A micro-electromechanical gyroscope

Abstract

Disclosed is a micro-electromechanical gyroscope, comprising: a first tuning fork structure and a second tuning fork structure, the first tuning fork structure and the second tuning fork structure having the same structure and being symmetrically arranged; each tuning fork structure group comprising: a driving unit; a driving-detecting unit connected to the driving unit, which performs simple harmonic motion in a first direction under the drive of the driving unit and generates motion in a second direction when sensing an angular velocity in a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other; and a detecting unit connected to the driving-detecting unit, which moves synchronously with the driving-detecting unit in the second direction when the driving-detecting unit moves in the second direction. The driving units of the first tuning fork structure and the second tuning fork structure are coupled together via a driving coupling structure; and the detecting units of the first tuning fork structure and the second tuning fork structure are coupled together via a detecting coupling structure.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a micro-electromechanical gyroscope. Background Art

[0002] The sensitive structure of the micro-electromechanical gyroscope is mass-produced using semiconductor micromachining technology. It has the advantages of small size, light weight, low cost, low power consumption, and high reliability. It has broad application market prospects, such as stabilization of aiming and heading, ammunition guidance, automotive industry, oil and gas drilling, unmanned driving and other military and civilian fields.

[0003] The micro-electromechanical gyroscope in the prior art includes a first tuning fork structure and a second tuning fork structure. When working, the two tuning fork structures move in anti-phase to suppress the influence of linear acceleration in a differential form. Each tuning fork structure includes at least a two-degree-of-freedom mass block, which can move in a driving direction and a detection direction perpendicular to each other. When the micro-electromechanical gyroscope is working, the two-degree-of-freedom mass block performs simple harmonic motion along the driving direction. When there is an angular velocity input in a third direction, i.e., a sensitive direction, which is perpendicular to the driving direction and the detection direction, the mass block senses the Coriolis force along the detection direction and generates motion along the detection direction. In order to improve the suppression effect on linear acceleration, it is necessary to increase the eigenfrequency of the in-phase motion mode of the two tuning forks, thereby suppressing the interference of the in-phase motion mode on the working mode.

[0004] Furthermore, due to machining errors, quadrature errors can occur. Even with zero angular velocity input, the mass will still experience disturbances along the detection direction, outputting a quadrature error signal. Furthermore, the amplitude and phase of the quadrature errors in the first and second tuning fork structures may be unequal, increasing the complexity of the entire MEMS gyroscope's sensitive structure and the difficulty of suppressing quadrature errors. Summary of the Invention

[0005] In view of the above problems, the object of the present invention is to provide a micro-electromechanical system (MEMS) gyroscope that realizes the synchronous coupling of the driving mode and the detection mode motion of two tuning fork structures, suppresses the interference of the driving parasitic mode and the detection parasitic mode, and reduces the complexity of the motion of the MEMS gyroscope sensitive structure caused by the orthogonal error.

[0006] The present invention provides a micro-electromechanical gyroscope, comprising: a first tuning fork structure and a second tuning fork structure, wherein the first tuning fork structure and the second tuning fork structure have the same structure and are symmetrically arranged; each group of the tuning fork structures comprises:

[0007] Drive unit;

[0008] a driving-detecting unit connected to the driving unit, performing simple harmonic motion along a first direction under the drive of the driving unit, and generating motion along a second direction when sensing an angular velocity in a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other;

[0009] a detection unit connected to the drive-detection unit, and moving synchronously with the drive-detection unit along the second direction when the drive-detection unit moves along the second direction;

[0010] The driving units of the first tuning fork structure and the second tuning fork structure are coupled together via a driving coupling structure; and the detection units of the first tuning fork structure and the second tuning fork structure are coupled together via a detection coupling structure.

[0011] Preferably, the drive coupling structure includes:

[0012] Drive coupling anchor point;

[0013] a third drive coupling beam, wherein both ends of the third drive coupling beam are fixedly connected to the drive coupling anchor points respectively;

[0014] a first driving coupling beam, wherein one end of the first driving coupling beam is fixedly connected to one of the driving units of the tuning fork structure, and the other end of the first driving coupling beam is fixedly connected to the middle portion of the third driving coupling beam;

[0015] A second driving coupling beam, one end of the second driving coupling beam is fixedly connected to the driving unit of another tuning fork structure, and the other end of the second driving coupling beam is fixedly connected to the middle part of the third driving coupling beam.

[0016] Preferably, the first driving coupling beam and the second driving coupling beam are parallel to each other.

[0017] Preferably, the first driving coupling beam and the second driving coupling beam are in a V shape.

[0018] Preferably, the detection coupling structure includes:

[0019] Detect coupling anchor points;

[0020] a detection coupling truss, wherein a middle portion of the detection coupling truss is hinged to the detection coupling anchor point via a coupling hinge;

[0021] a first detection coupling beam, wherein one end of the first detection coupling beam is hinged to the detection unit of one of the first tuning fork structure and the second tuning fork structure, and the other end of the first detection coupling beam is hinged to the first end of the detection coupling truss;

[0022] A second detection coupling beam, one end of which is hinged to the detection unit of the other of the first tuning fork structure and the second tuning fork structure, and the other end of which is hinged to the second end of the detection coupling truss, wherein the first end and the second end of the detection coupling truss are opposite to each other.

