Surface treatment method of aluminum target

Abstract

The application provides a surface treatment method of an aluminum target material, which comprises first turning, second turning, third turning and polishing treatment on the surface of the aluminum target material in sequence; the polishing treatment is carried out by using a wool wheel, and the contact pressure of the wool wheel with the aluminum target material to be polished is 0.02-0.06 MPa. Through reasonable configuration of the surface treatment process of the target material, the roughness and the range of the surface of the aluminum target material after treatment are reduced by using multiple turning and wool wheel polishing, so that the sputtering use requirement of the aluminum target material is met, and the problem of Arcing of the target material in the initial use stage is avoided; and by controlling the contact pressure to be 0.02-0.06 MPa, the aluminum target material is fully polished, and the problems of over-polishing or insufficient polishing of the surface of the aluminum target material caused by too small or too large contact pressure are avoided, so that the surface roughness of the aluminum target material is increased.

Description

Technical Field

[0001] This invention belongs to the field of target material processing technology and relates to a surface treatment method for aluminum targets. Background Technology

[0002] Magnetron sputtering is a deposition process that uses charged particles to bombard a target material, causing target atoms to overflow from the surface and be uniformly deposited onto a substrate. Magnetron sputtering offers advantages such as high sputtering efficiency, low substrate temperature, strong adhesion between the substrate and the film, and excellent film uniformity. Magnetron sputtering technology has been widely used in the manufacturing processes of integrated circuits, information storage devices, liquid crystal displays, laser memories, electronic control devices, and other electronic and information industry components.

[0003] With the rapid development of the electronics industry, such as in integrated circuit manufacturing, the size of chip substrates is constantly increasing while the size of electronic devices is constantly decreasing. Consequently, the integration density of integrated circuits is increasing, placing increasingly stringent demands on magnetron sputtering technology. The quality of the sputtering target used is one of the key factors affecting the quality of magnetron sputtering coatings. Therefore, the quality requirements for sputtering targets are higher than those in traditional materials industries.

[0004] Existing target manufacturing processes can no longer meet the quality requirements of targets. Inappropriate target surface conditions can lead to various problems during use, such as initial abnormal discharge (arcing), resulting in abnormalities in the coated target. Arcing not only impairs film stability but also causes particle deposition and accumulation on the target, forming clumps that deposit on the film, leading to film defects. Excessive current can also cause target breakdown or power supply damage.

[0005] CN111270211A discloses a method for extending the lifespan of a target material. The method includes sequentially polishing, knurling, and sandblasting the target material. Knurling and sandblasting of the target surface solve the problem of abnormal sputtering during the coating process. However, the above method is complex, has high production costs, and is not conducive to industrial production.

[0006] Therefore, it is urgent to optimize the surface treatment process of the target material to solve the problem of abnormal discharge in the early stage of target sputtering in the existing technology, so as to ensure the quality of the coated product. Summary of the Invention

[0007] The purpose of this invention is to provide a surface treatment method for aluminum targets. By rationally configuring the surface treatment process of the target, and using a combination of multiple turning and wool wheel polishing, the roughness and its range of the aluminum target surface after treatment are reduced, thus avoiding arcing problems in the early stages of use.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] This invention provides a surface treatment method for aluminum target material, the surface treatment method comprising sequentially performing a first turning, a second turning, a third turning, and a polishing process on the surface of the aluminum target material;

[0010] The polishing process is performed using a wool wheel, and the contact pressure between the wool wheel and the aluminum target to be polished is 0.02-0.06 MPa.

[0011] The surface treatment method provided by this invention involves sequentially performing a first turning, a second turning, a third turning, and polishing on the surface of an aluminum target. Through a rational configuration of the surface treatment process, combining multiple turning operations with wool wheel polishing, the surface roughness and its range of variation of the treated aluminum target are reduced, meeting the requirements for sputtering and avoiding arcing problems in the early stages of use. Furthermore, by controlling the contact pressure to 0.02-0.06 MPa, sufficient polishing is ensured, avoiding over-polishing or under-polishing of the aluminum target surface due to excessively low or high contact pressure, both of which would lead to increased surface roughness. This surface treatment method is simple to operate and suitable for large-scale application.

[0012] As a preferred technical solution of the present invention, the cutting tools for the first turning, the second turning and the third turning are all diamond turning tools.

