Beam down x-ray conversion device

By designing a beam-down X-ray conversion device with a high atomic number bremsstrahlung target and shielding device, the problem of low conversion efficiency of high-energy X-rays was solved, and the effective conversion of high-energy X-rays and control of the radiation field were achieved, meeting the needs of nuclear industry metrology and irradiation processing.

CN119275076BActive Publication Date: 2025-11-25CHINA INSTITUTE OF ATOMIC ENERGY
View PDF 2 Cites 0 Cited by

Patent Information

Application Number
CN202411267576.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-09-10
Publication Date
2025-11-25
Estimated Expiration
2044-09-10

AI Technical Summary

Technical Problem

Existing technologies have poor high-energy X-ray conversion efficiency, making it impossible to effectively establish MeV-level X-ray radiation fields, and there is a lack of relevant standards.

Method used

Design a beam-down X-ray conversion device, including a bremsstrahlung target and a shielding device. The bremsstrahlung target is made of a high atomic number material. The electron inlet and X-ray outlet are respectively set in different directions of the shielding device. Combined with a drive component and a cooling system, the conversion of X-rays and the control of the radiation field are optimized.

Benefits of technology

It improves X-ray conversion efficiency, enables the generation of high-energy X-rays, establishes MeV-level X-ray radiation fields, meets the needs of nuclear industry metrology and irradiation processing, and improves relevant standards.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119275076B_ABST
    Figure CN119275076B_ABST
Patent Text Reader

Abstract

The embodiment of the present application provides a beam-down X-ray conversion device. The beam-down X-ray conversion device comprises a bremsstrahlung target and a shielding device. The bremsstrahlung target comprises a target body, and the shielding device has an electron incidence port, a containing cavity and an X-ray emission port, the electron incidence port and the X-ray emission port are communicated with the containing cavity respectively, and the bremsstrahlung target is located in the containing cavity; the electron incidence port is located on one side of the shielding device along a first direction, and the X-ray emission port is located on one side of the shielding device along a second direction; wherein the first direction is perpendicular to the second direction. An opening of the electron incidence port is directed to the target body, so that the target body is bombarded by electrons entering the containing cavity from the electron incidence port. An opening of the X-ray emission port is directed to the target body, so that X-rays generated by the target body are emitted out of the containing cavity. The beam-down X-ray conversion device has high conversion efficiency.
Need to check novelty before this filing date? Find Prior Art

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of nuclear technology, in particular to a beam-down X-ray conversion device. BACKGROUND

[0002] X-rays are bremsstrahlung radiation emitted by high-speed charged particles when they hit a substance to slow down. According to the energy level, X-rays can be divided into low-energy, medium-energy and high-energy X-rays. Low-energy and medium-energy X-rays can be generated by an X-ray machine, with the highest energy up to several hundred keV. Low-energy X-rays not only have a profound impact on disciplines such as physics, chemistry, biology and materials science, but also provide doctors with diagnostic evidence. Medium-energy X-rays can be used in the fields of industrial component detection, ray flaw detection, medical radiation therapy, etc. According to the GB / T12162.1 standard document, a continuous spectrum filtered X radiation field with an energy range of about 7keV-250keV can be generated by an X-ray machine, and a fluorescent X radiation reference radiation field with an energy range of 8keV-100keV. However, there is no reference standard for X-ray radiation field at MeV energy level.

[0003] In the related art, high-energy X-rays are generated by high-energy electrons emitted by an electron accelerator. Electron accelerators have been widely used in food preservation, sterilization of medical supplies, treatment of three wastes, material modification and other fields. However, the conversion efficiency of high-energy X-rays generated by high-energy electron targeting in the related art is poor. SUMMARY

[0004] Therefore, the main purpose of the embodiments of the present application is to provide a beam-down X-ray conversion device with good conversion efficiency.

[0005] To achieve the above-mentioned purpose, the technical scheme of the embodiments of the present application is as follows:

[0006] The embodiments of the present application provide a beam-down X-ray conversion device, which comprises:

[0007] A bremsstrahlung target, the bremsstrahlung target comprising a target body;

[0008] A shielding device, the shielding device having an electron incident port, a containing cavity and an X-ray exit port, the electron incident port and the X-ray exit port being in communication with the containing cavity respectively, and the bremsstrahlung target being located in the containing cavity; the electron incident port is located on one side of the shielding device along a first direction, and the X-ray exit port is located on one side of the shielding device along a second direction; wherein the first direction is perpendicular to the second direction;

[0009] The opening of the electron incident port faces the target body, so that the electrons entering the containing cavity from the electron incident port can hit the target body;

[0010] The opening of the X-ray exit port faces the target body, so that the X-rays generated by the target body exit the accommodating cavity.

