A measuring device and method for measuring deformation and surface microstructure of a stack of sheets

CN117824527BActive Publication Date: 2026-07-07HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HUAZHONG UNIV OF SCI & TECH
Filing Date
2024-01-25
Publication Date
2026-07-07

AI Technical Summary

Technical Problem

Existing measurement technologies are insufficient to meet the high-precision measurement requirements for interlayer deformation of stacked sheets, microstructure of sheet surface, and three-dimensional morphology of gap sidewalls. Traditional methods cannot penetrate deep into the internal interlayer of stacked sheets for accurate measurement.

Method used

An optical measurement device is used, including a beam splitter, an objective lens, a displacement stage, a mirror, a beam steering microdevice, and a camera. The beam steering microdevice extends between adjacent stacked sheets and, in conjunction with a glass plate that compensates for optical path difference, forms an interference pattern between the reference optical path and the measurement optical path, thereby calculating the three-dimensional morphology of the microstructure on the surface of the stacked sheets.

Benefits of technology

It achieves high-precision three-dimensional topographic measurement of the deformation and microstructure of stacked sheets, overcomes the limitations of traditional methods in interlayer measurement, and provides a wider range of measurement scenarios and higher measurement accuracy.

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Abstract

This invention belongs to the field of morphology measurement technology and discloses a measuring device and method for measuring the deformation and surface microstructure of stacked sheets. The measuring device includes a light source, a collimating lens, a beam splitter, an objective lens, a compensating optical path difference glass plate, a reflecting mirror, a displacement stage, a beam steering microdevice, a tube mirror, and a camera. During the measurement process, the beam splitter separates the light from the light source into transmitted light and refracted light. The transmitted light passes through the beam steering microdevice and enters between adjacent stacked sheets to become measurement light, which is then reflected to the surface of the stacked sheets. The compensating optical path difference glass plate compensates for the optical path difference generated by the measurement light passing through the beam steering microdevice. The reflecting mirror reflects the refracted light from the beam splitter as reference light into the tube mirror. The tube mirror combines the reference light and the measurement light to form an interference pattern in the camera. The measurement method of this invention can solve the problem of accurately measuring the surface deformation of each thin layer in a stacked sheet and the morphology of the surface microstructure of the stacked sheet.
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