[0023] Preferably, the first detection coupling beam and the second detection coupling beam are symmetrical with respect to a central axis of the detection coupling truss.

[0024] Preferably, the detection coupling structure further comprises: two groups of constraint hinges, and the two groups of constraint hinges are symmetrical with respect to the central axis of the detection coupling truss.

[0025] Preferably, one end of each group of constraint hinges is hinged to the detection coupling truss, and the other end is hinged to the detection coupling anchor point.

[0026] Preferably, one end of each group of constraint hinges is hinged to the detection coupling truss, and the other end is hinged to the hinge fixing anchor point.

[0027] Preferably, it also includes:

[0028] a first suppression electrode connected to each tuning fork structure;

[0029] a second suppression electrode connected to each tuning fork structure and symmetrical to the first suppression electrode with respect to the central axis of the drive-detection unit; and

[0030] The control loop is connected to the first suppression electrode and the second suppression electrode respectively, and provides a first voltage to the first suppression electrode and a second voltage to the second suppression electrode. The first voltage and the second voltage have the same amplitude and opposite phases.

[0031] Preferably, the electrostatic forces generated by the first suppression electrodes on both sides of each tuning fork structure are equal in magnitude and opposite in direction; the electrostatic forces generated by the second suppression electrodes on both sides of each tuning fork structure are equal in magnitude and opposite in direction.

[0032] In the micro-electromechanical gyroscope provided by the present invention, each tuning fork structure adopts a "three-mass-four-beam" structure, which eliminates the mutual coupling between the driving mode and the detection mode.

[0033] In the MEMS gyroscope provided by the present invention, the driving units of the first tuning fork structure and the second tuning fork structure are coupled together via a driving coupling structure, which effectively suppresses interference from a driving parasitic mode (ie, a driving in-phase mode).

[0034] In the micro-electromechanical system gyroscope provided by the present invention, the detection units of the first tuning fork structure and the second tuning fork structure are coupled together via a detection coupling structure. The detection coupling structure effectively suppresses the interference of the detection parasitic mode (i.e., the detection of the in-phase mode), and further reduces the motion form that may be caused by the orthogonal error of the first tuning fork structure and the second tuning fork structure to half of the original. Therefore, the configuration method of the orthogonal error suppression electrode and the number of control loops can be reduced, simplifying the complexity of the micro-electromechanical system gyroscope structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The above and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:

[0036] Figure 1 The equivalent structural diagram of a micro-electromechanical gyroscope in the prior art is shown;

[0037] Figures 2a to 2d The possible motion forms of the first tuning fork structure and the second tuning fork structure in the prior art are shown;

[0038] Figure 3 A schematic structural diagram of a micro-electromechanical gyroscope according to a first embodiment of the present invention is shown;

[0039] Figure 4 A schematic structural diagram showing an equivalent structure of each tuning fork structure according to the first embodiment of the present invention;

[0040] Figure 5 A schematic structural diagram of a driving coupling structure of a first tuning fork structure and a second tuning fork structure according to a first embodiment of the present invention is shown;

[0041] Figure 6 A schematic structural diagram of a detection coupling structure of a first tuning fork structure and a second tuning fork structure according to a first embodiment of the present invention is shown;

[0042] Figure 7 shows an equivalent structural diagram of the detection coupling structure of the first embodiment of the present invention;

[0043] Figure 8a and Figure 8b shows the motion form of the detection unit of the first embodiment of the present invention;

[0044] Figure 9 shows a schematic structural diagram of a suppressor electrode according to a first embodiment of the present invention;

[0045] Figure 10 A schematic structural diagram of a micro-electromechanical gyroscope according to a second embodiment of the present invention is shown;

[0046] Figure 11 A schematic diagram showing a drive coupling structure according to a second embodiment of the present invention is shown;

[0047] Figure 12 A schematic structural diagram of a micro-electromechanical gyroscope according to a third embodiment of the present invention is shown;

[0048] Figure 13 A schematic structural diagram of a detection coupling structure of a first tuning fork structure and a second tuning fork structure according to a third embodiment of the present invention is shown;

[0049] Figure 14 FIG. 4 is a schematic diagram showing an equivalent structure of a detection coupling structure according to a third embodiment of the present invention. DETAILED DESCRIPTION

[0050] The present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, identical elements are represented by similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale. In addition, some well-known parts may not be shown.

[0051] The present invention may be embodied in various forms, some examples of which are described below.

[0052] Figure 1 FIG. 1 shows a schematic diagram of an equivalent structure of a micro-electromechanical gyroscope in the prior art. Figure 1 As shown, the MEMS gyroscope 100 includes a first tuning fork structure 110a and a second tuning fork structure 110b. The first tuning fork structure 110a and the second tuning fork structure 110b have the same structure and are symmetrically arranged. The first tuning fork structure 110a includes at least a first mass block 111a that can move with two degrees of freedom, and the second tuning fork structure 110b includes at least a second mass block 111b. The first mass block 111a and the second mass block 111b can move along a first direction (e.g., the X-axis direction) and a second direction (e.g., the Y-axis direction). The first direction is, for example, a driving direction, and the second direction is, for example, a detection direction. The first and second directions are perpendicular to each other. Specifically, the first mass block 111a and the second mass block 111b perform simple harmonic motion along a first direction (e.g., the X-axis direction) with opposite phases. When there is an angular velocity input along a third direction (a sensitive direction, such as the Z-axis direction), the first mass block 111a and the second mass block 111b feel the Coriolis force along a second direction (e.g., the Y-axis direction), and generate anti-phase motion along the second direction (e.g., the Y-axis direction).