[0011] In one embodiment, the bremsstrahlung target comprises a target shell, the target shell is inclined relative to the plane where the electron incident port is located and the plane where the X-ray exit port is located, and the target shell has a mounting cavity on one side close to the electron incident port and the X-ray exit port, and the target body is arranged in the mounting cavity.

[0012] In one embodiment, the target body is a tungsten target, and the material of the tungsten target is tungsten alloy; and / or,

[0013] The target shell is an aluminum shell.

[0014] In one embodiment, the bremsstrahlung target is rotatably arranged in the accommodating cavity, and the beam-down X-ray conversion device further comprises a driving assembly, at least a part of the driving assembly is located in the accommodating cavity, and the driving assembly is drivingly connected with the bremsstrahlung target to drive the bremsstrahlung target to rotate.

[0015] In one embodiment, the bremsstrahlung target has an initial state in a mounting position, when the bremsstrahlung target is in the mounting position, the bremsstrahlung target is inclined relative to the plane where the electron incident port is located and the plane where the X-ray exit port is located, and the driving assembly can drive the bremsstrahlung target to rotate in a first rotation direction and a second rotation direction; wherein the first rotation direction and the second rotation direction are opposite;

[0016] The rotation range of the bremsstrahlung target in the first rotation direction is greater than 0° and less than or equal to 45°; and / or,

[0017] The rotation range of the bremsstrahlung target in the second rotation direction is greater than 0° and less than or equal to 45°.

[0018] In one embodiment, the bremsstrahlung target comprises a target shell, the target body is arranged on the target shell, and the beam-down X-ray conversion device comprises a cooling coil, the cooling coil has a cooling water channel, and the cooling coil is arranged on the side of the target shell away from the target body.

[0019] In one embodiment, the shielding device comprises a shielding shell, the shielding shell comprises a shielding chamber and a plurality of lead bricks, the shielding chamber has the electron incident port, the accommodating cavity and the X-ray exit port, and the outer circumferential side of the shielding chamber is respectively provided with the lead bricks; and / or,

[0020] The opening cross section of the X-ray exit port gradually increases towards the outside of the accommodating cavity, and the inclination angle of the inner wall surface of the X-ray exit port relative to the central axis is greater than or equal to 4° and less than or equal to 12°; and / or,

[0021] The shielding device includes a shielding aperture, which is disposed on the side of the receiving cavity near the X-ray outlet. The shielding aperture has a beam-limiting aperture that is correspondingly connected to the X-ray outlet and faces away from the X-ray outlet. The opening cross-section of the beam-limiting aperture gradually increases, and the inclination angle of the inner wall surface of the beam-limiting aperture relative to the central axis is greater than or equal to 4° and less than or equal to 12°.

[0022] In one embodiment, the beam-down X-ray conversion device further includes a first base frame, the first base frame including a support frame and a lifting bracket disposed on the support frame, the shielding device being disposed on the lifting bracket, and the lifting bracket being movable relative to the support frame in the height direction.

[0023] In one embodiment, the first base frame further includes a screw jack, and the support frame and the lifting bracket are slidably connected via the screw jack;

[0024] The first base frame further includes a handwheel, which is disposed on one side of the lifting bracket and driven by the screw jack. The handwheel drives the screw jack to move, causing the lifting bracket to slide along the height direction; and / or,

[0025] The first base frame also includes a commutator, which cooperates with the screw jack to switch the lifting support between rising and falling.

[0026] In one embodiment, the beam-down X-ray conversion device further includes a second base frame and an ionization chamber clamping device, wherein the ionization chamber clamping device is disposed on the second base frame;

[0027] One of the ionization chamber clamping device and the second base frame has a sliding groove, and the other has a sliding rail. The sliding rail extends horizontally and is perpendicular to the orientation of the X-ray outlet. The sliding groove and the sliding rail are slidably engaged so that the ionization chamber clamping device can slide relative to the second base frame.

[0028] This application provides a beam-down X-ray conversion device, which includes a bremsstrahlung target and a shielding device. The electron entrance and X-ray exit of the shielding device are respectively connected to a containment cavity, and the bremsstrahlung target is located inside the containment cavity. Therefore, on the one hand, the bremsstrahlung target has a large atomic number, producing high-intensity X-rays, resulting in high X-ray conversion efficiency and good conversion effect. On the other hand, by setting up the shielding device, leakage rays can be shielded while limiting the range of the generated X-ray radiation field as needed, thereby improving the X-ray conversion effect. Furthermore, the electron entrance is located on one side of the shielding device along a first direction, and the X-ray exit is located on one side of the shielding device along a second direction, with the opening of the electron entrance facing the target and the opening of the X-ray exit facing the target. This facilitates high-energy electrons emitted from the electron accelerator entering the containment cavity through the electron entrance and striking the target, allowing the X-rays generated by the target to exit the containment cavity through the X-ray exit, thereby establishing an X-ray radiation field and achieving a better X-ray conversion effect. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of a beam-down X-ray conversion device according to an embodiment of this application; the figure shows a limiting device for limiting the position of an electron accelerator;

