Probe assembly mechanism and probe assembly method

Abstract

The present invention relates to the technical field of probe assembly, and discloses a probe assembly mechanism and a probe assembly method, wherein the probe assembly mechanism utilizes an adsorption unit to adsorb the probe onto a port of a suction head body, and simultaneously utilizes a boss on a probe connecting portion to abut against a stopper portion to complete the assembly of the probe and the suction head, and in addition, an adjustment unit is also provided at the port, and the size of the port is adjusted by the adjustment unit, which can further improve the adaptability to the probe specifications, thereby improving the assembly effect; the probe assembly method can eliminate the need for manual identification and alignment of the installation direction of the probe, thereby improving the assembly efficiency and yield, and the method only requires processing a suction head through vacuum adsorption, and has the advantages of simple processing, easy implementation and convenient operation.

Description

Technical Field

[0001] The present invention relates to the technical field of probe assembly, and in particular to a probe assembly mechanism and a probe assembly method. Background Art

[0002] With the continuous advancement of chip technology, the requirements for the chip testing field are getting higher and higher. Semiconductor test probes are mainly used as tools for conducting tests between semiconductors and PCB boards. The probes need to be assembled before use. However, the existing assembly method makes it difficult to align the probes and makes it difficult for workers to choose the direction of insertion, resulting in a certain inclination of the assembled probes. The inclined probes will produce large errors during the test operation and may even cause damage to the probes.

[0003] Therefore, it is necessary to improve the existing assembly structure and assembly method to improve the assembly effect and assembly efficiency. Summary of the invention

[0004] The purpose of the present invention is to provide a probe assembly mechanism and a probe assembly method to improve assembly effect and assembly efficiency.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] The probe assembly mechanism assembles the probe using a suction head, wherein the suction head comprises:

[0007] A suction head body, wherein a port is disposed at the end of the suction head body, a stopper is disposed at the port, and the stopper is used to abut against the probe;

[0008] An adjustment unit, the adjustment unit is arranged outside the suction head body and is used to adjust the opening size of the port;

[0009] An adsorption unit, which is disposed inside the suction head body and is used to adsorb the probe onto the suction head;

[0010] The probe comprises a connecting portion, which is arranged at one end of the probe. A boss is arranged on the connecting portion, and the boss is used to abut against the outer side of the port.

[0011] The probe assembly mechanism utilizes an adsorption unit to adsorb the probe onto the port of the suction tip body. At the same time, the boss on the probe connecting part abuts against the stopper to complete the assembly of the probe and the suction tip. In addition, an adjustment unit is also provided at the port. The size of the port is adjusted by the adjustment unit, which can further improve the adaptability to the probe specifications and thereby improve the assembly effect.

[0012] As a preferred solution of the above-mentioned probe assembly mechanism, a first cut surface is provided at the top end of the connecting portion, and an extension direction of the first cut surface intersects with the adsorption direction.

[0013] The first section is used to form a conical structure at the connection part, which is convenient for the adsorption assembly of the adsorption unit. At the same time, the conical structure probe is a Kelvin probe, which can realize the functions of high-speed and high-resolution potential distribution measurement, fast-changing potential distribution measurement and low-noise potential distribution measurement.

[0014] As a preferred solution of the above-mentioned probe assembly mechanism, second cut surfaces are further provided on both sides of the connecting portion, and the extension direction of the second cut surfaces is parallel to the adsorption direction.

[0015] The two sides of the connection part are set as inclined surfaces and parallel to the adsorption direction, so that the probe can be adsorbed and assembled only along a specific direction, so that the staff no longer needs to adjust the position of the probe multiple times, further improving the assembly efficiency and yield.

[0016] As a preferred solution of the above-mentioned probe assembly mechanism, the adjustment unit includes a driving member and an adjusting member, the output end of the driving member is set to two and arranged relatively, the adjusting member is set to two and connected to the output end of the driving member one by one, and the driving member can expand or reduce the positions of the two adjusting members to adjust the size of the port.

[0017] A driving member is used to drive the opening sizes of two relatively set adjustment ports to achieve the purpose of adjustable port size. At the same time, the structure of the above-mentioned adjustment unit can simultaneously make the adjustment members move relatively, thereby ensuring that the center of the port remains unchanged, avoiding the staff from performing secondary calibration, thereby further improving the staff's calibration efficiency.

[0018] As a preferred solution of the above-mentioned probe assembly mechanism, a groove is provided on the adjusting member, and the two adjusting members can move relative to each other to expand or reduce the port.

