Three-degree-of-freedom microscopic vision precision motion stage

Abstract

The application discloses a three-degree-of-freedom microscopic visual precision motion platform, which comprises a linear slide, a worm reducer, a workbench and an optical microscope system. The linear slide is connected with an air floating vibration isolation platform through an aluminum profile stand. The worm reducer is fixed on the upper surface of an aluminum alloy platform carried by the linear slide. One workbench is fixed on each end of the output shaft of the worm reducer. A microstructure workpiece is installed on the lower end workbench, and a machining workpiece is installed on the upper end workbench. The optical microscope is installed on the upper end of an industrial camera from bottom to top. The industrial camera is fixed on the air floating vibration isolation platform through a supporting rod gear clamp, a rack supporting rod and a differential lifting platform. The three-degree-of-freedom microscopic visual precision motion platform can place the optical microscope system below the microstructure workpiece, thereby providing machining space for the machining workpiece, and providing a new scheme for applying microscopic visual technology to the field of precision machining.

Description

Technical Field

[0001] This invention relates to the fields of microscopic vision and precision machining technology, specifically a three-degree-of-freedom microscopic vision precision motion stage. Background Technology

[0002] With the development of technology, precise positioning is becoming increasingly important in many fields, including scientific research, industry, commerce, and daily life. The Global Positioning System (GPS) is the most well-known example of this tool. In the industrial sector, precise positioning also plays an indispensable role, such as in the calibration of measuring instruments, the positioning and operation of machine tools, and the assembly of products by robotic arms. All these precise positioning needs require the support of appropriate measurement technologies.

[0003] In the field of precision measurement technology, various non-contact measurement methods have been developed and applied to micro-nano motion systems, such as laser interferometers and laser displacement sensors based on laser technology, encoder-based grating rulers, and capacitive and inductive sensors based on electric field technology. However, these measurement methods suffer from numerous problems, including the ability to measure only a single degree of freedom, susceptibility to optical path obstruction, and high equipment costs. To overcome these limitations, researchers have been exploring a technology that combines high precision and high flexibility in precision machining processes.

[0004] With the rapid development of visual recognition technology, large-scale image fast matching methods based on visual recognition and image processing have been gradually accepted and have quickly developed into an important solution for precision measurement. Compared with traditional precision measurement techniques, precision measurement techniques based on visual recognition and image processing have advantages such as high flexibility and developability. This measurement technology uses computers to perform digital image processing, generate images, and measure targets, providing intuitive and visualized measurement results, thus enabling a variety of different applications and showing considerable application prospects.

[0005] However, existing microscopic vision precision motion stages generally have drawbacks such as small stroke and poor versatility. This invention aims to solve the technical problems of small processing space and inability to perform positioning and processing simultaneously in existing microscopic vision precision motion stages, and to develop a precision "measurement" scheme based on microscopic vision into a precision "processing" scheme based on microscopic vision. Summary of the Invention

[0006] To overcome the shortcomings of the prior art, the present invention provides a three-degree-of-freedom microscopic vision precision motion stage.

[0007] The technical solution adopted in this invention is: a three-degree-of-freedom microscopic vision precision motion stage, including a linear slide, a worm gear reducer worktable, and an optical microscopy system. The linear slide includes a linear slide moving in the x-axis translational direction and a linear slide moving in the y-axis translational direction. The bottom of the linear slide moving in the x-axis translational direction is connected to an air-bearing vibration isolation table via an aluminum profile column. The bottom of the linear slide moving in the y-axis translational direction is mounted on the linear slide moving in the x-axis translational direction via two sets of right-angle bracket connectors. An aluminum alloy platform is installed on the lower side of the linear slide moving in the y-axis translational direction. The worm gear reducer is fixed to the upper surface of the aluminum alloy platform. The output shaft of the worm gear reducer is perpendicular to the aluminum alloy platform, and the lower shaft end extends out of the lower surface of the aluminum alloy platform through a reserved hole. Worktables are installed on both the upper and lower shaft ends of the output shaft of the worm gear reducer. The upper shaft end worktable is used to install workpieces for processing, and the lower shaft end worktable is used to install microstructure workpieces. The optical microscopy system is installed on the air-bearing vibration isolation table surface via a threaded connection.

[0008] Preferably, the optical microscopy system comprises an optical microscope head, an industrial camera, an industrial camera adapter plate, a support rod, a gear clamp, a rack support rod, a differential lifting platform, and a differential lifting platform adapter plate. The lower end of the optical microscope head is mounted on the upper end of the industrial camera. The industrial camera is fixed to the side of the support rod gear clamp via the industrial camera adapter plate. The support rod gear clamp is mounted to the side of the rack support rod via gear meshing. The lower end of the rack support rod is fixed to the upper end of the differential lifting platform. The differential lifting platform is fixed to the lower surface of the air-bearing vibration isolation platform below the linear slide via the differential lifting platform adapter plate.

