An efficient heating device in a vacuum cavity

Abstract

The application is a high-efficiency heating device in a vacuum cavity, which is characterized in that a plurality of heaters extending along the length direction of the heating plate are arranged in the heating plate to ensure the uniform heat propagation and heating performance. An air inlet is arranged on each side of the heating plate, and a nitrogen gas inlet joint is arranged at the top end of the air inlet. An air outlet is arranged between adjacent heaters, and a plurality of air outlets are uniformly arranged on the surface of the corresponding heating plate. The bottom ends of all the air outlets are connected to two converging air ducts, and the bottom ends of the two converging air ducts are connected to the air inlets. The two nitrogen gas inlets are respectively connected to a nitrogen gas inlet pipe with a flow control valve. A plurality of long temperature sensors and short temperature sensors are alternately arranged on one side of the heating plate, and the positions of each long temperature sensor and short temperature sensor correspond to the positions of an air outlet. The alternately arranged temperature sensors can monitor the temperature in the cavity, and the entire heating plate is divided into multiple temperature zones for temperature control and adjustment, so as to ensure the consistency of the temperature at different positions in the cavity.

Description

Technical Field

[0001] This invention relates to a high-efficiency heating device for a vacuum chamber, specifically a high-efficiency heating device designed to improve the heating effect within the vacuum chamber of a vacuum coating equipment. Background Technology

[0002] For vacuum coating equipment, existing technologies mostly use infrared light as the heating radiation medium for heating devices inside the vacuum chamber. This results in problems such as slow heating radiation speed, low efficiency, and uneven heating temperature. Furthermore, the heaters are not evenly distributed, and the heating power is not easy to adjust. Moreover, the heaters are directly exposed inside the chamber, and after long-term use, they will be covered by gas impurities, affecting their heating performance. Summary of the Invention

[0003] The present invention proposes a high-efficiency heating device in a vacuum cavity, which aims to overcome the above-mentioned shortcomings of the prior art, improve the heat conduction speed and uniformity, and increase the heating efficiency.

[0004] The technical solution of this invention is a high-efficiency heating device for a vacuum cavity, comprising a heating plate with a plurality of evenly spaced heaters extending along the length of the heating plate. This ensures uniform heat distribution and avoids direct exposure of the heaters within the cavity, thus guaranteeing heating performance.

[0005] Preferably, the heater extends from the top surface of the heating plate to the inner side of the heating plate near the bottom.

[0006] Preferably, the heating plate has an air inlet on each of its two sides, with a nitrogen inlet connector protruding from the top surface of the heating plate at the top of each inlet. An air outlet is provided between adjacent heaters, and air outlet holes are evenly distributed on the surface of the heating plate corresponding to each outlet. The bottom ends of all outlets are connected to two converging air channels, each of which is connected to the bottom end of an air inlet. Each of the two nitrogen inlet connectors is externally connected to a nitrogen inlet pipe equipped with a flow control valve. The flow-controlled inlet pipes on both sides allow for control of the nitrogen intake, thus achieving temperature uniformity adjustment.

[0007] Preferably, the air intake extends from the top surface of the heating plate to the inner side of the heating plate near the bottom, and the air outlet extends from the inner bottom of the heating plate to the inner top of the heating plate.

[0008] Preferably, a plurality of long and short temperature sensors are alternately arranged on one side of the heating plate, with each long and short temperature sensor corresponding to a gas outlet position. The temperature sensors, which are alternately arranged vertically, can monitor the temperature at the top and bottom of their respective chambers, forming multiple temperature zones on the entire heating plate for separate temperature control and adjustment, thus ensuring temperature consistency at different locations within the chamber.

[0009] Preferably, the long temperature sensor extends from the top of the heating plate to the middle of the heating plate, and the short temperature sensor extends from the top of the heating plate to 1 / 4 of the length of the upper part of the heating plate.

[0010] The advantages of this invention are: simple and reasonable structure, fast heat conduction speed, uniform heating, and high heating efficiency. Attached Figure Description

[0011] Figure 1 This is a three-dimensional structural diagram of the high-efficiency heating device inside the vacuum cavity of the present invention.

[0012] Figure 2 This is a perspective structural diagram of the high-efficiency heating device inside the vacuum cavity of the present invention.

[0013] Figure 3 This is a schematic diagram of the working state of the high-efficiency heating device inside the vacuum cavity of the present invention.

[0014] In the diagram, 1 is the heating plate, 2 is the nitrogen inlet connector, 21 is the air inlet, 22 is the air outlet, 23 is the air outlet hole, 24 is the manifold, 3 is the heater, 4 is the long temperature sensor, and 5 is the short temperature sensor. Detailed Implementation

[0015] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0016] like Figure 1 , 2 As shown, a high-efficiency heating device in a vacuum chamber includes a heating plate 1. The heating plate 1 is provided with a plurality of heaters 3 that are evenly spaced and extend along the length of the heating plate 1. The heaters 3 extend from the top surface of the heating plate 1 to the inner side of the heating plate 1 near the bottom, which can ensure the uniform spread of heat.

