Negative pressure drying oven

Abstract

The present disclosure describes a negative pressure drying box, comprising a box body having a first chamber, a supporting mechanism arranged in the first chamber for supporting a material to be dried, an air flow guiding mechanism cooperating with the supporting mechanism to form a second chamber for accommodating the material to be dried, and a negative pressure mechanism in communication with the first chamber for forming a negative pressure, the air flow guiding mechanism comprising a cover shell covering the supporting mechanism to form the second chamber, a plurality of through holes formed in the cover shell, a plurality of partitioning portions formed in the cover shell and corresponding to the plurality of through holes respectively, and a flow dividing portion provided on the cover shell for dispersing air flow, the plurality of partitioning portions forming a plurality of air flow intervals arranged in a mesh pattern, the second chamber being in communication with the first chamber sequentially via the air flow intervals, the through holes, and the flow dividing portion. According to the present disclosure, a negative pressure drying box for uniform crystallization of solvent on the material to be dried by guiding uniform air flow in a negative pressure environment can be provided.

Description

Technical Field

[0001] This disclosure generally relates to the field of drying equipment, and more specifically to a negative pressure drying oven. Background Technology

[0002] Negative pressure drying is a method of rapid drying by placing the object to be dried under negative pressure or vacuum conditions. A vacuum pump is used to remove air and moisture. When the object is under vacuum and negative pressure, the boiling point of the solvent on its surface decreases, making it easier to vaporize and accelerating the drying process. Compared to conventional drying methods, negative pressure drying offers advantages such as shorter drying time, applicability to objects with complex compositions or structures (e.g., heat-sensitive materials, easily oxidized materials, or powdered materials), and reduced likelihood of contamination during the drying process.

[0003] A negative pressure drying oven is a processing device based on the principle of negative pressure drying; it can also be called a vacuum drying oven, a reduced pressure drying device, or a substrate processing device. A negative pressure drying oven generally consists of a chamber and a negative pressure mechanism. The chamber forms a cavity to hold the material to be dried, and the negative pressure mechanism controls the pressure changes inside the cavity.

[0004] However, in existing negative pressure drying ovens, the uniformity of gas flow inside the oven during vacuum drying is inconsistent, which can easily lead to uneven solvent crystallization on the object to be dried, failing to meet the requirements of vacuum drying. Therefore, a negative pressure drying oven that can guide gas flow uniformly to achieve uniform solvent crystallization on the object to be dried is needed. Summary of the Invention

[0005] This disclosure is made in view of the above-mentioned situation, and its purpose is to provide a negative pressure drying oven that can guide the uniform flow of gas in a negative pressure environment to uniformly crystallize the solvent on the object to be dried.

[0006] To this end, this disclosure provides a negative pressure drying oven, which includes a box body having a first chamber, a support mechanism arranged in the first chamber for supporting the object to be dried, an airflow guiding mechanism cooperating with the support mechanism to form a second chamber containing the object to be dried, and a negative pressure mechanism communicating with the first chamber for generating negative pressure. The airflow guiding mechanism includes a cover covering the support mechanism to form the second chamber, a plurality of through holes formed in the cover, a plurality of partitions formed in the cover and corresponding to the plurality of through holes, and a diversion part disposed in the cover for dispersing airflow. The plurality of partitions form a plurality of airflow intervals arranged in a grid pattern. The second chamber communicates with the first chamber sequentially through the airflow intervals, the through holes, and the diversion part.

[0007] In this disclosure, the housing and the support mechanism cooperate to form a second chamber that contains the object to be dried. When the negative pressure mechanism is working, the negative pressure airflow enters the first chamber through the second chamber. The negative pressure airflow is dispersed into a uniform airflow by multiple partitions forming multiple airflow intervals arranged in a grid pattern. The airflow is further dispersed by the diversion section after passing through the through hole, making the gas flow more uniform. This allows the solvent on the object to be dried to be dried and crystallized more uniformly.

[0008] Additionally, in the negative pressure drying oven disclosed herein, optionally, the airflow guiding mechanism further includes a guide section disposed in the diversion section and forming a guide cavity with the diversion section, the guide section having an air hole communicating with the guide cavity. In this case, the negative pressure airflow enters the guide cavity via the diversion section and then flows out from the air hole of the guide section, which can further disperse the airflow.

[0009] Furthermore, in the negative pressure drying oven disclosed herein, optionally, the number of air holes is multiple, and the multiple air holes are evenly distributed along the circumference of the guide cavity. This allows for a more uniform airflow into the first chamber through the guide cavity.

