Planetary gear type ultra-precision grinding and polishing device and method for precision ball parts

Abstract

This invention discloses a planetary gear-type ultra-precision grinding and polishing device and method for precision ball parts, belonging to the field of ultra-precision machining technology. The grinding and polishing device includes a polishing section, a lower planetary gear polishing section, and a liquid circulation system. The upper polishing section includes an upper rotating part, an upper slip ring, an upper fixed ring-shaped part, and an upper annular polishing pad; the lower part includes several porous planetary gear disks, a lower annular polishing pad, a gear ring, a lower outer support structure, a lower inner support structure, a sun gear shaft, a slip ring, several gear ring / outer support structure connectors, and several polishing ring sleeves. Polishing ring sleeves are installed in several through holes in the planetary gear disks, and the precision ball parts to be processed are installed in the polishing ring sleeves. During the processing of the precision ball parts, the polishing liquid continuously circulates in the internal passage, enabling the precision ball parts to complete ultra-precision surface processing under purely mechanical or chemical-mechanical action.

Description

Technical Field

[0001] This invention belongs to the field of ultra-precision machining technology and is mainly applied to the ultra-precision grinding and polishing of the surface of precision ball parts. In particular, it relates to a grinding and polishing device and method for the surface of precision ball parts. Background Technology

[0002] Precision ball parts are key components in precision valves, precision bearings, and other precision devices, and are widely used in precision machine tools, aerospace, and other fields. Therefore, research on the machining technology of precision balls made of hard and brittle materials is of significant practical importance. On the one hand, the inherent characteristics of hard and brittle precision balls—high brittleness, low fracture toughness, high stiffness, and high hardness—make surface machining extremely difficult, and the machining process easily introduces severe surface and subsurface damage, greatly affecting machining accuracy and post-machining surface quality. On the other hand, the actual production process of precision ball parts demands high surface accuracy, high shape accuracy, and high surface integrity. Therefore, to overcome the current problems in the machining of precision ball parts, such as machining damage and defects, low machining efficiency, and low machining accuracy, further research is needed on ultra-precision machining methods for precision ball parts to achieve high precision, high machining consistency, and high efficiency. Summary of the Invention

[0003] This invention provides a planetary gear-type ultra-precision grinding and polishing device and method for precision ball parts, which can realize ultra-precision batch processing of precision ball parts.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A planetary gear-type ultra-precision grinding and polishing device for precision ball parts includes an upper rotating part and a planetary gear disk. An upper annular polishing pad is fixed on the lower surface of the upper rotating part. The planetary gear disk is located below the upper annular polishing pad, and a lower annular polishing pad is disposed below the planetary gear disk. The lower annular polishing pad is installed on the upper end face of the lower inner support structure.

[0006] The planetary gear disk has several mounting holes, and a polishing ring is provided in the mounting holes;

[0007] The upper rotating part includes a main body, the upper end of which is fixed with a rotating stepped shaft load-bearing part. The top of the main body is provided with an annular groove, and the interior is provided with a rotating stepped shaft cavity communicating with the annular groove. The lower end of the rotating stepped shaft cavity is provided with a rotating stepped shaft lower surface through hole.

[0008] The planetary gear disk meshes with the sun gear shaft and the gear ring; the gear ring and the lower inner support structure are both installed on the lower outer support structure; the lower outer support structure has an open cavity, and the bottom of the open cavity has a through hole on the bottom surface of the outer support structure cavity.

[0009] Furthermore, the upper annular polishing pad, the lower annular polishing pad, and the polishing ring are all polishing pads based on elastic materials.

[0010] Furthermore, the load-bearing part of the rotating stepped shaft is connected to the upper fixed ring part through the upper slip ring. The upper fixed ring part, the upper slip ring, the upper rotating part and the upper ring polishing pad are coaxially engaged. The upper fixed ring part has a through hole that runs vertically through the ring part and the through hole communicates with the ring groove.

[0011] Furthermore, the annular part's through-hole is connected to the outlet of a control valve via a pipeline, and a flow control pump is installed on the pipeline. The first inlet of the control valve is connected to the outlet of the polishing fluid storage tank via a pipeline, and the second inlet of the control valve is connected to the outlet of the cleaning fluid storage tank via a pipeline.

[0012] Furthermore, the central shaft of the sun gear shaft passes through the central through hole of the inner support structure, the inner layer of the sliding ring, and the outer layer of the sliding ring. The inner layer of the sliding ring and the outer layer of the sliding ring are connected by the intermediate layer of the sliding ring. The outer layer of the sliding ring is fixed to the lower part of the central through hole of the inner support structure. The inner layer of the sliding ring and the central shaft of the sun gear shaft are fixedly connected.

[0013] Furthermore, a conical recess is provided at the center of the upper surface of the sun gear shaft; an auxiliary centering and leveling accessory is fixed at the lower end of the upper rotating part, and the taper of the recess is the same as the taper of the conical surface of the accessory.

[0014] Furthermore, the bottom hole of the outer support structure chamber is connected to the inlet of the waste liquid collection and treatment device through a pipe, and the outlet of the waste liquid collection and treatment device is connected to the inlet of the polishing liquid storage tank and the inlet of the cleaning liquid storage tank.

[0015] Furthermore, the polishing ring is cylindrical.

[0016] A method for grinding and polishing precision ball parts, based on the above-mentioned grinding and polishing apparatus, includes the following steps:

[0017] Step 1: Install the precision ball part to be processed into the through-hole polishing ring;

[0018] Step 2: Bring the upper annular polishing pad close to the precision ball part to be processed until the upper annular polishing pad contacts the precision ball part to be processed;

[0019] Step 3: Make the polishing liquid come into contact with the precision ball part to be processed. At the same time, the precision ball part to be processed and the upper ring polishing pad, the lower ring polishing pad and the polishing ring sleeve will move relative to each other, so that the surface material of the precision ball part to be processed is removed and the removed material is carried away with the flow of polishing liquid.

[0020] Furthermore, step 3 includes the following actions performed simultaneously:

[0021] Action A: The upper rotating parts and the upper annular polishing pad rotate according to the set speed and direction;

[0022] Action B: The sun gear shaft of the lower part of the grinding and polishing device rotates according to the set speed and direction; the planetary gear revolves around the sun gear shaft and rotates on its own axis under the constraint transmission of the gear ring, driving the precision ball part to be processed to roll in the polishing ring.

[0023] Action C: The polishing slurry is delivered to the planetary gear disk of porous material, so that the polishing slurry comes into contact with the surface of the precision ball part to be processed. The relative movement between the precision ball part to be processed and the upper annular polishing pad, the lower annular polishing pad, and the polishing ring sleeve causes the surface material of the precision ball part to be processed to be mechanically or chemically mechanically removed. Then the polishing slurry carrying the removed material is discharged from the through hole at the bottom of the outer support structure chamber.

[0024] Compared with the prior art, the present invention has at least the following beneficial technical effects:

[0025] 1) Building upon the polishing effect achieved by the upper and lower annular polishing pads, the installation of polishing rings inside the through holes on the planetary gear disk results in a more uniform machining effect on the precision ball parts, improving the consistency of the machining results. Furthermore, the upper and lower annular polishing pads and the polishing rings are all made of elastic materials, enabling them to maintain closer contact with the precision ball parts under applied loads, thus achieving better machining results and higher machining efficiency.