[0019] By arranging a groove on the adjusting member and using the groove to form a port, the installation of the probe is ensured while saving the manufacturing cost of the suction head.

[0020] As a preferred solution of the above-mentioned probe assembly mechanism, a guide groove is further provided on the suction head body, the guide groove is communicated with the port, and the width of the guide groove is greater than the width of the connecting portion.

[0021] By arranging a guide groove on the suction head body, the connecting part of the probe can directly reach the preset position of the port through the guide groove, thereby assisting the staff in installation and improving the installation efficiency.

[0022] As a preferred solution of the above-mentioned probe assembly mechanism, the interior of the suction head is a hollow adsorption chamber, the adsorption chamber has a stepped structure, and the width of the adsorption chamber close to the port is smaller than the width of the adsorption chamber far from the port.

[0023] The adsorption chamber is configured as a stepped structure, and the width of the adsorption chamber at the port is small, which increases the pressure at the port and thus ensures the adsorption effect.

[0024] The probe assembly method, using the probe assembly mechanism as described above to install the probe on the port of the suction head, comprises the following steps:

[0025] Processing a suction head;

[0026] The probe is mounted on the suction head using the adsorption unit.

[0027] This method can eliminate the need for manual identification and alignment of the installation direction of the probe, thereby improving assembly efficiency and yield. In addition, this method only requires the processing of a suction head through vacuum adsorption, and has the advantages of simple processing, easy implementation and convenient operation.

[0028] As a preferred solution of the above-mentioned probe assembly method, before the probe is installed on the suction head by using the adsorption unit, the following steps are also included:

[0029] The port and the insertion direction of the probe are calibrated so that the insertion direction of the probe is consistent with the extension direction of the port.

[0030] This step is performed by adjusting the position of the probe and the port to improve the assembly effect.

[0031] As a preferred solution of the above-mentioned probe assembly method, before calibrating the port and the insertion direction of the probe so that the insertion direction of the probe is consistent with the extension direction of the port, the method further includes the following steps:

[0032] Adjust the opening size of the port of the pipette tip.

[0033] The size of the tip port is adjusted to accommodate probes of different specifications, thereby ensuring the assembly effect.

[0034] Beneficial effects of the present invention:

[0035] The probe assembly mechanism proposed in the present invention utilizes an adsorption unit to adsorb the probe to the port of the tip body, and at the same time, utilizes the boss on the probe connecting part to abut against the outside of the port to complete the assembly of the probe and the tip. In addition, an adjustment unit is also provided at the port, and the size of the port is adjusted by the adjustment unit, which can further improve the adaptability to the probe specifications and thereby improve the assembly effect.

[0036] The probe assembly method proposed in the present invention can eliminate the need for manual identification and alignment of the installation direction of the probe, thereby improving assembly efficiency and yield. In addition, the method only requires the processing of a suction head through vacuum adsorption, and has the advantages of simple processing, easy implementation and convenient operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a structural schematic diagram of the probe assembly mechanism provided by the present invention;

[0038] Figure 2 It is a schematic diagram of the structure of the suction head provided by the present invention;

[0039] Figure 3 It is a schematic diagram of the structure of the suction tip port provided by the present invention;

[0040] Figure 4 is a cross-sectional view of the suction tip port provided by the present invention;

[0041] Figure 5 It is a schematic diagram of the structure of the probe provided by the present invention;

[0042] Figure 6 is a schematic structural diagram of the probe provided by the present invention from another perspective;

[0043] Figure 7 is a flow chart of a probe processing method provided in Embodiment 2 of the present invention;

[0044] Figure 8 It is a flow chart of the probe processing method provided in the third embodiment of the present invention.

[0045] In the figure:

[0046] 1. suction head; 11. suction head body; 111. port; 112. stopper; 113. guide groove; 114. adsorption chamber; 12. adjustment unit; 121. driving member; 122. adjustment member;

[0047] 2. Probe; 21. Boss; 22. Connecting portion; 221. First section; 222. Second section; 23. Probe body. DETAILED DESCRIPTION

[0048] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0049] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0051] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0052] Embodiment 1:

