Maintenance device

Abstract

A maintenance device for assisting replacement of a transport robot attached to a transport module includes a carriage, a housing, a first lifting unit, a lower opening / closing mechanism, a support unit, and a second lifting unit. The housing has an upper opening and a lower opening, and is disposed above the carriage. The first lifting unit is attached to the carriage and is configured so as to be capable of lifting the housing between a first upper position and a first lower position. The shell can be connected with the conveying module when located at the first upper side position. The lower opening / closing mechanism is configured so as to be capable of opening / closing the lower opening. The support unit is configured to be capable of supporting the transport robot. The second lifting unit is configured so as to be able to lift the support unit between a second upper position inside the housing and a second lower position below the housing when the housing is located at the first upper position.

Description

Technical Field

[0001] Various aspects and embodiments of the present invention are directed to maintenance devices. Background Art

[0002] Patent Document 1 discloses that when a robot (also referred to as a robot arm) is installed in a vacuum chamber for conveying a workpiece, the robot is installed by opening a cover on the upper portion of the vacuum chamber.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2013-56393 Summary of the invention

[0006] Technical problem to be solved by the invention

[0007] The present invention provides a maintenance device capable of suppressing a decrease in productivity caused by maintenance of components in a conveying module.

[0008] Technical solutions for solving technical problems

[0009] A maintenance device according to one aspect of the present invention is used to assist in the replacement of a conveying robot installed on a conveying module, and the maintenance device includes a trolley, a shell, a first lifting unit, a lower opening and closing mechanism, a support unit, and a second lifting unit. The shell has an upper opening portion and a lower opening portion, and is arranged above the trolley. The first lifting unit is installed on the trolley, and is configured to enable the shell to be lifted and lowered between a first upper position and a first lower position. The shell can be connected to the conveying module when it is located at the first upper position. The lower opening and closing mechanism is configured to open and close the lower opening portion. The support unit is configured to support the conveying robot. The second lifting unit is configured to enable the support unit to be lifted and lowered between a second upper position located inside the shell and a second lower position located below the shell when the shell is located at the first upper position.

[0010] Effects of the Invention

[0011] According to the various aspects and embodiments of the present invention, it is possible to suppress a decrease in productivity caused by maintenance of components in a conveying module. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a top view showing an example of a processing system.

[0013] Figure 2 It is a side view showing an example of a processing system.

[0014] Figure 3 This is a schematic cross-sectional view showing an example of a maintenance device.

[0015] Figure 4 This is a flowchart showing an example of a maintenance method.

[0016] Figure 5 This is a diagram for explaining an example of the maintenance procedure in the first embodiment.

[0017] Figure 6 This is an enlarged cross-sectional view showing an example of a locking mechanism.

[0018] Figure 7 This is an enlarged cross-sectional view for explaining an example of connection between the electrical system of the transfer robot and connection between the VTM and the gas system of the maintenance device.

[0019] Figure 8 This is a diagram for explaining an example of the maintenance procedure in the first embodiment.

[0020] Fig. 9 This is an enlarged cross-sectional view for explaining an example of connection between the electrical system of the transfer robot and connection between the VTM and the gas system of the maintenance device.

[0021] Fig.10 This is a diagram for explaining an example of the maintenance procedure in the first embodiment.

[0022] Fig.11 This is a diagram showing an example of the structure of the support unit.

[0023] Fig.12 This is an enlarged cross-sectional view showing an example of a locking mechanism.

[0024] Fig.13 This is an enlarged cross-sectional view for explaining an example of connection between the electrical system of the transfer robot and connection between the VTM and the gas system of the maintenance device.

[0025] Fig.14 This is a diagram for explaining an example of the maintenance procedure in the first embodiment.

[0026] Fig.15 This is an enlarged cross-sectional view for explaining an example of connection between the electrical system of the transfer robot and connection between the VTM and the gas system of the maintenance device.

[0027] Fig.16 This is a diagram for explaining an example of the maintenance procedure in the first embodiment.

[0028] Fig.17 This is a diagram for explaining an example of the maintenance procedure in the first embodiment.

[0029] Fig.18 This is a diagram for explaining an example of a maintenance procedure in the second embodiment.

[0030] Fig.19 This is a diagram for explaining an example of a maintenance procedure in the second embodiment.

[0031] Fig. 20 This is a diagram for explaining an example of a maintenance procedure in the second embodiment.

[0032] Fig.21 This is a diagram for explaining an example of a maintenance procedure in the second embodiment.

[0033] Fig. 22 This is a diagram for explaining an example of a maintenance procedure in the second embodiment.

[0034] Fig.23 This is a diagram for explaining an example of a maintenance procedure in the second embodiment.

[0035] Fig.24 This is a diagram for explaining an example of a maintenance procedure in the second embodiment.

[0036] Fig.25 This is a diagram for explaining an example of a maintenance procedure in the third embodiment.

[0037] Fig.26 This is a diagram for explaining an example of a maintenance procedure in the third embodiment.

[0038] Fig. 27 This is a diagram for explaining an example of a maintenance procedure in the fourth embodiment.

[0039] Fig.28 This is a diagram for explaining an example of a maintenance procedure in the fifth embodiment.

[0040] Fig.29 This is a diagram for explaining an example of a maintenance procedure in the fifth embodiment.

[0041] Fig.30 This is an enlarged cross-sectional view for explaining an example of connection between the EFEM and the gas system of the maintenance device.

[0042] Fig.31 This is a diagram for explaining an example of a maintenance procedure in the fifth embodiment.

[0043] Fig.32 This is a diagram for explaining an example of a maintenance procedure in the fifth embodiment.

[0044] Fig.33 This is a diagram for explaining an example of a maintenance procedure in the fifth embodiment.

[0045] Fig.34 This is a diagram for explaining an example of a maintenance procedure in the fifth embodiment.

[0046] Fig.35 This is a diagram for explaining an example of a maintenance procedure in the fifth embodiment.

[0047] Fig.36 This is a diagram for explaining an example of a maintenance procedure in the sixth embodiment.

[0048] Fig.37 This is a diagram for explaining an example of a maintenance procedure in the sixth embodiment.

[0049] Fig.38 This is a diagram for explaining an example of a maintenance procedure in the sixth embodiment.

[0050] Fig.39 This is an enlarged cross-sectional view for explaining an example of connection between the EFEM and the gas system of the maintenance device.

[0051] Fig.40 This is a diagram for explaining an example of a maintenance procedure in the sixth embodiment.

[0052] Fig.41 This is a diagram for explaining an example of a maintenance procedure in the sixth embodiment.

[0053] Fig.42 This is a diagram for explaining an example of a maintenance procedure in the sixth embodiment.

[0054] Fig.43 It is a diagram showing another example of the structure of the opening and closing mechanism. DETAILED DESCRIPTION

[0055] Hereinafter, embodiments of the maintenance device will be described in detail based on the drawings. In addition, the maintenance device of the present invention is not limited to the following embodiments.

[0056] In the operation of a conveying module for conveying substrates in a pre-set environment such as a vacuum atmosphere, it is sometimes necessary to maintain components such as a conveying robot in the conveying module. In such a case, when the conveying module is opened to the atmosphere to perform component maintenance, it takes time to return the interior of the conveying module to the original environment after the component maintenance. Therefore, substrates cannot be conveyed before the environment in the conveying module returns to the original environment, and the productivity of substrate processing is reduced.

[0057] Therefore, the present invention provides a technology capable of suppressing a decrease in productivity caused by maintenance of components in a conveying module.

