Double telecentric optical lens
By designing a double telecentric optical lens and optimizing the lens combination and structure, the problems of insufficient transmittance and difficult processing and assembly of ultraviolet broadband lenses have been solved, achieving high-efficiency production and excellent imaging performance, which is suitable for the field of precision inspection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SUZHOU YUANZHUO OPTOELECTRONICS TECH CO LTD
- Filing Date
- 2023-12-29
- Publication Date
- 2026-06-09
AI Technical Summary
Existing ultraviolet narrow-band projection lithography lenses suffer from insufficient transmittance and difficulties in processing and assembly. In particular, the immature achromatic technology in the development of ultraviolet wide-band lenses makes mass production difficult.
Design a dual telecentric optical lens, including a front lens group and a rear lens group. The lens combination uses meniscus lenses, biconvex lenses, etc. By optimizing the optical power and radius of curvature of the lenses, the object-side and image-side telecentricity is achieved, chromatic aberration is eliminated, and the structure is simplified and the manufacturing difficulty is reduced by the symmetrical arrangement of the lenses.
It achieves high transmittance and good telecentricity in ultraviolet broadband optical lenses, reduces processing and assembly difficulty, improves production efficiency and lens output power, and meets the needs of precision testing.
Smart Images
Figure CN117784368B_ABST
Abstract
Claims
1. A double telecentric optical lens for use in the ultraviolet broadband band, characterized in that, include: The front lens group, aperture (13), and rear lens group are arranged sequentially along a straight line from the object side to the image side. The front lens group includes the following components arranged sequentially from the object side to the image side along a straight line: a first lens (1), which is a biconvex lens; a second lens (2), which is a biconvex lens; and a third lens (3), which is a meniscus lens. The fourth lens (4) is a meniscus lens; The fifth lens (5) is a biconvex lens; the sixth lens (6) is a biconcave lens; The rear lens group includes the following lenses arranged sequentially from the object side to the image side along a straight line: a seventh lens (7), which is a biconcave lens; an eighth lens (8), which is a biconvex lens; and a twelfth lens (12), which is a plano-convex lens; at least two lenses are arranged between the eighth lens (8) and the twelfth lens (12), one of which is a negative power lens and the other is a positive power lens. In the front lens group and the rear lens group, the concave surface of the meniscus lens faces the aperture stop, and the convex surface of the plano-convex lens faces the aperture stop. An eleventh lens (11), which is a biconvex lens, is disposed between the twelfth lens (12) and the lens adjacent to the twelfth lens (12); A ninth lens (9) and a tenth lens (10) are arranged sequentially between the eighth lens (8) and the eleventh lens (11). The second lens (2) and the eleventh lens (11) have the same lens structure. The third lens (3) and the tenth lens (10) have the same lens structure. The fourth lens (4) and the ninth lens (9) have the same lens structure, and all are arranged axially symmetrically with the aperture stop as the axis. The first lens (1), the second lens (2), the third lens (3), the fifth lens (5), the eighth lens (8), the tenth lens (10), the eleventh lens (11) and the twelfth lens (12) are all positive optical power, and the fourth lens (4), the sixth lens (6), the seventh lens (7) and the ninth lens (9) are all negative optical power.
2. The double telecentric optical lens according to claim 1, characterized in that: The side of each lens closest to the object side is designated as the object plane side, and the side closest to the image side is designated as the image plane side, wherein: The radius of the object-side surface of the first lens is 1026.019 mm. <1029.019mm, the radius of the first lens on the image plane side is 133.142mm. <136.142mm; The radius of the second lens on the object plane side is 112.364 mm. <115.364mm, the radius of the second lens on the image plane side is 280.018mm. <283.018mm; The radius of the object-side of the third lens is 35.665 mm. <38.665mm, the radius of the third lens on the image plane side is 155.408mm. <158.408mm; The radius of the fourth lens on the object side is 1498.5 mm. <1501.5mm, the radius of the fourth lens on the image plane side is 23.089mm. <26.089mm; The radius of the fifth lens on the object side is 41.010 mm. <44.010mm, the radius of the fifth lens on the image plane side is 47.137mm. <50.137mm; The radius of the object-side of the sixth lens is 61.149 mm. <64.1491mm, the radius of the sixth lens on the image plane side is 41.343mm. <44.343mm; The radius of the seventh lens on its object side is 40.340 mm. <43.340mm, the radius of the seventh lens on the image plane side is 58.487mm. <61.487mm; The radius of the eighth lens on its object side is 46.788 mm. <49.788mm, the radius of the image plane side of the eighth lens is 37.037mm. <40.037mm; The radius of the object-side surface of the ninth lens is 23.089 mm. <26.089mm, the radius of the image plane side of the ninth lens is 1498.5mm. <1501.5mm; The radius of the object-side surface of the tenth lens is 155.408 mm. <158.408mm, the radius of the image plane side of the tenth lens is 35.665mm. <38.665mm; The radius of the eleventh lens on its object side is 280.018 mm. <283.018mm, the radius of the eleventh lens on the image plane side is 112.364mm. <115.364mm; The radius of the object-side surface of the twelfth lens is 101.954 mm. <104.954mm.