[0053] Theoretically, when zero angular velocity is input in the sensing direction, the first mass 111a and the second mass 111b will only undergo simple harmonic motion in the driving direction (the first direction) and will not move in the sensing direction (the second direction). However, due to manufacturing errors, quadrature error can occur. Even with zero angular velocity, the first mass 111a and the second mass 111b will still experience disturbances along the sensing direction, outputting a quadrature error signal. Therefore, suppression electrodes are provided on the first mass 111a and the second mass 111b to suppress the quadrature error between the first mass 111a and the second mass 111b.

[0054] Furthermore, the first tuning fork structure 110a may have a positive or negative phase offset. Similarly, the second tuning fork structure 110b may have a positive or negative phase offset. Therefore, the quadrature error amplitudes and phases of the first tuning fork structure 110a and the second tuning fork structure 110b may be unequal. To effectively suppress quadrature error, each tuning fork structure requires at least two sets of suppression electrodes and a separate control loop. This increases the complexity of the suppression electrode configuration and the control loop.

[0055] The first mass 111a of the first tuning fork structure 110a is equipped with at least a first suppression electrode 120a and a second suppression electrode 120b for suppressing quadrature error. Both the first and second suppression electrodes 120a, 120b are connected to a first control loop 130a. The first control loop 130a provides voltages of equal amplitude and opposite phases to the first and second suppression electrodes 120a, 120b. The second mass 111b of the second tuning fork structure 110b is equipped with at least a third suppression electrode 120c and a fourth suppression electrode 120d for suppressing quadrature error. Both the third and fourth suppression electrodes 120c, 120d are connected to a second control loop 130b. The second control loop 130b provides voltages of equal amplitude and opposite phases to the third and fourth suppression electrodes 120c, 120d.

[0056] Figures 2a to 2d 1 and 1. The different possible motion forms of the first tuning fork structure 110a and the second tuning fork structure 110b in the prior art are shown. Figures 2a to 2d As shown, there are four types of motions caused by the orthogonal error between the first tuning fork structure 110a and the second tuning fork structure 110b.

[0057] like Figure 2aAs shown, the movements of the first tuning fork structure 110a and the second tuning fork structure 110b both produce positive phase offsets, but the offset angles of the first tuning fork structure 110a and the second tuning fork structure 110b are different (for example, the offset angle of the first tuning fork structure 110a is θ1, and the offset angle of the second tuning fork structure 110b is θ2). At this time, the first control loop 130a provides a first voltage to the first inhibition electrode 120a and a second voltage to the second inhibition electrode 120b. The first and second voltages have the same amplitude and opposite phases. The second control loop 130b provides a third voltage to the third inhibition electrode 120c and a fourth voltage to the fourth inhibition electrode 120d. The third and fourth voltages have the same amplitude and opposite phases. The first voltage and the third voltage have different amplitudes. For example, the first voltage is -V f1 , the second voltage is, for example, +V f1 ; The third voltage is, for example, -V f2 , the second voltage is, for example, +V f2 .

[0058] like Figure 2b As shown, the movement of the first tuning fork structure 110a generates a positive phase offset, and the movement of the second tuning fork structure 110b generates a negative phase offset, and the offset angles of the first tuning fork structure 110a and the second tuning fork structure 110b are different (the offset angle of the first tuning fork structure 110a is, for example, θ1, and the offset angle of the second tuning fork structure 110b is, for example, -θ2). At this time, the first voltage provided by the first control loop 130a to the first suppression electrode 120a is, for example, -V f1 The second voltage provided to the second suppression electrode 120b is, for example, +V f1 The second control loop 130b provides a third voltage to the third suppression electrode 120c, for example, +V f2 , a fourth voltage, for example -V is provided to the fourth suppressing electrode 120d. f2 .

[0059] like Figure 2c As shown, the movement of the first tuning fork structure 110a generates a negative phase offset, and the movement of the second tuning fork structure 110b generates a positive phase offset, and the offset angles of the first tuning fork structure 110a and the second tuning fork structure 110b are different (the offset angle of the first tuning fork structure 110a is, for example, -θ1, and the offset angle of the second tuning fork structure 110b is, for example, θ2); at this time, the first voltage provided by the first control loop 130a to the first suppression electrode 120a is, for example, +V f1 The second voltage provided to the second suppression electrode 120b is, for example, -V f1 The second control loop 130b provides a third voltage to the third suppression electrode 120c, for example, -V f2 , a fourth voltage such as +V is provided to the fourth suppression electrode 120d.f2 .

[0060] like Figure 2d As shown, the movements of the first tuning fork structure 110a and the second tuning fork structure 110b both produce negative phase offsets, and the offset angles of the first tuning fork structure 110a and the second tuning fork structure 110b are different (for example, the offset angle of the first tuning fork structure 110a is -θ1, and the offset angle of the second tuning fork structure 110b is -θ2). At this time, the first voltage provided by the first control loop 130a to the first suppression electrode 120a is, for example, +V f1 The second voltage provided to the second suppression electrode 120b is, for example, -V f1 The second control loop 130b provides a third voltage to the third suppression electrode 120c, for example, +V f2 , a fourth voltage, for example -V is provided to the fourth suppressing electrode 120d. f2 .