[0058] (First Embodiment)

[0059] [Structure of the processing system 1]

[0060] Figure 1 It is a plan view showing an example of the structure of the processing system 1. Figure 2 1 is a side view showing an example of the processing system 1. Figure 1 and Figure 2 In the figure, for the convenience of explanation, the internal components of a part of the device are shown in the figure.

[0061] The processing system 1 includes a VTM (Vacuum Transfer Module) 11, a plurality of PMs (Process Modules) 12, a plurality of LLMs (Load Lock Modules) 13, and an EFEM (Equipment Front End Module) 14. A plurality of PMs 12 are connected to the side wall of the VTM 11 via a gate valve G1. Figure 1 In the example, the VTM 11 is connected to 6 PMs 12, but the number of PMs 12 connected to the VTM 11 may be more than 6 or less than 6. The VTM 11 and the EFEM 14 are examples of transport modules (also referred to as transfer modules).

[0062] Each PM 12 performs processing such as etching and film formation on the substrate W to be processed. A plurality of LLMs 13 are connected to the other side wall of the VTM 11 via a gate valve G2. Figure 1 In the example, VTM11 is connected to two LLM13, but the number of LLM13 connected to VTM11 may be more than two or may be one.

[0063] A transfer robot 110 is disposed in the VTM 11. The transfer robot 110 transfers the substrate W between the PM 12 and other PM 12 and between the PM 12 and the LLM 13. The VTM 11 is maintained at a predetermined pressure atmosphere lower than the atmospheric pressure.

[0064] One side wall of each LLM13 is connected to the VTM11 via a gate valve G2, and the other side wall is connected to the EFEM14 via a gate valve G3. When the substrate W is fed into the LLM13 from the EFEM14 via the gate valve G3, the gate valve G3 is closed to reduce the pressure in the LLM13 to a predetermined pressure. Then, the gate valve G2 is opened, and the substrate W in the LLM13 is fed into the VTM11 by the transport robot 110.

[0065] In addition, when the pressure in the LLM 13 is lower than the atmospheric pressure, the substrate W is fed from the VTM 11 to the LLM 13 via the gate valve G2 by the transport robot 110, and the gate valve G2 is closed. Then, the pressure in the LLM 13 is raised to the same level as the pressure in the EFEM 14. Then, the gate valve G3 is opened to feed the substrate W in the LLM 13 to the EFEM 14.

[0066] A plurality of loading devices (load ports) 15 are provided on the side wall of the EFEM 14 on the opposite side to the side wall of the EFEM 14 provided with the gate valve G3. A container 16 such as a FOUP (Front Opening Unified Pod) capable of accommodating a plurality of substrates W is connected to each loading device 15. In addition, an aligner module or the like for changing the orientation of the substrate W may also be provided in the EFEM 14. In addition, a container capable of accommodating consumable parts such as an edge ring ER is connected to any of the plurality of loading devices 15.

[0067] The EFEM 14 is filled with a gas at a predetermined pressure. In the present embodiment, the predetermined pressure is, for example, atmospheric pressure. In the present embodiment, the gas filled in the EFEM 14 is, for example, an inert gas such as nitrogen, and the inert gas circulates in the EFEM 14. A conveying robot 140 is provided in the EFEM 14. The conveying robot 140 moves in the EFEM 14 along a guide rail 141 provided on the side wall of the EFEM 14, and conveys the substrate W between the LLM 13 and a container connected to the loading device 15. An FFU (Fan Filter Unit) is provided on the upper part of the EFEM 14, and an inert gas from which particles and the like are removed is supplied from the upper part to the EFEM 14, forming a downward flow in the EFEM 14. In the present embodiment, the EFEM 14 is at atmospheric pressure, but as another mode, the pressure in the EFEM 14 can also be controlled to be a positive pressure. In this way, it is possible to suppress particles and the like from entering the EFEM 14 from the outside.

[0068] The control unit 10 has a memory, a processor, and an input / output interface. The memory can store data, programs, etc. of the processing scheme, etc. The memory is, for example, a random access memory (RAM), a read-only memory (ROM), a hard disk drive (HDD), a solid-state drive (SSD), etc. The processor controls the various parts of the processing system 1 via the input / output interface based on the data of the processing scheme, etc. stored in the memory by executing the program read from the memory. The processor is a central processing unit (CPU), a digital signal processor (DSP), etc.

[0069] [Structure of the maintenance device 20]

[0070] Figure 3It is a schematic cross-sectional view showing an example of the maintenance device 20 . Figure 3 The maintenance device 20 shown as an example is a device for assisting replacement of the transport robot mounted on the VTM 11 .

[0071] The maintenance device 20 in this embodiment includes a trolley 26, a storage container 21, a jack 25, an opening and closing mechanism 23a, an opening and closing mechanism 23b, a support unit 27, and an arm 24. The storage container 21 has an opening 22a and an opening 22b. The opening 22a is an example of an upper opening, and the opening 22b is an example of a lower opening. The storage container 21 is arranged above the trolley 26. The jack 25 is mounted on the trolley 26 and is configured to enable the storage container 21 to be raised and lowered between a first upper position and a first lower position. The first upper position and the first lower position will be described later.

[0072] The storage container 21 is connected to the conveying module when it is in the first upper position. The opening and closing mechanism 23b is configured to open and close the opening 22b. The support unit 27 supports the conveying robot. The arm 24 is configured to enable the support unit 27 to be raised and lowered between a second upper position located in the storage container 21 and a second lower position located below the storage container 21 body when the storage container 21 is in the first upper position. The second upper position and the second lower position will be described later. A through hole 211a is formed in the side wall of the storage container 21, and a pipe 211 is connected to the through hole 211a. In the present embodiment, the storage container 21 is an example of a shell, the jack 25 is an example of a first lifting unit, the opening and closing mechanism 23a is an example of an upper opening and closing mechanism, the opening and closing mechanism 23b is an example of a lower opening and closing mechanism, and the arm 24 is an example of a second lifting unit.

[0073] [Maintenance method]

[0074] Figure 4 This is a flowchart showing an example of a maintenance method. Figure 4 In the illustrated maintenance method, a work procedure of replacing the transport robot 110 in order to assist in replacing the transport robot 110 mounted on the VTM 11 is shown.

[0075] First, the storage container 21 is connected to the VTM 11 (S10). In step S10, for example, Figure 5 As shown, the trolley 26 of the maintenance device 20 moves to the bottom of the VTM 11. The movement of the trolley 26 can be performed by an operator or by an unillustrated automatic driving mechanism provided on the trolley 26. In addition, in the following, a space with a predetermined pressure atmosphere lower than the atmospheric pressure is shaded. Figure 5 In the example of , a shadow is given to the space in VTM11. Figure 5The illustrated position of the storage container 21 with respect to the carriage 26 is an example of a first lower position.

[0076] The transfer robot 110 is attached to an opening 111 formed in the bottom of the VTM 11 . Figure 6 express Figure 5 Magnified view of area A. Figure 6 113 is an enlarged cross-sectional view showing an example of the locking mechanism 113. Figure 6 As shown, the locking mechanism 113 has an actuator 1130 and a wedge-shaped cylinder 1131 provided at the bottom of the VTM11. In addition, the locking mechanism 113 has a pin 1132 provided on the conveying robot 110. The pin 1132 has: a small diameter portion 1132a provided upright on the upper surface of the peripheral portion 110b of the conveying robot 110; and a large diameter portion 1132b provided at the front end of the small diameter portion 1132a. A sealing component 110a such as an O-ring is arranged between the bottom of the VTM11 and the peripheral portion 110b of the conveying robot 110. For example, Figure 6 As shown, the cylinder 1131 can be inserted between the large diameter portion 1132b and the upper surface of the peripheral portion 110b of the conveying robot 110 by the actuator 1130. As a result, the conveying robot 110 is fixed to the bottom of the VTM 11 in a manner of closing the opening 111 of the VTM 11. The drive of the cylinder 1131 by the actuator 1130 is controlled by, for example, the control unit 10 or the like.