[0030] Figure 2 for Figure 1 A magnified view of a section at point A in the middle;

[0031] Figure 3 for Figure 1 A magnified view of a section at point B in the middle;

[0032] Figure 4 for Figure 1 A structural schematic diagram of the first base frame;

[0033] Figure 5 for Figure 4 A schematic diagram of the first base frame after the lifting support is removed;

[0034] Figure 6 for Figure 1 A schematic diagram showing the working relationship between the brittle radiation target, shielding device, and drive assembly;

[0035] Figure 7 for Figure 6 A schematic diagram of the structure of the drive component;

[0036] Figure 8 for Figure 6 C-axis sectional view;

[0037] Figure 9 for Figure 8 Schematic diagram of the fit between the medium-strength radiation target and the cooling coil;

[0038] Figure 10 for Figure 6 Cross-sectional view of the central shielding aperture.

[0039] Explanation of reference numerals in the attached figures

[0040] 10. Bremigration target; 11. Target body; 12. Target shell; 20. Shielding device; 20a. Electron entrance; 20b. Receiving cavity; 20c. X-ray exit; 21. Shielding shell; 211. Shielding chamber; 212. Lead brick; 22. Shielding aperture; 22a. Beam limiting aperture; 30. Drive assembly; 40. Cooling coil; 50. First base frame; 51. Support frame; 52. Lifting bracket; 53. Screw jack; 60. Second base frame; 70. Ionization chamber clamping device; 80. Limiting device. Detailed Implementation

[0041] In this application, the orientation or positional relationship of "first direction" and "second direction" is based on the appendix. Figure 6 The orientation or positional relationship shown is for illustrative purposes only and is not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this application.

[0042] One embodiment of this application provides a beam-down X-ray conversion device; please refer to [link to relevant documentation]. Figure 1 , Figure 2 and Figure 8 The beam-down X-ray conversion device includes a bremsstrahlung target 10 and a shielding device 20.

[0043] Please see Figure 6 and Figure 8 The bremsstrahlung target 10 includes a target body 11, and the shielding device 20 has an electron inlet 20a, a receiving cavity 20b, and an X-ray outlet 20C. The electron inlet 20a and the X-ray outlet 20C are respectively connected to the receiving cavity 20b, and the bremsstrahlung target 10 is located inside the receiving cavity 20b. The electron inlet 20a is located on one side of the shielding device 20 along a first direction, and the X-ray outlet 20C is located on one side of the shielding device 20 along a second direction. The first direction is perpendicular to the second direction.

[0044] The opening of the electron inlet 20a faces the target 11 so that electrons entering the receiving cavity 20b from the electron inlet 20a can bombard the target 11.

[0045] The opening of the X-ray exit port 20C faces the target 11 so that the X-rays generated by the target 11 can exit the receiving cavity 20b.

[0046] Specifically, the beam-down X-ray conversion device of this application can generate various types of X-rays. For ease of description, this application uses the example of a beam-down X-ray conversion device receiving high-energy electrons from an electron accelerator and then generating high-energy X-rays. Here, high-energy X-rays refer to X-rays with energy levels in the MeV range.

[0047] For products with high irradiation density, significant thickness, or large volume, different high-energy X-rays are required. Higher-energy X-rays can be obtained by bombarding a heavy metal target with higher-energy electrons. Therefore, the key to generating higher-energy X-rays lies in increasing the energy of the electrons. Since electron accelerators can increase electron energy to tens of MeV, referencing the structure of an X-ray machine, high-energy electrons accelerated by an electron accelerator are used to bombard the target material, generating high-energy X-rays through bremsstrahlung. The generated X-rays have higher penetrating power and can be used for products with higher irradiation density, greater thickness, and larger volume, with wide applications in irradiation processing, container inspection, and calibration testing.

[0048] The target 11 of the bremsstrahlung target 10 is used to generate X-rays, and its target material is a heavy element with a high atomic number and a high melting point. This is because the higher the atomic number, the higher the intensity of the generated X-rays, and thus the higher the conversion efficiency of the target 11. Since most of the electron beam power is manifested in the form of ionization energy loss, the target 11 generates significant heat, resulting in a relatively low overall X-ray conversion efficiency. Therefore, the target material is required to have high-temperature resistance.

[0049] For example, the target 11 is a tungsten target, and the material of the tungsten target is a tungsten alloy. Since the melting point of tungsten (W) is 3140℃, which is higher than that of tantalum (Ta) (2996℃) and lead (Pb) (327℃), choosing a tungsten target as the bremsstrahlung target 10 can further improve the conversion efficiency.

[0050] The specific elemental composition of the tungsten alloy can be determined according to the actual situation. For example, the composition of the tungsten alloy is 95% tungsten, 3.5% nickel and 1.5% Fe.