[0061] Figure 3 FIG. 1 shows a schematic structural diagram of a micro-electromechanical gyroscope according to a first embodiment of the present invention. Figure 3 As shown, the MEMS gyroscope includes a first tuning fork structure 210a and a second tuning fork structure 210b, a suppression electrode 220, a control loop 230 ( Figure 3 ), a driving coupling structure 260 and a detecting coupling structure 280, wherein the first tuning fork structure 210a and the second tuning fork structure 210b have the same structure and are symmetrical to each other.

[0062] Figure 4 Schematic diagram showing the equivalent structure of each tuning fork structure of the first embodiment of the present invention. Figure 3 and Figure 4 Each tuning fork structure adopts a “three-mass-four-beam” structure. Specifically, each tuning fork structure includes a driving unit 211 , a driving-detection unit 212 , and a detection unit 213 .

[0063] The driving unit 211 includes a fixed driving electrode 2111, a movable driving electrode 2112 opposite 2111, and a bar-shaped proof mass 2113 connected to 2112. The movable driving electrode 2112 (specifically, the bar-shaped proof mass 2113) is connected to the driving anchor point 251 via a first elastic beam 241. The driving-detecting unit 212 is a frame-shaped proof mass connected to the driving unit 211 (specifically, the bar-shaped proof mass 2113) via a second elastic beam 242. The detecting unit 213 is a frame-shaped proof mass located within the driving-detecting unit 212. It is connected to the inner wall of the driving-detecting unit 212 via a third elastic beam 243 and to the detection anchor point 252 via a fourth elastic beam 244. Detection unit 213 is internally provided with a movable detection electrode 2131 and a fixed detection electrode 2132. The movable detection electrode 2131 is connected to the inner wall of the detection unit 213, while the fixed detection electrode 2132 is connected to the detection electrode anchor 253. The movable detection electrode 2131 and the fixed detection electrode 2132 face each other, forming the detection electrodes. When the detection unit 213 moves in the second direction, the capacitance of the detection electrodes changes.

[0064] The first elastic beam 241 has very low stiffness along the X-axis, allowing the movable drive electrode 2112 to move relative to the drive anchor point 251 in the X-axis direction. The first elastic beam 241 has very high stiffness along the Y-axis, preventing the movable drive electrode 2112 from moving relative to the drive anchor point 251 in the Y-axis direction. In other words, due to the restraining effect of the first elastic beam 241, the drive unit 211 can only move along the X-axis. The second elastic beam 242 has very high stiffness along the X-axis, allowing the drive-detection unit 212 to move synchronously with the drive unit along the X-axis when the drive unit moves along the X-axis. The second elastic beam 242 has very low stiffness along the Y-axis, allowing the drive-detection unit 212 to move along the Y-axis when it senses the Coriolis force along the Y-axis. The third elastic beam 243 has very low stiffness along the X-axis, so that when the drive-detection unit 212 moves along the X-axis, the detection unit 213 cannot move along the X-axis with the drive-detection unit 212. The third elastic beam 243 has very high stiffness along the Y-axis, so that when the drive-detection unit 212 moves along the Y-axis, the detection unit 213 moves along the X-axis with the drive-detection unit 212. The fourth elastic beam 244 has very high stiffness along the X-axis, so that the detection unit 213 cannot move relative to the detection anchor point 252 in the X-axis direction. The fourth elastic beam 244 has very low stiffness along the Y-axis, so that the detection unit 213 can move relative to the detection anchor point 252 in the Y-axis direction. In other words, due to the restrictive effect of the fourth elastic beam 244, the detection unit 213 can only move along the Y-axis.

[0065] Each tuning fork structure of this embodiment adopts a "three-mass-four-beam" structure, which eliminates the mutual influence between the driving mode and the detection mode. Specifically, when each tuning fork structure is working, the driving unit 211 performs simple harmonic motion along the X-axis under the action of the alternating electrostatic force, and drives the driving-detection unit 212 to perform simple harmonic motion along the X-axis via the second elastic beam 242. At this time, due to the limiting effect of the fourth elastic beam 244, the detection unit 213 does not move along the X-axis. When there is an angular velocity input along the Z-axis, the driving unit 211 and the driving-detection unit 212 feel the Coriolis force along the Y-axis, generating a tendency to move along the Y-axis; because the first elastic beam 241 limits the movement of the driving unit 211 along the Y-axis, only the driving-detection unit 212 moves along the Y-axis. At the same time, the driving-detection unit 212 drives the detection unit 213 to move synchronously along the Y-axis via the third elastic beam 243. That is to say, when the driving unit 211 and the driving-detection unit 212 move along the X-axis, the detection unit 213 remains stationary along the X-axis; when there is angular velocity input and the driving-detection unit 212 and the detection unit 213 move along the Y-axis, the driving unit 211 remains stationary along the Y-axis, achieving a double decoupling effect.

