A real-time feedback power detection device for high-power laser

Abstract

The application discloses a kind of real-time feedback power detection devices of high-power laser, be located in the inside of laser processing equipment, including first protective mirror detection device being located in the laser incidence end of laser processing equipment and second protective mirror detection device of laser emission end;Reflection mirror is arranged in the laser light path between the two, and the laser beam reflected from the reflection mirror enters the second protective mirror detection device, and the laser beam refracted from the reflection mirror enters the power detection device;The power detection device is combined with protective mirror detection device, can simultaneously carry out power detection to the first half and the second half light path, and can position the problem of laser processing equipment in the first half light path or the second half light path.The application realizes the whole process detection of light path in high-power laser processing equipment in laser processing process, and can quickly locate and diagnose the problem of laser processing equipment in laser processing process, guarantee the traceability of laser processing.

Description

Technical Field

[0001] This invention belongs to the field of laser processing technology, and specifically relates to a real-time feedback power detection device for high-power lasers. Background Technology

[0002] High-power lasers are prone to power instability due to various factors. For example, increased temperature can reduce the output power of the laser pump source, potentially causing thermal reversal and severely impacting output power. The stability of optical components (such as aging, reflectivity, polarization state, and contamination) also affects power. External factors, such as power supply stability and component contamination, can also affect power. Therefore, power testing is necessary.

[0003] Traditionally, laser processing equipment power is measured using direct measurement methods. This involves directly irradiating the laser power detection device with a laser beam and detecting changes in corresponding physical quantities within its internal sensors to determine the laser's processing power. However, direct measurement is only suitable for laser processing equipment with extremely low power, and this method is prone to damaging the detection device and is not suitable for long-term real-time monitoring. Therefore, due to the high energy of high-power lasers, traditional direct measurement methods are unsuitable for high-power laser processing equipment, as they are prone to damaging the detection device, thus increasing the requirements for power detection equipment.

[0004] Furthermore, existing power laser detection devices are generally located outside the laser processing equipment. They detect power by continuously outputting laser light to the device through the laser processing equipment. This method can only perform power checks before processing begins, and processing can only proceed if no abnormalities are found. It cannot achieve real-time detection and has a lag effect, resulting in a discrepancy between the power detected and the actual power during processing. Moreover, existing power detection devices often only detect power and cannot quickly locate and troubleshoot power anomalies. Therefore, there is an urgent need to propose a power detection technology suitable for high-power lasers that can simultaneously provide rapid fault location. Summary of the Invention

[0005] In response to one or more of the above-mentioned defects or improvement needs of the existing technology, the present invention provides a real-time feedback power detection device for high-power lasers, which realizes the full-process detection of the optical path inside the laser processing equipment during high-power laser processing, and can quickly locate and diagnose problems that occur in the laser processing equipment during laser processing, ensuring the traceability of laser processing.

[0006] To achieve the above objectives, the present invention provides a real-time feedback power detection device for high-power lasers. The power detection device is located inside a laser processing equipment and includes a first protective mirror detection device located at the laser incident end of the laser processing equipment and a second protective mirror detection device located at the laser emitting end.

[0007] A reflector is provided in the laser optical path between the first protective mirror detection device and the second protective mirror detection device. The first laser beam reflected from the reflector enters the second protective mirror detection device, and the second laser beam refracted from the reflector enters the power detection device.

[0008] The power detection device, combined with the protective mirror detection device, can perform power detection on the first half of the optical path from the first protective mirror detection device to the power detection device, and can also perform power detection on the second half of the optical path from the power detection device to the second protective mirror detection device. Furthermore, it can pinpoint the problem of the laser processing equipment in either the first or second half of the optical path.

[0009] As a further improvement of the present invention, if the power detection device detects abnormal data and the first protective mirror detection device alarms at the same time, the problem of the laser processing equipment is located in the first half of the optical path.

[0010] If the power detection device detects abnormal data and the second protective mirror detection device alarms, the problem with the laser processing equipment will be located in the latter half of the optical path.

[0011] As a further improvement of the present invention, the first protective mirror detection device includes a first protective mirror body and a first photoelectric sensor disposed therebetween, and the second protective mirror detection device includes a first protective mirror body and a second photoelectric sensor disposed therebetween, wherein the photoelectric sensor is used to detect whether the surface of the corresponding protective mirror is soiled.