[0051] The shielding device 20 is used to mount the bremsstrahlung target 10 to provide shielding during the generation of X-rays by the bremsstrahlung target 10 and to limit the range of the generated radiation field.

[0052] The electron entrance 20a of the shielding device 20 is used to receive high-energy electrons from the electron accelerator. It should be noted that the type of electron accelerator used in conjunction with the down-beam X-ray conversion device is not limited, such as the DZ-12 / 4 multi-energy linear electron accelerator.

[0053] The cavity 20b is used to house the bremsstrahlung target 10, and the X-ray exit port 20C is used to allow the high-energy X-rays generated by the bremsstrahlung target 10 to exit the cavity 20b.

[0054] The electron entrance 20a and the X-ray exit 20C are not located on opposite sides of the same direction in the shielding device 20. In fact, one of the electron entrance 20a and the X-ray exit 20C is located on one side of the shielding device 20 along the height direction, while the other is located on one side of the shielding device 20 along the horizontal direction. This allows for better facilitation of both high-energy electron bombardment of the target 11 and the emission of high-energy X-rays generated by the target 11.

[0055] In the beam-down X-ray conversion apparatus of this application embodiment, on the one hand, the bremsstrahlung target 10 has a large atomic number, resulting in high intensity X-rays and thus high X-ray conversion efficiency and good conversion effect. On the other hand, by setting up the shielding device 20, leakage rays can be shielded while the range of the generated X-ray radiation field can be limited as needed, thereby improving the X-ray conversion effect. Furthermore, the electron inlet 20a is located on one side of the shielding device 20 along the first direction, and the X-ray outlet 20C is located on one side of the shielding device 20 along the second direction. The opening of the electron inlet 20a faces the target 11, and the opening of the X-ray outlet 20C faces the target 11. Thus, high-energy electrons emitted from the electron accelerator can easily enter the receiving cavity 20b through the electron inlet 20a and hit the target 11, causing the X-rays generated by the target 11 to exit the receiving cavity 20b through the X-ray outlet 20C, thereby establishing an X-ray radiation field and achieving a better X-ray conversion effect.

[0056] Therefore, the beam-down X-ray conversion device of this application embodiment, based on the method of generating high-energy electrons by electron accelerators to produce high-energy X-rays, can be used to establish a high-energy X-ray radiation field. MeV-level X-ray radiation fields can be established to facilitate the study of their dosimetric characteristics, thereby enabling the establishment of MeV-level energy X-ray standard radiation fields and the improvement of relevant standards. The establishment of high-energy pulsed X-ray radiation fields not only improves the MeV-level X-ray radiation field reference standards but also provides support for nuclear industry metrology and calibration, as well as radiation metrology testing technologies such as high-energy X-ray irradiation processing and container inspection.

[0057] In one embodiment, please refer to Figure 8 The bremsstrahlung target 10 includes a target shell 12, which is inclined relative to the plane where the electron inlet 20a and the X-ray outlet 20C are located. The side of the target shell 12 closest to the electron inlet 20a and the X-ray outlet 20C has a mounting cavity, and the target body 11 is disposed in the mounting cavity.

[0058] In other words, the target shell 12 is tilted relative to the sides of the shielding device 20 that have the electron inlet 20a and the X-ray outlet 20C, respectively. By tilting the target shell 12, the electron inlet 20a and the X-ray outlet 20C can be better aligned with the target 11, so that high-energy electrons can bombard the target material to generate high-energy X-rays.

[0059] The specific shape of the target shell 12 can be set according to the actual situation. For example, the target shell 12 can be disc-shaped with a diameter of 10cm and a thickness of 5mm.

[0060] The material of the target shell 12 can also be set according to the actual situation. For example, the target shell 12 can be made of aluminum. Using aluminum alloy material can facilitate heat transfer in the target shell 12, thereby facilitating heat dissipation of the target material.

[0061] In one embodiment, please refer to Figure 6 to Figure 8 The bremsstrahlung target 10 is rotatably disposed within the receiving cavity 20b. The down-beam X-ray conversion device also includes a drive assembly 30, at least a portion of which is located within the receiving cavity 20b and is drivenly connected to the bremsstrahlung target 10 to drive the bremsstrahlung target 10 to rotate. This allows for adjustable angle of the bremsstrahlung target 10, further improving conversion efficiency.

[0062] Specifically, once the positions of the electron entrance 20a and the X-ray exit 20C are determined, the bremsstrahlung target 10 has an optimal installation position within the receiving cavity 20b, enabling higher conversion efficiency of high-energy X-rays. Furthermore, for different bremsstrahlung targets 10 and different X-ray radiation field establishment requirements, the bremsstrahlung target 10 can be rotated via the drive assembly 30 to adjust its specific position, thereby meeting actual needs.