[0010] Furthermore, in the negative pressure drying oven disclosed herein, optionally, the negative pressure and gas flow rate formed in each airflow zone are approximately the same. This allows for uniform drying of the solvent on the object to be dried.

[0011] Furthermore, in the negative pressure drying oven disclosed herein, optionally, the ratio of the thickness of the partition to the distance between the partition and the object to be dried is a predetermined ratio. In this case, the solvent on the object to be dried will not directly contact the partition, which can prevent the solvent on the object to be dried from being insufficiently dried; at the same time, the predetermined distance between the partition and the object to be dried allows the gas flow to be better confined within the airflow range formed by each partition, thereby reducing gas flow between different airflow ranges and making the gas flow between each partition more uniform.

[0012] Alternatively, in the negative pressure drying oven disclosed herein, the diversion section may be disposed above the plurality of partitions in a manner that fits against the casing. In this case, it facilitates the entry of gas within the airflow zone into the diversion section through the through-holes on the casing, and allows the gas to diffuse immediately upon entering the diversion section, resulting in a more uniform gas flow.

[0013] Additionally, in the negative pressure drying oven disclosed herein, optionally, the support mechanism has a guide plate projected along a direction orthogonal to the guide plate. The guide plate covers the airflow guiding mechanism and the connection point where the negative pressure mechanism exchanges airflow with the first chamber. In this case, the guide plate, in conjunction with the cover, can better form a second chamber for drying the object to be dried. Furthermore, the connection point where the negative pressure mechanism exchanges airflow with the first chamber is located directly below the guide plate. When the negative pressure mechanism performs suction, the negative pressure adsorption force generated can be evenly distributed around the guide plate due to the obstruction of the guide plate, thereby allowing gas to flow evenly from around the guide plate to the connection point where the negative pressure mechanism exchanges airflow with the first chamber, thus enabling more uniform drying of the solvent on the object to be dried.

[0014] Furthermore, in the negative pressure drying oven disclosed herein, optionally, the plurality of through holes and the plurality of partitions are arranged in the same array. This results in more uniform gas flow, enabling more even drying of the solvent on the object to be dried.

[0015] Furthermore, in the negative pressure drying oven disclosed herein, optionally, the airflow zones formed by each partition have the same shape and size. In this case, the airflow velocity in the airflow zones formed by each partition is approximately the same, enabling more uniform drying of the solvent on the object to be dried.

[0016] Additionally, the negative pressure drying oven disclosed herein may optionally include a first sealing portion for sealing the first chamber and a second sealing portion for sealing the second chamber. This improves the airtightness of the first and second chambers through the first and second sealing portions.

[0017] According to this disclosure, a negative pressure drying oven can be provided to uniformly crystallize solvents on a material to be dried by guiding the uniform flow of gas under negative pressure. Attached Figure Description

[0018] This disclosure will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:

[0019] Figure 1 This is a schematic diagram showing a negative pressure drying oven according to an embodiment of the present disclosure.

[0020] Figure 2 This is a schematic diagram showing the internal structure of the negative pressure drying oven according to the embodiments of this disclosure.

[0021] Figure 3 This is a schematic diagram showing another internal structure of the negative pressure drying oven according to an embodiment of the present disclosure.

[0022] Figure 4It shows Figure 2 A schematic diagram of the gas flow inside the negative pressure drying oven during operation.

[0023] Figure 5 This is a schematic diagram showing the overall airflow guiding mechanism according to the embodiments of this disclosure.

[0024] Figure 6 It shows Figure 5 An enlarged view of region A of the airflow guiding mechanism involved.

[0025] Figure 7 This is a side view of the airflow guiding mechanism according to an embodiment of the present disclosure.

[0026] Figure 8 It shows Figure 7 An enlarged view of region B of the airflow guiding mechanism involved.

[0027] Explanation of reference numerals in the attached figures:

[0028] 1… Negative pressure drying oven, 10… Box body, 100… First chamber, 110… Top cover, 120… Bottom plate, 121… Support column, 130… Exhaust port, 140… First sealing part, 20… Airflow guiding mechanism, 200… Second chamber, 210… Cover, 211… Divider, 212… Through hole, 213… Airflow interval, 214… Flow limiting rib, 220… Flow divider, 230… Flow guide, 231… Flow guide cavity, 232… Air hole, 30… Support mechanism, 310… Flow guide plate, 320… Support component, 330… Second sealing part, 40… Negative pressure mechanism, 400… Pump body, 410… Gas pipeline, 50… Object to be dried. Detailed Implementation

[0029] The negative pressure drying oven disclosed herein can be more readily understood by referring to the following detailed description of specific embodiments and the embodiments included therein, as well as the accompanying drawings and their foregoing and hindsight descriptions.