[0026] 2) The planetary gear disk has several through holes for accommodating precision ball parts to be processed, which enables batch processing of precision ball parts.

[0027] 3) The auxiliary centering and leveling accessory can complete the centering and leveling of the upper and lower parts of the planetary gear-type precision ball part grinding and polishing device before the precision ball parts are processed, thus achieving the calibration purpose. Furthermore, the auxiliary centering and leveling accessory is a detachable component, used only during the calibration stage before the device operates, and will not affect the processing procedure.

[0028] 4) The planetary gear type precision ball part grinding and polishing device uses an upper slip ring and a lower slip ring to distinguish the motion state of different parts, thereby avoiding the problem of external pipe entanglement during the processing.

[0029] 5) The complete flow of liquid inside and outside the device can meet the needs of continuous supply of polishing fluid or grinding fluid in chemical mechanical or mechanical polishing of precision ball parts to be processed, the cleaning needs of the device after the processing is completed, the control needs of liquid type and liquid flow rate, and the collection and treatment needs of waste liquid in the external flow path.

[0030] 6) The polishing apparatus provided by this invention can be used not only for chemical mechanical polishing but also for mechanical polishing. When the polishing apparatus is used for chemical mechanical polishing, during the operation phase, the liquid in the liquid passage is a polishing slurry containing oxidizing substances. The oxidizing substances in the polishing slurry are used for oxidative modification of the surface of the workpiece to be processed. The polishing slurry contains, but is not limited to, oxidizing substances, as well as complex components such as solvents and lubricants. When the polishing apparatus is used for mechanical polishing, during the operation phase, the liquid in the liquid passage is an abrasive slurry that does not contain oxidizing substances. The abrasive slurry does not contain oxidizing substances and does not produce a surface modification effect on the surface of the workpiece to be processed. The abrasive slurry is composed of complex components such as solvents and lubricants.

[0031] The polishing method provided by this invention is based on mechanical polishing or chemical mechanical polishing. During chemical mechanical polishing, the surface of the precision ball part is oxidized and modified by the oxidizing substances in the polishing solution, generating a soft modified layer. This soft modified layer is simultaneously removed by a soft polishing pad and polishing ring, without damaging the precision ball part itself. This helps reduce damage and defects during the processing of precision ball parts. Attached Figure Description

[0032] Figure 1a This is a 3D view of the rotating upper part;

[0033] Figure 1b This is a top view of the upper rotating part;

[0034] Figure 1c This is a sectional view of the upper rotating part;

[0035] Figure 1d This is the bottom view of the upper rotated part;

[0036] Figure 2a This is a 3D view of the upper slip ring;

[0037] Figure 2b This is a cross-sectional view of the slide.

[0038] Figure 3a This is a three-dimensional view of the upper fixed ring-shaped part;

[0039] Figure 3b This is a cross-sectional view of the upper fixed ring-shaped part;

[0040] Figure 4 This is a 3D view of the upper ring-shaped polishing pad;

[0041] Figure 5 This is a cross-sectional view of the upper assembly of the grinding and polishing device and a schematic diagram of the liquid flow direction.

[0042] Figure 6 3D view of the lower annular polishing pad;

[0043] Figure 7 This is a 3D view of the gear ring;

[0044] Figure 8a This is a cross-sectional view of the lower external support structure;

[0045] Figure 8b This is a three-dimensional view of the lower external support structure;

[0046] Figure 9a This is a three-dimensional view of the lower internal support structure;

[0047] Figure 9b This is a top view of the lower internal support structure;

[0048] Figure 9c This is a bottom view of the lower internal support structure;

[0049] Figure 10a A 3D view of the sun gear shaft;

[0050] Figure 10b Top view of the sun gear shaft;

[0051] Figure 10c View of the sun gear shaft and bottom;

[0052] Figure 11a A 3D view of the glide loop;

[0053] Figure 11b This is a cross-sectional view of the glide loop;

[0054] Figure 12 This is a cross-sectional view of the lower assembly of the grinding and polishing device and a schematic diagram of the liquid flow direction.

[0055] Figure 13 This is a top view of the lower assembly of the grinding and polishing device.

[0056] Figure 14a A 3D view of the precision sphere to be processed;

[0057] Figure 14b A three-dimensional view of the polishing ring;

[0058] Figure 14c A three-dimensional view of the planetary gear disk;

[0059] Figure 15a Schematic diagrams and enlarged views of different assembly configurations of the precision ball, polishing ring, and planetary gear disk to be machined;

[0060] Figure 15b for Figure 15a Cross-sectional view of AA;

[0061] Figure 16a To assist in the 3D model of the centering and leveling components;

[0062] Figure 16b Top view of the centering and leveling components;

[0063] Figure 16c Bottom view of the alignment and leveling components;

[0064] Figure 17 A cross-sectional view of the upper assembly with an auxiliary centering and leveling device installed;

[0065] Figure 18 This is a cross-sectional view of the upper and lower parts of the grinding and polishing device being aligned and leveled.

[0066] Figure 19 This is a cross-sectional view of the upper and lower parts of the grinding and polishing device and a schematic diagram of the liquid flow direction.

[0067] Figure 20 An overall 3D view and liquid flow diagram including the liquid (polishing liquid / cleaning liquid) storage tank, control valves, flow control pump, external piping and polishing device.

[0068] In the attached diagram: 1. Upper rotating part; 1-1. Load-bearing part of the rotating stepped shaft; 1-2. Annular groove; 1-3. Connecting hole of the rotating stepped shaft; 1-4. Through hole on the lower surface of the rotating stepped shaft; 1-5. Rotating stepped shaft chamber; 1-5-1. Inclined surface of the rotating stepped shaft chamber; 1-6. Lower surface of the upper rotating part; 2. Upper slip ring; 2-1. Outer layer of the upper slip ring; 2-2. Middle layer of the upper slip ring; 2-3. Inner layer of the upper slip ring; 3. Upper fixed annular part; 3-1. Through hole of the annular part; 3-1-1. Lower part of the through hole of the annular part. Part 1; 3-2, Inner side of the annular part; 4, Upper annular polishing pad; 4-1, Upper surface of the upper annular polishing pad; 4-2, Lower surface of the upper annular polishing pad; 5, Planetary gear disk; 5-1, Mounting hole; 6, Lower annular polishing pad; 6-1, Upper surface of the lower annular polishing pad; 6-2, Lower surface of the lower annular polishing pad; 6-3, Inner side of the lower annular polishing pad; 6-4, Outer side of the lower annular polishing pad; 7, Gear ring; 7-1, Gear ring connecting hole; 8, Lower part outer support structure; 8-1, Through hole on the bottom surface of the outer support structure chamber; 8-2, Outer support structure 8-3. Connecting hole; 8-4. Inner surface of the central through hole of the outer support structure; 8-5. Open cavity; 8-6. Inner inclined surface of the open cavity; 8-7. Outer flange; 9. Lower part of the inner support structure; 9-1. Central through hole of the inner support structure; 9-2. Outer surface of the inner support center shaft; 9-3. Upper surface of the inner support structure; 9-4. Upper side of the inner support structure; 10. Sun gear shaft; 10-1. Recess; 10-2. Central shaft; 11. Sliding ring; 11-1. Outer layer of the sliding ring; 11-2. Middle layer of the sliding ring; 11-3. Sliding... 12. Inner ring; 13. Gear ring / outer support structure connector; 14. Flow control pump; 15. Flow control pump inlet; 16. Flow control pump outlet; 17. Polishing fluid storage tank; 18. Cleaning fluid storage tank; 19. Control valve; 10. Cleaning fluid / control valve inlet; 11. Polishing fluid / control valve inlet; 12. Control valve outlet; 13. Storage tank protective shell; 14. Collection and treatment of polishing fluid / polishing fluid storage tank inlet; 15. Collection and treatment of cleaning fluid / cleaning fluid storage tank inlet; 18-1, First external pipeline; 18-2, Second external pipeline; 18-3, Third external pipeline; 18-4, Fourth external pipeline; 18-5, Fifth external pipeline; 18-6, Sixth external pipeline; 18-7, Seventh external pipeline; 18-8, Eighth external pipeline; 20, Precision ball part to be processed; 21, Polishing ring; 21-1, Inner surface of polishing ring; 21-2, Outer surface of polishing ring; 22, Auxiliary centering and leveling accessories; 22-1, Accessory connecting hole; 22-2, Accessory conical surface; 23, Accessory connector. Detailed Implementation