[0077] in addition, Figure 7 express Figure 5 Magnified view of area B. Figure 7 1 is an enlarged cross-sectional view for explaining an example of the connection of the electrical system of the transport robot 110 and the connection of the gas system of the VTM 11 and the maintenance device 20. Figure 7 As shown in FIG. 1 , a locking mechanism 113 is also provided in region B. In addition, the locking mechanism 113 is not limited to Figure 6 and Figure 7 The structure shown may also be a structure in which the VTM 11 and the conveying robot 110 are fixed by bolts or screws.

[0078] In addition, if Figure 7 As shown in the example, the electrical system of the conveying robot 110 is connected to the electrical system of the VTM11 via the connector 115. In addition, a plug 116a of the joint 116 is provided on the lower surface of the VTM11, and a valve 117a and a valve 117b are connected to the plug 116a via a pipe 114. A CDA (Clean Dry Air) supply source (dry air supply source) is connected to the valve 117a, and an exhaust device including a vacuum pump, etc., which is not shown, is connected to the valve 117b.

[0079] The socket 116b of the joint 116 is provided on the upper surface of the storage container 21, and the pipe 211 is connected to the socket 116b. The pipe 211 is connected to the space in the storage container 21 via a through hole 211a formed on the side wall of the storage container 21. The pipe 211 is provided with a valve 210. In addition, a sealing member 21a such as an O-ring is arranged on the upper surface of the storage container 21. In addition, as another example, the valve 210 may not be provided on the pipe 211.

[0080] In addition, in the present embodiment, the environment in the storage container 21 can be adjusted via the pipe 114 provided in the VTM11, but the technology of the present invention is not limited thereto. The environment in the storage container 21 can also be adjusted by a gas supply mechanism and an exhaust mechanism provided separately from the VTM11. Thus, the connection between the VTM11 and the storage container 21 can be simplified.

[0081] For example Figure 8 As shown, the opening and closing mechanism 23a is opened, the storage container 21 is lifted up by the jack 25, and the storage container 21 is connected to the VTM 11. Figure 8 The illustrated position of the storage container 21 relative to the carriage 26 is an example of a first upper position. Figure 8 In area B, for example Fig. 9 As shown, the lower surface of VTM11 contacts the upper surface of storage container 21, and the plug 116a of joint 116 is connected to the socket 116b. As a result, the gas in storage container 21 can be discharged through valve 117b and piping 211, and the pressure in storage container 21 is close to the pressure in VTM11. In addition, CDA can be supplied to storage container 21 through valve 117a and piping 211, and the pressure in storage container 21 can be restored to atmospheric pressure.

[0082] return Figure 4 Next, the environment in the storage container 21 is adjusted (S11). In step S11, the valve 117a is closed, and the valve 117b and the valve 210 are opened, thereby allowing the gas in the storage container 21 to be discharged through the pipe 211. Fig.10 As shown, the pressure in the storage container 21 is adjusted so that the pressure in the storage container 21 becomes the same as the pressure in the VTM11. At this time, the opening and closing mechanism 23b is closed. In addition, as a result of the pressure in the storage container 21 being adjusted, the pressure in the storage container 21 and the pressure in the VTM11 do not necessarily have to be completely the same pressure, and the pressure in the storage container 21 and the pressure in the VTM11 may be slightly different.

[0083] Here, the space in the storage container 21 is smaller than the space in the VTM 11. Therefore, the time required to adjust the environment in the storage container 21 to the same environment as the environment in the VTM 11 is shorter than the time required to restore the environment in the VTM 11 to the original environment after the VTM 11 is opened to the atmosphere. Therefore, compared with the case where the VTM 11 is opened to the atmosphere and the conveying robot 110 is replaced, the time required to replace the conveying robot 110 can be shortened.

[0084] After the environment in the storage container 21 is adjusted, the transport robot 110 is removed from the VTM 11 (S12). Fig.10 As shown, the transport robot 110 is supported by the support unit 27 . Fig.10 The illustrated position of the support unit 27 relative to the storage container 21 is an example of the second upper position.

[0085] For example Fig.11 As shown, the support unit 27 in this embodiment includes an actuator 270 and a gripping portion 271. The actuator 270 is fixed to the arm 24 and can drive the two gripping portions 271. The actuator 270 is driven to shorten the distance between the two gripping portions 271, so that the gripping portions 271 can grip the conveying robot 110, and the support unit 27 can support the conveying robot 110.

[0086] Next, in a state where the transport robot 110 is supported by the support unit 27, for example, Fig.12 and Fig.13 As shown, the cylinder 1131 is retracted from the large diameter portion 1132b by the actuator 1130. As a result, the lock between the VTM 11 and the conveying robot 110 is released. Fig.14 As shown, the arm 24 lowers the support unit 27 that supports the transfer robot 110 , whereby the transfer robot 110 is lowered and the transfer robot 110 is removed from the VTM 11 .

[0087] Fig.15 express Fig.14 The transfer robot 110 is lowered by the arm 24, whereby the connection between the socket 115a and the plug 115b of the connector 115 is released, and the electrical connection between the VTM 11 and the transfer robot 110 is released.

[0088] Next, the environment in the storage container 21 is adjusted (S13). In step S13, after the transfer robot 110 is stored in the storage container 21, the opening and closing mechanism 23a is closed. In addition, the valve 117b is closed, and the valve 117a and the valve 210 are opened, thereby supplying CDA into the storage container 21 through the piping 211. Thus, for example, Fig.16As shown, the pressure in the storage container 21 can be adjusted so that the pressure in the storage container 21 is close to the atmospheric pressure.

[0089] After the pressure in the storage container 21 is adjusted, the conveying robot 110 is sent out to the outside of the storage container 21 (S14). In step S14, for example, Fig.17 As shown, the opening and closing mechanism 23b is opened, and the transport robot 110 is transported to the outside of the storage container 21 through the opening 22b by the arm 24. Then, the support unit 27 is released from holding, and the transport robot 110 is handed over to an operator or the like. Fig.17 The illustrated position of the support unit 27 relative to the storage container 21 is an example of the second lower position.

[0090] Next, the other conveying robots 110 are conveyed into the storage container 21 (S15). In step S15, for example, Fig.17 As shown, the operator or the like places the other transport robot 110 on the carriage 26, and the support unit 27 holds the other transport robot 11. Then, the support unit 27 is raised by the arm 24 to store the other transport robot 110 in the storage container 21, for example, Fig.16 As shown, the opening and closing mechanism 23b is closed.

[0091] Next, the environment in the storage container 21 is adjusted (S16). In step S16, the valve 117a is closed, and the valve 117b and the valve 210 are opened, thereby exhausting the gas in the storage container 21 through the pipe 211. In this way, the pressure in the storage container 21 can be adjusted so that the pressure in the storage container 21 is close to the pressure in the VTM 11.