[0013] As a preferred technical solution of the present invention, the spindle speed of the first turning is 260-320 r / min, for example, it can be 270 r / min, 280 r / min, 290 r / min, 300 r / min or 310 r / min, etc., but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0014] Preferably, the feed rate for the first turning is 0.23-0.28 mm / r, for example, it can be 0.24 mm / r, 0.245 mm / r, 0.25 mm / r, 0.255 mm / r, 0.26 mm / r or 0.27 mm / r, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0015] As a preferred technical solution of the present invention, the total depth of cut of the first turning is 0.8-1.2mm, for example, it can be 0.85mm, 0.9mm, 0.95mm, 1mm, 1.05mm, 1.1mm or 1.15mm, etc., but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0016] As a preferred technical solution of the present invention, the spindle speed of the second turning is 300-400 r / min, for example, it can be 310 r / min, 320 r / min, 330 r / min, 340 r / min, 350 r / min, 360 r / min, 370 r / min, 380 r / min or 390 r / min, etc., but is not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0017] Preferably, the feed rate for the second turning is 0.16-0.22 mm / r, for example, it can be 0.165 mm / r, 0.17 mm / r, 0.18 mm / r, 0.19 mm / r, 0.2 mm / r or 0.21 mm / r, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0018] As a preferred technical solution of the present invention, the total depth of cut in the second turning is 0.3-0.5mm, for example, it can be 0.32mm, 0.35mm, 0.36mm, 0.38mm, 0.4mm, 0.42mm, 0.45mm, 0.46mm or 0.48mm, etc., but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0019] As a preferred technical solution of the present invention, the spindle speed of the third turning is 420-520 r / min, for example, it can be 430 r / min, 440 r / min, 450 r / min, 460 r / min, 470 r / min, 480 r / min, 500 r / min or 510 r / min, etc., but is not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0020] Preferably, the feed rate of the third turning is 0.08-0.12 mm / r, for example, it can be 0.085 mm / r, 0.09 mm / r, 0.095 mm / r, 0.1 mm / r, 0.105 r or 0.11 r, etc., but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0021] Preferably, the total depth of cut in the third turning is 0.3-0.5 mm, for example, it can be 0.32 mm, 0.35 mm, 0.36 mm, 0.38 mm, 0.4 mm, 0.42 mm, 0.45 mm, 0.46 mm or 0.48 mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0022] It is worth noting that by controlling the range of process parameters in the first, second, and third turning processes, this invention helps to reduce the surface roughness and its range of the aluminum target material, so that the polished target material product meets the requirements for sputtering.

[0023] As a preferred technical solution of the present invention, the spindle speed of the polishing process is 350-450 r / min, for example, it can be 360 ​​r / min, 370 r / min, 380 r / min, 390 r / min, 400 r / min, 410 r / min, 420 r / min, 430 r / min or 440 r / min, etc., but is not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0024] Preferably, the polishing time is 2-4 minutes, for example, 2.2 minutes, 2.5 minutes, 2.8 minutes, 3 minutes, 3.2 minutes, 3.5 minutes or 3.8 minutes, etc., but not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0025] As a preferred technical solution of the present invention, after the polishing treatment, the surface roughness of the aluminum target is ≤0.2μm, and the surface roughness range of the aluminum target is ≤0.03μm.

[0026] As a preferred technical solution of the present invention, the surface treatment method includes sequentially performing a first turning, a second turning, a third turning, and a polishing process on the surface of the aluminum target.

[0027] The spindle speed for the first turning operation is 260-320 r / min, the feed rate is 0.23-0.28 mm / r, and the total depth of cut is 0.8-1.2 mm.

[0028] The spindle speed for the second turning operation is 300-400 r / min, the feed rate is 0.16-0.22 mm / r, and the total depth of cut is 0.3-0.5 mm.

[0029] The spindle speed for the third turning operation is 420-520 r / min, the feed rate is 0.08-0.12 mm / r, and the total depth of cut is 0.3-0.5 mm.

[0030] The polishing process is performed using a wool wheel, with a contact pressure of 0.02-0.06 MPa between the wool wheel and the aluminum target to be polished; the spindle speed for the polishing process is 350-450 r / min, and the time is 2-4 min.

[0031] After the polishing process, the surface roughness of the aluminum target is ≤0.2μm, and the surface roughness range is ≤0.03μm.

[0032] Compared with the prior art, the present invention has the following beneficial effects:

[0033] (1) The surface treatment method provided by the present invention, through the reasonable configuration of the surface treatment process of the target material, adopts multiple turning and wool wheel polishing, so that the roughness and its range value of the surface of the aluminum target material after treatment are reduced, which meets the sputtering requirements of the aluminum target material and avoids the arcing problem of the target material in the early stage of use.

