardio electrode 70 prepared by the above steps and the electrocardio electrode 70 with the conductive phase 12 being titanium boride and the base phase 11 being titanium carbide without plating film are subjected to electrocardiogram signal test. Compared with the latter, the electrocardio electrode 70 of the present example can improve the stability of the electrocardio signal curve by 15%, which is helpful for more accurate electrocardio diagnosis and reduces the possibility of misdiagnosis.

[0109] In addition, the electrocardio electrode 70 prepared by the above steps and the electrocardio electrode 70 with the conductive phase 12 being titanium boride and the base phase 11 being titanium carbide without plating film are subjected to acid and alkali sweat wrapping test. After 120 hours, the test results show that the electrocardio electrode 70 of the present example does not appear discoloration or corrosion in the acidic and alkaline sweat environment, while the electrocardio electrode 70 of the latter appears yellowing problem after the alkaline sweat test.

[0110] In addition, compared with Example 1 and Example 2, the base phase 11 in the conductive ceramic layer 1 in Example 2 uses zirconia. Zirconia has higher bending strength and is suitable for scenarios where the electrocardio electrode has high requirements for bending strength. At the same time, zirconia also has greater density. The appearances of Example 1 and Example 2 are also different. In Example 1, the appearance color of the conductive layer 2 is golden, and the appearance texture of the conductive layer 2 is polished surface. In Example 2, the appearance color of the conductive layer 2 is black, and the appearance texture of the conductive layer 2 is sandblasted surface. Therefore, Example 1 and Example 2 can be respectively applied to different application scenarios with different appearance design requirements.

[0111] The above merely describes specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed by the present application, which shall be covered within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. An electrocardiogram electrode, characterized in that, include: A conductive ceramic layer having opposing first and second surfaces; the first surface is used for electrical connection with a wire. A conductive layer is stacked on the second surface of the conductive ceramic layer and is electrically connected to the conductive ceramic layer; The conductive layer is used to contact the skin to collect electrical signals; The electrocardiogram electrodes also include: A conductive connection layer is disposed between the conductive layer and the conductive ceramic layer; the conductive layer is electrically connected to the conductive ceramic layer through the conductive connection layer; the coefficient of thermal expansion of the conductive connection layer is between the coefficient of thermal expansion of the conductive layer and the coefficient of thermal expansion of the conductive ceramic layer; the modulus of the conductive connection layer is between the modulus of the conductive layer and the modulus of the conductive ceramic layer.

2. The electrocardiogram electrode according to claim 1, characterized in that, The conductive layer is made of any one of nitrides, carbides, or carbonitrides of metallic materials; wherein the ratio of the content of non-metallic elements to the content of metallic elements in the conductive layer is greater than 1:

9.

3. The electrocardiogram electrode according to claim 2, characterized in that, The ratio of non-metallic element content to metallic element content in the conductive layer is greater than 1:

4.

4. The electrocardiogram electrode according to any one of claims 1-3, characterized in that, The conductive layer is made of any one of TiC, TiN, TiCN, CrC, CrN, CrCN, TiNbN, and TiNbC.

5. The electrocardiogram electrode according to claim 2 or 3, characterized in that, The conductive layer also includes silicon.

6. The electrocardiogram electrode according to any one of claims 1-3, characterized in that, The thickness of the conductive layer is greater than or equal to 0.4 μm.

7. The electrocardiogram electrode according to any one of claims 1-3, characterized in that, The resistivity of the conductive ceramic layer is less than 10. -4 Ω·m.

8. The electrocardiogram electrode according to any one of claims 1-3, characterized in that, The porosity of the conductive ceramic layer is less than 2%.

9. The electrocardiogram electrode according to any one of claims 1-3, characterized in that, The porosity of the conductive ceramic layer is less than 0.5%.

10. The electrocardiogram electrode according to any one of claims 1-3, characterized in that, The difference between the electrochemical potential of the conductive ceramic layer and the electrochemical potential of the conductive layer is less than 0.3V.

11. The electrocardiogram electrode according to claim 1, characterized in that, The conductive connection layer is made of chromium or titanium.

12. The electrocardiogram electrode according to claim 1 or 11, characterized in that, The electrocardiogram electrodes also include: A transition conductive connection layer is disposed between the conductive connection layer and the conductive layer; the conductive layer is electrically connected to the conductive ceramic layer through the conductive connection layer and the transition conductive connection layer; the coefficient of thermal expansion of the transition conductive connection layer is between the coefficient of thermal expansion of the conductive connection layer and the coefficient of thermal expansion of the conductive layer; the modulus of the transition conductive connection layer is between the modulus of the conductive connection layer and the modulus of the conductive layer.

13. The electrocardiogram electrode according to claim 12, characterized in that, The material of the transition conductive connection layer is a chromium-titanium mixture or a chromium-carbon mixture.

14. The electrocardiogram electrode according to claim 12, characterized in that, The conductive connection layer, the transition conductive connection layer, and the conductive layer are all formed using physical vapor deposition.

15. An electronic device, characterized in that, It includes a fixed structure and an electrocardiogram (ECG) electrode as described in any one of claims 1-14, wherein the ECG electrode is mounted on the fixed structure.

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