[0092] After the pressure in the storage container 21 is adjusted, the other transport robot 110 is installed in the VTM 11 (S17). In step S17, the opening and closing mechanism 23a is opened, for example, Fig.14 As shown, the arm 24 raises the conveying robot 110. And, for example, Fig.10 As shown in FIG. 1 , in a state where the upper surface of the peripheral portion 110b of the conveying robot 110 is in contact with the lower surface of the VTM 11, as shown in FIG. Figure 6 and Fig. 9 As shown, the cylinder 1131 is inserted below the large diameter portion 1132b by the actuator 1130. Thus, the transport robot 110 is mounted on the bottom of the VTM 11 in such a manner as to close the opening 111 of the VTM 11.

[0093] Next, the environment in the storage container 21 is adjusted (S18). In step S18, the valve 117b is closed, and the valve 117a and the valve 210 are opened, thereby supplying CDA into the storage container 21 through the pipe 211. Figure 8As shown, the pressure in the storage container 21 can be adjusted so that the pressure in the storage container 21 is close to the atmospheric pressure.

[0094] After the pressure in the storage container 21 is adjusted, the storage container 21 is removed from the VTM 11 (S19). In step S19, the storage container 21 is lowered by the jack 25, for example, Figure 5 As shown, the connection between the storage container 21 and the VTM 11 is released. Then, the maintenance method shown in this flowchart ends.

[0095] The first embodiment is described above. As described above, the maintenance device (maintenance device 20) of this embodiment is a maintenance device for assisting in replacing a conveying robot (conveying robot 110) installed in a conveying module (VTM11), and includes a trolley (trolley 26), a shell (storage container 21), a first lifting unit (jack 25), a lower opening and closing mechanism (opening and closing mechanism 23b), a support unit (support unit 27) and a second lifting unit (arm 24). The shell has an upper opening (opening 22a) and a lower opening (opening 22b), and is arranged above the trolley. The first lifting unit is mounted on the trolley and is configured to enable the shell to be lifted and lowered between a first upper position and a first lower position. The shell is connected to the conveying module when it is located at the first upper position. The lower opening and closing mechanism is configured to open and close the lower opening. The support unit is configured to support the conveying robot. The second lifting unit is configured to enable the support unit to be lifted and lowered between a second upper position located in the shell and a second lower position located below the shell when the shell is located at the first upper position. Thus, maintenance such as replacement of components arranged in VTM11 can be performed while maintaining the environment in VTM11 unchanged, and a decrease in productivity caused by maintenance of components in VTM11 can be suppressed. In addition, the environment in storage container 21 is adjusted to be the same as the environment in VTM11, and as a result, the environment in storage container 21 and the environment in VTM11 do not need to be completely the same, and the environment in storage container 21 and the environment in VTM11 may be slightly different.

[0096] Furthermore, the maintenance device in the above-described embodiment further includes an upper opening and closing mechanism (opening and closing mechanism 23 a ) configured to be able to open and close the upper opening.

[0097] Furthermore, in the above-mentioned embodiment, the housing has a through hole (211a), and the internal space of the housing communicates with the dry air supply source via the through hole.

[0098] Furthermore, in the above-described embodiment, the housing has the through hole, and the internal space of the housing communicates with the exhaust device via the through hole.

[0099] (Second Embodiment)

[0100] In the first embodiment, the maintenance device 20 is connected to the VTM 11 from below the VTM 11. However, the present embodiment is different from the first embodiment in that the storage container 21 of the maintenance device 20 is connected to the VTM 11 from above the VTM 11. The following description will focus on the differences from the first embodiment.

[0101] In this embodiment, for example, Fig.18 As shown, an opening portion 111 is formed at the upper portion of the VTM 11, and the opening portion 111 is opened and closed by an opening and closing mechanism 120. The storage container 21 of the maintenance device 20 in the present embodiment is a container having a top and an opening portion 22a at the bottom, and an arm 24 and a support unit 27 are provided in the internal space. The arm 24 is configured to enable the support unit 27 to be raised and lowered between a first position in the storage container 21 and a second position below the storage container 21. The first position and the second position will be described later. A through hole 211a is formed in the side wall of the storage container 21, and a pipe 211 is connected to the through hole 211a. In the present embodiment, the opening portion 22a is an example of a lower opening portion, and the arm 24 is an example of a lifting unit.

[0102] In this embodiment, the maintenance device 20 is transported to the top of the VTM 11 by OHT (Overhead Hoist Transport) or the like, for example. Fig.19 As shown, connect to VTM11 from above. Fig. 9 Similarly to the first embodiment described above, the upper surface of the VTM 11 is in contact with the lower surface of the storage container 21, and the plug 116a of the connector 116 is connected to the socket 116b.

[0103] Also, similarly to the first embodiment, by closing valve 117a and opening valve 117b and valve 210, the gas in storage container 21 is discharged through pipe 211. Fig. 20 As shown, the pressure in the storage container 21 can be adjusted so that the pressure in the storage container 21 becomes the same pressure as the pressure in the VTM 11.

[0104] After the pressure in the storage container 21 is adjusted, the opening and closing mechanism 120 of the VTM 11 is opened. Fig.21 As shown, the arm 24 lowers the support unit 27 through the opening 22a of the storage container 21 and the opening 111 of the VTM 11. Then, the support unit 26 enters the VTM 11 and holds the transfer robot 110 installed in the VTM 11. Fig.21 The illustrated position of the support unit 27 relative to the storage container 21 is an example of the second position.

[0105] In addition, in the present embodiment, one of the socket 115a and the plug 115b of the connector 115 is provided on the upper surface of the bottom of the VTM11. In addition, the other of the socket 115a and the plug 115b of the connector 115 is provided on the lower surface of the conveying robot 110. And, by placing the conveying robot 110 on the VTM11 in a manner that the socket 115a and the plug 115b are engaged, the electrical system of the conveying robot 110 and the electrical system of the VTM11 are connected via the connector 115.

[0106] Next, the support unit 27 is held by the support unit 27, and the arm 24 raises the support unit 27, thereby lifting the transport robot 110 and disconnecting the electrical system of the transport robot 110 from the electrical system of the VTM 11. Fig. 22 As shown, the transfer robot 110 is stored in the storage container 21 through the opening 22 a of the storage container 21 and the opening 111 of the VTM 11 , and the opening and closing mechanism 120 is closed. Fig. 22 The illustrated position of the support unit 27 relative to the storage container 21 is an example of a first position.

[0107] Next, similarly to the first embodiment, the valve 117b is closed and the valve 117a and the valve 210 are opened, thereby supplying CDA into the storage container 21 through the pipe 211. Fig.23 As shown, the pressure in the storage container 21 is adjusted so that the pressure in the storage container 21 is close to the atmospheric pressure.

[0108] After the pressure in the storage container 21 is adjusted, for example Fig.24 As shown, the maintenance device 20 is transported by the OHT or the like together with the transport robot 110 stored in the storage container 21. Then, the transport robot 110 is sent out from the maintenance device 20 by an operator or the like.

[0109] In addition, when installing other conveying robots 110, for example Fig.24 As shown, the maintenance device 20 that stores the other transport robot 110 in the storage container 21 is transported to the top of the VTM 11 by OHT or the like. Fig.23 As shown, VTM11 is connected to the maintenance device 20, for example Fig. 22 As shown, the pressure in the storage container 21 is adjusted so that the pressure in the storage container 21 is close to the pressure in the VTM 11.