[0053] This embodiment provides a probe 2 assembly mechanism, using a suction head 1 to assemble the probe 2, such as Figure 1-Figure 4As shown, the suction head 1 includes a suction head body 11, an adjustment unit 12 and an adsorption unit, wherein a port 111 is provided at the end of the suction head body 11, and a stopper 112 is provided at the port 111, and the stopper 112 is used to abut against the probe 2; the adjustment unit is provided outside the suction head body 11, and is used to adjust the opening size of the port 111; the adsorption unit is provided inside the suction head body 11, and is used to adsorb the probe 2 to the suction head 1; the probe 2 includes a connecting part 22, and the connecting part 22 is provided at one end of the probe 2, and a boss 21 is provided on the connecting part 22, and the boss 21 is used to abut against the outside of the port 111. The probe 2 assembly mechanism utilizes an adsorption unit to adsorb the probe 2 onto the port 111 of the tip body 11. At the same time, the boss 21 on the connecting portion 22 of the probe 2 is abutted against the outer side of the port 111 to complete the assembly of the probe 2 and the tip 1. In addition, an adjustment unit 12 is provided at the port 111. The size of the port 111 is adjusted by the adjustment unit 12, which can further improve the adaptability to the specifications of the probe 2 and thereby improve the assembly effect.

[0054] Furthermore, if Figure 5 As shown, the top of the connection part 22 is provided with a first cut surface 221, and the extension direction of the first cut surface 221 intersects with the adsorption direction. The first cut surface 221 is used to form a conical structure of the connection part 22, which is convenient for the adsorption assembly of the adsorption unit. At the same time, the conical structure probe 2 is also a Kelvin probe 2, which can realize the functions of high-speed and high-resolution potential distribution measurement, fast-changing potential distribution measurement and low-noise potential distribution measurement.

[0055] Furthermore, if Figure 5 and Figure 6 As shown, the two sides of the connection part 22 are further provided with second cut surfaces 222, and the extension direction of the second cut surfaces 222 is parallel to the adsorption direction. The two sides of the connection part 22 are set as inclined surfaces, and are parallel to the adsorption direction, so that the probe 2 can be adsorbed and assembled only along a specific direction, so that the staff no longer needs to adjust the position of the probe 2 multiple times, further improving the assembly efficiency and yield.

[0056] Specifically, Figure 5 and Figure 6 As shown, the probe 2 further includes a probe body 23, and the probe body 23 is used to test the semiconductor.

[0057] Specifically, Figure 3As shown, the adjustment unit 12 includes a driving member 121 and an adjusting member 122. The output ends of the driving member 121 are set to two and are arranged opposite to each other. The adjusting members 122 are set to two and are connected to the output ends of the driving member 121 in a one-to-one correspondence. The driving member 121 can expand or reduce the positions of the two adjusting members 122 to adjust the size of the port 111. The driving member 121 is used to drive the opening sizes of the two relatively arranged adjustment ports 111 to achieve the purpose of adjustable size of the port 111. At the same time, the structure of the above-mentioned adjustment unit 12 can simultaneously make the adjusting members 122 relatively move, thereby ensuring that the center of the port 111 remains unchanged, avoiding the staff from performing secondary calibration, thereby further improving the staff's calibration efficiency.

[0058] Specifically, the adjusting member 122 is provided with a groove, and the two adjusting members 122 can move relative to each other to expand or reduce the port 111. By providing the groove on the adjusting member 122 and using the groove to form the port 111, the manufacturing cost of the suction head 1 is saved while ensuring the installation of the probe 2.

[0059] Furthermore, if Figure 2 As shown, the suction head body 11 is further provided with a guide groove 113, which is connected to the port 111, and the width of the guide groove 113 is greater than the width of the connecting portion 22. By providing the guide groove 113 on the suction head body 11, the connecting portion 22 of the probe 2 can directly reach the preset position of the port 111 through the guide groove 113, thereby assisting the staff in installation and improving the installation efficiency.

[0060] Furthermore, if Figure 4 As shown, the interior of the suction head 1 is a hollow adsorption chamber 114, and the adsorption chamber 114 is in a stepped structure, and the width of the adsorption chamber 114 close to the port 111 is smaller than the width of the adsorption chamber 114 far from the port 111. The adsorption chamber 114 is configured as a stepped structure, and the width of the adsorption chamber 114 at the port 111 is smaller, which increases the pressure at the port 111, thereby ensuring the adsorption effect.

[0061] Furthermore, the adsorption force inside the adsorption chamber 114 is ensured to be constant. Since the cross-sectional area at the opening is reduced, and since the pressure is the quotient of the adsorption force and the cross-sectional area, that is, P=F / S, the purpose of increasing the pressure at the fracture is achieved, thereby improving the adsorption effect.

[0062] In other optional embodiments, the adsorption chamber 114 may also be in the shape of an inverted cone or an inverted truncated cone, which is not specifically limited herein.

