Semiconductor flexible clamp

Abstract

The invention discloses a semiconductor flexible clamp which is characterized in that the clamp comprises a vacuum pump, a threaded column, an integrated device, a left flexible contact arm and a right flexible contact arm, the vacuum pump comprises four air pressure devices, the air pressure devices are all embedded in the vacuum pump, and meanwhile the threaded column is installed in the center of the lower portion of the vacuum pump; the integrated device is connected with the vacuum pump through a threaded column and comprises a longitudinal bolt and a transverse bolt, and the longitudinal bolt and the transverse bolt control the threaded column and the flexible contact arm to move through a gear installed in the integrated device. In addition, the left flexible contact arm is installed on the lower portion of the integrated device, the left flexible contact arm comprises an upper left cavity and a lower left cavity, and the cavities are embedded in the flexible contact arm. The right flexible contact arm is installed on the lower portion of the integrated device, the right flexible contact arm comprises a right upper cavity and a right lower cavity, and the cavities are embedded in the flexible contact arm.

Description

Technical Field

[0001] The invention relates to the field of clamps, and in particular to a semiconductor flexible clamp. Background Art

[0002] Semiconductor flexible fixtures have gradually developed with the continuous development of semiconductor manufacturing technology and the improvement of production efficiency and precision requirements. In the semiconductor manufacturing process, due to the small size, high precision and complex shape of products such as wafers and chips, traditional rigid fixtures often cannot meet production needs. Therefore, flexible fixtures came into being and became an important tool in semiconductor manufacturing with their high flexibility, high precision and high adaptability.

[0003] However, the inventors of this application found that the above technology has at least the following technical problems in the process of implementing the technical solution of the invention in the embodiment of this application:

[0004] 1. Due to the different shapes of semiconductor crystals, ordinary semiconductor fixtures have poor flexibility and a low range of application.

[0005] 2. Since semiconductor crystals are fragile, ordinary semiconductor rigid fixtures can easily destroy semiconductor crystals.

[0006] 3. Ordinary rigid semiconductor clamps may suffer from elastic fatigue after repeated use, resulting in unstable clamping force. Summary of the invention

[0007] The embodiments of the present application provide a semiconductor flexible clamp, which solves the problems of ordinary semiconductor clamps in the prior art, such as poor flexibility, a small scope of application, easy destruction of semiconductor crystals, and possible elastic fatigue after repeated use, resulting in unstable clamping force, thereby achieving precise and stable clamping of semiconductors.

[0008] The present application embodiment provides a semiconductor fixture, including:

[0009] A flexible clamp, characterized in that the clamp comprises:

[0010] A vacuum pump, wherein the vacuum pump comprises:

[0011] A first air pressure device, wherein the first air pressure device is embedded in the vacuum pump;

[0012] A second air pressure device, wherein the second air pressure device is embedded in the vacuum pump;

[0013] A third air pressure device, wherein the third air pressure device is embedded in the vacuum pump;

[0014] Air pressure device 4, the air pressure device 3 is embedded in the vacuum pump

[0015] A threaded column, the threaded column is installed in the lower center of the vacuum pump;

[0016] An integrated device, wherein the integrated device is connected to the vacuum pump via the threaded column, wherein the integrated device comprises:

[0017] A longitudinal bolt, wherein the longitudinal bolt controls the longitudinal movement of the threaded column through a gear installed inside the integrated device,

[0018] A transverse bolt, wherein the transverse bolt controls the transverse movement of the soft touch arm through a gear installed inside the integrated device,

[0019] A left soft touch arm, the left soft touch arm is installed at the lower part of the integrated device, wherein the left soft touch arm includes:

[0020] An upper left cavity, wherein the upper left cavity is embedded in the left soft touch arm;

[0021] A left lower cavity, wherein the left lower cavity is embedded in the left soft touch arm;

[0022] A right soft touch arm, the right soft touch arm is installed at the lower part of the integrated device, wherein the right soft touch arm includes:

[0023] A right upper cavity, wherein the right upper cavity is embedded in the right soft touch arm;

[0024] a right lower cavity, wherein the right upper cavity is embedded in the right soft touch arm;

[0025] Further, the air pressure device 1 and the air pressure device 2 are installed on one side of the left soft touch arm, and the air pressure device 3 and the air pressure device 4 are installed on one side of the right soft touch arm;

[0026] Furthermore, the integrated device moves longitudinally on the threaded column by rotating the longitudinal bolt.

[0027] Furthermore, when the longitudinal bolt rotates clockwise, the integrated device moves upward, and when the longitudinal bolt rotates counterclockwise, the integrated device moves downward.