[0034] (2) The surface treatment method provided by the present invention further reduces the surface roughness and its range value of aluminum target material by further configuring the process parameters of the first turning, the second turning, the third turning and polishing processes, thereby meeting the requirements for the use of aluminum target material. Detailed Implementation

[0035] The technical solution of the present invention will be further illustrated below through specific embodiments. Those skilled in the art should understand that the embodiments described are merely illustrative of the invention and should not be construed as limiting the invention in any way.

[0036] In the following examples and comparative examples, the cutting tools used for the first, second, and third turning operations are all diamond turning tools.

[0037] Example 1

[0038] This embodiment provides a surface treatment method for aluminum target material, the surface treatment method including sequentially performing a first turning, a second turning, a third turning and polishing treatments on the surface of the aluminum target material;

[0039] The spindle speed for the first turning operation is 300 r / min, the feed rate is 0.25 mm / r, and the total depth of cut is 1 mm.

[0040] The spindle speed for the second turning operation is 350 r / min, the feed rate is 0.2 mm / r, and the total depth of cut is 0.4 mm.

[0041] The spindle speed for the third turning operation is 450 r / min, the feed rate is 0.1 mm / r, and the total depth of cut is 0.4 mm.

[0042] The polishing process is performed using a wool wheel, with a contact pressure of 0.04 MPa between the wool wheel and the aluminum target to be polished; the spindle speed of the polishing process is 400 r / min, and the time is 3 min.

[0043] Example 2

[0044] This embodiment provides a surface treatment method for aluminum target material, the surface treatment method including sequentially performing a first turning, a second turning, a third turning and polishing treatments on the surface of the aluminum target material;

[0045] The spindle speed for the first turning operation is 260 r / min, the feed rate is 0.28 mm / r, and the total depth of cut is 1.2 mm.

[0046] The spindle speed for the second turning operation is 300 r / min, the feed rate is 0.22 mm / r, and the total depth of cut is 0.3 mm.

[0047] The spindle speed for the third turning operation is 420 r / min, the feed rate is 0.12 mm / r, and the total depth of cut is 0.3 mm.

[0048] The polishing process is performed using a wool wheel, with a contact pressure of 0.02 MPa between the wool wheel and the aluminum target to be polished; the spindle speed of the polishing process is 450 r / min, and the time is 4 min.

[0049] Example 3

[0050] This embodiment provides a surface treatment method for aluminum target material, the surface treatment method including sequentially performing a first turning, a second turning, a third turning and polishing treatments on the surface of the aluminum target material;

[0051] The spindle speed for the first turning operation is 320 r / min, the feed rate is 0.23 mm / r, and the total depth of cut is 0.8 mm.

[0052] The spindle speed for the second turning operation is 400 r / min, the feed rate is 0.16 mm / r, and the total depth of cut is 0.5 mm.

[0053] The spindle speed for the third turning operation is 520 r / min, the feed rate is 0.08 mm / r, and the total depth of cut is 0.5 mm.

[0054] The polishing process is performed using a wool wheel, with a contact pressure of 0.06 MPa between the wool wheel and the aluminum target to be polished; the spindle speed of the polishing process is 350 r / min, and the time is 2 min.

[0055] Example 4

[0056] This embodiment provides a surface treatment method for aluminum target material. Except that the spindle speed for the second turning is 500 r / min, all other conditions are the same as in Embodiment 1.

[0057] Example 5

[0058] This embodiment provides a surface treatment method for aluminum target material. Except for the feed rate of the second turning being 0.1 mm / r, all other conditions are the same as in Embodiment 1.

[0059] Example 6

[0060] This embodiment provides a surface treatment method for aluminum target material. Except for the feed rate of the second turning being 0.28 mm / r, all other conditions are the same as in Embodiment 1.

[0061] Example 7

[0062] This embodiment provides a surface treatment method for aluminum target material. Except for the spindle speed of the third turning operation being 600 r / min, all other conditions are the same as in Embodiment 1.

[0063] Example 8

[0064] This embodiment provides a surface treatment method for aluminum target material. Except for the feed rate of the third turning step being 0.02 mm / r, all other conditions are the same as in Embodiment 1.

[0065] Example 9

[0066] This embodiment provides a surface treatment method for aluminum target material. Except for the feed rate of the third turning step being 0.2 mm / r, all other conditions are the same as in Embodiment 1.

[0067] Example 10

[0068] This embodiment provides a surface treatment method for aluminum target material. Except for the spindle speed of 550 r / min during polishing, all other conditions are the same as in Embodiment 1.

[0069] Example 11

[0070] This embodiment provides a surface treatment method for aluminum target material. Except for the polishing time of 1 minute, all other conditions are the same as in Embodiment 1.