[0066] Figure 5 FIG1 shows a schematic diagram of a driving coupling structure of a first tuning fork structure 210a and a second tuning fork structure 210b according to a first embodiment of the present invention. Figure 3 and Figure 5 The drive coupling structure 260 includes a first drive coupling beam 261, a second drive coupling beam 262, a third drive coupling beam 263, and a drive coupling anchor 264. One end of the first drive coupling beam 261 is fixedly connected to the drive unit 211 of one of the first and second tuning fork structures 210a, 210b, and the other end is fixedly connected to the third drive coupling beam 263. One end of the second drive coupling beam 262 is fixedly connected to the drive unit 211 of the other of the first and second tuning fork structures 210a, 210b, and the other end is fixedly connected to the third drive coupling beam 263. The first and second drive coupling beams 261, 262 are both connected to the middle portion of the third drive coupling beam 263, and both ends of the third drive coupling beam 263 are fixedly connected to the drive coupling anchor 264. In this embodiment, the first and second drive coupling beams 261, 262 are arranged in parallel.

[0067] The drive coupling structure 260 couples the drive units 211 of the first tuning fork structure 210a and the second tuning fork structure 210b together, enabling the first tuning fork structure 210a and the second tuning fork structure 210b to move synchronously along the X-axis. The drive coupling structure 260 effectively increases the frequency of the driven parasitic mode (i.e., the in-phase mode) and suppresses interference from the driven parasitic mode.

[0068] Figure 6 FIG. 2 shows a schematic structural diagram of a detection coupling structure of a first tuning fork structure 210 a and a second tuning fork structure 210 b according to a first embodiment of the present invention. Figure 7 FIG1 shows an equivalent structural diagram of the detection coupling structure of the first embodiment of the present invention. Figure 3 、 Figure 6 as well as Figure 7 The detection coupling structure 280 includes a first detection coupling beam 281, a second detection coupling beam 282, a detection coupling truss 283, a detection coupling anchor point 284, and a coupling hinge 285. One end of the first detection coupling beam 281 is hinged to the detection unit 213 of one of the first tuning fork structure 210a and the second tuning fork structure 210b, and the other end is hinged to the first end 2831 of the detection coupling truss 283. One end of the second detection coupling beam 282 is hinged to the detection unit 213 of the other of the first tuning fork structure 210a and the second tuning fork structure 210b, and the other end is hinged to the second end 2832 of the detection coupling truss 283. The middle portion of the detection coupling truss 283 is hinged to the detection coupling anchor point 284 via a coupling hinge 285.

[0069] Furthermore, detection coupling structure 280 includes two sets of constraint hinges 286. Each set of constraint hinges 286 is hinged at one end to detection coupling truss 283 and at the other end to detection coupling anchor 284. The two sets of constraint hinges 286 are symmetrical about the central axis of detection coupling truss 283 and are used to limit the freedom of movement of detection coupling truss 283 in a first direction (the X-axis). Detection coupling structure 280 effectively increases the frequency of detecting parasitic modes (i.e., detecting in-phase modes) and suppresses interference from detecting parasitic modes.

[0070] Figure 8a and Figure 8b The possible movement forms of the detection unit of the first embodiment of the present invention are shown. The detection units 213 of the first tuning fork structure 210a and the second tuning fork structure 210b are coupled together via the detection coupling structure 280. Due to the effect of the orthogonal error, the first tuning fork structure 210a and the second tuning fork structure 210b generate a torque rotating around the Z axis, causing a displacement along the Y axis. When the detection unit 213 of one of the first tuning fork structure 210a and the second tuning fork structure 210b generates a displacement along the positive direction of the Y axis due to the orthogonal error, the detection coupling truss 283 has a large bending stiffness and cannot be bent. Under the drive of the detection coupling truss 283, the detection unit 213 of the other tuning fork structure of the first tuning fork structure 210a and the second tuning fork structure 210b generates a displacement along the negative direction of the Y axis, and the displacement amounts of the detection units 213 of the first tuning fork structure 210a and the second tuning fork structure 210b are approximately equal, as shown in FIG. Figure 8aSimilarly, when the detection unit 213 of one of the first tuning fork structure 210a and the second tuning fork structure 210b generates a displacement in the negative direction of the Y axis due to the orthogonal error, the detection coupling truss 283 has a large bending stiffness and cannot be bent. Therefore, under the drive of the detection coupling truss 283, the detection unit 213 of the other of the first tuning fork structure 210a and the second tuning fork structure 210b generates a displacement in the positive direction of the Y axis, and the displacement amounts of the detection units 213 of the first tuning fork structure 210a and the second tuning fork structure 210b are substantially equal, as shown in FIG. Figure 8b That is, the displacement directions of the detection units of the first tuning fork structure 210a and the second tuning fork structure 210b on the Y axis are opposite and the sizes are almost equal.

[0071] Furthermore, due to the action of the detection coupling structure 280, the possible movement forms of the orthogonal error of the first tuning fork structure 210a and the second tuning fork structure 210b are reduced from four to two, and the sizes are basically equal. There is no need to control each tuning fork structure separately, so the number of suppression electrode configuration methods and control loops can be reduced.

[0072] Figure 9 FIG. 1 shows a schematic diagram of the structure of the quadrature error suppression electrode according to the first embodiment of the present invention. Figure 9 As shown, in this embodiment, the orthogonal error suppression electrode 220 includes a first suppression electrode 221 and a second suppression electrode 222; the first suppression electrode 221 and the second suppression electrode 222 are symmetrical about the central axis of the drive-detection unit and are respectively connected to the control loop (not shown in Figure 9).