[0063] The specific setup of the bremsstrahlung target 10 is not limited.

[0064] For example, the bremsstrahlung target 10 has an initial state in its installation position. When the bremsstrahlung target 10 is in its installation position, it is tilted relative to the plane of the electron entrance 20a and the plane of the X-ray exit 20C. The drive assembly 30 can drive the bremsstrahlung target 10 to rotate along a first rotation direction and a second rotation direction, wherein the first rotation direction and the second rotation direction are opposite. Thus, after the bremsstrahlung target 10 is installed in the receiving cavity 20b, it can be rotated in different directions as needed to adjust the specific position of the bremsstrahlung target 10.

[0065] In other words, the bremsstrahlung target 10 has a fixed initial installation position after being installed into the receiving cavity 20b. In this position, the drive assembly 30 can drive the bremsstrahlung target 10 to rotate in both directions (i.e., the first rotation direction and the second rotation direction). This allows for better angle adjustment of the bremsstrahlung target 10.

[0066] It should be noted that the specific rotation angle of the bremsstrahlung target 10 can be determined according to the actual situation.

[0067] For example, the bremsstrahlung target 10 has a rotation range greater than 0° and less than or equal to 45° along the first rotation direction. That is, the bremsstrahlung target 10 can rotate within a range of 0° to 45° along the first rotation direction. Depending on the actual situation, the bremsstrahlung target 10 can rotate and stop at any position corresponding to any angle. The rotation accuracy of the bremsstrahlung target 10 can be set according to the actual situation; for example, the rotation accuracy of the bremsstrahlung target 10 is ±1°.

[0068] For example, the bremsstrahlung target 10 has a rotation range greater than 0° and less than or equal to 45° along the second rotation direction. Along the second rotation direction, the bremsstrahlung target 10 can rotate within a range of 0° to 45°. Depending on the actual situation, the bremsstrahlung target 10 can rotate and stop at any position corresponding to any angle. The rotation accuracy of the bremsstrahlung target 10 can be set according to the actual situation; for example, the rotation accuracy of the bremsstrahlung target 10 is ±1°.

[0069] In one embodiment, the specific structure of the driving component 30 is not limited.

[0070] Exemplarily, the drive assembly 30 includes a drive motor and a target shaft motor mount. The shielding device 20 has a communication port on one side along the horizontal direction. The body of the drive motor is located outside the shielding device 20. The drive shaft of the drive motor passes through the communication port and extends into the receiving cavity 20b to drively connect with the bremsstrahlung target 10. The body of the drive motor and the shielding device 20 are spaced apart, and the target shaft motor mount is located at the space and is connected to both the body of the drive motor and the shielding device 20.

[0071] The specific shape of the target shaft motor mount is not limited. For example, the target shaft motor mount includes a first connecting plate, a second connecting plate, and a support plate. The first connecting plate is attached to the body of the drive motor, the second connecting plate is attached to the outer wall of the shielding device 20, and the support plate is located between the first and second connecting plates, with the opposite ends of the support plate connected to the bottom ends of the first and second connecting plates, respectively. This greatly improves the connection effect of the support plate to the first and second connecting plates, making the connection between the drive motor body and the shielding device 20 more stable.

[0072] In one embodiment, please refer to Figure 9The bremsstrahlung target 10 includes a target shell 12, a target body 11 disposed on the target shell 12, and a beam X-ray conversion device including a cooling coil 40. The cooling coil 40 has cooling water channels and is disposed on the side of the target shell 12 away from the target body 11. This further improves the heat dissipation effect of the target body 11, preventing the target body 11 from overheating and affecting the conversion effect and structure.

[0073] Specifically, the cooling coil 40 is a spiral cooling pipe structure coiled around the side of the target shell 12 opposite to the target body 11. It contains cooling water channels. In fact, one end of the cooling coil 40 is a water inlet for cooling water to enter the cooling coil 40 and flow along the cooling water channels, thereby cooling the bremsstrahlung target 10. The other end of the cooling coil 40 is a water outlet for cooling water to flow out, thus carrying away the heat dissipated by the target body 11.

[0074] It should be noted that the cooling coil 40 needs to be used in conjunction with an external cooling device. For example, the water inlet of the cooling coil 40 can be connected to an external chiller unit to provide cooling water.

[0075] In one specific embodiment, the external chiller unit can maintain the tungsten target temperature below 50 degrees Celsius when the electron beam power is at its highest and the heat generation power is 420W. The water chiller has a cooling power of more than 2500W, a cooling capacity of 2.8kW, and an input power of 1.1kW.

[0076] In one embodiment, please refer to Figure 6 to Figure 8 The shielding device 20 includes a shielding shell 21, which comprises a shielding chamber 211 and multiple lead bricks 212. The shielding chamber 211 has an electron entrance 20a, a receiving cavity 20b, and an X-ray exit 20C. Lead bricks 212 are respectively arranged on the outer periphery of the shielding chamber 211. Therefore, a good shielding effect can be achieved, effectively shielding the scattered X-rays generated after high-energy electrons bombard the target 11.