[0028] Furthermore, the left soft touch arm and the right soft touch arm are transversely rotated on the integrated device by rotating the transverse bolt.

[0029] Furthermore, when the transverse bolt rotates clockwise, the left soft touch arm and the right soft touch arm are tightened, and when the transverse bolt rotates counterclockwise, the left soft touch arm and the right soft touch arm are loosened.

[0030] Furthermore, the cavities in the left soft touch arm and the right soft touch arm are evacuated by the air pressure device 1, the air pressure device 2, the air pressure device 3, and the air pressure device 4 on the vacuum pump.

[0031] Furthermore, after the upper left cavity and the upper right cavity are evacuated by the air pressure device 2 and the air pressure device 3, the upper part of the left soft touch arm and the upper part of the right soft touch arm are turned outwards,

[0032] Furthermore, after the lower left cavity and the lower right cavity are evacuated by the air pressure device 1 and the air pressure device 4, the lower part of the left soft touch arm and the lower part of the right soft touch arm are turned inwards,

[0033] Furthermore, the inner sides of the left soft touch arm and the right soft touch arm are provided with anti-slip rubber particles.

[0034] One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:

[0035] 1. Since the chuck is set as a soft touch arm, the technical problems of poor flexibility and low application range of ordinary semiconductor fixtures are effectively solved, thereby achieving the technical effect that one chuck can handle a variety of semiconductors.

[0036] 2. Since the pneumatic device and the soft touch arm are provided, the technical problem that ordinary semiconductor rigid clamps easily destroy semiconductor crystals is effectively solved, thereby achieving the technical effect of non-destructive clamping of semiconductor crystals.

[0037] 3. Since the soft touch arm is made of rubber, it effectively solves the technical problem that ordinary rigid semiconductor clamps may suffer from elastic fatigue after repeated use, resulting in unstable clamping force, thereby increasing the service life of the clamp. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is an overall schematic diagram of the semiconductor flexible clamp of the present invention;

[0039] Figure 2 This is a schematic diagram of the left flexible contact arm of the semiconductor flexible clamp of the present invention;

[0040] Figure 3 This is a schematic diagram of the upper portion of the left flexible contact arm of the semiconductor flexible clamp of the present invention;

[0041] Figure 4 This is a schematic diagram of the lower portion of the left flexible contact arm of the semiconductor flexible clamp of the present invention;

[0042] Figure 5 It is an overall schematic diagram of the second embodiment of the semiconductor flexible clamp invention of the present invention. DETAILED DESCRIPTION

[0043] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0044] Embodiment 1

[0045] like Figure 1 As shown, the present invention discloses a semiconductor flexible clamp, characterized in that the clamp includes: a vacuum pump, a threaded column, the integrated device is connected to the vacuum pump through the threaded column, a left flexible touch arm, a right flexible touch arm, wherein the vacuum pump includes: four air pressure devices, the air pressure devices are all embedded in the vacuum pump, and the left flexible touch arm and the right flexible touch arm are vacuumed, and at the same time, the threaded column is installed in the lower center of the vacuum pump; wherein the integrated device includes longitudinal bolts and transverse bolts, and the longitudinal bolts and the transverse bolts The movement of the threaded column and the soft touch arm is controlled by gears installed inside the integrated device; in addition, the left soft touch arm and the right soft touch arm are installed at the lower part of the integrated device, wherein the left soft touch arm includes an upper left cavity and a lower left cavity, and the cavity is embedded in the soft touch arm; wherein the right soft touch arm includes an upper right cavity and a lower right cavity, and the cavity is embedded in the soft touch arm, and the soft touch arm is flipped inward or outward by vacuuming the left soft touch arm and the right soft touch arm, thereby solving the technical problems of poor flexibility and low application range of ordinary semiconductor fixtures.

[0046] Further, the air pressure device 1 and the air pressure device 2 are installed on one side of the left soft touch arm, and the air pressure device 3 and the air pressure device 4 are installed on one side of the right soft touch arm;

[0047] Furthermore, the integrated device moves longitudinally on the threaded column by rotating the longitudinal bolt.

[0048] Furthermore, when the longitudinal bolt rotates clockwise, the integrated device moves upward, and when the longitudinal bolt rotates counterclockwise, the integrated device moves downward.

[0049] Furthermore, the left soft touch arm and the right soft touch arm are transversely rotated on the integrated device by rotating the transverse bolt.