[0073] The first suppression electrode 221 includes a first fixed suppression electrode plate 2211 and a first movable suppression electrode plate 2212. The first fixed suppression electrode plate 2211 is fixedly connected to the first suppression electrode anchor point 2213. The first movable suppression electrode plate 2212 is fixedly connected to the outer wall of the driving-detecting unit of each tuning fork structure. It moves with the driving-detecting unit of the tuning fork structure, and the first fixed suppression electrode plate 2211 and the first movable suppression electrode plate 2212 are opposite to each other.

[0074] The second suppression electrode 222 includes a second fixed suppression electrode plate 2221 and a second movable suppression electrode plate 2222. The second fixed suppression electrode plate 2221 is fixedly connected to the second suppression electrode anchor point 2223. The second movable suppression electrode plate 2222 is fixedly connected to the outer wall of the driving-detecting unit 212 of each tuning fork structure. It moves with the driving-detecting unit of the tuning fork structure, and the second fixed suppression electrode plate 2221 and the second movable suppression electrode plate 2222 are opposite to each other.

[0075] Furthermore, the first suppression electrodes 221 can be disposed on one or both sides of each tuning fork structure. When disposed on both sides of each tuning fork structure, the relative positions of the first fixed electrode plate and the first movable electrode plate of each set of first suppression electrodes 221 are configured so that the electrostatic forces generated by the first suppression electrodes 221 on both sides of each tuning fork structure are equal in magnitude and opposite in direction. For example, the control loop provides a first voltage to the first suppression electrodes 221. When the first suppression electrode 221 on one side of the first tuning fork structure 210a or the second tuning fork structure 210b generates an electrostatic force in the positive direction of the Y-axis, the first suppression electrode 221 on the other side of the tuning fork structure generates an electrostatic force of equal magnitude in the negative direction of the Y-axis, and vice versa.

[0076] Similarly, the second suppression electrodes 222 can be disposed on one or both sides of each tuning fork structure. When disposed on both sides of each tuning fork structure, the relative positions of the second fixed electrode plate and the second movable electrode plate of each set of second suppression electrodes 222 are configured so that the electrostatic forces generated by the second suppression electrodes 222 on both sides of each tuning fork structure are equal in magnitude and opposite in direction. For example, the control loop provides a second voltage to the second suppression electrodes 222. When the second suppression electrode 222 on one side of the first tuning fork structure 210a or the second tuning fork structure 210b generates an electrostatic force in the positive direction of the Y-axis, the second suppression electrode 222 on the other side of the tuning fork structure generates an electrostatic force of equal magnitude in the negative direction of the Y-axis, and vice versa.

[0077] Furthermore, the first suppression electrode 221 and the second suppression electrode 222 are both connected to a control loop, and the control loop applies a first voltage (for example, +V f ), applying a second voltage (e.g., -V f ), wherein the first voltage and the second voltage have the same amplitude and opposite phase. Since the DC bias potential of the driving-detecting unit of the first tuning fork structure 210a and the second tuning fork structure 210b is V0, the voltage difference between the first fixed suppression electrode plate 2211 and the first movable suppression electrode plate 2212 is V0-V f , V0+V of the second fixed suppression electrode plate 2221 and the second movable suppression electrode plate 2222 f Since the first suppression electrode and the second suppression electrode are symmetrical about the center axis of the drive-detection unit and have the same number of electrode plates, the electrostatic forces generated are unequal in magnitude and opposite in direction.

[0078] Figure 10 FIG. 2 shows a schematic structural diagram of a micro-electromechanical gyroscope according to a second embodiment of the present invention. Figure 10As shown, the MEMS gyroscope includes a first tuning fork structure 210a and a second tuning fork structure 210b, two groups of suppression electrodes 220 (specifically, a first suppression electrode 221 and a second suppression electrode 222), a control loop (not shown in FIG10 ), a drive coupling structure 260, and a detection coupling structure 280. The first tuning fork structure 210a and the second tuning fork structure 210b have identical structures and are symmetrical to each other. The structures of the tuning fork structures 210, suppression electrodes 220, control loop, and detection coupling structure 280 are the same as those of the first embodiment.

[0079] Figure 11 FIG. 2 shows a schematic diagram of a drive coupling structure according to a second embodiment of the present invention. Figure 11 As shown, the drive coupling structure 260 includes a first drive coupling beam 261, a second drive coupling beam 262, a third drive coupling beam 263, and a drive coupling anchor 264. One end of the first drive coupling beam 261 is fixedly connected to the drive unit 211 of one of the first tuning fork structure 210a and the second tuning fork structure 210b, and the other end is fixedly connected to the third drive coupling beam 263. One end of the second drive coupling beam 262 is fixedly connected to the drive unit 211 of the other of the first tuning fork structure 210a and the second tuning fork structure 210b, and the other end is fixedly connected to the third drive coupling beam 263. The first drive coupling beam 261 and the second drive coupling beam 262 are both connected to the middle portion of the third drive coupling beam 263, and both ends of the third drive coupling beam 263 are fixedly connected to the drive coupling anchor 264. Different from the first embodiment, in this embodiment, the first driving coupling beam 261 and the second driving coupling beam 262 are arranged in a "V" shape to adapt to the anti-phase movement trends of the driving units of the first tuning fork structure and the second tuning fork structure.