[0077] Specifically, the material of the shielding room 211 is not limited, such as the shielding room 211 being a fixed frame structure made of stainless steel.

[0078] Lead bricks 212 are installed around the shielding room 211, which can achieve a good shielding effect.

[0079] The specific shape of shielded room 211 is not limited.

[0080] For example, the shielding chamber 211 has a hollow cube structure, the internal cavity 20b is 20cm×20cm×20cm in size, the lead brick 212 is 7cm thick, and the electron entrance 20a is a cylindrical opening with a diameter of 5cm.

[0081] In one embodiment, the opening cross-section of the X-ray exit port 20C gradually increases towards the outer side of the receiving cavity 20b, and the inclination angle of the inner wall surface of the X-ray exit port 20C relative to the central axis is greater than or equal to 4° and less than or equal to 12°. This facilitates X-ray emission, thereby better establishing the X-ray radiation field.

[0082] Specifically, since the X-rays generated by the target 11 are not all emitted horizontally, but rather at a certain angle to the horizontal direction, the X-ray exit port 20C, with its gradually increasing cross-section, better facilitates the exit of X-rays from the receiving cavity 20b.

[0083] The tilt angle of the inner wall surface of the X-ray exit port 20C relative to the central axis refers to the angle between the edge line of the inner wall surface of the X-ray exit port 20C and the horizontal direction along the height direction. Its range is between 4° and 12°, for example, 4°, 6°, 8° or 12°.

[0084] The X-ray exit port 20C can be either conical or frustum-shaped.

[0085] The specific dimensions of the X-ray exit port 20C are not limited. For example, the radius of the side of the X-ray exit port 20C closest to the cavity 20b is 2.35 cm, and the radius of the side of the X-ray exit port 20C away from the cavity 20b is 3.09 cm.

[0086] In one embodiment, please refer to Figure 6 and Figure 10 The shielding device 20 includes a shielding aperture 22, which is disposed on the side of the receiving cavity 20b near the X-ray exit port 20C. The shielding aperture 22 has a beam-limiting aperture 22a, which is correspondingly connected to the X-ray exit port 20C. On the side away from the X-ray exit port 20C, the opening cross-section of the beam-limiting aperture 22a gradually increases, and the inclination angle of the inner wall surface of the beam-limiting aperture 22a relative to the central axis is greater than or equal to 4° and less than or equal to 12°. Therefore, it can correspond to the X-ray exit port 20C, facilitating the establishment of the X-ray radiation field.

[0087] Specifically, the shielding aperture 22 is a cylindrical design with a truncated cone inside, and its specific material is not limited. For example, the material of the shielding aperture 22 is tungsten alloy.

[0088] The shielding aperture 22 may include multiple aperture structures. For example, the shielding aperture 22 may include six aperture structures, from the side near the X-ray exit port 20C to the side away from the X-ray exit port 20C. The radii of the upper and lower bottom surfaces of each aperture structure are 1.79cm and 2.00cm, 2.00cm and 2.21cm, 2.21cm and 2.42cm, 2.42cm and 2.63cm, 2.63cm and 2.84cm, and 2.84cm and 3.05cm, respectively.

[0089] The center line of the opening of the shielding aperture 22 is collinear with the center line of the X-ray exit port 20C.

[0090] In one embodiment, please refer to Figure 1 and Figure 4 The beam-down X-ray conversion device also includes a first base frame 50, which includes a support frame 51 and a lifting bracket 52 mounted on the support frame 51. The shielding device 20 is mounted on the lifting bracket 52, which can move relative to the support frame 51 in the height direction. This facilitates the lifting of the shielding device 20 in the height direction to meet the height requirements of the shielding device 20 under different experimental conditions.

[0091] It should be noted that the connection method between the lifting bracket 52 and the support frame 51 is not limited, and can be detachably connected to facilitate the disassembly of the lifting bracket 52 and the support frame 51.

[0092] In addition to supporting the lifting support 52 and the shielding device 20, the support frame 51 also needs to work in conjunction with the electron accelerator.

[0093] For example, an electron accelerator includes a conveyor belt plane, and a support frame 51 is mounted on the conveyor belt plane.

[0094] For example, the conveyor belt has a plane height of 780mm, a width of 1240mm, and is 640mm from the walls on both sides. The inner reducer is 200mm from the wall, and the distance from the X-ray outlet 20C is 470mm. The support frame 51 has a load-bearing capacity of 450kg, and the platform height of the support frame 51 is 920mm, and the width is 1500mm.

[0095] The specific manner in which the lifting bracket 52 can move relative to the support frame 51 is not limited.