[0050] Furthermore, when the transverse bolt rotates clockwise, the left soft touch arm and the right soft touch arm are tightened, and when the transverse bolt rotates counterclockwise, the left soft touch arm and the right soft touch arm are loosened.

[0051] Furthermore, Figure 2 As shown, the cavities in the left soft touch arm and the right soft touch arm are evacuated and filled with vacuum through the air pressure device 1, air pressure device 2, air pressure device 3, and air pressure device 4 on the vacuum pump.

[0052] Going further, Figure 3As shown, after the upper left cavity and the upper right cavity are evacuated by the air pressure device 2 and the air pressure device 3, the upper part of the left soft touch arm and the upper part of the right soft touch arm are turned outward, which solves the technical problem that ordinary semiconductor rigid clamps are easy to destroy semiconductor crystals;

[0053] Going further, Figure 4 As shown, after the lower left cavity and the lower right cavity are evacuated by the air pressure device 1 and the air pressure device 4, the lower part of the left soft touch arm and the lower part of the right soft touch arm are turned inwards,

[0054] Furthermore, the inner sides of the left soft touch arm and the right soft touch arm are provided with anti-slip rubber particles.

[0055] The technical solutions in the above embodiments of the present application have at least the following technical effects or advantages:

[0056] 1. Since the chuck is set as a soft touch arm, the technical problems of poor flexibility and low application range of ordinary semiconductor fixtures are effectively solved, thereby achieving the technical effect that one chuck can handle a variety of semiconductors.

[0057] 2. Since the pneumatic device and the soft touch arm are provided, the technical problem that ordinary semiconductor rigid clamps easily destroy semiconductor crystals is effectively solved, thereby achieving the technical effect of non-destructive clamping of semiconductor crystals.

[0058] Embodiment 2

[0059] like Figure 1 As shown, the present invention discloses a semiconductor flexible clamp, characterized in that the clamp includes: a vacuum pump, a threaded column, the integrated device is connected to the vacuum pump through the threaded column, a left flexible touch arm, a right flexible touch arm, wherein the vacuum pump includes: four air pressure devices, the air pressure devices are all embedded in the vacuum pump, and the left flexible touch arm and the right flexible touch arm are vacuumed, and at the same time, the threaded column is installed in the lower center of the vacuum pump; wherein the integrated device includes longitudinal bolts and transverse bolts, and the longitudinal bolts and the transverse bolts The movement of the threaded column and the soft touch arm is controlled by gears installed inside the integrated device; in addition, the left soft touch arm and the right soft touch arm are installed at the lower part of the integrated device, wherein the left soft touch arm includes an upper left cavity and a lower left cavity, and the cavity is embedded in the soft touch arm; wherein the right soft touch arm includes an upper right cavity and a lower right cavity, and the cavity is embedded in the soft touch arm, and the soft touch arm is flipped inward or outward by vacuuming the left soft touch arm and the right soft touch arm, thereby solving the technical problems of poor flexibility and low application range of ordinary semiconductor fixtures.

[0060] Further, the air pressure device 1 and the air pressure device 2 are installed on one side of the left soft touch arm, and the air pressure device 3 and the air pressure device 4 are installed on one side of the right soft touch arm;

[0061] Furthermore, the integrated device moves longitudinally on the threaded column by rotating the longitudinal bolt.

[0062] Furthermore, when the longitudinal bolt rotates clockwise, the integrated device moves upward, and when the longitudinal bolt rotates counterclockwise, the integrated device moves downward.

[0063] Furthermore, the left soft touch arm and the right soft touch arm are transversely rotated on the integrated device by rotating the transverse bolt.

[0064] Furthermore, when the transverse bolt rotates clockwise, the left soft touch arm and the right soft touch arm are tightened, and when the transverse bolt rotates counterclockwise, the left soft touch arm and the right soft touch arm are loosened.

[0065] Furthermore, the cavities in the left soft touch arm and the right soft touch arm are evacuated by the air pressure device 1, the air pressure device 2, the air pressure device 3, and the air pressure device 4 on the vacuum pump.

[0066] Furthermore, after the upper left cavity and the upper right cavity are evacuated by the air pressure device 2 and the air pressure device 3, the upper part of the left soft touch arm and the upper part of the right soft touch arm are turned outward, solving the technical problem that ordinary semiconductor rigid clamps are prone to destroy semiconductor crystals;

[0067] Furthermore, after the lower left cavity and the lower right cavity are evacuated by the air pressure device 1 and the air pressure device 4, the lower part of the left soft touch arm and the lower part of the right soft touch arm are turned inwards,

[0068] Furthermore, the left soft touch arm and the right soft touch arm in the semiconductor flexible clamp are both made of rubber material, which solves the technical problem that the ordinary rigid semiconductor clamp may suffer from elastic fatigue after repeated use, resulting in unstable clamping force.