3. The double telecentric optical lens according to claim 1, characterized in that: The thickness of the first lens The range is 19.5mm. <20.5mm, the spacing between the first lens and the second lens The range is 62.28 mm. <63.28mm; The thickness of the second lens The range value is 9.05mm< <10.05mm, the spacing between the second lens and the third lens The range value is 0.18mm< <0.38mm; The thickness of the third lens The range is 11.6mm. The distance between the third lens and the fourth lens is less than 12.6 mm. The range is 5.28mm. <6.28mm; The thickness of the fourth lens The range is 7.56mm. <8.56mm, the spacing between the fourth lens and the fifth lens The range is 15.55mm. <16.55mm; The thickness of the fifth lens The range is 6.97mm. <7.97mm, the spacing between the fifth lens and the sixth lens The range is 0.1mm< <0.3mm; The thickness of the sixth lens The range is 2.45mm. The distance between the sixth lens and the seventh lens is less than 3.45mm. The range is 5.05mm. <6.05mm; The thickness of the seventh lens The range is 2.48mm. The distance between the seventh lens and the eighth lens is less than 3.48 mm. The range is 0.1mm< <0.3mm; The thickness of the eighth lens The range value is 8.03mm< <9.03mm, the interval between the eighth lens and the ninth lens The range value is 15.05mm. <16.05mm; The thickness of the ninth lens The range is 7.56mm. <8.56mm, the spacing between the ninth lens and the tenth lens The range is 6.24 < <7.24mm; The thickness of the tenth lens The range is 11.6mm. The distance between the tenth lens and the eleventh lens is less than 12.6 mm. The range is 0.18< <0.38mm; The thickness of the eleventh lens The range value is 9.05mm< The distance between the eleventh lens and the twelfth lens is less than 10.05 mm. The range value is 26.92< <27.92mm; The thickness of the twelfth lens The range is 19.5mm. <20.5mm.
4. The double telecentric optical lens according to claim 2, characterized in that: The distance from the object side to the image side is 489.43 mm, the distance between the side of the first lens near the object side and the object side is 126.03 mm, the distance between the side of the twelfth lens near the image side and the image side is 101.47 mm, the effective field of view of the image side of the dual telecentric optical lens is φ19.2 mm, the numerical aperture of the image side is 0.15, and the magnification is set to -0.80X.
5. The double telecentric optical lens according to claim 1, characterized in that: The distance from the object side to the image side is less than 498 mm, the distance between the side of the first lens closest to the object side and the object side is greater than 120 mm, and the distance between the side of the twelfth lens closest to the image side and the image side is greater than 100 mm; the wavelength range of the optical lens is 365 nm ≤ λ ≤ 405 nm.
6. The double telecentric optical lens according to claim 1, characterized in that: The air gap between the fourth lens (4) and the fifth lens (5) is the fourth distance. The distance between the sixth lens (6) and the seventh lens (7) is the fifth distance. And the fourth distance Distance to the fifth The ratio between them is not less than 3; The radii of curvature of the fifth lens (5) are respectively , The radii of curvature of the sixth lens (6) are respectively , The ratio between the sum of the radii of curvature of the fifth lens (5) and the sum of the radii of curvature of the sixth lens (6) is between 0.3 and 0.35, i.e., 0.3 ≤ ( + ) / ( + ≤0.35; The focal length of the fourth lens (4) and the focal length of the sixth lens (6) The ratio between the two, the focal length of the ninth lens (9) and the focal length of the seventh lens (7) The ratio between the two ratios, and the sum of the two ratios, is between 2 and 3, i.e., 2 ≤ / + / ≤3; The focal length of the third lens (3) and the focal length of the fifth lens (5) The ratio between the two, the focal length of the tenth lens (10) and the focal length of the eighth lens (8) The ratio between the two values, and the sum of the two values, must be between 4 and 4.5, i.e., 4 ≤ / + / ≤4.5; The radii of curvature of the fourth lens (4) are respectively , The radii of curvature of the tenth lens (10) are respectively , The ratio between the sum of the radii of curvature of the fourth lens (4) and the sum of the radii of curvature of the tenth lens (10) is between -8 and -7, i.e., -8 ≤ ( + ) / ( + )≤-7.
7. The double telecentric optical lens according to claim 1, characterized in that: The fifth lens, the sixth lens, the seventh lens, and the eighth lens each constitute an adhesive lens.
8. The double telecentric optical lens according to claim 1, characterized in that: The focal length of the rear lens group 后 and the focal length of the front lens group 前 The ratio between them is the same as or approximately the same as the magnification of the dual telecentric optical lens; Based on the required target magnification, the object-image relationship of the dual telecentric optical lens is changed and / or the lens of the dual telecentric optical lens is adjusted, and the lens adjustment includes adjusting the radius of curvature and / or spacing of the lens.