[0096] For example, the first base frame 50 also includes a screw jack 53, and the support frame 51 and the lifting bracket 52 are slidably connected by the screw jack 53.

[0097] The first base frame 50 also includes a handwheel, which is located on one side of the lifting bracket 52 and is driven by the screw jack 53. The handwheel drives the screw jack 53 to move, causing the lifting bracket 52 to slide along the height direction. Thus, by turning the handwheel, the user can make the lifting bracket 52 slide relative to the support frame 51 under the transmission action of the screw jack 53, thereby realizing the lifting and lowering of the shielding device 20 along the height direction.

[0098] It should be noted that the first base frame 50 may include only one screw jack 53 or multiple screw jacks 53.

[0099] In addition, the lifting stroke of the lifting bracket 52 is unlimited, such as 0-120mm.

[0100] In one specific embodiment, the support frame 51 is made of rectangular tube welded together, with a solid and reliable structure. The top is welded with a steel plate and the whole is painted. The lifting bracket 52 is detachable and can be manually raised and lowered.

[0101] In one embodiment, please refer to Figure 1 , Figure 4 and Figure 5 The first base frame 50 also includes a screw jack 53, and the support frame 51 and the lifting bracket 52 are slidably connected through the screw jack 53; the first base frame 50 also includes a commutator, which cooperates with the screw jack 53 to switch the lifting bracket 52 between rising and falling.

[0102] Specifically, the commutator is used in conjunction with the screw jack 53. By setting the commutator, the lifting bracket 52 can be switched from the rising state to the falling state, and the lifting bracket 52 can also be switched from the falling state to the rising state.

[0103] In one embodiment, please refer to Figure 1 and Figure 3 The beam-down X-ray conversion device also includes a second base frame 60 and an ionization chamber clamping device 70, which is mounted on the second base frame 60.

[0104] One of the ionization chamber clamping device 70 and the second base frame 60 has a sliding groove, and the other has a sliding rail. The sliding rail extends horizontally and its direction of extension is perpendicular to the orientation of the X-ray exit port 20C. The sliding groove and the sliding rail are slidably engaged, allowing the ionization chamber clamping device 70 to slide relative to the second base frame 60. This makes the position of the ionization chamber clamping device 70 adjustable, facilitating the adjustment of the specific position of the ionization chamber.

[0105] Specifically, the ionization chamber clamping device 70 is used to clamp the ionization chamber.

[0106] Depending on the actual situation, the ionization chamber clamping device 70 may have a sliding groove, and the second base frame 60 may have a sliding rail. Alternatively, the ionization chamber clamping device 70 may have a sliding rail, and the second base frame 60 may have a sliding groove.

[0107] Thus, by inserting the slide rail into the slide groove, the ionization chamber clamping device 70 and the second base frame 60 can be slidably engaged, thereby facilitating the adjustment of the specific position of the ionization chamber in the horizontal direction.

[0108] In one specific embodiment, the second base frame 60 is designed to avoid the plane of the conveyor belt. The second base frame 60 is made of aluminum profiles, equipped with casters at the bottom, and has an ionization chamber clamping device 70 on the top. It can be electrically controlled to move in the horizontal plane and in the direction perpendicular to the X-ray beam. The movement range is the entire width of the conveyor belt, the stroke is 0-1240mm, the movement accuracy is ±1mm, and the repeatability is 0.1mm.

[0109] In one embodiment, the down-beam X-ray conversion apparatus further includes a processor, a drive assembly 30, and a drive device. The drive assembly 30 is driven to the bremsstrahlung target 10, and the drive device is driven to the ionization chamber clamping device 70. The processor is signal-connected to both the drive assembly 30 and the drive device.

[0110] In fact, the processor includes an equipment information display component and an equipment control component. The equipment information display component can display the current target angle of the bremsstrahlung target 10 and the horizontal position of the ionization chamber clamping device 70. The equipment control component can control the horizontal position of the ionization chamber clamping device 70 and the target angle of the bremsstrahlung target 10. Thus, remote control of the X-ray conversion process can be realized.

[0111] For example, the bremsstrahlung target 10 has a rotation angle range of 0–45° with an adjustable accuracy of 1°, and the ionization chamber support has a movement range of 0–1000 mm with a movement accuracy of 0.1 mm. The processor can control the specific positions of the bremsstrahlung target 10 and the ionization chamber clamping device 70.

[0112] In some embodiments, the ionization chamber clamping device 70 includes a guide post and a clamping assembly, the guide post extending in the height direction, and the clamping assembly slidably disposed on the guide post for clamping the ionization chamber.

[0113] In the description of this application, the references to terms such as "in one embodiment," "in some embodiments," "in a specific embodiment," or "exemplary," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the embodiments of this application. In this application, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine the different embodiments or examples described in this application, as well as the features of the different embodiments or examples.

[0114] The above are merely preferred embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application are included within the protection scope of this application.