[0080] Furthermore, in this embodiment, the driving coupling structure 260 and the detecting coupling structure 280 share the same anchor point, that is, the driving coupling anchor point 264 coincides with the detecting coupling anchor point 284 , further simplifying the structure of the MEMS gyroscope.

[0081] Figure 12 FIG. 3 shows a schematic structural diagram of a micro-electromechanical gyroscope according to a third embodiment of the present invention. Figure 12 As shown, the MEMS gyroscope includes a first tuning fork structure 210a and a second tuning fork structure 210b, two groups of suppression electrodes 220 (specifically a first suppression electrode 221 and a second suppression electrode 222), a group of control loops ( Figure 12 ), a drive coupling structure 260, and a detection coupling structure 280. The first tuning fork structure 210a and the second tuning fork structure 210b are identical and symmetrical to each other. The tuning fork structure 210, the suppression electrode 220, the control loop, and the drive coupling structure 260 are identical to those of the first embodiment.

[0082] Figure 13 FIG. 2 shows a schematic structural diagram of a detection coupling structure of a first tuning fork structure 210 a and a second tuning fork structure 210 b according to a third embodiment of the present invention. Figure 14 FIG3 shows an equivalent structural diagram of the detection coupling structure of the third embodiment of the present invention. Figure 12 、 Figure 13 as well as Figure 14 The detection coupling structure 280 includes a first detection coupling beam 281, a second detection coupling beam 282, a detection coupling truss 283, a detection coupling anchor point 284, and a coupling hinge 285. One end of the first detection coupling beam 281 is hinged to the detection unit 213 of one of the first tuning fork structure 210a and the second tuning fork structure 210b, and the other end is hinged to the first end 2831 of the detection coupling truss 283. One end of the second detection coupling beam 282 is hinged to the detection unit 213 of the other of the first tuning fork structure 210a and the second tuning fork structure 210b, and the other end is hinged to the second end 2832 of the detection coupling truss 283. The middle portion of the detection coupling truss 283 is hinged to the detection coupling anchor point 284 via a coupling hinge 285.

[0083] The detection coupling structure 280 also includes two groups of constraint hinges 286. Different from the first embodiment, in this embodiment, the detection coupling truss 283 has a cavity 2833 inside, and the constraint hinge 286 is located inside the cavity 2833. Specifically, the cavity 2833 has a hinge fixing anchor point 287. One end of each group of constraint hinges 286 is hinged to the inner wall of one side of the detection coupling truss 283, and the other end is hinged to the hinge fixing anchor point 287. The two groups of constraint hinges 286 are symmetrical with respect to the central axis of the detection coupling truss 283, and are used to limit the freedom of movement of the detection coupling truss 283 in the first direction (X-axis direction).

[0084] While embodiments of the present invention have been described above, these embodiments do not exhaustively describe all details and do not limit the invention to the specific embodiments described. Obviously, many modifications and variations are possible based on the above description. These embodiments are selected and described in detail in this specification in order to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to utilize and modify the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A micro-electromechanical gyroscope comprising: a first tuning fork structure and a second tuning fork structure, wherein the first tuning fork structure and the second tuning fork structure have the same structure and are symmetrically arranged; Each group of the tuning fork structures includes: Drive unit; a driving-detecting unit connected to the driving unit, performing simple harmonic motion along a first direction under the drive of the driving unit, and generating motion along a second direction when sensing an angular velocity in a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other; a detection unit connected to the drive-detection unit, and moving synchronously with the drive-detection unit along the second direction when the drive-detection unit moves along the second direction; The driving units of the first tuning fork structure and the second tuning fork structure are coupled together via a driving coupling structure; the detection units of the first tuning fork structure and the second tuning fork structure are coupled together via a detection coupling structure; The drive coupling structure includes: Drive coupling anchor point; a third drive coupling beam, wherein both ends of the third drive coupling beam are fixedly connected to the drive coupling anchor points respectively; a first driving coupling beam, wherein one end of the first driving coupling beam is fixedly connected to one of the driving units of the tuning fork structure, and the other end of the first driving coupling beam is fixedly connected to the middle portion of the third driving coupling beam; A second driving coupling beam, one end of the second driving coupling beam is fixedly connected to the driving unit of another tuning fork structure, and the other end of the second driving coupling beam is fixedly connected to the middle part of the third driving coupling beam.

2. The MEMS gyroscope according to claim 1, wherein: The first driving coupling beam and the second driving coupling beam are parallel to each other.

3. The MEMS gyroscope according to claim 1, wherein: The first driving coupling beam and the second driving coupling beam form a "V" shape.

4. The MEMS gyroscope according to claim 1, wherein: The detection coupling structure includes: Detect coupling anchor points; a detection coupling truss, wherein a middle portion of the detection coupling truss is hinged to the detection coupling anchor point via a coupling hinge; a first detection coupling beam, wherein one end of the first detection coupling beam is hinged to the detection unit of one of the first tuning fork structure and the second tuning fork structure, and the other end of the first detection coupling beam is hinged to the first end of the detection coupling truss; A second detection coupling beam, one end of which is hinged to the detection unit of the other of the first tuning fork structure and the second tuning fork structure, and the other end of which is hinged to the second end of the detection coupling truss, wherein the first end and the second end of the detection coupling truss are opposite to each other.