[0030] In the following description, the same symbols are used for the same parts, and repeated descriptions are omitted. Furthermore, the accompanying drawings are schematic only, and the proportions of the parts or their shapes may differ from the actual figures.

[0031] It should be understood that the terminology used herein is for describing specific embodiments only and is not intended to limit the scope of the invention, which will be limited only by the appended claims.

[0032] While specific examples of this disclosure have been shown and described, it will be apparent to those skilled in the art that variations and modifications can be made based on the teachings of this disclosure without departing from this disclosure and its broader aspects, and therefore the appended claims are intended to cover within their scope all such changes and modifications within the true spirit and scope of this disclosure. Those skilled in the art will understand that, in general, the terms used in this disclosure are generally intended to be “open” terms (e.g., the term “comprising” should be interpreted as “including but not limited to”, the term “having” should be interpreted as “at least having”, the term “comprising” should be interpreted as “including but not limited to”, etc.).

[0033] It should be understood that the examples of the disclosure disclosed herein are illustrative of the principles of this disclosure. Other modifications that may be adopted are within the scope of this disclosure. Therefore, alternative configurations of this disclosure can be utilized in accordance with its teachings, as examples and not limitations. Thus, the examples of this disclosure are not limited to those shown and described.

[0034] The following examples are provided to better illustrate the claimed disclosure and are not intended to limit the scope of this disclosure. References to specific materials are for illustrative purposes only and are not intended to limit this disclosure. Those skilled in the art can develop equivalent means or reactants without exercising inventive ability and without departing from the scope of this disclosure.

[0035] Furthermore, to better illustrate this disclosure, numerous specific details are set forth in the following detailed description. Those skilled in the art will understand that this disclosure can be practiced without certain specific details. In some examples, methods, means, components, and circuits well known to those skilled in the art have not been described in detail in order to highlight the main points of this disclosure.

[0036] This disclosure relates to a negative pressure drying oven. By placing the object to be dried in the negative pressure drying oven of this disclosure, the object can be dried rapidly. The negative pressure drying oven of this disclosure may also be referred to as a negative pressure drying device, a vacuum drying device, a vacuum drying oven, a reduced pressure drying device, or a substrate processing device, etc. It should be understood that the above names are all for the purpose of indicating the equipment of this disclosure that uses a negative pressure drying method to dry the object, and should not be construed as limiting.

[0037] The negative pressure drying oven disclosed herein can be applied in the fields of food production, display manufacturing, solar cell manufacturing, lithium battery manufacturing, wafer manufacturing, and advanced packaging. In particular, the negative pressure drying oven disclosed herein is especially suitable for drying heat-sensitive materials, easily oxidized materials, powdered materials, solvents, or materials that may generate harmful waste gases during the drying process.

[0038] In this disclosure, the object to be dried can be in the form of sheets, plates, strips, or cubes. For example, the object to be dried can be an audio-visual disc in the VCD industry, a display panel in the display manufacturing industry, a solar panel in the solar cell manufacturing industry, or a wafer panel in the chip manufacturing industry, etc.

[0039] When drying materials with organic solvents on their surface, the uneven gas flow inside the negative pressure drying oven often causes premature crystallization of the solvent in some areas, resulting in uneven drying and failing to meet the requirements of vacuum drying. Therefore, restricting the gas flow inside the drying oven to achieve more uniform gas flow has become a problem that needs to be solved. The specific implementation method described below can effectively solve this problem.

[0040] The following describes the negative pressure drying oven involved in this disclosure in detail, taking a sheet-like object to be dried as an example and in conjunction with the accompanying drawings.

[0041] Figure 1 This is a schematic diagram showing the negative pressure drying oven 1 according to an embodiment of the present disclosure. Figure 2 This is a schematic diagram showing the internal structure of the negative pressure drying oven 1 according to the embodiments of this disclosure. Figure 3 This is a schematic diagram showing another internal structure of the negative pressure drying oven 1 according to an embodiment of the present disclosure.