[0012] As a further improvement of the present invention, the first photoelectric sensor and the second photoelectric sensor are connected to the corresponding alarm system.

[0013] As a further improvement of the present invention, the power detection device collects power data of the laser processing equipment during the processing and feeds the data back to the control system. The control system can diagnose abnormal data and make corresponding adjustments to the laser power to form a closed-loop control.

[0014] As a further improvement of the present invention, the control system can plot the corresponding power curve, and by analyzing the power data recorded by the power detection device, the power curve at the corresponding time can be traced for detection and fault diagnosis.

[0015] As a further improvement of the present invention, a beam splitter is also provided in the optical path between the reflector and the power detection device to split the second laser beam passing through the reflector into a third laser beam and a fourth laser beam. The power detection device is provided in the optical path of one of the laser beams, and the light energy absorption module is provided in the optical path of the other laser beam.

[0016] As a further improvement of the present invention, a collimating lens is further provided in the optical path between the first protective mirror detection device and the reflector; and / or,

[0017] The optical path between the reflector and the second protective mirror detection device is further provided with at least one reflector to change the optical path, allowing the laser reflected by the reflector to smoothly enter the second protective mirror detection device; and / or,

[0018] A focusing lens is also provided in the optical path near the second protective mirror detection device.

[0019] In summary, the technical solutions conceived by this invention have the following beneficial effects compared with the prior art:

[0020] (1) The real-time feedback power detection device for high-power lasers of the present invention is located inside the laser processing equipment. It detects a small portion of the weaker laser energy that passes through the reflector and calculates the laser processing power through the control system, thereby achieving accurate acquisition of high-power laser processing power data. At the same time, by combining the power detection device with the protective mirror detection module, it is possible not only to detect the power of the optical path between the first protective mirror detection device and the power detection device, but also to detect the power of the optical path between the power detection device and the second protective mirror detection device. This realizes the full-process detection of the optical path inside the high-power laser processing equipment during laser processing, and can quickly locate and diagnose problems that occur in the laser processing equipment during laser processing, ensuring the traceability of laser processing.

[0021] (2) The real-time feedback power detection device for high-power laser of the present invention consists of two modules that can operate independently: the protective mirror detection module and the power detection device. When one of them is damaged or needs to be adjusted, the other module can perform detection to avoid major accidents during laser processing. Dual detection can greatly improve the safety of laser processing and reduce economic losses.

[0022] (3) The real-time feedback power detection device for high-power lasers of the present invention can form a closed-loop system during high-power laser processing. The power detection device collects power data of the laser processing equipment during processing and feeds back abnormal data to the control system. The control system diagnoses the abnormal data and adjusts the laser power accordingly, avoiding prolonged problems in the laser processing equipment and preventing secondary damage, thus improving the safety of the laser processing equipment. In addition, the control system can also plot power curves, making the data visual and improving the efficiency of fault diagnosis.

[0023] (4) The real-time feedback power detection device for high-power laser of the present invention, considering that the light reflected by the beam splitter still has relatively high energy, adds a light energy absorption module to the power detection device. This module can absorb the remaining laser after reflection or refraction by the beam splitter, thus preventing the remaining laser from affecting the laser processing equipment. Furthermore, the installation positions of the light energy absorption module and the power detection device can be interchanged and adjusted according to the actual usage scenario, and the reflected and refracted laser can be absorbed as needed.

[0024] (5) The real-time feedback power detection device for high-power laser of the present invention is installed in processing equipment capable of emitting laser and has wide applicability. By using the real-time feedback power detection device for high-power laser of the present invention, the quality, efficiency and safety of laser processing can be effectively guaranteed. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a real-time feedback power detection device for high-power lasers according to an embodiment of the present invention.

[0026] Figure 2 This is a schematic diagram illustrating the problem localization process involved in the real-time feedback power detection device for high-power lasers according to an embodiment of the present invention.

[0027] Figure 3 This is a schematic diagram of closed-loop control involved in the real-time feedback power detection device for high-power lasers according to an embodiment of the present invention.

[0028] In all the accompanying drawings, the same reference numerals denote the same technical features, specifically: 1-first protective mirror detection device, 2-collimating mirror, 3-reflecting mirror, 4-beam splitter, 5-power detection device, 6-light energy absorption module, 7-first direction reflecting mirror, 8-second direction reflecting mirror, 9-second protective mirror detection device, 10-focusing mirror;

[0029] 11-First photoelectric sensor, 12-First protective mirror body; 91-Second photoelectric sensor, 92-Second protective mirror body. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.