[0069] Furthermore, the inner sides of the left soft touch arm and the right soft touch arm are provided with anti-slip rubber particles.

[0070] The technical solutions in the above embodiments of the present application have at least the following technical effects or advantages:

[0071] 1. Since the soft touch arm is made of rubber, it effectively solves the technical problem that ordinary rigid semiconductor clamps may suffer from elastic fatigue after repeated use, resulting in unstable clamping force, thereby increasing the service life of the clamp.

[0072] Embodiment 3

[0073] like Figure 5 As shown, the present invention discloses a semiconductor flexible clamp, characterized in that the clamp includes: a vacuum pump, a threaded column, the integrated device connected to the vacuum pump through the threaded column, a left flexible touch arm, a right flexible touch arm, and a middle flexible touch arm, wherein the vacuum pump includes: six air pressure devices, each of which is embedded in the vacuum pump to pump vacuum into the left flexible touch arm, the right flexible touch arm, and the middle flexible touch arm, and at the same time, the threaded column is installed in the lower center of the vacuum pump; wherein the integrated device includes longitudinal bolts and transverse bolts, and the longitudinal bolts and the transverse bolts are connected by gears installed inside the integrated device The wheel controls the movement of the threaded column and the soft touch arm; in addition, the left soft touch arm, the right soft touch arm and the middle soft touch arm are installed at the lower part of the integrated device, wherein the left soft touch arm includes a left upper cavity and a left lower cavity, and the cavity is embedded in the soft touch arm; wherein the right soft touch arm includes a right upper cavity and a right lower cavity, and the cavity is embedded in the soft touch arm; wherein the middle soft touch arm includes an upper middle cavity and a lower middle cavity, and the cavity is embedded in the soft touch arm, and the soft touch arm is flipped inward or outward by vacuuming the left soft touch arm, the right soft touch arm and the middle soft touch arm, thereby solving the technical problems of poor flexibility and low application range of ordinary semiconductor fixtures.

[0074] Further, the air pressure device 1 and the air pressure device 2 are installed on one side of the left soft touch arm, the air pressure device 3 and the air pressure device 4 are installed on one side of the right soft touch arm, and the air pressure device 5 and the air pressure device 6 are installed on one side of the middle soft touch arm;

[0075] Furthermore, the integrated device moves longitudinally on the threaded column by rotating the longitudinal bolt.

[0076] Furthermore, when the longitudinal bolt rotates clockwise, the integrated device moves upward, and when the longitudinal bolt rotates counterclockwise, the integrated device moves downward.

[0077] Furthermore, the left soft touch arm, the right soft touch arm and the middle soft touch arm are laterally rotated on the integrated device by rotating the transverse bolt.

[0078] Furthermore, when the transverse bolt rotates clockwise, the left soft touch arm, the right soft touch arm and the middle soft touch arm are tightened, and when the transverse bolt rotates counterclockwise, the left soft touch arm, the right soft touch arm and the middle soft touch arm are loosened.

[0079] Furthermore, the cavities in the left soft touch arm, the right soft touch arm and the middle soft touch arm are evacuated and filled with vacuum by the air pressure device 1, the air pressure device 2, the air pressure device 3, the air pressure device 4, the air pressure device 5 and the air pressure device 6 on the vacuum pump.

[0080] Furthermore, after the upper left soft touch arm, the upper right soft touch arm and the upper middle soft touch arm are evacuated by the air pressure device 2, the air pressure device 3 and the air pressure device 5, the upper part of the left soft touch arm, the upper part of the right soft touch arm and the upper part of the middle soft touch arm are turned outward, which solves the technical problem that ordinary semiconductor rigid clamps are easy to destroy semiconductor crystals;

[0081] Furthermore, after the upper left soft touch arm, the upper right soft touch arm and the upper middle soft touch arm are evacuated by the air pressure device 1, the air pressure device 4 and the air pressure device 6, the lower part of the left soft touch arm, the lower part of the right soft touch arm and the middle soft touch arm are turned inwards.

[0082] Furthermore, the left soft touch arm, the right soft touch arm and the middle soft touch arm in the semiconductor flexible clamp are all made of rubber material, which solves the technical problem that the ordinary rigid semiconductor clamp may suffer from elastic fatigue after repeated use, resulting in unstable clamping force.