[0042] In this embodiment, the negative pressure drying chamber 1 may include a chamber body 10, an airflow guiding mechanism 20, a support mechanism 30, and a negative pressure mechanism 40 (see [reference]). Figure 1 In some examples, the housing 10 may have a first chamber 100. In some examples, the airflow guiding mechanism 20 and the support mechanism 30 may cooperate to form a second chamber 200. In some examples, the second chamber 200 may be connected to the first chamber 100 via the airflow guiding mechanism 20. When the object to be dried 50 is supported on the support mechanism 30 and located in the second chamber 200, the gas inside the first chamber 100 is extracted by the negative pressure mechanism 40, which can create a negative pressure condition or a vacuum condition in the first chamber 100. The negative pressure airflow, after passing through the airflow guiding mechanism 20, can also create a negative pressure condition or a vacuum condition in the second chamber 100. After drying under negative pressure conditions, the object to be dried 50 can form dried material. The solvent on the surface of the object to be dried 50 can form uniform crystals after drying under negative pressure conditions.

[0043] In some examples, the negative pressure drying oven 1 may include a top cover 110 and a bottom plate 120 (see...). Figure 2In some examples, the top cover 110 can be detachably combined with the bottom plate 120. When the top cover 110 and the bottom plate 120 are combined, a sealed first chamber 100 can be formed. In some examples, when the top cover 110 and the bottom plate 120 are separated, it is convenient to transfer the object to be dried 50 into the chamber 10 or to remove the dried material from the chamber 10 after the object to be dried 50 has been dried.

[0044] In some examples, housing 10 may also include a first sealing portion 140 that seals the first chamber 100 (see [reference]). Figure 1 Therefore, the airtightness of the housing 10 can be improved by the first sealing part 140. In some examples, the first sealing part 140 can be provided on the bottom plate 120. In some examples, when the top cover 110 and the bottom plate 120 are combined, the first sealing part 140 can be used to seal the gap formed when the top cover 110 and the bottom plate 120 are combined. In some examples, the contour of the first sealing part 140 can match the contour of the top cover 110.

[0045] In some examples, the first sealing portion 140 may be located between the upper cover 110 and the bottom plate 120. In some examples, the first sealing portion 140 may be elastic. For example, the first sealing portion 140 may be an elastic rubber ring or an elastic rubber gasket. In some examples, the mating edges of the upper cover 110 and the bottom plate 120 may have a groove that can be fitted into the first sealing portion 140, which can be embedded in the groove. This improves the airtightness of the housing 10, thereby promoting uniform and stable air pressure changes within the housing 10.

[0046] In some examples, the negative pressure mechanism 40 may include a pump body 400 and a gas conduit 410. In some examples, the gas conduit 410 may be connected to the first chamber 100. In some examples, the pump body 400 may change the air pressure in the first chamber 100 via the gas conduit 410, and the negative pressure airflow may change the air pressure in the second chamber 100 via the airflow guiding mechanism 20.

[0047] Figure 4 It shows Figure 2 A schematic diagram of the gas flow inside the negative pressure drying oven during operation. Figure 4 In the diagram, the arrows schematically indicate the direction of gas flow.

[0048] exist Figure 4 In the example shown, under the suction of the negative pressure mechanism 40, the gas in the second chamber 200 is first dispersed in the partition 211 and enters the diversion section 220, then further dispersed in the diversion section 220 and enters the guide section 230, then enters the first chamber 100 through the air hole 232 of the guide section 230, and finally flows into the pump body 400 through the connection between the negative pressure mechanism 40 and the first chamber 100.

[0049] Figure 5 This is a schematic diagram showing the overall airflow guiding mechanism 20 according to an embodiment of the present disclosure. Figure 6 It shows Figure 5 A partial enlarged view of region A of the airflow guiding mechanism 20 involved. Figure 7 This is a side view of the airflow guiding mechanism 20 according to an embodiment of the present disclosure. Figure 8 It shows Figure 7 A partial enlarged view of region B of the airflow guiding mechanism 20 involved.

[0050] In some examples, the airflow guiding mechanism 20 may include a housing 210. In some examples, the housing 210 may cover the support mechanism 30. In some examples, the housing 210 and the support mechanism 30 may be combined to form a second chamber 200. In some examples, the object to be dried 50 is placed inside the second chamber 200.

[0051] In some examples, the airflow guiding mechanism 20 may also include through holes 212 formed in the housing 210. In some examples, there may be multiple through holes 212. In some examples, multiple through holes 212 are arranged in an array on the housing 210.