[0031] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0033] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0035] Figure 1 This is a schematic diagram of the structure of a real-time feedback power detection device for high-power lasers according to an embodiment of the present invention, as shown below. Figure 1As shown, the equipment includes a first protective mirror detection device 1 located at the laser incident end and a second protective mirror detection device 9 located at the laser exit end inside the laser processing equipment. A reflector 3 is provided in the laser optical path between the first protective mirror detection device 1 and the second protective mirror detection device 9. After the laser passes through the first protective mirror detection device 1, it passes through the reflector 3. The reflector 3 reflects part of the laser beam as a first laser beam and refracts the other part as a second laser beam. The first laser beam reflected from the reflector 3 enters the second protective mirror detection device 9, and the second laser beam refracted from the reflector 3 enters the power detection device 5. The power detection device 5 performs real-time detection of the laser power during the laser processing.

[0036] Due to the inherent properties of the reflector material, a small portion of the light (energy) still passes through the lens during reflection. This transmitted laser light can be detected using a low-power laser power detection device, thereby indirectly enabling the detection of high-power laser power. When light passes through the reflector, most of it is reflected to the protective mirror at the output end of the laser processing equipment for laser processing. The remaining light passes through a beam splitter and is detected by the power detection device. The actual laser power is then calculated by the control system. The power detection device 5 in this embodiment preferably has a measurement range of 0~10KW.

[0037] Specifically, the first protective mirror detection device 1 includes a first protective mirror body 12 and a corresponding first photoelectric sensor 11, and the second protective mirror detection device 9 includes a first protective mirror body 92 and a corresponding second photoelectric sensor 91. The first photoelectric sensor 11 and the second photoelectric sensor 91 are used to detect whether the corresponding protective mirror surface is dirty. The photoelectric sensor is preferably connected to a corresponding alarm system, and both the photoelectric sensor and the alarm system are connected to the control system.

[0038] When the laser processing equipment is working normally, it is in a closed state, and the surface of its protective lens is clean. If the laser processing equipment is damaged and the sealing is affected, the surface of the protective lens may be covered by dust or metal debris splashed during operation. Due to the irregular shape of the dust and metal surface, the laser light will diffusely reflect after being irradiated. When the photoelectric sensor near the protective lens detects the reflected light, it will trigger an alarm in the control system, reminding the operator to replace the protective lens. This prevents splashes and dust from damaging the internal components and allows for troubleshooting of the problem.

[0039] Combination Figure 1 and Figure 2As shown, the optical path between the first protective mirror detection device 1 and the power detection device 5 is the first half of the optical path, and the optical path between the power detection device 5 and the second protective mirror detection device 9 is the second half of the optical path. If the power detection device 5 detects abnormal data and the first protective mirror detection device 1 alarms at the same time, it indicates that the protective mirror at the first protective mirror detection device 1 is damaged, thus locating the problem of the laser processing equipment to the first half of the optical path. Similarly, if the power detection device 5 detects abnormal data and the second protective mirror detection device 9 alarms at the same time, it indicates that the protective mirror at the second protective mirror detection device 9 is damaged, thus locating the problem of the laser processing equipment to the second half of the optical path.

[0040] It should be noted that the abnormal data detected by the power detection device 5 refers to data that exceeds the preset normal threshold range of laser power in the control system.

[0041] This invention employs a power detection device combined with a first protective mirror detection device 1 and a second protective mirror detection device 9 at both ends of a laser processing equipment. When a protective mirror is damaged, the control system will alarm, reminding personnel to replace the protective mirror and troubleshoot the problem. Power detection can be performed not only on the optical path (the first half of the optical path) between the first protective mirror detection device and the power detection device, but also on the optical path (the second half of the optical path) between the power detection device and the second protective mirror detection device, achieving full-process optical path detection within the high-power laser processing equipment. Therefore, this invention not only enables laser power detection but also allows for preliminary problem localization, narrowing the scope of troubleshooting and improving the efficiency of fault diagnosis.