[0069] To make the objectives and technical solutions of this invention clearer and easier to understand, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. The specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention.

[0070] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more. In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0071] Example 1

[0072] This invention presents a planetary gear-type ultra-precision grinding and polishing device for precision ball parts (hereinafter referred to as the planetary gear-type precision ball part grinding and polishing device) based on a planetary gear structure. This device is capable of batch processing. Corresponding designs were made for the alignment of the upper and lower parts of the device, the flow pipelines for the supply and collection of liquids (polishing fluid, cleaning fluid, etc.), and the prevention of entanglement in the external pipelines. The parts and structures are connected by bolts and other connectors to ensure the expected connection and movement relationships; these connectors are referred to as connectors in the following text.

[0073] The planetary gear type precision ball part grinding and polishing device is equipped with a complete liquid passage for the supply and collection of liquids (polishing fluid and cleaning fluid, etc.); the parts and structures are connected by bolts and other connectors to ensure the expected connection and movement relationship, which are collectively referred to as connectors below.

[0074] Please refer to Figure 18 , Figure 19 and Figure 20The planetary gear type precision ball part polishing device of the present invention includes an upper part, a lower part and a complete liquid (polishing liquid and cleaning liquid) passage.

[0075] Please refer to Figure 5 The upper part of the planetary gear type precision ball part grinding and polishing device of the present invention includes: an upper rotating part 1, an upper slip ring 2, an upper fixed ring part 3, and an upper ring polishing pad 4.

[0076] Please refer to Figure 12 , Figure 13 , Figure 15a and Figure 15b The lower part of the planetary gear type precision ball part grinding and polishing device of the present invention includes: several planetary gear disks 5, a lower annular polishing pad 6, a gear ring 7, a lower outer support structure 8, a lower inner support structure 9, a sun gear shaft 10, a lower sliding ring 11, several gear ring / outer support structure connecting parts 12, and several polishing ring sleeves 21.

[0077] The planetary gear disk is made of a porous material;

[0078] The lower outer support structure 8 has a cup-shaped open cavity 8-4. A through hole is located at the center of the lower outer support structure on the bottom surface of the outer support structure cavity. The lower inner support structure 9 is coaxially installed within the through hole 8-1 on the bottom surface of the outer support structure cavity. There is an annular gap between the lower inner support structure 8 and the lower outer support structure 9. The bottom of the open cavity 8-4 has the through hole 8-1 on the bottom surface of the outer support structure cavity.

[0079] The planetary gear disk 5 is connected to the annular gap; the annular gap is connected to the open chamber 8-4 of the lower outer support structure; the open chamber 8-4 is connected to the eighth external pipeline 18-8 through the bottom through hole 8-1 of the outer support structure chamber, and the eighth external pipeline 18-8 is connected to the waste liquid collection and treatment device.

[0080] Please refer to Figure 17 and Figure 18 The alignment and leveling of the upper and lower parts of the planetary gear type precision ball part grinding and polishing device of the present invention requires the assistance of an auxiliary alignment and leveling accessory 22 and several accessory connectors 23.

[0081] Please refer to Figure 20The present invention relates to an overall liquid passage for a planetary gear-type precision ball part grinding and polishing device, used for the supply and collection of liquids (polishing fluid and cleaning fluid, etc.), meeting the needs of continuous supply of polishing fluid during processing and continuous supply of cleaning fluid during the cleaning process of the grinding and polishing device after processing. The overall liquid passage includes two parts: an external passage and an internal passage. The internal passage is characterized by liquid flowing in from the upper part of the annular part through-hole 3-1 and flowing out from the through-hole 8-1 on the bottom surface of the outer support structure chamber. The external passage includes: a flow control pump 13, a polishing fluid storage tank 14, a cleaning fluid storage tank 15, a control valve 16, a storage tank protective shell 17, several external pipelines 18, and a liquid collection and processing device. The storage tank protective shell 17 has an inlet 17-1 for collecting and processing polishing fluid / polishing fluid storage tank and an inlet 17-2 for collecting and processing cleaning fluid / cleaning fluid storage tank.

[0082] The polishing slurry storage tank is used to store the polishing slurry, and a stirring function is activated during processing to ensure the uniformity of the polishing slurry component distribution; the cleaning slurry storage tank is used to store the cleaning slurry.

[0083] Control valve 16 is used to regulate the type of liquid flowing through the entire liquid passage, including three states:

[0084] State 1 allows polishing fluid to flow, State 2 allows cleaning fluid to flow, and State 3 is the closed state.

[0085] The flow control pump 13 is used to control the flow rate of polishing fluid and cleaning fluid.

[0086] Waste liquid collection and treatment device is used to collect and treat polishing waste liquid and cleaning waste liquid generated during the processing (including filtration and reactivation, etc.) for recycling and reuse of polishing liquid and cleaning liquid.

[0087] The flow control pump 13 is connected to the upper part of the annular part through hole 3-1 through the external pipeline 18-6; the lower part of the annular part through hole 3-1 is connected to the annular groove 1-2; the annular part through hole 3-1 and the annular groove 1-2 are connected to the rotating stepped shaft chamber 1-5.

[0088] The planetary gear type precision ball part grinding and polishing device of the present invention is not limited to the ultra-precision chemical mechanical polishing process of precision ball parts. The upper annular polishing pad 4 and the lower annular polishing pad 6 mentioned therein can be replaced by grinding discs, etc., and the polishing liquid can be replaced by grinding liquids, etc., so that the planetary gear type precision grinding and polishing device of the present invention can be used for ultra-precision grinding and other processes of precision ball parts.

[0089] The assembly relationship between the upper and lower parts of the planetary gear type precision ball part grinding and polishing device of the present invention is explained.