[0083] Furthermore, the inner sides of the left soft touch arm, the right soft touch arm and the middle soft touch arm are all provided with anti-slip rubber particles.

[0084] The technical solutions in the above embodiments of the present application have at least the following technical effects or advantages:

[0085] 1. Since the semiconductor flexible clamp can have two or more soft touch arms, it effectively solves the technical problems that semiconductors of special shapes cannot be clamped by fixed soft touch arms and the clamping force is unstable, thereby realizing the clamping of special semiconductors by changing the number of soft touch arms.

[0086] Although the preferred embodiments of the present invention have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0087] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A semiconductor flexible fixture (1), characterized in that: The clamp comprises (1): A vacuum pump (3), wherein the vacuum pump (3) comprises: A gas pressure device (21), wherein the gas pressure device (21) is embedded in the vacuum pump (3); A second air pressure device (22), wherein the second air pressure device (22) is embedded in the vacuum pump (3); A third air pressure device (23), wherein the third air pressure device (23) is embedded in the vacuum pump (3); Air pressure device four (24), the air pressure device three (24) is embedded in the vacuum pump (3) A threaded column (5), the threaded column (5) being installed at the lower center of the vacuum pump (3); An integrated device (13), wherein the integrated device (13) is connected to the vacuum pump (3) via the threaded column (5), wherein the integrated device (13) comprises: A longitudinal bolt (6), wherein the longitudinal bolt (6) controls the longitudinal movement of the threaded column (5) via a gear installed inside the integrated device (13), A transverse bolt (7), wherein the transverse bolt (7) controls the transverse movement of the soft touch arm via a gear installed inside the integrated device (13), A left soft touch arm (91), the left soft touch arm (91) is installed at the lower part of the integrated device (13), wherein the left soft touch arm (91) comprises: An upper left cavity (81), wherein the upper left cavity is embedded in the left soft touch arm (91); A left lower cavity (121), wherein the left lower cavity is embedded in the left soft touch arm (91); A right soft touch arm (92), the right soft touch arm (92) is installed at the lower part of the integrated device (13), wherein the right soft touch arm (92) includes: A right upper cavity (82), wherein the right upper cavity is embedded in the right soft touch arm (92); The right lower cavity (122), the right upper cavity is embedded in the right soft touch arm (92).

2. The semiconductor flexible clamp (1) according to claim 1, characterized in that: The air pressure device one (21) and the air pressure device two (22) are installed on one side of the left soft touch arm (91), and the air pressure device three (23) and the air pressure device four (24) are installed on one side of the right soft touch arm (92).

3. The semiconductor flexible clamp (1) according to claim 1, characterized in that: The integrated device (13) moves longitudinally on the threaded column (5) through the rotation of the longitudinal bolt (6).

4. The longitudinal bolt (6) according to claim 3, characterized in that When the longitudinal bolt (6) rotates clockwise, the integrated device (13) moves upward, and when the longitudinal bolt (6) rotates counterclockwise, the integrated device (13) moves downward.

5. The semiconductor flexible clamp (1) according to claim 1, characterized in that: The left soft touch arm (91) and the right soft touch arm (92) are laterally rotated on the integrated device (13) by rotating the transverse bolt (7).

6. The transverse bolt (7) according to claim 5, characterized in that When the transverse bolt (7) rotates clockwise, the left soft touch arm (91) and the right soft touch arm (92) are tightened; when the transverse bolt (7) rotates counterclockwise, the left soft touch arm (91) and the right soft touch arm (92) are loosened.

7. The semiconductor flexible clamp (1) according to claim 1, characterized in that: The cavities in the left soft touch arm (91) and the right soft touch arm (92) are evacuated by means of the air pressure device 1 (21), the air pressure device 2 (22), the air pressure device 3 (23) and the air pressure device 4 (24) on the vacuum pump (3).

8. The cavity according to claim 7, characterized in that: After the upper left cavity (81) and the upper right cavity (82) are evacuated by the air pressure device 2 (22) and the air pressure device 3 (23), the upper part of the left soft touch arm (91) and the upper part of the right soft touch arm (92) are turned outward.

9. The cavity according to claim 7, characterized in that: After the lower left cavity (121) and the lower right cavity (122) are evacuated by the air pressure device one (21) and the air pressure device four (24), the lower part of the left soft touch arm (91) and the lower part of the right soft touch arm (92) are turned inward.

10. The semiconductor flexible clamp (1) according to claim 1, characterized in that: The inner sides of the left soft touch arm (91) and the right soft touch arm (92) are both provided with anti-slip rubber particles.

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