[0052] In some examples, the airflow guiding mechanism 20 may further include partitions 211 formed on the housing 210. In some examples, there may be multiple partitions 211. In some examples, the housing 210 may have flow-limiting ribs 214. In some examples, the flow-limiting ribs 214 are arranged crosswise on the housing 210 to form multiple partitions 211 on the housing 210. In some examples, the shape and arrangement of the flow-limiting ribs 214 can be reasonably adjusted according to experimental and numerical simulation results to form partitions 211 that meet drying requirements.

[0053] In some examples, each partition 211 may correspond to a through-hole 212. In some examples, each through-hole 212 may be located at the exact center of each partition 211. Thus, the various partitions 211 impose approximately the same restriction on gas flow.

[0054] In some examples, each partition 211 may correspond to multiple through holes 212. In some examples, the number of through holes 212 within each partition 211 may be the same. In some examples, the multiple through holes 212 may be symmetrically distributed within the partition 211. Thus, the restriction on gas flow is approximately the same for each partition 211.

[0055] See in some examples Figure 5 and Figure 6Multiple partitions 211 can be arranged in an array on the housing 210. In some examples, multiple partitions 211 and multiple through holes 212 can be arranged in the same array.

[0056] In some examples, multiple partitions 211 may be evenly distributed on the housing 210. In some examples, multiple partitions 211 may be distributed in a grid pattern on the housing 210. In some examples, multiple partitions 211 may completely cover one side of the housing 210 opposite to the surface of the object to be dried 50. In some examples, each partition 211 may be a rectangle of the same size, preferably a square of the same size. In this case, the partitions 211 are approximately the same size, so that the flow rate and negative pressure of the gas entering the second chamber 200 into each partition 211 are approximately the same, thereby enabling more uniform drying of the solvent on the object to be dried 50. In some examples, each partition 211 may be a rhombus, circle, ellipse, or other shape of the same size.

[0057] In some examples, the divider 211 can be detachably mounted on the housing 210. In this case, different types of dividers 211 can be replaced to accommodate different drying objects. The replaceable dividers 211 can be inconsistent in size, shape, or thickness.

[0058] In some examples, each partition 211 can form a separate airflow zone 213. In some examples, multiple partitions 211 can form multiple airflow zones 213. In some examples, the multiple airflow zones 213 formed by multiple partitions 211 are arranged in a grid pattern. Due to the presence of the flow-limiting ribs 214, gas exchange between the various airflow zones 213 is greatly restricted. With each partition 211 having the same shape and size and the same number of through holes 212, the negative pressure and gas flow rate formed within each airflow zone 213 are well maintained at approximately the same level. In some examples, the airflow zones 213 formed by each partition 211 have the same shape and size. In this case, the gas flow rate of the airflow zones 213 formed by each partition 211 is approximately the same, enabling more uniform drying of the solvent on the material to be dried 50.

[0059] In some examples, the ratio of the thickness of the separator 211 to the distance between the separator 211 and the object to be dried 50 is a predetermined ratio. The predetermined ratio can range from 0.05 to 0.6, and preferably, it can be 0.5. In some examples, the thickness of the separator 211 can be from 1 mm to 3 mm, and preferably, it can be 2 mm. In some examples, the distance between the separator 211 and the object to be dried 50 can be from 5 mm to 15 mm, and preferably, it can be 10 mm.

[0060] In some examples, the separator 211 does not directly contact the object to be dried 50, which prevents insufficient drying of the portion of the object to be dried corresponding to the flow-limiting rib 214, thus failing to meet the drying requirements. In some examples, the distance between the separator 211 and the object to be dried 50 should not be too far, allowing the gas flow to be better confined within the airflow intervals 213 formed by each separator 211, thereby reducing gas exchange between the airflow intervals 213 formed by each separator 211 and making the gas flow between each separator 211 more uniform.

[0061] In some examples, the divider 211 may have an infrared sensor, and the support mechanism 30 may be freely and automatically adjustable in height. The infrared sensor may preset a distance between the divider 211 and the item 50 to be dried, and this preset distance may be set within an approximate range. When the item 50 is placed on the support mechanism, the cover 210 is closed, and the infrared sensor on the divider 211 begins to operate, measuring the distance between the divider 211 and the item 50 placed on the support mechanism 30 to obtain the distance between them. When the distance is less than the preset distance, the support mechanism 30 is automatically lowered; when the distance is greater than the preset distance, the support mechanism 30 is automatically raised; and when the distance is within the preset range, the support mechanism 30 does not adjust its height.