[0090] Please refer to Figures 1a to 1b , Figure 2a , Figure 2b , Figure 3a , Figure 3b , Figure 4 and Figure 5 The upper fixed annular part 3, the upper sliding ring 2, the upper rotating part 1, and the upper annular polishing pad 4 are coaxially fitted; the inner surface 3-2 of the annular part and the outer surface 2-1 of the upper sliding ring are coaxially fitted; the outer surface of the load-bearing part 1-1 of the upper rotating stepped shaft and the inner surface of the inner layer 2-3 of the upper sliding ring are coaxially fitted; the lower surface of the upper fixed annular part 3, the lower surface of the upper sliding ring 2, and the upper surface of the upper rotating part 1 are overlapped and fitted; the upper surface 4-1 of the upper annular polishing pad and the lower surface 1-6 of the upper rotating part are overlapped and fitted. The upper annular polishing pad 4 is coaxially adsorbed onto the lower surface of the upper rotating part 1. In the working state, the lower surface 4-2 of the upper annular polishing pad is in contact with the part to be processed.

[0091] Reference Figure 1a The upper rotating part 1 has an annular groove 1-2 at the top, a rotating stepped shaft cavity 1-5 inside, and a rotating stepped shaft connecting hole 1-3 and a rotating stepped shaft lower surface through hole 1-4 on the lower surface.

[0092] Reference Figure 3a and Figure 3b The upper fixed ring-shaped part 3 has a through hole 3-1 that runs vertically through it.

[0093] Please refer to Figure 6 , Figure 7 , Figure 8a , Figure 8b , Figure 9a , Figure 9b , Figure 9c , Figure 10a , Figure 10b , Figure 10c , Figure 11a , Figure 11b and Figure 12The lower annular polishing pad 6, gear ring 7, lower inner support structure 9, lower outer support structure 11, sun gear shaft 10, and lower sliding ring 11 are coaxially fitted. The thickness of gear ring 7 is the same as the height of the outer flange 8-5 of the lower outer support structure 8. Gear ring 7 and lower outer support structure 8 are connected as a whole by gear ring / outer support structure connector 12 at the gear ring connecting hole 7-1 and the outer support structure connecting hole 8-2. The inner surface 8-3 of the central through hole of outer support structure 8 and the outer surface 9-2 of the central shaft of inner support structure are coincidentally fitted. The lower inner support structure 9 has a central through hole 9-1 at the center position. The inner surface of the central through hole 9-1 of inner support structure is coincidentally fitted with the outer surface of the outer layer 11-1 of lower sliding ring. Sun gear shaft 10 is coaxially installed in the central through hole 9-1 of inner support structure through lower sliding ring 11. The outer surface of the central shaft 10-2 of the sun gear shaft 10 and the inner surface of the inner layer 11-3 of the lower sliding ring 11 are overlapped and fitted; the lower annular polishing pad 6 is coaxially adsorbed on the upper surface of the lower inner support structure 9.

[0094] Reference Figure 6 , Figure 9a , Figure 9b , Figure 9c , Figure 10a The outer side 6-4 of the lower annular polishing pad and the upper side 9-4 of the inner support structure are overlapped and fitted together; the inner side 6-3 of the lower annular polishing pad and the outer surface of the central shaft 10-2 of the sun gear shaft 10 are overlapped and fitted together.

[0095] The lower surface 6-2 of the lower annular polishing pad and the upper surface 9-3 of the lower inner support structure are coincidentally fitted; the sun gear shaft 10 and the planetary gear disk 5 are externally tangently fitted on the pitch circle; the gear ring 7 and the planetary gear disk 5 are internally tangently fitted on the pitch circle; the lower surface of the planetary gear disk 5 and the upper surface 6-1 of the lower annular polishing pad are coincidentally fitted; to ensure that the liquid flows out from the annular gap between the lower inner support structure 9 and the open chamber 8-4, the upper surface of the planetary gear disk 5 installed on the lower annular polishing pad 6 is slightly lower than the upper surface of the outer flange 8-5.

[0096] The invention describes how the upper and lower parts of the planetary gear-type precision ball part grinding and polishing device prevent external pipes from getting tangled during rotation.

[0097] Please refer to Figure 2a , Figure 2b , Figure 11a and Figure 11b The upper slip ring 2 and the lower slip ring 11 are an integral part. To illustrate this more clearly, the upper slip ring 2 and the lower slip ring 11 are divided into three parts: the inner layer 2-3 of the upper slip ring / the inner layer 11-3 of the lower slip ring, the outer layer 2-1 of the upper slip ring / the outer layer 11-1 of the lower slip ring, and the middle layer 2-2 of the upper slip ring / the middle layer 11-2 of the lower slip ring. The presence of the middle layer allows the outer layer and the inner layer to be in different motion states.

[0098] Please refer to Figure 1c , Figure 2b and Figure 5 The upper part of the planetary gear type precision ball part grinding and polishing device of the present invention adopts an upper slip ring 2, wherein the outer layer 2-1 of the upper slip ring and the upper fixed ring part 3 are connected into a whole, and this part is stationary relative to the external environment; the inner layer 2-3 of the upper slip ring and the load-bearing part 1-1 of the rotating stepped shaft are connected into a whole, and by applying an external rotational load to the load-bearing part 1-1 of the rotating stepped shaft, a rotational state relative to the external environment can be achieved.

[0099] Reference Figure 2a and Figure 2b The upper slip ring 2 allows the movement states of the upper fixed ring part 3 and the upper rotating part connected to the external pipeline to be distinguished, thus avoiding the occurrence of the external pipeline getting tangled during the rotation of the upper part of the device.

[0100] The upper fixed ring part 1 is connected to an external pipeline and is stationary relative to the external environment; the rotating stepped shaft load-bearing part 1-1 is subjected to a rotational load and is in a state of rotational motion relative to the external environment.

[0101] Please refer to Figure 9a , Figure 9b , Figure 9c , Figure 10a , Figure 11b and Figure 12 The lower part of the planetary gear type precision ball part grinding and polishing device of the present invention adopts a sliding ring 11, wherein the outer layer 11-1 of the sliding ring and the central through hole 9-1 of the inner support structure are connected into a whole, and this part is stationary relative to the external environment; the inner layer 11-3 of the sliding ring and the central shaft 10-2 of the sun gear shaft 10 are connected into a whole, and the rotational motion state relative to the external environment is achieved by applying a rotational load to the sun gear shaft 10.

[0102] The sliding ring 11 allows for the differentiation of the movement states of the lower outer support structure 8 connected to the external pipeline, the lower inner support structure 9 with the lower annular polishing pad 6 adsorbed, and the sun gear shaft, thus preventing the external pipeline from getting tangled during the rotational movement of the lower part of the device.

[0103] The lower outer support structure and the lower inner support structure are in a static state relative to the external environment; a rotational load is applied to the sun gear shaft, which is in a state of rotational motion relative to the external environment.