[0110] After the pressure in the storage container 21 is adjusted, the opening and closing mechanism 120 of the VTM 11 is opened, for example, Fig.21As shown, another transport robot 110 is set in the VTM 11 through the arm 24 and the support unit 27. And, after the arm 24 is retracted into the storage container 21, for example, Fig. 20 As shown, the opening and closing mechanism 120 of the VTM 11 is closed.

[0111] Then, for example Fig.19 As shown, the pressure in the storage container 21 is adjusted so that the pressure in the storage container 21 is close to the atmospheric pressure. After the pressure in the storage container 21 is adjusted, for example, Fig.18 As shown, the maintenance device 20 is lifted up by OHT or the like, and the connection between the maintenance device 20 and the VTM 11 is released.

[0112] The second embodiment has been described above. The maintenance device (maintenance device 20) of this embodiment is a maintenance device for assisting in replacing a conveying robot (conveying robot 110) installed in a conveying module (VTM11), and includes a shell (storage container 21), a support unit (support unit 27) and a lifting unit (arm 24). The shell has a lower opening (opening 22a). The support unit is configured to support the conveying robot. The lifting unit is configured to enable the support unit to be lifted and lowered between a first position in the shell and a second position located below the shell. Thus, maintenance such as replacement of components arranged in VTM11 can be performed while maintaining the environment in VTM11, and the decrease in productivity caused by the maintenance of components in VTM11 can be suppressed.

[0113] Furthermore, in the above-mentioned embodiment, the housing has a through hole (211a), and the internal space of the housing communicates with the dry air supply source via the through hole.

[0114] Furthermore, in the above-described embodiment, the housing has the through hole, and the internal space of the housing communicates with the exhaust device via the through hole.

[0115] (Third Embodiment)

[0116] The maintenance device 20 in the second embodiment is a container having a top (ceiling) and an opening 22a at the bottom. The storage container 21 of the maintenance device 20 in this embodiment is different from that in the second embodiment in that it has an opening 22b at the top and an opening 22a at the bottom, and the opening 22b is opened and closed by an opening and closing mechanism 23b. The following description will focus on the differences from the second embodiment. In this embodiment, the opening 22b is an example of an upper opening, the opening 22a is an example of a lower opening, and the opening and closing mechanism 23b is an example of an upper opening and closing mechanism.

[0117] In this embodiment, in a state where the opening 22b is closed by the opening and closing mechanism 23b, the maintenance device 20 is transported to the upper side of the VTM 11 by the OHT or the like, and the storage container 21 of the maintenance device 20 is connected to the VTM 11 from the upper side of the VTM 11. After adjusting the pressure in the storage container 21, the opening and closing mechanism 120 is opened, and the transport robot 110 is stored in the storage container 21 by the arm 24 and the support unit 27. Then, the opening and closing mechanism 120 is closed, for example, Fig.25 As shown, the pressure in the storage container 21 is returned to the atmospheric pressure.

[0118] After the pressure in the storage container 21 returns to atmospheric pressure, for example, Fig.26 As shown, the opening and closing mechanism 23b is opened, and the support unit 27 and the transfer robot 110 are lifted to a position above the opening 22b by the arm 24. Then, the transfer robot 110 is transferred from the support unit 27 to the transfer unit 30 such as the OHT. Fig.26 The illustrated position of the support unit 27 relative to the storage container 21 is an example of the third position.

[0119] When other conveying robots 110 are installed, for example Fig.26 As shown, another transport robot 110 is delivered from the transport unit 30 such as OHT to the support unit 27. Then, the support unit 27 is lowered by the arm 24, for example, as shown in FIG. Fig.25 As shown, the transport robot 110 is stored in the storage container 21, and the opening and closing mechanism 23b is closed. After the pressure in the storage container 21 is adjusted, the opening and closing mechanism 120 is opened, and the transport robot 110 is installed in the VTM11 through the arm 24. Then, the arm 24 retreats into the storage container 21, the opening and closing mechanism 120 is closed, and the storage container 21 is adjusted to atmospheric pressure. After the storage container 21 becomes atmospheric pressure, the maintenance device 20 is lifted by OHT or the like, and the connection between the maintenance device 20 and the VTM11 is released.

[0120] The third embodiment has been described above. In this embodiment, the housing (storage container 21) has an upper opening (opening 22b).

[0121] In addition, in the above-mentioned embodiment, an upper opening and closing mechanism (opening and closing mechanism 23b) configured to be able to open and close the upper opening is further included.

[0122] Furthermore, in the above-described embodiment, the lifting unit (arm 24 ) is configured to be able to lift the support unit (support unit 27 ) to the third position located above the housing (storage container 21 ).

[0123] (Fourth Embodiment)

[0124] In the third embodiment, the storage container 21 of the maintenance device 20 is connected to the VTM11 while the inside of the storage container 21 is at atmospheric pressure. In the present embodiment, the storage container 21 is connected to the VTM11 while the environment inside the storage container 21 is maintained close to the environment inside the VTM11. Thus, after the storage container 21 is connected to the VTM11, the time required to make the environment inside the storage container 21 the same as the environment inside the VTM11 can be reduced, and the operation stop period of the VTM11 during maintenance can be shortened. The following description will focus on the differences from the third embodiment.

[0125] The maintenance device 20 in this embodiment is, for example, Fig. 27 As shown, there is an opening 22b at the top and an opening 22a at the bottom, the opening 22b is opened and closed by an opening and closing mechanism 23b, and the opening 22a is opened and closed by an opening and closing mechanism 23a. In this embodiment, the opening 22b is an example of an upper opening, the opening 22a is an example of a lower opening, the opening and closing mechanism 23b is an example of an upper opening and closing mechanism, and the opening and closing mechanism 23a is an example of a lower opening and closing mechanism.

[0126] In this embodiment, after adjusting the environment in the storage container 21 to the same environment as that in the VTM 11, for example, the opening and closing mechanisms 23a and 23b are closed. Fig. 27 As shown, the maintenance device 20 is transported to the top of the VTM 11 by OHT or the like. Then, the storage container 21 of the maintenance device 20 is connected to the VTM 11 from the top of the VTM 11, the opening and closing mechanism 23a and the opening and closing mechanism 120 are opened, and the arm 24 is inserted into the VTM 11 through the opening 22a and the opening 111.

[0127] Then, the support unit 27 holds the transfer robot 110, and the support unit 27 is raised by the arm 24, so that the transfer robot 110 is stored in the storage container 21. Then, at least one of the opening and closing mechanism 23a and the opening and closing mechanism 120 is closed, and the environment in the storage container 21 is adjusted to the same environment as the external environment of the storage container 21. Then, the opening and closing mechanism 23b is opened, and the support unit 27 and the transfer robot 110 are raised to a position above the opening 22b by the arm 24. Then, the transfer robot 110 is handed over from the support unit 27 to the transfer unit 30 such as the OHT.

[0128] The fourth embodiment has been described above. The maintenance device (maintenance device 20) in this embodiment further includes a lower opening and closing mechanism (opening and closing mechanism 23a) configured to be able to open and close the lower opening (opening 22a).

[0129] (Fifth Embodiment)

[0130] In each of the above-mentioned embodiments, the maintenance device 20 is connected above or below the conveying module, but in this embodiment, the maintenance device 20 is connected to the side of the conveying module. Specifically, in this embodiment, the maintenance device 20 is connected to the side of the EFEM 14. The following description will focus on the differences from the first to fourth embodiments.