Claims

1. A beam-down X-ray conversion device, characterized in that, include: A bremsstrahlung target, the bremsstrahlung target comprising a target body; A shielding device has an electron inlet, a receiving cavity, and an X-ray outlet. The electron inlet and the X-ray outlet are respectively connected to the receiving cavity, and the bremsstrahlung target is located inside the receiving cavity. The electron inlet is located on one side of the shielding device along a first direction, and the X-ray outlet is located on one side of the shielding device along a second direction. The first direction is perpendicular to the second direction. The opening of the electron entrance faces the target so that electrons entering the receiving cavity from the electron entrance bombard the target. The opening of the X-ray exit port faces the target so that the X-rays generated by the target can exit the receiving cavity; The bremsstrahlung target is rotatably disposed within the receiving cavity. The down-beam X-ray conversion device further includes a driving assembly, at least a portion of which is located within the receiving cavity and is drivenly connected to the bremsstrahlung target to drive the bremsstrahlung target to rotate. The bremsstrahlung target has an initial state in the installation position. When the bremsstrahlung target is in the installation position, the bremsstrahlung target is tilted relative to the plane where the electron entrance is located and the plane where the X-ray exit is located. The driving component can drive the bremsstrahlung target to rotate along a first rotation direction and a second rotation direction; wherein the first rotation direction and the second rotation direction are opposite. The bremsstrahlung target rotates in the first rotation direction with a range greater than 0° and less than or equal to 45°; and / or, the bremsstrahlung target rotates in the second rotation direction with a range greater than 0° and less than or equal to 45°.

2. The beam-down X-ray conversion device according to claim 1, characterized in that, The bremsstrahlung target includes a target shell, which is inclined relative to the plane of the electron entrance and the plane of the X-ray exit. The target shell has a mounting cavity on the side near the electron entrance and the X-ray exit, and the target body is disposed in the mounting cavity.

3. The beam-down X-ray conversion device according to claim 2, characterized in that, The target is a tungsten target, and the tungsten target is made of tungsten alloy; and / or, the target shell is an aluminum shell.

4. The beam-down X-ray conversion device according to claim 1, characterized in that, The bremsstrahlung target includes a target shell, the target body is disposed on the target shell, and the down-beam X-ray conversion device includes a cooling coil with cooling water channels, and the cooling coil is disposed on the side of the target shell opposite to the target body.

5. The beam-down X-ray conversion device according to any one of claims 1-3, characterized in that, The shielding device includes a shielding housing, which comprises a shielding chamber and a plurality of lead bricks. The shielding chamber has the electron entrance, the receiving cavity, and the X-ray exit. The lead bricks are respectively arranged on the outer periphery of the shielding chamber; and / or... Towards the outer side of the receiving cavity, the opening cross-section of the X-ray exit gradually increases, and the inclination angle of the inner wall surface of the X-ray exit relative to the central axis is greater than or equal to 4° and less than or equal to 12°; and / or, The shielding device includes a shielding aperture, which is disposed on the side of the receiving cavity near the X-ray exit port. The shielding aperture has a beam-limiting aperture, which is correspondingly connected to the X-ray exit port and faces away from the X-ray exit port. The opening cross-section of the beam-limiting aperture gradually increases, and the inclination angle of the inner wall surface of the beam-limiting aperture relative to the central axis is greater than or equal to 4° and less than or equal to 12°.

6. The beam-down X-ray conversion device according to any one of claims 1-3, characterized in that, The beam-down X-ray conversion device also includes a first base frame, which includes a support frame and a lifting bracket mounted on the support frame. The shielding device is mounted on the lifting bracket, and the lifting bracket is movable relative to the support frame in the height direction.

7. The beam-down X-ray conversion device according to claim 6, characterized in that, The first base frame also includes a screw jack, and the support frame and the lifting bracket are slidably connected through the screw jack; The first base frame also includes a handwheel, which is located on one side of the lifting bracket and is driven by the screw jack. The handwheel drives the screw jack to move, so that the lifting bracket slides along the height direction. And / or, The first base frame also includes a commutator, which cooperates with the screw jack to switch the lifting support between rising and falling.

8. The beam-down X-ray conversion device according to any one of claims 1-3, characterized in that, The beam-down X-ray conversion device also includes a second base frame and an ionization chamber clamping device, wherein the ionization chamber clamping device is mounted on the second base frame; One of the ionization chamber clamping device and the second base frame has a sliding groove, and the other has a sliding rail. The sliding rail extends horizontally and is perpendicular to the orientation of the X-ray outlet. The sliding groove and the sliding rail are slidably engaged so that the ionization chamber clamping device can slide relative to the second base frame.

Citation Information

Patent Citations

  • X ray target assembly for scanning electron microscope (SEM)

    CN108155079A

  • X-ray tube and method for enhancing radiation angle thereof

    CN109037013A