[0104] Please refer to Figure 2a , Figure 2b , Figure 11a and Figure 11bThe present invention employs upper and lower sliding rings, each consisting of three layers: outer, middle, and inner. The middle layer and the inner and outer layers are in rotational sliding contact, serving to distinguish the motion states of the inner and outer layers. The outer layer 2-1 of the upper sliding ring and the outer layer 11-1 of the lower sliding ring constitute the 'stator'; the inner layer 2-3 of the upper sliding ring and the inner layer 11-3 of the lower sliding ring constitute the 'rotor'; the inner side of the middle layer 2-2 of the upper sliding ring is connected to the inner layer 2-3 of the upper sliding ring, and the outer side of the middle layer 2-2 of the upper sliding ring is connected to the outer layer 2-1 of the upper sliding ring; the inner side of the middle layer 11-2 of the lower sliding ring is connected to the inner layer 11-3 of the lower sliding ring, and the outer side of the middle layer 11-2 of the lower sliding ring is connected to the outer layer 11-1 of the lower sliding ring.

[0105] Please refer to Figure 5 , Figure 12 and Figure 20 In this invention, the upper part of the fixed annular part 3 of the planetary gear type precision ball part grinding and polishing device is connected to the sixth external pipeline 18-6 via the annular part through hole 3-1. The two external support structure chamber bottom through holes 8-1 of the lower part of the external support structure 8 are respectively connected to the seventh external pipeline 18-7 and the eighth external pipeline 18-8. Based on the above description, it can be seen that under the action of the upper sliding ring 2 and the lower sliding ring 11, the upper fixed annular part 3 and the lower external support structure 8 remain stationary relative to the external environment during the processing of the precision ball part 20, thus avoiding the situation where the external pipeline 18-X becomes entangled with the device during processing.

[0106] The transmission of the lower part of the planetary gear type precision ball part grinding and polishing device of the present invention, including the sun gear shaft 10, planetary gear disk 5 and gear ring 7 / lower part outer support structure 8, is described.

[0107] The sun gear shaft, the planetary gear disk, the gear ring, and the lower external support structure constitute the planetary gear transmission structure of the precision ball milling and polishing device.

[0108] Please refer to Figure 13 The sun gear shaft 10 is the driving transmission component of the planetary gear transmission structure. By applying a rotational load to the sun gear shaft 10, it achieves a rotational motion relative to the external environment. The gear ring 7 and the lower outer support structure 8 are connected into a whole by several gear ring / outer support structure connectors 12, and are in a stationary state relative to the external environment. The planetary gear disk 5 is the driven transmission component. It achieves a revolution motion relative to the sun gear shaft 10 through meshing transmission with the sun gear shaft 10. The planetary gear disk 5 achieves a rotational motion relative to its own central axis through meshing transmission with the gear ring 7.

[0109] The assembly relationship of the precision ball part 20 to be processed, the polishing ring 21 and the planetary gear disk 5 in the planetary gear type precision ball part grinding and polishing device of the present invention is explained.

[0110] Please refer to Figure 14a , Figure 14b and Figure 14c The planetary gear disk 5 has several mounting holes 5-1 corresponding to the dimensions of the precision ball part 20 to be processed. The precision ball part 20 is installed in the mounting holes 5-1 on the planetary gear disk 5 to achieve batch grinding and polishing. The inner wall of the mounting hole 5-1 is fitted with the polishing ring sleeve 21 to achieve more uniform polishing of the precision ball part. Considering the actual processing conditions, the inner diameter of the polishing ring sleeve 21 should be slightly larger than the diameter of the precision ball to be processed. In addition, the mounting holes 5-1 of corresponding size on the planetary gear disk 5 play a guiding and clamping role during the installation of the precision ball part 20.

[0111] Please refer to Figure 15a and Figure 15b The outer surface 21-2 of the polishing ring sleeve is attached to the inner surface of the mounting hole 5-1 on the planetary gear disk 5. The precision ball part 20 to be processed contacts the inner surface 21-1 of the polishing ring sleeve, achieving a more uniform processing effect. Considering the actual processing conditions, the inner diameter of the polishing ring sleeve 21 should be slightly larger than the diameter of the precision ball 20 to be processed. According to the size of the precision ball part to be processed, the inner diameter of the polishing ring sleeve 21 is 0.1 mm to 0.3 mm larger than the diameter of the precision ball 20.

[0112] Please refer to Figure 15a The enlarged view at point B shows the following cases in mounting hole 5-1: (1) a precision ball part 20 to be processed and a polishing ring 21 are installed; (2) only the polishing ring 21 is installed; and (3) neither the polishing ring 21 nor the precision ball part 20 to be processed is installed.

[0113] Please refer to Figure 15a. Figure 15b and Figure 19 The surface finishing effect of the planetary gear type precision ball part polishing device of the present invention comes from three parts: the upper annular polishing pad 4, the lower annular polishing pad 6, and the polishing hole sleeve 21 attached to the inner surface of the mounting hole 5-1. Meanwhile, to ensure the finishing effect of the upper annular polishing pad 4 and the lower annular polishing pad 6, the thickness of the planetary gear disk 5 should be slightly smaller than the diameter of the precision ball part 20 to be processed. Both the upper annular polishing pad 4 and the lower annular polishing pad 6 are polishing pads based on elastic materials. Depending on the size of the precision ball part to be processed, the thickness of the planetary gear disk 5 is 0.5 mm - 1 mm smaller than the diameter of the precision ball part 20.

[0114] The supply and collection pathways for the polishing fluid and cleaning fluid in the planetary gear type precision ball part polishing device of the present invention are described.

[0115] Please refer to Figure 5 , Figure 12 and Figure 19 The internal pathway of the planetary gear type precision ball part grinding and polishing device is as follows:

[0116] Sixth external pipeline 18-6 Upper part of the through hole 3-1 of the annular part The lower part of the through hole of the annular part 3-1-1 Annular groove 1-2 Rotating stepped shaft chamber 1-5 (the inclined surface 1-5-1 of the rotating stepped shaft chamber facilitates liquid flow) Through holes 1-4 on the lower surface of the rotating stepped shaft (Upper part of planetary gear type precision ball part grinding and polishing device) ---- (Lower part of planetary gear type precision ball part grinding and polishing device) Porous material planetary gear disk 5 The annular gap between the lower inner support structure 9 and the open chamber 8-4 Open chamber 8-4 Upper part of the through hole 8-1 on the bottom surface of the external support structure chamber The two external support structure chambers have through holes 8-1 at the bottom. The seventh external conduit 18-7 and the eighth external conduit 18-8.

[0117] Please refer to Figure 1c , Figure 8a and Figure 8b Both the upper rotating part's chamber and the lower outer support structure's chamber are machined with inclined surfaces. The inclined surface 1-5-1 of the rotating stepped shaft chamber of the upper rotating part 1 and the inclined surface 8-4-1 of the chamber of the lower outer support structure 8 facilitate fluid flow.

[0118] Please refer to Figure 19 and Figure 20 The overall process and pathway for the supply and collection of liquids are as follows:

[0119] (1) When the machining process of the precision ball part 20 to be processed has not started, the control valve 16 is in state 3, and the passage is closed.