[0063] Embodiment 2:

[0064] This embodiment provides a probe 2 assembly method, such as Figure 7As shown, the probe 2 is installed on the port 111 of the suction head 1 using the probe 2 assembly mechanism of the first embodiment, including the following steps:

[0065] S11, processing a suction head 1;

[0066] S11, using the adsorption unit to install the probe 2 on the suction head 1.

[0067] This method can eliminate the need for manual identification and alignment of the installation direction of the probe 2, thereby improving assembly efficiency and yield. In addition, this method only requires processing a suction head 1 through vacuum adsorption, and has the advantages of simple processing, easy implementation and convenient operation.

[0068] Embodiment three:

[0069] This embodiment provides a probe 2 assembly method, such as Figure 8 As shown, the probe 2 is installed on the port 111 of the suction head 1 using the probe 2 assembly mechanism of the first embodiment, including the following steps:

[0070] S21, processing a suction head 1;

[0071] S22, adjusting the opening size of the port 111 of the suction head 1;

[0072] S23, calibrating the insertion direction of the port 111 and the probe 2, so that the insertion direction of the probe 2 is consistent with the extension direction of the port 111;

[0073] S24, using the adsorption unit to install the probe 2 on the suction head 1.

[0074] This method can ensure that no manual alignment is required, the processing is simple, and the efficiency is improved. In addition, the size of the port 111 of the suction head 1 can be adjusted to accommodate probes 2 of different specifications, thereby further ensuring the assembly effect.

[0075] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A probe assembly mechanism, which uses a suction head (1) to assemble a probe (2), characterized in that: The suction head (1) comprises: A suction head body (11), wherein a port (111) is provided at an end of the suction head body (11), a stopper (112) is provided at the port (111), and the stopper (112) is used to abut against the probe (2); an adjusting unit (12), the adjusting unit being arranged outside the suction head body (11) and being used for adjusting the opening size of the port (111); An adsorption unit, the adsorption unit being arranged inside the suction head body (11) and being used for adsorbing the probe (2) onto the suction head (1); The probe (2) comprises a connecting portion (22), the connecting portion (22) being arranged at one end of the probe (2), the connecting portion (22) being provided with a boss (21), the boss (21) being used to abut against the outer side of the port (111); The top of the connecting portion (22) is provided with a first cut surface (221), and the extension direction of the first cut surface (221) intersects with the adsorption direction; the two sides of the connecting portion (22) are also provided with second cut surfaces (222), and the extension direction of the second cut surfaces (222) is parallel to the adsorption direction; The suction head body (11) is also provided with a guide groove (113), the guide groove (113) is communicated with the port (111), and the width of the guide groove (113) is greater than the width of the connecting portion (22).

2. The probe assembly mechanism according to claim 1, characterized in that: The adjusting unit (12) comprises a driving member (121) and an adjusting member (122); the driving member (121) has two output ends arranged opposite to each other; the adjusting members (122) are two and are connected to the output ends of the driving member (121) in a one-to-one correspondence; the driving member (121) can expand or reduce the positions of the two adjusting members (122) to adjust the size of the port (111).

3. The probe assembly mechanism according to claim 2, characterized in that: A groove is provided on the adjusting member (122), and the two adjusting members (122) can move relative to each other to expand or shrink the port (111).

4. The probe assembly mechanism according to any one of claims 1 to 3, characterized in that: The interior of the suction head (1) is a hollow adsorption chamber (114), the adsorption chamber (114) is in a stepped structure, and the width of the adsorption chamber (114) close to the port (111) is smaller than the width of the adsorption chamber (114) far from the port (111).

5. A probe assembly method, comprising installing a probe (2) on a port (111) of a suction head (1) using a probe assembly mechanism as claimed in any one of claims 1 to 4, wherein: The following steps are involved: Processing a suction head (1); The probe (2) is mounted on the suction head (1) using the adsorption unit.

6. The probe assembly method according to claim 5, characterized in that: Before the probe (2) is mounted on the suction head (1) using the adsorption unit, the following steps are also included: The port (111) and the insertion direction of the probe (2) are calibrated so that the insertion direction of the probe (2) is consistent with the extension direction of the port (111).

7. The probe assembly method according to claim 6, characterized in that: Before calibrating the insertion direction of the port (111) and the probe (2) so that the insertion direction of the probe (2) is consistent with the extension direction of the port (111), the following steps are also included: The opening size of the port (111) of the suction head (1) is adjusted.

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