[0071] Comparative Example 1

[0072] This comparative example provides a surface treatment method for an aluminum target material. Except for the absence of a third turning operation and the adjustment of the total depth of cut of the second turning operation to 0.8 mm, all other conditions are the same as in Example 1.

[0073] Comparative Example 2

[0074] This comparative example provides a surface treatment method for an aluminum target material. Except for not performing the second and third turning operations and adjusting the total depth of cut of the first turning operation to 1.8 mm, all other conditions are the same as in Example 1.

[0075] Comparative Example 3

[0076] This comparative example provides a surface treatment method for aluminum targets, and all other conditions are the same as in Example 1 except that polishing is not performed.

[0077] Comparative Example 4

[0078] This comparative example provides a surface treatment method for aluminum targets. Except for the contact pressure between the wool wheel and the aluminum target to be polished being 0.01 MPa, all other conditions are the same as in Example 1.

[0079] Comparative Example 5

[0080] This comparative example provides a surface treatment method for aluminum targets. Except for the contact pressure between the wool wheel and the aluminum target to be polished being 0.09 MPa, all other conditions are the same as in Example 1.

[0081] Comparative Example 6

[0082] This comparative example provides a surface treatment method for aluminum target material. Except for the polishing process which uses sandpaper polishing, all other conditions are the same as in Example 1.

[0083] The surface roughness and its range of the polished aluminum targets in the above embodiments and comparative examples, as well as the sputtering process, are shown in Table 1.

[0084] Table 1

[0085]

[0086]

[0087] As shown in Table 1:

[0088] (1) The surface treatment method provided in Embodiments 1-3 of the present invention, through the reasonable configuration of the surface treatment process of the target material, adopts multiple turning and wool wheel polishing, so that the surface roughness of the aluminum target material after treatment is reduced to below 0.2μm and the surface roughness range is reduced to below 0.03μm, which meets the sputtering requirements of aluminum target material and avoids the arcing problem of the target material in the early stage of use.

[0089] (2) Comparing Examples 1 and 4 and 7, it can be seen that when the spindle speed is too high during the turning process, the surface roughness and its range value of the aluminum target material will increase, which is not conducive to improving the coating stability during the sputtering process.

[0090] (3) Comparing Examples 1 and 5-6, it can be seen that when the feed rate of the second turning is too small, although the aluminum target material meets the requirements for sputtering, the processing time is prolonged and the contact time between the tool and the aluminum target material is prolonged, thereby increasing the wear of the tool. When the feed rate of the second turning is too large, the surface roughness of the aluminum target material becomes worse due to the increased feed rate, and the tool will also bear a greater cutting force, accelerating the wear of the tool.

[0091] (4) Comparing Example 1 and Example 11, it can be seen that when the polishing time is too short, the surface roughness of the aluminum target will increase due to insufficient polishing between the wool wheel and the aluminum target.

[0092] (5) Comparison of Example 1 and Comparative Examples 1-3 shows that when the second turning, third turning or polishing process is omitted, the surface effect of the target material is poor, which in turn leads to the Arcing problem during sputtering.

[0093] (6) Comparing Example 1 and Comparative Examples 4-5, it can be seen that when the contact pressure of the polishing process is too small or too large, the surface of the aluminum target material is not polished enough or too polished, which will lead to an increase in the surface roughness of the aluminum target material, and thus cause the Arcing problem during the sputtering process.

[0094] The applicant declares that the detailed structural features of the present invention are illustrated through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvements to the present invention, equivalent substitutions for the components selected in the present invention, additions of auxiliary components, selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A surface treatment method of an aluminum target material, characterized by, The surface treatment method includes sequentially performing a first turning, a second turning, a third turning, and a polishing process on the surface of the aluminum target. The spindle speed for the first turning operation is 260-320 r / min, the feed rate is 0.23-0.28 mm / r, and the total depth of cut is 0.8-1.2 mm. The spindle speed for the second turning operation is 300-400 r / min, the feed rate is 0.16-0.22 mm / r, and the total depth of cut is 0.3-0.5 mm. The spindle speed for the third turning operation is 420-520 r / min, the feed rate is 0.08-0.12 mm / r, and the total depth of cut is 0.3-0.5 mm. The polishing process is performed using a wool wheel, with a contact pressure of 0.02-0.06 MPa between the wool wheel and the aluminum target to be polished; the spindle speed for the polishing process is 350-450 r / min, and the time is 2-4 min. After the polishing process, the surface roughness of the aluminum target is ≤0.2μm, and the surface roughness range is ≤0.03μm.

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