[0120] (2) During the machining of the precision ball part 20, adjust the control valve 16 to state 1. At this time, the liquid flowing in the passage is polishing fluid. Polishing fluid flow direction: polishing fluid storage tank 14 Third external pipeline 18-3 Polishing fluid / control valve inlet 16-2 Control valve 16 Polishing fluid / control valve outlet 16-3 Fifth external pipeline 18-5 Flow control pump inlet 13-1 Flow control pump 13 Flow control pump outlet 13-2 Sixth external pipeline 18-6 Internal passage of planetary gear type precision ball part grinding and polishing device Seventh external conduit 18-7 / Eighth external conduit 18-8 Waste liquid collection and treatment device (used for the filtration and recycling of liquid waste liquid after activation recovery). First external pipeline 18-1 Collection and processing of polishing slurry / polishing slurry storage tank inlet 17-1 Polishing fluid storage tank 14.

[0121] (3) After the machining process of the precision ball part 20 is completed, adjust the control valve 16 to state 2. At this time, the liquid flowing in the passage is the cleaning fluid. Cleaning fluid flow direction: Cleaning fluid storage tank 15 Fourth external pipeline 18-4 Cleaning fluid / control valve inlet 16-1 Control valve 16 Polishing fluid / control valve outlet 16-3 Fifth external pipeline 18-5 Flow control pump inlet 13-1 Flow control pump 13 Flow control pump outlet 13-2 Sixth external pipeline 18-6 Internal passage of planetary gear type precision ball part grinding and polishing device Seventh external conduit 18-7 / Eighth external conduit 18-8 Waste liquid collection and treatment device (used for the filtration and recycling of liquid waste liquid after activation recovery). Second external pipeline 18-2 Collection and treatment of cleaning fluid / Cleaning fluid storage tank inlet 17-2 Cleaning fluid storage tank 15.

[0122] (4) After the cleaning process of the planetary precision ball mill polishing device is completed, adjust the control valve 16 to state 3 to close the passage.

[0123] During the processing of precision ball parts, polishing slurry continuously flows through the internal channels to achieve ultra-precision surface machining of the parts under chemical-mechanical or mechanical action. After the processing is complete, cleaning slurry continuously flows through the internal channels for cleaning the interior of the device. External channels are used for the control, supply, collection, and recycling of the liquids (polishing slurry and cleaning slurry). The upper and lower parts of the planetary gear-type precision ball part grinding and polishing device utilize a slip ring component to differentiate the movement states of the internal and external parts of the device, preventing entanglement of external pipes during processing. An auxiliary centering and leveling accessory is used for the centering and leveling of the upper and lower parts of the planetary gear-type precision ball part grinding and polishing device, ensuring this is performed before the processing begins.

[0124] The following is a description of the alignment and leveling of the upper and lower parts of the planetary gear type precision ball part grinding and polishing device of the present invention.

[0125] Reference Figure 10a , Figure 10b and Figure 10c A conical recess 10-1 is provided at the center of the upper surface of the sun gear shaft 10; the taper of the recess 10-1 is the same as the taper of the conical surface 22-2 of the accessory.

[0126] Please refer to Figure 1c , Figure 1d , Figure 16a , Figure 16b , Figure 16c and Figure 17 At the positions of accessory connection hole 22-1 and rotating stepped shaft connection hole 1-3, the conical auxiliary centering and leveling accessory 22 is connected to the upper rotating part 1 as a whole through accessory connector 23.

[0127] The process of aligning and leveling the upper and lower parts of the grinding and polishing device is as follows:

[0128] Before the precision ball part to be processed begins to be ground and polished, the auxiliary centering and leveling conical accessory is coaxially installed at the center of the lower surface of the upper rotating part through the connector.

[0129] Please refer to Figure 18 Adjust the position of the auxiliary centering and leveling accessory 22 so that the conical surface 22-2 of the accessory 22 fits snugly against the recess 10-1 at the center of the upper surface of the sun gear shaft 10, ensuring that the axes of the upper and lower parts of the planetary gear type precision ball part grinding and polishing device are aligned. Control the upper part of the planetary gear type precision ball part grinding and polishing device to move up the axis as a suitable height, and then disassemble the auxiliary centering and leveling accessory 22. During subsequent processing, ensure that the axis alignment of the upper and lower parts of the planetary gear type precision ball part grinding and polishing device remains unchanged.

[0130] The upper rotating part 1 of the upper part of the grinding and polishing device is connected to the first external motor to ensure that the upper rotating part 1 can achieve rotational movement; the load-bearing part 1-1 of the rotating stepped shaft is installed in a vertical guide rail to ensure that the upper part of the device can achieve vertical up and down translational movement; the sun gear shaft 10 is connected to the second external motor to ensure that the sun gear shaft can achieve rotational movement.

[0131] Example 2

[0132] An ultra-precision grinding and polishing method for precision ball parts includes the following steps:

[0133] Confirm that the overall fluid passage is initially closed.

[0134] S1, please refer to Figure 20 After confirming that the liquid pipeline of the grinding and polishing device is connected correctly, adjust the control valve to state 3. At this time, the overall liquid passage is closed.

[0135] Device centering and leveling

[0136] S2, please refer to Figure 16a , Figure 17 The auxiliary centering and leveling accessory 22 is coaxially mounted at the center of the lower surface of the upper rotating part 1 via the accessory connector 23.

[0137] S3, please refer to Figure 18 Adjust the positions of the upper and lower parts of the grinding and polishing device so that the conical surface 22-2 of the auxiliary centering and leveling accessory 22 and the recess 10-1 at the center of the upper surface of the sun gear shaft 10 fit together, ensuring that the upper and lower parts of the grinding and polishing device are coaxial.

[0138] S4. Adjust the position of the upper and lower parts of the grinding and polishing device. After confirming that the upper and lower parts of the grinding and polishing device are aligned with the coaxial axis, adjust the distance between the upper and lower parts of the grinding and polishing device in the vertical direction to ensure that the auxiliary centering and leveling accessory 22 has enough space to be disassembled. Disassemble the auxiliary centering and leveling accessory 22.

[0139] Install polishing equipment and process parts

[0140] S5, please refer to Figure 5 Mount the upper polishing pad 4 coaxially onto the lower surface of the upper rotating part 1; please refer to... Figure 12 The lower polishing pad 6 is coaxially mounted on the upper surface of the inner support structure 9;

[0141] S6, please refer to Figure 13 Install planetary gear disk 5 and confirm that the meshing and transmission between planetary gear disk 5, sun gear shaft 10 and gear ring 7 are in good condition;

[0142] S7, please refer to Figure 14c , Figure 15a and Figure 15b Install each polishing ring sleeve 21 inside the mounting hole 5-1 of the planetary gear disk; install the precision ball part to be processed in several through-hole polishing ring sleeves 21;

[0143] S8, please refer to Figure 5 , Figure 12 , Figure 19 Check the connections of each part of the grinding and polishing device to ensure they meet requirements and that there are no loose connections. If any are found, address them immediately. Proceed to the next step only after confirming that the equipment poses no potential safety hazards.

[0144] Start Homework

[0145] S9. Start the power supply of the grinding and polishing device and the power supply of the flow control pump 13;

[0146] S10. Set the polishing time, applied load, rotation speed and direction of the upper and lower parts of the polishing device, and rotation speed and direction of the lower part of the polishing device according to the processing requirements.