[0009] Preferably, the aluminum profile column is fitted with an encapsulated aluminum plate on its side.

[0010] Preferably, a dustproof bellows cover is installed above each of the linear slides.

[0011] Preferably, the linear slides moving in the x-axis translational direction and the linear slides moving in the y-axis translational direction are installed in an "I" shape, wherein the linear slides moving in the x-axis translational direction are mounted upright on the upper end of the six sets of aluminum profile columns, and the linear slides moving in the y-axis translational direction are mounted sideways on the upper side of the linear slides.

[0012] Preferably, the output shaft axis of the worm gear reducer is perpendicular to the upper surface of the aluminum alloy platform and passes through the geometric center of the upper surface of the aluminum alloy platform. The output shaft segment of the worm gear reducer is connected to the worktable through a keyway fit and a threaded connection.

[0013] Preferably, the observation direction of the optical microscope head is from bottom to top, and there are nine sets of optical microscopy systems, which are installed at preset distances below the linear slide and inside the area enclosed by the encapsulated aluminum plate.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] 1. Equipped with an optical microscopy system, it can observe and measure pre-installed microstructures through an optical microscope and an industrial camera. Based on visual recognition and image processing microscopic measurement technology, it can perform micron-level positioning and measurement of the worktable. Compared with traditional contact measurement methods, vision-based measurement has the advantages of high precision, fast response speed and strong environmental adaptability.

[0016] 2. Unlike traditional vision-based measurement methods, the optical microscope lens is designed to observe and measure microstructures from bottom to top, thus reserving sufficient space for precision machining and precision assembly. The target workpiece can be fixed on the upper shaft end worktable of the reducer and move together with the lower shaft end worktable of the reducer.

[0017] 3. The four linear slides are installed in an "I" shape. Two of the linear slides are mounted on the top of the six aluminum profile columns, and the other two linear slides are mounted on the upper part of the linear slides and are equipped with aluminum alloy platforms. This installation structure can ensure that the bellows protective cover completely covers the gap between the adjacent linear slides, thus providing a good observation environment for the optical microscope head placed under the slides. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the isometric structure of the present invention;

[0019] Figure 2 This is a schematic diagram of the isometric internal structure of the present invention;

[0020] Figure 3 This is a schematic diagram of the linear slide table and aluminum profile column structure of the present invention;

[0021] Figure 4 This is a schematic diagram of the workbench and worm gear reducer structure of the present invention;

[0022] Figure 5 This is a schematic diagram of the isometric structure of the optical microscopy system of the present invention.

[0023] In the diagram: 1. Air-bearing vibration isolation table; 2. Linear slide table; 2-1 and 2-2 linear slide tables moving in the x-axis translational direction; 2-3 and 2-4 linear slide tables moving in the y-axis translational direction; 2-5 right-angle bracket connector; 2-6 aluminum alloy platform; 3. Dustproof bellows cover; 4. Worm gear reducer; 5. Worktable; 5-1 upper shaft end worktable; 5-2 lower shaft end worktable; 6. Aluminum profile column; 7. Encapsulated aluminum plate; 8. Optical microscopy system; 8-1 optical microscope head; 8-2 industrial camera; 8-3 industrial camera adapter plate; 8-4 support rod gear clamp; 8-5 rack support rod; 8-6 differential lifting stage; 8-7 differential lifting stage adapter plate. Detailed Implementation

[0024] The invention will be further described below with reference to the accompanying drawings.