[0062] See in some examples Figure 7 and Figure 8 The airflow guiding mechanism 20 may also include a flow divider 220. In some examples, the flow divider 220 is used to disperse the airflow. The airflow in the second chamber 200 enters the first chamber 100 through multiple airflow sections 213, multiple through holes 212, and the flow divider 220.

[0063] In some examples, the flow divider 220 may be disposed on the housing 210. In some examples, the flow divider 220 may be fitted to the housing 210. In some examples, the flow divider 220 may be disposed above the plurality of partitions 211. In some examples, the flow divider 220 may be disposed above the plurality of partitions 211 in a manner fitted to the housing 210. Thus, the airflow entering the flow divider 220 from each airflow zone 213 through the corresponding through-holes 212 of each airflow zone 213 can be immediately dispersed in the flow divider 220, making the gas flow more uniform.

[0064] In some examples, the diversion section 220 can be a filter plate. In some examples, preferably, the diversion section 22 can be a clean polymer cross-linked fiber filter plate. In this case, the clean polymer cross-linked fiber filter plate has channels (e.g., a mesh structure) that allow gas to flow through. When gas enters the clean polymer cross-linked fiber filter plate, the gas can be dispersed within the filter plate. When the gas flows out of the filter plate, it can be further evenly dispersed. In addition, due to the function of the filter plate, harmful gases generated after the organic solvent is dried can be filtered out. Furthermore, when the gas below the object to be dried 50 flows into the upper part of the object to be dried 50 from the gap between the edge of the object to be dried 50 and the side wall of the housing 210, in order to prevent the gas below the object to be dried 50 from flowing into the upper part of the object to be dried 50 from the gap at too high a flow rate, which would cause premature crystallization at the edge of the object to be dried 50, the filter plate can reduce and slow down the gas flow rate, that is, achieve the effect of airflow damping. When the negative pressure mechanism 40 continuously creates negative pressure, the airflow in the second chamber 200 can be more dispersed. In some examples, the diverter 220 can be detachably mounted on the housing 210. This facilitates the replacement of the diverter 220.

[0065] In some examples, the airflow guiding mechanism 20 may also include a guide section 230 (see Figure 2 The guide section 230 can be disposed on the flow divider 220. In some examples, the guide section 230 can form a guide cavity 231 with the flow divider 220. Thus, the negative pressure airflow, after being dispersed in the flow divider 220, can re-enter the first chamber 100 through the guide cavity 231, and the guide section 230 can further disperse the negative pressure of the airflow. In some examples, the guide cavity 231 can be formed directly above the flow divider 220. In some examples, the guide cavity 231 can enclose the flow divider 220. In some examples, the guide section 230 can be an integrally formed structure with the cover 210. In other examples, the guide section 230 can be detachably fitted onto the cover 210.

[0066] In some examples, the guide section 230 may have vents 232 connecting the guide cavity 231 and the first chamber 100. In this case, the negative pressure airflow enters the guide cavity 231 via the diverter 220 and then flows out of the guide section 230 through the vents 232 to the first chamber 100, thereby further dispersing the airflow. In some examples, there may be multiple vents 232. In some examples, the multiple vents 232 may be evenly distributed along the circumference of the guide cavity 231. In this case, the guide cavity 231 and the first chamber 100 can be connected through multiple vents 232, and the negative pressure airflow entering the first chamber 100 via the guide cavity 231 is once again evenly dispersed by the evenly distributed multiple vents 232, making the airflow flowing into the first chamber 100 through the guide cavity 231 more uniform. Figure 7 As shown, multiple vents 232 can be neatly arranged around the circumference of the guide cavity 231 to form a ring of vents. It should be understood that the illustration should not be construed as a limitation on the arrangement of the multiple vents 232; the multiple vents 232 can also be arranged in multiple rings evenly in the circumference.

[0067] In some examples, the airflow in the second chamber 200 is first uniformly dispersed in the partition 211 and then dispersed again in the diversion section 220. It is then uniformly dispersed once more along the air holes 232 of the guide cavity 231 before entering the first chamber 200. In this case, when the negative pressure drying oven 1 is in operation, after multiple dispersions of the airflow under negative pressure, the gas flow within the entire negative pressure drying oven 1 is uniform, enabling better uniform crystallization of the solvent on the material to be dried 50.