[0131] For example Fig.28 As shown, the maintenance device 20 in this embodiment has a storage container 21 having an opening 22a formed on the side, and an arm 24 and a support unit 27 are provided in the storage container 21. In addition, a through hole 211a is formed in the side wall of the storage container 21, and a pipe 211 is connected to the through hole 211a. In addition, the maintenance device 20 has a carriage 26 that can transport the storage container 21.

[0132] An opening 143 is formed in the side wall of the EFEM 14, and the opening 143 is opened and closed by an opening and closing mechanism 142. In the present embodiment, the space in the EFEM 14 is filled with an inert gas such as nitrogen. Hereinafter, the space filled with the inert gas is hatched.

[0133] First, the carriage 26 is moved in a manner close to the EFEM 14, thereby, for example, Fig.29 As shown, the storage container 21 of the maintenance device 20 is connected to the EFEM 14. Fig.29 In region C, for example Fig.30 As shown, the side of the EFEM 14 contacts the side of the storage container 21, and the plug of the connector 146 is connected to the socket. Thus, by opening the valve 145c and the valve 210, the gas in the storage container 21 can be discharged through the pipe 211 and the through hole 211a. In addition, by opening the valve 145b and the valve 210, inert gas can be supplied to the storage container 21 through the pipe 211 and the through hole 211a, and the storage container 21 is filled with the inert gas. In addition, by opening the valve 145a and the valve 210, CDA can be supplied to the storage container 21 through the pipe 211 and the through hole 211a, so that the environment in the storage container 21 is close to the external environment of the storage container 21.

[0134] After the storage container 21 is connected to the EFEM 14, the environment in the storage container 21 is adjusted so that the environment in the storage container 21 becomes the same as the environment in the EFEM 14. For example, the valve 145c and the valve 210 are opened to discharge the gas in the storage container 21 through the pipe 211 and the through hole 211a, and then the valve 145b and the valve 210 are opened to supply the inert gas into the storage container 21 through the pipe 211 and the through hole 211a. After the storage container 21 is filled with the inert gas, for example, Fig.31 As shown, the opening and closing mechanism 142 is opened.

[0135] Then, the arm 24 causes the support unit 27 to enter the EFEM 14 through the opening 22a and the opening 143, and the support unit 27 holds the transport robot 140. Fig.32 As shown, the arm 24 moves away from the guide rail 141, thereby removing the conveying robot 140 from the guide rail 141. In addition, the conveying robot 140 and the guide rail 141 are locked by, for example, the same locking mechanism as in the first embodiment. In addition, the conveying robot 140 and the guide rail 141 are electrically connected, for example, by the same connector as in the first embodiment.

[0136] And, the arm 24 is withdrawn into the storage container 21, for example, Fig.33 As shown, the transfer robot 140 is stored in the storage container 21 through the opening 143 and the opening 22a. Then, the opening and closing mechanism 142 is closed, for example, Fig.34 As shown, the environment in the storage container 21 is adjusted so that the environment in the storage container 21 becomes the same as the environment outside the storage container 21. For example, the valve 145c and the valve 210 are opened to discharge the gas in the storage container 21 through the pipe 211 and the through hole 211a, and then the valve 145a and the valve 210 are opened to supply CDA into the storage container 21 through the pipe 211 and the through hole 211a.

[0137] After the storage container 21 is filled with CDA, for example Fig.35 As shown, the carriage 26 moves away from the EFEM 14, thereby releasing the connection between the EFEM 14 and the storage container 21. As a result, the transfer robot 140 in the EFEM 14 can be removed while maintaining the environment in the EFEM 14.

[0138] In addition, when another transport robot 140 is to be installed in the EFEM 14, for example Fig.35 As shown, the cart 26 carrying the storage container 21 storing the other transfer robot 140 moves in a manner close to the EFEM 14. Fig.34 As shown, the EFEM 14 is connected to the storage container 21. After the storage container 21 is filled with inert gas, for example, Fig.33 As shown, open the opening and closing mechanism 142, for example, Fig.32 As shown, the arm 24 inserts the other transfer robot 140 into the EFEM 14. Furthermore, the arm 24 mounts the other transfer robot 140 on the guide rail 141, and releases the support unit 27 from holding the transfer robot 140.

[0139] Then, for example, Fig.31As shown, after the arm 24 is retracted into the storage container 21, the opening and closing mechanism 142 is closed, and the storage container 21 is filled with CDA. After the storage container 21 is filled with CDA, for example, Fig.28 As shown, the carriage 26 moves away from the EFEM 14, thereby releasing the connection between the EFEM 14 and the storage container 21. As a result, the transfer robot 140 can be installed in the EFEM 14 while maintaining the environment in the EFEM 14.

[0140] The fifth embodiment has been described above. In this embodiment, the EFEM 14 is filled with a specific gas different from the atmosphere. In this embodiment, maintenance such as replacement of components disposed in the EFEM 14 can be performed while maintaining the environment in the EFEM 14, thereby suppressing a decrease in productivity caused by maintenance of components in the EFEM 14.

[0141] (Sixth Embodiment)

[0142] In the above-mentioned embodiments, as a component in the conveying module, the conveying robot set in the conveying module is used as an example for description, but the technology of the present invention is not limited to this. As long as the components in the conveying module are set in the conveying module and can be replaced, they can also be components other than the conveying robot. As components other than the conveying robot, for example, a loading device (load port) 15, an aligner module, a wafer holder, various sensors, a gate valve, a lifting pin, a loading table, etc. can be listed. The wafer holder is, for example, a mechanism set in the EFEM14 to temporarily store the substrate W before processing or temporarily store the substrate W after processing. The loading table is, for example, a loading table for loading the substrate W sent into the LLM13. The lifting pin is, for example, a mechanism for receiving the substrate W from the conveying robot 110 and the conveying robot 140 and placing it on the loading table in the LLM13, lifting the substrate W from the loading table in the LLM13 and handing it over to the conveying robot 110 and the conveying robot 140. In the sixth embodiment, a maintenance device 20 for assisting in replacing the loading device 15 in the conveying module is described. The following description will focus on differences from the first to fifth embodiments.

[0143] For example Fig.36 As shown, the maintenance device 20 in this embodiment has a storage container 21 having an opening 22a and an opening 22b formed on the side, and an arm 24 and a support unit 27 are provided in the storage container 21. The opening 22a is opened and closed by an opening and closing mechanism 23a, and the opening 22b is opened and closed by an opening and closing mechanism 23b. An opening 147 is formed on the side wall of the EFEM 14, and a loading device 15 is provided in the opening 147. In this embodiment, the space in the EFEM 14 is filled with an inert gas such as nitrogen. Hereinafter, the space filled with the inert gas is given a hatching.

[0144] First, for example, Fig.37 As shown, the opening and closing mechanism 230 provided in the storage container 21 is withdrawn to the interior of the storage container 21, and the opening and closing mechanism 23a is opened. Fig.38 As shown, the storage container 21 of the maintenance device 20 is connected to the EFEM 14. At this time, the storage container 21 and the EFEM 14 are connected as shown in FIG. Fig.39 As shown, the side surface of the EFEM 14 contacts the side surface of the storage container 21, and the plug of the connector 146 is connected to the socket. Fig.39 This is a diagram showing a horizontal cross section of the storage container 21 and the EFEM 14 as viewed from above.