[0025] Please see Figure 1 This invention provides a technical solution: a three-degree-of-freedom microscopic vision precision motion stage, comprising a linear slide 2, a worm gear reducer 4, a worktable 5, and an optical microscopy system 8. The linear slide 2 includes linear slides 2-1 and 2-2 that move in the x-axis translational direction and linear slides 2-3 and 2-4 that move in the y-axis translational direction. The bottoms of the linear slides 2-1 and 2-2 that move in the x-axis translational direction are connected to an air-bearing vibration isolation table 1 via aluminum profile columns 6. The linear slides 2-3 and 2-4 that move in the y-axis translational direction... The bottom of linear slides 2-3 and 2-4 are mounted on the linear slides 2-1 and 2-2 that move in the x-axis translational direction via two sets of right-angle bracket connectors 2-5. An aluminum alloy platform 2-6 is mounted on the lower side of the linear slides 2-3 and 2-4 that move in the y-axis translational direction. The worm gear reducer 4 is fixed on the upper surface of the aluminum alloy platform 2-6. The output shaft of the worm gear reducer 4 is perpendicular to the aluminum alloy platform 2-6, and the lower shaft end extends out of the lower surface of the aluminum alloy platform 2-6 through a reserved hole. The optical microscopy system 8 consists of an optical microscope head 8-1, an industrial camera 8-2, an industrial camera adapter plate 8-3, a support rod gear clamp 8-4, a rack support rod 8-5, a differential lifting stage 8-6, and a differential lifting stage adapter plate 8-7. The lower end of the optical microscope head 8-1 is mounted on the upper end of the industrial camera 8-2. The industrial camera 8-2 is fixed to the side of the support rod gear clamp 8-4 through the industrial camera adapter plate 8-3. The support rod gear clamp 8-4 is mounted to the side of the rack support rod 8-5 through gear meshing. The lower end of the rack support rod 8-5 is fixed to the upper end of the differential lifting stage 8-6. The differential lifting stage 8-6 is fixed to the upper surface of the air-bearing vibration isolation stage 1 and below the linear slide stage 2 through the differential lifting stage adapter plate 8-7. The optical microscope lens 8-1 and the industrial camera 8-2 are installed by threads. The industrial camera 8-2 is fixed to the support rod gear clamp 8-4 by screws through the industrial camera adapter plate 8-3. The support rod gear clamp 8-4 and the rack support rod 8-5 are engaged by a gear and rack. The position of the support rod gear clamp 8-4 in the z-axis translational direction can be coarsely adjusted by manually rotating the knob on the support rod gear clamp 8-4. The rack support rod 8-5 is installed on the upper surface of the differential lifting stage 8-6 by screws. The position of the differential lifting stage 8-6 in the z-axis translational direction can be finely adjusted by the knob on the differential lifting stage 8-6. The differential lifting stage 8-6 is fixed in the hole on the upper surface of the air-bearing vibration isolation stage 1 by screws through the differential lifting stage adapter plate 8-7. The optical module, consisting of the optical microscope lens 8-1 and the industrial camera 8-2 in the optical microscopy system 8, observes the microstructured workpiece fixed on the worktable at the lower end of the output shaft of the worm gear reducer 4 from bottom to top. By taking and processing images in real time, the system achieves real-time absolute positioning of the worktable.

[0026] The aluminum profile column 6 is equipped with a sealing aluminum plate 7 on its side. Each linear slide 2 is equipped with a dustproof bellows cover 3.

[0027] The air-bearing vibration isolation table 1 serves as the base for the microscopic motion stage, blocking external vibration interference to ensure a good working environment for the optical microscopy system. An external air pump is connected to the air-bearing vibration isolation table 1. After the air pump is powered on, it inflates the air bladders on the four supports of the air-bearing vibration isolation table, thereby leveling the isolation table.

[0028] Figure 2 This describes the arrangement of the optical microscopy system in this invention. The observation direction of the optical microscope head 8-1 is from bottom to top. There are nine sets of optical microscopy systems 8, all arranged in a two-dimensional array with the observation direction from bottom to top. They are installed at preset distances below the linear slide stage 2 and inside the area enclosed by the encapsulated aluminum plate 7. The maximum travel distance for visual measurement can be changed by adjusting the spacing of the two-dimensional array. The maximum travel distance for visual measurement can also be changed by adjusting the size of the calibration object observed by the optical microscope head 8-1 or by increasing the number and spacing of the two-dimensional array. The lower worktable 5 of the worm gear reducer 4 is fixed to a disc-shaped workpiece by bolts and nuts. One surface of the workpiece is precision-machined with a microstructure array, with each microstructure unit being less than 1mm*1mm in size. The optical lenses in the optical microscopy system capture images of the microstructure array from bottom to top. The field of view of the image captured by the optical microscopy system is 2.38mm*2.85mm. The worktable can be absolutely positioned using a visual matching algorithm.

[0029] Figure 3 This describes the arrangement of the linear slides that enable movement along the x and y axes in this invention. The linear slides 2-1 and 2-2 for x-axis translational movement and 2-3 and 2-4 for y-axis translational movement are installed in an "I" shape. The linear slides 2-1 and 2-2 for x-axis translational movement are mounted upright on the upper ends of six sets of aluminum profile columns 6, while the linear slides 2-3 and 2-4 for y-axis translational movement are mounted sideways on the upper sides of linear slides 2-1 and 2-2, and are fitted with an aluminum alloy platform 2-6. This installation method ensures that the aluminum alloy platform 2-6 mounted on the motion module can move according to the required distance and that the dustproof bellows cover 3 provides complete coverage, creating a dustproof and light-proof observation environment for the optical microscope head 8-1.