[0068] In some examples, the support mechanism 30 may have a baffle 310 (see Figure 2 In some examples, projecting along a direction orthogonal to the guide plate 310, the guide plate 310 may cover the airflow guiding mechanism 20. In this case, the guide plate 310 and the cover 210 cooperate to form a second chamber 200 for drying the object 50. In some examples, projecting along a direction orthogonal to the guide plate 310, the guide plate 310 may cover the connection between the negative pressure mechanism 40 and the first chamber 100 for airflow exchange. In this case, the connection between the negative pressure mechanism 40 and the first chamber 100 for airflow exchange is located directly below the guide plate 310. When the negative pressure mechanism 40 performs suction, the negative pressure adsorption force generated can be evenly distributed around the guide plate 310 due to the obstruction of the guide plate 310, thereby allowing the gas to flow evenly from around the guide plate 310 to the connection between the negative pressure mechanism 40 and the first chamber 100 for airflow exchange.

[0069] In some examples, the support mechanism 30 may also have a support member 320. In some examples, there may be multiple support members 320. In some examples, multiple support members 320 may be evenly arranged. Thus, the support member 320 can support items 50 to be dried with different drying areas. In some examples, the height of the support member 320 is adjustable. In this case, by placing items 50 to be dried with different thicknesses and adjusting the height of the support member 320, the distance between the drying surface of the item 50 and the partition 211 can always be appropriate. In some examples, the support member 320 may be referred to as a pin.

[0070] In some examples, the negative pressure drying oven 1 may also include a second sealing portion 330 that seals the second chamber 200. This improves the airtightness of the second chamber 200. In some examples, the second sealing portion 330 may be located on the baffle 310. In some examples, when the housing 210 and the baffle 310 are combined, the second sealing portion 330 can be used to seal any gaps formed during the combination of the housing 210 and the baffle 310. In some examples, the contour of the second sealing portion 330 may match the contour of the housing 210.

[0071] In some examples, the second sealing portion 330 may be located between the upper cover 110 and the bottom plate 120. In some examples, the second sealing portion 330 may be elastic, such as an elastic rubber ring or rubber gasket. In some examples, the mating edges of the cover 210 and the guide plate 310 may have a groove that can be fitted into the second sealing portion 330, thereby improving the airtightness of the second chamber 200 and ensuring that the air pressure change within the second chamber 200 is uniform and stable.

[0072] In some examples, the base plate 120 may have a support column 121 (see Figure 2 The function of the support column 121 is to support the second chamber 200 formed by the airflow guiding mechanism 20 and the support mechanism 30, so that the negative pressure gas can flow out from the guide section 230 of the airflow guiding mechanism 20 and flow along the inner wall of the first chamber 100 to the bottom of the guide plate 310 into the communication point between the negative pressure mechanism 40 and the first chamber 100 for airflow exchange. In this way, the gas flowing out from the multiple circumferential air holes 232 of the airflow guiding mechanism 20 can be further divided, making the airflow more uniform. In some examples, there can be multiple support columns 121 to more conveniently support the formed second chamber 200.

[0073] In some examples, the base plate 120 may have an exhaust port 130. The exhaust port 130 is connected to the gas passage 410 of the negative pressure mechanism 40 to form a connection between the negative pressure mechanism 40 and the first chamber 100 for airflow exchange. In some examples, there may be one exhaust port 130, in which case the exhaust port 130 may be located at the center point of the base plate 120. Thus, by evacuating the housing 10 through the exhaust port 130, the gas flowing into the first chamber 100 from the second chamber 200 can be made more uniform. In some examples, there may be multiple exhaust ports 130. In some examples, the multiple exhaust ports 130 are symmetrically distributed along the center of the base plate 120. In this case, by evacuating the housing 10 through the symmetrically distributed multiple exhaust ports 130, the negative pressure in the first chamber 100 can be made approximately uniform, thereby making the gas flowing into the first chamber 100 from the second chamber 200 more uniform. In some examples, there may be two exhaust ports 130 (see...). Figure 3 ).