[0042] The power detection device and the protective mirror detection device of this invention are two independently operating modules. When one of the power detection device or the protective mirror detection device needs adjustment due to damage to a core component or inability to promptly pinpoint the fault, the other module can temporarily serve as the detection module during laser processing, preventing major accidents and ensuring that the detection process continues uninterrupted. Dual detection significantly improves the safety of laser processing and reduces economic losses. Furthermore, this invention preferably standardizes the power detection device and the protective mirror detection device by providing several identical spare modules. When timely and effective repairs cannot be performed on-site, the corresponding module can be quickly removed and replaced with a spare module that is structurally, functionally, and aesthetically identical, enabling rapid restoration of normal operation and improving equipment interchangeability.

[0043] like Figure 3As shown, during high-power laser processing, the real-time feedback power detection device for high-power lasers of this invention forms a closed-loop system. The power detection device collects power data of the laser processing equipment during processing and feeds the data back to the control system. The control system diagnoses abnormal data and adjusts the laser power accordingly, preventing secondary damage caused by prolonged problems with the laser processing equipment, thus improving the safety of the laser processing equipment and improving processing quality. Furthermore, when the protective mirror is damaged, its transmittance is affected, and the energy of the transmitted laser continuously decreases, leading to a continuous increase in the energy of diffusely reflected laser irradiating the damaged area. Excessively high-energy diffusely reflected laser irradiating the sensor can damage it. Therefore, the aforementioned closed-loop control also protects the sensor.

[0044] The power detection device of this invention can monitor the laser throughout the entire process, tracking the power of the laser in the internal optical path of the laser processing equipment. Connected to the control system, the power detection device can calculate the laser processing power, and the control system can plot the corresponding power curve. If the power curve is abnormal, it indicates the aforementioned abnormal data. Therefore, this invention can perform detection and fault diagnosis by analyzing the power data recorded by the power detection device and tracing the power curve at the corresponding time. In large-scale laser processing, the power curve can be analyzed using existing analysis software, thereby enabling full-process quality inspection. By tracing the power curve at the corresponding time, defective products can be quickly identified.

[0045] In a preferred embodiment, a beam splitter 4 is also provided in the optical path between the reflector 3 and the power detection device 5 to split the second laser beam passing through the reflector 3 into a third laser beam and a fourth laser beam. The power detection device 5 is provided in the optical path of one of the laser beams, and the light energy absorption module 6 is provided in the optical path of the other laser beam.

[0046] For example, in such Figure 1 As shown, beam splitter 4 reflects the second laser beam into a third laser beam and refracts it into a fourth laser beam. Optical energy absorption module 6 is configured corresponding to the third laser beam, and power detection device 5 is configured corresponding to the fourth laser beam. However, it is understandable that optical energy absorption module 6 can be configured corresponding to the fourth laser beam, and vice versa. That is, power detection can be performed on both the refracted and reflected laser beams, and the remaining reflected or refracted laser beams can be absorbed by the optical energy absorption module.

[0047] Preferably, this invention adds a light energy absorption module 6 to the power detection device 5. This module absorbs the residual laser light after passing through the beam splitter 4, further preventing the residual laser light from affecting the laser processing equipment and improving safety. The light energy absorption module can be interchanged with the power detection device to absorb reflected and refracted laser light as needed. Of course, when the residual laser energy is weak, this structure can be omitted, resulting in higher integration of the laser processing equipment and improved applicability.

[0048] More preferably, a collimating mirror 2 is also provided in the optical path between the first protective mirror detection device 1 and the reflector 3, for calibrating the laser passing through the reflector 3 and improving the accuracy of laser processing.

[0049] More preferably, at least one reflector is further provided in the optical path between the reflector 3 and the second protective mirror detection device 9 to change the optical path, so that the laser reflected by the reflector 3 can smoothly enter the second protective mirror detection device 9. For example, as shown... Figure 1 As shown, a first-direction reflector 7 and a second-direction reflector 8 are provided in the optical path between the reflector 3 and the second protective mirror detection device 9, and the two sides are located on different planes, arranged in a three-dimensional form. Understandably, the specific number and placement of the reflectors can be adjusted according to the actual situation.

[0050] More preferably, a focusing lens 10 is also provided in the optical path near the second protective mirror detection device 9, which is beneficial for focusing the laser before it exits from the laser processing equipment.