[0145] Thus, by opening valve 145c and valve 210, the gas in storage container 21 can be discharged through piping 211 and through hole 211a. In addition, by opening valve 145b and valve 210, inert gas can be supplied into storage container 21 through piping 211 and through hole 211a, and storage container 21 is filled with inert gas. In addition, by opening valve 145a and valve 210, CDA can be supplied into storage container 21 through piping 211 and through hole 211a, so that the environment in storage container 21 is close to the external environment of storage container 21.

[0146] After the storage container 21 is connected to the EFEM 14, the environment in the storage container 21 is adjusted so that the environment in the storage container 21 becomes the same as the environment in the EFEM 14. For example, the valve 145c and the valve 210 are opened to discharge the gas in the storage container 21 through the pipe 211 and the through hole 211a, and then the valve 145c is closed and the valve 145b is opened to supply the inactive gas into the storage container 21 through the pipe 211 and the through hole 211a.

[0147] After the storage container 21 is filled with inert gas, the support unit 27 is moved close to the loading device 15 by driving the arm 24, and the support unit 27 holds the loading device 15. Then, the support unit 27 is moved away from the EFEM 14 by driving the arm 24, thereby, for example, Fig.40 As shown, the loading device 15 is removed from the EFEM 14. The loading device 15 and the EFEM 14 are locked by, for example, the same locking mechanism as in the first embodiment. In addition, the loading device 15 and the EFEM 14 are electrically connected by, for example, the same connector as in the first embodiment.

[0148] Next, the opening and closing mechanism 23a and the opening and closing mechanism 230 are closed. Fig.41As shown, the environment in the storage container 21 is adjusted so that the environment in the storage container 21 becomes the same as the environment outside the storage container 21. For example, the valve 145c and the valve 210 are opened to discharge the gas in the storage container 21 through the pipe 211 and the through hole 211a, and then the valve 145c is closed and the valve 145a is opened to supply CDA into the storage container 21 through the pipe 211 and the through hole 211a.

[0149] After the storage container 21 is filled with CDA, for example Fig.42 As shown, the opening and closing mechanism 23b is opened, and the loading device 15 is sent out of the storage container 21 through the opening 22b by driving the arm 24. Thus, the loading device 15 can be removed from the EFEM 14 while maintaining the environment in the EFEM 14.

[0150] In addition, when other loading devices 15 are to be installed on the EFEM 14, for example, Fig.42 As shown, the support unit 27 holds the other loading device 15, and the arm 24 is driven to store the loading device 15 in the storage container 21 through the opening 22b. Then, for example, Fig.41 As shown, the opening and closing mechanism 23b is closed.

[0151] After the storage container 21 is filled with inert gas, for example Fig.40 As shown, the opening and closing mechanism 230 and the opening and closing mechanism 23a are opened. Furthermore, the loading device 15 is mounted on the EFEM 14 by driving the arm 24. Thus, the loading device 15 can be mounted on the EFEM 14 while maintaining the environment in the EFEM 14. Furthermore, the holding of the loading device 15 by the support unit 27 is released, and the support unit 27 is retracted into the storage container 21 by driving the arm 24.

[0152] Then, for example Fig.38 As shown, the storage container 21 is filled with CDA, for example Fig.37 As shown, the carriage 26 moves away from the EFEM 14 , whereby the connection between the EFEM 14 and the storage container 21 is released.

[0153] The sixth embodiment has been described above. In this embodiment, components such as the loader 15 mounted on the EFEM 14 can also be replaced while maintaining the environment in the EFEM 14, thereby suppressing a decrease in productivity associated with maintenance of components mounted on the EFEM 14.

[0154] in addition, Figure 36 to Figure 42The illustrated opening and closing mechanisms 23a and 23b are opening and closing mechanisms that slide up and down, but the technology of the present invention is not limited to this. As another example, the opening and closing mechanisms 23a and 23b may also be opening and closing mechanisms that slide in an inclined direction or in a lateral direction (for example, in a horizontal direction). Or, for example, Fig.43 As shown, the opening and closing mechanisms 23a and 23b may be opening and closing mechanisms that rotate around hinges. Fig.43 This is a diagram showing a horizontal cross section of the maintenance device 20 as viewed from above.

[0155] [other]

[0156] In addition, the technology described in the present application is not limited to the above-mentioned embodiment, and various changes can be made within the scope of the gist of the technology.

[0157] For example, in the first to fourth embodiments described above, the components provided in the VTM 11 are maintained from below or above the VTM 11, but the technology of the present invention is not limited thereto. As another embodiment, for example, the components provided in the VTM 11 may be maintained from the side of the VTM 11 as in the fifth and sixth embodiments.

[0158] In the fifth and sixth embodiments described above, the components installed in the EFEM 14 are maintained from the side of the EFEM 14, but the technology of the present invention is not limited thereto. As another example, the components installed in the EFEM 14 may be maintained from below or above the EFEM 14 as in the first to fourth embodiments.

[0159] In addition, in each of the above-mentioned embodiments, the components of the conveying module are replaced by the maintenance device 20, but the technology of the present invention is not limited to this. For example, as long as the operation is related to the maintenance of the components of the conveying module, in addition to the replacement of the components, the adjustment and cleaning of the components may also be performed. For example, the components removed from the conveying module by the maintenance device 20 may be reinstalled in the conveying module by the maintenance device 20 after being adjusted, cleaned, etc.

[0160] In addition, a robot arm may be provided in the maintenance device 20, and after the environment in the maintenance device 20 is adjusted to be the same as the environment in the conveying module, the robot arm may be used to adjust and clean the components of the conveying module. In this way, the components provided in the conveying module can be maintained while maintaining the environment in the conveying module. In addition, a maintenance unit that performs operations related to the maintenance of the components of the conveying module may be provided in the storage container 21 of the maintenance device 20.

[0161] In the above-mentioned embodiments, the components installed in the VTM 11 or the EFEM 14 are maintained, but the technology of the present invention is not limited thereto. The maintenance device 20 may also maintain the components in the LLM 13 as long as it is a transport module that transports substrates.

[0162] In addition, in each of the above-mentioned embodiments, one conveying robot is provided in each of the VTM 11 and the EFEM 14, but the technology of the present invention is not limited thereto. As another embodiment, two or more conveying robots may be provided in the VTM 11 and the EFEM 14. Thus, even when maintenance of some of the conveying robots is required, the substrate W can be processed continuously by the other conveying robots, and the processing operation can be avoided from being stopped.

[0163] In addition, it should be understood that the embodiments of the present invention are illustrative and non-restrictive in all aspects. In fact, the above-mentioned embodiments can be implemented in many ways. In addition, the above-mentioned embodiments can also be omitted, replaced, and changed in various ways without departing from the claims and their subject matter.

[0164] In addition, the following supplementary notes are also described with respect to the above-mentioned embodiment.

[0165] (Note 1)

[0166] A maintenance device, used to assist in replacing a conveying robot installed on a conveying module, the maintenance device comprising:

[0167] Trolley;

[0168] a housing having an upper opening and a lower opening and disposed above the trolley;

[0169] a first lifting unit, which is mounted on the trolley and configured to lift the housing between a first upper position and a first lower position, wherein the housing can be connected to the conveying module when located at the first upper position;

[0170] A lower opening and closing mechanism configured to open and close the lower opening;

[0171] a support unit configured to support the transport robot; and

[0172] The second lifting unit is configured to lift the support unit between a second upper position located inside the housing and a second lower position located below the housing when the housing is located at the first upper position.

[0173] (Note 2)

[0174] The maintenance device according to Supplement 1, wherein:

[0175] The device further includes an upper opening and closing mechanism configured to be able to open and close the upper opening.