[0017] This heating device uses inert gas (nitrogen) as the heat radiation medium. An air inlet 21 is provided on each side of the heating plate 1. The air inlet 21 extends from the top surface of the heating plate 1 to the inner side of the heating plate 1 near the bottom. A nitrogen inlet connector 2 protrudes from the top surface of the heating plate 1 at the top of the air inlet 21. An air outlet 22 is provided between adjacent heaters 3. The air outlet 22 extends from the bottom of the inner side of the heating plate 1 to the inner side of the heating plate 1 near the top. Air outlet holes 23 are evenly opened on the surface of the heating plate 1 corresponding to the air outlet 22. The bottom of all air outlets 22 are connected to two converging air channels 24. Each of the two converging air channels 24 is connected to the bottom of an air inlet 21. The two nitrogen inlet connectors 2 are respectively connected to a nitrogen inlet pipe with a flow control valve. The flow control valve can control the nitrogen intake to achieve the purpose of adjusting the temperature uniformity.

[0018] Several long temperature sensors 4 and short temperature sensors 5 are alternately arranged on one side of the heating plate 1. The long temperature sensors 4 extend from the top of the heating plate 1 to the middle of the heating plate 1, and the short temperature sensors 5 extend from the top of the heating plate 1 to one-quarter of its length above the top. Each long temperature sensor 4 and short temperature sensor 5 corresponds to a gas outlet 22. Based on the alternating arrangement of temperature sensors, the temperature inside the cavity can be monitored, and the entire heating plate 1 can be divided into multiple temperature zones for separate temperature control and adjustment, ensuring temperature consistency in different locations within the cavity.

[0019] No air vent 23 is provided at the air outlet 22 corresponding to the location of the long temperature sensor 4 and the short temperature sensor 5. The air vent 23 corresponding to the air outlet 22 of the short temperature sensor 5 extends from below the short temperature sensor 5 to the middle of the heating plate 1. The air vent 23 corresponding to the air outlet 22 of the long temperature sensor 4 extends from below the long temperature sensor 4 to the bottom of the heating plate 1.

[0020] Based on the above structure, during operation, nitrogen flows in through the nitrogen inlet connector 2. The heaters 3 of different temperature zones heat the nitrogen flowing through the heating plate 1. The nitrogen carries heat into the cavity through the outlet 22 and the confluence duct 24 in the heating plate 1 and multiple nitrogen outlet holes 23 in the middle, so as to achieve rapid heating in the cavity. The nitrogen intake on both sides of the heating plate 1 is adjusted by the external flow control valve to ensure the temperature uniformity of different temperature zones. The long temperature sensor 4 and the short temperature sensor 5 on the heating plate will feed back the detected temperature in the cavity. Based on the temperature feedback from the temperature sensors, the system adjusts the heating power of the heaters in different temperature zones to achieve a consistent temperature at different locations in the cavity.

[0021] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0022] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these all fall within the protection scope of the present invention.

Claims

1. A high-efficiency heating device for a vacuum cavity, characterized in that, The heating plate (1) includes a heating plate (1), which contains several heaters (3) that are evenly spaced and extend along the length of the heating plate (1). The heaters (3) extend from the top surface of the heating plate (1) to the inner side of the heating plate (1) near the bottom. The heating plate (1) has an air inlet (21) on each side. The top of the air inlet (21) has a nitrogen inlet connector (2) that protrudes from the top surface of the heating plate (1). An air outlet (22) is provided between adjacent heaters (3). Air outlet holes (23) are evenly opened on the surface of the heating plate (1) corresponding to the air outlet (22). The bottom ends of all air outlets (22) are connected by two... Two gas confluence channels (24) are connected to the bottom of an air inlet channel (21) and two nitrogen inlet connectors (2) are connected to a nitrogen inlet pipe with a flow control valve. The air inlet channel (21) extends from the top surface of the heating plate (1) to the inner side of the heating plate (1) near the bottom. The air outlet channel (22) extends from the bottom of the heating plate (1) to the inner side of the heating plate (1) near the top. Several long temperature sensors (4) and short temperature sensors (5) are alternately arranged on one side of the heating plate (1). The position of each long temperature sensor (4) and short temperature sensor (5) corresponds to the position of an air outlet channel (22).

2. The high-efficiency heating device in a vacuum cavity as described in claim 1, characterized in that, The long temperature sensor (4) extends from the top of the heating plate (1) to the middle of the heating plate (1), and the short temperature sensor (5) extends from the top of the heating plate (1) to 1 / 4 of the length of the upper part of the heating plate (1).

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