[0051] by Figure 1 Taking the specific structure as an example, the laser transmission process of the real-time feedback power detection device for high-power lasers of the present invention is as follows: The laser emitted from the laser generator enters the first protective mirror body 12 and is detected in real time by the corresponding first photoelectric sensor 11, and then passes through the collimating lens 2 below the first protective mirror detection device 1 to reach the lower reflecting mirror 3. Most of the laser is reflected by the reflecting mirror 3 to the first direction reflecting mirror 7, and then reflected again to the second direction reflecting mirror 8. The second direction reflecting mirror 8 transmits the laser to the lower focusing mirror 10, and passes through the second photoelectric sensor 91 below the focusing mirror 10, finally reaching the surface of the workpiece; a small portion of the laser passes through the reflecting mirror 3 to reach the beam splitter 4. The beam splitter 4 delivers the transmitted laser to the lower power detection device 5 for power detection, and transmits the reflected laser to the light energy absorption module 6 on one side for absorption processing.

[0052] It should be noted that the laser processing equipment of the present invention includes, but is not limited to, laser-emitting processing equipment such as scanning galvanometers, brazing heads, laser cleaning heads, and oscillating heads, and its applicability is wide. The real-time feedback power detection device for high-power lasers of the present invention is entirely located inside the laser processing equipment. It can monitor the laser processing power to quickly locate and diagnose problems in the laser processing equipment, and indirectly detect the overall processing quality. Using the real-time feedback power detection device for high-power lasers of the present invention can effectively ensure the quality, efficiency, and safety of laser processing.

[0053] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A real-time feedback power detection device for high-power lasers, installed inside laser processing equipment, characterized in that, It includes a first protective mirror detection device (1) located at the laser incident end of the laser processing equipment and a second protective mirror detection device (9) located at the laser emitting end. The first protective mirror detection device (1) includes a first protective mirror body (12) and a first photoelectric sensor (11) corresponding to it. The second protective mirror detection device (9) includes a first protective mirror body (92) and a second photoelectric sensor (91) corresponding to it. The photoelectric sensor is used to detect whether the surface of the corresponding protective mirror is dirty. A reflector (3) is provided in the laser optical path between the first protective mirror detection device (1) and the second protective mirror detection device (9). The first laser beam reflected from the reflector (3) enters the second protective mirror detection device (9), and the second laser beam refracted from the reflector (3) enters the power detection device (5). The power detection device (5) combined with the protective mirror detection device can perform power detection on the first half of the optical path between the first protective mirror detection device (1) and the power detection device (5), and can also perform power detection on the second half of the optical path between the power detection device (5) and the second protective mirror detection device (9), and can locate the problem of the laser processing equipment in the first half of the optical path or the second half of the optical path. If the power detection device (5) detects abnormal data and the first protective mirror detection device (1) alarms, the problem of the laser processing equipment will be located in the first half of the optical path; If the power detection device (5) detects abnormal data and the second protective mirror detection device (9) alarms, the problem of the laser processing equipment will be located in the latter half of the optical path.

2. The real-time feedback power detection device for high-power lasers according to claim 1, characterized in that, The first photoelectric sensor (11) and the second photoelectric sensor (91) are connected to the corresponding alarm system.

3. The real-time feedback power detection device for high-power lasers according to claim 1 or 2, characterized in that, The power detection device (5) collects power data of the laser processing equipment during the processing and feeds the data back to the control system. The control system can diagnose abnormal data and make corresponding adjustments to the laser power to form a closed-loop control.

4. The real-time feedback power detection device for high-power lasers according to claim 3, characterized in that, The control system can draw the corresponding power curve. By analyzing the power data recorded by the power detection device (5), the power curve of the corresponding time can be traced for detection and fault diagnosis.

5. The real-time feedback power detection device for high-power lasers according to any one of claims 1, 2, and 4, characterized in that, In the optical path between the reflector (3) and the power detection device (5), a beam splitter (4) is also provided to divide the second laser beam into a third laser beam and a fourth laser beam. The power detection device (5) is provided in the optical path of one of the laser beams, and the light energy absorption module (6) is provided in the optical path of the other laser beam.

6. The real-time feedback power detection device for high-power lasers according to any one of claims 1, 2, and 4, characterized in that, A collimating lens (2) is also provided in the optical path between the first protective mirror detection device (1) and the reflector (3); and / or, At least one reflector is provided in the optical path between the reflector (3) and the second protective mirror detection device (9) to change the optical path so that the laser reflected by the reflector (3) can smoothly enter the second protective mirror detection device (9); and / or, a focusing lens (10) is provided in the optical path near the second protective mirror detection device (9).

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