[0074] In such Figure 4 In the example shown, when the pump 400 of the negative pressure mechanism 40 is working, the negative pressure airflow enters the first chamber 100 through the connection between the gas pipe 410 and the air extraction port 130 of the base plate 120, thereby changing the negative pressure in the first chamber 100. When the air pressure in the first chamber 100 decreases, the gas in the second chamber 200, which has a higher air pressure, begins to flow into the first chamber 100, and this process occurs almost simultaneously. The gas in the second chamber 200 is dispersed through the airflow interval 213 formed by the partition 211, then further dispersed by the negative pressure through the diversion section 220, and finally further dispersed by the guide section 230, ensuring the consistency of the negative pressure airflow throughout the object to be dried 50, so that the organic solvent on the surface of the object to be dried 50 can be dried and crystallized uniformly.

[0075] According to this disclosure, a negative pressure drying oven can be provided to uniformly crystallize solvents on a substance to be dried by guiding the uniform flow of gas under negative pressure.

[0076] Although this disclosure has been disclosed in certain examples and in the context of examples, those skilled in the art will understand that the examples of this disclosure extend beyond the specific examples disclosed to other alternative examples and / or uses and modifications and their equivalents.

[0077] The various methods and techniques described above provide numerous ways to implement this disclosure. It should be understood, of course, that any particular example described according to this disclosure need not necessarily achieve all the objectives or advantages described. Therefore, for example, those skilled in the art will recognize that the methods described in this disclosure can be implemented in a manner that achieves or optimizes one or a set of advantages as taught in this disclosure, without necessarily achieving other objectives or advantages that this disclosure may teach or inspire. Furthermore, those skilled in the art will recognize the applicability of various features from different examples. Similarly, the various elements, features, and steps discussed above, and other known equivalents of each such element, feature, or step, can be mixed and matched by those skilled in the art to perform methods according to the principles described in this disclosure.

[0078] While the present disclosure has been specifically described above in conjunction with the accompanying drawings and examples, it is to be understood that the foregoing description does not limit the present disclosure in any way. Those skilled in the art can make modifications and variations to the present disclosure as needed without departing from its essential spirit and scope, and all such modifications and variations shall fall within the scope of the present disclosure.

Claims

1. A negative pressure drying oven, characterized by, The system includes a housing having a first chamber, a support mechanism disposed within the first chamber for supporting the object to be dried, an airflow guiding mechanism cooperating with the support mechanism to form a second chamber containing the object to be dried, and a negative pressure mechanism communicating with the first chamber for generating negative pressure. The airflow guiding mechanism includes a cover covering the support mechanism to form the second chamber, a plurality of through holes formed in the cover, a plurality of partitions formed within the cover and corresponding to the plurality of through holes, a flow-dispersing section disposed in the cover for dispersing airflow, and a flow-dispersing section forming with the flow-dispersing section. The guide cavity has a guide section, and the plurality of partitions form a plurality of airflow intervals arranged in a grid pattern. The diverting section is located above the partitions and fits against the partitions. The guide section has a plurality of air holes communicating with the guide cavity, and the plurality of air holes are evenly distributed along the circumference of the guide cavity. The guide cavity is formed directly above the diverting section. The second chamber communicates with the first chamber in sequence through the airflow intervals, the through holes, the diverting section, the guide cavity, and the air holes. The negative pressure drying oven includes a bottom plate, and the negative pressure mechanism is connected to the air extraction port located on the bottom plate.

2. The negative pressure drying oven according to claim 1, characterized in that: The flow guide is integrally formed with the cover.

3. The negative pressure drying oven according to claim 2, characterized in that: The plurality of pores form a ring of pores around the flow guide cavity at least once.

4. The negative pressure drying oven according to claim 1, characterized in that: The negative pressure and gas velocity formed in each airflow zone are roughly the same.

5. The negative pressure drying oven according to claim 1, characterized in that: The ratio of the thickness of the separator to the distance between the separator and the object to be dried is a predetermined ratio.

6. The negative pressure drying oven according to claim 1, characterized in that: The housing also includes flow-limiting ribs, which are arranged crosswise on the housing to form a plurality of the partitions.

7. The negative pressure drying oven according to claim 1, characterized in that: The support mechanism has a baffle plate projected along a direction orthogonal to the baffle plate, the baffle plate covering the airflow guiding mechanism and the connection between the negative pressure mechanism and the first chamber for airflow exchange.

8. The negative pressure drying oven according to claim 1, characterized in that: The plurality of through holes and the plurality of partitions are arranged in the same array.

9. The negative pressure drying oven according to claim 1, characterized in that: The airflow zones formed by each partition are of the same shape and size.

10. The negative pressure drying oven according to claim 1, characterized in that: It also includes a first sealing part for sealing the first chamber and a second sealing part for sealing the second chamber.

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