Wafer small resistance test structure, test method and test system
By introducing a series capacitive branch on the wafer to form a series test branch with the small resistor under test, and using a measurement instrument to measure AC signals of different frequencies, the problem of low accuracy and efficiency in small resistor testing on wafers is solved, achieving high-precision and low-cost testing results.
CN117554701BActive Publication Date: 2026-06-09GTA SEMICON CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- GTA SEMICON CO LTD
- Filing Date
- 2023-11-13
- Publication Date
- 2026-06-09
AI Technical Summary
Technical Problem
In existing technologies, the testing accuracy and efficiency of small resistors on wafers are low, making it impossible to accurately measure the resistance value of small resistors, which affects production efficiency and quality.
Method used
By introducing a series capacitive branch on the wafer to form a series test branch with the small resistor under test, at least two sets of AC signals of different frequencies are measured using a measurement instrument, and the resistance value of the small resistor under test is calculated by combining the equations.
Benefits of technology
This enables high-precision testing of small resistors, improves testing efficiency and reduces testing costs, thereby enhancing wafer production quality and efficiency.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN117554701B_ABST
Abstract
The application provides a wafer small resistance test structure, a test method and a test system, and is applied to the technical field of wafer testing, wherein a series test branch is formed by introducing a series capacitive branch into a to-be-tested small resistance structure to be tested on a wafer, and then the corresponding resistance value of the series test branch is measured under different frequencies of alternating signals by using a measuring machine, so that the resistance value of the to-be-tested small resistance structure is calculated according to the measurement result. Not only the small resistance on the wafer can be tested, but also the test precision is high, the test process is simple, the test cost is low, and it is very beneficial to reduce the test cost, improve the production efficiency and production quality.
Need to check novelty before this filing date? Find Prior Art