[0147] S11, please refer to Figure 20 The flow rate of the polishing fluid is set by the flow control pump 13;

[0148] S12, please refer to Figure 20 Adjust control valve 16 to state 1. At this time, the liquid flowing in the overall liquid passage is polishing liquid.

[0149] S13. The polishing device begins polishing the precision ball part 20 to be processed. If any fault or abnormality is encountered during the processing, the equipment shall be stopped immediately, the operation shall be suspended, the fault and abnormality shall be checked, and the operation shall continue after the fault and abnormality are eliminated.

[0150] Specifically, the process is described as follows: At the start of operation, the flow control pump 13 and the polishing device are activated, implementing Action 1. When the upper annular polishing pad 4 contacts the precision ball part 20 to be processed, Actions 2, 3, and 4 are performed simultaneously. At this time, the polishing fluid comes into contact with the precision ball part 20, modifying its surface and generating a modified layer. During processing, while surface modification occurs, relative movement occurs between the precision ball part 20 and the upper annular polishing pad 4, lower annular polishing pad 6, and polishing ring 21, causing the modified layer to be mechanically removed. The removed material is carried away by the flow of the polishing fluid. In other words, the precision ball part 20 undergoes a cycle of chemical modification by oxidants in the polishing fluid and mechanical removal by the upper annular polishing pad 4, lower annular polishing pad 6, and polishing ring 21 during processing, until the processing is completed.

[0151] Action 1: The upper part of the polishing device (specifically, the rotating stepped shaft load-bearing part 1-1) moves vertically downward along the guide rail from its initial position. When the upper annular polishing pad 4 contacts the precision ball part 20 to be processed, the movement stops. The set external load is applied to the precision ball part 20 to be processed through the upper part of the polishing device (specifically, the rotating stepped shaft load-bearing part 1-1).

[0152] Action 2: The upper part of the grinding and polishing device (specifically, the upper rotating part 1) accelerates from a stationary state to a set speed in the set rotation direction under the drive of the first external motor (the rotation direction and speed remain unchanged in the same process). At this time, the upper rotating part 1 and the upper annular polishing pad 4 of the upper part of the grinding and polishing device rotate according to the set speed and direction.

[0153] Action 3: The lower part of the grinding and polishing device (specifically, the sun gear shaft 10) accelerates from a stationary state to a set speed under the drive of the second external motor, following a set rotation direction (the rotation direction and speed remain unchanged in the same process). At this time, the sun gear shaft 10 of the lower part of the grinding and polishing device rotates according to the set speed and direction; the planetary gear disk 5 revolves around the sun gear shaft 10, and simultaneously rotates under the constraint transmission of the gear ring 7; driving the precision ball part 20 to be processed to roll in the polishing ring 21.

[0154] Action Four: Action Four has two scenarios. When performing chemical mechanical polishing: Please refer to... Figure 20After the control valve 16 is adjusted to state 1, the polishing slurry is pumped out of the polishing slurry storage tank 14 by the flow pump 13 according to the set liquid flow rate and in the direction of the solid arrow. The polishing slurry passes sequentially through the third external pipeline 18-3, the polishing slurry / control valve inlet 16-2, the control valve 16, the polishing slurry / control valve outlet 16-3, the fifth external pipeline 18-5, the flow control pump inlet 13-1, the flow control pump 13, the flow control pump outlet 13-2, and the sixth external pipeline 18-6, flowing into the internal passage of the planetary gear type precision ball part polishing device from the upper part of the annular part through hole 3-1. When the polishing slurry flows to the porous planetary gear disk 5 in the internal passage, the polishing slurry comes into contact with the surface of the precision ball part 20 to be processed. The oxidizing substances in the polishing slurry modify the surface of the precision ball part 20 to be processed, forming a modified layer. The polishing fluid, carrying the removed material, then flows sequentially through the annular gap between the lower inner support structure 9 and the open chamber 8-4, through the open chamber 8-4 of the lower outer support structure, above the through hole 8-1 on the bottom surface of the outer support structure chamber, below the through holes 8-1 on the bottom surface of the two outer support structure chambers, and through the seventh external pipe 18-7 and the eighth external pipe 18-8, exiting the internal pathway of the planetary gear-type precision ball polishing device. Afterwards, it reaches the waste liquid collection and treatment device (used for filtering liquid waste and recycling after reactivation) via the seventh external pipe 18-7 / eighth external pipe 18-8, and is then recovered into the polishing fluid storage tank 14 via the first external pipe 18-1.

[0155] When performing mechanical grinding and polishing: simply replace the polishing fluid with abrasive fluid. S14: After reaching the set processing time or pausing processing, the upper part of the grinding and polishing device (specifically, the load-bearing part 1-1 of the rotating stepped shaft) moves vertically upwards along the guide rail. When it reaches the initial position, it stops moving. Adjust control valve 16 to state 3 to check if the surface quality of the processed part meets the processing requirements; if it does, proceed to S16; otherwise, continue to the next step.

[0156] S15. Based on the surface flatness, surface morphology, processing consistency, material removal rate, surface damage and defects after processing, and residual oxide layer after processing, determine whether to change the processing parameters. Repeat S10 and S13 until the surface quality of the processed parts meets the expected requirements.

[0157] Cleaning and polishing equipment

[0158] S16. After the processing is completed, set the polishing time, the load applied to the upper part of the polishing device, the rotation speed and direction of the upper part of the polishing device, and the rotation speed and direction of the lower part of the polishing device.

[0159] S17, please refer to Figure 20The flow rate of the cleaning fluid is set by the flow control pump 13;

[0160] S18, please refer to Figure 20 Adjust control valve 16 to state 2. At this time, the liquid flowing in the overall liquid passage is cleaning fluid.

[0161] S19. Clean the entire liquid circuit, polishing equipment, and machined parts;

[0162] Specifically, the process is as follows: Upon starting the cleaning process, the flow control pump 13 and the polishing device are activated, initiating Action One. When the upper annular polishing pad 4 contacts the precision ball part 20 to be processed, Actions Two, Three, and Five are performed simultaneously. The cleaning fluid flows through the entire liquid path, carrying away residual polishing fluid and removed material, thus achieving the purpose of cleaning the entire liquid circuit, the polishing device, and the processed parts.

[0163] Action 5: Please refer to Figure 20 After the control valve 16 is adjusted to state 2, the cleaning fluid is pumped out of the cleaning fluid storage tank 14 by the flow pump 13 according to the set liquid flow rate and in the direction of the dotted arrow. The cleaning fluid passes through the fourth external pipeline 18-4, the cleaning fluid / control valve inlet 16-1, the control valve 16, the polishing fluid / control valve outlet 16-3, the fifth external pipeline 18-5, the flow control pump inlet 13-1, the flow control pump 13, the flow control pump outlet 13-2, and the sixth external pipeline 18-6, flowing into the internal passage of the planetary gear type precision ball part grinding and polishing device from the upper part of the annular part through hole 3-1. When the cleaning fluid flows to the porous material planetary gear disk 5 in the internal passage, the cleaning fluid comes into contact with the surface of the precision ball part 20 to be processed. The cleaning fluid will not modify the surface of the precision ball part 20 to be processed. At this time, the upper annular polishing pad 4, the lower annular polishing pad 6, and the polishing ring 21 will not cause damage to the part to be processed or have a material removal effect. The flow of the cleaning fluid achieves the purpose of cleaning the residual polishing fluid and the removed material in the liquid passage. Then, it flows into the waste liquid collection and treatment device (for the filtration of liquid waste and repeated recycling after activation recovery) through the seventh external pipeline 18-7 / eighth external pipeline 18-8. After treatment, it is recovered to the cleaning fluid storage tank 15 through the second external pipeline 18-2.