[0030] Figure 4This describes the installation method of the worm gear reducer and the worktable in this invention. The output shaft axis of the worm gear reducer 4 is perpendicular to the upper surface of the aluminum alloy platform 2-6 and passes through the geometric center of the upper surface of the aluminum alloy platform 2-6. The output shaft segment of the worm gear reducer 4 is connected to the worktable 5 through a keyway fit and a threaded connection. Each end of the worm gear reducer 4 is equipped with a worktable 5. The upper end worktable 5 is used to install the workpiece to be processed, and the lower end worktable 5 is used to install the microstructure workpiece. The workpiece to be processed is the workpiece that needs to be processed, which can be a wafer, metal, etc. It is installed on the upper end worktable 5 for processing and operation. The microstructure workpiece is a disc-shaped white copper workpiece with a radius of 150mm and a microstructure array processed on one surface. The microstructure array is a coded pattern array composed of microstructure units. The size of the microstructure unit is within 1mm*1mm, and each microstructure unit has slight dimensional differences. All microstructure units can be matched and identified by a visual matching algorithm. The microstructure workpiece is installed as a calibration object for precise positioning by the visual matching algorithm.

[0031] The two worktables 5 rotate with the output shaft of the worm gear reducer 4, thereby realizing the three-degree-of-freedom motion and measurement of the workpiece. The worm gear reducer 4 is used to realize the special structure with worktables 5 on both the top and bottom, and can also be used to reduce the structural size. The input shaft of the worm gear reducer 4 is connected to a motor. The rotation of the motor shaft drives the input shaft to rotate, which in turn drives the worktables 5 at the output shaft to rotate, realizing the rotational degree of freedom of the worktables 5 around the z-axis.

Claims

1. A three-degree-of-freedom microscopic vision precision motion stage, comprising a linear slide (2), a worm gear reducer (4), a worktable (5), and an optical microscopy system (8), characterized in that: The linear slide (2) includes linear slides (2-1, 2-2) that move in the x-axis translational direction and linear slides (2-3, 2-4) that move in the y-axis translational direction. The bottom of the linear slides (2-1, 2-2) that move in the x-axis translational direction is connected to the air-bearing vibration isolation table (1) through aluminum profile columns (6). The bottom of the linear slides (2-3, 2-4) that move in the y-axis translational direction is mounted on the linear slides (2-1, 2-2) through two sets of right-angle bracket connectors (2-5). An aluminum alloy platform (2-6) is installed on the lower side. The worm gear reducer (4) is fixed on the upper surface of the aluminum alloy platform (2-6). The output shaft of the worm gear reducer (4) is perpendicular to the aluminum alloy platform (2-6). The lower shaft end extends out of the lower surface of the aluminum alloy platform (2-6) through a reserved hole. Worktables (5) are installed on both the upper and lower shaft ends of the output shaft of the worm gear reducer (4). The upper shaft end worktable (5-1) is used to install the workpiece, and the lower shaft end worktable (5-2) is used to install the microstructure workpiece. The optical microscopy system (8) is installed on the table surface of the air-bearing vibration isolation table (1) through a threaded connection. The optical microscopy system (8) consists of an optical microscope head (8-1), an industrial camera (8-2), an industrial camera adapter plate (8-3), a support rod gear clamp (8-4), a rack support rod (8-5), a differential lifting stage (8-6), and a differential lifting stage adapter plate (8-7). The lower end of the optical microscope head (8-1) is mounted on the upper end of the industrial camera (8-2). The industrial camera (8-2) is fixed to the side of the support rod gear clamp (8-4) through the industrial camera adapter plate (8-3). The support rod gear clamp (8-4) is mounted on the side of the rack support rod (8-5) through gear meshing. The lower end of the rack support rod (8-5) is fixed to the upper end of the differential lifting stage (8-6). The differential lifting stage (8-6) is fixed to the upper surface of the air-bearing vibration isolation table (1) and below the linear slide table (2) through the differential lifting stage adapter plate (8-7). The aluminum profile column (6) has an encapsulated aluminum plate (7) installed on its side. Dustproof bellows covers (3) are installed above each of the linear slides (2); The linear slides (2-1, 2-2) moving in the x-axis translational direction and the linear slides (2-3, 2-4) moving in the y-axis translational direction are installed in an "I" shape. The linear slides (2-1, 2-2) moving in the x-axis translational direction are mounted on the upper end of the six sets of aluminum profile columns (6), and the linear slides (2-3, 2-4) moving in the y-axis translational direction are mounted on the upper side of the linear slides (2-1, 2-2). The output shaft axis of the worm gear reducer (4) is perpendicular to the upper surface of the aluminum alloy platform (2-6) and passes through the geometric center of the upper surface of the aluminum alloy platform (2-6). The output shaft segment of the worm gear reducer (4) is connected to the worktable (5) through keyway fit and threaded connection.

2. The three-degree-of-freedom microscopic vision precision motion stage according to claim 1, characterized in that: The observation direction of the optical microscope head (8-1) is from bottom to top. There are nine sets of optical microscopy systems (8), which are installed at a preset distance below the linear slide (2) and inside the area enclosed by the encapsulated aluminum plate (7).

Images