[0176] (Note 3)

[0177] The maintenance device according to Appendix 1 or 2, wherein:

[0178] The housing has a through hole.

[0179] The internal space of the housing communicates with a dry air supply source via the through hole.

[0180] (Note 4)

[0181] A maintenance device according to any one of Supplementary Notes 1 to 3, wherein:

[0182] The housing has a through hole.

[0183] The internal space of the housing communicates with the exhaust device via the through hole.

[0184] (Note 5)

[0185] A maintenance device, used to assist in replacing a conveying robot installed on a conveying module, the maintenance device comprising:

[0186] A housing having a lower opening;

[0187] a support unit configured to support the transport robot; and

[0188] The lifting unit is configured to be able to lift the support unit between a first position in the housing and a second position below the housing.

[0189] (Note 6)

[0190] The maintenance device according to Supplementary Note 5, wherein:

[0191] The device further includes a lower opening and closing mechanism configured to be able to open and close the lower opening.

[0192] (Note 7)

[0193] The maintenance device according to Appendix 5 or 6, wherein:

[0194] The housing has an upper opening.

[0195] (Note 8)

[0196] The maintenance device according to note 7, wherein:

[0197] The device further includes an upper opening and closing mechanism configured to be able to open and close the upper opening.

[0198] (Note 9)

[0199] The maintenance device according to Supplement 7 or 8, wherein:

[0200] The lifting unit is configured to be able to lift the support unit to a third position located above the housing.

[0201] (Note 10)

[0202] A maintenance device according to any one of Supplementary Notes 5 to 9, wherein:

[0203] The housing has a through hole.

[0204] The internal space of the housing communicates with a dry air supply source via the through hole.

[0205] (Note 11)

[0206] A maintenance device according to any one of Supplementary Notes 5 to 9, wherein:

[0207] The housing has a through hole.

[0208] The internal space of the housing communicates with the exhaust device via the through hole.

[0209] (Note 12)

[0210] A maintenance device, used to assist in replacing a conveying robot installed on a conveying module, the maintenance device comprising:

[0211] A housing having an opening;

[0212] An opening and closing mechanism configured to open and close the opening;

[0213] a support unit configured to support the transport robot; and

[0214] The driving unit is configured to be able to move the supporting unit between a first position inside the housing and a second position outside the housing.

[0215] (Note 13)

[0216] The maintenance device according to Supplementary Note 12, wherein:

[0217] The opening is formed on a side wall of the housing.

[0218] The driving unit is configured to be able to move the supporting unit in a horizontal direction.

[0219] (Note 14)

[0220] The maintenance device according to Supplement 12 or 13, wherein:

[0221] The housing has a through hole.

[0222] The internal space of the housing communicates with a dry air supply source via the through hole.

[0223] (Note 15)

[0224] The maintenance device according to any one of supplementary notes 12 to 14, wherein the housing has a through hole,

[0225] The internal space of the housing communicates with the exhaust device via the through hole.

[0226] Description of Reference Numerals

[0227] G Gate Valve

[0228] W substrate

[0229] 1. Processing system

[0230] 10. Control Unit

[0231] 11 VTM

[0232] 110 Conveyor Robot

[0233] 111 Opening

[0234] 110a Sealing parts

[0235] 110b Peripheral part

[0236] 113 Locking mechanism

[0237] 1130 Actuator

[0238] 1131 Cylinder

[0239] 1132 Pins

[0240] 1132a Small diameter

[0241] 1132b Large diameter part

[0242] 114 Piping

[0243] 115 Connectors

[0244] 115a socket

[0245] 115b plug

[0246] 116 Connector

[0247] 116a plug

[0248] 116b socket

[0249] 117 Valve

[0250] 12 PM

[0251] 120 Opening and closing mechanism

[0252] 13 LLM

[0253] 14 EFEM

[0254] 140 Conveyor Robot

[0255] 141 Guide Rail

[0256] 142 Opening and closing mechanism

[0257] 143 Opening

[0258] 145 Valve

[0259] 146 Connector

[0260] 147 Opening

[0261] 15 Loading device

[0262] 16 Container

[0263] 20 Maintenance device

[0264] 21 Storage Container

[0265] 21a Sealing parts

[0266] 210 Valve

[0267] 211 Piping

[0268] 211a Through hole

[0269] 22 Opening

[0270] 23 Opening and closing mechanism

[0271] 230 Opening and closing mechanism

[0272] 24 Arm

[0273] 25 Jack

[0274] 26 Carts

[0275] 27 Support unit

[0276] 270 Actuator

[0277] 271 Grip

[0278] 30. Conveying unit.

Claims

1. A maintenance device for assisting in the replacement of a conveying robot installed on a conveying module, the maintenance device being characterized in that it comprises: Trolley; a housing having an upper opening and a lower opening and disposed above the trolley; a first lifting unit, which is mounted on the trolley and configured to lift the housing between a first upper position and a first lower position, wherein the housing can be connected to the conveying module when located at the first upper position; A lower opening and closing mechanism configured to open and close the lower opening; a support unit configured to support the conveying robot; and The second lifting unit is configured to lift the support unit between a second upper position located inside the housing and a second lower position located below the housing when the housing is located at the first upper position.

2. The maintenance device according to claim 1, characterized in that: Also includes: An upper opening and closing mechanism is configured to be able to open and close the upper opening.

3. The maintenance device according to claim 1 or 2, characterized in that: The housing has a through hole. The internal space of the housing communicates with a dry air supply source via the through hole.

4. The maintenance device according to claim 1 or 2, characterized in that: The housing has a through hole. The internal space of the housing communicates with the exhaust device via the through hole.

5. A maintenance device for assisting in the replacement of a conveying robot installed on a conveying module, the maintenance device comprising: A housing having a lower opening; a support unit configured to support the conveying robot; and The lifting unit is configured to be able to lift the support unit between a first position in the housing and a second position below the housing.

6. The maintenance device according to claim 5, characterized in that: Also includes: A lower opening and closing mechanism is configured to be able to open and close the lower opening.

7. The maintenance device according to claim 5, characterized in that: The housing has an upper opening.

8. The maintenance device according to claim 7, characterized in that: Also includes: An upper opening and closing mechanism is configured to be able to open and close the upper opening.

9. The maintenance device according to claim 8, characterized in that: The lifting unit is configured to be able to lift the support unit to a third position located above the housing.

10. The maintenance device according to any one of claims 5 to 9, characterized in that: The housing has a through hole. The internal space of the housing communicates with a dry air supply source via the through hole.

11. The maintenance device according to any one of claims 5 to 9, characterized in that: The housing has a through hole. The internal space of the housing communicates with the exhaust device via the through hole.

12. A maintenance device for assisting in the replacement of a conveying robot installed on a conveying module, the maintenance device comprising: A housing having an opening; An opening and closing mechanism configured to open and close the opening; a support unit configured to support the conveying robot; and The driving unit is configured to be able to move the supporting unit between a first position inside the housing and a second position outside the housing.

13. The maintenance device according to claim 12, characterized in that: The opening is formed on a side wall of the housing. The driving unit is configured to be able to move the supporting unit in a horizontal direction.

14. The maintenance device according to claim 12 or 13, characterized in that: The housing has a through hole. The internal space of the housing communicates with a dry air supply source via the through hole.

15. The maintenance device according to claim 12 or 13, characterized in that: The housing has a through hole. The internal space of the housing communicates with the exhaust device via the through hole.

Images