[0164] S20, please refer to Figure 20 Adjust control valve 16 to state 3, at which point the entire liquid passage is closed;

[0165] Finish the work and remove the machined parts.

[0166] S21. After the set processing time is reached or processing is paused, the upper part of the polishing device (specifically the load-bearing part 1-1 of the rotating stepped shaft) moves vertically upward along the guide rail. When it reaches the initial position, it stops moving and the processed part is taken out.

[0167] S22. Turn off the power supply to the grinding and polishing device and the power supply to the flow control pump 13.

[0168] The above content is only for illustrating the technical concept of the present invention and should not be construed as limiting the scope of protection of the present invention. Any modifications made to the technical solution based on the technical concept proposed in this invention shall fall within the scope of protection of the claims of this invention.

Claims

1. A planetary gear-type ultra-precision grinding and polishing device for precision ball parts, characterized in that, It includes an upper rotating part (1) and a planetary gear disk (5). An upper annular polishing pad (4) is fixed on the lower surface of the upper rotating part (1). The planetary gear disk (5) is located below the upper annular polishing pad (4). A lower annular polishing pad (6) is provided below the planetary gear disk (5). The lower annular polishing pad (6) is installed on the upper end face of the lower inner support structure (9). The planetary gear disk (5) has several mounting holes (5-1), and a polishing ring (21) is provided in the mounting holes (5-1). The upper rotating part (1) includes a main body, the upper end of which is fixed with a rotating stepped shaft load-bearing part (1-1), the top of which is provided with an annular groove (1-2), and the interior of which is provided with a rotating stepped shaft chamber (1-5) communicating with the annular groove (1-2), and the lower end of the rotating stepped shaft chamber (1-5) is provided with a rotating stepped shaft lower surface through hole (1-4). The planetary gear disk (5) meshes with the sun gear shaft (10) and the gear ring (7); the gear ring (7) and the lower inner support structure (9) are both installed on the lower outer support structure (8); the lower outer support structure (8) has an open cavity (8-4), and the bottom of the open cavity (8-4) has a through hole (8-1) on the bottom surface of the outer support structure cavity. The load-bearing part (1-1) of the rotating stepped shaft is connected to the upper fixed ring part (3) through the upper slip ring (2). The upper fixed ring part (3), the upper slip ring (2), the upper rotating part (1) and the upper ring polishing pad (4) are coaxially engaged. The upper fixed ring part (3) is provided with a through hole (3-1) that runs vertically through the ring part. The through hole (3-1) is connected to the ring groove (1-2). The annular part through hole (3-1) is connected to the outlet of the control valve (16) through a pipeline. A flow control pump (13) is installed on the pipeline. The first inlet of the control valve (16) is connected to the outlet of the polishing liquid storage tank (14) through a pipeline. The second inlet of the control valve (16) is connected to the outlet of the cleaning liquid storage tank (15) through a pipeline.

2. The planetary gear type ultra-precision grinding and polishing device for precision ball parts according to claim 1, characterized in that, The upper annular polishing pad (4), the lower annular polishing pad (6), and the polishing ring sleeve (21) are all polishing pads based on elastic materials.

3. The planetary gear type ultra-precision grinding and polishing device for precision ball parts according to claim 1, characterized in that, The central shaft (10-2) of the sun gear shaft (10) passes through the central through hole (9-1) of the inner support structure, the inner layer (11-3) of the lower sliding ring, and the outer layer (11-1) of the lower sliding ring. The inner layer (11-3) and the outer layer (11-1) of the lower sliding ring are connected by the middle layer (11-2) of the lower sliding ring. The outer layer (11-1) of the lower sliding ring is fixed at the lower part of the central through hole (9-1) of the inner support structure. The inner layer (11-3) of the lower sliding ring and the central shaft (10-2) of the sun gear shaft (10) are fixedly connected.

4. The planetary gear type ultra-precision grinding and polishing device for precision ball parts according to claim 1, characterized in that, A conical recess (10-1) is provided at the center of the upper surface of the sun gear shaft (10); an auxiliary centering and leveling accessory (22) is fixed at the lower end of the upper rotating part (1), and the taper of the recess (10-1) is the same as the taper of the conical surface (22-2) of the accessory.

5. The planetary gear type ultra-precision grinding and polishing device for precision ball parts according to claim 1, characterized in that, The through hole (8-1) on the bottom surface of the outer support structure chamber is connected to the inlet of the waste liquid collection and treatment device through a pipe, and the outlet of the waste liquid collection and treatment device is connected to the inlet of the polishing liquid storage tank (14) and the inlet of the cleaning liquid storage tank (15).

6. The planetary gear type ultra-precision grinding and polishing device for precision ball parts according to claim 1, characterized in that, The polishing ring (21) is cylindrical.

7. A method for grinding and polishing precision ball parts, based on the grinding and polishing apparatus of claim 1, characterized in that, Includes the following steps: Step 1: Install the precision ball part (20) to be processed into the through-hole polishing ring (21); Step 2: Bring the upper annular polishing pad (4) close to the precision ball part (20) to be processed until the upper annular polishing pad (4) contacts the precision ball part (20). Step 3: Make the polishing liquid come into contact with the precision ball part (20) to be processed. At the same time, the precision ball part (20) to be processed and the upper annular polishing pad (4), the lower annular polishing pad (6), and the polishing ring (21) will move relative to each other, so that the surface of the precision ball part (20) to be processed is mechanically or chemically mechanically removed, and the removed material is carried away with the flow of polishing liquid.

8. The grinding and polishing method for a precision ball part according to claim 7, characterized in that, Step 3 includes the following actions performed simultaneously: Action A: The upper rotating part (1) and the upper annular polishing pad (4) rotate according to the set speed and direction; Action B: The sun gear shaft (10) of the lower part of the grinding and polishing device rotates according to the set speed and direction; the planetary gear disk (5) revolves around the sun gear shaft (10) and rotates under the constraint transmission of the gear ring (7), driving the precision ball part (20) to be processed to roll in the polishing ring (21); Action C: The polishing liquid is delivered to the planetary gear disk (5) of the porous material, so that the polishing liquid comes into contact with the surface of the precision ball part (20) to be processed. The precision ball part (20) to be processed and the upper annular polishing pad (4), the lower annular polishing pad (6), and the polishing ring (21) move relative to each other, so that the surface of the precision ball part (20) to be processed is mechanically or chemically mechanically removed. Then the polishing liquid carries the removed material out through the through hole (8-1) at the bottom of the outer support structure chamber.

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