5. The MEMS gyroscope according to claim 4, wherein: The first detection coupling beam and the second detection coupling beam are symmetrical with respect to a central axis of the detection coupling truss.

6. The MEMS gyroscope according to claim 4, wherein: The detection coupling structure further includes: two groups of constraint hinges, and the two groups of constraint hinges are symmetrical with respect to the central axis of the detection coupling truss.

7. The MEMS gyroscope according to claim 6, wherein: One end of each group of constraint hinges is hinged to the detection coupling truss, and the other end is hinged to the detection coupling anchor point.

8. The MEMS gyroscope according to claim 6, wherein: One end of each group of constraint hinges is hinged to the detection coupling truss, and the other end is hinged to the hinge fixing anchor point.

9. The MEMS gyroscope according to claim 1, wherein: Also includes: a first suppression electrode connected to each tuning fork structure; a second suppression electrode connected to each tuning fork structure and symmetrical to the first suppression electrode relative to the central axis of the drive-detection unit; as well as The control loop is connected to the first suppression electrode and the second suppression electrode respectively, and provides a first voltage to the first suppression electrode and a second voltage to the second suppression electrode. The first voltage and the second voltage have the same amplitude and opposite phases.

10. The MEMS gyroscope according to claim 9, wherein: The electrostatic forces generated by the first suppression electrodes on both sides of each tuning fork structure are equal in magnitude and opposite in direction; the electrostatic forces generated by the second suppression electrodes on both sides of each tuning fork structure are equal in magnitude and opposite in direction.

11. A micro-electromechanical gyroscope comprising: a first tuning fork structure and a second tuning fork structure, wherein the first tuning fork structure and the second tuning fork structure have the same structure and are symmetrically arranged; Each group of the tuning fork structures includes: Drive unit; a driving-detecting unit connected to the driving unit, performing simple harmonic motion along a first direction under the drive of the driving unit, and generating motion along a second direction when sensing an angular velocity in a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other; a detection unit connected to the drive-detection unit, and moving synchronously with the drive-detection unit along the second direction when the drive-detection unit moves along the second direction; The driving units of the first tuning fork structure and the second tuning fork structure are coupled together via a driving coupling structure; the detection units of the first tuning fork structure and the second tuning fork structure are coupled together via a detection coupling structure; The detection coupling structure includes: Detect coupling anchor points; a detection coupling truss, wherein a middle portion of the detection coupling truss is hinged to the detection coupling anchor point via a coupling hinge; a first detection coupling beam, wherein one end of the first detection coupling beam is hinged to the detection unit of one of the first tuning fork structure and the second tuning fork structure, and the other end of the first detection coupling beam is hinged to the first end of the detection coupling truss; A second detection coupling beam, one end of which is hinged to the detection unit of the other of the first tuning fork structure and the second tuning fork structure, and the other end of which is hinged to the second end of the detection coupling truss, wherein the first end and the second end of the detection coupling truss are opposite to each other.

12. The MEMS gyroscope according to claim 11, wherein: The drive coupling structure includes: Drive coupling anchor point; a third drive coupling beam, wherein both ends of the third drive coupling beam are fixedly connected to the drive coupling anchor points respectively; a first driving coupling beam, wherein one end of the first driving coupling beam is fixedly connected to one of the driving units of the tuning fork structure, and the other end of the first driving coupling beam is fixedly connected to the middle portion of the third driving coupling beam; A second driving coupling beam, one end of the second driving coupling beam is fixedly connected to the driving unit of another tuning fork structure, and the other end of the second driving coupling beam is fixedly connected to the middle part of the third driving coupling beam.

13. The MEMS gyroscope according to claim 12, wherein: The first driving coupling beam and the second driving coupling beam are parallel to each other.

14. The MEMS gyroscope according to claim 12, wherein: The first driving coupling beam and the second driving coupling beam form a "V" shape.

15. The MEMS gyroscope according to claim 11, wherein: The first detection coupling beam and the second detection coupling beam are symmetrical with respect to a central axis of the detection coupling truss.

16. The MEMS gyroscope according to claim 11, wherein: The detection coupling structure further includes: two groups of constraint hinges, and the two groups of constraint hinges are symmetrical with respect to the central axis of the detection coupling truss.

17. The MEMS gyroscope according to claim 16, wherein: One end of each group of constraint hinges is hinged to the detection coupling truss, and the other end is hinged to the detection coupling anchor point.

18. The MEMS gyroscope according to claim 16, wherein: One end of each group of constraint hinges is hinged to the detection coupling truss, and the other end is hinged to the hinge fixing anchor point.

19. The MEMS gyroscope according to claim 11, wherein: Also includes: a first suppression electrode connected to each tuning fork structure; a second suppression electrode connected to each tuning fork structure and symmetrical to the first suppression electrode relative to the central axis of the drive-detection unit; as well as The control loop is connected to the first suppression electrode and the second suppression electrode respectively, and provides a first voltage to the first suppression electrode and a second voltage to the second suppression electrode. The first voltage and the second voltage have the same amplitude and opposite phases.

20. The MEMS gyroscope according to claim 19, wherein: The electrostatic forces generated by the first suppression electrodes on both sides of each tuning fork structure are equal in magnitude and opposite in direction; the electrostatic forces generated by the second suppression electrodes on both sides of each tuning fork structure are equal in magnitude and opposite in direction.

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